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CN109396631B - A hot isostatic pressing diffusion bonding method of tungsten/transition layer/stainless steel - Google Patents

A hot isostatic pressing diffusion bonding method of tungsten/transition layer/stainless steel Download PDF

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CN109396631B
CN109396631B CN201811350980.2A CN201811350980A CN109396631B CN 109396631 B CN109396631 B CN 109396631B CN 201811350980 A CN201811350980 A CN 201811350980A CN 109396631 B CN109396631 B CN 109396631B
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hot isostatic
isostatic pressing
transition layer
tungsten
stainless steel
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CN109396631A (en
Inventor
谢东华
张佳佳
李强
李启寿
龙亮
杨华
蔡永军
邓广平
齐红
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Institute of Materials of CAEP
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/001Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by extrusion or drawing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/021Isostatic pressure welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/023Thermo-compression bonding
    • B23K20/026Thermo-compression bonding with diffusion of soldering material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/22Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)

Abstract

本发明公开了一种钨/过渡层/不锈钢的热等静压扩散连接方法,解决了现有技术中用于面对聚变堆第一壁等离子体偏滤器模块的钨与钢连接件易于在界面形成较大的热应力和微观缺陷的问题。本发明的一种钨/过渡层/不锈钢的热等静压扩散连接方法,以纯钨、过渡层、不锈钢为原料,先经包套处理后,再经热等静压处理、去应力退火、去包套,即可获得热等静压扩散连接件。本发明操作简单,能实现无缺陷的冶金结合,接头性能优异、稳定。The invention discloses a hot isostatic pressure diffusion connecting method of tungsten/transition layer/stainless steel, which solves the problem that the tungsten and steel connecting parts used to face the plasma divertor module of the first wall of the fusion reactor in the prior art are easy to connect at the interface The problem of forming large thermal stress and microscopic defects. In the present invention, a hot isostatic pressing diffusion joining method of tungsten/transition layer/stainless steel takes pure tungsten, transition layer and stainless steel as raw materials, and is first subjected to wrapping treatment, followed by hot isostatic pressing treatment, stress relief annealing, and decompression treatment. The hot isostatic pressing diffusion joint can be obtained. The invention is simple to operate, can realize defect-free metallurgical bonding, and has excellent and stable joint performance.

Description

一种钨/过渡层/不锈钢的热等静压扩散连接方法A hot isostatic pressing diffusion bonding method of tungsten/transition layer/stainless steel

技术领域technical field

本发明属于金属材料界面连接制备技术领域,具体涉及一种钨/过渡层/不锈钢的热等静压扩散连接方法。The invention belongs to the technical field of metal material interface connection preparation, and particularly relates to a hot isostatic pressure diffusion connection method of tungsten/transition layer/stainless steel.

背景技术Background technique

核聚变能因其高效、清洁、安全且原料资源丰富等特点,被称为“人造太阳能",是目前认识到的可以最终解决人类社会能源问题和环境问题、推动人类社会可持续发展的重要途径之一。开发核聚变能源,对于我国的可持续发展有着重要的战略和经济意义。Nuclear fusion energy is known as "artificial solar energy" because of its high efficiency, cleanliness, safety and rich raw material resources. one. The development of nuclear fusion energy has important strategic and economic significance for the sustainable development of our country.

目前,制约核聚变反应堆研究的关键问题之一为偏滤器的制备。偏滤器作为核聚变反应堆的核心部件,处于高温等离子与普通固体材料之间的过渡区,主要部件包括面向等离子体材料、热沉材料和结构材料。由于偏滤器的各部件所处工作环境不同,因此相应对材料的性能要求也有所差别。钨因具有高热导率、耐高温、耐溅射腐烛及低氘氚吸附性等优异的性能而被认为是最有希望的面向等离子材料。低活化钢因具有良好的抗辐射膨胀性、抗氧化性、高温力学性能及经济性而被认为是应用于结构材料和热沉材料的理想材料。因此将钨与钢成功地连接在一起并使其具有一定的使用性能是偏滤器制备的关键。At present, one of the key problems restricting the research of nuclear fusion reactor is the preparation of divertor. As the core component of a nuclear fusion reactor, the divertor is located in the transition zone between high-temperature plasma and ordinary solid materials. The main components include plasma-facing materials, heat sink materials and structural materials. Due to the different working environments of the various components of the divertor, the corresponding performance requirements for the materials are also different. Tungsten is considered to be the most promising plasma-oriented material due to its excellent properties such as high thermal conductivity, high temperature resistance, sputter-corrosion resistance, and low deuterium-tritium adsorption. Low activation steel is considered to be an ideal material for structural materials and heat sink materials because of its good resistance to radiation expansion, oxidation resistance, high temperature mechanical properties and economy. Therefore, it is the key to the preparation of divertor to successfully connect tungsten and steel together and make it have certain performance.

钨钢扩散连接的关键问题钨与钢的熔点(Tw=3400℃,TS=~1500℃)相差较大,热膨胀系数差异较大,(钨的热膨胀系数4.4×10-6·K-1,钢的热膨胀系数12×10-6·K-1),这导致在接头界面较大的残余应力,并难以采用传统的熔化焊将其连接。目前,钨与钢的连接方法主要有高温钎焊连接和扩散焊连接。高温钎焊和扩散焊连接易于在界面形成较大的热应力和微观缺陷。为了获得更好的热输运性质,钨钢接头必须获得无缺陷的冶金结合界面。The key problem of diffusion connection of tungsten steel The melting point of tungsten and steel (Tw=3400℃, TS=~1500℃) is quite different, and the thermal expansion coefficient is quite different. The thermal expansion coefficient is 12×10-6·K-1), which leads to large residual stress at the joint interface, and it is difficult to connect them by traditional fusion welding. At present, the connection methods of tungsten and steel mainly include high temperature brazing connection and diffusion welding connection. High temperature brazing and diffusion welding connections are prone to large thermal stress and microscopic defects at the interface. To obtain better heat transport properties, tungsten steel joints must obtain defect-free metallurgical bonding interfaces.

CN106181015A的专利《一种聚变堆包层附钨U型含流道第一壁部件的制造工艺》公开了一种适用于聚变堆包层的附钨U型含流道第一壁部分的制造工艺方法,采用热等静压扩散焊技术将钨与U型含流道钢复合在一起,进而实现功能化。但该专利对于钨与钢的结合仅提出一个概念性想法。在大气环境下包套焊接会因温度太高致使待焊面已氧化;另外镀层为多孔非致密材料,吸附的空气在热除气时仍难以脱附完全,仍会发生氧化或残留在界面而降低性能。此外,该文献的焊接温度明显太低使得界面元素互扩散不充分,连接强度偏低。The patent of CN106181015A, "Manufacturing process of the first wall part of the U-shaped flow channel containing tungsten attached to the cladding of fusion reactor", discloses a manufacturing process of the first wall part of the U-shaped containing flow channel with tungsten attached to the cladding of the fusion reactor. Method, using hot isostatic pressure diffusion welding technology to compound tungsten and U-shaped steel with runner, and then realize functionalization. But the patent only presents a conceptual idea for the combination of tungsten and steel. In the atmospheric environment, the welding surface will be oxidized due to the high temperature; in addition, the coating is a porous non-dense material, and the adsorbed air is still difficult to be completely desorbed during thermal degassing, and it will still oxidize or remain on the interface. Reduce performance. In addition, the soldering temperature of this document is obviously too low, so that the interdiffusion of interfacial elements is insufficient, and the connection strength is low.

因此,提供一种钨钢连接方法,操作简单,能实现无缺陷的冶金结合,接头性能优异、稳定,成为了本领域技术人员亟待解决的问题。Therefore, to provide a tungsten steel connection method, which is easy to operate, can achieve defect-free metallurgical bonding, and has excellent and stable joint performance, has become an urgent problem to be solved by those skilled in the art.

发明内容SUMMARY OF THE INVENTION

本发明解决的技术问题是:提供一种钨/过渡层/不锈钢的热等静压扩散连接方法,解决现有技术中用于面对聚变堆第一壁等离子体偏滤器模块的钨与钢连接件易于在界面形成较大的热应力和微观缺陷的问题。The technical problem solved by the present invention is: to provide a hot isostatic pressure diffusion connection method of tungsten/transition layer/stainless steel, so as to solve the connection between tungsten and steel in the prior art for facing the plasma divertor module of the first wall of the fusion reactor It is easy to form large thermal stress and microscopic defects at the interface.

本发明采用的技术方案如下:The technical scheme adopted in the present invention is as follows:

本发明所述的一种钨/过渡层/不锈钢的热等静压扩散连接方法,以纯钨、过渡层、不锈钢为原料,先经包套处理后,再经热等静压处理、去应力退火、去包套,即可获得热等静压扩散连接件。The hot isostatic pressing diffusion joining method of tungsten/transition layer/stainless steel according to the present invention uses pure tungsten, transition layer and stainless steel as raw materials, and then undergoes hot isostatic pressing treatment and stress relief annealing after wrapping treatment. , to remove the jacket, you can obtain the hot isostatic pressure diffusion connector.

进一步地,包括以下步骤:Further, the following steps are included:

步骤1.装配:将纯钨、过渡层、不锈钢依次装入包套;Step 1. Assembly: Put the pure tungsten, transition layer and stainless steel into the package in turn;

步骤2.焊接:将经步骤1装配后的包套与带抽气管的包套盖进行焊接,制成包套组件;Step 2. Welding: Weld the package assembled in step 1 with the package cover with the exhaust pipe to form a package assembly;

步骤3.检漏:对步骤2制得的包套组件进行检漏;Step 3. Leak detection: perform leak detection on the package assembly prepared in step 2;

步骤4.热除气:将经步骤3检漏合格后的包套组件放入马弗炉进行热除气;Step 4. Thermal degassing: put the package components that have passed the leak detection in step 3 into the muffle furnace for thermal degassing;

步骤5.密封:将完成步骤4的包套组件上的抽气管进行加热夹封;Step 5. Sealing: heat and seal the air extraction pipe on the package assembly completed in Step 4;

步骤6.热等静压连接:将经步骤5处理后的包套组件置于热等静压机中,对密封于包套内的钨钢进行扩散连接;Step 6. Hot isostatic pressing connection: place the sheathing assembly processed in step 5 in a hot isostatic pressing machine, and perform diffusion bonding on the tungsten steel sealed in the sheathing;

步骤7.去应力退火:在热等静压机内进行去应力退火;Step 7. Stress relief annealing: stress relief annealing in a hot isostatic press;

步骤8.去包套:将经步骤7退火后的包套组件车削去掉包套材料,即可获得热等静压扩散连接件。Step 8. De-encapsulation: The encapsulation component annealed in step 7 is turned to remove the encapsulation material, and the hot isostatic pressure diffusion joint can be obtained.

进一步地,在装配前,还包括表面处理步骤:将纯钨、过渡层、不锈钢的待连接面采用砂纸打磨抛光至镜面;磨抛后依次经酒精、丙酮超声清洗10~30分钟。Further, before assembling, it also includes a surface treatment step: grinding and polishing the surfaces to be joined of pure tungsten, transition layer and stainless steel to a mirror surface with sandpaper; after grinding and polishing, ultrasonically clean with alcohol and acetone for 10-30 minutes.

进一步地,所述纯钨为质量百分比大于99.5%的钨;所述过渡层选自铜箔、镍箔、钛箔单一过渡层中的一种,或者为铜箔+镍箔复合过渡层,且所述过渡层质量百分比大于99.8%,厚度为0.1mm~0.5mm。Further, the pure tungsten is tungsten with a mass percentage greater than 99.5%; the transition layer is selected from a single transition layer of copper foil, nickel foil, and titanium foil, or a composite transition layer of copper foil+nickel foil, and The mass percentage of the transition layer is greater than 99.8%, and the thickness is 0.1mm-0.5mm.

进一步地,所述包套、包套盖、抽气管的材料选自08F铁皮、1Cr18Ni9Ti钢、316L不锈钢中的任意一种。Further, the material of the wrapping, wrapping cover, and air extraction pipe is selected from any one of 08F iron sheet, 1Cr18Ni9Ti steel, and 316L stainless steel.

进一步地,所述步骤2中的焊接为在低氧低湿氩气保护手套箱内采用氩弧焊焊接;或者在高真空腔室内采用电子束焊接。Further, the welding in the step 2 is argon arc welding in a low-oxygen and low-humidity argon protected glove box; or electron beam welding in a high-vacuum chamber.

进一步地,所述步骤2为氩弧焊焊接时,保护手套箱内的H2O含量和O含量均低于10ppm;所述步骤2为电子束焊接时,高真空腔室内的真空度大于4×10-3Pa。Further, when the step 2 is argon arc welding, the H 2 O content and the O content in the protective glove box are both lower than 10 ppm; when the step 2 is electron beam welding, the vacuum degree in the high vacuum chamber is greater than 4 ppm. ×10 -3 Pa.

进一步地,所述步骤6中热等静压扩散连接具体为:采用先加压后升温的方式,起始压力加压到50MPa~60MPa后开始升温;保温时间为30min~120min,热等静压压力为130MPa~160MPa。Further, in the step 6, the hot isostatic pressure diffusion connection is specifically as follows: the method of first pressurizing and then heating up is adopted, and the initial pressure is pressurized to 50MPa~60MPa and then the temperature rises; the holding time is 30min~120min, and the hot isostatic pressing The pressure is 130MPa to 160MPa.

进一步地,所述过渡层为铜箔时,所述步骤6中热等静压温度为1000℃~1050℃;Further, when the transition layer is copper foil, the hot isostatic pressing temperature in the step 6 is 1000°C to 1050°C;

所述过渡层为镍箔时,所述步骤6中热等静压温度为1300℃~1350℃;When the transition layer is nickel foil, the hot isostatic pressing temperature in step 6 is 1300°C to 1350°C;

所述过渡层为钛箔时,所述步骤6中热等静压温度为1250℃~1350℃;When the transition layer is a titanium foil, the hot isostatic pressing temperature in the step 6 is 1250°C to 1350°C;

所述过渡层为铜箔+镍箔复合层时,所述步骤6中热等静压温度为950℃~1050℃。When the transition layer is a copper foil+nickel foil composite layer, the hot isostatic pressing temperature in the step 6 is 950°C to 1050°C.

进一步地,所述步骤7中,待热等静压机内的工件温度降至500℃~600℃时,返气匀压至常压后保温30min去应力退火。Further, in the step 7, when the temperature of the workpiece in the hot isostatic pressing machine drops to 500° C. to 600° C., the gas is returned to uniform pressure to normal pressure, and then the temperature is kept for 30 minutes for stress relief annealing.

所述步骤1中的纯钨为纯钨块,不锈钢为不锈钢块。The pure tungsten in the step 1 is a pure tungsten block, and the stainless steel is a stainless steel block.

与现有技术相比,本发明具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

本发明设计科学,操作简便,通过高温高压联合作用促进连接界面材料的原子扩散,采用合适的过渡层及工艺避免产生脆性相,并利用去应力退火有效缓解了界面残余应力,有效地解决了界面污染、残余应力、脆性相、微缺陷等技术难题,获得的接头元素扩散均匀,实现了无缺陷的冶金结合,接头性能优异、稳定,具有积极的工程使用价值。The invention is scientific in design and simple in operation, promotes atomic diffusion of connecting interface materials through the combined action of high temperature and high pressure, adopts appropriate transition layer and process to avoid brittle phase, and uses stress relief annealing to effectively relieve interface residual stress and effectively solve interface problems. Contamination, residual stress, brittle phase, micro-defects and other technical problems, the obtained joint elements diffuse evenly, and a defect-free metallurgical bond is realized. The joint performance is excellent and stable, and it has positive engineering use value.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合实施例,对本发明进行进一步详细说明。应理解,此处所描述的具体实施例仅用以解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

本发明中的检漏为将氦质谱检漏仪与包套端盖上的抽气导管连接进行检漏。The leak detection in the present invention is to connect the helium mass spectrometer leak detector with the air extraction conduit on the end cap of the package to perform leak detection.

实施例1Example 1

本实施例提供了本发明的制备方法,具体为:The present embodiment provides the preparation method of the present invention, specifically:

将纯度为99.5wt%的φ25×20mm纯钨、纯度为99.9wt%的φ25×0.25mm铜箔及φ25×20的316L钢分别依次经200目、400目、600目、1000目、2000目砂纸打磨,然后经粒度(2~5)μm金刚石颗粒水抛光到镜面状态,然后依次分别经酒精、丙酮超声清洗30分钟。The φ25×20mm pure tungsten with a purity of 99.5wt%, the φ25×0.25mm copper foil with a purity of 99.9wt%, and the 316L steel with a φ25×20 were passed through 200-mesh, 400-mesh, 600-mesh, 1000-mesh, and 2000-mesh sandpaper respectively. Grinding, and then water-polished diamond particles with a particle size of (2-5) μm to a mirror state, and then ultrasonically cleaned with alcohol and acetone for 30 minutes respectively.

将清洗后的纯钨、铜箔、316L不锈钢依次装入1Cr18Ni9Ti的包套中,将包套与带抽气管的包套盖在H2O含量和O含量均低于10ppm的低氧低湿氩气气氛手套箱内采用氩弧焊焊接成包套组件,其中抽气管及包套盖均为1Cr18Ni9Ti材料。焊接完成后对包套进行检漏,漏率≤3×10-9Pa·m3/s。Put the cleaned pure tungsten, copper foil and 316L stainless steel into the 1Cr18Ni9Ti envelope in turn, and cover the envelope and the envelope with the air extraction tube in a low-oxygen, low-humidity argon gas with H 2 O content and O content below 10ppm. In the atmosphere glove box, argon arc welding is used to weld the package components, in which the exhaust pipe and the package cover are made of 1Cr18Ni9Ti material. After the welding is completed, the leakage of the package shall be checked, and the leakage rate shall be ≤3×10 -9 Pa·m 3 /s.

将检漏合格的包套组件置于马弗炉中,将包套盖上的抽气管与高真空抽气系统连接,采用马弗炉对包套组件在700℃下进行整体加热除气,加热除气1小时,过程中的真空度应优于3×10-3Pa。将包套盖上的抽气管从包套组件开始由近及远依次进行三次加热夹封。Place the package assembly that has passed the leak detection in the muffle furnace, connect the air extraction pipe on the package cover to the high vacuum air extraction system, and use the muffle furnace to heat and degas the package assembly as a whole at 700°C. For 1 hour of degassing, the vacuum degree during the process should be better than 3×10 -3 Pa. The air extraction tube on the envelope cover is heated and sealed three times in sequence from near to far from the envelope assembly.

将经加热夹封后的包套组件置于热等静压机中进行扩散连接,热等静压温度为1050℃,压力为152MPa,时间为30min。The packaged components after heating and sealing were placed in a hot isostatic pressing machine for diffusion connection. The hot isostatic pressing temperature was 1050° C., the pressure was 152 MPa, and the time was 30 minutes.

待热等静压机内的工件温度降至600℃时,返气匀压至常压后保温30min,以去除应力。When the temperature of the workpiece in the hot isostatic pressing machine drops to 600 ℃, return the air to uniform pressure to normal pressure and then keep it for 30 minutes to remove the stress.

最后机械加工去除包套获得热等静压扩散连接件。Finally, machining to remove the jacket results in a HIP diffusion joint.

本实施例制备的热等静压扩散连接件界面结合紧密,无微观缺陷,抗拉强度为480MPa。The interface of the HIP diffusion connector prepared in this example is tightly bonded, has no microscopic defects, and has a tensile strength of 480 MPa.

实施例2Example 2

本实施例提供了本发明的制备方法,具体为:The present embodiment provides the preparation method of the present invention, specifically:

将纯度为99.5wt%的φ25×20mm纯钨、纯度为99.9wt%的φ25×0.25mm镍箔及φ25×20的316L钢依次分别经200目、400目、600目、1000目、2000目砂纸打磨,然后经粒度(2~5)μm金刚石颗粒水抛光到镜面状态,然后依次分别经酒精、丙酮超声清洗15分钟。The φ25×20mm pure tungsten with a purity of 99.5wt%, the φ25×0.25mm nickel foil with a purity of 99.9wt%, and the 316L steel with a φ25×20 were respectively washed with 200-mesh, 400-mesh, 600-mesh, 1000-mesh, and 2000-mesh sandpaper. Grinding, and then water-polished diamond particles with a particle size of (2-5) μm to a mirror state, and then ultrasonically cleaned with alcohol and acetone for 15 minutes respectively.

将清洗后的纯钨、镍箔、316L不锈钢依次装入316L不锈钢包套中,将包套与带抽气管的包套盖在H2O含量和O含量均低于10ppm的低氧低湿氩气气氛手套箱内采用氩弧焊焊接成包套组件,其中抽气管及包套盖均为316L不锈钢材料。焊接完成后对包套进行检漏,漏率≤4×10-9Pa·m3/s。Put the cleaned pure tungsten, nickel foil and 316L stainless steel into the 316L stainless steel sleeve in turn, and cover the sleeve and the sleeve with the air extraction tube in the low oxygen and low humidity argon gas with H 2 O content and O content less than 10ppm. In the atmosphere glove box, argon arc welding is used to weld the package components, and the exhaust pipe and the package cover are made of 316L stainless steel. After the welding is completed, the leakage of the package shall be checked, and the leakage rate shall be ≤4×10 -9 Pa·m 3 /s.

将检漏合格的包套组件置于马弗炉中,将包套盖上的抽气管与高真空抽气系统连接,采用马弗炉对包套组件在550℃下进行整体加热除气,加热除气3小时,过程中的真空度应优于3×10-3Pa。将包套盖上的抽气管从包套组件开始由近及远依次进行三次加热夹封。Place the package assembly that has passed the leak detection in the muffle furnace, connect the air extraction pipe on the package cover to the high-vacuum air extraction system, and use the muffle furnace to heat and degas the package assembly at 550°C as a whole. For 3 hours of degassing, the vacuum degree during the process should be better than 3×10 -3 Pa. The air extraction tube on the envelope cover is heated and sealed three times in sequence from near to far from the envelope assembly.

将经加热夹封后的包套组件在热等静压机进行扩散连接,热等静压温度为1350℃,压力为150MPa,时间为90min。Diffusion connection was carried out on the heating and sandwiching of the sheathing components in a hot isostatic pressing machine, the temperature of the hot isostatic pressing was 1350° C., the pressure was 150 MPa, and the time was 90 minutes.

待热等静压机内的工件温度降至500℃时,返气匀压至常压后保温30min,以去除应力。When the temperature of the workpiece in the hot isostatic pressing machine drops to 500 ℃, return the gas to the normal pressure and keep it for 30 minutes to remove the stress.

最后机械加工去除包套获得热等静压扩散连接件。Finally, machining to remove the jacket results in a HIP diffusion joint.

本实施例制备的热等静压扩散连接件界面结合紧密,无微观缺陷,抗拉强度为426MPa。The interface of the HIP diffusion connector prepared in this example is tightly bonded, has no microscopic defects, and has a tensile strength of 426 MPa.

实施例3Example 3

本实施例提供了本发明的制备方法,具体为:The present embodiment provides the preparation method of the present invention, specifically:

将纯度为99.5wt%的φ25×20mm纯钨、纯度为99.9wt%的φ25×0.25mm铜箔,纯度为99.9wt%的φ30×0.25mm的镍箔及φ25×20的316L钢依次分别经200目、400目、600目、1000目、2000目砂纸打磨,然后经粒度(2~5)μm金刚石颗粒水抛光到镜面状态,然后依次分别经酒精、丙酮超声清洗20分钟。The φ25×20mm pure tungsten with a purity of 99.5wt%, a φ25×0.25mm copper foil with a purity of 99.9wt%, a φ30×0.25mm nickel foil with a purity of 99.9wt% and a φ25×20 316L steel were respectively subjected to 200 Mesh, 400-mesh, 600-mesh, 1000-mesh, 2000-mesh sandpaper, and then water-polished with (2-5) μm diamond particles to a mirror-like state, and then ultrasonically cleaned with alcohol and acetone for 20 minutes.

将清洗后的纯钨、铜箔、镍箔、316L不锈钢依次装入304不锈钢包套中,在高真空腔室内采用电子束将包套与带抽气管的包套盖进行焊接成包套组件,真空度优于4×10-3Pa。其中抽气管及包套盖均为304不锈钢材料。焊接完成后对包套进行检漏,漏率≤3×10-9Pa·m3/s。Put the cleaned pure tungsten, copper foil, nickel foil, and 316L stainless steel into a 304 stainless steel envelope in turn, and use electron beams in a high vacuum chamber to weld the envelope and the envelope cover with an air extraction tube to form a envelope assembly. The degree of vacuum is better than 4×10 -3 Pa. Among them, the exhaust pipe and the cover are made of 304 stainless steel. After the welding is completed, the leakage of the package shall be checked, and the leakage rate shall be ≤3×10 -9 Pa·m 3 /s.

将检漏合格的包套组件置于马弗炉中,将包套盖上的抽气管与高真空抽气系统连接,采用马弗炉对包套组件在600℃下进行整体加热除气,加热除气2小时,过程中的真空度应优于3×10-3Pa。将包套盖上的抽气管从包套组件开始由近及远依次进行三次加热夹封。Place the package assembly that has passed the leak detection in the muffle furnace, connect the air extraction pipe on the package cover to the high vacuum air extraction system, and use the muffle furnace to heat and degas the package assembly at 600°C as a whole. For 2 hours of degassing, the vacuum degree during the process should be better than 3×10 -3 Pa. The air extraction tube on the envelope cover is heated and sealed three times in sequence from near to far from the envelope assembly.

将经加热夹封后的在热等静压机进行扩散连接,热等静压温度为1050℃,压力为155MPa,时间为60min。Diffusion connection was carried out in a hot isostatic pressing machine after being heated and sandwiched. The hot isostatic pressing temperature was 1050° C., the pressure was 155 MPa, and the time was 60 min.

待热等静压机内的工件温度降至550℃时,返气匀压至常压后保温30min,以去除应力。When the temperature of the workpiece in the hot isostatic pressing machine drops to 550 °C, return the air to uniform pressure to normal pressure and then keep it for 30 minutes to remove stress.

最后机械加工去除包套获得热等静压扩散连接件。Finally, machining to remove the jacket results in a HIP diffusion joint.

本实施例制备的热等静压扩散连接件界面结合紧密,无微观缺陷,抗拉强度为470MPa。The interface of the HIP diffusion connector prepared in this example is tightly bonded, has no microscopic defects, and has a tensile strength of 470 MPa.

实施例4Example 4

本实施例为对比例This example is a comparative example

将纯度为99.5wt%的

Figure BDA0001864859200000051
纯钨、
Figure BDA0001864859200000052
的316L钢依次分别经200目、400目、600目、1000目、2000目砂纸打磨,然后经粒度(2~5)μm金刚石颗粒水抛光到镜面状态,然后依次分别经酒精、丙酮超声清洗20分钟。will be 99.5wt% pure
Figure BDA0001864859200000051
pure tungsten,
Figure BDA0001864859200000052
The 316L steel was polished with 200-mesh, 400-mesh, 600-mesh, 1000-mesh, and 2000-mesh sandpaper in turn, and then water-polished with (2-5) μm diamond particles to a mirror state, and then ultrasonically cleaned with alcohol and acetone for 20 minutes. minute.

采用物理气相沉积方法在纯钨块的待焊面上涂Ni过渡层200μm。然后,将清洗后的纯钨+Ni过渡层、316L不锈钢依次装入304不锈钢包套中,对该整体进行封焊。The surface to be welded of pure tungsten block is coated with Ni transition layer of 200 μm by physical vapor deposition method. Then, the cleaned pure tungsten+Ni transition layer and 316L stainless steel are sequentially put into a 304 stainless steel jacket, and the whole is sealed and welded.

将检漏合格的包套组件置于马弗炉中,将包套盖上的抽气管与高真空抽气系统连接,采用马弗炉对包套组件在600℃下进行整体加热除气,加热除气2小时,过程中的真空度应优于3×10-3Pa。将包套盖上的抽气管从包套组件开始由近及远依次进行三次加热夹封。Place the package assembly that has passed the leak detection in the muffle furnace, connect the air extraction pipe on the package cover to the high vacuum air extraction system, and use the muffle furnace to heat and degas the package assembly at 600°C as a whole. After degassing for 2 hours, the vacuum degree during the process should be better than 3×10-3Pa. The air extraction tube on the envelope cover is heated and sealed three times in sequence from near to far from the envelope assembly.

将经加热夹封后的在热等静压机进行扩散连接,热等静压温度为850℃,压力为130MPa,时间为3h。Diffusion connection was carried out in a hot isostatic pressing machine after being heated and sandwiched. The hot isostatic pressing temperature was 850° C., the pressure was 130 MPa, and the time was 3 hours.

待热等静压机内的工件温度室温去除包套获得热等静压扩散连接件,连接件的抗拉强度为80MPa。After the workpiece in the hot isostatic pressing machine is at room temperature, the jacket is removed to obtain a hot isostatic pressing diffusion connector, and the tensile strength of the connector is 80 MPa.

本实施例制备的热等静压扩散连接件界面已发生氧化,主要是包套整体封焊时因温度太高致使待焊面已氧化;镀层为多孔非致密材料,吸附的空气在热除气时仍难以脱附完全。The interface of the HIP diffusion connector prepared in this example has been oxidized, mainly because the temperature to be welded has been oxidized due to the high temperature during the overall sealing and welding of the envelope; It is still difficult to desorb completely.

焊接温度太低使得界面元素互扩散不充分,连接强度偏低。If the soldering temperature is too low, the interdiffusion of interface elements is insufficient, and the connection strength is low.

上述实施例仅为本发明的优选实施方式之一,不应当用于限制本发明的保护范围,但凡在本发明的主体设计思想和精神上作出的毫无实质意义的改动或润色,其所解决的技术问题仍然与本发明一致的,均应当包含在本发明的保护范围之内。The above-mentioned embodiment is only one of the preferred embodiments of the present invention, and should not be used to limit the protection scope of the present invention. If the technical problem is still consistent with the present invention, it should be included within the protection scope of the present invention.

Claims (8)

1. A hot isostatic pressing diffusion connection method of tungsten/transition layer/stainless steel is characterized in that pure tungsten, the transition layer and stainless steel are used as raw materials, and hot isostatic pressing treatment, stress relief annealing and de-wrapping are carried out after wrapping treatment, so that a hot isostatic pressing diffusion connection piece can be obtained; the method comprises the following steps:
step 1, assembling: sequentially filling pure tungsten, the transition layer and the stainless steel into a sheath;
step 2, welding: welding the sheath assembled in the step 1 with a sheath cover with an exhaust tube to manufacture a sheath assembly;
and step 3, leak detection: detecting leakage of the sheath assembly prepared in the step 2;
step 4, thermal degassing: placing the sheath assembly qualified in the leak detection in the step 3 into a muffle furnace for thermal degassing;
and step 5, sealing: heating and clamping the exhaust pipe on the sheath assembly after the step 4;
step 6, hot isostatic pressing connection: placing the sheath assembly processed in the step 5 in a hot isostatic pressing machine, and performing diffusion connection on tungsten steel sealed in the sheath;
step 7, stress relief annealing: when the temperature of the workpiece in the hot isostatic pressing machine is reduced to 500-600 ℃, the return gas is uniformly pressurized to normal pressure, and then the heat is preserved and the stress is removed for annealing;
step 8, removing the sheath: turning the sheath assembly annealed in the step 7 to remove sheath materials to obtain the hot isostatic pressing diffusion connecting piece;
the transition layer is selected from one of single transition layers of copper foil, nickel foil and titanium foil, or is a composite transition layer of copper foil and nickel foil;
when the transition layer is a copper foil, the hot isostatic pressing temperature in the step 6 is 1000-1050 ℃;
when the transition layer is a nickel foil, the hot isostatic pressing temperature in the step 6 is 1300-1350 ℃;
when the transition layer is a titanium foil, the hot isostatic pressing temperature in the step 6 is 1250-1350 ℃;
when the transition layer is a copper foil and nickel foil composite layer, the hot isostatic pressing temperature in the step 6 is 950-1050 ℃.
2. The method of hot isostatic pressing diffusion bonding of tungsten/transition layer/stainless steel according to claim 1, further comprising, before assembly, a surface treatment step: grinding and polishing the surfaces to be connected of the pure tungsten, the transition layer and the stainless steel to a mirror surface by using abrasive paper; and after polishing, ultrasonic cleaning is carried out for 10-30 minutes by alcohol and acetone in sequence.
3. The method of claim 1, wherein the pure tungsten is greater than 99.5% by mass tungsten, and the transition layer is greater than 99.8% by mass and has a thickness of 0.1mm to 0.5 mm.
4. The hip diffusion bonding method of W/T/stainless steel as claimed in claim 1, wherein the material of the sheath, sheath cover and exhaust tube is selected from any one of 08F iron sheet, 1Cr18Ni9Ti steel and 316L stainless steel.
5. The method of claim 1, wherein the welding in step 2 is argon arc welding in a low oxygen and low humidity argon shielded glove box; or electron beam welding in a high vacuum chamber.
6. The HIP method of claim 5, wherein step 2 is protection of H inside a glove box during argon arc welding2Both the O content and the O content are lower than 10 ppm; step 2 is that when the electron beam welding is carried out, the vacuum degree in the high vacuum chamber is more than 4 multiplied by 10-3Pa。
7. The method of claim 1, wherein the step of increasing the temperature is performed after the initial pressure is increased to 50MPa to 60 MPa; the heat preservation time is 30min to 120min, and the hot isostatic pressure is 130MPa to 160 MPa.
8. The method of claim 1, wherein in step 7, the annealing for stress relief is performed by holding the temperature for 30min after the return gas is pressurized to normal pressure.
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