CN109443630B - Pressure sensor based on QLED light-emitting device - Google Patents
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- 239000000758 substrate Substances 0.000 claims abstract description 88
- 239000002346 layers by function Substances 0.000 claims abstract description 32
- 238000002347 injection Methods 0.000 claims abstract description 12
- 239000007924 injection Substances 0.000 claims abstract description 12
- 230000005525 hole transport Effects 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims description 27
- 238000004528 spin coating Methods 0.000 claims description 27
- 239000000243 solution Substances 0.000 claims description 24
- 238000002360 preparation method Methods 0.000 claims description 17
- 239000002096 quantum dot Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- 239000002105 nanoparticle Substances 0.000 claims description 5
- 229920000144 PEDOT:PSS Polymers 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 4
- 239000011787 zinc oxide Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000002070 nanowire Substances 0.000 claims description 3
- 239000005022 packaging material Substances 0.000 claims description 3
- 238000009832 plasma treatment Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 abstract description 5
- 238000005401 electroluminescence Methods 0.000 abstract description 3
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
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- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
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Abstract
本发明提出一种基于QLED发光器件的压力传感器,包括接电基板、功能基板;接电基板和功能基板均为PET柔性基板;接电基板上覆有电极层;功能基板上覆有ITO层;所述ITO层上覆有功能层;所述功能层包括多个分层;功能层的多个分层自下而上依次包括空穴注入层、空穴传输层、发光层和电子传输层;所述功能层以空穴注入层与功能基板的ITO层接触;功能层的电子传输层与电极层紧邻;当接电基板或功能基板受压时,受压部位形变使得电极层与电子传输层的接触状态变化,电极层电荷到达发光层使得受压部位的发光层发光;本发明结合了QLED发光器件的电致发光特性,使得在传导压力的同时通过光信号来完成压力位置的实时监控,重复性高、响应速度快、可靠性强、结构简单。
The invention provides a pressure sensor based on a QLED light-emitting device, comprising an electrical connection substrate and a functional substrate; the electrical connection substrate and the functional substrate are both PET flexible substrates; the electrical connection substrate is covered with an electrode layer; the functional substrate is covered with an ITO layer; The ITO layer is covered with a functional layer; the functional layer includes multiple layers; the multiple layers of the functional layer sequentially include a hole injection layer, a hole transport layer, a light-emitting layer and an electron transport layer from bottom to top; The functional layer is in contact with the ITO layer of the functional substrate through the hole injection layer; the electron transport layer of the functional layer is closely adjacent to the electrode layer; when the electrical substrate or the functional substrate is pressed, the pressed part deforms so that the electrode layer and the electron transport layer are deformed. When the contact state changes, the charge of the electrode layer reaches the light-emitting layer, so that the light-emitting layer of the pressure-receiving part emits light; the present invention combines the electroluminescence characteristics of the QLED light-emitting device, so that the real-time monitoring of the pressure position is completed through the light signal while conducting the pressure. High repeatability, fast response, strong reliability and simple structure.
Description
技术领域technical field
本发明涉及传感器技术领域,尤其是一种基于QLED发光器件的压力传感器。The invention relates to the technical field of sensors, in particular to a pressure sensor based on a QLED light-emitting device.
背景技术Background technique
传感器是一种检测装置,能感受到被测量的信息,并能将感受到的信息,按一定规律变换成为电信号或其他所需形式的信息输出,以满足信息的传输、处理、存储、显示、记录和控制等要求。压力传感器是工业实践中最为常用的一种传感器,其广泛应用于各种工业自控环境,涉及水利水电、铁路交通、智能建筑、生产自控、等众多行业,但是现有传感器大都采用电信号作为传输媒介,相对于光信号不易于直接被读取。A sensor is a detection device that can sense the measured information, and can transform the sensed information into electrical signals or other required forms of information output according to certain rules, so as to meet the requirements of information transmission, processing, storage and display. , recording and control requirements. Pressure sensor is the most commonly used sensor in industrial practice. It is widely used in various industrial automation environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production automation, and many other industries. However, most of the existing sensors use electrical signals as transmission. medium, which is not easily read directly relative to optical signals.
QLED是一种自发光的新型显示面板,因采用量子点作为发光材料具有色域广、色纯度高等特点,并且QLED显示器反应时间短、发光效率高、驱动电压低,以及可弯曲特性,使得其成为下一代主流的平板显示器。QLED is a new type of self-luminous display panel. Due to the use of quantum dots as luminescent materials, it has the characteristics of wide color gamut and high color purity, and the QLED display has short response time, high luminous efficiency, low driving voltage, and bendable characteristics. become the next mainstream flat panel display.
鉴于以上压力传感器与QLED的优点,现有技术中尝试使用溶液法制备QLED发光器件,使得在传导压力的同时通过光信号来完成压力实时位置的监控,重复性高、响应速度快、可靠性强、结构简单。In view of the advantages of the above pressure sensor and QLED, in the prior art, a solution method is used to prepare a QLED light-emitting device, so that the real-time position monitoring of the pressure is completed through the optical signal while conducting the pressure, with high repeatability, fast response speed and strong reliability. ,Simple structure.
针对上述技术存在的问题,本发明旨在提供一种具有更易于传输信号的压力传感器,以解决现有技术中的不足之处。In view of the problems existing in the above technologies, the present invention aims to provide a pressure sensor with easier signal transmission, so as to solve the deficiencies in the prior art.
发明内容SUMMARY OF THE INVENTION
本发明提出一种基于QLED发光器件的压力传感器,结合了QLED发光器件的电致发光特性,使得在传导压力的同时通过光信号来完成压力位置的实时监控,重复性高、响应速度快、可靠性强、结构简单。The present invention proposes a pressure sensor based on a QLED light-emitting device, which combines the electroluminescence characteristics of the QLED light-emitting device, so that the real-time monitoring of the pressure position is completed through the optical signal while conducting the pressure, with high repeatability, fast response speed and reliability. Strong and simple in structure.
本发明采用以下技术方案。The present invention adopts the following technical solutions.
一种基于QLED发光器件的压力传感器,所述压力传感器包括接电基板、功能基板;所述接电基板和功能基板均为PET柔性基板;所述接电基板上覆有电极层;所述功能基板上覆有ITO层;所述ITO层上覆有功能层;所述功能层包括多个分层;功能层的多个分层自下而上依次包括空穴注入层、空穴传输层、发光层和电子传输层;所述功能层以空穴注入层与功能基板的ITO层接触;功能层的电子传输层与电极层紧邻;当接电基板或功能基板受压时,受压部位形变使得电极层与电子传输层的接触状态变化,电极层电荷到达发光层使得受压部位的发光层发光。A pressure sensor based on a QLED light-emitting device, the pressure sensor includes an electrical substrate and a functional substrate; the electrical substrate and the functional substrate are both PET flexible substrates; the electrical substrate is covered with an electrode layer; the functional substrate The substrate is covered with an ITO layer; the ITO layer is covered with a functional layer; the functional layer includes multiple layers; the multiple layers of the functional layer sequentially include a hole injection layer, a hole transport layer, Light-emitting layer and electron transport layer; the functional layer is in contact with the ITO layer of the functional substrate through the hole injection layer; the electron transport layer of the functional layer is close to the electrode layer; when the electrical substrate or the functional substrate is pressed, the pressed part deforms The contact state between the electrode layer and the electron transport layer is changed, and the charge of the electrode layer reaches the light-emitting layer, so that the light-emitting layer at the pressure-receiving part emits light.
所述压力传感器的制备过程包括功能基板制备、接电基板制备和基板装配;The preparation process of the pressure sensor includes the preparation of functional substrates, the preparation of electrical substrates, and the assembly of substrates;
所述功能基板的制备过程依次包括以下作业;The preparation process of the functional substrate sequentially includes the following operations;
S1、对覆有ITO的PET柔性基板进行预处理;S1. Preprocess the PET flexible substrate covered with ITO;
S2、在PET柔性基板上通过旋涂或刮涂的方法形成功能层的各个分层;制成功能基板;S2. Each layer of the functional layer is formed on the PET flexible substrate by spin coating or blade coating; the functional substrate is made;
所述接电基板的制备包括以下作业;The preparation of the electrical connection substrate includes the following operations;
S3:在没有涂覆ITO的PET柔性基板上以镀膜工艺形成金属电极或者以旋涂/刮涂工艺形成薄膜电极;S3: forming a metal electrode by a coating process or forming a thin film electrode by a spin coating/blade coating process on the PET flexible substrate without ITO coating;
所述基板装配包括以下作业;The substrate assembly includes the following operations;
S4:将已附着有电极的柔性PET基板倒扣在已形成各功能层的PET基板上,并对在四周用封装材料加以固定。S4: Invert the flexible PET substrate with electrodes attached to the PET substrate on which each functional layer has been formed, and fix it with packaging materials around it.
所述对覆有ITO的PET柔性基板进行的预处理包括清洗处理和等离子处理。The pretreatment of the ITO-coated PET flexible substrate includes cleaning treatment and plasma treatment.
所述形成金属电极的工艺为蒸发镀膜,所述形成薄膜电极的工艺为旋涂工艺或刮涂工艺,所述薄膜电极为金属纳米线薄膜电极。The process for forming the metal electrode is evaporation coating, the process for forming the thin film electrode is a spin coating process or a blade coating process, and the thin film electrode is a metal nanowire thin film electrode.
所述功能层的各个分层呈薄膜形;所述功能层的各个分层采用旋涂或者刮涂方法成型。Each layer of the functional layer is in the form of a film; each layer of the functional layer is formed by spin coating or blade coating.
所述发光层以QLED发光件发光;所述QLED发光件为量子点。The light-emitting layer emits light with a QLED light-emitting element; the QLED light-emitting element is a quantum dot.
所述功能基板的ITO层的方阻为320 Ω/□。The square resistance of the ITO layer of the functional substrate is 320 Ω/□.
所述接电基板上的电极层为以镀膜工艺成型的银电极层。The electrode layer on the electrical connection substrate is a silver electrode layer formed by a coating process.
所述银电极层的厚度范围为100-200nm。The thickness of the silver electrode layer is in the range of 100-200 nm.
所述空穴注入层选用PEDOT:PSS溶液旋涂成膜制备;所述空穴传输层以TFB溶液旋涂成膜制备;所述发光层以量子点溶液旋涂成膜制备;所述电子传输层以氧化锌纳米颗粒溶液旋涂成膜制备。The hole injection layer is prepared by spin coating with PEDOT:PSS solution; the hole transport layer is prepared by spin coating with TFB solution; the light emitting layer is prepared by spin coating with quantum dot solution; the electron transport layer is prepared by spin coating with quantum dot solution; The layers were prepared by spin coating of zinc oxide nanoparticle solutions.
本发明的优点在于:The advantages of the present invention are:
1)本发明的新型压力传感器利用了QLED发光器件的电致发光特性,使得在传导压力的同时通过发光来完成实时压力位置的监控,响应速度快、结构简单,为在不易于读取压力位置的密闭环境条件下监控压力位置提供了可行性。1) The new pressure sensor of the present invention utilizes the electroluminescence characteristics of the QLED light-emitting device, so that the real-time pressure position monitoring can be completed by emitting light while conducting pressure. The response speed is fast and the structure is simple. It is not easy to read the pressure position. It provides the feasibility of monitoring the pressure position under the closed environmental conditions.
2)本发明的新型压力传感器通过选涂法制得各个功能层以及蒸发镀膜法制得金属电极,结构简单,重复性高、可靠性强、易于操作。2) The novel pressure sensor of the present invention obtains each functional layer by a selective coating method and obtains a metal electrode by an evaporation coating method, and has a simple structure, high repeatability, strong reliability and easy operation.
附图说明Description of drawings
下面结合附图和具体实施方式对本发明进一步详细的说明:The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments:
附图1是本发明的工作原理示意图;Accompanying drawing 1 is the working principle schematic diagram of the present invention;
附图2是本发明的结构示意图;Accompanying drawing 2 is the structural representation of the present invention;
图中:110-功能基板;120-空穴注入层;130-空穴传输层;140-发光层;150-电子传输层;160-电极层;170-接电基板;180-内壁贴有本发明所述压力传感器的密闭压力容器;190-压力传感器。In the figure: 110 - functional substrate; 120 - hole injection layer; 130 - hole transport layer; 140 - light emitting layer; 150 - electron transport layer; 160 - electrode layer; A closed pressure vessel for the invention of the pressure sensor; 190-pressure sensor.
具体实施方式Detailed ways
如图1-2所示,一种基于QLED发光器件的压力传感器,所述压力传感器包括接电基板170、功能基板110;所述接电基板170和功能基板110均为PET柔性基板;所述接电基板上覆有电极层160;所述功能基板上覆有ITO层;所述ITO层上覆有功能层;所述功能层包括多个分层;功能层的多个分层自下而上依次包括空穴注入层120、空穴传输层130、发光层140和电子传输层150;所述功能层以空穴注入层与功能基板的ITO层接触;功能层的电子传输层与电极层紧邻;当接电基板或功能基板受压时,受压部位形变使得电极层与电子传输层的接触状态变化,电极层电荷到达发光层使得受压部位的发光层发光。As shown in FIG. 1-2, a pressure sensor based on a QLED light-emitting device, the pressure sensor includes an
所述压力传感器的制备过程包括功能基板制备、接电基板制备和基板装配;The preparation process of the pressure sensor includes the preparation of functional substrates, the preparation of electrical substrates, and the assembly of substrates;
所述功能基板的制备过程依次包括以下作业;The preparation process of the functional substrate sequentially includes the following operations;
S1、对覆有ITO的PET柔性基板进行预处理;S1. Preprocess the PET flexible substrate covered with ITO;
S2、在PET柔性基板上通过旋涂或刮涂的方法形成功能层的各个分层;制成功能基板;S2. Each layer of the functional layer is formed on the PET flexible substrate by spin coating or blade coating; the functional substrate is made;
所述接电基板的制备包括以下作业;The preparation of the electrical connection substrate includes the following operations;
S3:在没有涂覆ITO的PET柔性基板上以镀膜工艺形成金属电极或者以旋涂/刮涂工艺形成薄膜电极;S3: forming a metal electrode by a coating process or forming a thin film electrode by a spin coating/blade coating process on the PET flexible substrate without ITO coating;
所述基板装配包括以下作业;The substrate assembly includes the following operations;
S4:将已附着有电极的柔性PET基板倒扣在已形成各功能层的PET基板上,并对在四周用封装材料加以固定。S4: Invert the flexible PET substrate with electrodes attached to the PET substrate on which each functional layer has been formed, and fix it with packaging materials around it.
所述对覆有ITO的PET柔性基板进行的预处理包括清洗处理和等离子处理。The pretreatment of the ITO-coated PET flexible substrate includes cleaning treatment and plasma treatment.
所述形成金属电极的工艺为蒸发镀膜,所述形成薄膜电极的工艺为旋涂工艺或刮涂工艺,所述薄膜电极为金属纳米线薄膜电极。The process for forming the metal electrode is evaporation coating, the process for forming the thin film electrode is a spin coating process or a blade coating process, and the thin film electrode is a metal nanowire thin film electrode.
所述功能层的各个分层呈薄膜形;所述功能层的各个分层采用旋涂或者刮涂方法成型。Each layer of the functional layer is in the form of a film; each layer of the functional layer is formed by spin coating or blade coating.
所述发光层以QLED发光件发光;所述QLED发光件为量子点。The light-emitting layer emits light with a QLED light-emitting element; the QLED light-emitting element is a quantum dot.
所述功能基板的ITO层的方阻为320 Ω/□。The square resistance of the ITO layer of the functional substrate is 320 Ω/□.
所述接电基板上的电极层为以镀膜工艺成型的银电极层。The electrode layer on the electrical connection substrate is a silver electrode layer formed by a coating process.
所述银电极层的厚度范围为100-200nm。The thickness of the silver electrode layer is in the range of 100-200 nm.
所述空穴注入层选用PEDOT:PSS溶液旋涂成膜制备;所述空穴传输层以TFB溶液旋涂成膜制备;所述发光层以量子点溶液旋涂成膜制备;所述电子传输层以氧化锌纳米颗粒溶液旋涂成膜制备。The hole injection layer is prepared by spin coating with PEDOT:PSS solution; the hole transport layer is prepared by spin coating with TFB solution; the light emitting layer is prepared by spin coating with quantum dot solution; the electron transport layer is prepared by spin coating with quantum dot solution; The layers were prepared by spin coating of zinc oxide nanoparticle solutions.
本例在步骤S2中,在PET柔性基板上以3000r的转速旋涂PEDOT:PSS溶液,并且以120度的温度退火20分钟;以3000r的转速旋涂TFB溶液,并且以120度的温度退火20分钟;以2000r的转速旋涂绿色量子点溶液,并且以65度的温度退火15分钟;以1700r的转速旋涂氧化锌纳米颗粒溶液,并且以65度的温度退火20分钟。In this example, in step S2, the PEDOT:PSS solution was spin-coated at a rotation speed of 3000r on the PET flexible substrate, and annealed at a temperature of 120 degrees for 20 minutes; the TFB solution was spin-coated at a rotation speed of 3000r, and annealed at a temperature of 120 degrees for 20 minutes. min; spin-coating green quantum dot solution at 2000r and annealing at 65 degrees for 15 minutes; spin-coating zinc oxide nanoparticle solution at 1700r and annealing at 65 degrees for 20 minutes.
空穴传输层以溶解于氯苯浓度为8mg/ml的TFB溶液制备,发光层以溶解于正辛烷浓度为15mg/ml的绿色量子点溶液制备,电子传输层以浓度为6mg/ml的氧化锌纳米颗粒溶液制备。The hole transport layer was prepared by dissolving in a TFB solution with a concentration of 8 mg/ml in chlorobenzene, the light-emitting layer was prepared by dissolving a green quantum dot solution with a concentration of 15 mg/ml in n-octane, and the electron transport layer was prepared by dissolving in a solution of 6 mg/ml oxidized n-octane. Zinc Nanoparticle Solution Preparation.
在实施中,作为发光材料的量子点还可选用红色量子点、绿色量子点以及蓝色量子点,其选自II-VI或III-V族中的一种或者多种。In implementation, the quantum dots as light-emitting materials can also be selected from red quantum dots, green quantum dots and blue quantum dots, which are selected from one or more of II-VI or III-V groups.
如图1所示,本发明所述传感器在置入压力容器后,当压力容器内充入压力气体或液体后,压力传感器受压,当压力升到预设值后使得电极层与电子传输层接触,电极层电荷到达发光层使得受压部位的发光层发光,观察人员经透明的容器壁观察到传感器发光后,可认为压力容器内的压力已不低于预设值。As shown in Figure 1, after the sensor of the present invention is placed in a pressure vessel, when the pressure vessel is filled with pressure gas or liquid, the pressure sensor is pressurized, and when the pressure rises to a preset value, the electrode layer and the electron transport layer are formed. Contact, the charge of the electrode layer reaches the light-emitting layer, so that the light-emitting layer at the pressure-receiving part emits light. After the observer observes the sensor light-emitting through the transparent container wall, it can be considered that the pressure in the pressure container is not lower than the preset value.
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