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CN109211847B - A method for analyzing the chemical composition of a single suspended particle using an analytical device - Google Patents

A method for analyzing the chemical composition of a single suspended particle using an analytical device Download PDF

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CN109211847B
CN109211847B CN201811156273.XA CN201811156273A CN109211847B CN 109211847 B CN109211847 B CN 109211847B CN 201811156273 A CN201811156273 A CN 201811156273A CN 109211847 B CN109211847 B CN 109211847B
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hollow
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CN109211847A (en
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程雪梅
贺博
牛晨
陈浩伟
白晋涛
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Northwestern University
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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Abstract

The invention discloses a device for analyzing chemical components of single suspended particles, which comprises a pulse laser, a hollow beam particle capturing system, an atomic emission spectrum acquisition system, a Raman spectrum acquisition system and an imaging system, wherein the hollow beam particle capturing system is used for capturing particles; the hollow beam particle capturing system comprises a continuous laser, a hollow beam generating device, a beam expanding and collimating device, a high-reflection mirror, a first convergent lens and a sample cell, wherein sample particles are arranged in the sample cell; the atomic emission spectrum acquisition system comprises a first coupling lens and a laser-induced breakdown spectrometer; the Raman spectrum acquisition system comprises a second coupling lens and a Raman spectrometer. In addition, the invention also provides a method for analyzing the chemical composition of the single suspended particles by using the device. The invention captures sample particles by using hollow beams, ionizes the sample particles by using a pulse laser, and acquires atomic emission spectrum information and Raman spectrum information of the sample particles to realize in-situ analysis of element composition and material composition of single suspended particles.

Description

一种采用分析装置进行单个悬浮颗粒化学成分分析的方法A method for analyzing the chemical composition of a single suspended particle using an analytical device

技术领域technical field

本发明属于非线性光学应用领域,具体涉及一种采用分析装置进行单个悬浮颗粒化学成分分析的方法。The invention belongs to the application field of nonlinear optics, and in particular relates to a method for analyzing the chemical composition of a single suspended particle by using an analysis device.

背景技术Background technique

目前针对空气中颗粒物的检测方法有:红外吸收光谱法、紫外吸收光谱法、紫外荧光法、化学发光法、浊度法和散射法等,然而这些方法无法对空气中细微颗粒物(气溶胶、炭黑、痕量重金属等)的成分和结构进行检测。激光诱导击穿光谱技术作为一种新兴的原位测量技术,既可以分析固态样品,也可以对液态和气态样品进行分析,具有快速、实时、可遥测、无需预处理且可实现多元素的同时分析,目前已经成功用于材料、冶金、燃烧、环境、考古、太空探测、医学和军事等诸多领域。At present, the detection methods for particulate matter in the air include: infrared absorption spectroscopy, ultraviolet absorption spectroscopy, ultraviolet fluorescence method, chemiluminescence method, turbidity method and scattering method, etc. However, these methods cannot detect fine particles in the air (aerosol, carbon The composition and structure of black, trace heavy metals, etc.) were detected. As an emerging in-situ measurement technology, laser-induced breakdown spectroscopy can analyze solid samples as well as liquid and gas samples. Analysis has been successfully used in many fields such as materials, metallurgy, combustion, environment, archaeology, space exploration, medicine and military.

激光诱导击穿光谱仪(Laser-Induced Breakdown Spectroscopy,简称LIBS)利用脉冲激光产生的等离子体烧蚀并激发样品中的物质,并通过光谱仪获取被等离子体激发的原子所发射的光谱,以此来识别样品中的元素组成成分,进而可以对材料进行识别、分类、定性以及定量分析。激光诱导击穿拉曼光谱(Laser-induced breakdown Ramanspectroscopy,LIBRAS)技术是通过LIBS与拉曼光谱在相同位点同时获取物质的原子光谱和分子光谱的原位测量光谱技术,通过将二者的数据解析处理,可同时完成原子光谱和分子光谱的微区原位测定,从而对样品的元素和分子组成进行快速定量分析和鉴别。但是,就目前已知的报道,LIBS仅限于对附着在一些固体上的样品微粒进行在线原位检测,对于流体如空气或者液体中悬浮的微粒的检测仍然无法进行,而且由于LIBS系统可以击穿物体,样品微粒所附着的固体不可避免的会使光谱仪产生噪声,从而影响微粒成分的准确分析。Laser-Induced Breakdown Spectroscopy (LIBS) uses the plasma generated by a pulsed laser to ablate and excite the substances in the sample, and obtain the spectrum emitted by the atoms excited by the plasma through the spectrometer to identify The elemental composition of a sample, which in turn enables the identification, classification, qualitative and quantitative analysis of materials. Laser-induced breakdown Raman spectroscopy (LIBRAS) technology is an in-situ measurement spectroscopy technology that simultaneously acquires atomic and molecular spectra of substances at the same site through LIBS and Raman spectroscopy. Analytical processing can simultaneously complete the micro-area in-situ determination of atomic and molecular spectra, so as to quickly quantitatively analyze and identify the elemental and molecular composition of the sample. However, as far as the known reports are concerned, LIBS is only limited to online in-situ detection of sample particles attached to some solids, and the detection of particles suspended in fluids such as air or liquids is still unable to be carried out, and because the LIBS system can break down Objects and solids to which sample particles are attached will inevitably cause noise in the spectrometer, thereby affecting the accurate analysis of particle components.

在光学领域中,空心光束是指横向振幅分布满足高阶贝塞尔函数的光束,其横向光强分布表现为一个中心为暗的一系列同心圆环。依据光泳力原理,空心光束可将吸光性微粒捕获在其暗的区域,利用空心光束捕获空气中的吸光性微粒是目前已知最稳定的装置,同时可以通过调节空心光束的尺寸或者功率实现微粒的三维操作。空心光束独特的光强分布使其在粒子操控和非线性光学等领域具有重要的应用价值。In the field of optics, a hollow beam refers to a beam whose lateral amplitude distribution satisfies a higher-order Bessel function, and its lateral light intensity distribution appears as a series of concentric rings with a dark center. According to the principle of photophoresis, the hollow beam can capture the light-absorbing particles in its dark area. Using the hollow beam to capture the light-absorbing particles in the air is the most stable device known so far. At the same time, the particles can be realized by adjusting the size or power of the hollow beam. 3D operations. The unique light intensity distribution of the hollow beam makes it have important application value in the fields of particle manipulation and nonlinear optics.

目前,能够实现空气中微粒组成成分的实时原位分析方法尚未见报道,其主要原因有二:目前已知的检测方法无法对流体(如空气等)中颗粒物的化学成分进行分析;基于光泳力的激光捕获技术尚未和光谱分析系统有机结合。At present, there is no report on the real-time in-situ analysis method for the composition of particles in the air. There are two main reasons: the currently known detection methods cannot analyze the chemical composition of particles in fluids (such as air, etc.); The laser capture technology has not been organically combined with the spectral analysis system.

发明内容SUMMARY OF THE INVENTION

本发明所要解决的技术问题在于针对上述现有技术中的不足,提供一种采用分析装置进行单个悬浮颗粒化学成分分析的方法,该方法通过设置空心光束产生装置将连续激光器产生的高斯光束转变为空心光束,对样品池内的样品微粒进行捕获,同时通过设置脉冲激光器,对所捕获的样品微粒进行电离,实现对空气中悬浮的单个细微颗粒物的元素组成和物质成分的原位分析。The technical problem to be solved by the present invention is to provide a method for analyzing the chemical composition of a single suspended particle by using an analysis device. The method converts the Gaussian beam generated by a continuous laser into a The hollow beam captures the sample particles in the sample cell, and at the same time, by setting a pulsed laser, the captured sample particles are ionized to achieve in-situ analysis of the elemental composition and material composition of single fine particles suspended in the air.

为解决上述技术问题,本发明采用的技术方案是:一种用于单个悬浮颗粒的化学成分分析的装置,包括脉冲激光器,其特征在于:还包括空心光束捕获粒子系统、原子发射光谱采集系统、拉曼光谱采集系统和成像系统;In order to solve the above-mentioned technical problems, the technical scheme adopted in the present invention is: a device for chemical composition analysis of a single suspended particle, including a pulsed laser, and characterized in that it also includes a hollow beam capturing particle system, an atomic emission spectrum acquisition system, Raman spectrum acquisition system and imaging system;

所述空心光束捕获粒子系统包括连续激光器、空心光束产生装置、扩束准直装置、可改变空心光束方向的高反射镜、第一会聚透镜和样品池;所述连续激光器、空心光束产生装置、扩束准直装置、高反射镜和第一会聚透镜依次设置于同一光路上,所述样品池内设置有样品微粒;The hollow beam capturing particle system includes a continuous laser, a hollow beam generating device, a beam expanding and collimating device, a high reflection mirror capable of changing the direction of the hollow beam, a first condensing lens and a sample cell; the continuous laser, the hollow beam generating device, The beam expanding and collimating device, the high reflection mirror and the first condensing lens are sequentially arranged on the same optical path, and sample particles are arranged in the sample pool;

所述原子发射光谱采集系统包括第一耦合透镜以及与第一耦合透镜连接的激光诱导击穿光谱仪,所述第一耦合透镜与激光诱导击穿光谱仪之间设置有用于连接第一耦合透镜和激光诱导击穿光谱仪的第一光纤;The atomic emission spectrum acquisition system includes a first coupling lens and a laser induced breakdown spectrometer connected to the first coupling lens, and a connection between the first coupling lens and the laser induced breakdown spectrometer is provided for connecting the first coupling lens and the laser The first fiber of the induced breakdown spectrometer;

所述拉曼光谱采集系统包括第二耦合透镜以及与第二耦合透镜连接的拉曼光谱仪,所述第二耦合透镜与拉曼光谱仪之间设置有用于连接第二耦合透镜和拉曼光谱仪的第二光纤;The Raman spectrum acquisition system includes a second coupling lens and a Raman spectrometer connected to the second coupling lens, and a third coupling lens for connecting the second coupling lens and the Raman spectrometer is arranged between the second coupling lens and the Raman spectrometer. two optical fibers;

所述脉冲激光器产生的脉冲光垂直于高反射镜反射的空心光束;The pulsed light generated by the pulsed laser is perpendicular to the hollow beam reflected by the high reflection mirror;

所述成像系统包括成像装置和显微物镜,所述显微物镜设置在所述成像装置和所述样品池之间。The imaging system includes an imaging device and a microscope objective lens disposed between the imaging device and the sample cell.

上述的一种用于单个悬浮颗粒的化学成分分析的装置,其特征在于:所述连续激光器为532nm半导体连续激光器或全固态可调谐钛宝石染料连续激光器。The above-mentioned device for chemical composition analysis of a single suspended particle is characterized in that: the continuous laser is a 532 nm semiconductor continuous laser or an all-solid-state tunable Ti:sapphire dye continuous laser.

上述的一种用于单个悬浮颗粒的化学成分分析的装置,其特征在于:所述空心光束产生装置包括可以产生空心光束的自相位空间光束调制系统、交叉相位空间光束调制系统、双锥透镜、空间光调制器或相位板。The above-mentioned device for chemical composition analysis of a single suspended particle is characterized in that: the hollow beam generating device comprises a self-phase spatial beam modulation system, a cross-phase spatial beam modulation system, a biconical lens, Spatial light modulator or phase plate.

上述的一种用于单个悬浮颗粒的化学成分分析的装置,其特征在于:所述自相位空间光束调制系统包括依次设置在同一光路上的第一凸透镜和非线性吸收介质。The above-mentioned device for chemical composition analysis of a single suspended particle is characterized in that: the self-phase spatial beam modulation system includes a first convex lens and a nonlinear absorption medium sequentially arranged on the same optical path.

上述的一种用于单个悬浮颗粒的化学成分分析的装置,其特征在于:所述扩束准直装置包括位于同一光路上的第二会聚透镜和第三会聚透镜,所述第二会聚透镜位于所述空心光束产生装置和第三会聚透镜之间。The above-mentioned device for chemical composition analysis of a single suspended particle is characterized in that: the beam expanding and collimating device comprises a second condensing lens and a third condensing lens located on the same optical path, and the second condensing lens is located on the same optical path. between the hollow beam generating device and the third condensing lens.

上述的一种用于单个悬浮颗粒的化学成分分析的装置,其特征在于:所述成像装置包括CCD相机、ICCD相机或CMOS相机。The above-mentioned device for chemical composition analysis of a single suspended particle is characterized in that: the imaging device includes a CCD camera, an ICCD camera or a CMOS camera.

上述的一种用于单个悬浮颗粒的化学成分分析的装置,其特征在于:所述第一会聚透镜位于所述高反射镜和所述样品池之间。The above-mentioned device for chemical composition analysis of a single suspended particle is characterized in that: the first condensing lens is located between the high reflection mirror and the sample cell.

上述的一种用于单个悬浮颗粒的化学成分分析的装置,其特征在于:所述成像装置、激光诱导击穿光谱仪与所述拉曼光谱仪分别位于样品池不同的侧部。The above-mentioned device for chemical composition analysis of a single suspended particle is characterized in that: the imaging device, the laser-induced breakdown spectrometer and the Raman spectrometer are respectively located on different sides of the sample cell.

此外,本发明还提供一种采用上述装置进行单个悬浮颗粒的化学成分分析的方法,其特征在于,包括以下步骤:In addition, the present invention also provides a method for analyzing the chemical composition of a single suspended particle using the above-mentioned device, which is characterized in that it includes the following steps:

步骤一、从连续激光器获取一束高斯分布的连续激光束,将所获得的连续激光束通过空心光束产生装置整形成一束空心光束;Step 1: Obtain a continuous laser beam with a Gaussian distribution from the continuous laser, and shape the obtained continuous laser beam into a hollow beam through a hollow beam generating device;

步骤二、将步骤一所得到的空心光束通过扩束准直装置后入射到高反射镜,调整高反射镜,使反射的空心光束入射到第一会聚透镜形成会聚的空心光束,会聚的空心光束入射到样品池中;Step 2: The hollow beam obtained in step 1 is incident on the high reflection mirror after passing through the beam expanding and collimating device, and the high reflection mirror is adjusted so that the reflected hollow beam is incident on the first condensing lens to form a condensing hollow beam. Incident into the sample cell;

步骤三、从脉冲激光器获得一束会聚的脉冲光并使所述脉冲光的会聚中心与成像装置的成像中心重合,关闭脉冲激光器;Step 3, obtaining a convergent pulsed light from the pulsed laser and making the convergence center of the pulsed light coincide with the imaging center of the imaging device, and turning off the pulsed laser;

步骤四、向样品池中喷入样品微粒,入射到样品池的会聚的空心光束捕获样品微粒在光阱位置,调节空心光束的光强和尺寸使光阱位置与成像装置的成像中心重合;Step 4: injecting sample particles into the sample cell, the converging hollow beam incident on the sample cell captures the sample particles at the position of the optical trap, and adjusting the light intensity and size of the hollow beam to make the position of the optical trap coincide with the imaging center of the imaging device;

步骤五、第二耦合透镜采集样品微粒产生的散射光,拉曼光谱仪显示拉曼光谱信息;Step 5. The second coupling lens collects the scattered light generated by the sample particles, and the Raman spectrometer displays the Raman spectrum information;

步骤六、打开脉冲激光器使会聚的脉冲光将捕获的样品微粒电离,关闭脉冲激光器;Step 6: Turn on the pulsed laser so that the converging pulsed light will ionize the captured sample particles, and turn off the pulsed laser;

步骤七、第一耦合透镜采集样品微粒电离产生的原子发射光谱,激光诱导击穿光谱仪显示原子发射光谱的信息。Step 7: The first coupling lens collects the atomic emission spectrum generated by the ionization of the sample particles, and the laser-induced breakdown spectrometer displays the information of the atomic emission spectrum.

本发明与现有技术相比具有以下优点:Compared with the prior art, the present invention has the following advantages:

1、本发明通过设置空心光束产生装置将连续激光器产生的高斯光束转变为空心光束,对样品池内的样品微粒进行捕获,同时通过设置脉冲激光器,对所捕获的样品微粒进行电离,实现对空气中悬浮的单个细微颗粒物的元素组成和物质成分的在线原位分析。1. The present invention converts the Gaussian beam generated by the continuous laser into a hollow beam by setting a hollow beam generating device to capture the sample particles in the sample cell, and at the same time, by setting a pulsed laser, the captured sample particles are ionized to realize the ionization of the particles in the air. On-line in situ analysis of elemental composition and material composition of suspended single fine particles.

2、本发明通过设置光谱采集系统和成像装置,可获得电离样品的原子发射光谱信息、拉曼光谱信息以及样品运动情况,实现定量测定的目的,为实时在线研究大气污染颗粒物提供一种新的思路。2. The present invention can obtain atomic emission spectrum information, Raman spectrum information and sample motion of ionized samples by setting up a spectrum acquisition system and an imaging device, so as to achieve the purpose of quantitative determination, and provide a new method for real-time online research of air pollution particles. ideas.

3、本发明的分析装置结构简单,设计合理,成本低易于推广。3. The analysis device of the present invention is simple in structure, reasonable in design, low in cost and easy to popularize.

4、本发明的分析方法易于操作,可捕获位置不断变化的悬浮颗粒,并对悬浮颗粒进行光谱解析,实现单个悬浮物的在线检测。4. The analysis method of the present invention is easy to operate, can capture suspended particles whose positions are constantly changing, and perform spectral analysis on the suspended particles, so as to realize the online detection of a single suspended solid.

下面结合附图和实施例,对本发明的技术方案做进一步的详细描述。The technical solutions of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.

附图说明Description of drawings

图1为本发明的用于单个悬浮颗粒的化学成分分析的装置的结构示意图。FIG. 1 is a schematic structural diagram of an apparatus for chemical composition analysis of a single suspended particle of the present invention.

图2为本发明的用于单个悬浮颗粒的化学成分分析的装置的脉冲激光器、空心光束捕获粒子系统、原子发射光谱采集系统和成像系统的结构示意图。2 is a schematic structural diagram of a pulsed laser, a hollow beam trapping particle system, an atomic emission spectrum acquisition system and an imaging system of the device for chemical composition analysis of a single suspended particle of the present invention.

图3为本发明的空心光束产生装置的结构示意图。FIG. 3 is a schematic structural diagram of the hollow beam generating device of the present invention.

图4为本发明所测得的单颗粒氧化铝的拉曼光谱图。FIG. 4 is a Raman spectrum diagram of single particle alumina measured by the present invention.

图5为氧化铝标准拉曼光谱图。Figure 5 is a standard Raman spectrum of alumina.

图6为本发明所测得的单颗粒氧化铝的激光诱导击穿光谱图。Fig. 6 is the laser-induced breakdown spectrogram of the single particle alumina measured by the present invention.

图7为铝元素标准激光诱导击穿光谱图。FIG. 7 is a standard laser-induced breakdown spectrum of aluminum element.

附图标记说明:Explanation of reference numbers:

1—连续激光器; 2—空心光束产生装置; 2-1—第一凸透镜;1—continuous laser; 2—hollow beam generating device; 2-1—first convex lens;

2-2—非线性吸收介质; 3—第二会聚透镜; 4—第三会聚透镜;2-2—non-linear absorption medium; 3—second condensing lens; 4—third condensing lens;

5—高反射镜; 6—第一会聚透镜; 7—样品池;5—High reflection mirror; 6—First converging lens; 7—Sample cell;

8—样品微粒; 9—脉冲激光器; 10—显微物镜;8—sample particle; 9—pulse laser; 10—microscope objective lens;

11—成像装置; 12—第一耦合透镜; 13—第一光纤;11—imaging device; 12—first coupling lens; 13—first optical fiber;

14—激光诱导击穿光谱仪; 15—第二耦合透镜; 16—第二光纤;14—laser induced breakdown spectrometer; 15—second coupling lens; 16—second optical fiber;

17—拉曼光谱仪。17—Raman spectrometer.

具体实施方式Detailed ways

实施例1Example 1

如图1和图2所示,本实施例的用于单个悬浮颗粒的化学成分分析的装置,包括脉冲激光器9,还包括空心光束捕获粒子系统、原子发射光谱采集系统、拉曼光谱采集系统和成像系统;As shown in FIG. 1 and FIG. 2 , the device for chemical composition analysis of a single suspended particle in this embodiment includes a pulsed laser 9 , a hollow beam trapping particle system, an atomic emission spectrum acquisition system, a Raman spectrum acquisition system, and a imaging system;

所述空心光束捕获粒子系统包括连续激光器1、空心光束产生装置2、扩束准直装置、可改变空心光束方向的高反射镜5、第一会聚透镜6和样品池7;所述连续激光器1、空心光束产生装置2、扩束准直装置、高反射镜5和第一会聚透镜6依次设置于同一光路上,所述样品池7内设置有样品微粒8;The hollow beam capturing particle system includes a continuous laser 1, a hollow beam generating device 2, a beam expanding collimator, a high reflector 5 that can change the direction of the hollow beam, a first condensing lens 6 and a sample cell 7; the continuous laser 1 , the hollow beam generating device 2, the beam expanding and collimating device, the high reflection mirror 5 and the first condensing lens 6 are sequentially arranged on the same optical path, and the sample cell 7 is provided with sample particles 8;

所述原子发射光谱采集系统包括第一耦合透镜12以及与第一耦合透镜12连接的激光诱导击穿光谱仪14,所述第一耦合透镜12与激光诱导击穿光谱仪14之间设置有用于连接第一耦合透镜12和激光诱导击穿光谱仪14的第一光纤13;The atomic emission spectrum acquisition system includes a first coupling lens 12 and a laser-induced breakdown spectrometer 14 connected to the first coupling lens 12, and a second coupling lens for connecting the first coupling lens 12 and the laser-induced breakdown spectrometer 14 is provided. a coupling lens 12 and the first optical fiber 13 of the laser-induced breakdown spectrometer 14;

所述拉曼光谱采集系统包括第二耦合透镜15以及与第二耦合透镜15连接的拉曼光谱仪17,所述第二耦合透镜15与拉曼光谱仪17之间设置有用于连接第二耦合透镜15和拉曼光谱仪17的第二光纤16;The Raman spectrum acquisition system includes a second coupling lens 15 and a Raman spectrometer 17 connected to the second coupling lens 15, and a second coupling lens 15 is provided between the second coupling lens 15 and the Raman spectrometer 17 for connecting the second coupling lens 15. and the second optical fiber 16 of the Raman spectrometer 17;

所述脉冲激光器9产生的脉冲光垂直于高反射镜5反射的空心光束;该脉冲激光器9设置在垂直于高反射镜5反射的空心光束的传播方向且与样品池7位于同一平面上;The pulsed light generated by the pulsed laser 9 is perpendicular to the hollow beam reflected by the high-reflection mirror 5; the pulsed laser 9 is arranged at a direction perpendicular to the propagation direction of the hollow beam reflected by the high-reflection mirror 5 and is positioned on the same plane with the sample cell 7;

所述成像系统包括成像装置11和显微物镜10,所述显微物镜10设置在所述成像装置11和所述样品池7之间;本实施例中,显微物镜10为放大倍数为10×,N.A.为0.25的显微物镜。The imaging system includes an imaging device 11 and a microscope objective lens 10, and the microscope objective lens 10 is arranged between the imaging device 11 and the sample cell 7; in this embodiment, the microscope objective lens 10 has a magnification of 10. ×, microscope objective with N.A. of 0.25.

所述连续激光器1为532nm半导体连续激光器,也可用全固态可调谐钛宝石染料连续激光器替代。The CW laser 1 is a 532 nm semiconductor CW laser, which can also be replaced by an all-solid-state tunable Ti:sapphire dye CW laser.

所述空心光束产生装置2包括可以产生空心光束的自相位空间光束调制系统、交叉相位空间光束调制系统、双锥透镜、空间光调制器或相位板。The hollow beam generating device 2 includes a self-phase spatial beam modulation system, a cross-phase spatial beam modulation system, a biconical lens, a spatial light modulator or a phase plate that can generate a hollow beam.

如图3,所述自相位空间光束调制系统包括依次设置在同一光路上的第一凸透镜2-1和非线性吸收介质2-2,以及可用来探测该空心光束的CCD相机,该CCD相机接收通过非线性吸收介质2-2的光束,且活动设置在该光路上。As shown in FIG. 3 , the self-phase spatial beam modulation system includes a first convex lens 2-1 and a nonlinear absorption medium 2-2 sequentially arranged on the same optical path, and a CCD camera that can be used to detect the hollow beam, the CCD camera receives The light beam passes through the nonlinear absorption medium 2-2, and the activity is placed on the optical path.

此外,还可以采用交叉相位空间光束调制系统,所述交叉相位空间光束调制系统为申请号为“2016109453059”,专利名称为“一种基于交叉相位调制的贝塞尔光束的获得方法及装置”的发明专利中公开的获得贝塞尔光束的装置,设置激光的出射波长为780.2100nm,获得空心光束;In addition, a cross-phase spatial beam modulation system can also be used, and the cross-phase spatial beam modulation system is the application number "2016109453059" and the patent name is "A method and device for obtaining a Bessel beam based on cross-phase modulation". The device for obtaining Bessel beam disclosed in the invention patent, set the output wavelength of the laser to 780.2100nm to obtain a hollow beam;

此外还可以通过双锥透镜、空间光调制器或相位板来获得空心光束。In addition, hollow beams can be obtained by biconical lenses, spatial light modulators or phase plates.

所述扩束准直装置包括位于同一光路上的第二会聚透镜3和第三会聚透镜4,所述第二会聚透镜3位于所述空心光束产生装置2和第三会聚透镜4之间;本实施例中,第二会聚透镜3的焦距为100mm,第三会聚透镜4的焦距为200mm;此外,还可以通过其他的扩束准直装置进行替换,比如扩束器、准直器以及其他可以实现激光扩束准直的光学系统。The beam expanding and collimating device includes a second condensing lens 3 and a third condensing lens 4 located on the same optical path, and the second condensing lens 3 is located between the hollow beam generating device 2 and the third condensing lens 4; this In the embodiment, the focal length of the second condensing lens 3 is 100mm, and the focal length of the third condensing lens 4 is 200mm; Optical system for laser beam expansion and collimation.

所述成像装置11包括CCD相机、ICCD相机或CMOS相机;本实施例中的成像装置为CCD相机,也可用ICCD相机或CMOS相机替换。The imaging device 11 includes a CCD camera, an ICCD camera or a CMOS camera; the imaging device in this embodiment is a CCD camera, which can also be replaced by an ICCD camera or a CMOS camera.

所述第一会聚透镜6位于所述高反射镜5和所述样品池7之间,本实施例中,第一会聚透镜6的焦距为30mm,此外还可以用放大倍数为10×,N.A.为0.25的显微物镜等替换。The first condensing lens 6 is located between the high-reflection mirror 5 and the sample cell 7. In this embodiment, the focal length of the first condensing lens 6 is 30mm. In addition, the magnification can be 10×, and the N.A. is 0.25 microscope objective and other replacement.

所述成像装置11、激光诱导击穿光谱仪14与所述拉曼光谱仪17分别位于样品池7不同的侧部;本实施例中,成像装置11、激光诱导击穿光谱仪14、脉冲激光器9、样品池7以及拉曼光谱仪17处于同一平面,该平面垂直于高反射镜5反射的空心光束。The imaging device 11 , the laser-induced breakdown spectrometer 14 and the Raman spectrometer 17 are respectively located on different sides of the sample cell 7 ; in this embodiment, the imaging device 11 , the laser-induced breakdown spectrometer 14 , the pulsed laser 9 , the sample The cell 7 and the Raman spectrometer 17 are in the same plane, which is perpendicular to the hollow beam reflected by the high reflector 5 .

采用实施例1的装置进行单个悬浮颗粒的化学成分分析的方法,具体步骤包括:Adopt the device of embodiment 1 to carry out the method for the chemical composition analysis of single suspended particle, the concrete steps include:

步骤一、从连续激光器1获取一束高斯分布的连续激光束,将所获得的连续激光束通过空心光束产生装置2整形成一束空心光束;空心光束用自相位空间光束调制系统产生,从连续激光器1获取的高斯分布的连续激光束先经过第一凸透镜2-1聚焦于非线性吸收介质2-2中即可产生空心光束,该空心光束由CCD相机探测;非线性吸收介质2-2为铷原子池,也可用铅玻璃或钠原子池替代;Step 1: Obtain a continuous laser beam with a Gaussian distribution from the continuous laser 1, and shape the obtained continuous laser beam into a hollow beam through the hollow beam generating device 2; 1 The obtained continuous laser beam with Gaussian distribution is first focused on the nonlinear absorption medium 2-2 through the first convex lens 2-1 to generate a hollow beam, which is detected by a CCD camera; the nonlinear absorption medium 2-2 is rubidium The atomic pool can also be replaced by lead glass or sodium atomic pool;

步骤二、将步骤一所得到的空心光束通过扩束准直装置后入射到高反射镜5,调整高反射镜5,使反射的空心光束入射到第一会聚透镜6形成会聚的空心光束,会聚的空心光束入射到样品池7中;扩束准直的过程为,将步骤一所得到的空心光束先通过第二会聚透镜3再通过第三会聚透镜4进行扩束准直;In step 2, the hollow beam obtained in step 1 is incident on the high reflection mirror 5 after passing through the beam expanding and collimating device, and the high reflection mirror 5 is adjusted so that the reflected hollow beam is incident on the first condensing lens 6 to form a converging hollow beam, which converges. The hollow beam is incident into the sample cell 7; the process of beam expansion and collimation is that the hollow beam obtained in step 1 first passes through the second condensing lens 3 and then passes through the third condensing lens 4 for beam expansion and collimation;

步骤三、从脉冲激光器9获得一束会聚的脉冲光,调节脉冲激光器9使脉冲光的会聚中心与成像装置11的成像中心重合,关闭脉冲激光器9;Step 3: Obtain a convergent pulsed light from the pulsed laser 9, adjust the pulsed laser 9 to make the convergence center of the pulsed light coincide with the imaging center of the imaging device 11, and turn off the pulsed laser 9;

步骤四、向样品池7中喷入样品微粒8,入射到样品池7的会聚的空心光束捕获样品微粒8在光阱位置,调节空心光束的光强和尺寸使光阱位置与成像装置11的成像中心重合;本实施例中所用样品微粒8为氧化铝,颗粒尺寸为2~10μm,也可用其他吸光性化合物替换;本实施例中采用自相位空间光束调制系统产生空心光束,通过调节连续激光器1的功率来调节获得的空心光束的光强,通过改变第一凸透镜2-1的焦距来改变空心光束的尺寸,使获得的空心光束捕获样品微粒8的光阱位置与成像装置11所显示的成像中心重合;Step 4: Spray the sample particles 8 into the sample cell 7, and the converging hollow beam incident on the sample cell 7 captures the sample particles 8 at the position of the optical trap, and adjusts the light intensity and size of the hollow beam so that the position of the optical trap matches that of the imaging device 11. The imaging centers are coincident; the sample particles 8 used in this embodiment are alumina with a particle size of 2-10 μm, which can also be replaced by other light-absorbing compounds; in this embodiment, a self-phase spatial beam modulation system is used to generate a hollow beam, and by adjusting the continuous laser 1 to adjust the light intensity of the obtained hollow beam, and change the size of the hollow beam by changing the focal length of the first convex lens 2-1, so that the obtained hollow beam captures the optical trap position of the sample particle 8 and the image displayed by the imaging device 11. The imaging center coincides;

通过交叉相位空间光束调制系统产生空心光束,可以通过旋转二分之一波片的角度来改变空心光束的光强和尺寸;The hollow beam is generated by the cross-phase spatial beam modulation system, and the light intensity and size of the hollow beam can be changed by rotating the angle of the half-wave plate;

通过双锥透镜获得空心光束,可通过设置二分之一波片和偏振分光棱镜来改变空心光束的光强;通过改变双锥透镜的顶角角度来改变空心光束的尺寸;The hollow beam is obtained through a biconical lens, and the light intensity of the hollow beam can be changed by setting a half-wave plate and a polarizing beam splitter; the size of the hollow beam can be changed by changing the vertex angle of the biconical lens;

通过空间光调制器或者相位板来获得空心光束,可通过调节空间光调制器的输出电流或者调节相位板的相位信息来改变空心光束的光强和尺寸;The hollow beam is obtained through a spatial light modulator or a phase plate, and the light intensity and size of the hollow beam can be changed by adjusting the output current of the spatial light modulator or adjusting the phase information of the phase plate;

调节成像系统,使样品微粒8的运动情况经显微物镜10放大并记录到成像装置11上;成像用CCD相机拍摄,也可用ICCD相机或CMOS相机替换;Adjust the imaging system so that the movement of the sample particles 8 is magnified by the microscope objective lens 10 and recorded on the imaging device 11; the imaging is captured by a CCD camera, which can also be replaced by an ICCD camera or a CMOS camera;

步骤五、调节第二耦合透镜15的位置,使第二耦合透镜15采集样品微粒8产生的散射光,与第二耦合透镜15连接的拉曼光谱仪17显示拉曼光谱信息;Step 5: Adjust the position of the second coupling lens 15, so that the second coupling lens 15 collects the scattered light generated by the sample particles 8, and the Raman spectrometer 17 connected to the second coupling lens 15 displays Raman spectrum information;

步骤六、打开脉冲激光器9使会聚的脉冲光将捕获的样品微粒8电离,关闭脉冲激光器9;Step 6: Turn on the pulsed laser 9 so that the converged pulsed light ionizes the captured sample particles 8, and turn off the pulsed laser 9;

步骤七、调节第一耦合透镜12的位置,使第一耦合透镜12采集样品微粒8电离产生的原子发射光谱,与第一耦合透镜12连接的激光诱导击穿光谱仪14显示原子发射光谱的信息。Step 7: Adjust the position of the first coupling lens 12 so that the first coupling lens 12 collects the atomic emission spectrum generated by the ionization of the sample particles 8 , and the laser-induced breakdown spectrometer 14 connected to the first coupling lens 12 displays the information of the atomic emission spectrum.

向样品池7中重新喷入样品微粒进行重复检测,对多次得到的谱图进行比对,将确定的光谱图与标准谱图进行比对。The sample particles are re-sprayed into the sample cell 7 for repeated detection, the spectra obtained multiple times are compared, and the determined spectra are compared with the standard spectra.

上述步骤可以根据需要进行调整。The above steps can be adjusted as needed.

根据图4和图5,本发明所测得的单颗粒氧化铝的拉曼光谱图(图4)中,峰位置分别为378cm-1、578-1以及645-1,对应氧化铝标准拉曼光谱(图5)中所显示的376.9cm-1、575.9cm-1以及643.9cm-1,据此可判断得出所捕获的样品微粒包含氧化铝物质。According to Fig. 4 and Fig. 5, in the Raman spectrum of single particle alumina measured by the present invention (Fig. 4), the peak positions are 378cm -1 , 578 -1 and 645 -1 respectively, corresponding to the standard Raman of alumina 376.9 cm -1 , 575.9 cm -1 , and 643.9 cm -1 shown in the spectrum ( FIG. 5 ), from which it can be judged that the captured sample particles contain alumina species.

根据图6和图7,本发明所测得的单颗粒氧化铝的激光诱导击穿光谱图(图6)中,在波长为308.24nm和309.31nm处有峰,通过与图(7)中元素的激光诱导击穿光谱标准数据库比对,可确定所捕获的样品中包含铝元素。According to FIG. 6 and FIG. 7 , in the laser-induced breakdown spectrum (FIG. 6) of single-particle alumina measured by the present invention, there are peaks at wavelengths of 308.24 nm and 309.31 nm. Alignment of standard databases of laser-induced breakdown spectroscopy to determine the presence of aluminum in the captured samples.

本发明的分析方法的原理为:The principle of the analytical method of the present invention is:

本发明基于光泳力光镊的基本原理。具体为:当一束光照射在吸光性微粒表面时会引起微粒表面被照射区域温度升高,被照射区域温度升高后表面附着的气体分子热运动加剧,气体分子以更大速度弹离微粒表面,被照射面气体分子热运动比未被照射面的分子剧烈,综合作用下微粒产生一个由照射面指向未被照射面的净作用力。根据空气动力学原理,分子作用于微粒表面的压力F可以表示为:The present invention is based on the basic principle of optophoretic force optical tweezers. Specifically: when a beam of light is irradiated on the surface of light-absorbing particles, the temperature of the irradiated area on the surface of the particle will increase, and the thermal motion of the gas molecules attached to the surface will increase after the temperature of the irradiated area increases, and the gas molecules will bounce off the particles at a higher speed. On the surface, the thermal motion of the gas molecules on the irradiated surface is more intense than that of the molecules on the unirradiated surface. Under the combined action, the particles generate a net force from the irradiated surface to the unirradiated surface. According to the principle of aerodynamics, the pressure F of molecules acting on the surface of particles can be expressed as:

Figure GDA0002425256570000091
Figure GDA0002425256570000091

其中,ρa为空气的密度,kg/m3;B为普适空气常数,J/(mol·K);T为微粒表面温度,K;M为空气分子的摩尔质量,kg/mol。Among them, ρ a is the density of air, kg/m 3 ; B is the universal air constant, J/(mol·K); T is the particle surface temperature, K; M is the molar mass of air molecules, kg/mol.

对于空心光束来说,其作用在微粒表面上的力可以表示为:For a hollow beam, the force acting on the particle surface can be expressed as:

Figure GDA0002425256570000101
Figure GDA0002425256570000101

其中,ρa为空气的密度,kg/m3;B为普适空气常数,J/(mol·K);T为微粒表面温度,K;M为空气分子的摩尔质量,kg/mol;S为微粒上光照射区域的面积,m2Among them, ρ a is the density of air, kg/m 3 ; B is the universal air constant, J/(mol·K); T is the particle surface temperature, K; M is the molar mass of air molecules, kg/mol; S is the area of the light-irradiated area on the particle, m 2 .

对于不规则的微粒:For irregular particles:

Figure GDA0002425256570000102
Figure GDA0002425256570000102

其中,

Figure GDA0002425256570000103
为空气分子的平均速度,m/s;γ=cp/cv为比热比;Pl为入射空心光束的功率,W;P为环境气体压力,N/m2;P*为特征压力,N/m2;α为微粒表面的热适应系数,Δα=α12
Figure GDA0002425256570000104
in,
Figure GDA0002425256570000103
is the average velocity of air molecules, m/s; γ=c p /c v is the specific heat ratio; P l is the power of the incident hollow beam, W; P is the ambient gas pressure, N/m 2 ; P* is the characteristic pressure , N/m 2 ; α is the thermal adaptation coefficient of the particle surface, Δα=α 12 ,
Figure GDA0002425256570000104

在重力、FΔT和FΔα的作用下,微粒可在焦点区域被捕获,并且可以通过调节空心光束的尺寸来改变FΔT力的大小,进而对微粒进行操控。Under the action of gravity, F ΔT and F Δα , the particles can be trapped in the focal region, and the size of the F ΔT force can be changed by adjusting the size of the hollow beam, and then the particles can be manipulated.

被捕获的微粒被脉冲激光器产生的脉冲光所电离,通过LIBS技术和拉曼光谱对电力微粒的光谱进行分析,同时获得微粒的物质成分信息和元素信息。The captured particles are ionized by the pulsed light generated by the pulsed laser, and the spectrum of the electric particles is analyzed by LIBS technology and Raman spectroscopy, and the material composition information and element information of the particles are obtained at the same time.

以上所述,仅是本发明的较佳实施例,并非对本发明作任何限制,凡是根据本发明技术实质对以上实施例所作的任何简单修改、变更以及等效结构变化,均仍属于本发明技术方案的保护范围内。The above are only preferred embodiments of the present invention and do not limit the present invention. Any simple modifications, changes and equivalent structural changes made to the above embodiments according to the technical essence of the present invention still belong to the technology of the present invention. within the scope of the program.

Claims (6)

1. A method for single suspended particle chemical composition analysis using an analysis device comprising a pulsed laser (9), characterized in that: the analysis device also comprises a hollow beam particle capturing system, an atomic emission spectrum acquisition system, a Raman spectrum acquisition system and an imaging system;
the hollow beam particle capturing system comprises a continuous laser (1), a hollow beam generating device (2), a beam expanding and collimating device, a high reflecting mirror (5) capable of changing the direction of a hollow beam, a first converging lens (6) and a sample cell (7); the continuous laser (1), the hollow beam generating device (2), the beam expanding and collimating device, the high-reflection mirror (5) and the first convergent lens (6) are sequentially arranged on the same light path, and sample particles (8) are arranged in the sample cell (7); the hollow light beam generating device (2) is a self-phase space light beam modulation system capable of generating a hollow light beam, and the self-phase space light beam modulation system comprises a first convex lens (2-1), a nonlinear absorption medium (2-2) and a CCD (charge coupled device) camera, wherein the first convex lens and the nonlinear absorption medium are sequentially arranged on the same light path;
the atomic emission spectrum acquisition system comprises a first coupling lens (12) and a laser-induced breakdown spectrometer (14) connected with the first coupling lens (12), wherein a first optical fiber (13) used for connecting the first coupling lens (12) and the laser-induced breakdown spectrometer (14) is arranged between the first coupling lens (12) and the laser-induced breakdown spectrometer (14);
the Raman spectrum acquisition system comprises a second coupling lens (15) and a Raman spectrometer (17) connected with the second coupling lens (15), and a second optical fiber (16) used for connecting the second coupling lens (15) and the Raman spectrometer (17) is arranged between the second coupling lens (15) and the Raman spectrometer (17);
the pulse light generated by the pulse laser (9) is vertical to the hollow light beam reflected by the high reflector (5);
the imaging system comprises an imaging device (11) and a microscope objective (10), the microscope objective (10) being arranged between the imaging device (11) and the sample cell (7);
the method comprises the following steps:
step one, acquiring a continuous laser beam with Gaussian distribution from a continuous laser (1), and shaping the acquired continuous laser beam into a hollow beam through a hollow beam generating device (2);
step two, the hollow light beam obtained in the step one is incident to a high reflecting mirror (5) after passing through a beam expanding and collimating device, the high reflecting mirror (5) is adjusted, the reflected hollow light beam is incident to a first converging lens (6) to form a converged hollow light beam, and the converged hollow light beam is incident to a sample cell (7);
step three, obtaining a beam of convergent pulsed light from a pulse laser (9), enabling the convergence center of the pulsed light to coincide with the imaging center of an imaging device (11), and turning off the pulse laser (9);
step four, spraying sample particles (8) into the sample cell (7), capturing the sample particles (8) at the position of an optical trap by the converged hollow light beam incident into the sample cell (7), and adjusting the light intensity and the size of the hollow light beam to enable the position of the optical trap to coincide with the imaging center of the imaging device (11);
step five, collecting scattered light generated by the sample particles (8) by a second coupling lens (15), and displaying Raman spectrum information by a Raman spectrometer (17);
sixthly, turning on a pulse laser (9) to enable the converged pulse light to ionize the captured sample particles (8), and turning off the pulse laser (9);
and seventhly, acquiring an atomic emission spectrum generated by ionization of the sample particles (8) by using the first coupling lens (12), and displaying information of the atomic emission spectrum by using the laser-induced breakdown spectrometer (14).
2. A method for chemical composition analysis of individual suspended particles using an analytical device according to claim 1, wherein: the continuous laser (1) is a 532nm semiconductor continuous laser or an all-solid-state tunable titanium sapphire dye continuous laser.
3. A method for chemical composition analysis of individual suspended particles using an analytical device according to claim 1, wherein: the beam expanding and collimating device comprises a second converging lens (3) and a third converging lens (4) which are positioned on the same optical path, and the second converging lens (3) is positioned between the hollow light beam generating device (2) and the third converging lens (4).
4. A method for chemical composition analysis of individual suspended particles using an analytical device according to claim 1, wherein: the imaging device (11), the laser-induced breakdown spectrometer (14) and the Raman spectrometer (17) are respectively positioned on different sides of the sample cell (7).
5. A method for chemical composition analysis of individual suspended particles using an analytical device according to claim 1, wherein: the imaging device (11) comprises a CCD camera, an ICCD camera or a CMOS camera.
6. A method for chemical composition analysis of individual suspended particles using an analytical device according to claim 1, wherein: the first convergent lens (6) is positioned between the high reflection mirror (5) and the sample cell (7).
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