CN109432946A - A kind of vent gas treatment bucket of arsine - Google Patents
A kind of vent gas treatment bucket of arsine Download PDFInfo
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- CN109432946A CN109432946A CN201811345567.7A CN201811345567A CN109432946A CN 109432946 A CN109432946 A CN 109432946A CN 201811345567 A CN201811345567 A CN 201811345567A CN 109432946 A CN109432946 A CN 109432946A
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- gas treatment
- vent gas
- adsorption layer
- arsine
- treatment bucket
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/25—Coated, impregnated or composite adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Treating Waste Gases (AREA)
Abstract
The present invention relates to Chemical Engineering Design fields, disclose a kind of vent gas treatment bucket of arsine, it include vent gas treatment bucket, temperature sensor assembly and exhaust pipe, pass through Optimal Structure Designing, it is provided with physical absorption layer in vent gas treatment bucket, purified treatment is carried out to the tail gas containing arsine by way of physical absorption；By reasonable disposition, temperature sensors component is added to be monitored the temperature of physical absorption layer, when a certain adsorption layer temperature is higher than setting value, control arsine exhaust pipe flow avoids the excessively high destruction adsorption layer of exhaust temperature, and pass through cold chain interlayer housing nested on the outside of vent gas treatment bucket, whole temperature is controlled, prevents arsine due to the excessively high burning of temperature.
Description
Technical field
The present invention relates to Chemical Engineering Design field, the vent gas treatment bucket of especially a kind of arsine.
Background technique
Arsine is a kind of colourless, hypertoxic, fuel gas at room temperature and atmospheric pressure, has garlic smell, mixes with air shape
At combustion mixture；It is slightly soluble in water and organic solvent, easily reacts with potassium permanganate, bromine and sodium hypochlorite etc. and generates the chemical combination of arsenic
Object.Arsine is stable at room temperature, starts to decompose at 230-240 DEG C, is a kind of hemolytic toxicant, and can be poisoned nerve.Arsine is used
" N " type of epitaxial silicon adulterates in semi-conductor industry, and " N " type diffusion in silicon, ion implanting grows GaAs (GaAs), phosphorus arsenic
The compound semiconductor changing gallium (GaAsP) and being formed with III/V group element.The arsine industrially produced is used for organic synthesis.
There are mainly three types of the methods for handling the exhaust gas containing Arsenic and species of Arsenic: absorption method, Bubbling method and spray process.Absorption method
It is the processing method that arsine is adsorbed using the active carbon for being soaked with some oxides, the treatment effeciency of this method is not high, processing
As a result it cannot be guaranteed that, and adsorb arsine adsorbent be also difficult to handle；Bubbling method is the liquid that exhaust gas is passed through processing solution
Hereinafter, under the action of exhaust gas pressure, arsine liquid to be treated absorbs in face, other gases are overflowed from treatment fluid, and this method is same
Sample has that treatment effeciency is not high and cannot be guaranteed that tail gas is up to standard after handling；Spray process refers to gas in spray equipment
It moves from bottom to top, and treatment fluid is sprayed from top to bottom with gas haptoreaction, it is used to achieve the purpose that handle arsine
Treatment fluid generally is oxidant.However different its treatment effeciency of oxidant of selection is also very different, current processing side
Method treatment effeciency is not high, and is not handled well the arsenic-containing waste water after absorption arsine.
Summary of the invention
The purpose of the present invention is to provide a kind of vent gas treatment buckets of arsine, effectively to remove arsenic a small amount of in tail gas
Alkane.
To realize above-mentioned technical purpose and the technique effect, the invention discloses a kind of vent gas treatment bucket of arsine,
Vent gas treatment bucket one end bottom is connected with arsine exhaust pipe, which is characterized in that includes vent gas treatment bucket, temperature sensor group
Part and exhaust pipe, vent gas treatment bucket are multilayer filter structure, are isolated by several detachable partitions, are isolated several
Physical absorption layer, temperature sensor assembly are installed on the top of vent gas treatment bucket, the sensor side insertion of temperature sensor assembly
In the depths 1/3-1/2 of vent gas treatment bucket, exhaust pipe is mounted on the top of vent gas treatment bucket.
Wherein, partition is in periodic amplitude transformation connection installation.
Preferably, partition is in periodical broken line, periodic rectangular or periodic sinusoidal connection installation.
It preferably, further include having cold liquid interlayer housing, cold liquid interlayer housing is nested in the outside of vent gas treatment bucket, cold chain folder
Outer puts on of layer is provided with cold liquid inlet and cold liquid liquid outlet, and cold liquid inlet is set to below cold liquid liquid outlet, and collet is cooling
Liquid conveys cooling in collet in a counter-current fashion.
Wherein, physical absorption layer has three groups, includes that primary filter adsorption layer, middle rank filtering adsorption layer and advanced filtering are inhaled
Attached layer, primary filter adsorption layer, middle rank filtering adsorption layer and advanced filtering adsorbent layer thickness ratio are 2-4:1-2:1-2.
Preferably, primary filter adsorption layer is made of metal oxide, middle rank filtering adsorption layer by porous material suppress and
At advanced filtering adsorption layer is amorphous polymer material composition.
Further, primary filter adsorption layer is one of copper oxide, manganese oxide, nickel oxide, chromium oxide or a variety of mixed
Collocation is closed to use.
Further, middle rank filtering adsorption layer is by one in active carbon, foam metal, porous silica material, carbon-supported catalysts
Kind or a variety of mix and match use.
Further, advanced filtering adsorption layer is that one of silica gel, amorphous state molecular sieve or a variety of mix and match use.
Preferably, all materials of primary filter adsorption layer, middle rank filtering adsorption layer and advanced filtering adsorption layer require
Baking 18-26 hours of 220-240 °C.
The invention has the following advantages:
1. the present invention is provided with physical absorption layer in vent gas treatment bucket, passes through the side of physical absorption by Optimal Structure Designing
Formula carries out purified treatment to the tail gas containing arsine.
2. passing through reasonable disposition, adds temperature sensors component and the temperature of physical absorption layer is monitored, when
Control arsine exhaust pipe flow avoids the excessively high destruction adsorption layer of exhaust temperature when a certain adsorption layer temperature is higher than setting value, and leads to
The nested cold chain interlayer housing on the outside of vent gas treatment bucket is crossed, whole temperature is controlled, prevents arsine due to the excessively high burning of temperature.
3. by vent gas treatment bucket treated tail gas, the concentration of arsine is from 0.62g/m3It is reduced to 0.7mg/m3, an oxygen
The pernicious gases such as change carbon, hydrogen sulfide, which can also handle together, reaches national emission standard.
Detailed description of the invention
Fig. 1 is a schematic structural view of Embodiment 1 of the present invention.
Fig. 2 is a schematic structural view of Embodiment 2 of the present invention.
Fig. 3 is a schematic structural view of Embodiment 3 of the present invention.
Main component symbol description:
1: vent gas treatment bucket, 2: arsine exhaust pipe, 3: temperature sensor assembly, 4: exhaust pipe, 5: partition, 6: sensor
End, 7: cold liquid interlayer housing, 8: cold liquid inlet, 9: cold liquid liquid outlet, 10: primary filter adsorption layer, 11: middle rank filtering absorption
Layer, 12: advanced filtering adsorption layer.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.
Embodiment 1
As shown in Figure 1, the invention discloses a kind of vent gas treatment bucket of arsine, 1 one end bottom of vent gas treatment bucket and arsine tail gas
Pipeline 2 is connected, and includes vent gas treatment bucket 1, temperature sensor assembly 3 and exhaust pipe 4, and vent gas treatment bucket 1 is multiple filtration
Structure is isolated by several detachable partitions 5, wherein partition 5 is in periodical broken line connection installation, is isolated several
Physical absorption layer, temperature sensor assembly 3 are installed on the top of vent gas treatment bucket 1, the sensor side 6 of temperature sensor assembly 3
It is inserted in the depths 1/3-1/2 of vent gas treatment bucket, exhaust pipe 4 is mounted on the top of vent gas treatment bucket 1, also adds cold liquid folder
Layer housing 7, cold liquid interlayer housing 7 are nested in the outside of vent gas treatment bucket 1, cold liquid inlet 8 are provided on cold chain interlayer housing 7
With cold liquid liquid outlet 9, cold liquid inlet 8 is set to cold 9 lower section of liquid liquid outlet, and collet coolant liquid is in a counter-current fashion in collet
Conveying cooling.
Wherein, physical absorption layer has three groups, includes primary filter adsorption layer 10, middle rank filtering adsorption layer 11 and advanced mistake
Adsorption layer 12 is filtered, primary filter adsorption layer 10, middle rank filtering adsorption layer 11 and advanced 12 thickness proportion of filtering adsorption layer are 4:2:
2。
Primary filter adsorption layer 10 is that cupric oxide powder mixes compacting use, middle rank with manganese oxide powder 1:1 in mass ratio
Filtering adsorption layer 11 is active carbon, and advanced filtering adsorption layer 12 is silica gel.
The all materials of primary filter adsorption layer 10, middle rank filtering adsorption layer 11 and advanced filtering adsorption layer 12 require
220-240 °C of baking 18-26 hours.
Working principle:
The present invention purifies the tail gas containing a small amount of arsine by three groups of physical absorption layers being arranged in vent gas treatment bucket 1
Processing, tail gas containing arsine are entered in primary filter adsorption layer 10 by the arsine exhaust pipe 2 of 1 bottom of vent gas treatment bucket, then
Walk to pass sequentially through middle rank filtering adsorption layer 11 and advanced filtering adsorption layer 12 from lower to upper, due to the physical absorbent in adsorption layer
Effect can remove a small amount of arsine for containing in tail gas, filtered later other pass through 4 row of exhaust pipe at the top of processing bucket
Out；Since absorption heat can be generated in adsorption process, be provided on vent gas treatment bucket 1 temperature sensor assembly 3 into
Row monitoring, when a certain adsorption layer temperature is higher than setting value, control 2 flow of arsine exhaust pipe avoids the excessively high destruction of exhaust temperature
Adsorption layer, and cooled down by installing cold liquid interlayer housing 7 additional on the outside of processing bucket, it avoids since gas is due to heat mistake
It is high and burn.
Embodiment 2
As shown in Fig. 2, wherein vent gas treatment bucket 1 is multilayer filter structure the invention discloses a kind of vent gas treatment bucket of arsine,
It is isolated by several detachable partitions 5, wherein partition 5 isolates several physics and inhale in periodic rectangular connection installation
Attached layer, the design of remaining structure of vent gas treatment bucket and working principle are same as Example 1.
Wherein, physical absorption layer has three groups, includes primary filter adsorption layer 10, middle rank filtering adsorption layer 11 and advanced mistake
Adsorption layer 12 is filtered, primary filter adsorption layer 10, middle rank filtering adsorption layer 11 and advanced 12 thickness proportion of filtering adsorption layer are 3:2:
1。
Primary filter adsorption layer 10 is that cupric oxide powder mixes compacting use, middle rank with nickel oxide powder 2:1 in mass ratio
Filtering adsorption layer 11 is foam metal, and advanced filtering adsorption layer 12 is amorphous state molecular sieve.
The all materials of primary filter adsorption layer 10, middle rank filtering adsorption layer 11 and advanced filtering adsorption layer 12 require
220-240 °C of baking 18-26 hours.
Embodiment 3
As shown in figure 3, wherein vent gas treatment bucket 1 is multilayer filter structure the invention discloses a kind of vent gas treatment bucket of arsine,
It is isolated by several detachable partitions 5, wherein partition 5 isolates several physics and inhale in periodic sinusoidal connection installation
Attached layer, the design of remaining structure of vent gas treatment bucket and working principle are same as Example 1.
Wherein, physical absorption layer has three groups, includes primary filter adsorption layer 10, middle rank filtering adsorption layer 11 and advanced mistake
Adsorption layer 12 is filtered, primary filter adsorption layer 10, middle rank filtering adsorption layer 11 and advanced 12 thickness proportion of filtering adsorption layer are 2:2:
2。
Primary filter adsorption layer 10 is that nickel oxide powder mixes compacting use, middle rank with chromium oxide powder 1:2 in mass ratio
Filtering adsorption layer 11 is carbon-supported catalysts, and advanced filtering adsorption layer 12 is silica gel.
The all materials that primary filter adsorption layer 10, middle rank filter adsorption layer 11 require the baking 18- at 220-240 °C
26 hours.
Embodiment 4
The present embodiment carries out vent gas treatment using embodiment 1-3 as Research foundation, for vent gas treatment bucket designed by embodiment 1-3
Evaluation, specific experiment result are as follows:
1 exhaust gas component general view table of table
| Title | Percentage | Main adsorption layer |
| Helium | 90% | Inert gas does not absorb substantially |
| Nitrogen | 5% | Inert gas does not absorb substantially |
| Carbon monoxide | 0.5% | Primary and middle rank filtering adsorption layer |
| Carbon dioxide | 1% | Primary and middle rank filtering adsorption layer |
| Methane, ethane | 0.5% | Middle rank filtering adsorption layer |
| Hydrogen sulfide | 0.5% | Intermediate and advanced filtering adsorption layer |
| Germane | 0.1% | Primary, middle rank and advanced filtering adsorption layer |
| Arsine | 0.1% | Primary, middle rank and advanced filtering adsorption layer |
| Other gaseous impurities | 0.5% | Primary, middle rank and advanced filtering adsorption layer |
Ingredient general view table after 2 vent gas treatment of table
| Title | After processing |
| Helium | It is unchanged |
| Nitrogen | It is unchanged |
| Carbon monoxide | Reach International Emissions standard |
| Carbon dioxide | Reach International Emissions standard |
| Methane, ethane | Reach International Emissions standard |
| Hydrogen sulfide | Reach International Emissions standard |
| Germane | Reach International Emissions standard |
| Arsine | Reach International Emissions standard |
| Other gaseous impurities | Reach International Emissions standard |
Tail gas mainly becomes 95% or more helium, nitrogen, carbon monoxide, carbon dioxide, vulcanization before being passed through exhaust gas treating device
Hydrogen, germane, arsine etc., wherein the concentration of arsine is from 0.62g/m3It is reduced to 0.7mg/m3, remaining carbon monoxide, hydrogen sulfide etc. have
Evil gas, which can also handle together, reaches national emission standard.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.
Claims (10)
1. a kind of vent gas treatment bucket of arsine, vent gas treatment bucket one end bottom is connected with arsine exhaust pipe, feature
It is, includes vent gas treatment bucket, temperature sensor assembly and exhaust pipe, the vent gas treatment bucket is multiple filtration knot
Structure is isolated by several detachable partitions, isolates several physical absorption layers, the temperature sensor assembly installation
In the top of vent gas treatment bucket, the sensor side of temperature sensor assembly is inserted in the depths 1/3-1/2 of vent gas treatment bucket, described
Exhaust pipe be mounted on the top of vent gas treatment bucket.
2. a kind of vent gas treatment bucket of arsine as described in claim 1, it is characterised in that: the partition is in periodic amplitude
Transformation connection installation.
3. a kind of vent gas treatment bucket of arsine as claimed in claim 2, it is characterised in that: the partition is in periodically folding
Line, periodic rectangular or periodic sinusoidal connection installation.
4. a kind of vent gas treatment bucket of arsine as described in claim 1, it is characterised in that: it further include having cold liquid interlayer housing,
The cold liquid interlayer housing is nested in the outside of vent gas treatment bucket, puts on outside the cold chain interlayer and is provided with cold liquid inlet
With cold liquid liquid outlet, the cold liquid inlet is set to below cold liquid liquid outlet, and collet coolant liquid is being pressed from both sides in a counter-current fashion
Cooling is conveyed in set.
5. a kind of vent gas treatment bucket of arsine as described in claim 1, it is characterised in that: the physical absorption layer has three
Group, includes primary filter adsorption layer, middle rank filtering adsorption layer and advanced filtering adsorption layer, the primary filter adsorption layer,
Middle rank filtering adsorption layer and advanced filtering adsorbent layer thickness ratio are 2-4:1-2:1-2.
6. a kind of vent gas treatment bucket of arsine as claimed in claim 5, it is characterised in that: the primary filter adsorption layer by
Metal oxide composition, the middle rank filtering adsorption layer are suppressed by porous material, and the advanced filtering adsorption layer is
Amorphous polymer material composition.
7. a kind of vent gas treatment bucket of arsine as claimed in claim 6, it is characterised in that: the primary filter adsorption layer is
One of copper oxide, manganese oxide, nickel oxide, chromium oxide or a variety of mix and match use.
8. a kind of vent gas treatment bucket of arsine as claimed in claim 6, it is characterised in that: the middle rank filtering adsorption layer by
One of active carbon, foam metal, porous silica material, carbon-supported catalysts or a variety of mix and match use.
9. a kind of vent gas treatment bucket of arsine as claimed in claim 6, it is characterised in that: the advanced filtering adsorption layer is
One of silica gel, amorphous state molecular sieve or a variety of mix and match use.
10. a kind of vent gas treatment bucket of arsine as claimed in claim 5, it is characterised in that: the primary filter adsorption layer,
The all materials of middle rank filtering adsorption layer and advanced filtering adsorption layer are required baking 18-26 hours of 220-240 °C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811345567.7A CN109432946A (en) | 2018-11-13 | 2018-11-13 | A kind of vent gas treatment bucket of arsine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811345567.7A CN109432946A (en) | 2018-11-13 | 2018-11-13 | A kind of vent gas treatment bucket of arsine |
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| Publication Number | Publication Date |
|---|---|
| CN109432946A true CN109432946A (en) | 2019-03-08 |
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| CN209576198U (en) * | 2018-11-13 | 2019-11-05 | 博纯材料股份有限公司 | A kind of vent gas treatment bucket of arsine |
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2018
- 2018-11-13 CN CN201811345567.7A patent/CN109432946A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1748837A (en) * | 2004-08-27 | 2006-03-22 | 应用材料股份有限公司 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream |
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