CN109313097A - Pressure Sensor - Google Patents
Pressure Sensor Download PDFInfo
- Publication number
- CN109313097A CN109313097A CN201780034964.XA CN201780034964A CN109313097A CN 109313097 A CN109313097 A CN 109313097A CN 201780034964 A CN201780034964 A CN 201780034964A CN 109313097 A CN109313097 A CN 109313097A
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- CN
- China
- Prior art keywords
- pressure sensor
- pressure
- mentioned
- waterproof case
- sealant
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The purpose of the present invention is to provide a kind of pressure sensor, covered using waterproof case etc. pressure detecting element come using pressure sensor in, can satisfy PCT test etc. in outdoor waterproof performance requirement.Pressure sensor (100) of the invention has: detecting the pressure detecting element (126) of the pressure of fluid；The multiple electric wires (133) for connecting with pressure detecting element (126) and being drawn to outside；In internal storage pressure detecting element (126) and the waterproof case (141) of multiple electric wires (133)；And it is filled in the sealant (143) of the inner peripheral portion of waterproof case (141), above-mentioned pressure sensor (100) is characterized in that, is also equipped with the steam permeability of the outer peripheral surface of covering pressure sensor (100) coating agent (144) all lower than either one or two of waterproof case (141) and sealant (143).
Description
Technical field
The present invention relates to pressure sensor, more particularly, to waterproof case etc. cover pressure detecting element come using pressure
Force snesor.
Background technique
All the time, the pressure sensor as the pressure of detection fluid, such as there is known the pressure sensors of liquid blocking type.
The pressure sensor of liquid blocking type include: will carry out pressure detecting fluid supply to pressure chamber fluid supply
Portion；Detect the pressure detecting portion of the Fluid pressure of pressure chamber；The pressure signal detected by pressure detecting portion is sent to outside
Signal transmission unit；And the outer surface feature of covering fluid supply unit, pressure detecting portion and signal transmission unit.
Outer surface feature mainly has: for example generally cylindrical shape and covering pressure detecting portion and signal transmission unit
The waterproof case of surrounding；Cover the terminal board lid on the top of terminal board；And it is filled in the inner peripheral surface and shell of waterproof case
Sealant between outer peripheral surface and the outer peripheral surface of terminal board.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2001-116639 bulletin
Patent document 2: Japanese Unexamined Patent Publication 2004-37388 bulletin
Summary of the invention
Problems to be solved by the invention
This pressure detecting element and the pressure of wiring is linked in pressure detecting element with waterproof case, sealant covering
In force snesor, due to use environment, moisture penetrates in final resin and the insulation resistance of product is caused to decline sometimes.Separately
Outside, if the decline of insulation resistance further develops, a possibility that also causing short circuit.This is because outside through waterproof
Water after shell etc. causes the transfer of metal ion, the ion and electronic coupling because of the halogen ion on printed wiring board, then passes through
It metallizes and forms new current path.
As this test for measuring waterproof performance, there is known PCT test (pressure cooker tests), in resin seal
It is used in the evaluation of the moisture-proof of electronic component etc..Pressure cooker test reproduces 100 DEG C or more and highdensity vapor
Environmental gas keeps the water vapour pressure in test flume high compared to the steam partial pressure of interiors of products, and thus, it is possible to shorten water
Sub-dip enters the time of the inside of product, uses in the accelerated life test of the moisture-proof evaluation of electronic part material.
As the scheme for improving the above such waterproof performance, such as also consider to make shell securely equal method, but presence
Cost increase, the problem increased etc. in the manufacturing man-hours of internal set parts.In addition, in patent document 1, although describing
In semiconductor pressure sensor, in resin enclosure after sensors configured chip etc., the gel coated with resins of filled soft
Prevent the invention in the intrusion resin enclosure such as air, moisture, but in outdoor harsh ring as above-mentioned PCT test
It can not be corresponded under border.In addition, in patent document 2, although describing the coating on the surface of sensor housing has electrical insulating property
Insulating film pressure sensor invention, but the waterproof performance of coated insulating film is not recorded then.
Therefore, the purpose of the present invention is to provide a kind of pressure sensors, are covering pressure detecting using waterproof case etc.
Element come using pressure sensor in, can satisfy the waterproof performance requirement of the harshness such as PCT test.
Solution for solving the problem
In order to solve the above problems, pressure sensor of the invention has: pressure detecting element, detects the pressure of fluid
Power；Multiple electric wires connect with above-mentioned pressure detecting element and draw to outside；Waterproof case stores above-mentioned pressure in inside
Power detecting element and above-mentioned multiple electric wires；And sealant, it is filled in the inner peripheral portion of above-mentioned waterproof case, above-mentioned pressure passes
Sensor is characterized in that, be also equipped with cover the steam permeability of the outer peripheral surface of above-mentioned pressure sensor than above-mentioned waterproof case with
And the coating agent that either one or two of above-mentioned sealant is all low.
Additionally, it is preferred that be also equipped with cover the hydrophobicity of the outer peripheral surface of above-mentioned pressure sensor than above-mentioned waterproof case and on
State all high coating agent of either one or two of sealant.
Additionally, it is preferred that above-mentioned coating agent includes fluorine resin.
In addition, pressure sensor of the above-mentioned coating agent covering including above-mentioned sealant and above-mentioned waterproof case is whole
A outer peripheral surface.
Additionally, it is preferred that the upper table of the outer peripheral surface of pressure sensor of the above-mentioned coating agent covering including above-mentioned sealant
Face.
The effect of invention
Pressure sensor according to the present invention, using waterproof case etc. cover pressure detecting element come using pressure pass
In sensor, the waterproof performance requirement of the harshness such as PCT test can satisfy.
Detailed description of the invention
Fig. 1 be indicate the liquid blocking type of the first embodiment as pressure sensor of the invention pressure sensor it is vertical
Cross-sectional view.
Fig. 2 be indicate the liquid blocking type of the second embodiment as pressure sensor of the invention pressure sensor it is vertical
Cross-sectional view.
Fig. 3 is the schematic diagram for indicating the effect of coating countermeasure of the invention.
Specific embodiment
Embodiments of the present invention will be described referring to the drawings.
Firstly, being illustrated to first embodiment of the invention.
Fig. 1 is the pressure sensor 100 for indicating the liquid blocking type of the first embodiment as pressure sensor of the invention
Longitudinal section view.
In Fig. 1, the pressure sensor 100 of liquid blocking type has: the fluid that will carry out pressure detecting is supplied to aftermentioned
The fluid introduction part 110 of pressure chamber 112A；Detect the pressure detecting portion 120 of the Fluid pressure of pressure chamber 112A；It will be examined by pressure
The pressure signal that survey portion 120 detects is sent to external signal transmission unit 130；And covering fluid introduction part 110, pressure inspection
The outer surface feature 140 of survey portion 120 and signal transmission unit 130.
Fluid introduction part 110 has: metal the connecing with the piping connection imported for the fluid that carry out pressure detecting
Head part 111；And the end different from the end that the piping of joint component 111 is connected is connected to by welding etc. and is had
The metal pedestal plate 112 of bowl shape.
Joint component 111 be formed with screw in the external thread part of interconnecting piece of above-mentioned piping internal thread part 111a, with
And by from piping import fluid pilot pressure room 112A port 111b.The open end of port 111b passes through welding etc. and is set to
The opening portion connection in the center of pedestal plate 112.In addition, being equipped with internal thread part 111a in joint component 111 here, but can also be with
Equipped with external screw thread, or it also can replace joint component 111 and be connected with connecting tube made of copper.Pedestal plate 112 has direction
The bowl shape of the side extension opposed with joint component 111, forms pressure chamber 112A between aftermentioned diaphragm 122.
Pressure detecting portion 120 has: the shell 121 with through hole；Completely cut off above-mentioned pressure chamber 112A and aftermentioned liquid
Seal the diaphragm 122 of room 124A；It is configured at the diaphragm protective cover 123 of the pressure chamber side 112A of diaphragm 122；Insertion shell 121 passes through
Seal glass 124 inside through-hole；Silicon is filled between the recess portion and diaphragm 122 of the pressure chamber side 112A of seal glass 124
The fluid-tight room 124A of the pressure transmission mediums such as oil；It is configured at the pillar 125 of the through hole in the center of seal glass 124；It is fixed on
Pillar 125 and the pressure detecting element 126 being configured inside the 124A of fluid-tight room；The current potential tune being configured at around the 124A of fluid-tight room
Integeral part 127；It is fixed on multiple terminal pins 128 of seal glass 124；And it is fixed on the oil filling pipe of seal glass 124
129。
Shell 121 is for example formed by FeNi system alloy, stainless steel and other metal materials.Diaphragm 122 and diaphragm protective cover 123
It is formed by metal material, is welded on the outer peripheral edge portion of the through hole of the pressure chamber side 112A of shell 121.Diaphragm protective cover
123 are set to inside pressure chamber 112A to protect diaphragm 122, and are equipped with for the fluid for importing from fluid introduction part 110
By multiple intercommunicating pore 123a.After stacking pressure test section 120, shell 121 is connected to fluid importing by welding etc.
The outer peripheral edge portion of the pedestal plate 112 in portion 110.
In the fluid-tight room side 124A of pillar 125, pressure detecting is adhesively fixed with using the adhesive layer being made of bonding agent
Element 126.It, can also be by addition, in the present embodiment, pillar 125 is formed by FeNi system alloy, and but not limited to this
Other metal materials such as stainless steel are formed.Pressure detecting element 126 will be imported into from fluid introduction part 110 via diaphragm 122
The pressure of the fluid of pressure chamber 112A as the silicone oil in the 124A of fluid-tight room pressure oscillation and detect semiconductor pressure sensing
The electronic pressure sensors such as device.
As documented by No. 3987386 bulletin of patent, current potential adjustment component 127 is in order to by pressure detecting element
126 are placed in no electric field (zero potential), and circuit in chip etc. will not be because generating between frame ground and secondary power supply
Current potential influence and be adversely affected and be arranged.Current potential adjusts pressure inspection of the configuration of component 127 in the 124A of fluid-tight room
It surveys between element 126 and diaphragm 122, is formed by the material of the electric conductivity such as metal, be connected to zero electricity with pressure detecting element 126
The terminal connection of position.
In seal glass 124, multiple terminal pins 128 and oil filling pipe are fixed with by encapsulation process with breakthrough status
129.In the present embodiment, as terminal pin 128, all equipped with eight terminal pins 128.It is used that is, being equipped with external input output
(Vout), power supply (Vcc), earthy (GND) this three terminal pins 128, the adjustment as pressure detecting element 126 are used
Terminal be equipped with five terminal pins 128.In addition, in fig. 1 it is shown that four in eight terminal pins 128.Multiple terminal pins
128 are for example connect by the bonding wire 126a of metal or aluminum with pressure detecting element 126, and pressure detecting element is constituted
126 external input output terminal.
Oily filling pipe 129 is to be arranged to pressure transmission mediums such as the inside filling silicon oils of fluid-tight room 124A.
In addition, as indicated by the dashed line in figure 1, a square end portion of oily filling pipe 129 is flattened and closes after oil filling.
Signal transmission unit 130 has: the side opposite with pressure chamber 112A of pressure detecting portion 120 is arranged in, and arranges
The terminal board 131 of multiple terminal pins 128；It is fixed on terminal board 131 using bonding agent 132a, and is connect with multiple terminal pins 128
Multiple connection terminals 132；The multiple electric wires 133 being electrically connected by solder etc. with the outer end of multiple connection terminals 132；With
And the electrostatic protection layer 134 between the upper end of shell 121 and terminal board 131 is formed in using silicon systems bonding agent.
Terminal board 131 be it is generally cylindrical shaped, be formed as having near the middle section of the cylinder above-mentioned multiple for fixing
The shape of the fixation wall of terminal pin 128 is formed by resin material such as polybutylene terephthalate (PBT) (PBT).Terminal board 131
Such as the top of the shell 121 of pressure detecting portion 120 is fixed on using bonding agents such as epoxy resin.
Connection terminal 132 is formed by metal material, and it is above-mentioned to be fitted vertically the ratio in terminal board 131 using bonding agent 132a
Fixation wall leans on the cylinder side wall of upper section.In addition, in the present embodiment, being equipped with external input output (Vout), power supply
With (Vcc), earthy (GND) this three connection terminals 132.The inner end of three connection terminals 132 by welding etc. respectively with
Corresponding terminal pin 128 is electrically connected, but the connection method does not limit, and also can use other methods.
In addition, in the present embodiment, being equipped with three electric wires 133 to connect with three connection terminals 132.Electric wire
133 be to carry out prepared welding in advance on peeling the core wire 133a after the cladding by formation such as polyvinyl chloride (PVC) of electric wire 133
And electric wire made of the twisted wire is tied up, it is electric wire perforation after the hole of the outer end of above-mentioned connection terminal 132, utilizes
Solder, welding etc. are electrically connected with connection terminal 132, but the connection method does not limit, and also can use other method connections.
In addition, after three electric wires 133 are drawn from the outer surface feature 140 around covering pressure sensor 100, in being bundled into three
State and using by the formation such as polyvinyl chloride (PVC) protection pipe 135 cover.
Electrostatic protection layer 134 is coated on the upper surface of shell 121, packet in a manner of covering the upper surface of seal glass 124
It includes: the cricoid adhesive layer with predetermined thickness formed by silicon systems bonding agent；And coated on protruding multiple terminal pins 128
Seal glass 124 entire upper surface, and the clad being made of silicon systems bonding agent.Electrostatic protection layer 134 is not protected by ESD
The influence of the presence or absence of circuit is arranged to improve the electrostatic endurance of pressure detecting portion 120.
Outer surface feature 140 has: generally cylindrical shape and covering pressure detecting portion 120 and signal transmission unit 130
Around waterproof case 141；Cover the terminal board lid 142 on the top in terminal board 131；And it is filled in waterproof case 141
Sealant 143 between the outer peripheral surface of the outer peripheral surface and terminal board 131 of inner peripheral surface and shell 121.
Terminal board lid 142 is for example formed by resin material.In the present embodiment, terminal board lid 142 is formed as in blocking
The shape for stating the top of the terminal board 131 of cylindrical shape, the sealants 143 such as filled polyurethane system resin front cover in terminal board
131 top.But terminal board lid 142 is not limited to the shape, can also block terminal board 131 with being formed as one
The shape on top and the top of waterproof case 141, and covered after filling sealing agent 143, or another with terminal board lid 142
New cover is arranged in row, and after configuration terminal board lid 142 and sealant 143, new cover is covered in waterproof case
141 top.
Waterproof case 141 is shaped generally as cylindrical shape by resin material, such as polybutylene terephthalate (PBT) (PBT)
Shape is equipped with the flange part towards inside in the lower end of cylindrical shape.Be inserted into from the opening portion on the top of waterproof case 141
The peripheral part of the pedestal plate 112 for the fluid introduction part 110 that signal transmission unit 130 and pressure detecting portion 120 connect is connected to
The flange part.In this state, by filling sealing agent 143 come the component inside fixation pressure test section 120 etc..
It include waterproof case 141, terminal board lid 142, Yi Jimi in pressure sensor 100 of the invention shown in Fig. 1
The outer peripheral surface whole face of pressure sensor 100 including envelope agent 143 is equably coated by coating agent 144.In addition, as metal parts
Joint component 111 and pedestal plate 112 etc. do not need coating coating agent 144.As coating agent, vapor also can be used
The permeability coating agent all lower than either one or two of waterproof case 141 and sealant 143.In addition, outside the waterproof for example formed by PBT
The steam permeability of shell 141 is 1.2gmm/m2For 24 hours, the steam permeability of the sealant 143 of polyurethane series resin is
7g·mm/m2·24h.As the type of specific coating agent, it is able to use containing fluorine resin, such as FLUOROSURF
Coating agents such as (Off ロ ロ サ ー Off: registered trademark), but not limited to this.The coating agent 144 and polymer system of fluorine resin
It compares etc. other coating agents, is not easy haveing excellent performance for adhesion, hydrophobicity, oleophobic property, heat resistance, wear resistance etc..
The whole face of the outer peripheral surface of pressure sensor 100 be evenly coated with this coating agent 144 containing fluorine resin into
PCT test is gone.As experimental condition, consider to utilize 120 μm of coating FLUOROSURF of membrane pressure (FG-3050 series) (registrar
Mark) as coating agent 144, and the examination that the environment that is placed on the water vapor gas of the high temperature full of 110 DEG C, 1.4 air pressures is medium
Test condition.
Fig. 3 is the schematic diagram for indicating the effect of coating countermeasure of the invention.
Horizontal axis shown in Fig. 3 indicates endurance (h), and the longitudinal axis indicates insulate pressure-resistant (M Ω).As shown in Figure 3 it is found that having
The case where coating agent with do not have coating agent the case where compared with, it can be ensured that insulation pressure resistance (herein for 1000M Ω) it is durable when
Between it is longer.
In addition, as described above, if using as the coating agent 144 of fluorine resin with hydrophobic coating agent,
It is attached in the environment as water, since the contact area with water becomes smaller, further increases waterproof performance.
In addition, in the present embodiment, as an example of pressure sensor, with the pressure sensor 100 of liquid blocking type
For be illustrated, but not limited to this, and the present invention can be applied to ensure water-proof function with resins such as waterproof cases
All pressure sensors.
As described above, first embodiment according to the present invention, using waterproof case etc. cover pressure detecting element come
In the pressure sensor used, the pressure sensor that can satisfy the waterproof performance requirement of the harshness such as PCT test can be improved.
Hereinafter, being illustrated to second embodiment of the present invention.
Fig. 2 is the pressure sensor 200 for indicating the liquid blocking type of the second embodiment as pressure sensor of the invention
Longitudinal section view.
In Fig. 2, the pressure sensor 200 of liquid blocking type is coated with and applies compared with pressure sensor 100 shown in FIG. 1
The position for covering agent 244 is different, and other constituent elements are identical.Identical reference marks is marked for identical constituent element and is omitted
Explanation.
In Fig. 2, in the pressure sensor 200 of liquid blocking type, only in the opening portion on the top for being configured at waterproof case 241
Sealant 243 and terminal board lid 242 upper surface be coated with coating agent 244.As coating agent 244, with the first embodiment party
Formula is identical, uses the coating agent containing fluorine resin.It is same with the pressure sensor 100 of first embodiment thereby, it is possible to expect
Deng or performance proximate to it.
As described above, second embodiment according to the present invention, has same with the pressure sensor of first embodiment
Effect, and have the effect of being able to suppress cost etc compared with the pressure sensor of first embodiment.
As described above, pressure sensor according to the present invention, by the covering pressure detecting member such as waterproof case
Part come using pressure sensor in, can satisfy the waterproof performance requirement of the harshness such as PCT test.
The explanation of symbol
100,200-pressure sensor, 110,210-fluid introduction parts, 111,211-joint components, 111a, 211a-
Internal thread part, the port 111b, 211b-, 112,212-pedestal plates, the pressure chamber 112A, 212A-, the inspection of 120,220-pressure
Survey portion, 121,221-shells, 122,222-diaphragms, 123,223-diaphragm protective covers, 123a, 223a-intercommunicating pore, 124,
224-seal glass, 124A, 224A-fluid-tight room, 125,225-pillars, 126,226-pressure detecting elements, 126a,
226a-bonding wire, 127,227-current potentials adjust component, and 128,228-terminal pins, 129,229-oil fillings, which are used, manages, 130,
230-signal transmission units, 131,231-terminal boards, 132,232-connection terminals, 132a, 232a-bonding agent, 133,233-
Electric wire, 133a, 233a-core wire, 134,234-electrostatic protection layers, 140,240-outer surface features, outside 141,241-waterproofs
Shell, 142,242-terminal board lids, 143,243-sealants, 144,244-coating agents.
Claims (5)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-143417 | 2016-07-21 | ||
| JP2016143417 | 2016-07-21 | ||
| PCT/JP2017/026371 WO2018016610A1 (en) | 2016-07-21 | 2017-07-20 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109313097A true CN109313097A (en) | 2019-02-05 |
Family
ID=60992647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780034964.XA Pending CN109313097A (en) | 2016-07-21 | 2017-07-20 | Pressure Sensor |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6781259B2 (en) |
| CN (1) | CN109313097A (en) |
| WO (1) | WO2018016610A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI771825B (en) * | 2020-12-15 | 2022-07-21 | 財團法人金屬工業研究發展中心 | Service-life testing device of the pressure sensor and testing method using the same |
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| JP2015064299A (en) * | 2013-09-25 | 2015-04-09 | 株式会社フジクラ | Waterproof type pressure sensor |
| CN104655336A (en) * | 2015-01-19 | 2015-05-27 | 江苏大学 | Water spraying propulsion pump structure capable of measuring dynamic exciting force of blade |
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| CN105074410A (en) * | 2013-02-05 | 2015-11-18 | 株式会社鹭宫制作所 | pressure detection unit |
| WO2015194105A1 (en) * | 2014-06-17 | 2015-12-23 | 株式会社鷺宮製作所 | Sensor unit and pressure detection device containing same |
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| CN105579819A (en) * | 2013-10-04 | 2016-05-11 | 株式会社藤仓 | Semiconductor pressure sensor |
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| DK0548470T4 (en) * | 1991-12-24 | 2000-04-17 | Landis & Gyr Tech Innovat | Pressure sensor with a membrane of semiconductor material |
| JPH09212091A (en) * | 1996-01-30 | 1997-08-15 | Rhythm Watch Co Ltd | Id tag |
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2017
- 2017-07-20 WO PCT/JP2017/026371 patent/WO2018016610A1/en active Application Filing
- 2017-07-20 JP JP2018528882A patent/JP6781259B2/en active Active
- 2017-07-20 CN CN201780034964.XA patent/CN109313097A/en active Pending
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| JPH07202621A (en) * | 1993-12-28 | 1995-08-04 | Matsushita Electric Ind Co Ltd | Ceramic oscillator |
| CN105074410A (en) * | 2013-02-05 | 2015-11-18 | 株式会社鹭宫制作所 | pressure detection unit |
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| WO2015194105A1 (en) * | 2014-06-17 | 2015-12-23 | 株式会社鷺宮製作所 | Sensor unit and pressure detection device containing same |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6781259B2 (en) | 2020-11-04 |
| WO2018016610A1 (en) | 2018-01-25 |
| JPWO2018016610A1 (en) | 2019-01-31 |
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Application publication date: 20190205 |