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CN109238968A - A kind of photo-thermal heterodyne micro-imaging detection system and method - Google Patents

A kind of photo-thermal heterodyne micro-imaging detection system and method Download PDF

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Publication number
CN109238968A
CN109238968A CN201811237676.7A CN201811237676A CN109238968A CN 109238968 A CN109238968 A CN 109238968A CN 201811237676 A CN201811237676 A CN 201811237676A CN 109238968 A CN109238968 A CN 109238968A
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acousto
laser
mirror
amplifier
lock
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刘俊岩
王永辉
王飞
王扬
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Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology Shenzhen
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited

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Abstract

一种光热外差显微成像检测系统与方法，属于显微成像检测技术领域，所述系统包括直角支架、二维压电移动台、支撑棒、支撑棒夹持器、二向色镜、1/4波片、笼式镜架支撑座、偏振分束镜立方、600nm长通滤波片、分光镜、雪崩光电二极管模块、CCD相机、锁相放大器、二维压电移动台控制器、计算机、办公桌、638nm激光器、532nm激光器、声光调制器驱动器、镜架支撑杆、20×缩束镜、旋转移动台、声光调制器、升降移动台、反射镜一、光学平台、笼式镜架连接杆、反射镜二、三维移动台、物镜悬臂安装架、100×物镜、暗箱及各种连接线。本发明的优点是：本发明通过利用外差检测的方式极大提高了信号的提取与分辨能力，进而提高了光热显微成像的信噪比。

A photothermal heterodyne microscopic imaging detection system and method belong to the technical field of microscopic imaging detection. The system comprises a right-angle bracket, a two-dimensional piezoelectric moving stage, a support rod, a support rod holder, a dichroic mirror, 1/4 wave plate, cage mount support, polarizing beam splitter cube, 600nm long pass filter, beam splitter, avalanche photodiode module, CCD camera, lock-in amplifier, 2D piezoelectric mobile stage controller, computer , desk, 638nm laser, 532nm laser, acousto-optic modulator driver, mirror frame support rod, 20x beam reducer, rotating mobile stage, acousto-optic modulator, lifting mobile stage, mirror 1, optical table, cage mirror Frame connecting rod, mirror two, three-dimensional moving stage, objective lens cantilever mount, 100× objective lens, camera obscura and various connecting lines. The advantages of the present invention are: the present invention greatly improves the signal extraction and resolution capability by using the method of heterodyne detection, thereby improving the signal-to-noise ratio of photothermal microscopy imaging.

Description

A kind of photo-thermal heterodyne micro-imaging detection system and method
Technical field
The invention belongs to micro-imaging detection technique fields, and in particular to a kind of photo-thermal heterodyne micro-imaging detection system with Method is suitable for metal nanoparticle, carbon nanotube, the photothermal imaging of the nanometer sized materials such as biological tissue cell and evaluation.
Background technique
It with the continuous development of science and technology, is always to study for the imaging observation of nanoscale object and specificity analysis Popular direction.Far-field optics micro-imaging technique is a kind of micro-imaging technique being suggested earliest, is had lossless, specific Well and the advantages that deep is penetrated, but the micro- detection of far-field optics will receive the limitation of optical diffraction limit, it is difficult to observe nanoscale ruler Degree.With the development of micro- Detection Techniques, fluorescent microscopic imaging (microscope) technology is had gradually developed, with high noise The advantages that than, high specificity and many reference amounts, it is widely used in biological tissue cell Characteristics Detection and diagnosis.But fluorescence microscope It then needs object being observed that there is fluorescent characteristic, the object of not fluorescent characteristic is needed to be marked with some fluorescence probes Observation.Marker applied by present is mostly organic molecule or semiconductor-quantum-point, but while using them as label exists Photobleaching phenomenon or signal scintillation.Therefore, a kind of stable imaging for being able to achieve non-fluorescence substance is studied, and can be dashed forward The micro-imaging technique of broken conventional optical microscope diffraction limit just seems particularly significant.
Summary of the invention
It is an object of the invention to overcome current Induced Fluorescence Microscopy/system can not to non-fluorescence object directly at Picture, and there are problems that jitter phenomenon using fluorescent marker, provide a kind of photo-thermal heterodyne micro-imaging detection system with Method, the photo-thermal heterodyne micro-imaging are a kind of novel micro-imaging techniques, mainly utilize the photo-thermal of measurand Effect and characteristic, are influenced smaller by backscatter, have many advantages, such as that signal stabilization and imaging effect are good, especially the technology can solve The certainly photobleaching of fluorescent marker and the problems such as flashing.
To achieve the above object, the technical solution adopted by the present invention is as follows:
A kind of photo-thermal heterodyne micro-imaging detection system, the system comprises right angle rack, two-dimensional piezoelectric mobile station, support stick, Support bar holder, dichroscope, quarter wave plate, cage mirror support supports seat, polarizing beam splitter mirror cube, 600nm long pass filter piece, Spectroscope, avalanche photodide module, CCD camera, piezoelectric movement platform control line, SMA turn BNC line, ethernet line, locking phase and put Big device, two-dimensional piezoelectric mobile station controller, SMA turn BNC line, GPIB data line, USB control line, computer, desk, USB number According to line, 638nm laser, 532nm laser, acoustooptic modulator driver, SMA control line, mirror support supports bar, 20 × shrink beam Mirror, moving in rotation platform, acousto-optic modulator, lifting moving platform, reflecting mirror one, optical platform, cage mirror holder connecting rod, reflecting mirror Two, three-dimensional mobile station, object lens cantilever mounting frame, 100 × object lens, camera bellows；
The right angle rack, support stick, dichroscope, quarter wave plate, cage mirror support supports seat, polarizing beam splitter mirror cube, 600nm Long pass filter piece, spectroscope, avalanche photodide module, CCD camera, 638nm laser, 532nm laser, acousto-optic modulation Device driver, mirror support supports bar, lifting moving platform, reflecting mirror one, reflecting mirror two are both placed on optical platform, the computer It is placed on desk with lock-in amplifier, camera bellows is the pentahedron being made of surrounding side and top surface, and it is flat that camera bellows covers on optics On platform, the three-dimensional mobile station is mounted on right angle rack, and the support stick gripper is on support stick, the two dimension Piezoelectric movement platform is mounted on support bar holder, and clamping is fixed with detection sample, the two dimension pressure in two-dimensional piezoelectric mobile station Electric moveable platform controller is placed on lock-in amplifier, and the 20 × beam-shrinked mirror is placed on mirror support supports bar, the acousto-optic tune Device processed is mounted on moving in rotation platform, and the moving in rotation platform is placed on lifting moving platform, and the 100 × object lens are placed on object On mirror cantilever mounting frame, object lens cantilever mounting frame is placed in three-dimensional mobile station；
The two-dimensional piezoelectric mobile station is connected by piezoelectric movement platform control line with two-dimensional piezoelectric mobile station controller, the snow Avalanche photo diode module turns BNC line by SMA and is connected with lock-in amplifier, and the computer passes through ethernet line and CCD Camera is connected, and the lock-in amplifier turns BNC data line by SMA and is connected with acoustooptic modulator driver, the calculating Machine is connected by GPIB control line with lock-in amplifier, and the computer is driven by USB data line and two-dimensional piezoelectric mobile station Dynamic device is connected, and the computer is connected by USB data line with 638nm laser, and the acoustooptic modulator driver is logical SMA control line is crossed to be connected with acousto-optic modulator.
A kind of detection method carrying out photo-thermal heterodyne micro-imaging using above-mentioned photo-thermal heterodyne micro-imaging detection system, Specific step is as follows for the method:
Step 1: its clamping is fixed in two-dimensional piezoelectric mobile station, two-dimensional piezoelectric mobile station by the determination detection sample to be measured Control detection sample level is mobile；
Step 2: computer, lock-in amplifier, two-dimensional piezoelectric mobile station controller, CCD camera, 638nm laser are first turned on Device, 532nm laser, acoustooptic modulator driver；
Step 3: controlling 638 lasers by computer and export exciting light, while opening 532nm laser, then adjust optical path, So that two beam laser carry out conjunction beam by optical path, and focus on detection sample by 100 × object lens；
Step 4: by observing the ccd image that real-time computer is shown judges whether imaging position is suitable, and it is three-dimensional by adjusting Mobile station, which changes objective focal length, makes image imaging clearly；
Step 5: computer controls lock-in amplifier and generates acousto-optic modulation signal, acousto-optic modulation signal function to acousto-optic modulator On driver, the acousto-optic modulation to 532nm laser is realized；
Step 6: avalanche photodide module collection optical signal is utilized, and photo-thermal heterodyne signal is realized by lock-in amplifier Extraction and analysis；
Step 7: it is translated by left and right of the two-dimensional piezoelectric mobile station to detection sample, realizes two lasers laterally and longitudinally Scanning repeats step 6 and seven, finally realizes the photo-thermal heterodyne micro-imaging detection to detection sample.
The beneficial effect of the present invention compared with the existing technology is:
(1) present invention realizes the micro-imaging of nano particle using thermal lensing effect and heterodyne testing mechanism, and it is glimmering to overcome tradition Light micro imaging method to non-fluorescence object can not direct imaging, and there are the bad of jitter phenomenon using fluorescent marker Gesture；
(2) present invention in such a way that heterodyne detects greatly improving the extraction and resolution capability of signal, and then improves The signal-to-noise ratio of photo-thermal micro-imaging.
Detailed description of the invention
Fig. 1 is photo-thermal heterodyne micro-imaging detection system structure of the invention；
Fig. 2 is the paths precedence diagram of present system.
Specific embodiment
Further description of the technical solution of the present invention with reference to the accompanying drawing, and however, it is not limited to this, all to this Inventive technique scheme is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be covered Within the protection scope of the present invention.
Photo-thermal heterodyne micro-imaging detection method: nanometer sample is swashed using the exciting light of a branch of light intensity high frequency modulation It encourages, heat is converted by nonradiative relaxation process after nanometer sample absorbance light.Again since thermal lensing effect makes the week of nano object Generation graded index section in medium is enclosed, since change of gradient refractive index causes medium localizing electrode rate to fluctuate, and then is produced Raw Polarization scattering field.At this moment nanometer sample is irradiated using a branch of circular polarization detection light, detects light field and Polarization scattering field phase interaction With and generate frequency displacement.Frequency displacement electric field component and reflected detection light field form heterodyne detection mechanism, by detecting beat frequency Signal and obtain photo-thermal heterodyne signal.Micro-imaging carries out the shifting of transverse direction and upper and lower position by mobile station Control experiment exemplar It is dynamic, realize that laser gradually scans, and then complete the detection of entire test sample.
The application of photo-thermal heterodyne micro-imaging technique is thermal lens caused by photo-thermal effect during nonradiative relaxation (Thermal lens) effect.Sound is applied to by the intrinsic function generator fuction output high-frequency modulation signal of lock-in amplifier Optical modulator, so that the light intensity of exciting light is by high frequency modulated.Then the exciting light of high frequency modulated is imported by high numerical value by optical path Aperture objective focuses on and causes thermal lensing effect on sample.Detection light passes through the light that polarizing beam splitter mirror cube is formed with quarter wave plate Road system is Chong Die with exciting light, also passes through object lens and is applied on sample.Detection light is reflected in medium and slide interface Heterodyne testing mechanism is constituted as local oscillator, and with the polarized electric field component of frequency displacement.Using avalanche photodide to light Signal is received, and the beat signal detected is extracted and analyzed finally by lock-in amplifier.
Specific embodiment 1: as shown in Figure 1, present embodiment record is a kind of photo-thermal heterodyne micro-imaging detection system System, the system comprises right angle rack 1, two-dimensional piezoelectric mobile station 2, support stick 4, support bar holders 5, dichroscope 6,1/4 Wave plate 7, cage mirror support supports seat 8, polarizing beam splitter mirror cube 9,600nm long pass filter piece 10, spectroscope 11, two pole of avalanche optoelectronic Tube module 12, CCD camera 13, piezoelectric movement platform control line 14, SMA turn BNC line 15, ethernet line 16, lock-in amplifier SR844 17, two-dimensional piezoelectric mobile station controller 18, SMA turn BNC line 19, GPIB data line 20, USB control line 21, computer 22, office Table 23, USB data line 24,638nm laser 25,532nm laser 26, acoustooptic modulator driver 27, SMA control line 28, Mirror support supports bar 29,20 × beam-shrinked mirror 30, moving in rotation platform 31, acousto-optic modulator 32, lifting moving platform 33, reflecting mirror 1, Optical platform 35, cage mirror holder connecting rod 36, reflecting mirror 2 37, three-dimensional mobile station 38, object lens cantilever mounting frame 39,100 × object Mirror 40, camera bellows 41；
The right angle rack 1, support stick 4, dichroscope 6, quarter wave plate 7, cage mirror support supports seat 8, polarizing beam splitter mirror cube 9, 600nm long pass filter piece 10, spectroscope 11, avalanche photodide module 12, CCD camera 13,638nm laser 25,532nm Laser 26, acoustooptic modulator driver 27, mirror support supports bar 29, lifting moving platform 33, reflecting mirror 1, reflecting mirror 2 37 are equal It is placed on optical platform 35, the computer 22 and lock-in amplifier 17 are placed on desk 23, and camera bellows 41 is by surrounding The pentahedron of side and top surface composition, camera bellows 41 cover on optical platform 35, described three-dimensional mobile for covering external interference light Platform 38 is mounted on right angle rack 1, and the support bar holder 5 is clamped on support stick 4, the two-dimensional piezoelectric mobile station 2 It is mounted on support bar holder 5, clamping is fixed with detection sample 3, the two-dimensional piezoelectric mobile station in two-dimensional piezoelectric mobile station 2 Controller 18 is placed on lock-in amplifier 17, and the 20 × beam-shrinked mirror 30 is placed on mirror support supports bar 29, the acousto-optic tune Device 32 processed is placed on moving in rotation platform 31, and the moving in rotation platform 31 is mounted on lifting moving platform 33, the 100 × object lens 40 are placed on object lens cantilever mounting frame 39, and object lens cantilever mounting frame 39 is placed in three-dimensional mobile station 38；
The two-dimensional piezoelectric mobile station 2 is connected by piezoelectric movement platform control line 14 with two-dimensional piezoelectric mobile station controller 18, The avalanche photodide module 12 turns BNC line 15 by SMA and is connected with lock-in amplifier 17, and the computer 22 passes through Ethernet line 16 is connected with CCD camera 13, and the lock-in amplifier 17 turns BNC data line 19 and acousto-optic modulator by SMA Driver 27 is connected, and the computer 22 is connected by GPIB control line 20 with lock-in amplifier 17, the computer 22 Be connected by USB data line 21 with two-dimensional piezoelectric mobile station driver 18, the computer 22 by USB data line 24 with 638nm laser 25 is connected, and the acoustooptic modulator driver 27 is connected by SMA control line 28 with acousto-optic modulator 32 It connects.
Specific embodiment 2: as shown in Figure 1 and Figure 2, a kind of photo-thermal heterodyne micro-imaging using specific embodiment one Detection system carries out the detection method of photo-thermal heterodyne micro-imaging, and specific step is as follows for the method:
Step 1: its clamping is fixed in two-dimensional piezoelectric mobile station 2 by the determination detection sample 3 to be measured, and two-dimensional piezoelectric is mobile The control detection sample 3 of platform 2 moves horizontally；
Step 2: first turn on computer 22, lock-in amplifier 17, two-dimensional piezoelectric mobile station controller 18, CCD camera 13, 638nm laser 25,532nm laser 26, acoustooptic modulator driver 27；
Step 3: 638 lasers 25 are controlled by computer 22 and export exciting light, while opening 532nm laser 26, then adjust Optical path, so that two beam laser carry out conjunction beam by optical path, and focus on detection sample 3 by 100 × object lens 40；
Step 4: judge whether imaging position is suitable by the ccd image that observation real-time computer 22 is shown, and by adjusting three Dimension mobile station 38, which changes 40 focal length of object lens, makes image imaging clearly；
Step 5: computer 22 controls lock-in amplifier 17 and generates acousto-optic modulation signal, acousto-optic modulation signal function to acousto-optic tune On device driver 27 processed, the acousto-optic modulation to 532nm laser is realized；Acousto-optic modulation frequency and the thermal diffusion of sample in the medium are long It spends related, needs to select suitable acousto-optic modulation frequency, so that thermal diffusion length is less than the spot diameter after laser focuses；
Step 6: optical signal is collected using avalanche photodide module 12, and photo-thermal heterodyne is realized by lock-in amplifier 17 Signal extraction analysis；
Step 7: the left and right for detecting sample 3 by 2 pairs of two-dimensional piezoelectric mobile station translates, and realizes the transverse direction of two lasers and indulges To scanning, horizontal and vertical movement distance repeats step 6 and seven, finally realizes to detection depending on sample preparation parameter The photo-thermal heterodyne micro-imaging of sample 3 detects.Peak laser power influences imaging signal size, generally by the fusing temperature of sample Angle value determines.
Specific embodiment 3: as shown in Fig. 2, the detection side of photo-thermal heterodyne micro-imaging described in specific embodiment two Method, the paths sequence in the method are as follows: the exciting light that 532nm laser 26 issues is by 20 × beam-shrinked mirror 30 by light beam Diameter reduces, and into acousto-optic modulator 32, is acted on by acousto-optic modulation, the light of output becomes the modulation light of light intensity high frequency modulation； It using dichroscope 6 and detection combiner, is focused, is applied on detection sample 3 by 100 × object lens 40；638nm laser 25 The detection light of sending first passes around 9 polarization light output of polarizing beam splitter mirror cube, then the circle of detection light is realized by quarter wave plate 7 Polarization, closes beam at dichroscope 6 with exciting light and works together to sample surfaces；The signal detected is gone out by backscattering Scattered field and reflected detection light form；Make the signal detected vertical with original polarization direction by quarter wave plate 7, Using polarizing beam splitter mirror cube 9, light beam deflects 90 °, using 600nm long pass filter piece 10, spectroscope 11 is reached, by dividing Light microscopic 11, transmitted light reach avalanche photodide 12, and refraction light reaches CCD camera 13.
Specific embodiment 4: the detection method of photo-thermal heterodyne micro-imaging described in specific embodiment two, described Detect metal nanoparticle, metal nano-rod, carbon nanotube or the semiconductor-quantum-point that sample 3 is 1 ~ 100nm of partial size.

Claims (4)

1.一种光热外差显微成像检测系统，其特征在于：所述系统包括直角支架（1）、二维压电移动台（2）、支撑棒（4）、支撑棒夹持器（5）、二向色镜（6）、1/4波片（7）、笼式镜架支撑座（8）、偏振分束镜立方（9）、600nm长通滤波片（10）、分光镜（11）、雪崩光电二极管模块（12）、CCD相机（13）、压电移动台控制线（14）、SMA转BNC线（15）、以太网线（16）、锁相放大器（17）、二维压电移动台控制器（18）、SMA转BNC线（19）、GPIB数据线（20）、USB控制线（21）、计算机（22）、办公桌（23）、USB数据线（24）、638nm激光器（25）、532nm激光器（26）、声光调制器驱动器（27）、SMA控制线（28）、镜架支撑杆（29）、20×缩束镜（30）、旋转移动台（31）、声光调制器（32）、升降移动台（33）、反射镜一（34）、光学平台（35）、笼式镜架连接杆（36）、反射镜二（37）、三维移动台（38）、物镜悬臂安装架（39）、100×物镜（40）、暗箱（41）；1. A photothermal heterodyne microscopic imaging detection system, characterized in that: the system comprises a right-angle bracket (1), a two-dimensional piezoelectric moving stage (2), a support rod (4), a support rod holder ( 5), dichroic mirror (6), 1/4 wave plate (7), cage frame support (8), polarizing beam splitter cube (9), 600nm long pass filter (10), beam splitter (11), avalanche photodiode module (12), CCD camera (13), piezoelectric mobile station control cable (14), SMA to BNC cable (15), Ethernet cable (16), lock-in amplifier (17), two Dimension piezoelectric mobile station controller (18), SMA to BNC cable (19), GPIB data cable (20), USB control cable (21), computer (22), desk (23), USB data cable (24) , 638nm laser (25), 532nm laser (26), acousto-optic modulator driver (27), SMA control line (28), frame support rod (29), 20× beam reducer (30), rotating mobile stage ( 31), acousto-optic modulator (32), lifting mobile platform (33), mirror one (34), optical platform (35), cage-type mirror frame connecting rod (36), mirror two (37), three-dimensional movement stage (38), objective lens cantilever mount (39), 100× objective lens (40), camera obscura (41); 所述直角支架（1）、支撑棒（4）、二向色镜（6）、1/4波片（7）、笼式镜架支撑座（8）、偏振分束镜立方（9）、600nm长通滤波片（10）、分光镜（11）、雪崩光电二极管模块（12）、CCD相机（13）、638nm激光器（25）、532nm激光器（26）、声光调制器驱动器（27）、镜架支撑杆（29）、升降移动台（33）、反射镜一（34）、反射镜二（37）均放置在光学平台（35）上，所述计算机（22）和锁相放大器（17）放置在办公桌（23）上，暗箱（41）为由四周侧面和顶面组成的五面体，暗箱（41）罩在光学平台（35）上，所述三维移动台（38）安装在直角支架（1）上，所述支撑棒夹持器（5）夹持在支撑棒（4）上，所述的二维压电移动台（2）安装在支撑棒夹持器（5）上，二维压电移动台（2）上装夹固定有检测样本（3），所述二维压电移动台控制器（18）放置在锁相放大器（17）上，所述20×缩束镜（30）放置在镜架支撑杆（29）上，所述声光调制器（32）放置在旋转移动台（31）上，所述旋转移动台（31）安装在升降移动台（33）上，所述100×物镜（40）放置在物镜悬臂安装架（39）上，物镜悬臂安装架（39）放置在三维移动台（38）上；the right-angle bracket (1), the support rod (4), the dichroic mirror (6), the quarter-wave plate (7), the cage-type mirror frame support seat (8), the polarizing beam splitter cube (9), 600nm long pass filter (10), beam splitter (11), avalanche photodiode module (12), CCD camera (13), 638nm laser (25), 532nm laser (26), acousto-optic modulator driver (27), The mirror frame support rod (29), the lifting mobile platform (33), the first mirror (34), and the second mirror (37) are all placed on the optical platform (35). The computer (22) and the lock-in amplifier (17) ) is placed on the desk (23), the camera obscura (41) is a pentahedron composed of four sides and a top surface, the camera obscura (41) is covered on the optical table (35), and the three-dimensional mobile table (38) is installed at a right angle On the bracket (1), the support rod holder (5) is clamped on the support rod (4), and the two-dimensional piezoelectric moving stage (2) is installed on the support rod holder (5), The two-dimensional piezoelectric moving stage (2) is clamped and fixed with the detection sample (3), the two-dimensional piezoelectric moving stage controller (18) is placed on the lock-in amplifier (17), and the 20× beam-reducing mirror ( 30) is placed on the mirror frame support rod (29), the acousto-optic modulator (32) is placed on the rotating mobile platform (31), and the rotating mobile platform (31) is installed on the lifting mobile platform (33), The 100× objective lens (40) is placed on the objective lens cantilever mount (39), and the objective lens cantilever mount (39) is placed on the three-dimensional moving stage (38); 所述二维压电移动台（2）通过压电移动台控制线（14）与二维压电移动台控制器（18）相连接，所述雪崩光电二极管模块（12）通过SMA转BNC线（15）与锁相放大器（17）相连接，所述计算机（22）通过以太网线（16）与CCD相机（13）相连接，所述锁相放大器（17）通过SMA转BNC数据线（19）与声光调制器驱动器（27）相连接，所述计算机（22）通过GPIB控制线（20）与锁相放大器（17）相连接，所述计算机（22）通过USB数据线（21）与二维压电移动台驱动器（18）相连接，所述计算机（22）通过USB数据线（24）与638nm激光器（25）相连接，所述声光调制器驱动器（27）通过SMA控制线（28）与声光调制器（32）相连接。The two-dimensional piezoelectric moving stage (2) is connected with the two-dimensional piezoelectric moving stage controller (18) through the piezoelectric moving stage control line (14), and the avalanche photodiode module (12) is connected with the SMA to BNC line (15) is connected with the lock-in amplifier (17), the computer (22) is connected with the CCD camera (13) through the Ethernet cable (16), and the lock-in amplifier (17) is connected with the SMA to BNC data cable (19) ) is connected to the acousto-optic modulator driver (27), the computer (22) is connected to the lock-in amplifier (17) through the GPIB control line (20), and the computer (22) is connected to the lock-in amplifier (17) through the USB data line (21). The two-dimensional piezoelectric mobile stage driver (18) is connected, the computer (22) is connected with the 638nm laser (25) through a USB data cable (24), and the acousto-optic modulator driver (27) is connected through an SMA control cable ( 28) is connected with the acousto-optic modulator (32). 2.一种利用权利要求1的光热外差显微成像检测系统进行光热外差显微成像的检测方法，其特征在于：所述方法具体步骤如下：2. a detection method utilizing the photothermal heterodyne microscopic imaging detection system of claim 1 to carry out photothermal heterodyne microscopic imaging, it is characterized in that: the concrete steps of described method are as follows: 步骤一：确定要测量的检测样本（3），将其装夹固定在二维压电移动台（2）上，二维压电移动台（2）控制检测样本（3）水平移动；Step 1: Determine the test sample (3) to be measured, clamp and fix it on the two-dimensional piezoelectric moving stage (2), and the two-dimensional piezoelectric moving stage (2) controls the horizontal movement of the test sample (3); 步骤二：首先开启计算机（22）、锁相放大器（17）、二维压电移动台控制器（18）、CCD相机（13）、638nm激光器（25）、532nm激光器（26）、声光调制器驱动器（27）；Step 2: First turn on the computer (22), the lock-in amplifier (17), the two-dimensional piezoelectric mobile stage controller (18), the CCD camera (13), the 638nm laser (25), the 532nm laser (26), the acousto-optic modulation DriveDriver(27); 步骤三：通过计算机（22）控制638激光器（25）输出激发光，同时开启532nm激光器（26），再调整光路，使得两束激光通过光路进行合束，并经过100×物镜（40）聚焦到检测样本（3）上；Step 3: Control the 638 laser (25) to output excitation light through the computer (22), turn on the 532nm laser (26) at the same time, and then adjust the optical path so that the two laser beams are combined through the optical path, and are focused on the laser beam through the 100× objective lens (40). On the test sample (3); 步骤四：通过观察实时计算机（22）显示的CCD图像判断成像位置是否合适，并通过调节三维移动台（38）改变物镜（40）焦距使图像成像清晰；Step 4: Judging whether the imaging position is appropriate by observing the CCD image displayed by the real-time computer (22), and changing the focal length of the objective lens (40) by adjusting the three-dimensional moving stage (38) to make the image imaging clear; 步骤五：计算机（22）控制锁相放大器（17）产生声光调制信号，声光调制信号作用到声光调制器驱动器（27）上，实现对532nm激光的声光调制；Step 5: the computer (22) controls the lock-in amplifier (17) to generate an acousto-optic modulation signal, and the acousto-optic modulation signal acts on the acousto-optic modulator driver (27) to realize the acousto-optic modulation of the 532 nm laser; 步骤六：利用雪崩光电二极管模块（12）收集光信号，并通过锁相放大器（17）实现光热外差信号提取分析；Step 6: collect the optical signal by using the avalanche photodiode module (12), and realize the extraction and analysis of the photothermal heterodyne signal through the lock-in amplifier (17); 步骤七：通过二维压电移动台（2）对检测样本（3）的左右平移，实现两个激光器的横向与纵向扫描，重复步骤六和七，最终实现了对检测样本（3）的光热外差显微成像检测。Step 7: The horizontal and vertical scanning of the two lasers is realized by the left and right translation of the two-dimensional piezoelectric moving stage (2) on the detection sample (3). Thermal Heterodyne Microscopic Imaging Detection. 3.根据权利要求2所述的光热外差显微成像的检测方法，其特征在于：所述方法中的光路传播顺序为：532nm激光器（26）发出的激发光经过20×缩束镜（30）将光束直径缩小，进入声光调制器（32），通过声光调制作用，输出的光变成光强高频调制的调制光；再经过二向色镜（6）与探测光合束，由100×物镜（40）聚焦，作用到检测样本（3）上；638nm激光器（25）发出的探测光首先经过偏振分束镜立方（9）输出线偏振光，再通过1/4波片（7）实现探测光的圆偏振，与激发光在二向色镜（6）处合束共同作用到样品表面；探测到的信号是由背向散射出的散射场与反射回来的探测光组成；经过1/4波片（7）使得探测到的信号与原始偏振方向垂直，再经过偏振分束镜立方（9），光束偏转90°，再经过600nm长通滤波片（10），到达分光镜（11），通过分光镜（11），透射光到达雪崩光电二极管（12），折射光到达CCD相机（13）。3. The detection method for photothermal heterodyne microscopic imaging according to claim 2, characterized in that: the optical path propagation sequence in the method is: the excitation light emitted by the 532nm laser (26) passes through a 20× beam reducing mirror ( 30) Reduce the diameter of the beam and enter the acousto-optic modulator (32), through the acousto-optic modulation, the output light becomes modulated light with high-frequency modulation of light intensity; It is focused by the 100× objective lens (40) and acts on the detection sample (3); the detection light emitted by the 638nm laser (25) first passes through the polarization beam splitter cube (9) to output linearly polarized light, and then passes through the 1/4 wave plate ( 7) Realize the circular polarization of the probe light, which is combined with the excitation light at the dichroic mirror (6) to act on the surface of the sample; the detected signal is composed of the backscattered scattered field and the reflected probe light; The detected signal passes through the 1/4 wave plate (7) to make the detected signal perpendicular to the original polarization direction, then passes through the polarization beam splitter cube (9), the beam is deflected by 90°, and then passes through the 600nm long-pass filter (10) to reach the beam splitter (11), through the beam splitter (11), the transmitted light reaches the avalanche photodiode (12), and the refracted light reaches the CCD camera (13). 4.根据权利要求2所述的光热外差显微成像的检测方法，其特征在于：所述的检测样本（3）为粒径1~100nm的金属纳米颗粒、金属纳米棒、碳纳米管或半导体量子点。4 . The detection method for photothermal heterodyne microscopic imaging according to claim 2 , wherein the detection sample ( 3 ) is metal nanoparticles, metal nanorods, and carbon nanotubes with a particle size of 1 to 100 nm. 5 . or semiconductor quantum dots.
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