CN109443248B - Common-path following type high-precision three-dimensional angle measuring method and device based on grating - Google Patents
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Abstract
Description
技术领域technical field
本发明属于精密仪器制造和精密测试计量技术领域,主要涉及一种基于光栅的共光路跟随式高精度三维角度测量方法与装置。The invention belongs to the technical field of precision instrument manufacturing and precision testing and measurement, and mainly relates to a grating-based common optical path following type high-precision three-dimensional angle measurement method and device.
背景技术Background technique
随着高端制造业的不断发展，对精密制造加工技术以及高精度测量技术提出了越来越高的要求。高精度三维角度测量作为高精度测量的重要组成部分，被广泛的应用于导轨运动的姿态监测、物体的表面形貌检测、精密仪器的标定校准、大型建筑的几何变形测量等领域，因此小角度测量仪器是精密制造、精密加工、计量测试、航空航天以及科研领域必备的常规仪器。With the continuous development of high-end manufacturing, higher and higher requirements are put forward for precision manufacturing and processing technology and high-precision measurement technology. As an important part of high-precision measurement, high-precision three-dimensional angle measurement is widely used in attitude monitoring of rail motion, surface topography detection of objects, calibration and calibration of precision instruments, and geometric deformation measurement of large buildings. Measuring instruments are necessary conventional instruments in the fields of precision manufacturing, precision machining, metrology and testing, aerospace and scientific research.
基于光学测量法的小角度测量由于其非接触、精度高、工作距离大等优点，许多学者和科研单位对光学小角度测量进行了深入的研究。目前常用的光学测角方法主要有以下几种：Due to its advantages of non-contact, high precision and large working distance, many scholars and research institutes have conducted in-depth research on optical small angle measurement. At present, the commonly used optical angle measurement methods mainly include the following:
基于自准直与莫尔条纹结合的测量方法(邓立新,杨建坤,戴穗安,等.莫尔条纹技术的三维测角方法研究[J].光学与光电技术,2010,08(3):39-41.)。该方法结合了自准直测角原理和莫尔条纹测角原理，利用自准直原理测量反射镜的偏摆角和俯仰角，利用莫尔条纹测角原理测量旋转角。该方法虽然可以实现同时实现三维角度测量，但是为了实现旋转角的测量，准直透镜的焦距不能过大，因此限制了偏摆角和俯仰角的测量分辨力，并且CCD获取的光斑尺寸较大，限制了偏摆角和俯仰角的测量范围，另外随着工作距离增加，光束能量发散，条纹的对比度下降，因此工作距离受限。Measurement method based on the combination of self-collimation and Moiré fringes (Deng Lixin, Yang Jiankun, Dai Suian, et al. Research on 3D angle measurement method of Moiré fringe technology [J]. Optics and Photoelectric Technology, 2010, 08(3): 39-41.). The method combines the principle of self-collimation angle measurement and the principle of Moiré fringe angle measurement. Although this method can realize three-dimensional angle measurement at the same time, in order to realize the measurement of the rotation angle, the focal length of the collimating lens cannot be too large, so the measurement resolution of the yaw angle and the pitch angle is limited, and the spot size obtained by the CCD is large. , which limits the measurement range of yaw and pitch angles. In addition, as the working distance increases, the beam energy diverges and the contrast of the fringes decreases, so the working distance is limited.
自准直与光束变形原理相结合方法。例如：专利号为CN103925890A的中国专利公开了一种“一种基于光束畸变的三维角度测量系统”。该方法利用自准直原理根据CCD探测器的光斑位置可测出偏摆角和俯仰角；通过柱透镜与特殊四面体反射镜使光束发生畸变，根据CCD探测器的光斑形状的改变可以测得旋转角。该方法由于通过测量图像的形变来测量旋转角，因此对系统的光学性能要求会非常高。因此光学器件的加工精度和安装精度限制了系统的测量精度，同时系统的存在的像差也使得成像不完善，系统测量误差较大。The method of combining self-collimation and beam deformation principle. For example, the Chinese patent with the patent number CN103925890A discloses "a three-dimensional angle measurement system based on beam distortion". This method uses the principle of self-collimation to measure the yaw angle and pitch angle according to the spot position of the CCD detector; the beam is distorted by the cylindrical lens and the special tetrahedral mirror, and can be measured according to the change of the spot shape of the CCD detector. rotation angle. Since this method measures the rotation angle by measuring the deformation of the image, it requires very high optical performance of the system. Therefore, the machining accuracy and installation accuracy of optical devices limit the measurement accuracy of the system, and at the same time, the aberration of the system also makes the imaging imperfect, and the system measurement error is large.
基于多干涉仪测角法(Li X,Ito S,Gao W.Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder[J].OpticalEngineering,2014,53(12):122405.)。该方法利用不同光束的光程差与相应光束的距离的比值测量靶标的偏摆角和俯仰角；通过测量不同光束在光电探测器的竖直方向的位置差与相应光束间距离的比值来测量旋转角。该测量系统涉及到多个干涉仪，系统复杂，测量容易受到环境干扰，测量稳定性较差。Based on multi-interferometer goniometer method . The method uses the ratio of the optical path difference of different beams to the distance of the corresponding beam to measure the yaw angle and pitch angle of the target; by measuring the ratio of the position difference of different beams in the vertical direction of the photodetector to the distance between the corresponding beams to measure rotation angle. The measurement system involves multiple interferometers, the system is complex, the measurement is easily disturbed by the environment, and the measurement stability is poor.
基于反射光栅自准直测角法(Gao W,Saito Y,Muto H,et al.A three-axisautocollimator for detection of angular error motions of a precision stage[J].CIRP Annals-Manufacturing Technology,2011,60(1):515-518.)。该方法通过测量反射光栅的零级、正负一级衍射光束传播方向随着反射光栅三维角度变化的变化量来测量光栅的角度变化值。该方法可以实现三维角度测量，但是该方法无法消除光源的角度漂移以及环境对角度测量的影响，同时由于衍射角的存在使得该方法不适合长工作距离测量，并且俯仰角和旋转角之间由于测量原理的原因其测量范围相互制约。A three-axis autocollimator for detection of angular error motions of a precision stage[J].CIRP Annals-Manufacturing Technology,2011,60( 1): 515-518.). The method measures the angle change value of the grating by measuring the variation of the zero-order, positive and negative first-order diffracted beam propagation directions of the reflection grating with the three-dimensional angle change of the reflection grating. This method can realize three-dimensional angle measurement, but this method cannot eliminate the angular drift of the light source and the influence of the environment on the angle measurement. At the same time, due to the existence of the diffraction angle, this method is not suitable for the measurement of long working distance, and the difference between the pitch angle and the rotation angle is due to Due to the measurement principle, the measurement range is mutually restricted.
发明内容SUMMARY OF THE INVENTION
本发明的目的就是为了克服上述现有方法与装置中的不足，为实现和达到高精度三维角度测量的目的，提出了一种基于光栅的共光路跟随式高精度三维角度测量方法与装置。The purpose of the present invention is to overcome the deficiencies in the above-mentioned existing methods and devices, and to achieve and achieve the purpose of high-precision three-dimensional angle measurement, a grating-based common optical path following type high-precision three-dimensional angle measurement method and device are proposed.
本发明的目的是这样实现的：基于光栅的共光路跟随式高精度三维角度测量方法包括以下步骤：The purpose of the present invention is achieved in this way: the grating-based common optical path following type high-precision three-dimensional angle measurement method comprises the following steps:
①、将激光光源发出的光束经过准直透镜后形成准直光束并出射；①. The beam emitted by the laser light source passes through the collimating lens to form a collimated beam and exits;
②、①中所述准直光束经过一维平面透射光栅后，产生正一级衍射光束、负一级衍射光束和零级衍射光束；②, ① After the collimated beam passes through the one-dimensional plane transmission grating, a positive first-order diffracted beam, a negative first-order diffracted beam and a zero-order diffracted beam are generated;
③、②中所述的正一级衍射光束、负一级衍射光束经过一组对角线相互垂直的偏振分光镜组后得到一组与正一级衍射光束、负一级衍射光束相平行的出射光束；The positive first-order diffracted beams and the negative first-order diffracted beams described in ③ and ② pass through a group of polarizing beam splitters whose diagonals are perpendicular to each other to obtain a set of parallel beams with the positive first-order diffracted beams and the negative first-order diffracted beams. outgoing beam;
④、③中所述与正一级衍射光束、负一级衍射光束相平行的出射光束再次经过一维平面透射光栅后，得到一组与光轴相平行的衍射光束；④, after the outgoing beam parallel to the positive first-order diffracted beam and the negative first-order diffracted beam described in ③ passes through the one-dimensional plane transmission grating again, a group of diffracted beams parallel to the optical axis is obtained;
⑤、②中所述的零级衍射光束经过1/4波片后垂直入射到一维平面反射光栅产生正一级衍射光束、负一级衍射光束，该正一级衍射光束、负一级衍射光束入射到②中所述的一维平面透射光栅得到一组与光轴相平行的出射光束；The zero-order diffracted beams described in ⑤, ② are vertically incident on the one-dimensional plane reflection grating after passing through the 1/4 wave plate to generate positive first-order diffracted beams and negative first-order diffracted beams. The light beam is incident on the one-dimensional plane transmission grating described in ② to obtain a set of outgoing light beams parallel to the optical axis;
⑥、调整一维平面反射光栅与一维平面透射光栅之间的距离，使④中所述的一组与光轴相平行的衍射光束与⑤所述的一组与光轴相平行的出射光束分别沿共光路传输，形成两组共光路光束；⑥. Adjust the distance between the one-dimensional plane reflection grating and the one-dimensional plane transmission grating, so that a group of diffracted beams parallel to the optical axis described in ④ and a group of outgoing beams parallel to the optical axis described in ⑤ They are respectively transmitted along the common optical path to form two groups of common optical path beams;
⑦、⑥中所得到的两组共光路光束分别经过偏振分光镜C和偏振分光镜D，得到四路待探测光束；The two groups of beams in the common optical path obtained in ⑦ and ⑥ pass through the polarizing beam splitter C and the polarizing beam splitter D respectively to obtain four beams to be detected;
⑧、⑦中获得的四路待探测光束分别经过聚焦透镜A、聚焦透镜B、聚焦透镜C和聚焦透镜D聚焦形成待探测光斑，同时利用光电探测器A、光电探测器B、光电探测器C和光电探测器D探测待探测光斑的位置信息；The four beams to be detected obtained in ⑧ and ⑦ are respectively focused by focusing lens A, focusing lens B, focusing lens C and focusing lens D to form the spot to be detected. and the photodetector D to detect the position information of the spot to be detected;
⑨、当三维角度产生装置产生三维角度变化时，待测量一维平面反射光栅发生相应的三维角度变化，用光电探测器探测待探测光斑的位置变化信息，获得的光斑位置变化信息通过信号处理电路处理后送入计算机，计算获得一维平面反射光栅发生三维角度变化；⑨. When the three-dimensional angle generating device produces a three-dimensional angle change, the one-dimensional plane reflection grating to be measured undergoes a corresponding three-dimensional angle change, and the photodetector is used to detect the position change information of the light spot to be detected, and the obtained light spot position change information is passed through the signal processing circuit. After processing, it is sent to the computer, and the three-dimensional angle change of the one-dimensional plane reflection grating is obtained by calculation;
待测量一维平面反射光栅的偏摆角α、俯仰角β和旋转角γ分别按如下公式获取：The yaw angle α, pitch angle β and rotation angle γ of the one-dimensional planar reflection grating to be measured are obtained according to the following formulas:
式中：ΔdC-x、ΔdD-x分别为光电探测器C、光电探测器D在相邻两个采样周期探测到的光斑位置信息在水平方向的变化量；ΔdA-y、ΔdB-y、ΔdC-y、ΔdD-y分别为光电探测器A、光电探测器B、光电探测器C、光电探测器D在相邻两个采样周期探测到的光斑位置信息在竖直方向的变化量；f为聚焦透镜A、聚焦透镜 B、聚焦透镜C和聚焦透镜D的焦距；sinφ为激光器的波长与一维平面透射光栅光栅常数的比；In the formula: Δd Cx , Δd Dx are the changes in the horizontal direction of the light spot position information detected by the photodetector C and the photodetector D in two adjacent sampling periods; Δd Ay , Δd By , Δd Cy , Δd Dy are the changes in the vertical direction of the spot position information detected by photodetector A, photodetector B, photodetector C, and photodetector D in two adjacent sampling periods; f is focusing lens A, focusing lens B, the focal length of the focusing lens C and the focusing lens D; sinφ is the ratio of the wavelength of the laser to the constant of the one-dimensional plane transmission grating;
⑩、通过压电陶瓷控制由一维平面透射光栅、偏振分光镜组与一维角度产生装置构成的旋转角补偿机构旋转一定的角度，该角度即为通过⑨获得的一维平面反射光栅的旋转角信息，旋转角补偿机构的旋转角θ由下面公式获取：⑩. The rotation angle compensation mechanism composed of the one-dimensional plane transmission grating, the polarizing beam splitter group and the one-dimensional angle generating device is controlled by piezoelectric ceramics to rotate by a certain angle, and this angle is the rotation of the one-dimensional plane reflection grating obtained by ⑨. Angle information, the rotation angle θ of the rotation angle compensation mechanism is obtained by the following formula:
基于光栅的共光路跟随式高精度三维角度测量装置的结构是：激光器、准直透镜、一维平面透射光栅沿光线a传播方向依次排列；所述一维平面透射光栅透射面与入射光束垂直；偏振分光镜A、偏振分光镜B置于一维平面透射光栅后侧，且偏振分光镜A与偏振分光镜B对角线相互垂直，并与激光器光轴夹角为45°；正一级衍射光束c依次经过偏振分光镜A、偏振分光镜B后出射，得到的出射光束g与正一级衍射光束c平行；负一级衍射光束d依次经过偏振分光镜B、偏振分光镜A后出射，得到的出射光束h与负一级衍射光束d平行；一维平面透射光栅产生的零级衍射光束b经过1/4波片垂直入射到一维平面反射光栅，衍射产生的正一级衍射光束e和负一级衍射光束f分别经过偏振分光镜A与偏振分光镜B 后透射，调整一维平面反射光栅与一维平面透射光栅之间的距离使得正一级衍射光束e、负一级衍射光束f分别与出射光束h、出射光束g经过偏振分光镜组后光束共光路传输；两组共光路光束经过一维平面透射光栅后产生共光路衍射光束 i、j与共光路衍射光束k、l；所述共光路衍射光束i、j经过偏振分光镜C分光后产生的两路光束分别由聚焦透镜A与聚焦透镜B聚焦后在焦平面形成待测光斑；所述共光路衍射光束k、l经过偏振分光镜D分光后产生的两路光束分别由聚焦透镜C与聚焦透镜D聚焦后在焦平面形成待测光斑；光电探测器A和光电探测器 B分别被安装在所述聚焦透镜A、聚焦透镜B的焦平面处，光电探测器C和光电探测器D分别被安装在所述聚焦透镜C和聚焦透镜D的焦平面处；所述光电探测器A、光电探测器B、光电探测器C、光电探测器D分别与计算机相连；1/4波片、一维平面反射光栅与三维角度产生装置刚性连接；一维平面透射光栅、偏振分光镜A、偏振分光镜B与一维角度产生装置刚性连接；所述一维平面透射光栅与一维平面反射光栅光栅常数相同；The structure of the grating-based common optical path following type high-precision three-dimensional angle measuring device is: the laser, the collimating lens, and the one-dimensional plane transmission grating are arranged in sequence along the propagation direction of the light a; the one-dimensional plane transmission grating transmission surface is perpendicular to the incident beam; Polarizing beamsplitter A and polarizing beamsplitter B are placed on the back side of the one-dimensional plane transmission grating, and the diagonals of polarizing beamsplitter A and polarizing beamsplitter B are perpendicular to each other, and the included angle with the optical axis of the laser is 45°; positive first-order diffraction The beam c passes through the polarizing beam splitter A and the polarizing beam splitter B in turn, and the obtained outgoing beam g is parallel to the positive first-order diffracted beam c; The obtained outgoing beam h is parallel to the negative first-order diffracted beam d; the zero-order diffracted beam b generated by the one-dimensional plane transmission grating is vertically incident on the one-dimensional plane reflection grating through the 1/4 wave plate, and the positive first-order diffracted beam e generated by the diffraction and the negative first-order diffracted beam f are respectively transmitted through the polarizing beam splitter A and the polarizing beam splitter B, and the distance between the one-dimensional plane reflection grating and the one-dimensional plane transmission grating is adjusted to make the positive first-order diffracted beam e and the negative first-order diffracted beam e. f and the outgoing beam h and outgoing beam g respectively pass through the polarizing beam splitter group, and then the beams are transmitted in the same optical path; the two groups of beams in the common optical path pass through the one-dimensional plane transmission grating to generate the common optical path diffraction beams i, j and the common optical path diffraction beams k, l; The two beams generated by the common optical path diffracted beams i and j after being split by the polarizing beam splitter C are respectively focused by the focusing lens A and the focusing lens B to form a spot to be measured on the focal plane; the common optical path diffracted beams k and l are polarized The two beams generated by the beam splitter D are respectively focused by the focusing lens C and the focusing lens D to form a spot to be measured on the focal plane; the photodetector A and the photodetector B are respectively installed on the focusing lens A and the focusing lens. At the focal plane of B, the photodetector C and the photodetector D are respectively installed at the focal plane of the focusing lens C and the focusing lens D; the photodetector A, photodetector B, photodetector C, The photodetectors D are respectively connected to the computer; the 1/4 wave plate, the one-dimensional plane reflection grating and the three-dimensional angle generating device are rigidly connected; the one-dimensional plane transmission grating, the polarizing beam splitter A, and the polarizing beam splitter B are rigidly connected to the one-dimensional angle generating device connection; the one-dimensional plane transmission grating has the same grating constant as the one-dimensional plane reflection grating;
所述激光器、准直透镜、一维平面透射光栅、1/4波片、一维平面反射光栅、三维角度产生装置、聚焦透镜B、聚焦透镜D、光电探测器B、光电探测器D、计算机组成测量光束获得及测量系统；The laser, collimating lens, one-dimensional plane transmission grating, 1/4 wave plate, one-dimensional plane reflection grating, three-dimensional angle generating device, focusing lens B, focusing lens D, photodetector B, photodetector D, computer To form a measurement beam acquisition and measurement system;
所述激光器、准直透镜、一维平面透射光栅、偏振分光镜A、偏振分光镜B、偏振分光镜C、偏振分光镜D、光电探测器A、光电探测器C、聚焦透镜A、聚焦透镜C、计算机组成参考光束获得、测量以及旋转角补偿系统。The laser, collimating lens, one-dimensional plane transmission grating, polarizing beam splitter A, polarizing beam splitter B, polarizing beam splitter C, polarizing beam splitter D, photodetector A, photodetector C, focusing lens A, focusing lens C. The computer constitutes a reference beam acquisition, measurement and rotation angle compensation system.
本发明的优点是：The advantages of the present invention are:
(1)、利用一维平面反射光栅作为待测器件，可同时实现三维角度测量，测量原理简单，结构紧凑。(1) Using a one-dimensional plane reflection grating as the device to be measured, three-dimensional angle measurement can be realized at the same time, the measurement principle is simple, and the structure is compact.
(2)、采用共光路测量原理，待测光束分为测量光束和参考光束，测量光束方向变化量包括一维平面反射光栅的角度变化值以及光束传播过程中和光源不稳定引入的角漂值，参考光束方向变化量包括光束传播过程中和光源不稳定引入的角漂值。通过对测量光束和对应的参考光束进行分析，可以消除光束传播过程中和光源不稳定引入的角度漂移值对待测角度的影响，得到精确的反射光栅的角度变化值，提高了微角度测量的测量精度和长时间测量的稳定性。同时该装置使得原本存在衍射角的衍射光束变为与激光器发出的准直光束平行的光束，在使探测单元更加紧凑的同时，增大了工作距离，更利于实际应用。(2) Using the common optical path measurement principle, the beam to be measured is divided into a measurement beam and a reference beam. The direction change of the measurement beam includes the angle change value of the one-dimensional plane reflection grating and the angular drift value caused by the instability of the light source and the beam propagation process. , the reference beam direction change includes the angular drift value introduced by the beam propagation process and the instability of the light source. By analyzing the measurement beam and the corresponding reference beam, the influence of the angle drift value caused by the beam propagation process and the instability of the light source to the angle to be measured can be eliminated, and the accurate angle change value of the reflection grating can be obtained, which improves the measurement of micro-angle measurement. Accuracy and long-term measurement stability. At the same time, the device makes the diffracted beam that originally had a diffraction angle into a beam that is parallel to the collimated beam emitted by the laser, which increases the working distance while making the detection unit more compact, which is more conducive to practical applications.
(3)、采用跟随式测量方式和闭环控制以及柔性机械偏转系统，在实现高精度、高稳定性三维角度测量的同时，大幅度提高了旋转角的测量范围，同时消除了旋转角变化对俯仰角测量范围的限制。(3) The following measurement method, closed-loop control and flexible mechanical deflection system are adopted to achieve high-precision and high-stability three-dimensional angle measurement, and at the same time, the measurement range of the rotation angle is greatly improved, and the pitch change caused by the rotation angle is eliminated. Limitation of angular measurement range.
附图说明Description of drawings
图1是基于光栅的共光路跟随式高精度三维角度测量装置结构示意图Figure 1 is a schematic structural diagram of a common optical path following type high-precision three-dimensional angle measurement device based on gratings
图2是测量光束测量系统示意图Figure 2 is a schematic diagram of the measurement beam measurement system
图3是参考光束测量系统示意图Figure 3 is a schematic diagram of the reference beam measurement system
图中件号说明:1、激光器 2、准直透镜 3、一维平面透射光栅 4、偏振分光镜A 5、1/4波片 6、一维平面反射光栅 7、三维角度产生装置 8、偏振分光镜B 9、一维角度产生装置 10、偏振分光镜D 11、光电探测器C 12、聚焦透镜C 13、聚焦透镜D 14、光电探测器D 15、偏振分光镜C 16、光电探测器A 17、聚焦透镜A 18聚焦透镜B 19、光电探测器B 20、计算机Part number description in the figure: 1, laser 2, collimating
具体实施方式Detailed ways
下面结合附图对本发明的具体实施方案做详细描述。The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
本发明所述基于光栅的共光路跟随式高精度三维角度测量方法包括以下步骤：The grating-based common optical path following type high-precision three-dimensional angle measurement method of the present invention comprises the following steps:
①、将激光光源发出的光束经过准直透镜后形成准直光束并出射；①. The beam emitted by the laser light source passes through the collimating lens to form a collimated beam and exits;
②、①中所述准直光束经过一维平面透射光栅后，产生正一级衍射光束、负一级衍射光束和零级衍射光束；②, ① After the collimated beam passes through the one-dimensional plane transmission grating, a positive first-order diffracted beam, a negative first-order diffracted beam and a zero-order diffracted beam are generated;
③、②中所述的正一级衍射光束、负一级衍射光束经过一组对角线相互垂直的偏振分光镜组后得到一组与正一级衍射光束、负一级衍射光束相平行的出射光束；The positive first-order diffracted beams and the negative first-order diffracted beams described in ③ and ② pass through a group of polarizing beam splitters whose diagonals are perpendicular to each other to obtain a set of parallel beams with the positive first-order diffracted beams and the negative first-order diffracted beams. outgoing beam;
④、③中所述与正一级衍射光束、负一级衍射光束相平行的出射光束再次经过一维平面透射光栅后，得到一组与光轴相平行的衍射光束；④, after the outgoing beam parallel to the positive first-order diffracted beam and the negative first-order diffracted beam described in ③ passes through the one-dimensional plane transmission grating again, a group of diffracted beams parallel to the optical axis is obtained;
⑤、②中所述的零级衍射光束经过1/4波片后垂直入射到一维平面反射光栅产生正一级衍射光束、负一级衍射光束，该正一级衍射光束、负一级衍射光束入射到②中所述的一维平面透射光栅得到一组与光轴相平行的出射光束；The zero-order diffracted beams described in ⑤, ② are vertically incident on the one-dimensional plane reflection grating after passing through the 1/4 wave plate to generate positive first-order diffracted beams and negative first-order diffracted beams. The light beam is incident on the one-dimensional plane transmission grating described in ② to obtain a set of outgoing light beams parallel to the optical axis;
⑥、调整一维平面反射光栅与一维平面透射光栅之间的距离，使④中所述的一组与光轴相平行的衍射光束与⑤所述的一组与光轴相平行的出射光束分别沿共光路传输，形成两组共光路光束；⑥. Adjust the distance between the one-dimensional plane reflection grating and the one-dimensional plane transmission grating, so that a group of diffracted beams parallel to the optical axis described in ④ and a group of outgoing beams parallel to the optical axis described in ⑤ They are respectively transmitted along the common optical path to form two groups of common optical path beams;
⑦、⑥中所得到的两组共光路光束分别经过偏振分光镜C和偏振分光镜D，得到四路待探测光束；The two groups of beams in the common optical path obtained in ⑦ and ⑥ pass through the polarizing beam splitter C and the polarizing beam splitter D respectively to obtain four beams to be detected;
⑧、⑦中获得的四路待探测光束分别经过聚焦透镜A、聚焦透镜B、聚焦透镜C和聚焦透镜D聚焦形成待探测光斑，同时利用光电探测器A、光电探测器B、光电探测器C和光电探测器D探测待探测光斑的位置信息；The four beams to be detected obtained in ⑧ and ⑦ are respectively focused by focusing lens A, focusing lens B, focusing lens C and focusing lens D to form the spot to be detected. and the photodetector D to detect the position information of the spot to be detected;
⑨、当三维角度产生装置产生三维角度变化时，待测量一维平面反射光栅发生相应的三维角度变化，用光电探测器探测待探测光斑的位置变化信息，获得的光斑位置变化信息通过信号处理电路处理后送入计算机，计算获得一维平面反射光栅发生三维角度变化；⑨. When the three-dimensional angle generating device produces a three-dimensional angle change, the one-dimensional plane reflection grating to be measured undergoes a corresponding three-dimensional angle change, and the photodetector is used to detect the position change information of the light spot to be detected, and the obtained light spot position change information is passed through the signal processing circuit. After processing, it is sent to the computer, and the three-dimensional angle change of the one-dimensional plane reflection grating is obtained by calculation;
待测量一维平面反射光栅的偏摆角α、俯仰角β和旋转角γ分别按如下公式获取：The yaw angle α, pitch angle β and rotation angle γ of the one-dimensional planar reflection grating to be measured are obtained according to the following formulas:
式中：ΔdC-x、ΔdD-x分别为光电探测器C、光电探测器D在相邻两个采样周期探测到的光斑位置信息在水平方向的变化量；ΔdA-y、ΔdB-y、ΔdC-y、ΔdD-y分别为光电探测器A、光电探测器B、光电探测器C、光电探测器D在相邻两个采样周期探测到的光斑位置信息在竖直方向的变化量；f为聚焦透镜A、聚焦透镜 B、聚焦透镜C和聚焦透镜D的焦距；sinφ为激光器的波长与一维平面透射光栅光栅常数的比值；In the formula: Δd Cx , Δd Dx are the changes in the horizontal direction of the light spot position information detected by the photodetector C and the photodetector D in two adjacent sampling periods; Δd Ay , Δd By , Δd Cy , Δd Dy are the changes in the vertical direction of the spot position information detected by photodetector A, photodetector B, photodetector C, and photodetector D in two adjacent sampling periods; f is focusing lens A, focusing lens B, the focal length of the focusing lens C and the focusing lens D; sinφ is the ratio of the wavelength of the laser to the constant of the one-dimensional plane transmission grating;
⑩、通过压电陶瓷控制由一维平面透射光栅、偏振分光镜组与一维角度产生装置构成的旋转角补偿机构旋转一定的角度，该角度即为通过⑨获得的一维平面反射光栅的旋转角信息，旋转角补偿机构的旋转角由下面公式获取：⑩. The rotation angle compensation mechanism composed of the one-dimensional plane transmission grating, the polarizing beam splitter group and the one-dimensional angle generating device is controlled by piezoelectric ceramics to rotate by a certain angle, and this angle is the rotation of the one-dimensional plane reflection grating obtained by ⑨. Angle information, the rotation angle of the rotation angle compensation mechanism is obtained by the following formula:
基于光栅的共光路跟随式高精度三维角度测量装置的结构是：激光器1、准直透镜2、一维平面透射光栅3沿光线a传播方向依次排列；所述一维平面透射光栅3透射面与入射光束垂直；偏振分光镜A4、偏振分光镜B8置于一维平面透射光栅3后侧，且偏振分光镜A4与偏振分光镜B8对角线相互垂直，并与激光器 1光轴夹角为45°；正一级衍射光束c依次经过偏振分光镜A4、偏振分光镜B8 后出射，得到的出射光束g与正一级衍射光束c平行；负一级衍射光束d依次经过偏振分光镜B8、偏振分光镜A4后出射，得到的出射光束h与负一级衍射光束 d平行；一维平面透射光栅3产生的零级衍射光束b经过1/4波片5垂直入射到一维平面反射光栅6，衍射产生的正一级衍射光束e和负一级衍射光束f分别经过偏振分光镜A4与偏振分光镜B8后透射，调整一维平面反射光栅6与一维平面透射光栅3之间的距离使得正一级衍射光束e、负一级衍射光束f分别与出射光束h、出射光束g经过偏振分光镜组后光束共光路传输；两组共光路光束经过一维平面透射光栅3后产生共光路衍射光束i、j与共光路衍射光束k、l；所述共光路衍射光束i、j经过偏振分光镜C15分光后产生的两路光束分别由聚焦透镜 A17与聚焦透镜B18聚焦后在焦平面形成待测光斑；所述共光路衍射光束k、l 经过偏振分光镜D10分光后产生的两路光束分别由聚焦透镜C12与聚焦透镜D13 聚焦后在焦平面形成待测光斑；光电探测器A16和光电探测器B19分别被安装在所述聚焦透镜A17、聚焦透镜B18的焦平面处，光电探测器C11和光电探测器D14 分别被安装在所述聚焦透镜C12和聚焦透镜D13的焦平面处；所述光电探测器 A16、光电探测器B19、光电探测器C11、光电探测器D14分别与计算机20相连； 1/4波片5、一维平面反射光栅6与三维角度产生装置7刚性连接；一维平面透射光栅3、偏振分光镜A4、偏振分光镜B8与一维角度产生装置9刚性连接；所述一维平面透射光栅3与一维平面反射光栅6光栅常数相同；The structure of the grating-based common optical path following type high-precision three-dimensional angle measuring device is as follows: a laser 1, a collimating lens 2, and a one-dimensional plane transmission grating 3 are arranged in sequence along the propagation direction of the light a; the transmission surface of the one-dimensional plane transmission grating 3 and The incident beam is vertical; the polarizing beam splitter A4 and the polarizing beam splitter B8 are placed on the rear side of the one-dimensional plane transmission grating 3, and the diagonal lines of the polarizing beam splitter A4 and the polarizing beam splitter B8 are perpendicular to each other, and the angle with the optical axis of the laser 1 is 45 °; the positive first-order diffracted beam c passes through the polarizing beam splitter A4 and the polarizing beam splitter B8 in turn, and the obtained outgoing beam g is parallel to the positive first-order diffracted beam c; the negative first-order diffracted beam d sequentially passes through the polarizing beam splitter B8, the polarized beam splitter After the beam splitter A4 is emitted, the obtained outgoing beam h is parallel to the negative first-order diffracted beam d; the zero-order diffracted beam b generated by the one-dimensional plane transmission grating 3 is vertically incident on the one-dimensional plane reflection grating 6 through the 1/4 wave plate 5, The positive first-order diffraction beam e and the negative first-order diffraction beam f generated by diffraction pass through the polarizing beam splitter A4 and the polarizing beam splitter B8, respectively, and adjust the distance between the one-dimensional plane reflection grating 6 and the one-dimensional plane transmission grating 3 so that the positive The first-order diffracted beam e and the negative first-order diffracted beam f and the outgoing beam h and the outgoing beam g respectively pass through the polarizing beam splitter group, and then the beams are transmitted in a common optical path; the two groups of common optical path beams pass through the one-dimensional plane transmission grating 3 to generate a common optical path diffracted beam i, j and common optical path diffracted beams k, l; said common optical path diffracted beams i, j are split by polarizing beam splitter C15 and the two beams are respectively focused by focusing lens A17 and focusing lens B18 to form a spot to be measured on the focal plane The two beams generated by the common optical path diffracted beams k and l after being split by the polarizing beam splitter D10 are respectively focused by the focusing lens C12 and the focusing lens D13 to form a spot to be measured on the focal plane; the photodetector A16 and the photodetector B19 are installed at the focal planes of the focusing lens A17 and the focusing lens B18, respectively, and the photodetector C11 and the photodetector D14 are respectively installed at the focal planes of the focusing lens C12 and the focusing lens D13; the photodetector A16, photodetector B19, photodetector C11, photodetector D14 are respectively connected with computer 20; 1/4 wave plate 5, one-dimensional plane reflection grating 6 are rigidly connected with three-dimensional angle generating device 7; one-dimensional plane transmission grating 3 , the polarizing beam splitter A4, the polarizing beam splitter B8 are rigidly connected with the one-dimensional angle generating device 9; the one-dimensional plane transmission grating 3 and the one-dimensional plane reflection grating 6 have the same grating constant;
所述激光器1、准直透镜2、一维平面透射光栅3、1/4波片5、一维平面反射光栅6、三维角度产生装置7、聚焦透镜B18、聚焦透镜D13、光电探测器B19、光电探测器D14、计算机20组成测量光束获得及测量系统；The laser 1, collimating lens 2, one-dimensional plane transmission grating 3, 1/4
所述激光器1、准直透镜2、一维平面透射光栅3、偏振分光镜A4、偏振分光镜B8、偏振分光镜C15、偏振分光镜D10、光电探测器A16、光电探测器C11、聚焦透镜A17、聚焦透镜C12、计算机20组成参考光束获得、测量以及旋转角补偿系统。The laser 1, collimating lens 2, one-dimensional plane transmission grating 3, polarizing beam splitter A4, polarizing beam splitter B8, polarizing beam splitter C15, polarizing beam splitter D10, photodetector A16, photodetector C11, focusing lens A17 , the focusing lens C12 and the
下面结合图1和图2说明测量光束获得及测量系统的工作过程：所述激光器 1出射的光束经过准直透镜2准直后变为准直光束a，准直光束a垂直入射到一维平面透射光栅3后产生的零级衍射光束b继续垂直入射到一维平面反射光栅6，经一维平面反射光栅6衍射后产生正一级衍射光束e和负一级衍射光束f，正一级衍射光束e和负一级衍射光束f再次入射到一维平面透射光栅3分别产生与准直光束a平行的衍射光束i与衍射光束k，衍射光束i与衍射光束k分别经聚焦透镜D13与聚焦透镜B18聚焦后，由光电探测器D14与光电探测器B19分别接收，形成测量信号，测量信号包含一维平面透射光栅的三维角度变化信息和各种光束漂移扰动信号。Below in conjunction with Fig. 1 and Fig. 2, the working process of the measurement beam acquisition and the measurement system will be described: the beam emitted by the laser 1 is collimated by the collimating lens 2 and then becomes a collimated beam a, and the collimated beam a is vertically incident on a one-dimensional plane The zero-order diffraction beam b generated by the transmission grating 3 continues to be vertically incident on the one-dimensional plane reflection grating 6, and after being diffracted by the one-dimensional plane reflection grating 6, a positive first-order diffraction beam e and a negative first-order diffraction beam f are generated. The beam e and the negative first-order diffracted beam f are incident on the one-dimensional plane transmission grating 3 again to generate diffracted beam i and diffracted beam k parallel to the collimated beam a. The diffracted beam i and diffracted beam k pass through the focusing lens D13 and the focusing lens respectively. After B18 is focused, it is received by photodetector D14 and photodetector B19 respectively to form a measurement signal, which includes three-dimensional angle change information of one-dimensional plane transmission grating and various beam drift disturbance signals.
如图2所示，当一维平面反射光栅6发生三维角度变化时，正一级衍射光束 e和负一级衍射光束f分别变为衍射光束e1与衍射光束f1，衍射光束e1与衍射光束f1经过一维平面透射光栅3作用后变为衍射光束i1与衍射光束k1。衍射光束i与衍射光束i1、衍射光束k与衍射光束k1之间的传播方向变化值随着一维平面反射光栅6三维角度变化而变化，因此通过测量光束方向的变化值计算出一维平面反射光栅6三维角度变化值。As shown in FIG. 2, when the three-dimensional angle of the one-dimensional planar reflection grating 6 changes, the positive first-order diffracted beam e and the negative first-order diffracted beam f become diffracted beam e1 and diffracted beam f1, respectively, diffracted beam e1 and diffracted beam f1 After the action of the one-dimensional plane transmission grating 3, it becomes the diffracted beam i1 and the diffracted beam k1. The change value of the propagation direction between diffracted beam i and diffracted beam i1, diffracted beam k and diffracted beam k1 changes with the three-dimensional angle of one-dimensional plane reflection grating 6, so the one-dimensional plane reflection is calculated by measuring the change value of
下面结合图1和图3说明参考光束获得、测量以及旋转角补偿系统的工作过程：所述激光器1出射的光束经过准直透镜2准直后变为准直光束a，准直光束 a垂直入射到一维平面透射光栅3后产生正一级衍射光束c与负一级衍射光束d，正一级衍射光束c依次经过偏振分光镜A4与偏振分光镜B8后再次入射到一维平面透射光栅3，得到与准直光束a平行的衍射光束j，负一级衍射光束d依次经过偏振分光镜A8与偏振分光镜B4后再次入射到一维平面透射光栅3，得到与准直光束a平行的衍射光束l，调整一维平面透射光栅3与一维平面反射光栅6之间的距离，使得衍射光束j与衍射光束i、衍射光束l与衍射光束k共光路传输，衍射光束i与衍射光束k为待测光束，衍射光束j与衍射光束l为参考光束，衍射光束j与衍射光束l分别经过偏振分光镜D15与偏振分光镜C10反射后分别经聚焦透镜C12与聚焦透镜A17聚焦后，由光电探测器C11与光电探测器A16分别接收，形成参考信号，参考信号包含各种光束漂移扰动信号；The working process of the reference beam acquisition, measurement and rotation angle compensation system will be described below in conjunction with Fig. 1 and Fig. 3: the beam emitted by the laser 1 becomes a collimated beam a after being collimated by a collimating lens 2, and the collimated beam a is vertically incident After reaching the one-dimensional plane transmission grating 3, a positive first-order diffraction beam c and a negative first-order diffraction beam d are generated. , the diffracted beam j parallel to the collimated beam a is obtained, and the negative first-order diffracted beam d is incident on the one-dimensional plane transmission grating 3 after passing through the polarizing beam splitter A8 and the polarizing beam splitter B4 in turn, and the diffraction beam parallel to the collimated beam a is obtained. Beam l, adjust the distance between one-dimensional plane transmission grating 3 and one-dimensional plane reflection grating 6, so that diffracted beam j and diffracted beam i, diffracted beam l and diffracted beam k transmit in the same optical path, diffracted beam i and diffracted beam k are Beam to be measured, diffracted beam j and diffracted beam l are reference beams, diffracted beam j and diffracted beam l are reflected by polarizing beam splitter D15 and polarizing beam splitter C10, respectively, after being focused by focusing lens C12 and focusing lens A17, and then detected by photoelectricity. The device C11 and the photodetector A16 are respectively received to form a reference signal, and the reference signal includes various beam drift disturbance signals;
旋转角补偿机构由一维平面透射光栅3、一维角度产生装置9、偏振分光镜 A4、偏振分光镜B8组成。其中一维角度产生装置9主要由控制器与一维角度偏转装置构成。控制器控制一维角度偏转装置绕着与准直光束a垂直的方向旋转，控制器的输出信号有下面公式给出：The rotation angle compensation mechanism is composed of a one-dimensional plane transmission grating 3, a one-dimensional angle generating device 9, a polarization beam splitter A4, and a polarization beam splitter B8. The one-dimensional angle generating device 9 is mainly composed of a controller and a one-dimensional angle deflection device. The controller controls the one-dimensional angle deflection device to rotate around the direction perpendicular to the collimated beam a, and the output signal of the controller is given by the following formula:
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