CN109187725A

CN109187725A - The femtosecond laser processing monitoring method and device of confocal Raman-LIBS- mass spectrometry detection

Info

Publication number: CN109187725A
Application number: CN201811344180.XA
Authority: CN
Inventors: 王允; 邱丽荣; 赵维谦
Original assignee: Beijing Institute of Technology BIT
Current assignee: Beijing Institute of Technology BIT
Priority date: 2018-11-13
Filing date: 2018-11-13
Publication date: 2019-01-11

Abstract

The invention relates to a femtosecond laser processing monitoring method and device for confocal Raman-LIBS-mass spectrometry detection, belonging to the fields of laser precision detection technology and femtosecond laser processing and manufacturing technology. The invention integrates the laser confocal axial monitoring module and the femtosecond laser processing system organically, and uses the differential confocal system curve peak point to carry out high-precision in-situ monitoring of the sample axial position and measurement of the sample axial processing size, thereby solving the problem of measuring The problem of sample drift in the process and the problem of high-precision online detection; use the Raman spectrum detection module, LIBS spectrum detection module and mass spectrometer to monitor and analyze the molecular structure, elements and ions of the sample material after femtosecond laser processing, and pass The computer fuses the above information to realize the integration of high-precision femtosecond laser processing of microstructures and in-situ monitoring and analysis of micro-area morphological properties, and to improve the controllability of femtosecond laser processing accuracy of microstructures and the processing quality of samples.

Description

The femtosecond laser processing monitoring method and device of confocal Raman-LIBS- mass spectrometry detection

Technical field

The present invention relates to a kind of femtosecond laser of confocal Raman-LIBS- mass spectrometry detection processing monitoring method and devices, especially Be related to the femtosecond laser processing monitoring method and device of confocal Raman-LIBS- mass spectrometry detection, belong to laser accurate detection technique, Femtosecond laser processing and manufacturing technology.

Background technique

Femtosecond laser is processed since wide with adaptability for materials, processing fineness is high, processing is not necessarily to the remarkable advantages such as mask, And the century property technology for being considered as " may cause the new industrial revolution " is concerned, and by as macro-micro- across scale minute manufacturing Preferred means obtain the worlds such as China, the U.S. and respectively manufacture first developing for big country.

Femtosecond laser processing is exactly the nonlinear effect using laser and material, in the nanometer ruler for surmounting optical diffraction limit Make material that forming occur and become second nature on degree, change and regulation while essence is material shape and performance parameter, thus, we The transient change state for only monitoring material shape in process, performance parameter simultaneously, it is non-could really to disclose femtosecond laser The mechanism of action and its Evolution linearly processed.

There is also non-linear processing to make object lens axial feeding can not accurate counter sample axial direction for femtosecond laser processing at present This significant bottleneck problem of removal amount, but it is existing based on the axially monitoring, backscattering coherent tomographic of triangle Optical displacement sensor The methods of monitoring and optical coherence tomography monitoring, resolution capability are micron or sub-micrometer scale, such as Canadian Queens University On-line monitoring technique research, but its direction x-y-z are carried out using interference imaging method (OCT) with German brother's Dettingen Laser Experiments room Monitoring resolution capability only up to micron dimension.As it can be seen that femtosecond process unit due to being restricted by existing monitoring technology, still lacks high The in-situ monitoring means of performance, this just makes generally existing based on processing, long time-consuming femtosecond laser process equipment: non-linear to go It removes, axial remove is not allowed；Long time-consuming drift, keeps system of processing unstable；It is unstable point processing, make process scale less etc. general character Problem.It is inaccurate that it has its source in system of processing axial direction fixed-focus, and then constrains femtosecond laser in across scale key element micro-nano system Make the application of aspect.

In addition, Material Processing is different in femtosecond laser process, the mechanism of action of femtosecond pulse and substance is not Together, the form that sample generates in process and performance change difference；Under the action of pulse laser, the molecular structure of sample, Element ratio and charged ion etc. can change, and how carry out to the physical parameter and morphological parameters of sample after processing is completed Accurate detection is not only to guarantee the key of machining accuracy and research femtosecond laser processing mechanism, promotes processing technology level Important prerequisite.

It can be seen that there is an urgent need to study shape in femtosecond laser processing with the rapid development of femtosecond laser processing technology The in-situ monitoring means of state performance parameter.

In the detection of form performance parameter, it is based on the confocal laser Raman spectroscopic detection skill of Raman (Raman) scattering effect Art, since the information such as intensity, position, displacement, ratio, halfwidth of detection sample raman microspectroscopy spectrum spectral peak can be passed through, to survey The parameters such as material domain component, stress, temperature are obtained, and by the important means as form performance parameter test in femtosecond laser It is obtained into the off-line monitorings such as photoinduced strain, crystal crystalline state, variations in refractive index, carrier density, state of temperature, the ingredient of processing Function application, but the processing of existing femtosecond laser still lacks the integrated in-situ monitoring hand of femtosecond laser processing form performance parameter Section, while Raman spectrum form performance detection method cannot also reflect the form performance parameter of processed sample completely, it is necessary to it borrows Other means are helped, as LIBS (Laser-induced breakdown spectroscopy) spectrum and mass spectrum are micro- to detect sample The complete information of area's material composition.

In conclusion in existing femtosecond laser processing accurately fixed-focus and alignment can not be carried out to sample, it can not be to processing In sample morphology performance parameter carry out high-precision in-situ monitoring, result limit femtosecond laser processing effect stability and Across scale working ability also constrains the raising of femtosecond laser processing mechanism research and processing technology level.

For this purpose, present invention proposition creatively incorporates confocal laser Raman-LIBS- matter in femtosecond laser system of processing Detection Techniques are composed, to realize the integrated in-situ monitoring of form performance parameter in femtosecond laser processing, are processed for femtosecond laser Form performance parameter integration in-situ monitoring provides new tool, promotes the precision property and macro-micro- across scale of femtosecond laser processing Working ability etc..

Summary of the invention

The purpose of the present invention is to solve samples in laser micro/nano processing to be also easy to produce axial drift and after processing is completed sample The problems such as product complex shape state performance parameter in situ detection, the present invention proposes the femtosecond laser of confocal Raman-LIBS- mass spectrometry detection Monitoring method and device are processed, axial drift, inclined on-line monitoring and sample structure axis in sample processing procedure are realized It is monitored to the nanoscale of size, it is ensured that the accurate real-time fixed-focus of sample in process, and realize sample after processing is completed The comprehensive detection of micro-raman spectra structure and complicated physical parameter, for feedback modifiers, mechanism study and the technique of femtosecond laser processing Improvement provides technical foundation, improves the controllability of laser processing precision and the processing quality of sample.

The purpose of the present invention is what is be achieved through the following technical solutions.

The femtosecond laser of confocal Raman-LIBS- mass spectrometry detection of the invention processes monitoring method, using femtosecond laser plus Work system carries out fine structure processing to sample, using confocal laser axial direction monitoring modular to sample surface morphology profile, processing Middle sample surfaces axial position is monitored in real time, and is detected to the geometric parameter of sample surfaces after processing, and utilization is confocal The molecule structure change of specimen material tests and analyzes after Raman spectroscopic detection module processes femtosecond laser, utilizes LIBS light Spectrum detecting module tests and analyzes the atom of material, small molecule and element information, is believed using ion of the mass spectrograph to material Breath is tested and analyzed, and is carried out fusion to above- mentioned information and is obtained sample microcell form and physical property comprehensive parameters, and then realizes fine Structure femtosecond laser high-precision processing is integrated with the monitoring analysis of microcell form performance in-situ, improves fine structure femtosecond laser and adds The controllability of work precision and the processing quality of sample；

Confocal Raman-LIBS- mass spectrometry detection femtosecond laser processing monitoring method the following steps are included:

Step 1: sample to be processed is placed on precision stage, sample is driven to carry out two-dimensional scanning by precision stage Movement is scanned measurement to the surface profile of sample using confocal axial monitoring modular, and by its measurement feedback to meter Calculation machine for adjusting sample posture, and is used for adjustment of the femtosecond laser system of processing to processing control parameter；

Wherein, confocal laser axial direction monitoring modular is made of laser, beam expander, the first spectroscope, confocal detection module, Axial monitoring collimated light beam into object lens and is focused on sample, after dichroscope A reflection, dichroscope B transmission through sample Axially monitoring light beam enters confocal detection module after the reflection of the first spectroscope for the reflection of product reflection, is focused on by force by detection object lens Detector is spent, intensity detector detects to obtain confocal curves；

Peak point position according to confocal curves carries out high precision monitor to specimen surface positions；

Step 2: processing system using the femtosecond laser that femto-second laser, laser space-time Shaping Module, two-dimensional scanner are constituted System carries out fine structure processing to sample, in process using confocal axial monitoring modular to the axial positions of sample surfaces into Row monitoring；Peak point position according to confocal curves carries out high precision monitor to the axial position of sample surfaces；

Step 3: axial position of the computer according to measurement result adjustment sample, adjusts the position of precision stage in real time, Realize the accurate fixed-focus of axial direction of sample in process；

Step 4: after processing is completed, using confocal laser axial direction monitoring modular to sample structure after processing is completed into Row scanning survey realizes the nano high-precision in situ detection of sample morphology parameter after processing；

Step 5: axial monitoring collimated light beam focuses on sample through object lens, raman scattering spectrum is inspired, spectrum warp It is detected through dichroscope C by Raman spectroscopic detection module after dichroscope B reflection, to the molecular structural parameter of sample after processing Carry out in situ detection analysis, wherein Raman detection module is made of Raman-Coupled mirror and Raman spectroscopy detector；

Step 6: pulsed light beam focuses on sample through object lens, inspire plasma plume, part plasma by from Sub- suction pipe is detected by mass spectrograph, carries out in situ detection analysis to the charged ion of sample after processing；Plasma plume buries in oblivion sending LIBS spectrum, the LIBS spectrum are reflected again by dichroscope C after dichroscope B reflection, are visited by LIBS spectrographic detection module It surveys, in situ detection analysis is carried out to the atom of sample, small molecule and element information after processing；The LIBS spectrographic detection module by LIBS coupling mirror and LIBS spectral detector composition；

Step 7: detecting to obtain signal by intensity detector, Raman spectroscopy detector, LIBS spectral detector and mass spectrograph It is transmitted to computer and carries out information fusion, the microcell form and performance synthesis parameter of the sample after being processed, and according to sample Microcell form and performance synthesis Parameter analysis process in sample physical property changing rule and the effect after processing, to passing through Laser space-time Shaping Module to processing laser beam be modulated, improve micro-nano structure femtosecond laser machining accuracy controllability and The processing quality etc. of sample.

The femtosecond laser of confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method, and femtosecond laser adds The processing laser beam and axial monitoring collimated light beam that work system issues coaxially are coupled to sample surfaces through object lens, realize that femtosecond swashs The monitoring of the high-resolution of light processed sample geometric shape and performance parameter and in situ imaging.

The femtosecond laser of confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method, can also utilize Micro-imaging module observes sample, assists sample pose adjustment；The light that white light source issues is through lighting system, illumination point After light microscopic, dichroscope B, object lens on uniform irradiation to sample, the light returned through sample is after illumination spectroscope, spectroscope reflection On imaged lens imaging to CCD, inclination and the position of sample can determine whether.

The femtosecond laser of confocal Raman-LIBS- mass spectrometry detection of the invention processes monitoring device, and femto-second laser is located at The laser space-time Shaping Module and two-dimensional scanner of femto-second laser exit direction are located at femto-second laser outgoing beam Vertical Square To dichroscope A, dichroscope B, object lens and precision stage, positioned at the confocal axial monitoring of dichroscope A reflection direction Module and the dichroscope C positioned at dichroscope B reflection direction, Raman spectroscopic detection module are located at dichroscope C reflection direction LIBS spectrographic detection module, ion suction pipe and mass spectrograph positioned at sample side, object lens drive by axial scan device；Confocal axis To monitoring modular include laser, the beam expander positioned at laser emitting direction, the first reflecting mirror and be located at the first reflecting mirror it is anti- Penetrate the confocal detection module in direction；Wherein, axial monitoring collimated light beam and processing laser beam are coaxial through dichroscope A, object lens It is incident on sample surfaces.

The femtosecond laser of confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring device, confocal detection mould Block can be made of detection object lens, intensity detector, and intensity detector is located at detection object lens rear focus position.

The femtosecond laser of confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring device, and laser space-time is whole Shape module can be made of spacing shaping device, temporal shaping device, carry out time domain to the laser beam that femto-second laser issues and airspace is joined Several combined regulatings improves femtosecond laser micro-nano technology ability.

The femtosecond laser of confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring device, can also utilize Micro-imaging module observes sample, wherein micro-imaging module by white light source, lighting system, illumination spectroscope, at As lens, CCD are formed.

Beneficial effect

The method of the present invention, which compares prior art, has following innovative point:

1) confocal laser axial direction monitoring technology is used, the axial position monitoring capability in process is improved, solves Fixed-focus problem when drifting problem and high-precision real in femtosecond laser process, this is one of innovative point of the invention；

2) confocal laser axial direction nanoscale monitoring technology is used, the high-precision axial direction ruler of femtosecond laser processed sample is realized Very little detectability solves the problem on line detection of femtosecond laser processed sample, this is the two of innovative point of the invention；

3) light beam of confocal system, femtosecond laser system of processing is coupled to sample through same object lens, realizes micro-nano knot The online position monitoring of sample and axial dimension detection in structure process improve the controllability and processing matter of process Amount, this is the three of innovative point of the invention；

The method of the present invention has following distinguishing feature:

1. combining using confocal technology with femtosecond laser processing technology, the sample axial defocusing in process is realized The on-line monitoring of position solves the sample drifting problem in process, improves the controllability of process；

2. the peak point using confocal curves carries out sample axial position monitoring, femtosecond laser beam is made to focus light with minimum Spot focus on sample surfaces, it can be achieved that sample high-precision micro-nano technology；

3. realizing high-precision on-line monitoring using the peak point fixed-focus measuring technique of confocal curves, femtosecond can be improved The axial micro-nano technology ability of laser processing technology；

4. being combined using confocal laser Raman spectrum, LIBS spectrum and mass spectrometry detection technology, realize to the sample after processing The in-situ monitoring and analysis of product microcell form and the variation of physical property comprehensive parameters, improve processing technology level and processing quality can Control property.

5. the group of specimen material after being processed using confocal Raman spectra, LIBS spectrum and mass spectrometry detection technology to femtosecond laser Molecular structure, element information and ionic structure variation carry out in-situ monitoring, can improve existing femtosecond laser process；

6. sample is imaged the slant correction, it can be achieved that sample position using micro-imaging technique, improve processed Position regulated efficiency in journey.

Detailed description of the invention

Fig. 1 is that the femtosecond laser of the confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method schematic diagram；

Fig. 2 is that the femtosecond laser of the confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method and schematic device；

Fig. 3 is that the femtosecond laser of the confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method schematic diagram；

Fig. 4 is that the femtosecond laser of the confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method and schematic device；

Wherein: the confocal axial monitoring modular of 1-, 2- laser, 3- beam expander, 4- axially monitor collimated light beam, 5- dichroic Mirror A, 6- dichroscope B, 7- object lens, 8- axial scan device, 9- sample, 10- precision stage, the axial monitoring light beam of 11- reflection, The first spectroscope of 12-, 13- confocal detection module, 14- detection object lens, 15- intensity detector, 16- confocal curves, 17- femtosecond swash Light device, 18- laser space-time Shaping Module, 19- process laser beam, 20- two-dimensional scanner, 21- Raman-Coupled mirror, 22- Raman Spectral detector, 23- Raman spectroscopic detection module, 24- plasma plume, 25- ion suction pipe, 26- mass spectrograph, 27-LIBS coupling Close mirror, 28-LIBS spectral detector, 29-LIBS spectrographic detection module, 30- spacing shaping device, 31- temporal shaping device, 32- meter Calculation machine, 33- dichroscope C, 34- white light source, 35- lighting system, 36- micro-imaging module, 37- illuminate spectroscope, 38- bis- To Look mirror C, 39- imaging len, 40-CCD.

Specific embodiment

Present invention will be further explained below with reference to the attached drawings and examples.

The basic idea of the invention is that: confocal laser axial direction monitoring modular and femtosecond laser system of processing are organically blended, High precision monitor is carried out to sample axial position using confocal system peak of curve point, realize sample axial fixed-focus in real time and The problems such as axial position monitors, and solves axial drift and the on-line checking in femtosecond laser process；Also melt in above system It closes micro-imaging module and coarse alignment is carried out to sample, and microcell is carried out to the sample that femtosecond laser is processed using confocal detection module Three-dimensional appearance detection is carried out the detection of sample molecule structure using the Raman spectrum of continuous laser excitation, is excited using pulse laser The plasma plume that sample generates carries out mass spectrometry detection and obtains sample charged particle and molecular weight information, and collects detection plasma The LIBS spectrum that body buries in oblivion generation obtains the small molecule and element information of sample, and the microcell shape of sample is obtained by the fusion of information State and performance synthesis parameter realize comprehensive monitoring and the analysis of the effect processed to femtosecond laser, improve micro-nano structure femtosecond Laser machine controllability and the processing quality of sample etc. of precision.

Embodiment 1

As shown in Figure 1, computer 32 carries out feedback control to two-dimensional scanner 20, precision stage 10, axial scan device 8 System is realized and is adjusted to the processing of sample 9 with the 3-D scanning and position monitored；Femtosecond laser system of processing by femto-second laser 17, Laser space-time Shaping Module 18, two-dimensional scanner 20 are constituted；Confocal detection module 13 can be by detection object lens 14, intensity detector 15 Composition；And intensity detector 15 is located at detection 14 focal position of object lens.

The femtosecond laser processing monitoring method implementation steps of confocal Raman-LIBS- mass spectrometry detection are as follows:

1) sample 9 is placed on precision stage 10, drives sample 9 to be scanned movement by precision stage 10；

2) before processing, measurement is scanned to the surface of sample 9 using confocal axial monitoring modular 1；Axial monitoring is parallel Light beam 4 is reflected through dichroscope A5, after dichroscope B6 transmission, is focused on sample 9 by object lens 7, the reflection reflected through sample 9 Axial monitoring light beam 11 is reflected through reflecting mirror 12 focuses on intensity detector 15 by detection object lens 14, and intensity detector 15 detects To any confocal signal of 9 surface of sample；

3) axial scanner 8 is controlled by computer 33 and axial scan is carried out to sample 9, obtain the confocal curves of " bell " 16；

4) high precision monitor carried out to the axial position of sample 9 according to the peak position of confocal curves 16, computer 32 according to According to measurement result, the processing control parameter of femtosecond laser system of processing is adjusted；

5) the processing laser beam 19 modulated through laser space-time Shaping Module 18 is through dichroscope A5, dichroscope B6 and object The surface that mirror 7 focuses on sample 9 laser machines sample 9, and the scanning machining of film micro area controls two dimension by computer 32 and sweeps Retouch the completion of device 20；

6) in process, the axial position of sample 9 in process is supervised using confocal axial monitoring modular 1 It surveys；

7) computer 32 controls precision stage 10, the monitoring result fed back according to confocal axial monitoring modular 1 to sample 9 Position is adjusted, and eliminates the influence of sample drift；

8) axial scanner 8 is controlled by computer 32 and precision stage 10 is scanned sample 9, after obtaining processing Sample micro-nano structure axial dimension realizes the nanoscale detection of 9 axial dimension of sample；By Raman spectroscopic detection module 23, The performances ginseng such as molecular structure, atom, small molecule and element of sample after LIBS spectral detector 28 and the acquisition processing of mass spectrograph 26 Number, and then realize the high accuracy in-situ detection of 9 form performance parameter of sample after processing；

9) according in the microcell form of sample and performance synthesis Parameter analysis process sample physical property changing rule and Effect after detection processing, is modulated to by 18 pairs of processing laser beams 19 of laser space-time Shaping Module, improves micro-nano knot The controllability of structure femtosecond laser machining accuracy and the processing quality of sample.

Embodiment 2

As shown in Fig. 2, laser space-time Shaping Module 18 is made of spacing shaping device 30 and temporal shaping device 31, femtosecond is swashed The light beam that light device 17 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.

Remaining is same as Example 1.

Embodiment 3

As shown in figure 3, before processing, after sample 9 is placed in precision stage 10, using micro-imaging module 36 to sample 9 carry out coarse alignment, and the light that white light source 34 issues is raw after lighting system 35, illumination spectroscope 37, dichroscope B6, object lens 7 At the illumination light that on collimated light beam uniform irradiation to sample 9, sample 9 reflects through imaging len 39 after illumination spectroscope 37 reflects It is imaged on CCD40, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.

Remaining is same as Example 1.

Embodiment 4

As shown in figure 4, laser space-time Shaping Module 18 is made of spacing shaping device 30 and temporal shaping device 31, femtosecond is swashed The light beam that light device 17 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.

Remaining is same as Example 3.

A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base Change on plinth is all protection scope of the present invention.

Claims

1. the femtosecond laser processing monitoring method of confocal Raman-LIBS-mass spectrometry detection, it is characterized in that: utilize femtosecond laser processing system to carry out microstructure processing to sample, utilize laser confocal axial monitoring module to sample surface topography profile, The axial position of the sample surface during processing is monitored in real time, and the geometric parameters of the sample surface after processing are detected. The Raman spectrum detection module is used to detect and analyze the molecular structure changes of the sample material after femtosecond laser processing, and the LIBS spectrum detection module is used to detect and analyze the changes. Detect and analyze the atomic, small molecule and element information of the material, use the mass spectrometer block to detect and analyze the ion information of the material, and fuse the above information to obtain the comprehensive parameters of the sample micro-area morphology and physical properties, and then realize the microstructure femtosecond laser high The integration of precision machining and in-situ monitoring and analysis of micro-area morphological properties improves the controllability of femtosecond laser machining accuracy of microstructures and the processing quality of samples; including the following steps:

Step 1. Place the sample (9) to be processed on the precision workbench (10), the precision workbench (10) drives the sample (9) to perform a two-dimensional scanning motion, and the confocal axial monitoring module (1) is used to monitor the sample. The surface profile of (9) is scanned and measured, and the measurement results are fed back to the computer (32) for adjusting the attitude of the sample (9) and for adjusting the processing control parameters by the femtosecond laser processing system;

The laser confocal axial monitoring module (1) is composed of a laser (2), a beam expander (3), a first beam splitter (12), and a confocal detection module (13), and the axial monitoring parallel beam (4) After being reflected by the dichroic mirror A (5) and transmitted by the dichroic mirror B (6), it enters the objective lens (7) and is focused on the sample (9), and the reflected axial monitoring beam ( 11) After being reflected by the first beam splitter (12), it enters the confocal detection module (13), and is focused by the detection objective lens (14) to the intensity detector (15), and the intensity detector (15) detects the confocal curve (16) ;

The surface position of the sample (9) is monitored with high precision according to the peak point position of the confocal curve (16);

Step 2, using a femtosecond laser processing system composed of a femtosecond laser (17), a laser space-time shaping module (18), and a two-dimensional scanner (20) to perform microstructure processing on the sample (9), and a confocal axis is used in the processing process. monitoring the axial position of the surface of the sample (9) to the monitoring module (1); monitoring the axial position of the surface of the sample (9) with high precision according to the peak point position of the confocal curve (20);

Step 3, the computer (32) adjusts the axial position of the sample (9) according to the measurement result, adjusts the position of the precision worktable (10) in real time, and realizes the precise axial focus of the sample during the processing;

Step 4. After the processing is completed, the laser confocal axial monitoring module (1) is used to scan and measure the structure of the processed sample, so as to realize the nano-level high-precision in-situ detection of the morphological parameters of the processed sample (9);

Step 5. The axial monitoring parallel beam (4) is focused on the sample (9) by the objective lens (7) to excite a Raman scattering spectrum, which is reflected by the dichroic mirror B (6) and then transmitted through the dichroic mirror C (37) is detected by a Raman spectrum detection module (23), and the molecular structure parameters of the processed sample are detected and analyzed in situ, wherein the Raman detection module (23) is composed of a Raman coupling mirror (21) and a Raman spectrum The detector (22) is composed;

Step 6: The pulsed beam is focused on the sample (9) by the objective lens (7), and a plasma plume (24) is excited, and part of the plasma is detected by the mass spectrometer (26) through the ion pipette (25), and the charged sample is charged. The ions are detected and analyzed in situ; the LIBS spectrum is emitted by the annihilation of the plasma plume (24), and the LIBS spectrum is reflected by the dichroic mirror B (6) and then reflected by the dichroic mirror C (33) again. 29) detection, performing in-situ detection and analysis on atomic, small molecule and element information of the processed sample; the LIBS spectrum detection module (29) is composed of a LIBS coupling mirror (27) and a LIBS spectrum detector (28);

Step 7: The signals detected by the intensity detector (15), the Raman spectrum detector (22), the LIBS spectrum detector (28) and the mass spectrometer (26) are transmitted to the computer (32) for information fusion to obtain a processed The comprehensive parameters of the micro-area morphology and performance of the sample, and according to the comprehensive parameters of the micro-area morphology and performance of the sample, the change law of the physical properties of the sample during the processing and the effect after processing are analyzed, and the processing laser beam ( 19) Modulation is carried out to improve the controllability of the femtosecond laser processing accuracy of the micro-nano structure and the processing quality of the sample.

2. the femtosecond laser processing monitoring method of confocal Raman-LIBS-mass spectrometry detection according to claim 1, is characterized in that: the processing laser beam (19) that the femtosecond laser processing system sends out and the axial monitoring parallel beam (4 ) is coaxially coupled to the surface of the sample (9) through the objective lens (7), so as to realize high-resolution monitoring and in-situ imaging of the geometry and performance parameters of the sample processed by the femtosecond laser.

3. the femtosecond laser processing monitoring method of confocal Raman-LIBS-mass spectrometry detection according to claim 1, is characterized in that: also comprises before processing, utilizes microscopic imaging module (36) to observe sample (9) , assisting sample attitude adjustment; the microscopic imaging module (36) includes a white light source (34), an illumination system (35), an illumination beam splitter (37), a beam splitter (38), an imaging lens (39) and a CCD (40) ); the light emitted by the white light source (34) is uniformly irradiated on the sample (9) after passing through the illumination system (35), the illumination beam splitter (37), the dichroic mirror B (6), and the objective lens (7). 9) The returned light is reflected by the illumination beam splitter (37) and beam splitter (38) and then imaged on the CCD (40) by the imaging lens (39), so that the tilt and position of the sample (9) can be judged.

4. The femtosecond laser processing monitoring device of confocal Raman-LIBS-mass spectrometry detection is characterized in that: comprising a femtosecond laser (17), a laser space-time shaping module (18) located in the emission direction of the femtosecond laser (17), and a two-dimensional laser. A scanner (20), a dichroic mirror A (5), a dichroic mirror B (6), an objective lens (7) and a precision stage (10) located in the vertical direction of the outgoing beam of the femtosecond laser (20), are located in two A confocal axial monitoring module (1) in the reflection direction of the dichroic mirror A (5), a dichroic mirror C (33) in the reflection direction of the dichroic mirror B (6), and a Raman spectrum detection module (23), The LIBS spectral detection module (29) is located in the reflection direction of the dichroic mirror C (34), the ion pipette (25) and the mass spectrometer (26) are located on the side of the sample (9), and the objective lens (7) is connected by an axial scanner ( 8) Drive; the confocal axial monitoring module (1) comprises a laser (2), a beam expander (3) located in the exit direction of the laser (2), a first reflecting mirror (12) and a first reflecting mirror (12) A confocal detection module (13) in the reflection direction; wherein the axial monitoring parallel beam (4) and the processing laser beam (23) are coaxially incident on the surface of the sample (9) via the dichroic mirror A (5) and the objective lens (7) .

5. The femtosecond laser processing monitoring device for confocal Raman-LIBS-mass spectrometry detection according to claim 4, wherein the confocal detection module (13) can be composed of a detection objective lens (14) and an intensity detector (15) , and the intensity detector (15) is located at the focal position of the image side of the detection objective lens (14).

6. The femtosecond laser processing monitoring device for confocal Raman-LIBS-mass spectrometry detection according to claim 4, characterized in that: the laser space-time shaping module (18) can be configured by a space shaper (30), a time shaper (31) In the structure, the laser beam emitted by the femtosecond laser (17) is jointly controlled and controlled in time domain and spatial domain parameters, so as to improve the micro-nano processing capability of the femtosecond laser.

7. The femtosecond laser processing monitoring device for confocal Raman-LIBS-mass spectrometry detection according to claim 4, characterized in that: a microscopic imaging module (36) can also be used to observe the sample (9), wherein the microscopic imaging module (36) can be used to observe the sample (9). The imaging module (36) is composed of a white light source (34), an illumination system (35), an illumination beam splitter (37), an imaging lens (39), and a CCD (40). The light emitted by the white light source (34) is uniformly irradiated onto the sample (9) after passing through the illumination system (35), the illumination beam splitter (37), the dichroic mirror B (6), and the objective lens (7). The returned light is reflected by the illuminating beam splitter (37) and the beam splitter (38), and then is imaged on the CCD (40) by the imaging lens (39).