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CN109313044A - A kind of reflection-type angular displacement optical encoder - Google Patents

A kind of reflection-type angular displacement optical encoder Download PDF

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Publication number
CN109313044A
CN109313044A CN201680086762.5A CN201680086762A CN109313044A CN 109313044 A CN109313044 A CN 109313044A CN 201680086762 A CN201680086762 A CN 201680086762A CN 109313044 A CN109313044 A CN 109313044A
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China
Prior art keywords
code
reflection
scale layer
main body
angular displacement
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Pending
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CN201680086762.5A
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Chinese (zh)
Inventor
毛宏亮
侯林涛
刘长城
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Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
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Publication of CN109313044A publication Critical patent/CN109313044A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

A kind of reflection-type angular displacement optical encoder, including code-disc (1) and infrared detector (2), code-disc (1) includes the code-disc main body (11) of column structure, the side wall of code-disc main body (11) is divided into multiple scale areas along its circumferential direction, filling is covered with bright scale layer (12) or dark scale layer (13) in scale area, and bright scale layer (12) and dark scale layer (13) are arranged alternately;Along the side for being radially disposed at code-disc (1) of code-disc main body (11), the infrared ray that infrared detector (2) is launched is reflected after contacting with bright scale layer (12) or dark scale layer (13) and is received by infrared detector (2) infrared detector (2).The reflection-type angular displacement optical encoder solves the problems, such as that reflection-type angular displacement optical encoder axial direction occupied space is big in the prior art and resolution ratio is not high, is capable of the angular displacement of precise measurement motor rotor.

Description

A kind of reflection-type angular displacement optical encoder Technical field
The present embodiments relate to the technical field of angular displacement optical encoder more particularly to a kind of reflection-type angular displacement optical encoders.
Background technique
Reflection-type angular displacement optical encoder is widely used in all kinds of angle displacement measurement occasions, and principle is to emit light to code-disc by luminescent device, and light enters electrooptical device after code-disc reflects.As shown in Figure 1, there is the scale layer at light and shade interval on code-disc 01, the reflectivity of bright scale layer 011 is higher than the reflectivity of dark scale layer 012, therefore the light intensity for entering electrooptical device when code-disc 01 rotates can constantly change, and the electric signal that photoelectric converter generates can be accurately detected code-disc has rotated how many angle after shaping.
Code-disc 01 is cylindrical body, and light and dark scale layer is provided on the disc of code-disc 01, and infrared detector 02 emits infrared ray to code-disc 01, realizes angle displacement detection by detecting reflected light intensity variation.Wherein the bright scale layer 011 of code-disc 01 mostly uses greatly Steel material or metal coating material, so that bright scale layer 011 is much larger than dark scale layer 012 to the reflectivity of infrared ray, so that infrared detector 02 receives the infrared ray for the varying strength that bright scale layer 011 and dark scale layer 012 reflect to the reflectivity of infrared ray.
However, above-mentioned reflection-type angular displacement optical encoder has the following problems in use:
(1) since infrared detector 02 and code-disc 01 are arranged successively in the axial direction, infrared detector 02 needs to occupy certain altitude, code-disc 01 needs to occupy certain altitude, it also needs to stay between the two certain with height, cause the technology to need to occupy larger space axially, is unfavorable for the compact designed of system;
(2) scale layer width=practical circumference/scale quantity, in the case where scale quantity is constant, closer to the center of circle, scale layer is narrower, in order to guarantee clearly to detect, it needs to guarantee that the scale layer width of inner ring is greater than minimum detectable width, limits the resolution ratio of entire reflection-type angular displacement optical encoder.
Summary of the invention
The embodiment of the present invention provides a kind of reflection-type angular displacement optical encoder, and system is more compact and can accurately measure the angular displacement of motor rotor.
In order to achieve the above objectives, first aspect, the embodiment provides a kind of reflection-type angular displacement optical encoders, including code-disc and infrared detector, code-disc includes code-disc main body, and code-disc main body is column structure, and side wall is circumferentially divided and forms multiple scale areas, filling is covered with bright scale layer or dark scale layer in scale area, and bright scale layer and dark scale layer are arranged alternately;Along the side for being radially disposed at code-disc of code-disc main body, the infrared ray that infrared detector is launched is reflected after contacting with bright scale layer or dark scale layer and is received by infrared detector infrared detector.
Compared to the prior art, reflection-type angular displacement optical encoder provided in an embodiment of the present invention, while code-disc is rotated with the rotor coaxial of motor, infrared detector issues infrared ray, infrared ray on the side wall for being set to code-disc main body bright scale layer or dark scale layer contact after reflected, since the reflectivity of bright scale layer and dark scale layer to infrared ray is different, the infrared ray degree of strength that infrared detector receives is different, thus can calculate the angular displacement of the rotor of motor.In the present invention, since infrared detector is along the side for being radially disposed at code-disc of code-disc main body, thus the size of reflection-type angular displacement optical encoder in the axial direction is smaller, and structure is more compact, is easy to implement the lightening of equipment.Simultaneously, it is set to due to the scale layer of the reflection-type angular displacement optical encoder on the side wall of code-disc main body, the largest circumference of code-disc main body is utilized, thus the number of scale layer can be directly arranged in designer according to the largest circumference of code-disc main body, to ensure the resolution ratio of code-disc.And under the size of code-disc main body and the same number of situation of scale layer, in the code-disc that the prior art provides, scale layer is set to the extension of the radial direction on the up/down bottom surface of code-disc main body and along the bottom surface, the thus code-disc that the prior art provides, width of its precision by scale layer close to the center point of up/down bottom surface determines that the width is formed by the circumference equal dividing that radius is less than code-disc main body;And code-disc provided in an embodiment of the present invention, since bright scale layer and the filling of dark scale layer are covered in scale area, thus the width and scale area of bright scale layer and dark scale layer is of same size, and the width of scale area is formed by the circumference equal dividing of code-disc main body, therefore the resolution ratio of code-disc provided in an embodiment of the present invention is much larger than the resolution ratio for the code-disc that the prior art provides, so that the reflection-type angular displacement optical encoder can accurately measure the angular displacement of the rotor of motor in use.
In the first mode in the cards, with reference to first aspect, the central axis of code-disc main body is parallel to the edge of scale area in the height direction.It fills the bright scale layer being covered in scale area or dark scale layer is identical everywhere along the width dimensions of the circumferential direction of code-disc main body, convenient for observation and survey calculation etc..
In second of mode in the cards, with reference to first aspect, one of them bright scale layer forms tool There is a bright scale layer of concave structure, and concave structure is to the central concave of code-disc main body.Bright scale layer reflectivity with concave structure is much larger than the reflectivity of other bright scale layers, to be conducive to calibrate absolute zero position.
In the third mode in the cards, with reference to first aspect any one mode in the cards, motor includes upper rotor part and lower rotor part, and upper rotor part or lower rotor part are code-disc main body.The size of reflection-type angular displacement optical encoder system in the axial direction is further decreased, the compactness of system is improved.
In the 4th kind of mode in the cards, with reference to first aspect any one mode in the cards, code-disc main body is made of PCB substrate, and is formed with several metal layers by electroplating technology on the side wall of the code-disc main body, which is the bright scale layer of code-disc.Bright scale layer is the metal layer being set in PCB substrate, and dark scale layer is the PCB substrate between two bright scale layers, and metal layer is very high to the reflectivity of infrared ray, and PCB substrate is very low to the reflectivity of infrared ray, can accurate response go out the rotation situation of code-disc main body.
In the 5th kind of mode in the cards, with reference to first aspect any one mode in the cards, code-disc main body can be cylindrical body, or regular prism.
In the 6th kind of mode in the cards, with reference to first aspect any one mode in the cards, motor is the PCB motor being set in motor driving plate, and the side of PCB motor is provided with infrared detector, which is fixed in motor driving plate.
In the 7th kind of mode in the cards, the 6th kind of mode in the cards with reference to first aspect, infrared detector is fixed in motor driving plate by welding manner.
In the 8th kind of mode in the cards, with reference to first aspect any one mode in the cards, multiple bright scale layers form multiple bright scale layers with concave structure, and this multiple concave structure is to the central concave of code-disc main body.The bright scale layer of multiple concave structures can realize rotation process self calibration, keep measurement result more accurate.
In the 9th kind of mode in the cards, with reference to first aspect any one mode in the cards, infrared detector includes the luminescent device of capable of emitting infrared ray and the electrooptical device of receivable infrared ray, the infrared ray that luminescent device issues into electrooptical device and generates electric signal by after bright scale layer or the reflection of dark scale layer.The luminescent device of infrared detector launches infrared ray, it is reflected after infrared radiation to bright scale layer or dark scale layer, electrooptical device receives reflected infrared ray, generate an analog voltage, the size of the size reaction reflectivity of the analog voltage, to obtain more intuitive testing result.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, the accompanying drawings required for describing the embodiments of the present invention are briefly described below, apparently, drawings in the following description are only some embodiments of the invention, for those of ordinary skill in the art, without creative efforts, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of structural schematic diagram for reflection-type angular displacement optical encoder that the prior art provides;
Fig. 2 is the structural schematic diagram of reflection-type angular displacement optical encoder provided in an embodiment of the present invention;
Fig. 3 is the top view of reflection-type angular displacement optical encoder provided in an embodiment of the present invention;
Fig. 4 is the perspective view of the code-disc of reflection-type angular displacement optical encoder provided in an embodiment of the present invention;
Fig. 5 is the structural schematic diagram that reflection-type angular displacement optical encoder provided in an embodiment of the present invention has absolute zero position calibrating function;
Fig. 6 is the top view of the code-disc of reflection-type angular displacement optical encoder provided in an embodiment of the present invention, one of them bright scale layer has concave structure;
Fig. 7 is the top view of reflection-type angular displacement optical encoder provided in an embodiment of the present invention, and the light beam that wherein infrared detector issues is contacted and reflected with bright scale layer;
Fig. 8 is the top view of reflection-type angular displacement optical encoder provided in an embodiment of the present invention, and the light beam that wherein infrared detector issues is contacted and reflected with the bright scale layer with concave structure;
Fig. 9 is the main view that reflection-type angular displacement optical encoder provided in an embodiment of the present invention is applied on PCB motor;
The perspective view that Figure 10 is the code-disc main body of reflection-type angular displacement optical encoder provided in an embodiment of the present invention when being regular prism;
The top view that Figure 11 is the code-disc main body of reflection-type angular displacement optical encoder provided in an embodiment of the present invention when being regular prism;
The top view that Figure 12 is the code-disc main body of reflection-type angular displacement optical encoder provided in an embodiment of the present invention when being regular prism, and one of them bright scale layer has concave structure.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical scheme in the embodiment of the invention is clearly and completely described, it is clear that and described embodiments are only a part of the embodiments of the present invention, rather than Whole embodiments.Based on the embodiments of the present invention, every other embodiment obtained by those of ordinary skill in the art without making creative efforts, shall fall within the protection scope of the present invention.
Reflection-type angular displacement optical encoder provided in an embodiment of the present invention, system architecture is as shown in Figures 2 to 4, including code-disc 1 and infrared detector 2, code-disc 1 includes the code-disc main body 11 of column structure, the side wall of code-disc main body 11 is divided into multiple scale areas along its circumferential direction, filling is covered with bright scale layer 12 or dark scale layer 13 in scale area, and bright scale layer 12 and dark scale layer 13 are arranged alternately;Along the side for being radially disposed at code-disc 1 of code-disc main body 11, the infrared ray that infrared detector 2 is launched is reflected after contacting with bright scale layer 12 or dark scale layer 13 and is received by infrared detector 2 infrared detector 2.
Compared to the prior art, reflection-type angular displacement optical encoder provided in an embodiment of the present invention, while code-disc 1 is rotated with the rotor coaxial of motor, infrared detector 2 issues infrared ray, infrared ray is reflected after with the bright scale layer 12 on the side wall for being set to code-disc main body 11 or secretly, scale layer 13 is contacted, since the reflectivity of bright scale layer 12 and dark scale layer 13 to infrared ray is different, the infrared ray degree of strength that infrared detector 2 receives is different, thus can calculate the angular displacement of the rotor of motor.In the present invention, since infrared detector 2 is along the side for being radially disposed at code-disc 1 of code-disc main body 11, thus the size of reflection-type angular displacement optical encoder in the axial direction is smaller, and structure is more compact, is easy to implement the lightening of equipment.Simultaneously, it is set to due to the scale layer of the reflection-type angular displacement optical encoder on the side wall of code-disc main body 11, the largest circumference of code-disc main body 11 is utilized, thus the number of scale layer can be directly arranged in designer according to the largest circumference of code-disc main body 11, to ensure the resolution ratio of code-disc 1.And under the size of code-disc main body 11 and the same number of situation of scale layer, in the code-disc that the prior art provides, scale layer is set to the extension of the radial direction on the up/down bottom surface of code-disc main body 11 and along the bottom surface, the thus code-disc that the prior art provides, width of its precision by scale layer close to the center point of up/down bottom surface determines that the width is formed by the circumference equal dividing that radius is less than code-disc main body 11;And code-disc 1 provided in an embodiment of the present invention, since bright scale layer 12 and the filling of dark scale layer 13 are covered in scale area, thus the width and scale area of bright scale layer 12 and dark scale layer 13 is of same size, and the width of scale area is formed by the circumference equal dividing of code-disc main body 11, therefore the resolution ratio of code-disc 1 provided in an embodiment of the present invention is much larger than the resolution ratio for the code-disc that the prior art provides, so that the reflection-type angular displacement optical encoder can accurately measure the angular displacement of the rotor of motor in use.
To reduce detection difficulty, as shown in Figure 2 and Figure 4, the edge of scale area in the height direction is parallel to the central axis of code-disc main body 11.Since scale area is to form side wall of code-disc main body 11 etc. point, when the edge in the height direction of scale area is parallel to the axial direction of code-disc main body 11, will form Width dimensions identical scale area everywhere one by one, the width dimensions of this bright scale layer 12 that filling is covered in scale area or dark scale layer 13 are also identical everywhere, it thus need to only ensure that the width dimensions of scale area are greater than minimum detectable width, the resolution ratio for ensuring that the reflection-type angular displacement optical encoder, facilitates look at and survey calculation etc..
To realize the label in detection process to absolute zero position, as shown in Fig. 5 to Fig. 8, one of them bright scale layer 12 forms concave structure 121 to the central concave of code-disc main body 11.12 reflectivity of bright scale layer with concave structure 121 is much larger than the reflectivity of other bright scale layers 12, thus the infrared ray reflected by the concave structure 121 that infrared detector 2 receives is stronger, to calibrate absolute zero position.Absolute zero position is the semaphore in the period turned over for ancillary statistics code-disc 1, also known as absolute zero position signal, as soon as being specifically exactly that can be used as a start bit, a different pulse signal is had when rotating to this position weekly, indicates to have passed through this specific position again.A kind of label that absolute zero position signal can be used as equipment specific position uses, and the start bit counted again that can also be used as many Zhou Yihou of continuous rotation uses.
The axial dimension of system is the major criterion for measuring system compact degree, for the compactness for further increasing the system, as shown in figure 9, code-disc main body 11 is the upper rotor part 31 or lower rotor part 32 of motor 3.The case where being provided separately compared to code-disc 1 and rotor, after code-disc 1 and rotor to be measured are combined, being equipped with the size of the system of the reflection-type angular displacement optical encoder in the axial direction reduces the height of a code-disc, the size of system in the axial direction is further reduced, the compactness of system is improved.
For the difficulty for reducing scale layer filling covering, code-disc main body 11 is made of PCB substrate, and bright scale layer 12 is the metal layer being formed on the side wall of code-disc main body 11 using electroplating technology.Bright scale layer 12 is the metal layer being set in PCB substrate, dark scale layer 13 is the PCB substrate between two bright scale layers 12, metal layer is very high to the reflectivity of infrared ray, and PCB substrate is very low to the reflectivity of infrared ray, thus the code-disc 1 in use can accurate response go out the rotation situation of code-disc main body 11.
It should be noted that can be used when the side wall to code-disc main body 11 is electroplated first to side wall bulk metal, then the mode of the metal layer processing removal (such as being removed using milling machine milling) dark 13 place scale area of scale layer;The scale area where dark scale layer 13 first can also be subjected to detachable covering protection before plating; then the side wall of code-disc is integrally electroplated; removal is covered in the protection structure on the scale area at dark 13 place of scale layer after plating, so that it may it is alternate to form light and shade Scale layer.
Optionally, as shown in Fig. 2 to Fig. 8 and Figure 10 to Figure 12, code-disc main body 11 is cylindrical body or regular prism.Cylindrical body manufacture craft is simple, is easy to obtain, and is capable of the number of flexible setting scale area according to actual needs.The seamed edge and center axis thereof of regular prism are parallel and perpendicular to upper bottom surface, and the side wall of regular prism is made of the identical rectangle of multiple sizes, thus the side wall of regular prism can be formed directly in scale area, cover bright scale layer 12 and dark scale layer 13 convenient for filling.
Preferably, as shown in Figure 10 to Figure 12, code-disc main body 11 is regular prism, and the seamed edge number of the regular prism is identical as the sum of bright scale layer 12 and dark scale layer 13, namely it constitutes in multiple rectangles of side wall of the code-disc main body 11 of the regular prism structure, one bright scale layer 12 or a dark scale layer 13 are only set on each rectangle, scale layer is more easily filled and is covered in scale area.
For ensure to add the reflection-type angular displacement optical encoder system can steady operation, as shown in figure 9, when motor 3 be PCB motor when, PCB motor is set in motor driving plate 4, and infrared detector 2 is fixed in motor driving plate 4.The stability when rotation of PCB motor can be improved in motor driving plate 4, first the stator (not shown) of PCB motor is fixed in the motor driving plate 4 when assembling, then upper rotor part 31 and lower rotor part 32 are got up stator clamping along the axial of stator, this is kept fixed the relative position of stator when the PCB motor running, it is not in the changing of the relative positions, thus stability when improving PCB motor running.The opposite changing of the relative positions will not occur between code-disc 1 in use in the infrared detector 2 being fixed in motor driving plate 4, it is ensured that the accuracy of testing result.
Preferably, motor driving plate 4 is assembled in equipment again after first infrared detector 2 is fixed in motor driving plate 4 when assembling, infrared detector 2 can be fixed in motor driving plate 4 on the more open installation space such as station at this time, this makes the assembling difficulty of infrared detector 2 smaller.
Specifically, infrared detector 2 is welded in motor driving plate.Welding manner forming is fast and connection reliability is higher, is conducive to improve packaging efficiency.
Optionally, multiple bright scale layers 12 form multiple concave structures 121 to the central concave of code-disc main body 11.12 reflectivity of bright scale layer with concave structure 121 is much larger than the reflectivity of other bright scale layers 12, when code-disc main body 11 rotates, when the bright scale layer 12 with concave structure 121 turns to opposite with infrared detector 2, infrared detector 2 receives stronger infrared ray, to generate higher voltage signal, when code-disc main body 11 rotates one week, infrared detector 2 continuously generates multiple higher voltage signals, and system according to multiple higher voltage signals according to can realize turn Dynamic process self calibration, keeps measurement result more accurate.
Infrared detector 2 includes luminescent device and electrooptical device, and luminescent device is reflected after issuing infrared ray by bright scale layer 12 or dark scale layer 13, and the light after reflection enters electrooptical device and generates electric signal.The luminescent device of infrared detector 2 launches infrared ray, it is reflected after infrared radiation to bright scale layer 12 or dark scale layer 13, electrooptical device receives reflected infrared ray, generate an analog voltage, the size of voltage reacts scale layer to the size of the reflectivity of infrared ray, to obtain more intuitive testing result.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations;Although the present invention is described in detail referring to the foregoing embodiments, those skilled in the art should understand that: it is still possible to modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features;And these are modified or replaceed, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.

Claims (10)

  1. A kind of reflection-type angular displacement optical encoder, including code-disc and infrared detector, it is characterized in that, the code-disc includes the code-disc main body of column structure, the side wall of the code-disc main body is divided into multiple scale areas along its circumferential direction, filling is covered with bright scale layer or dark scale layer in the scale area, and stated clearly scale layer and the dark scale layer are arranged alternately;Along the side for being radially disposed at the code-disc of the code-disc main body, the infrared ray that the infrared detector is launched is reflected after contacting with stated clearly scale layer or the dark scale layer and is received by the infrared detector infrared detector.
  2. Reflection-type angular displacement optical encoder according to claim 1, which is characterized in that the edge of the scale area in the height direction is parallel to the central axis of the code-disc main body.
  3. Reflection-type angular displacement optical encoder according to claim 1, which is characterized in that one of stated clearly scale layer forms concave structure to the central concave of the code-disc main body.
  4. Reflection-type angular displacement optical encoder according to claim 1, which is characterized in that the code-disc main body is the upper rotor part or lower rotor part of motor.
  5. Reflection-type angular displacement optical encoder according to any one of claims 1 to 4, which is characterized in that the code-disc main body is made of PCB substrate, and stated clearly scale layer is the metal layer being formed on the side wall of the code-disc main body using electroplating technology.
  6. Reflection-type angular displacement optical encoder according to claim 1, which is characterized in that the code-disc main body is cylindrical body or regular prism.
  7. Reflection-type angular displacement optical encoder according to claim 4, which is characterized in that the motor is PCB motor, and the PCB motor is set in motor driving plate, and the infrared detector is fixed in the motor driving plate.
  8. Reflection-type angular displacement optical encoder according to claim 7, which is characterized in that the infrared detector is welded in the motor driving plate.
  9. Reflection-type angular displacement optical encoder according to claim 1, which is characterized in that multiple stated clearly scale layers form multiple concave structures to the central concave of the code-disc main body.
  10. Reflection-type angular displacement optical encoder according to claim 1, it is characterized in that, the infrared detector includes luminescent device and electrooptical device, the luminescent device is stated clearly scale layer after issuing infrared ray or the dark scale layer reflection, the light after reflection enter the electrooptical device and generates electric signal.
CN201680086762.5A 2016-12-12 2016-12-12 A kind of reflection-type angular displacement optical encoder Pending CN109313044A (en)

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PCT/CN2016/109538 WO2018107342A1 (en) 2016-12-12 2016-12-12 Reflective angular displacement optical encoder

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CN204613756U (en) * 2015-04-29 2015-09-02 北京万集科技股份有限公司 A Rotating Mirror Structure and System for Speed Feedback

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Publication number Priority date Publication date Assignee Title
CN112789523A (en) * 2019-11-01 2021-05-11 深圳市速腾聚创科技有限公司 Angular displacement measuring device, laser radar and angle adjusting method
CN112789523B (en) * 2019-11-01 2023-11-28 深圳市速腾聚创科技有限公司 Angular displacement measuring device, laser radar and angle adjusting method

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