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CN109141294A - A kind of angle measuring sensor and its scaling method and measurement method - Google Patents

A kind of angle measuring sensor and its scaling method and measurement method Download PDF

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Publication number
CN109141294A
CN109141294A CN201811255767.3A CN201811255767A CN109141294A CN 109141294 A CN109141294 A CN 109141294A CN 201811255767 A CN201811255767 A CN 201811255767A CN 109141294 A CN109141294 A CN 109141294A
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laser beam
angle
laser
mirror
incident
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康学亮
张白
张巍巍
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North Minzu University
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North Minzu University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

本发明涉及一种角度测量传感器及其标定方法与测量方法,所述角度测量传感器包括:激光器,用于射出激光束;可随被测物体同步转动的反射镜,用于接收所述激光器射出的激光束,并使该激光束反射至折射镜;所述折射镜,用于使所述反射镜反射的激光束发生折射,并射出;光电探测器,用于接收从所述折射镜折射出的激光束,并测量其入射位置;处理系统,用于根据光电探测器接收到的激光束的入射位置变化量计算出被测物体的转动角度。本传感器通过折射镜对反射的激光束进行折射从而对转动前后的反射角的变化进行放大,最后通过激光在光电探测器上入射位置的变化,从而计算出被测物体的转动角度。

The invention relates to an angle measurement sensor and its calibration method and measurement method. The angle measurement sensor comprises: a laser, which is used for emitting a laser beam; a laser beam, and reflect the laser beam to a refractor; the refractor is used to refract the laser beam reflected by the reflector and emit it; a photodetector is used to receive the refracted laser beam from the refractor laser beam, and measure its incident position; the processing system is used to calculate the rotation angle of the measured object according to the variation of the incident position of the laser beam received by the photodetector. The sensor refracts the reflected laser beam through a refractor to amplify the change of the reflection angle before and after the rotation, and finally calculates the rotation angle of the measured object through the change of the incident position of the laser on the photodetector.

Description

A kind of angle measuring sensor and its scaling method and measurement method
Technical field
The present invention relates to field of measuring technique, and in particular to a kind of angle measuring sensor and its scaling method and measurement side Method.
Background technique
Currently, in the field of high-precision measurement of low-angle, optical means is widely used and measures, such as optics indexing Head method, polygon method, diffraction approach, autocollimation method, Fiber Optic Sensor, acousto-optic modulation method, optical internal-reflection method, laser interferance method, ring Shape laser method etc..But such method measuring range is small, and at high cost, structure is relative complex.
Summary of the invention
It is an object of the invention to improve the deficiency in the presence of the prior art, a kind of angle measuring sensor is provided.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of angle measuring sensor, comprising:
Laser is used for outgoing laser beam;
The reflecting mirror that can be rotated synchronously with testee, the laser beam projected for receiving the laser, and swash this Light beam reflexes to refracting telescope;
The refracting telescope for reflecting the laser beam of the reflecting mirror reflection, and projects;
Photodetector for receiving the laser beam reflected from the refracting telescope, and measures its incoming position;
The incoming position variable quantity of processing system, the laser beam for being received according to photodetector calculates measured object The rotational angle of body.
In further embodiment, the reflecting mirror is mounted on testee.Guarantee the rotation of reflecting mirror and testee Gyration is consistent.
In further embodiment, the laser beam is incident to the rotation midpoint of the reflecting mirror.Guarantee that laser beam is incident In the same point on reflecting mirror, prevent the incidence point difference under the same optical path of laser beam on the mirror to the measurement to angle It causes a deviation.
In further embodiment, the refracting telescope is prism.
In further embodiment, the prism includes prism facets one and prism facets two, and the laser beam injects prism Face one, and reflect;Prism facets two receive the laser beam that prism facets one reflect, and laser are reflected again, and make Laser beam is projected from prism facets two.
In further embodiment, the prism facets one connect with prism facets two, the prism facets one and prism facets two-phase The angle connect is acute angle.
In further embodiment, the angle that the laser beam is incident in prism facets one is acute angle.Guarantee laser beam in rib The refraction that refraction angle twice is not 0 occurs in mirror, so that location variation obtains secondary amplification.
On the other hand, the present invention proposes the location variation and angle of rotation scale of a kind of above-mentioned angle measuring sensor simultaneously Determine method, steps are as follows:
Step 1:
Reflecting mirror is set on testee, so that reflecting mirror can be run simultaneously with testee;
Step 2:
The positional relationship for adjusting laser, reflecting mirror, refracting telescope and photodetector is guaranteeing reflecting mirror in rotation process In, in the case that laser light incident point is same position, so that the laser beam that laser projects is incident to reflecting mirror, it is anti-through reflecting mirror It is incident to refracting telescope after penetrating, is received by a photoelectric detector after refracting telescope reflects;
Step 3:
Given rotational angle α 1, α 2, α 3 ... α n record the photoelectric probe position variable quantity under corresponding rotational angle, lead to Cross the formula that nonlinear fitting obtains rotational angle and photoelectric probe position variable quantity.
On the other hand, the present invention proposes a kind of measurement method of above-mentioned angle measuring sensor simultaneously, comprising the following steps:
Reflecting mirror is set on testee, so that reflecting mirror can be run simultaneously with testee;
The positional relationship for adjusting laser, reflecting mirror, refracting telescope and photodetector is guaranteeing reflecting mirror in rotation process In, in the case that laser light incident point is same position, so that the laser beam that laser projects is incident to reflecting mirror, it is anti-through reflecting mirror It is incident to refracting telescope after penetrating, is received by a photoelectric detector after refracting telescope transmits;
Testee is rotated, and the laser beam that laser emits in rotation process is along same optic path to reflecting mirror Same position, and by mirror reflection to prism;
The location variation of the incident ray received in the process of running according to photodetector calculates testee Rotational angle.
Compared with prior art, the invention has the following advantages: the present invention according to along with laser beam same anti- The incidence angle penetrated on mirror is different, and angle of reflection is also different, and carries out refraction by laser beam of the refracting telescope to reflection to rotation The variation of the angle of reflection of front and back amplifies, finally by the variation of laser incoming position on photodetector, to calculate The rotational angle of testee out.Measurement structure of the present invention is simple, at low cost, and measurement accuracy is significantly increased compared with conventional method.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this A little attached drawings obtain other relevant attached drawings.
Fig. 1 is a kind of structural schematic diagram for angle measuring sensor that the embodiment of the present invention 1 provides;
Fig. 2 is a kind of schematic diagram for angle measuring sensor that the embodiment of the present invention 1 provides;
Description of symbols in figure
Laser 1, laser beam 2, reflecting mirror 3, refracting telescope 4, photodetector 5, prism facets 1, prism facets 2 42.
Specific embodiment
Below in conjunction with attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Usually exist The component of the embodiment of the present invention described and illustrated in attached drawing can be arranged and be designed with a variety of different configurations herein.Cause This, is not intended to limit claimed invention to the detailed description of the embodiment of the present invention provided in the accompanying drawings below Range, but it is merely representative of selected embodiment of the invention.Based on the embodiment of the present invention, those skilled in the art are not doing Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.
Referring to Fig. 1, the present embodiment schematically discloses a kind of angle measuring sensor, comprising: laser 1, laser Beam 2, reflecting mirror 3, refracting telescope 4, photodetector 5.In the present solution, laser 1, is used for outgoing laser beam 2;It can be with measured object The reflecting mirror 3 that body rotates synchronously, the laser beam 2 projected for receiving the laser 1, and the laser beam 2 is made to reflex to refraction Mirror 4;The refracting telescope 4, the laser beam 2 for reflecting the reflecting mirror 3 reflects, and projects;Photodetector 5.With In the laser beam 2 that reception is reflected from the refracting telescope 4, and measure its incoming position.Processing system, for being visited according to photoelectricity The incoming position variable quantity for surveying the laser beam 2 that device 5 receives calculates the rotational angle of testee.
The refracting telescope 4 described in further embodiment is prism.
Still further, the prism includes prism facets 1 and prism facets 2 42, the laser beam 2 injects refracting telescope 4 prism facets 1, and reflect, when the laser beam 2 after reflecting injects prism facets 2 42, prism facets 2 42 to swash Light reflects again, and projects laser beam 2 from prism facets 2 42.
Its principle is as shown in Figure 2, is reflected twice using prism to laser beam, so that laser beam on photodetector Reception positional distance amplified so that the rotational angle variable quantity of testee is amplified, realizing that improving angle surveys Measurement arm is reduced while accuracy of measurement.
As shown in Figure 1, arrow direction is the rotation direction of testee and reflecting mirror, in addition, photoelectric sensor is used PSD, the reflecting mirror and laser beam before rotation are indicated by the solid line, and the reflecting mirror after rotation is represented by dashed line with laser beam, laser beam Transmission path is as follows:
Before rotation, laser 1 emits laser beam 2, and the laser beam 2 reflexes to the prism facets one of refracting telescope 4 through reflecting surface 3 41, and reflect, prism facets 2 42 are incident to, prism facets 2 42 make laser beam 2 occur to reflect again and are incident to photoelectricity Detector 5.Photodetector 5 receives the laser beam 2 for reflecting and projecting through prism facets 2 42, and measures its incoming position, at this time It is denoted as the first incoming position.
After rotation, laser 1 emits laser beam 2, and the laser beam 2 reflexes to the prism facets one of refracting telescope 4 through reflecting surface 3 41, and reflect, prism facets 2 42 are incident to, prism facets 2 42 make laser beam 2 occur to reflect again and are incident to photoelectricity Detector 5.Photodetector 5 receives the laser beam for reflecting and projecting through prism facets 2 42, and measures its incoming position, remembers at this time For the second incoming position.
The location variation that incident ray can be obtained according to the first incoming position and the second incoming position, can calculate The rotational angle of testee.
Since rotational angle and location variation belong to non-linear relation, the present invention proposes a kind of above-mentioned angle measurement simultaneously The location variation and rotational angle scaling method of sensor, steps are as follows:
Step 1:
Reflecting mirror is set on testee, so that reflecting mirror can be run simultaneously with testee;
Step 2:
The positional relationship for adjusting laser, reflecting mirror, refracting telescope and photodetector is guaranteeing reflecting mirror in rotation process In, in the case that laser light incident point is same position, so that the laser beam that laser projects is incident to reflecting mirror, it is anti-through reflecting mirror It is incident to refracting telescope after penetrating, is received by a photoelectric detector after refraction by prism mirror;
Step 3:
Given rotational angle α 1, α 2, α 3 ... α n record the photoelectric probe position variable quantity under corresponding rotational angle, lead to Cross the formula that nonlinear fitting obtains rotational angle and photoelectric probe position variable quantity.
The rotation midpoint of the reflecting mirror 3 is incident to as one kind preferably embodiment, laser beam 2.Guarantee to swash Light beam 2 is incident in the same point on reflecting mirror 3, prevent incidence point difference under the same optical path of laser beam 2 on reflecting mirror 3 to It causes a deviation to the measurement of angle.
It is mounted on testee as one kind preferably embodiment, reflecting mirror 3.Guarantee reflecting mirror 3 and is tested The rotation angle of object is consistent.
Connect as one kind preferably embodiment, prism facets 1 with prism facets 2 42, the prism facets 1 The angle to connect with prism facets 2 42 is acute angle.In the incident refracting telescope 4 of guarantee laser beam 2, refracting telescope 4 sends out the laser beam 2 Raw refraction, and after being shot out, laser beam 2 still can not limit prism facets 1 and prism in the case where incident photodetector 5 The angle degree in face 2 42.
As a kind of preferably embodiment, the angle that the laser beam 2 is incident in prism facets 1 is acute angle.To make It obtains location variation and obtains secondary amplification.The refraction that refraction angle twice is not 0 occurs in refracting telescope 4 in guarantee laser beam 2 In the case where, unlimited controlling laser beam 2 is incident in the angle degree of prism facets 1.
The angle measuring sensor provided in above-mentioned the present embodiment realizes that entire angle measurement is sensed based on refracting telescope The structure of device is simple, at low cost, and measurement accuracy is high.
Based on above-mentioned angle measuring sensor, measurement method the following steps are included:
Reflecting mirror is set on testee, so that reflecting mirror can be run simultaneously with testee;
The positional relationship for adjusting laser, reflecting mirror, refracting telescope and photodetector is guaranteeing reflecting mirror in rotation process In, in the case that laser light incident point is same position, so that the laser beam that laser projects is incident to reflecting mirror, it is anti-through reflecting mirror It is incident to refracting telescope after penetrating, is received by a photoelectric detector after refracting telescope transmits;
Testee is rotated, and the laser beam that laser emits in rotation process is along same optic path to reflecting mirror Same position, and by mirror reflection to prism;
The location variation of the incident ray received in the process of running according to photodetector calculates testee Rotational angle.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention, for this field skill For art personnel, it is clear that invention is not limited to the details of the above exemplary embodiments, and without departing substantially from spirit of the invention or In the case where essential characteristic, the present invention can be realized in other specific forms.Therefore, in all respects, should all incite somebody to action Embodiment regards exemplary as, and is non-limiting, the scope of the present invention by appended claims rather than on state Bright restriction, it is intended that including all changes that fall within the meaning and scope of the equivalent elements of the claims in the present invention It is interior.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (9)

1.一种角度测量传感器,其特征在于,包括:1. an angle measurement sensor, is characterized in that, comprises: 激光器,用于射出激光束;Laser, for emitting a laser beam; 可随被测物体同步转动的反射镜,用于接收所述激光器射出的激光束,并使该激光束反射至折射镜;A reflector that can rotate synchronously with the object to be measured is used to receive the laser beam emitted by the laser and reflect the laser beam to the refractor; 所述折射镜,用于使所述反射镜反射的激光束发生折射,并射出;the refractor mirror is used to refract the laser beam reflected by the mirror and emit it; 光电探测器,用于接收从所述折射镜中折射出的激光束,并测量其入射位置;a photodetector for receiving the laser beam refracted from the refracting mirror and measuring its incident position; 处理系统,用于根据光电探测器接收到的激光束的入射位置变化量计算出被测物体的转动角度。The processing system is used for calculating the rotation angle of the measured object according to the incident position variation of the laser beam received by the photodetector. 2.根据权利要求1所述的角度测量传感器,其特征在于,所述反射镜安装在被测物体上。2 . The angle measurement sensor according to claim 1 , wherein the reflector is mounted on the object to be measured. 3 . 3.根据权利要求1所述的角度测量传感器,其特征在于,所述激光束入射至所述反射镜的旋转中点。3 . The angle measurement sensor according to claim 1 , wherein the laser beam is incident on the rotation midpoint of the mirror. 4 . 4.根据权利要求1所述的角度测量传感器,其特征在于,所述折射镜为三棱镜。4. The angle measurement sensor according to claim 1, wherein the refractor is a triangular prism. 5.根据权利要求4所述的角度测量传感器,其特征在于,所述三棱镜包括棱镜面一与棱镜面二,所述激光束射入棱镜面一,并发生折射;棱镜面二接收棱镜面一折射的激光束,并使得激光再次发生折射,且使激光束从棱镜面二射出。5 . The angle measuring sensor according to claim 4 , wherein the triangular prism comprises a prism face 1 and a prism face 2, the laser beam enters the prism face 1 and is refracted; the prism face 2 receives the prism face 1. 6 . The refracted laser beam is refracted again, and the laser beam is emitted from the second prism surface. 6.根据权利要求5所述的角度测量传感器,其特征在于,所述棱镜面一与棱镜面二相接,所述棱镜面一与棱镜面二相接的夹角为锐角。6 . The angle measuring sensor according to claim 5 , wherein the first prism surface is connected to the second prism surface, and the included angle between the first prism surface and the second prism surface is an acute angle. 7 . 7.根据权利要求5所述的角度测量传感器,其特征在于,所述激光束入射于棱镜面一的角度为锐角。7 . The angle measuring sensor according to claim 5 , wherein the angle at which the laser beam is incident on the first prism surface is an acute angle. 8 . 8.根据权利要求1-7任一所述的角度测量传感器的位置变化量与转动角度标定方法,其特征在于,步骤如下:8. The method for calibrating the position variation and rotation angle of the angle measurement sensor according to any one of claims 1-7, wherein the steps are as follows: 步骤一:在被测物体上设置反射镜,使得反射镜可与被测物体同步运行;Step 1: Set a reflector on the object under test, so that the reflector can run synchronously with the object under test; 步骤二:调整激光器、反射镜、折射镜与光电探测器的位置关系,在保证反射镜在转动过程中,激光入射点为同一位置的情况下,使得激光器射出的激光束入射至反射镜,经反射镜反射后入射至折射镜,经折射镜折射后被光电探测器接收;Step 2: Adjust the positional relationship between the laser, the mirror, the refractor and the photodetector, and ensure that the laser incident point is at the same position during the rotation of the mirror, so that the laser beam emitted by the laser is incident on the mirror. After reflection by the reflector, it is incident on the refractor, and then received by the photodetector after being refracted by the refractor; 步骤三:给定转动角度α1、α2、α3…αn,记录对应转动角度下的光电探测器位置变化量,通过非线性拟合获得转动角度与光电探测器位置变化量的公式。Step 3: Given the rotation angles α1, α2, α3...αn, record the position change of the photodetector under the corresponding rotation angle, and obtain the formula of the rotation angle and the position change of the photodetector through nonlinear fitting. 9.根据权利要求1-8任一所述的角度测量传感器的测量方法,其特征在于,包括以下步骤:9. The measuring method of the angle measuring sensor according to any one of claims 1-8, characterized in that, comprising the following steps: 在被测物体上设置反射镜,使得反射镜可与被测物体同步运行;A mirror is set on the measured object, so that the mirror can run synchronously with the measured object; 调整激光器、反射镜、折射镜与光电探测器的位置关系,在保证反射镜在转动过程中,激光入射点为同一位置的情况下,使得激光器射出的激光束入射至反射镜,经反射镜反射后入射至折射镜,经折射镜折射后被光电探测器接收;Adjust the positional relationship between the laser, the mirror, the refractor and the photodetector, so that the laser beam emitted by the laser is incident on the mirror and reflected by the mirror under the condition that the incident point of the laser is at the same position during the rotation of the mirror. Then it is incident on the refractor, and is received by the photodetector after being refracted by the refractor; 被测物体进行转动,且转动过程中激光器发射的激光束沿同一光路传输至反射镜的同一位置,且被反光镜反射至折射镜;The object to be measured rotates, and the laser beam emitted by the laser during the rotation is transmitted to the same position of the reflector along the same optical path, and is reflected by the reflector to the refractor; 根据光电探测器在运行过程中接收到的入射光线的位置变化量计算被测物体的转动角度。Calculate the rotation angle of the measured object according to the position change of the incident light received by the photodetector during operation.
CN201811255767.3A 2018-10-26 2018-10-26 A kind of angle measuring sensor and its scaling method and measurement method Pending CN109141294A (en)

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Publication number Priority date Publication date Assignee Title
CN112731340A (en) * 2019-10-14 2021-04-30 上海禾赛科技股份有限公司 Angle measuring method, reflector system and laser radar
CN111122130A (en) * 2020-01-17 2020-05-08 商丘师范学院 Device and method for measuring refractive index of prism based on mobile phone APP
CN112833823A (en) * 2021-02-23 2021-05-25 北方民族大学 A new type of sensor based on time measuring angle and its angle measuring method
CN112923873A (en) * 2021-03-11 2021-06-08 北方民族大学 A laser scanning device and angle measuring sensor and method based on laser scanning

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