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CN109424526B - Actuator - Google Patents

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Publication number
CN109424526B
CN109424526B CN201710725085.3A CN201710725085A CN109424526B CN 109424526 B CN109424526 B CN 109424526B CN 201710725085 A CN201710725085 A CN 201710725085A CN 109424526 B CN109424526 B CN 109424526B
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Prior art keywords
plate
sheet
outer frame
actuator
hole
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CN201710725085.3A
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CN109424526A (en
Inventor
莫皓然
薛达伟
莫立邦
陈世昌
林景松
韩永隆
黄启峰
蔡长谚
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Microjet Technology Co Ltd
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Microjet Technology Co Ltd
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Publication of CN109424526A publication Critical patent/CN109424526A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0027Pulsation and noise damping means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

An actuator comprises a suspension plate, an outer frame, a bracket and a piezoelectric patch, wherein the suspension plate is provided with a first surface and a second surface and can be bent and vibrated; the outer frame is arranged around the outer side of the suspension plate; the bracket is connected between the suspension plate and the outer frame to provide elastic support; the piezoelectric sheet is provided with two electrodes of silver-palladium alloy synthesized by doped graphene materials, wherein the surface layer of one electrode is coated with a heat conduction layer of paint synthesized by doped graphene materials, the other electrode is coated with an adhesive layer of epoxy resin glue synthesized by doped graphene materials, the adhesive layer is adhered to the first surface of the suspension plate, and the two electrodes apply voltage to drive the suspension plate to vibrate in a bending mode.

Description

Actuator
[ technical field ] A method for producing a semiconductor device
The present invention relates to an actuator, and more particularly, to a miniature, ultra-thin and silent actuator.
[ background of the invention ]
At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed toward refinement and miniaturization, wherein actuators included in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.
For example, in the medical industry, many instruments or devices that require pneumatic power actuation are required, such as: blood pressure monitors, or portable, wearable devices or equipment that typically employ conventional motors and pneumatic valves for fluid delivery purposes. However, the volume of the conventional motor and the fluid valve is limited, so that it is difficult to reduce the volume of the whole device, i.e. to achieve the goal of thinning, and further, the portable purpose of the apparatus cannot be achieved. In addition, the conventional motors and fluid valves also generate noise and poor heat dissipation during operation, which causes inconvenience and discomfort in use.
Therefore, how to develop an actuator that can improve the above-mentioned drawbacks of the known technology, and can make the conventional pneumatic-driven apparatus or device achieve small size, miniaturization and silence, and further improve the thermal conductivity and fast heat dissipation, thereby achieving the purpose of portable portability is a problem that needs to be solved.
[ summary of the invention ]
The main objective of the present invention is to provide an actuator having a piezoelectric plate combined with a suspension plate, wherein a pressure gradient is generated in a designed flow channel by fluid fluctuation generated by high-frequency actuation of the piezoelectric plate, so that fluid flows at a high speed, and the fluid is transmitted from a suction end to a discharge end through impedance difference in the inlet and outlet directions of the flow channel, thereby solving the disadvantages of large volume, difficulty in thinning, incapability of achieving portable purpose, and loud noise of the prior art in an apparatus or equipment driven by pneumatic power.
Another objective of the present invention is to provide an actuator, in which the piezoelectric sheet has two electrodes doped with silver-palladium alloy synthesized by graphene material, and can reduce impedance and increase charge moving speed, and increase thermal conductivity to achieve rapid heat dissipation, and a thermal conductive layer doped with coating synthesized by graphene material is coated on a surface layer of one of the electrodes, and also can increase thermal conductivity to achieve rapid heat dissipation, and an adhesive layer doped with epoxy resin glue synthesized by graphene material is coated on the other electrode to adhere to the first surface of the suspension plate, and also can reduce impedance and increase charge moving speed, and increase thermal conductivity to achieve rapid heat dissipation, so that the actuator can achieve optimal driving performance, and also can increase thermal conductivity to achieve rapid heat dissipation.
To achieve the above object, a broader aspect of the present invention provides an actuator, including: the suspension plate is provided with a first surface and a second surface and can be bent and vibrated; the outer frame is arranged around the outer side of the suspension plate; at least one bracket connected between the suspension plate and the outer frame to provide elastic support; and the piezoelectric sheet is provided with two electrodes of silver-palladium alloy synthesized by doped graphene materials, wherein the surface layer of one electrode is coated with a heat conduction layer of paint synthesized by doped graphene materials, the other electrode is coated with an adhesive layer of epoxy resin glue synthesized by doped graphene materials, the adhesive layer is adhered to the first surface of the suspension plate, and voltage is applied through the two electrodes to drive the suspension plate to bend and vibrate.
[ description of the drawings ]
Fig. 1 is a schematic view of an exploded structure of an actuator, which is matched with an air inlet plate, a resonator plate, an air inlet plate, a first insulating plate, a conductive plate and a second insulating plate, viewed from a front view angle.
Fig. 2 is a schematic view of an exploded structure of the actuator with an air inlet plate, a resonator plate, an air inlet plate, a first insulating plate, a conductive plate and a second insulating plate viewed from a back view.
Fig. 3 is a schematic cross-sectional view and a partially enlarged view of the piezoelectric plate, the suspension plate, the bracket and the outer frame of the actuator according to the present invention.
Fig. 4 is a schematic cross-sectional view of the actuator with the air inlet plate, the resonator plate, the air inlet plate, the first insulating plate, the conductive plate and the second insulating plate.
Fig. 5A to 5E are structural views illustrating an operation flow of the actuator shown in fig. 4.
[ detailed description ] embodiments
Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.
Referring to fig. 1, 2 and 4, the actuator 1 mainly includes a suspension plate 11, an outer frame 12, at least one support 13 and a piezoelectric sheet 14. Wherein, the suspension board 11 has a first surface 11c and a second surface 11b, and can be bent and vibrated; an outer frame 12 surrounding the suspension plate 11; in the embodiment, two end points of each bracket 13 are respectively connected between the outer frame 12 and the suspension plate 11 to provide an elastic support, and at least one gap 15 is further provided between the bracket 13, the suspension plate 11 and the outer frame 12, and the at least one gap 15 is used for air circulation. It should be emphasized that the shapes and the number of the suspension plate 11, the outer frame 12 and the bracket 13 are not limited to the above embodiments, and may be changed according to the requirements of practical applications. In addition, the outer frame 12 is disposed around the outer side of the suspension board 11, and has a conductive pin 12c protruding outward for power connection, but not limited thereto.
The suspension plate 11 of the present embodiment is a step-plane structure (as shown in fig. 3), that is, the second surface 11b of the suspension plate 11 further has a protrusion 11a, and the protrusion 11a may be, but is not limited to, a circular protrusion structure. The convex portion 11a of the suspension plate 11 is coplanar with the second surface 12a of the outer frame 12, the second surface 11b of the suspension plate 11 and the second surface 13a of the bracket 13 are also coplanar, and a certain depth is formed between the convex portion 11a of the suspension plate 11 and the second surface 12a of the outer frame 12, and the second surface 11b of the suspension plate 11 and the second surface 13a of the bracket 13. The first surface 11c of the suspension plate 11, the first surface 12b of the outer frame 12 and the first surface 13b of the bracket 13 are flat and coplanar, but not limited thereto.
The piezoelectric sheet 14 of the present embodiment is attached at the first surface 11c of the suspension plate 11. In other embodiments, the suspension plate 11 may also be a square structure with a flat surface and a flat surface, and the shape of the suspension plate may be changed according to the actual implementation. In some embodiments, the suspension plate 11, the bracket 13 and the outer frame 12 may be integrally formed, and may be made of a metal plate, such as but not limited to stainless steel. In still other embodiments, the length of the piezoelectric sheet 14 is less than the length of the suspension plate 11. In other embodiments, the length of the piezoelectric sheet 14 is equal to the length of the suspension plate 11, and the piezoelectric sheet is also designed to have a square plate-like structure corresponding to the suspension plate 11, but not limited thereto. In addition, the piezoelectric sheet 14 of the present embodiment has two electrodes 14a and 14b doped with silver-palladium alloy synthesized by graphene, the electrodes 14a and 14b are used to reduce impedance and increase the charge moving speed, and improve thermal conductivity to achieve rapid heat dissipation, wherein the surface layer of one electrode 14a is coated with a thermal conductive layer 14c doped with coating synthesized by graphene, and also can improve thermal conductivity to achieve rapid heat dissipation, and the other electrode 14b is coated with an adhesive layer 14d doped with epoxy resin glue synthesized by graphene, and is attached and adhered to the first surface 11c of the suspension plate 11, so as to reduce impedance and increase the charge moving speed, and improve thermal conductivity to achieve rapid heat dissipation, and voltages applied to the two electrodes 14a and 14b can drive the suspension plate 11 to vibrate in a bending manner.
Referring to fig. 1 and fig. 2, as shown in the figure, the actuator 1 of the present embodiment further includes a gas inlet plate 16, a resonator plate 17, insulating plates 18a and 18b, and a conducting plate 19, wherein the suspension plate 11 is disposed corresponding to the resonator plate 17, and the gas inlet plate 16, the resonator plate 17, the outer frame 12, the insulating plate 18a, the conducting plate 19, and the other insulating plate 18b are sequentially stacked, and the assembled cross-sectional view is as shown in fig. 4.
Referring to fig. 1 and fig. 2, as shown in fig. 1, in the present embodiment, the air inlet plate 16 has at least one air inlet hole 16a, wherein the number of the air inlet holes 16a is preferably 4, but not limited thereto. The air inlet hole 16a penetrates the air inlet plate 16 for air to flow from the at least one air inlet hole 16a by the action of atmospheric pressure outside the device. As shown in fig. 2, the air inlet plate 16 has at least one bus hole 16b, a central concave portion 16c is disposed at a central communication position of the bus hole 16b, and the central concave portion 16c is communicated with the bus hole 16b, and the air inlet plate 16 has a first surface 16d coated with a coating synthesized by doped graphene material, which can improve thermal conductivity to achieve rapid heat dissipation, and at least one bus hole 16b is disposed corresponding to at least one air inlet hole 16a of the first surface 16d, so that the gas entering the bus hole 16b from the at least one air inlet hole 16a can be guided and converged and concentrated to the central concave portion 16c to achieve gas transmission. In the present embodiment, the air inlet plate 16 has an air inlet hole 16a, a bus hole 16b and a central recess 16c, and a converging chamber for converging air is formed at the central recess 16c for temporary storage of air. In some embodiments, the air inlet plate 16 may be made of stainless steel, but not limited thereto. In other embodiments, the depth of the bus chamber formed by the central recess 16c is the same as the depth of the bus bar hole 16b, but not limited thereto. The resonator plate 17 is made of a flexible material, but not limited thereto, and the resonator plate 17 has a hollow hole 17c corresponding to the central recess 16c of the inlet plate 16 for gas to flow through. In other embodiments, the resonator plate 17 may be made of a copper material, but not limited thereto.
In the present embodiment, as shown in fig. 1, fig. 2 and fig. 4, the insulating sheet 18a, the conductive sheet 19 and the another insulating sheet 18b of the present embodiment are sequentially and correspondingly disposed under the outer frame 12, and the shape thereof substantially corresponds to the shape of the outer frame 12. In some embodiments, the insulating sheets 18a, 134b are made of an insulating material, such as but not limited to plastic, to provide an insulating function. In other embodiments, the conductive sheet 19 may be made of a conductive material, such as but not limited to a metal material, to provide an electrical conduction function. In this embodiment, a conductive pin 19a may also be disposed on the conductive sheet 19 to achieve the electrical conduction function, the conductive pin 12c is electrically connected to one electrode 14a of the piezoelectric sheet 14, and the conductive pin 19a is electrically connected to the other electrode 14b of the piezoelectric sheet 14.
In the present embodiment, as shown in fig. 4, the air inlet plate 16, the resonator plate 17, the outer frame 12, the insulating plate 18a, the conducting plate 19 and the other insulating plate 18b are sequentially stacked to form a device for fluid transportation, and a gap h is formed between the resonator plate 17 and the outer frame 12. in the present embodiment, a filling material, such as but not limited to a conductive adhesive, is filled into the gap h between the resonator plate 17 and the periphery of the outer frame 12, so that the depth of the gap h can be maintained between the resonator plate 17 and the convex portion 11a of the suspension plate 11, and further the air flow can be guided to flow more rapidly, and the contact interference between the convex portion 11a of the suspension plate 11 and the resonator plate 17 is reduced because the convex portion 11a of the suspension plate 11 and the resonator plate 17 maintain a proper distance, so that the noise. In other embodiments, the height of the outer frame 12 can be increased to increase a gap when the outer frame is assembled with the resonant plate 17, but not limited thereto.
Referring to fig. 1, 2 and 4, in the present embodiment, after the air inlet plate 16, the resonator plate 17 and the outer frame 12 are assembled in sequence, the resonator plate 17 has a movable portion 17a and a fixed portion 17b, the movable portion 17a and the air inlet plate 16 thereon form a chamber for collecting gas, and a first chamber 10 is further formed between the resonator plate 17 and the suspension plate 11, the bracket 13 and the outer frame 12 for temporarily storing gas, the first chamber 10 is communicated with the collecting chamber at the central recess 16c of the air inlet plate 16 through the hollow hole 17c of the resonator plate 17, and two sides of the first chamber 10 are communicated with the fluid channel through the gap 15 of the bracket 13.
Referring to fig. 1, 2, 4, and 5A to 5E, when the piezoelectric sheet 14 is actuated by voltage, the support 13 is used as a fulcrum to perform reciprocating vibration in the vertical direction. As shown in fig. 5A, when the piezoelectric sheet 14 is actuated by voltage to vibrate downwards, since the resonance sheet 17 is a light and thin sheet-like structure, when the piezoelectric sheet 14 vibrates, the resonance sheet 17 also vibrates vertically and reciprocally along with the resonance, that is, the portion of the resonator plate 17 corresponding to the central recess 16c is deformed by bending vibration, that is, the portion corresponding to the central recess 16c is the movable portion 17a of the resonator plate 17, so that when the piezoelectric plate 14 bends and vibrates downward, at this time, the movable portion 17a of the resonator plate 17 corresponding to the central recess 16c is brought by the gas and pushed and the piezoelectric sheet 14 is vibrated, and, as the piezoelectric sheet 14 is deformed by bending vibration downward, gas enters through at least one gas inlet hole 16a of the gas inlet plate 16, and then flows into the first chamber 10 through at least one bus bar hole 16b to be collected at the central concave portion 16c and then through the hollow hole 17c of the resonance sheet 17 corresponding to the central concave portion 16 c. Thereafter, the resonator plate 17 is driven by the vibration of the piezoelectric plate 14 to perform vertical reciprocating vibration along with the resonance, as shown in fig. 5B, at this time, the movable portion 17a of the resonator plate 17 also vibrates downward along with the vibration and is attached to and abutted against the convex portion 11a of the suspension plate 11, so that the distance between the confluence chamber between the region outside the convex portion 11a of the suspension plate 11 and the fixing portions 17B at both sides of the resonator plate 17 is not decreased, and the volume of the first chamber 10 is compressed by the deformation of the resonator plate 17, and the middle circulation space of the first chamber 10 is closed, so that the gas in the first chamber is pushed to flow to both sides, and further flows downward through the gap 15 between the brackets 13 of the piezoelectric plate 14. Then, as shown in fig. 5C, the movable portion 17a of the resonator plate 17 is bent and vibrated to return to the initial position, and the piezoelectric plate 14 is driven by the voltage to vibrate upwards, so as to press the volume of the first chamber 10, but at this time, since the suspension plate 11 is lifted upwards, the gas in the first chamber 10 flows towards both sides, and the gas continuously enters from the at least one gas inlet hole 16a of the gas inlet plate 16 and then flows into the confluence chamber formed by the central recess 16C. Then, as shown in fig. 5D, the resonator plate 17 resonates upward due to the upward vibration of the suspension plate 11, and the movable portion 17a of the resonator plate 17 also vibrates upward, so as to slow down the gas from continuously entering from the at least one gas inlet hole 16a of the gas inlet plate 16, and then flowing into the converging chamber formed by the central concave portion 16 c. Finally, as shown in fig. 5E, the movable portion 17a of the resonator plate 17 is also returned to the initial position, so that the maximum distance of the vertical displacement of the resonator plate 17 can be increased by the gap h between the resonator plate and the outer frame 12 when the resonator plate 17 performs vertical reciprocating vibration, in other words, the gap h is provided between the two structures to allow the resonator plate 17 to generate a larger vertical displacement at the time of resonance. Therefore, a pressure gradient is generated in the flow channel design of the fluid actuator 13, so that the gas flows at a high speed, and the gas is transmitted from the suction end to the discharge end through the impedance difference in the inlet and outlet directions of the flow channel to complete the gas transmission operation, even if the discharge end has air pressure, the gas can still be continuously pushed into the fluid channel, and the silencing effect can be achieved, so that the actions of the figures 5A to 5E are repeated, and the gas transmission from the outside to the inside can be generated.
In summary, the actuator provided by the present disclosure generates a pressure gradient in the designed flow channel by the fluid fluctuation generated by the high-frequency actuation of the piezoelectric plate, so that the fluid flows at a high speed, and the fluid is transmitted from the suction end to the discharge end through the impedance difference in the inlet and outlet directions of the flow channel, so that the fluid flows at a high speed and can be continuously transmitted, thereby achieving the effects of rapidly transmitting the fluid and muting the fluid, further reducing the overall volume and thinning the actuator, and achieving the portable purpose of being light and comfortable. In addition, this scheme passes through the surface of air inlet plate, piezoelectric plate electrode coating doping graphite alkene material synthetic coating, and then reaches the excellent radiating effect. Therefore, the present application has great industrial application value, and the application is provided by the method.
Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.
[ notation ] to show
1: actuator
10: the first chamber
11: suspension plate
11 a: convex part
11 b: second surface
11 c: first surface
12: outer frame
12 a: second surface
12 b: first surface
12 c: conductive pin
13: support frame
13 a: second surface
13 b: first surface
14: piezoelectric patch
14a, 14 b: electrode for electrochemical cell
14 c: heat conducting layer
14 d: adhesive layer
15: voids
16: air inlet plate
16 a: air intake
16 b: bus bar hole
16 c: central concave part
16 d: first surface
17: resonance sheet
17 a: movable part
17 b: fixing part
17 c: hollow hole
18a, 18 b: insulating sheet
19: conductive sheet
19 a: conductive pin
h: gap

Claims (4)

1.一种致动器,其特征在于,包含:1. an actuator, is characterized in that, comprises: 一悬浮板,具有一第一表面及一第二表面,且可弯曲振动;a suspension board, which has a first surface and a second surface, and can bend and vibrate; 一进气板,设置于该悬浮板的该第二表面侧,具有一第一表面、至少一进气孔、至少一汇流排孔及构成一汇流腔室及一中心凹部,其中该第一表面涂布一掺杂石墨烯材所合成涂料,该至少一进气孔供导入气流,该汇流排孔对应该进气孔,且引导该进气孔的气流汇流至该中心凹部所构成的该汇流腔室;An air intake plate, disposed on the second surface side of the suspension plate, has a first surface, at least one air intake hole, at least one confluence row hole, and constitutes a confluence chamber and a central concave portion, wherein the first surface Coating a coating synthesized by doped graphene material, the at least one air inlet is for introducing air flow, the confluence row hole corresponds to the air intake hole, and guides the air flow of the air intake hole to converge to the confluence formed by the central concave portion Chamber; 一共振片,设置于该进气板与该悬浮板之间,具有一中空孔洞对应于该汇流腔室,且该中空孔洞的周围为一可动部;a resonance plate, disposed between the air intake plate and the suspension plate, with a hollow hole corresponding to the confluence chamber, and a movable portion around the hollow hole; 一外框,环绕设置于该悬浮板之外侧;an outer frame, arranged around the outer side of the suspension board; 至少一支架,连接于该悬浮板与该外框之间,以提供弹性支撑;以及at least one bracket connected between the suspension board and the outer frame to provide elastic support; and 一压电片,具有掺杂石墨烯材所合成银钯合金的两电极,其中一电极的表层涂布掺杂石墨烯材所合成涂料的一导热层,而另一电极涂布掺杂石墨烯材所合成环氧树脂胶的一粘贴层,且该粘贴层供与该悬浮板的该第一表面贴附粘着,并透过该两电极施加电压得以驱动该悬浮板弯曲振动。A piezoelectric sheet, having two electrodes of silver-palladium alloy synthesized by doped graphene material, wherein a surface layer of one electrode is coated with a thermal conductive layer of a coating synthesized by doped graphene material, and the other electrode is coated with doped graphene An adhesive layer of epoxy resin glue synthesized from the material is used for adhering and adhering to the first surface of the suspension board, and a voltage is applied through the two electrodes to drive the suspension board to bend and vibrate. 2.如权利要求1所述的致动器,其特征在于,2. The actuator of claim 1, wherein 该共振片与该悬浮板、该支架、该外框之间具有一间隙形成一第一腔室,以使该压电片受驱动而弯曲该悬浮板振动时,使气流由该进气板的该至少一进气孔导入,经该至少一汇流排孔汇集至该中心凹部,再流经该共振片的该中空孔洞,以进入该第一腔室内,由该悬浮板与该共振片的可动部产生共振传输气流。There is a gap between the resonance sheet, the suspension board, the bracket and the outer frame to form a first chamber, so that when the piezoelectric sheet is driven to bend the suspension board to vibrate, the air flow is driven by the air intake plate. The at least one air intake hole is introduced into the central concave portion through the at least one bus-bar hole, and then flows through the hollow hole of the resonant sheet to enter the first chamber. The moving part generates a resonance transmission airflow. 3.如权利要求2所述的致动器,其特征在于,该悬浮板为一正方形,并具有一凸部。3 . The actuator of claim 2 , wherein the hover board is a square and has a convex portion. 4 . 4.如权利要求2所述的致动器,其特征在于,该致动器进一步包括:一导电片、一第一绝缘片以及一第二绝缘片,其中该进气板、该共振片、该外框、该第一绝缘片、该导电片及该第二绝缘片依序堆叠设置。4. The actuator of claim 2, wherein the actuator further comprises: a conductive sheet, a first insulating sheet and a second insulating sheet, wherein the air intake plate, the resonance sheet, The outer frame, the first insulating sheet, the conductive sheet and the second insulating sheet are stacked in sequence.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101777583A (en) * 2010-02-05 2010-07-14 电子科技大学 Graphene field effect transistor
CN103885255A (en) * 2012-12-21 2014-06-25 纳米新能源(唐山)有限责任公司 Self-powered liquid crystal display
CN105203619A (en) * 2015-10-30 2015-12-30 黑龙江大学 Method for detecting p-nitrophenol with graphene/nano silver-nickel alloy as electrode
CN106495693A (en) * 2016-10-19 2017-03-15 北京恒通绿建节能科技有限公司 A kind of PZT bases composite piezoelectric ceramic preparation method and PZT base composite piezoelectric ceramics
CN107023459A (en) * 2016-01-29 2017-08-08 研能科技股份有限公司 Micro fluid control device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012212222B4 (en) * 2012-03-12 2018-05-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluorosilicone-based dielectric elastomer and process for its preparation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101777583A (en) * 2010-02-05 2010-07-14 电子科技大学 Graphene field effect transistor
CN103885255A (en) * 2012-12-21 2014-06-25 纳米新能源(唐山)有限责任公司 Self-powered liquid crystal display
CN105203619A (en) * 2015-10-30 2015-12-30 黑龙江大学 Method for detecting p-nitrophenol with graphene/nano silver-nickel alloy as electrode
CN107023459A (en) * 2016-01-29 2017-08-08 研能科技股份有限公司 Micro fluid control device
CN106495693A (en) * 2016-10-19 2017-03-15 北京恒通绿建节能科技有限公司 A kind of PZT bases composite piezoelectric ceramic preparation method and PZT base composite piezoelectric ceramics

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