CN109186344B - Single-aperture universal MEMS safety system and method - Google Patents
Single-aperture universal MEMS safety system and method Download PDFInfo
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- CN109186344B CN109186344B CN201811274903.3A CN201811274903A CN109186344B CN 109186344 B CN109186344 B CN 109186344B CN 201811274903 A CN201811274903 A CN 201811274903A CN 109186344 B CN109186344 B CN 109186344B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F41—WEAPONS
- F41F—APPARATUS FOR LAUNCHING PROJECTILES OR MISSILES FROM BARRELS, e.g. CANNONS; LAUNCHERS FOR ROCKETS OR TORPEDOES; HARPOON GUNS
- F41F1/00—Launching apparatus for projecting projectiles or missiles from barrels, e.g. cannons; Harpoon guns
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Abstract
The invention discloses a single-aperture universal MEMS safety system and a single-aperture universal MEMS safety method. The MEMS security system of the present invention comprises: the safety system comprises a safety system outer frame, an explosion-proof sliding block limiting pin, an explosion-proof sliding block limiting groove, a recoil safety mechanism, a centrifugal locking mechanism, a mode control mechanism and an explosion transfer hole; according to different launching environments, a plurality of cantilever beams with different widths are arranged in the recoil safety mechanism and the centrifugal locking mechanism, and the mode control mechanism is controlled by an external instruction device to select the cantilever beams under a specific launching environment; aiming at the action process of the small-caliber bomb, a primary anti-shaking device and a secondary anti-shaking device are arranged, and the application of a flexible material is combined, so that the shaking in the launching process of the bomb is ensured not to influence the normal work of the bomb.
Description
Technical Field
The invention relates to a small-caliber bomb safety technology, in particular to a single-caliber universal MEMS safety system and a single-caliber universal MEMS safety method.
Background
In modern war, the demand of small-caliber ammunition is huge, but the traditional MEMS safety system is only suitable for one launching environment and has poor universal capability; moreover, the single form of security system does not account for the waste of processing resources. In addition, the mechanical device in the existing MEMS safety system is complex, and the requirement of an internal safety mechanism related to multilayer interaction is high during actual processing.
Disclosure of Invention
In order to solve the problem that the MEMS safety system of the existing small-caliber weapon has poor general capability, the MEMS safety system which is universal with a single caliber is provided mainly aiming at the launching environment of a small-caliber bullet; in order to solve the problem that the internal structure of the existing MEMS safety system is complex, the internal structure of the traditional MEMS safety system is improved, and the application of a flexible material is combined to ensure that the jitter in the transmitting process does not influence the normal work of the system.
One object of the present invention is to provide a single aperture universal MEMS security system.
The MEMS safety system is arranged between the primary explosive and the next-stage charge of the small-caliber bomb, and the surface of the MEMS safety system is perpendicular to the launching direction.
The MEMS safety system for single-aperture universal use comprises: the safety system comprises a safety system outer frame, an explosion-proof sliding block limiting pin, an explosion-proof sliding block limiting groove, a recoil safety mechanism, a centrifugal locking mechanism, a mode control mechanism and an explosion transfer hole; the safety system outer frame is a supporting frame with a hollow inner part; the flame-proof sliding block is positioned in the safety system outer frame, the outer edge of the flame-proof sliding block is smaller than the inner edge of the safety system outer frame, and the upper surface and the lower surface of the flame-proof sliding block are lower than the surface of the safety system outer frame; the front end of the flame-proof sliding block is provided with a flame-proof sliding block limiting pin, the flame-proof sliding block limiting pin is opposite to the flame-proof sliding block limiting pin in position, the inner edge of the front end of the safety system outer frame is provided with a flame-proof sliding block limiting groove, the flame-proof sliding block limiting groove and the flame-proof sliding block limiting pin are in complementary patterns, and the safety system outer frame and the flame-proof sliding block are symmetrical about the centrifugal overload direction of; the two sides of the flame-proof sliding block are fixedly connected to the inner edge of the safety system outer frame through an even number of pairs of backseat safety mechanisms, and the even number of pairs of backseat safety mechanisms are symmetrical about the centrifugal overload direction of the small-caliber bomb and are also symmetrical about the centrifugal overload direction vertical to the small-caliber bomb; aiming at different small-caliber bullet launching environments, each recoil safety mechanism comprises a plurality of recoil safety cantilever beams with different widths, and the allowable stress of each recoil safety cantilever beam corresponds to recoil overload of one launching environment; the rear end of the explosion-proof sliding block is fixedly connected to the inner edge of the rear end of the safety system outer frame through a centrifugal locking mechanism, and the centrifugal locking mechanism is symmetrical about the centrifugal overload direction of the small-caliber bomb; aiming at different launching environments of small-caliber bullets, the centrifugal locking mechanism comprises a plurality of pairs of centrifugal locking cantilever beams with different widths, and the allowable stress of each pair of centrifugal locking cantilever beams corresponds to the centrifugal overload of one launching environment; in a certain launching environment, the allowable stress of the recoil safety mechanism is less than the recoil overload, and the allowable stress of the centrifugal locking mechanism is greater than the recoil overload and less than the centrifugal overload; the mode control mechanism comprises a plurality of fusing mechanisms, each fusing mechanism is arranged on one backseat safety cantilever beam or one centrifugal latching cantilever beam, and each fusing mechanism is electrically connected to an external instruction device; the explosion-proof sliding block is provided with an explosion transmission hole; the MEMS security system has a security state and an attack state; before the small-caliber bomb is not launched, the MEMS safety system is in a safe state, the explosion-proof sliding block is fixed with the centrifugal locking mechanism through the recoil safety mechanism, and the explosion-conducting hole and the initiating explosive are staggered; according to the recoil overload and the centrifugal overload of the launching environment, a recoil safety cantilever beam and a centrifugal latching cantilever beam in corresponding modes are selected, an external instruction device sends a fusing instruction to a mode control mechanism, and the fusing mechanism fuses the recoil safety cantilever beam and the centrifugal latching cantilever beam in other modes; when the small-caliber bomb is ignited and launched, the small-caliber bomb starts to generate displacement under the action of huge chamber pressure in the launching tube and rotates at a high speed under the action of rifling in the launching tube, the explosion-proof sliding block senses that the recoil in the launching direction is overloaded to generate displacement, and the recoil safety mechanism is sensitive to the launching direction of the small-caliber bomb, so that the small-caliber bomb is broken; after the small-caliber bullet enters an outer ballistic environment, the bullet body is in a high-rotation state, and when the rotating speed of the small-caliber bullet reaches a preset setting range, the centrifugal locking mechanism is broken; the explosion-proof sliding block is separated from restraint, and is displaced under the centrifugal overload action of the small-caliber bomb, the explosion-proof sliding block limiting pin is clamped into the explosion-proof sliding block limiting groove, so that the explosion-proof sliding block is locked on the safety system outer frame, the explosion transfer hole is aligned with the initiating explosive, and the explosion state is achieved, and the safety and reliable solution of the small-caliber bomb are achieved.
The shape of the recoil safety cantilever beam is a structure with a narrow middle part and two wide ends, and the recoil safety cantilever beam is in an axial symmetry shape, two wide sides of the recoil safety cantilever beam are rectangles, the middle of the recoil safety cantilever beam is a rectangle with a small wide side, and the recoil safety cantilever beam is connected by two isosceles trapezoids with opposite bottom edges. The allowable stress of the recoil safety cantilever beam is determined by the width. The backseat overload is corresponding to the backseat overload under different emission environments, the backseat safety mechanism comprises a plurality of backseat safety cantilever beams with different widths, and the allowable stress of the backseat safety cantilever beams is just lower than the backseat overload of the emission environment aiming at one emission environment.
The centrifugal locking cantilever beam is in a bent structure and is broken under the action of centrifugal overload. The allowable stress of the centrifugal locking cantilever beam is determined by the width. The centrifugal locking mechanism comprises a plurality of centrifugal locking cantilever beams with different widths, and the allowable stress of the centrifugal locking cantilever beams is just lower than the centrifugal overload of a launching environment but higher than the recoil overload of the launching environment for the launching environment.
The MEMS safety system is made of semiconductor materials, and the thickness of the MEMS safety system is 300-500 mu m.
The height of the upper surface and the lower surface of the explosion-proof sliding block, which is lower than the surface of the safety system outer frame, is 10-30 microns.
The fusing mechanism adopts heating metal wires, such as copper and other materials with lower melting points.
The anti-shake safety system further comprises a primary anti-shake device and a secondary anti-shake device, wherein side flexible material buffer layers are respectively arranged at the inner edges of two sides of the safety system outer frame, arc-shaped side bulges are arranged at two sides of the flame-proof sliding block and are in light contact with the side flexible material buffer layers, and the side flexible material buffer layers and the side bulges form the primary anti-shake device; the inner edges of two sides of the flame-proof sliding block limiting groove are respectively provided with a front end flexible material buffer layer, two sides of the flame-proof sliding block limiting pin are provided with arc-shaped front end bulges which are in light contact with the front end flexible material buffer layer, and the front end flexible material buffer layer and the front end bulges form a secondary anti-shaking device; the explosion-proof slide block limiting pin is clamped into the explosion-proof slide block limiting groove, the explosion transfer hole is aligned with the primary explosive, and the explosion transfer hole enters an attack state, and the primary anti-shaking device and the secondary anti-shaking device ensure that the explosion-proof slide block cannot shake, so that the safety and the reliable protection of the small-caliber bomb are realized.
The side flexible material buffer layer and the front flexible material buffer layer are made of flexible film materials, Polyimide (PI) or silicon rubber (PDMS).
The packaging layer is packaged on one surface of the double-end fixed support limit frame of the safety system through anodic bonding; the packaging layer is made of an insulating material and has a thickness of 300-500 μm. The packaging layer is provided with an energy output hole which is opposite to the primary explosive of the small-caliber bomb.
Another object of the present invention is to provide a method for implementing a single-aperture MEMS security system.
The invention discloses a method for realizing a single-aperture universal MEMS safety system, which comprises the following steps:
1) before the small-caliber bomb is not launched, the MEMS safety system is in a safe state, the explosion-proof sliding block is fixed through a recoil safety mechanism and a centrifugal locking mechanism, and the explosion-proof hole and the initiating explosive are staggered;
2) according to the recoil overload and the centrifugal overload of the launching environment, a recoil safety cantilever beam and a centrifugal latching cantilever beam in corresponding modes are selected, an external instruction device sends a fusing instruction to a mode control mechanism, and the fusing mechanism fuses the recoil safety cantilever beam and the centrifugal latching cantilever beam in other modes;
3) the small-caliber bullet launching system launches and ignites;
4) the small-caliber bomb starts to generate displacement under the action of huge chamber pressure in the launching tube and rotates at high speed under the action of the rifling in the launching tube, the explosion-proof sliding block senses that the recoil in the launching direction is overloaded to generate displacement, and the recoil safety mechanism is sensitive to the launching direction of the small-caliber bomb so as to break;
5) after the small-caliber bullet enters an outer ballistic environment, the bullet body is in a high-rotation state, and when the rotating speed of the small-caliber bullet reaches a preset setting range, the centrifugal locking mechanism is broken;
6) the explosion-proof sliding block is separated from restraint, and is displaced under the centrifugal overload action of the small-caliber bomb, the explosion-proof sliding block limiting pin is clamped into the explosion-proof sliding block limiting groove, so that the explosion-proof sliding block is locked on the safety system outer frame, the explosion transfer hole is aligned with the initiating explosive, and the explosion transfer sliding block enters an attack state.
Still another object of the present invention is to provide a method for manufacturing a MEMS security system for single aperture universal use.
The preparation method of the single-aperture universal MEMS safety system comprises the following steps:
1) providing a semiconductor material;
2) photoetching, selecting the position of an outer frame of the safety system and an action area of the flame-proof sliding block, wherein the MEMS safety system is in a safe state to an attack state, and the movement area of the flame-proof sliding block is called as the action area;
3) forming the position of the safety system outer frame and the action area of the explosion-proof sliding block through etching;
4) aiming at the action area of the flame-proof sliding block, etching the semiconductor material by an etching process to form a height difference between the upper surface and the lower surface of the flame-proof sliding block and the surface of the safety system double-end fixed support limit frame;
5) the explosion-proof slide block limiting pin, the explosion-proof slide block limiting groove, the recoil safety mechanism, the centrifugal locking mechanism and the explosion transmission hole are realized through photoetching and dry etching processes;
6) and processing a material with low melting point on the back surface of the MEMS safety system by using a sputtering process to form the fusing mechanism.
Further, the packaging layer is further included, and the packaging method comprises the following steps:
a) providing an encapsulation layer material;
b) forming a pattern of energy output holes on the surface of the packaging layer material;
c) punching the packaging layer to form an energy output hole, wherein the position of the energy output hole is opposite to the primary explosive of the small-caliber bomb;
d) encapsulating the structure formed in step 6) with an encapsulation layer by anodic bonding.
In the step 4), the height difference is 10-30 μm, the movement flexibility of the flame-proof sliding block is improved, and the position selection of the flame-proof sliding block limiting groove on the double-end fixed support limiting frame of the safety system, the action area of the flame-proof sliding block, the rear seat overload threshold value judging mechanism and the centrifugal overload threshold value judging mechanism is realized.
The packaging layer is made of an insulating material and has a thickness of 300-500 μm.
The invention has the advantages that:
according to different launching environments, a plurality of cantilever beams with different widths are arranged in a backseat safety mechanism and a centrifugal locking mechanism, and an external instruction device controls a mode control mechanism to select the cantilever beams under a specific launching environment in combination with a mode control mechanism; aiming at the action process of the small-caliber bomb, a primary anti-shaking device and a secondary anti-shaking device are arranged, and the application of a flexible material is combined, so that the shaking in the launching process of the bomb is ensured not to influence the normal work of the bomb.
Drawings
FIG. 1 is a schematic diagram of one embodiment of a single aperture universal MEMS security system of the present invention;
FIG. 2 is a rear view of one embodiment of a single aperture universal MEMS security system of the present invention;
fig. 3(a) - (h) are flow charts of a method of making an embodiment of a single aperture universal MEMS security system of the present invention.
Detailed Description
The invention will be further elucidated by means of specific embodiments in the following with reference to the drawing.
The MEMS security system of the present embodiment is directed to three launching environments for small caliber projectiles: 30mm grenades, tall projectiles and semi-armor piercing projectiles.
As shown in fig. 1 and 2, the single-aperture general MEMS security system of the present embodiment includes: the explosion-proof safety system comprises a safety system outer frame 1, an explosion-proof sliding block 2, an explosion-proof sliding block limiting pin 3, an explosion-proof sliding block limiting groove 4, a recoil safety mechanism 5, a centrifugal locking mechanism 6, a mode control mechanism 7, a primary anti-vibration device 8, a secondary anti-vibration device 9 and an explosion transfer hole 10; the safety system outer frame 1 is a supporting frame with a hollow inner part; the flame-proof sliding block 2 is positioned in the safety system outer frame 1, the outer edge of the flame-proof sliding block 2 is smaller than the inner edge of the safety system outer frame 1, and the upper surface and the lower surface of the flame-proof sliding block 2 are lower than the surface of the safety system outer frame 1; the front end of the flame-proof sliding block 2 is provided with a flame-proof sliding block limiting pin 3, the flame-proof sliding block limiting pin 3 is opposite to the flame-proof sliding block limiting pin 3 in position, the inner edge of the front end of the safety system outer frame 1 is provided with a flame-proof sliding block limiting groove 4, the flame-proof sliding block limiting groove 4 and the flame-proof sliding block limiting pin 3 are in complementary patterns, and the safety system outer frame 1 and the flame-proof sliding block 2 are symmetrical about the centrifugal overload direction; two sides of the flame-proof sliding block 2 are fixedly connected to the inner edge of the safety system outer frame 1 through two pairs of backseat safety mechanisms 5, and the two pairs of backseat safety mechanisms 5 are symmetrical about the centrifugal overload direction of the small-caliber bomb and are also symmetrical about the centrifugal overload direction perpendicular to the small-caliber bomb; aiming at different small-caliber bullet launching environments, each recoil safety mechanism 5 comprises three recoil safety cantilever beams with different widths, and the allowable stress of each recoil safety cantilever beam corresponds to recoil overload of one launching environment; the rear end of the flame-proof slide block 2 is fixedly connected to the inner edge of the rear end of the safety system outer frame 1 through a centrifugal locking mechanism 6, and the centrifugal locking mechanism 6 is symmetrical about the centrifugal overload direction of the small-caliber bomb; aiming at different launching environments of small-caliber bullets, the centrifugal locking mechanism 6 comprises three pairs of centrifugal locking cantilever beams with different widths, and the allowable stress of each pair of centrifugal locking cantilever beams corresponds to the centrifugal overload of one launching environment; in a certain bullet launching environment, the allowable stress of the recoil safety mechanism 5 is less than the recoil overload, and the allowable stress of the centrifugal locking mechanism 6 is greater than the recoil overload and less than the centrifugal overload; corresponding to each recoil insurance cantilever beam and each centrifugal locking cantilever beam, the mode control mechanism 7 comprises a plurality of fusing mechanisms, each fusing mechanism is arranged on one recoil insurance cantilever beam or one centrifugal locking cantilever beam, and each fusing mechanism is electrically connected to an external instruction device; the explosion-proof slide block 2 is provided with an explosion transmission hole 10; the inner edges of two sides of the safety system outer frame 1 are respectively provided with a side edge flexible material buffer layer, two sides of the flame-proof slide block 2 are provided with arc-shaped side edge bulges which are in light contact with the side edge flexible material buffer layers, and the side edge flexible material buffer layers and the side edge bulges form a primary anti-shake device 8; the inner edges of two sides of the flame-proof sliding block limiting groove 4 are respectively provided with a front end flexible material buffer layer, two sides of the flame-proof sliding block limiting pin 3 are provided with arc-shaped front end protrusions which are in light contact with the front end flexible material buffer layer, and the front end flexible material buffer layer and the front end protrusions form a secondary anti-shaking device 9.
The implementation method of the single-aperture general MEMS safety system comprises the following steps:
1) before the small-caliber bomb is not launched, the MEMS safety system is in a safe state, the explosion-proof sliding block is fixed through a recoil safety mechanism and a centrifugal locking mechanism, and the explosion-proof hole and the initiating explosive are staggered;
2) according to the recoil overload and the centrifugal overload of the launching environment, a recoil safety cantilever beam and a centrifugal latching cantilever beam in corresponding modes are selected, an external instruction device sends a fusing instruction to a mode control mechanism, and the fusing mechanism fuses the recoil safety cantilever beam and the centrifugal latching cantilever beam in other modes;
3) the small-caliber bullet launching system launches and ignites;
4) the small-caliber bomb starts to generate displacement under the action of huge chamber pressure in the launching tube and rotates at high speed under the action of the rifling in the launching tube, the explosion-proof sliding block senses that the recoil in the launching direction is overloaded to generate displacement, and the recoil safety mechanism is sensitive to the launching direction of the small-caliber bomb so as to break;
5) after the small-caliber bullet enters an outer ballistic environment, the bullet body is in a high-rotation state, and when the rotating speed of the small-caliber bullet reaches a preset setting range, the centrifugal locking mechanism is broken;
6) the explosion-proof sliding block is separated from restraint, and is displaced under the centrifugal overload action of the small-caliber bomb, and the explosion-proof sliding block limiting pin is clamped into the explosion-proof sliding block limiting groove, so that the explosion-proof sliding block is locked on the safety system outer frame, the explosion transfer hole is aligned with the initiating explosive, and the explosion transfer sliding block enters an attack state;
7) the primary anti-shaking device and the secondary anti-shaking device ensure that the explosion-proof sliding block cannot shake, so that the safety and the reliable solution of the small-caliber bomb are realized.
The preparation method of the single-aperture general MEMS safety system comprises the following steps:
1) providing a semiconductor material with a crystal orientation of (100) double-polished polysilicon and a thickness of 500 μm, as shown in FIG. 3 (a);
2) photoetching, selecting the position of an outer frame of the safety system and an action area of the flame-proof sliding block, wherein the MEMS safety system is switched from a safety state to an attack state, and the movement area of the flame-proof sliding block is called as the action area, as shown in fig. 3 (b);
3) forming the position of the safety system outer frame and the action area of the explosion-proof sliding block by Deep Reactive Ion Etching (DRIE);
4) aiming at the action area of the flame-proof sliding block, etching the semiconductor material by an Inductively Coupled Plasma (ICP) etching process to form a height difference of 25 microns between the upper surface and the lower surface of the flame-proof sliding block and the surface of the safety system double-end fixed support limiting frame, as shown in figure 3 (c);
5) forming a pattern by photoetching, as shown in fig. 3(d), and implementing a rear explosion-proof slide block limiting pin, an explosion-proof slide block limiting groove, a recoil safety mechanism, a centrifugal locking mechanism and an explosion transfer hole by a DRIE dry etching process, as shown in fig. 3 (e);
6) the fusing mechanism is formed on the back of the MEMS safety system by using a sputtering process and Cu with low melting point, and the fusing mechanism is formed on the back of the MEMS safety system by using a sputtering process
3 (f);
7) packaging the packaging layer:
a) providing a bulk glass with a thickness of 500 μm as an encapsulating layer material, as shown in FIG. 3 (g);
b) photoetching, selecting the position of an energy output hole on a glass substrate, carrying out laser drilling, realizing that the expanded glass forms the energy output hole through a laser drilling process, and enabling the position to be over against the primary explosive of the small-caliber bomb, as shown in figure 3 (h);
c) encapsulating the structure formed in step 6) with an encapsulation layer by anodic bonding.
Finally, it is noted that the disclosed embodiments are intended to aid in further understanding of the invention, but those skilled in the art will appreciate that: various substitutions and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the invention should not be limited to the embodiments disclosed, but the scope of the invention is defined by the appended claims.
Claims (10)
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| CN110132073B (en) * | 2019-05-20 | 2020-05-15 | 北京理工大学 | A kind of long-distance deprotection MEMS safety system of small-caliber projectile and its realization method |
| CN110285725B (en) * | 2019-05-31 | 2020-07-10 | 北京理工大学 | Heterogeneous integrated safety system applied to small-caliber bomb and implementation method thereof |
| CN110132074B (en) * | 2019-06-12 | 2020-06-26 | 北京理工大学 | A recoverable electromagnetic MEMS safety system applied to ammunition and its realization method |
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| GB2491225B (en) * | 2010-03-16 | 2013-05-01 | Qinetiq Ltd | MEMS detonator |
| FR2962210A1 (en) * | 2010-07-02 | 2012-01-06 | Nexter Munitions | INTEGRAL SECURITY AND ARMING DEVICE WITH MEMS TECHNOLOGY |
| CN104613828B (en) * | 2015-02-05 | 2016-03-02 | 北京理工大学 | A kind of centrifugal insurance institution of the MEMS for rotating ammunition and insurance method thereof |
| US9441931B1 (en) * | 2015-09-29 | 2016-09-13 | The United States Of America As Represented By The Secretary Of The Navy | MEMS rotary fuze architecture for out-of-line applications |
| CN107830773B (en) * | 2017-10-09 | 2019-06-14 | 北京理工大学 | A thin MEMS motion control integrated device and gunpowder actuator |
| CN108413820A (en) * | 2018-05-10 | 2018-08-17 | 孝感锐创机械科技有限公司 | A kind of electromagnetic centrifugal double control priming device |
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