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CN109378276B - Method for manufacturing electronic packaging module and electronic packaging module - Google Patents

Method for manufacturing electronic packaging module and electronic packaging module Download PDF

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CN109378276B
CN109378276B CN201811221255.5A CN201811221255A CN109378276B CN 109378276 B CN109378276 B CN 109378276B CN 201811221255 A CN201811221255 A CN 201811221255A CN 109378276 B CN109378276 B CN 109378276B
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shielding layer
molding body
electronic
circuit substrate
molding
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CN109378276A (en
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詹前峰
张鹤议
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Advanced Semiconductor Engineering Inc
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Abstract

本发明公开了一种电子封装模块的制造方法及其结构,该方法包括以下步骤:提供一线路基板,该线路基板具有一组装平面与至少一接地垫,多个电子设置于该组装平面上;形成至少一第一模封体包覆部分所述多个电子元件;形成一第一屏蔽层,覆盖该第一模封体并接触该线路基板;形成一第二模封体覆盖该第一模封体、所述多个电子元件、该组装平面;移除部分该第一模封体以及部分该第二模封体,以暴露部分该第一屏蔽层;以及形成一第二屏蔽层,覆盖该第一模封体、该第二模封体,并电性连接该第一屏蔽层。本发明可完整地保护电子元件免于受到电磁干扰。

Figure 201811221255

The invention discloses a manufacturing method and a structure of an electronic packaging module. The method comprises the following steps: providing a circuit substrate, the circuit substrate has an assembly plane and at least one ground pad, and a plurality of electronic devices are arranged on the assembly plane; forming at least a first molding body to cover part of the plurality of electronic components; forming a first shielding layer to cover the first molding body and contact the circuit substrate; forming a second molding body to cover the first molding a sealing body, the plurality of electronic components, and the assembly plane; removing a part of the first molding body and a part of the second molding body to expose a part of the first shielding layer; and forming a second shielding layer covering The first molding body and the second molding body are electrically connected to the first shielding layer. The present invention can completely protect electronic components from electromagnetic interference.

Figure 201811221255

Description

电子封装模块的制造方法以及电子封装模块Manufacturing method of electronic package module and electronic package module

本申请是日月光半导体制造股份有限公司的中国发明专利申请(申请日为2014年8月8日、申请号为201410389354.X,发明名称为“电子封装模块的制造方法以及电子封装模块”)的分案申请。This application is a part of the Chinese invention patent application of ASE Semiconductor Manufacturing Co., Ltd. (the application date is August 8, 2014, the application number is 201410389354.X, and the invention name is "Manufacturing method of electronic packaging module and electronic packaging module"). case application.

技术领域technical field

本发明涉及一种电子封装模块的制造方法及其结构,特别涉及一种利用两阶段模封以及利用两阶段屏蔽的电子封装模块制造方法及其结构。The invention relates to a manufacturing method and structure of an electronic packaging module, in particular to a manufacturing method and structure of an electronic packaging module using two-stage molding and using two-stage shielding.

背景技术Background technique

目前电子封装模块通常包括一电路板与多个装设在电路板上的电子元件(electronic component)。这些电子元件例如是芯片封装体(chip package)或无源元件(passive component)等。此外,大多数的电子封装模块通常还包括模封块(moldingcompound),其用以包覆(encapsulating)上述电子元件,以保护电子元件。Currently, electronic packaging modules generally include a circuit board and a plurality of electronic components mounted on the circuit board. These electronic components are, for example, chip packages or passive components. In addition, most electronic packaging modules usually include a molding compound, which is used to encapsulate the above-mentioned electronic components to protect the electronic components.

电子元件日益复杂,而使用者对于加快处理速度(processing speed)与缩小元件尺寸的需求也日益增加。现今的电子产品讲求轻薄短小,使得电子元件与线路的分布密度过高,这增加了一些问题,例如电磁干扰(Electromagnetic interference,EMI)。尤其,如何在电子元件与线路分布密集的电路板上形成多区块的电磁屏蔽结构,亦即,形成多个电磁屏蔽隔间,成为现有通讯产品的需求。Electronic components are becoming more and more complex, and users' demands for faster processing speed and smaller component sizes are also increasing. Today's electronic products are required to be light, thin and short, so that the distribution density of electronic components and circuits is too high, which increases some problems, such as electromagnetic interference (EMI). In particular, how to form a multi-block electromagnetic shielding structure on a circuit board where electronic components and circuits are densely distributed, that is, forming a plurality of electromagnetic shielding compartments, has become a requirement of existing communication products.

一种公知技术是先在电路板上大面积地形成模封块,然后在模封块上挖槽,再于槽内填入金属材料以形成隔间。然而,此等制造工艺容易因挖槽的深宽比造成填入槽内的金属材料无法均匀地分布于槽内,例如,填入槽内的金属材料无法接触挖槽底部的线路基板,或者具有孔隙、空气间隔等。因此,以此所形成的金属隔间容易有导电不良或导电不均的问题,并且,金属隔间的尺寸受限于挖槽的深宽比,难以缩小。A well-known technique is to form a large-area molding block on a circuit board first, then dig a groove on the molding block, and then fill the groove with a metal material to form a compartment. However, in these manufacturing processes, the metal material filled in the groove cannot be evenly distributed in the groove due to the aspect ratio of the groove. For example, the metal material filled in the groove cannot contact the circuit substrate at the bottom of the groove, or has Pores, air gaps, etc. Therefore, the metal compartments formed in this way are prone to problems of poor electrical conductivity or uneven electrical conductivity, and the size of the metal compartments is limited by the aspect ratio of the trench, so it is difficult to reduce the size of the metal compartments.

此外,美国专利公开文件US2008/0055878号,揭露了一种具有电磁屏蔽结构的电子元件,其不具有金属隔间的屏蔽结构,且该电子元件的厚度受限于模封材料的厚度而难以降低。In addition, US Patent Publication No. US2008/0055878 discloses an electronic component with an electromagnetic shielding structure, which does not have a shielding structure with a metal compartment, and the thickness of the electronic component is limited by the thickness of the molding material and is difficult to reduce .

发明内容SUMMARY OF THE INVENTION

本发明提供一种电子封装模块的制造方法,能两阶段模封以及两阶段镀覆以形成屏蔽,而无需受限于屏蔽层的深宽比,可完整防护电子元件间的电磁干扰。The invention provides a manufacturing method of an electronic package module, which can form shielding by two-stage molding and two-stage plating without being limited by the aspect ratio of the shielding layer, and can completely protect the electromagnetic interference between electronic components.

一种电子封装模块的制造方法,包括以下步骤:提供一线路基板,线路基板具有组装平面与至少一接地垫,多个电子元件设置于组装平面上;形成至少一第一模封体包覆部分电子元件;形成第一屏蔽层,覆盖第一模封体并接触该线路基板;形成第二模封体覆盖第一模封体、电子元件、组装平面;移除部分第一模封体以及部分第二模封体,以暴露部分第一屏蔽层;以及形成第二屏蔽层,覆盖该第一模封体、该第二模封体,并电性连接该第一屏蔽层。A manufacturing method of an electronic packaging module, comprising the following steps: providing a circuit substrate, the circuit substrate has an assembly plane and at least one ground pad, a plurality of electronic components are arranged on the assembly plane; forming at least a first encapsulating body covering part electronic components; forming a first shielding layer, covering the first molding body and contacting the circuit substrate; forming a second molding body to cover the first molding body, the electronic components, and the assembly plane; removing part of the first molding body and part of it a second molding body to expose part of the first shielding layer; and forming a second shielding layer, covering the first molding body, the second molding body, and electrically connecting the first shielding layer.

一种电子封装模块结构,包括:线路基板,该线路基板具有组装平面与接地垫;电子元件设置于组装平面上;第一模封体以及一第二模封体分别包覆一部分电子元件;第一屏蔽层顺形覆盖第一模封体并电性连接接地垫,而第一模封体与第二模封体以第一屏蔽层相隔离;以及第二屏蔽层,覆盖第一模封体并电性连接第一屏蔽层;其中,第一屏蔽层在形成该第二模封体之前先制作完成。An electronic packaging module structure, comprising: a circuit substrate, the circuit substrate has an assembly plane and a ground pad; electronic components are arranged on the assembly plane; a first molding body and a second molding body respectively cover a part of the electronic components; A shielding layer conformally covers the first molded body and is electrically connected to the ground pad, and the first molded body and the second molded body are isolated by the first shielding layer; and a second shielding layer covers the first molded body and electrically connected to the first shielding layer; wherein, the first shielding layer is fabricated before the second molding body is formed.

为了能更进一步了解本发明所采取的技术、方法及功效,请参阅以下有关本发明的详细说明、附图,相信本发明的特征与特点,当可由此得以深入且具体的了解,然而所附附图与附件仅提供参考与说明用,并非用来对本发明加以限制者。In order to further understand the technology, method and effect adopted by the present invention, please refer to the following detailed description and accompanying drawings of the present invention. It is believed that the features and characteristics of the present invention can be understood in depth and concretely. However, the attached The accompanying drawings and attachments are only provided for reference and description, and are not intended to limit the present invention.

附图说明Description of drawings

图1是本发明一实施例的电子封装模块结构的剖面示意图。FIG. 1 is a schematic cross-sectional view of an electronic packaging module structure according to an embodiment of the present invention.

图2至图8显示图1中电子封装模块结构在制造过程中的剖面示意图。2 to 8 are schematic cross-sectional views of the electronic package module structure in FIG. 1 during the manufacturing process.

图9是本发明一实施例的电子封装模块的制造方法的流程图。FIG. 9 is a flowchart of a method for manufacturing an electronic package module according to an embodiment of the present invention.

其中,附图标记说明如下:Among them, the reference numerals are described as follows:

电子封装模块结构1Electronic package module structure 1

线路基板11Circuit substrate 11

组装平面111Assembly plane 111

接地垫12ground pad 12

第一电子元件131The first electronic component 131

第二电子元件132、132’Second electronic components 132, 132'

第一初始模封体141’The first initial molded body 141'

第一模封体141The first molded body 141

第一屏蔽层151first shielding layer 151

第二初始模封体161’The second initial molded body 161'

第二模封体161The second molded body 161

第二屏蔽层171The second shielding layer 171

牺牲层181sacrificial layer 181

底部填充胶191Underfill 191

遮罩2Mask 2

步骤S1~S6Steps S1 to S6

具体实施方式Detailed ways

本文中可能使用术语第一、第二、第三等来描述各种元件,但此等元件不应受此等术语限制。此等术语乃用以区分一元件与另一元件。因此,下文论述的第一元件可称为第二元件而不偏离本发明概念的教示。The terms first, second, third, etc. may be used herein to describe various elements, but these elements should not be limited by these terms. These terms are used to distinguish one element from another. Thus, a first element discussed below could be termed a second element without departing from the teachings of the inventive concept.

请参考图1,图1是本发明一实施例的电子封装模块结构的剖面示意图。本发明实施例提供了一种电子封装模块结构1,电子封装模块结构1包括线路基板11、多个电子元件(例如第一电子元件131、第二电子元件132、132’)、第一屏蔽层151、第二屏蔽层171、第一模封体141以及相邻于第一模封体141的第二模封体161。线路基板11具有组装平面111,组装平面111包括第一区域(图未绘示)以及第二区域(图未绘示)。线路基板11还包括多个接地垫12,其中部分接地垫12裸露于线路基板11的组装平面111,部分接地垫12可依设计需求选择性设置并裸露于线路基板11的侧边。Please refer to FIG. 1 . FIG. 1 is a schematic cross-sectional view of an electronic package module structure according to an embodiment of the present invention. An embodiment of the present invention provides an electronic packaging module structure 1, the electronic packaging module structure 1 includes a circuit substrate 11, a plurality of electronic components (eg, a first electronic component 131, a second electronic component 132, 132'), a first shielding layer 151 , the second shielding layer 171 , the first molding body 141 , and the second molding body 161 adjacent to the first molding body 141 . The circuit substrate 11 has an assembly plane 111 , and the assembly plane 111 includes a first area (not shown) and a second area (not shown). The circuit substrate 11 further includes a plurality of ground pads 12 , some of which are exposed on the assembly plane 111 of the circuit substrate 11 , and some of the ground pads 12 can be selectively disposed and exposed on the side of the circuit substrate 11 according to design requirements.

第一电子元件131是位于组装平面111的第一区域,第二电子元件132、132’位于组装平面111的第二区域。第一模封体141是位于第一区域并包覆第一电子元件131;第二模封体161是位于模封体141之外的组装平面111上。第一屏蔽层151电性连接线路基板11的接地垫12,而第一模封体141与第二模封体161是以第一屏蔽层151相隔离。第二屏蔽层171全面性地形成于线路基板11的上方,以覆盖第一模封体141、第二模封体161、组装平面111以及部分第二电子元件,并直接接触于第一屏蔽层151。第二屏蔽层171还可直接电性连接至接地垫12,甚至包含裸露于线路基板11侧边的接地垫12。在其它实施例中,第一电子元件也可能自第一模封体141裸露出来而直接接触第二屏蔽层171。The first electronic component 131 is located in the first area of the assembly plane 111 , and the second electronic components 132 and 132 ′ are located in the second area of the assembly plane 111 . The first molded body 141 is located in the first area and covers the first electronic component 131 ; the second molded body 161 is located on the assembly plane 111 outside the molded body 141 . The first shielding layer 151 is electrically connected to the ground pad 12 of the circuit substrate 11 , and the first encapsulating body 141 and the second encapsulating body 161 are isolated by the first shielding layer 151 . The second shielding layer 171 is comprehensively formed above the circuit substrate 11 to cover the first encapsulating body 141 , the second encapsulating body 161 , the assembly plane 111 and part of the second electronic components, and is in direct contact with the first shielding layer 151. The second shielding layer 171 can also be directly electrically connected to the grounding pad 12 , even including the grounding pad 12 exposed on the side of the circuit substrate 11 . In other embodiments, the first electronic component may also be exposed from the first molding body 141 to directly contact the second shielding layer 171 .

上述以对应形成第一模封体所在区域为第一区域、对应形成第二模封体所在区域为第二区域,以方便说明与理解,并非用以限定第一区域以及第二区域的解释,例如第一模封体也可以是集成电路封装(IC package)的封装材。因此若第二电子元件132’为集成电路封装(IC package)的电子元件,或者是半导体芯片堆叠并以覆晶接合的方式装设于线路基板11上,未被第二模封体所覆盖,则其所在区域也可称为第一区域。In the above, the region corresponding to the formation of the first molded body is the first region, and the region corresponding to the formation of the second molded body is the second region, for the convenience of explanation and understanding, and is not intended to limit the interpretation of the first region and the second region. For example, the first molding body may also be a packaging material of an integrated circuit package (IC package). Therefore, if the second electronic component 132 ′ is an electronic component of an integrated circuit package (IC package), or semiconductor chips are stacked and mounted on the circuit substrate 11 by flip-chip bonding, and are not covered by the second molding body, Then the area where it is located may also be referred to as the first area.

以下将透过实施例来解释本发明的一种电子封装模块的制造方法。请参考图2至图8,图2至图8显示图1中电子封装模块结构在制造过程中的剖面示意图。The following will explain a method for manufacturing an electronic package module of the present invention through embodiments. Please refer to FIGS. 2 to 8 . FIGS. 2 to 8 are schematic cross-sectional views of the electronic package module structure in FIG. 1 during the manufacturing process.

如图1所示,首先,提供一线路基板11,线路基板11具有一组装平面111(例如线路基板11的上表面)。组装平面111包括第一区域以及第二区域(图未绘示)。As shown in FIG. 1 , first, a circuit substrate 11 is provided, and the circuit substrate 11 has an assembly plane 111 (eg, the upper surface of the circuit substrate 11 ). The assembly plane 111 includes a first area and a second area (not shown).

线路基板11并具有多个预先设置的接地垫12与线路层(未绘示)。接地垫12是导电材料所制成,以电性连接至导电线路(未绘示)或是接地面(未绘示)。其中,接地垫12与线路层皆位于组装平面111上或埋入基板,接地垫12进一步裸露于线路基板11的侧边。The circuit substrate 11 has a plurality of pre-set ground pads 12 and circuit layers (not shown). The ground pad 12 is made of conductive material and is electrically connected to a conductive circuit (not shown) or a ground plane (not shown). The ground pad 12 and the circuit layer are both located on the assembly plane 111 or embedded in the substrate, and the ground pad 12 is further exposed on the side of the circuit substrate 11 .

接着,将电子元件装设于线路基板11上,其组装方式可利用表面粘着技术(Surface Mount Technology,SMT)进行,但不以此为限。Next, the electronic components are mounted on the circuit substrate 11, and the assembling method can be performed by using Surface Mount Technology (SMT), but is not limited thereto.

请参图3,接着,于第一区域提供第一初始模封体141’,以包覆第一电子元件131。第一初始模封体141’例如是以模封材料(molding material)对第一区域进行一封胶制造工艺所形成,且第一初始模封体141’是包覆第一电子元件131以及第一电子元件131周围的一部分组装平面111。需要注意的是,本实施例中,在所述提供第一初始模封体141’的步骤完成之后,邻近第一电子元件131的至少一个接地垫12有至少一部分是裸露于组装平面111,而没有被第一初始模封体141’所覆盖。本发明封胶制造工艺例如采用压注成型、模穴注胶成形(mold chase)、覆盖成形制造工艺(over-molding process)、转移成形方式(transfer molding)、顶模塑封制造工艺(top-gate molding)、点胶机(dispenser)。而所用于形成模封体的材质例如为环氧树脂、塑封材(molding compound)、环氧模封化合物(Epoxy Molding Compound,EMC)、聚酰亚胺(Polyimide,PI)、酚醛树脂(Phenolics)、硅胶或是硅树脂(Silicones)等。Referring to FIG. 3 , next, a first initial molding body 141 ′ is provided in the first region to cover the first electronic element 131 . The first initial molding body 141 ′ is formed by, for example, performing a molding process on the first region with a molding material, and the first initial molding body 141 ′ covers the first electronic element 131 and the first region. A part of the assembly plane 111 around an electronic component 131 . It should be noted that, in this embodiment, after the step of providing the first initial molding body 141 ′ is completed, at least a part of the at least one ground pad 12 adjacent to the first electronic component 131 is exposed on the assembly plane 111 , while It is not covered by the first initial molding body 141'. The manufacturing process of the sealant of the present invention, for example, adopts injection molding, mold chase, over-molding process, transfer molding, and top-gate manufacturing process. molding), dispenser (dispenser). The materials used to form the molded body are, for example, epoxy resin, molding compound, epoxy molding compound (EMC), polyimide (PI), and phenolic resin (Phenolics). , silica gel or silicone resin (Silicones) and so on.

此外,于上述封胶制造工艺的步骤中,可同时提供底部填充胶191包覆第二电子元件132’的外露导电接脚,以保护这些导电接脚并使这些导电接脚与后续形成的第一屏蔽层151(图5)电性隔绝。In addition, in the steps of the above-mentioned encapsulation manufacturing process, the underfill 191 can be provided at the same time to cover the exposed conductive pins of the second electronic component 132 ′, so as to protect these conductive pins and make these conductive pins and the subsequent formation of the conductive pins. A shielding layer 151 (FIG. 5) is electrically isolated.

接着,如图4所示,提供牺牲层181包覆部分第二电子元件132。举例而言,可透过具有图案设计的遮罩2对线路基板11进行牺牲层181涂布制造工艺,依遮罩2的图案提供牺牲层181包覆部分第二电子元件132以及部分组装平面111。牺牲层181是用以移除后续制造工艺形成于牺牲层181上方的物质,并保护牺牲层181所包覆的部分第二电子元件132。牺牲层181的材料可包含压克力(acrylic)胶或硅胶。于另一实施例中,牺牲层181的材料可包含感光固化性树酯或热固化性树酯组成的油墨,例如液态感光型油墨,且可通过使用有机溶剂被简单移除,但不以此为限。Next, as shown in FIG. 4 , a sacrificial layer 181 is provided to cover part of the second electronic element 132 . For example, a sacrificial layer 181 coating process can be performed on the circuit substrate 11 through the mask 2 with a pattern design, and the sacrificial layer 181 is provided according to the pattern of the mask 2 to cover part of the second electronic element 132 and part of the assembly plane 111 . The sacrificial layer 181 is used to remove substances formed above the sacrificial layer 181 in subsequent manufacturing processes, and to protect a portion of the second electronic device 132 covered by the sacrificial layer 181 . The material of the sacrificial layer 181 may include acrylic glue or silicone. In another embodiment, the material of the sacrificial layer 181 may include an ink composed of a photocurable resin or a thermosetting resin, such as a liquid photosensitive ink, and can be easily removed by using an organic solvent, but not limited.

然后,形成第一屏蔽层151。第一屏蔽层151可作为不同电子元件间在垂直方向上的金属屏蔽,意即隔绝相邻电子元件间的电磁干扰。如图5所示,整面且顺形地(conformal)形成第一屏蔽层151,以覆盖第一初始模封体141’、牺牲层181、第二电子元件132’、底部填充胶191,以及部分组装平面111,并接触线路基板11的接地垫12以电性连接至接地垫12。形成第一屏蔽层151的方法例如喷镀(spray coating)、电镀(electroplating)、无电镀(electroless plating)、蒸镀或溅镀(sputtering)等。本技术领域的技术人员可知,顺形(conformal)是指其所形成的物与其所覆盖者的外轮廓具有大致相同的形状,以图5实施例而言,即第一屏蔽层151的外轮廓与第一初始模封体141’、牺牲层181、第二电子元件132’的外轮廓相同。Then, the first shielding layer 151 is formed. The first shielding layer 151 can serve as a metal shield between different electronic components in a vertical direction, which means to isolate electromagnetic interference between adjacent electronic components. As shown in FIG. 5 , the first shielding layer 151 is formed on the entire surface and conformal to cover the first initial molding body 141 ′, the sacrificial layer 181 , the second electronic element 132 ′, the underfill 191 , and The plane 111 is partially assembled and contacts the ground pad 12 of the circuit substrate 11 to be electrically connected to the ground pad 12 . A method for forming the first shielding layer 151 is, for example, spray coating, electroplating, electroless plating, vapor deposition, or sputtering. Those skilled in the art can know that conformal means that the formed object has substantially the same shape as the outer contour of the object it covers. For the embodiment of FIG. 5 , that is, the outer contour of the first shielding layer 151 The outer contours of the first initial molding body 141 ′, the sacrificial layer 181 , and the second electronic component 132 ′ are the same.

接着,如图6所示,将牺牲层181移除,以移除牺牲层181上方所覆的第一屏蔽层151,并使第二电子元件132暴露出来。如此,可以隔绝电子封装模块结构1内电子元件131、132、132’之间的电磁干扰。Next, as shown in FIG. 6 , the sacrificial layer 181 is removed to remove the first shielding layer 151 overlying the sacrificial layer 181 and expose the second electronic element 132 . In this way, the electromagnetic interference between the electronic components 131, 132, 132' in the electronic package module structure 1 can be isolated.

上述图4-6搭配图案化的牺牲层181以形成第一屏蔽层151的方法,也可以改用图案化的遮罩(mask)遮盖整个组装平面,再进行金属喷涂(spray coating)并加以固化而形成第一屏蔽层151。For the method of forming the first shielding layer 151 with the patterned sacrificial layer 181 in the above-mentioned FIGS. 4-6 , a patterned mask may be used to cover the entire assembly plane, and then metal spraying (spray coating) and curing may be performed. And the first shielding layer 151 is formed.

接着,如图7所示,于组装平面111提供第二初始模封体161’,以包覆第一初始模封体141’、第二电子元件132、132’、第一屏蔽层151以及部分组装平面111。其中第一初始模封体141’与第二初始模封体161’之间是以第一屏蔽层151相互隔离,也就是说,第一屏蔽层151是埋设于模封材料中。第二初始模封体161’例如是以模封材料对整个组装平面111进行一封胶制造工艺所形成,所述封胶制造工艺例如采用覆盖成型、一般转注成型、压注成型或是模穴注胶成形(mold chase)的方式,而第二初始模封体161’的材质可以与第一初始模封体141’的材质相同,例如为环氧树脂或硅胶。Next, as shown in FIG. 7 , a second initial molding body 161 ′ is provided on the assembly plane 111 to cover the first initial molding body 141 ′, the second electronic components 132 , 132 ′, the first shielding layer 151 and part of the Assembly plane 111 . The first initial molding body 141' and the second initial molding body 161' are isolated from each other by the first shielding layer 151, that is, the first shielding layer 151 is embedded in the molding material. The second initial molding body 161 ′ is formed by, for example, a molding material for the entire assembly plane 111 through a molding process, such as overmolding, general transfer molding, injection molding, or cavity molding. The material of the second initial molding body 161 ′ can be the same as the material of the first initial molding body 141 ′, for example, epoxy resin or silicone.

接着,如图8所示,移除部分第一初始模封体141’以及部分第二初始模封体161’,以暴露一部分的第一屏蔽层151,同时形成如图1的第一模封体141以及第二模封体161。例如利用研磨(grinding)或是激光加工处理(Laser trimming)等方式,削除部分第一初始模封体141’与部分第二初始模封体161’,藉此降低电子封装模块结构1整体的高度。第一模封体141的高度可小于第一初始模封体141’的高度,且第二模封体161的高度可小于第二初始模封体161’的高度,第一模封体141的上表面可切齐于第二模封体161的上表面。同时,一部分的第一屏蔽层151也一并被移除,未被移除的第一屏蔽层151在电子元件131、132之间形成具有一定高度的屏蔽结构。Next, as shown in FIG. 8 , a part of the first initial molding body 141 ′ and a part of the second initial molding body 161 ′ are removed to expose a part of the first shielding layer 151 , and at the same time, the first molding body as shown in FIG. 1 is formed body 141 and the second molding body 161 . For example, grinding or laser trimming is used to remove part of the first initial molding body 141 ′ and part of the second initial molding body 161 ′, thereby reducing the overall height of the electronic packaging module structure 1 . The height of the first molding body 141 may be smaller than the height of the first initial molding body 141 ′, and the height of the second molding body 161 may be smaller than the height of the second initial molding body 161 ′. The upper surface may be aligned with the upper surface of the second molding body 161 . At the same time, a part of the first shielding layer 151 is also removed, and the unremoved first shielding layer 151 forms a shielding structure with a certain height between the electronic components 131 and 132 .

接着,形成第二屏蔽层171,如图1所示,本实施例中,可整面性地形成第二屏蔽层171,以覆盖第一模封体141、第二模封体161以及第二电子元件132’上表面。第二屏蔽层171并可完整包覆线路基板11的侧边并电性连接侧边的接地垫12。形成第二遮蔽层的制造工艺可采用例如金属喷涂(Spray coating)、无电镀制造工艺(electroless plating)或溅镀制造工艺(Sputtering)等常见的金属涂布制造工艺,也可采用黏贴导电胶带等方式,但不以此为限。Next, a second shielding layer 171 is formed, as shown in FIG. 1 , in this embodiment, the second shielding layer 171 can be formed on the entire surface to cover the first molding body 141 , the second molding body 161 and the second molding The upper surface of the electronic component 132'. The second shielding layer 171 can completely cover the side of the circuit substrate 11 and is electrically connected to the ground pad 12 on the side. The manufacturing process of forming the second shielding layer can use common metal coating manufacturing processes such as spray coating, electroless plating, or sputtering, or can also use conductive adhesive tape. etc., but not limited to this.

上述实施例可归纳出本发明一实施例的电子封装模块的制造方法,请参照图9。步骤S1,提供线路基板,线路基板具有组装平面与接地垫,多个电子元件设置于该组装平面上;步骤S2,形成第一模封体包覆部分电子元件;步骤S3,形成第一屏蔽层,覆盖第一模封体并接触组装平面上的接地垫;步骤S4,形成第二模封体覆盖第一模封体及组装平面上未被模封体覆盖的电子元件;步骤S5,移除部分模封体并暴露部分第一屏蔽层;步骤S6,形成第二屏蔽层,覆盖整个模封体外表面并电性连接第一屏蔽层。The above-mentioned embodiments can be summarized as a manufacturing method of an electronic package module according to an embodiment of the present invention, please refer to FIG. 9 . Step S1, providing a circuit substrate, the circuit substrate has an assembly plane and a ground pad, and a plurality of electronic components are arranged on the assembly plane; Step S2, forming a first molding body to cover part of the electronic components; Step S3, forming a first shielding layer , cover the first molding body and contact the ground pad on the assembly plane; step S4, form a second molding body to cover the first molding body and the electronic components on the assembly plane that are not covered by the molding body; step S5, remove Part of the molded body is exposed and part of the first shielding layer is exposed; step S6, a second shielding layer is formed, covering the entire outer surface of the molded body and electrically connecting the first shielding layer.

在另一实施例中,上述形成第二屏蔽层171之前,在移除部分第一初始模封体141’以及部分第二初始模封体161’的步骤时,利用模封体不同高度的落差所产生的区域提供其它电子元件或电子模块做立体堆叠与电性连接。详细而言,可以预先将较高度较低的元件设计在一个区域而较高的元件设计在另一区域,如此后续形成的模封体,其顶部距离较低电子元件的距离较另一距离较高电子元件的距离为大,因此高度较低的元件区域上方的模封体可削除得较多,以形成模封体具有不同高度的区域。可先在高度较低的元件区域的模封体中依设计形成导电结构以连接电子元件、线路基板11的接地垫12或线路层,或在模封体上方形成线路布局,再电性连接堆叠置放其上的电子元件或电子模块,最后再形成第二屏蔽层171电性连接接地垫12。实际作法例如:形成多个孔洞于模封体中,其中各孔洞暴露出接地垫或是电子元件的电性连接端;形成多个金属柱于孔洞中,并且形成第一金属图案层于模封体以及金属柱上方,其中各金属柱电性连接接地垫或是电子元件的电性连接端。接着,再堆叠电子元件或电子模块于模封体上方,并电性连接于第一金属图案层或金属柱。之后,形成模封体全面覆盖组装平面上方,包括堆叠后的电子元件或电子模块、已形成的模封体。In another embodiment, before the formation of the second shielding layer 171 , in the step of removing part of the first initial molding body 141 ′ and part of the second initial molding body 161 ′, the drop of different heights of the molding body is utilized The resulting area provides other electronic components or electronic modules for three-dimensional stacking and electrical connection. In detail, components with a higher height and lower height can be designed in one area in advance and components with a higher height can be designed in another area, so that the distance between the top of the subsequently formed molded body and the lower electronic component is longer than that of the other area. The distance between tall electronic components is greater, so more of the mold body can be removed over the lower height component area to form areas of the mold body with different heights. Conductive structures can be formed in the molded body of the lower-height component area according to the design to connect the electronic components, the ground pads 12 of the circuit substrate 11 or the circuit layer, or the circuit layout can be formed above the molded body, and then electrically connected to the stack For the electronic components or electronic modules placed thereon, the second shielding layer 171 is finally formed to be electrically connected to the ground pad 12 . Practical methods are, for example: forming a plurality of holes in the molding body, wherein each hole exposes a ground pad or an electrical connection terminal of an electronic component; forming a plurality of metal pillars in the holes, and forming a first metal pattern layer in the molding above the body and the metal pillars, wherein each metal pillar is electrically connected to the ground pad or the electrical connection terminal of the electronic component. Next, the electronic components or electronic modules are stacked on the molding body and electrically connected to the first metal pattern layer or the metal pillars. Afterwards, a molded body is formed to fully cover the top of the assembly plane, including the stacked electronic components or electronic modules, and the formed molded body.

本发明利用两阶段分别形成第一屏蔽层、第二屏蔽层,以及利用两阶段模封,在个别电子元件间选择性形成垂直方向上的金属屏蔽,此方法所形成的金属屏蔽隔间不会有公知金属屏蔽隔间深宽比所产生的导电不良或不均的问题,继之搭配模封体顶部的第二屏蔽层后,可完整地保护电子元件免于受到电磁干扰。并且,透过削除部分模封体,可以同时降低电子封装模块结构整体高度。再者,电子封装模块结构1可有效利用电子元件间的高度差,而提供可供立体堆叠的结构。因而本发明可提供具有较小厚度的构形因子(formfactor)。In the present invention, the first shielding layer and the second shielding layer are respectively formed in two stages, and the metal shielding in the vertical direction is selectively formed between individual electronic components by using the two-stage molding. The metal shielding compartment formed by this method will not There is a problem of poor or uneven conduction caused by the aspect ratio of the known metal shielding compartment, and then with the second shielding layer on the top of the molded body, the electronic components can be completely protected from electromagnetic interference. In addition, by removing part of the molded body, the overall height of the electronic package module structure can be reduced at the same time. Furthermore, the electronic package module structure 1 can effectively utilize the height difference between electronic components to provide a structure capable of three-dimensional stacking. Thus the present invention can provide formfactors with smaller thicknesses.

以上所述仅为本发明的实施例,其并非用以限定本发明的专利保护范围。任何本领域的技术人员,在不脱离本发明的精神与范围内,所作的更动及润饰的等效替换,仍为本发明的专利保护范围内。The above descriptions are merely embodiments of the present invention, and are not intended to limit the scope of the patent protection of the present invention. Any person skilled in the art, without departing from the spirit and scope of the present invention, makes the equivalent replacement of the modification and modification, still within the scope of the patent protection of the present invention.

Claims (9)

1.一种电子封装模块的制造方法,其特征在于,包括以下步骤:1. a manufacturing method of an electronic package module, is characterized in that, comprises the following steps: 提供一线路基板,该线路基板具有一组装平面与至少一接地垫,多个电子组件设置于该组装平面上;A circuit substrate is provided, the circuit substrate has an assembly plane and at least one ground pad, and a plurality of electronic components are arranged on the assembly plane; 形成至少一第一模封体包覆部分所述多个电子组件;forming at least one first molding body to cover part of the plurality of electronic components; 形成一第一屏蔽层,覆盖该第一模封体并接触该线路基板;forming a first shielding layer covering the first molding body and contacting the circuit substrate; 形成一第二模封体覆盖该第一模封体、所述多个电子组件、该组装平面;forming a second molding body to cover the first molding body, the plurality of electronic components, and the assembling plane; 移除部分该第二模封体;removing part of the second molded body; 形成一第二屏蔽层,覆盖该第一模封体、该第二模封体;以及forming a second shielding layer covering the first molding body and the second molding body; and 移除部分该第一屏蔽层。A portion of the first shielding layer is removed. 2.如权利要求1所述的电子封装模块的制造方法,其中形成该第一屏蔽层的方法包括:使用一图案化的屏蔽遮盖整个该组装平面,再进行一金属喷涂以及固化。2 . The method for manufacturing an electronic package module as claimed in claim 1 , wherein the method for forming the first shielding layer comprises: covering the entire assembly plane with a patterned shield, and then performing metal spraying and curing. 3 . 3.如权利要求1所述的电子封装模块的制造方法,其中形成该第一屏蔽层的方法包括:3. The method for manufacturing an electronic package module as claimed in claim 1, wherein the method for forming the first shielding layer comprises: 提供一牺牲层包覆部分所述多个电子组件;providing a sacrificial layer covering a portion of the plurality of electronic components; 顺形地形成该第一屏蔽层覆盖该第一模封体、该牺牲层,并电性连接所述至少一 接地垫其中之一;以及conformally forming the first shielding layer to cover the first molding body, the sacrificial layer, and electrically connect one of the at least one ground pad; and 移除该牺牲层。Remove the sacrificial layer. 4.如权利要求1所述的电子封装模块的制造方法,其中更包括移除部分该第一模封体。4. The method for manufacturing an electronic package module as claimed in claim 1, further comprising removing a portion of the first molding body. 5.一种电子封装模块,其特征在于,该电子封装模块包括:5. An electronic packaging module, characterized in that the electronic packaging module comprises: 一线路基板,该线路基板具有一组装平面;a circuit substrate, the circuit substrate has an assembly plane; 至少一电子组件,设置于该组装平面上;at least one electronic component disposed on the assembly plane; 一第一模封体以及一第二模封体分别包覆部分该电子组件;A first molding body and a second molding body respectively cover part of the electronic component; 一第一屏蔽层围绕该第一模封体,而该第一模封体与该第二模封体以该第一屏蔽层相隔离;以及A first shielding layer surrounds the first molded body, and the first molded body is isolated from the second molded body by the first shielding layer; and 一第二屏蔽层,覆盖该第一模封体与该第二模封体并电性连接于该第一屏蔽层。A second shielding layer covers the first molding body and the second molding body and is electrically connected to the first shielding layer. 6.如权利要求5所述的电子封装模块,其中线路基板具有多个接地垫,该第一屏蔽层电性连接所述多个接地垫其中之一。6. The electronic package module of claim 5, wherein the circuit substrate has a plurality of ground pads, and the first shielding layer is electrically connected to one of the plurality of ground pads. 7.一种电子封装模块,其特征在于,该电子封装模块包括:7. An electronic packaging module, characterized in that the electronic packaging module comprises: 一线路基板,该线路基板具有一组装平面;a circuit substrate, the circuit substrate has an assembly plane; 至少一电子组件,设置于该组装平面上;at least one electronic component disposed on the assembly plane; 一第一模封体包覆部分该电子组件;a first molding encapsulates part of the electronic component; 一第一屏蔽层顺形覆盖该第一模封体;以及a first shielding layer conformally covers the first molding body; and 一第二模封体覆盖该第一模封体及该第一屏蔽层,且暴露一部分的该第一屏蔽层。A second molding body covers the first molding body and the first shielding layer, and exposes a part of the first shielding layer. 8.如权利要求7所述的电子封装模块,更包括一第二屏蔽层,覆盖该第一模封体。8. The electronic packaging module of claim 7, further comprising a second shielding layer covering the first molding body. 9.如权利要求8所述的电子封装模块,其中该第二屏蔽层覆盖该第二模封体的该第一屏蔽层并与暴露于该第二模封体的该第一屏蔽层连接。9 . The electronic packaging module of claim 8 , wherein the second shielding layer covers the first shielding layer of the second molding body and is connected to the first shielding layer exposed to the second molding body. 10 .
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