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CN109136864B - Method for vacuum coating of aluminum-tin composite coating on surface of magnetic steel - Google Patents

Method for vacuum coating of aluminum-tin composite coating on surface of magnetic steel Download PDF

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CN109136864B
CN109136864B CN201810955365.8A CN201810955365A CN109136864B CN 109136864 B CN109136864 B CN 109136864B CN 201810955365 A CN201810955365 A CN 201810955365A CN 109136864 B CN109136864 B CN 109136864B
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magnetic steel
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coating
aluminum
tin
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CN109136864A (en
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史丙强
周彬
魏蕊
李岩
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Yantai Zhenghai Magnetic Material Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5893Mixing of deposited material

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  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
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  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Hard Magnetic Materials (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to a method for vacuum coating an aluminum-tin composite coating on the surface of magnetic steel, which comprises the following steps of (1) sequentially carrying out degreasing, polishing and rust removal and high-temperature baking on the surface of the magnetic steel; (2) vacuum aluminizing is carried out on the magnetic steel; (3) carrying out vacuum tin plating on the magnetic steel; (4) the method integrates the advantages of vacuum evaporation and sputtering, and solves the problems of bonding force production and efficiency by adopting vacuum evaporation; the compactness of tin solves the defects of poor quality, low compactness and poor corrosion resistance of a vacuum evaporation coating layer; the same equipment is used for evaporating the aluminum tin, so that the equipment cost is reduced, no harmful substance is discharged in the whole production process, and the environment is protected.

Description

Method for vacuum coating of aluminum-tin composite coating on surface of magnetic steel
Technical Field
The invention relates to a production method of a composite coating, in particular to a method for vacuum plating a tin composite coating on the surface of magnetic steel, and belongs to the technical field of composite coatings.
Background
Ferromagnetic materials that can be used to make magnetically functional devices are referred to as magnetic materials, including hard magnetic materials, soft magnetic materials, semi-hard magnetic materials, and the like, with the most useful and most widely used being hard magnetic materials and soft magnetic materials. Hard magnetic materials and soft magnetic materials mainly comprise ferrite, neodymium iron boron and samarium cobalt magnets, but have certain disadvantages in popularization, and the magnetic materials are easy to corrode in the process of contacting with air and moisture to cause performance change, so that the surface of the magnetic materials is essential to be subjected to anticorrosion treatment.
In the prior art, the method for coating the corrosion-resistant layer on the surface of the magnetic steel mainly comprises five methods:
passivation method
The passivation method is to passivate the magnetic steel by adopting phosphating solution, substance sealant, silane and the like, so that the magnetic steel reacts with the magnetic steel to generate a layer of passivation film on the surface of the magnetic steel, thereby achieving the effect of short-term corrosion prevention.
Second, electroplating method
The electroplating method is to electroplate metal coatings of zinc, nickel, copper and the like on the surface of the magnetic steel, but the coating has large corner effect and poor corrosion resistance, and the plating solution contains heavy metal and organic additives, so the environmental pollution is serious.
Chemical plating method
The chemical plating method is to deposit a layer of metal, such as nickel or copper, on the surface of the magnetic steel by means of oxidation-reduction, and the method solves the problem of large corner effect of the electroplating method, but the plating solution is difficult to maintain and has high cost, and the plating solution must be scrapped after being used for times, and has serious environmental pollution.
Spray coating and electrophoresis epoxy method
A layer of organic film such as epoxy resin, phenolic resin, modified epoxy resin and the like is formed on the surface of the magnetic steel by adopting an electrophoresis and spraying method, the salt spray resistance of the coating is good, but the PCT is poor, the bubbling is easy to occur in the test process, and the solvent volatilizes in the curing process, pollutes the environment and harms the health of operators.
Physical vapor deposition method
The physical vapor deposition method is an environment-friendly technology, has the characteristics which are not possessed by other processes, and can obtain a coating with fine crystal grains, uniform thickness and excellent film/substrate binding force by controlling the process parameters; meanwhile, PVD is a dry plating technology, so that the defects that acid or alkaline electrolyte solution remains in magnet pores during wet plating and the magnet absorbs hydrogen during electroplating to cause coating embrittlement can be avoided.
Although the vacuum evaporation plating technology has a high film forming speed, the main technical problems of poor film quality, low density, poor corrosion resistance and poor combination of the film and a base material exist. Although magnetron sputtering and arc ion plating technologies can prepare a film with good quality, compactness and good combination with a base material on the surface of the neodymium iron boron permanent magnet material, the deposition rate of the film is slow, and the equipment cost is high; although the technologies combining sputtering and vacuum evaporation can be complemented, the defects of low sputtering efficiency and poor quality of an evaporated film layer are overcome, but the industrialization of the magnetic steel surface vacuum plating protective coating technology is restricted by the defects of parallel two sets of equipment, responsible process, high investment cost and the like.
Patent 200810151059.5 reports a composite coating of magnetron sputtered metals; patents CN102031522A and CN102108510A both report a composite coating that is sprayed or phosphated after vacuum aluminizing; patent CN102368438A reports a composite coating of spray coating and vacuum plating, etc., all of which can improve the production efficiency of vacuum plating, but the invention has the disadvantages of complex process, harmful substance emission, environmental pollution and being not beneficial to mass production industrialization.
Disclosure of Invention
The invention provides a method for vacuum coating of an aluminum-tin composite coating on the surface of magnetic steel, aiming at the defects of the existing method for coating a corrosion-resistant coating on the surface of the magnetic steel.
The technical scheme for solving the technical problems is as follows:
a method for vacuum coating of an aluminum-tin composite coating on the surface of magnetic steel comprises the following steps:
1) pretreatment: sequentially degreasing, polishing and derusting the surface of the magnetic steel, and then baking for 10-30 min at the temperature of 100-150 ℃;
2) vacuum aluminum plating: cleaning and activating the pretreated magnetic steel surface by adopting multi-arc ions for 10-30 min, and then carrying out vacuum aluminizing on the magnetic steel by adopting vacuum coating equipment to obtain the magnetic steel with an aluminum coating on the surface;
3) vacuum tinning: carrying out surface cleaning and activation on the magnetic steel with the aluminum coating on the surface obtained in the step 2) for 10-30 min by adopting multi-arc ions, then heating the magnetic steel to enable the surface temperature of the magnetic steel to reach 100-200 ℃, and carrying out vacuum tin plating on the magnetic steel by adopting vacuum coating equipment to obtain the magnetic steel with the aluminum coating and the tin coating on the surface;
4) and (3) high-temperature re-curing treatment: placing the magnetic steel obtained in the step 3) under the pressure of 1x10-2~5x10-2And Pa, and the temperature is 230-320 ℃, and re-curing is carried out for 10-30 min, so that an aluminum-tin alloy protective layer is formed at the joint of the aluminum coating and the tin coating.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the vacuum coating equipment in the step 2) and the step 3) is any one of evaporation, ion plating or sputtering.
Further, vacuumizing in the step 2) and the step 3) to the pressure of 1.0x10-3-5.0x10-3Pa。
Further, the specific operation process in the step 1) is as follows: degreasing and drying the magnetic steel in an alkaline degreasing agent, polishing the magnetic steel by using a nylon diamond composite abrasive, ultrasonically deashing the magnetic steel by using a weakly acidic deashing agent at 15-30 ℃, washing the deashed magnetic steel by using pure water, treating the deashed magnetic steel by using hot water at 60-80 ℃, and finally baking the magnetic steel for 10-30 min at a high temperature of 100-150 ℃.
Further, the magnet steel is ferrite, neodymium iron boron magnet or samarium cobalt magnet.
The thickness of the aluminum film on the surface of the magnetic steel produced by the method is 2-15 mu m, the thickness of the aluminum-tin alloy film is 1-2 mu m, and the thickness of the tin film is 2-6 mu m.
The preparation method of the invention has the beneficial effects that:
1) in the last high-temperature re-solidification step, an aluminum-tin alloy protective layer is formed at the joint of the aluminum coating and the tin coating, and meanwhile, the aluminum coating is sealed in a molten state through the tin coating under a high-temperature condition, so that the corrosion resistance and the binding force of the magnet surface coating are enhanced;
2) the method of the invention integrates the advantages of vacuum evaporation and sputtering, and solves the problems of combination force production and efficiency by adopting vacuum evaporation; the compactness of tin solves the defects of poor quality, low compactness and poor corrosion resistance of a vacuum evaporation coating layer; the same equipment is used for evaporating the aluminum tin, so that the equipment cost is reduced, no harmful substance is discharged in the whole production process, and the environment is protected.
3) The coating obtained by the method disclosed by the invention has high binding force, high compactness, high surface hardness and excellent corrosion resistance, can meet the requirement of magnetic steel on surface protection when applied in various environments, and is green and environment-friendly and meets the requirement of industrial scale batch production.
Drawings
FIG. 1 is a TEM image of a section of magnetic steel obtained in example 1;
in FIG. 1, first: an aluminum coating; secondly, the step of: an aluminum tin alloy coating; ③: and (3) coating tin.
Detailed Description
The principles and features of this invention are described below in conjunction with examples, which are set forth to illustrate, but are not to be construed to limit the scope of the invention.
Example 1:
a method for vacuum coating of an aluminum-tin composite coating on the surface of magnetic steel comprises the following steps:
(1) oil removal: respectively degreasing, washing and drying 10 × 10mm ferrite, neodymium iron boron magnet and samarium cobalt magnet in an alkaline degreasing agent;
(2) rust removal and ash removal: polishing the three parts of magnetic steel by using a nylon diamond composite abrasive, wherein the mass ratio of the abrasive to the magnetic steel is 2:1, then ultrasonically deashing the magnetic steel by using a weak acid deashing agent at the temperature of 20-30 ℃, treating the deashed magnetic steel by using pure water and hot water at the temperature of 60-80 ℃, and baking the magnetic steel for 30min at the high temperature of 120 ℃;
(3) vacuum aluminum plating: vacuum aluminizing the cleaned three parts of magnetic steel by using vacuum film plating equipment, and vacuumizing the vacuum chamber to 4.0x10-3Pa, firstly adopting multi-arc ions to clean and activate the surface of the magnetic steel for 30min, wherein the vacuum ion aluminizing time is 10min, the purity of aluminum is more than 99.99 percent, and then maintaining a film coating chamber to cool for 40 min under vacuum;
(4) vacuum tinning: the vacuum chamber was evacuated to 4.0x10-3Pa, cleaning and activating the surface of the magnetic steel for 30min by adopting multi-arc ions, heating the magnetic steel by combining an evaporation boat and infrared rays, and starting vacuum ion tinning for 1℃ when the surface temperature of the magnetic steel reaches 150 DEG C0min, wherein the purity of tin is more than 99.99 percent;
(5) the magnetic steel after vacuum tinning is at 3x10-2And (3) carrying out 230 ℃ re-curing treatment for 20min under the Pa vacuum state.
Example 2:
a method for vacuum coating of an aluminum-tin composite coating on the surface of magnetic steel comprises the following steps:
(1) oil removal: respectively degreasing, washing and drying 10 × 10mm ferrite, neodymium iron boron magnet and samarium cobalt magnet in an alkaline degreasing agent;
(2) rust removal and ash removal: polishing the three parts of magnetic steel by using a nylon diamond composite abrasive, wherein the mass ratio of the abrasive to the magnetic steel is 2:1, then ultrasonically deashing the magnetic steel by using a weak acid deashing agent at the temperature of 20-30 ℃, treating the deashed magnetic steel by using pure water and hot water at the temperature of 60-80 ℃, and baking the magnetic steel for 30min at the high temperature of 120 ℃;
(3) vacuum aluminum plating: vacuum aluminizing the cleaned three parts of magnetic steel by using vacuum film plating equipment, and vacuumizing the vacuum chamber to 5.0x10-3Pa, firstly adopting multi-arc ions to clean and activate the surface of the magnetic steel for 30min, carrying out vacuum aluminum evaporation for 10min, wherein the purity of aluminum is more than 99.99%, and then maintaining a coating chamber to cool for 40 min under vacuum;
(4) vacuum tinning: the vacuum chamber was evacuated to 5.0x10-3Pa, cleaning and activating the surface of the magnetic steel for 30min by adopting multi-arc ions, heating the magnetic steel by combining an evaporation boat and infrared rays, and starting vacuum evaporation tin plating for 30min when the temperature of the surface of the magnetic steel reaches 200 ℃, wherein the purity of tin is more than 99.99%;
(5) the magnetic steel after vacuum tin plating is at 1x10-2And (3) carrying out 320 ℃ re-curing treatment for 20min under the Pa vacuum state.
Example 3:
a method for vacuum coating of an aluminum-tin composite coating on the surface of magnetic steel comprises the following steps:
(1) oil removal: respectively degreasing, washing and drying 10 × 10mm ferrite, neodymium iron boron magnet and samarium cobalt magnet in an alkaline degreasing agent;
(2) rust removal and ash removal: polishing the three parts of magnetic steel by using a nylon diamond composite abrasive, wherein the mass ratio of the abrasive to the magnetic steel is 2:1, then ultrasonically deashing the magnetic steel by using a weak acid deashing agent at the temperature of 20-30 ℃, treating the deashed magnetic steel by using pure water and hot water at the temperature of 60-80 ℃, and baking the magnetic steel for 30min at the high temperature of 120 ℃;
(3) vacuum aluminum plating: vacuum aluminizing the cleaned three parts of magnetic steel by using vacuum film plating equipment, and vacuumizing the vacuum chamber to 1.0x10-3Pa, firstly adopting multi-arc ions to clean and activate the surface of the magnetic steel for 30min, wherein the vacuum magnetron sputtering aluminum plating time is 60min, the purity of aluminum is more than 99.99 percent, and then maintaining a film coating chamber to cool for 40 min under vacuum;
(4) vacuum tinning: the vacuum chamber was evacuated to 1.0x10-3Pa, cleaning and activating the surface of the magnetic steel for 30min by adopting multi-arc ions, heating the magnetic steel by combining an evaporation boat and infrared rays, and starting vacuum magnetron sputtering for tinning for 10min when the surface temperature of the magnetic steel reaches 100 ℃, wherein the purity of tin is more than 99.99%;
(5) the magnetic steel after vacuum tinning is at 5x10-2And (3) carrying out re-curing treatment at 280 ℃ for 30min under a Pa vacuum state.
Example 4:
a method for vacuum coating of an aluminum-tin composite coating on the surface of magnetic steel comprises the following steps:
(1) oil removal: respectively degreasing, washing and drying 10 × 10mm ferrite, neodymium iron boron magnet and samarium cobalt magnet in an alkaline degreasing agent;
(2) rust removal and ash removal: polishing the three parts of magnetic steel by using a nylon diamond composite abrasive, wherein the mass ratio of the abrasive to the magnetic steel is 2:1, then ultrasonically deashing the magnetic steel by using a weak acid deashing agent at the temperature of 20-30 ℃, treating the deashed magnetic steel by using pure water and hot water at the temperature of 60-80 ℃, and baking the magnetic steel for 30min at the high temperature of 120 ℃;
(3) vacuum aluminum plating: vacuum aluminizing the cleaned three parts of magnetic steel by vacuum film plating equipment, and vacuum chamberVacuum to 4.0x10-3Pa, firstly adopting multi-arc ions to clean and activate the surface of the magnetic steel for 30min, wherein the vacuum ion aluminizing time is 60min, the purity of aluminum is more than 99.99 percent, and then maintaining a film coating chamber to cool for 40 min under vacuum;
(4) vacuum tinning: the vacuum chamber was evacuated to 4.0x10-3Pa, cleaning and activating the surface of the magnetic steel for 30min by adopting multi-arc ions, heating the magnetic steel by combining an evaporation boat and infrared rays, and starting vacuum ion tin plating for 30min when the temperature of the surface of the magnetic steel reaches 150 ℃, wherein the purity of tin is more than 99.99 percent;
(5) the magnetic steel after vacuum tinning is at 3x10-2And (3) carrying out 320 ℃ re-curing treatment for 10min under the Pa vacuum state.
Comparative example 1:
(1) oil removal: respectively degreasing, washing and drying 10 × 10mm ferrite, neodymium iron boron magnet and samarium cobalt magnet in an alkaline degreasing agent;
(2) rust removal and ash removal: polishing the three parts of magnetic steel by using a nylon diamond composite abrasive, wherein the mass ratio of the abrasive to the magnetic steel is 2:1, then ultrasonically deashing the magnetic steel by using a weak acid deashing agent at the temperature of 20-30 ℃, treating the deashed magnetic steel by using pure water and hot water at the temperature of 60-80 ℃, and baking the magnetic steel for 30min at the high temperature of 120 ℃;
(3) vacuum aluminum plating: vacuum aluminizing the cleaned three parts of magnetic steel by using vacuum film plating equipment, and vacuumizing the vacuum chamber to 4.0x10-3Pa, firstly adopting multi-arc ions to clean and activate the surface of the magnetic steel for 30min, wherein the vacuum ion aluminizing time is 60min, the purity of aluminum is more than 99.99%, and then maintaining a film coating chamber to cool for 40 min under vacuum to obtain a product of a comparative example 1.
Comparative example 2:
(1) oil removal: respectively degreasing, washing and drying 10 × 10mm ferrite, neodymium iron boron magnet and samarium cobalt magnet in an alkaline degreasing agent;
(2) rust removal and ash removal: polishing the three parts of magnetic steel by using a nylon diamond composite abrasive, wherein the mass ratio of the abrasive to the magnetic steel is 2:1, then ultrasonically deashing the magnetic steel by using a weak acid deashing agent at the temperature of 20-30 ℃, treating the deashed magnetic steel by using pure water and hot water at the temperature of 60-80 ℃, and baking the magnetic steel for 30min at the high temperature of 120 ℃;
(3) vacuum aluminum plating: vacuum aluminizing the cleaned three parts of magnetic steel by using vacuum film plating equipment, and vacuumizing the vacuum chamber to 5.0x10-3Pa, firstly adopting multi-arc ions to clean and activate the surface of the magnetic steel for 30min, carrying out vacuum aluminum evaporation for 10min, wherein the purity of aluminum is more than 99.99%, and then maintaining a coating chamber to cool for 40 min under vacuum to obtain a product of a comparative example 2.
The results of the product performance tests of examples 1 to 4 and comparative examples 1 and 2 are shown in table 1.
TABLE 1 product Performance test results for examples 1-4 and comparative examples 1, 2
Figure BDA0001772551530000081
Figure BDA0001772551530000091
SST: under the condition of neutrality, 5% sodium chloride solution is continuously sprayed on the surface of the product in the form of mist under the condition of 35 ℃.
PCT: 2 standard atmospheric pressure, 100% humidity autoclave test.
SST and PCT are our industry standard wordings and, without explanation, the longer the duration, the better the corrosion resistance of the coating.
As can be seen from the test results in Table 1, the corrosion resistance and the affinity for the binder of the coating are significantly improved and the binding force of the coating is not significantly changed compared with the prior art.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (4)

1. A method for vacuum coating of an aluminum-tin composite coating on the surface of magnetic steel is characterized by comprising the following steps:
1) pretreatment: sequentially degreasing, polishing and derusting the surface of the magnetic steel, and then baking for 10-30 min at the temperature of 100-150 ℃;
2) vacuum aluminum plating: cleaning and activating the pretreated magnetic steel surface for 10-30 min by adopting multi-arc ions, and then performing vacuum aluminum plating on the magnetic steel by adopting ion plating to obtain the magnetic steel with an aluminum coating on the surface;
3) vacuum tinning: carrying out surface cleaning and activation on the magnetic steel with the aluminum coating on the surface obtained in the step 2) for 10-30 min by adopting multi-arc ions, then heating the magnetic steel to enable the surface temperature of the magnetic steel to reach 100-200 ℃, and carrying out vacuum tin plating on the magnetic steel by adopting ion plating to obtain the magnetic steel with the aluminum coating and the tin coating on the surface;
4) and (3) high-temperature re-curing treatment: placing the magnetic steel obtained in the step 3) under the pressure of 1 multiplied by 10-2~5×10-2And Pa, and the temperature is 230-320 ℃, and re-curing is carried out for 10-30 min, so that an aluminum-tin alloy protective layer is formed at the joint of the aluminum coating and the tin coating.
2. The method of claim 1, wherein the alnico is a ferrite, neodymium iron boron magnet, or samarium cobalt magnet.
3. The method as claimed in claim 1 or 2, wherein the step 2) and the step 3) are evacuated to a pressure of 1.0x10-3~5.0×10-3Pa。
4. The method according to claim 1 or 2, wherein the specific operation process in step 1) is as follows: degreasing and drying the magnetic steel in an alkaline degreasing agent, polishing the magnetic steel by using a nylon diamond composite abrasive, ultrasonically deashing the magnetic steel by using a weakly acidic deashing agent at 15-30 ℃, washing the deashed magnetic steel by using pure water, treating the deashed magnetic steel by using hot water at 60-80 ℃, and finally baking the magnetic steel for 10-30 min at a high temperature of 100-150 ℃.
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