CN109128518A - The evaluating method of laser scribing machine and its technological ability - Google Patents
The evaluating method of laser scribing machine and its technological ability Download PDFInfo
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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Abstract
This application involves a kind of laser scribing machine and its evaluating methods of technological ability.The evaluating method of the laser scribing machine technological ability can be searched in the process matching data according to the process requirements and determine that the technique of laser scribing machine executes data and fast and accurately controls laser scribing machine technological parameter.The controller of the laser scribing machine obtains process requirements.The pre-stored process matching data are obtained from the laser scribing machine.The parameter of the corresponding process requirements is chosen from the process matching data, and the laser scribing machine is made to carry out laser irradiation, realizes accurate laser scribing process.The evaluating method of laser scribing machine technological ability in the present embodiment is simple to operation, and the process matching data can be pre-stored with comprehensive considering various effects, fast and accurately controls the technological parameter of laser scribing machine.
Description
Technical field
This application involves process equipment applications, more particularly to the evaluation and test side of a kind of laser scribing machine and its technological ability
Method.
Background technique
Photovoltaic technology is a kind of technology that can directly convert solar energy into electrical energy, and the development of photovoltaic technology also receives society
The influence and promotion of various factors can be gone up.Laser scribing machine is often used when preparing solar battery at present, to lining
Bottom or each film layer are delineated.For the monitoring of the laser beam power of laser scribing machine need using offline inspection module into
Row measurement.It and is usually to change laser under the conditions of fixed energies for the detection method of the laser beam focal length of laser scribing machine
Influence of the beam focal length to figure judges.
Traditional energy measuring mode, when energy detection module when something goes wrong, especially after substrate is damaged, energy
Amount detection module is difficult to detect laser beam power.Traditional focal length detection mode, although can detecte to a certain extent sharp
The pinpointed focus of light beam, but there is no direct characterizing methods for the linkage of focal length and other technological parameters variation.
In current technical process, in order to improve the service efficiency of laser scribing machine, a laser grooving and scribing head can be simultaneously
Multiple laser beams are integrated, the technological parameter of laser scribing machine can not be fast and accurately controlled using traditional detection method.
Summary of the invention
Based on this, it is necessary to can not fast and accurately control laser scribing machine technological parameter for traditional detection method
Problem provides the evaluating method of a kind of laser scribing machine and its technological ability.
A kind of evaluating method of laser scribing machine technological ability, comprising the following steps:
S100 obtains pre-stored process matching data；
S200 obtains process requirements；
S300 is searched in the process matching data according to the process requirements and is determined that the technique of laser scribing machine is held
Row data；The obtaining step of the process matching data includes:
S110 opens single laser beam and carries out scribing process；
S120 obtains the process window of single laser beam；
S130 repeats step S110 and step S120, to obtain the process window of multiple single laser beams；
S140 summarizes the data of the process window of the multiple single laser beam, to form the process matching data.
In one embodiment, the step S120, comprising:
S121, fixed laser beam power during scribing process change laser beam focal length, to obtain single laser beam
Laser beam focal length and technique corresponding relationship；
S122, fixed laser beam focal length during scribing process change laser beam power, to obtain single laser beam
Laser beam power and technique corresponding relationship；
S123 is obtained with technique corresponding relationship and the laser beam power with technique corresponding relationship according to the laser beam focal length
The process window of the single laser beam out.
In one embodiment, after the step S130, further includes:
S131 carries out logic and operation to the process window of the multiple single laser beam, to form the process matching
Optimal processing parameter in data.
In one embodiment, the underlying parameter of the process matching data includes laser beam power and laser beam focal length.
In one embodiment, further includes:
S400 obtains the technique and executes data and delineate to substrate；
S500, judge the technique execute data and the process requirements whether successful match；
S600 continues scribing process, such as if the technique executes data and the process requirements successful match
Technique described in fruit execute data matched with the process requirements it is unsuccessful, then return technology controlling and process unsuccessfully information.
In one embodiment, the step S500 includes:
S510, the backlight absorptivity of the substrate after detection delineation；
S520, if the backlight absorptivity is within a preset range, the technique executes data and the process requirements
Successful match；
S530, if the backlight absorptivity is not within a preset range, the technique executes data and the technique and needs
Ask that it fails to match.
In one embodiment, the step S500 includes:
S511, the preceding transmission region color with the substrate after delineation of comparison delineation；
S512, if the difference of the transmission region color is within a preset range, the technique execute data with it is described
Process requirements successful match；
S513, if the difference of the transmission region color is not within a preset range, the technique executes data and institute
Stating process requirements, it fails to match.
A kind of laser scribing machine, comprising:
Laser generator, for generating the laser beam of different-energy；
Controller is connect with the laser generator signal, for being looked into process matching data according to process requirements
It looks for and determines that the technique of laser scribing machine executes data；And
Memory is connect with the laser generator signal, for storing the process matching data.
In one embodiment, further includes:
Judgment means are detected, are connected with the controller in a signal way., for detecting and judging that the technique executes data and institute
It states whether process requirements match, and judging result is fed back into the controller.
In one embodiment, the detection judgment means are programmable logic controller (PLC).
The evaluating method of the laser scribing machine technological ability provided by the present application can be according to the process requirements in institute
It states and searches and determine that the technique of laser scribing machine executes data and fast and accurately controls laser scribing machine work in process matching data
Skill parameter.The controller of the laser scribing machine obtains process requirements.It is obtained from the laser scribing machine described in being pre-stored
Process matching data.The parameter of the corresponding process requirements is chosen from the process matching data, and makes the laser incising
The machine of drawing carries out laser irradiation, realizes accurate laser scribing process.The evaluation and test of laser scribing machine technological ability in the present embodiment
Method is simple to operation, and the process matching data can be pre-stored with comprehensive considering various effects, fast and accurately control laser
The technological parameter of rose engine.
Detailed description of the invention
Fig. 1 is the evaluating method flow chart of the laser scribing machine technological ability provided in the application one embodiment；
Fig. 2 is the evaluating method flow chart of the laser scribing machine technological ability provided in the application one embodiment；
Fig. 3 is the structural schematic diagram of the laser scribing machine provided in the application one embodiment；
Fig. 4 is the schematic diagram of the process matching data provided in the application one embodiment；
Fig. 5 is the schematic diagram of the process matching data provided in the application one embodiment.
Drawing reference numeral explanation:
Laser scribing machine 100
Laser generator 10
Controller 20
Memory 30
Detect judgment means 40
Specific embodiment
It is with reference to the accompanying drawings and embodiments, right in order to which the objects, technical solutions and advantages of the application are more clearly understood
The evaluating method of laser scribing machine and its technological ability provided by the present application is further elaborated.It should be appreciated that herein
The specific embodiment of description is only used to explain the application, is not used to limit the application.
After the processing range that the technological ability of laser scribing machine can be each laser beam determines, all laser beam works
Skill window takes intersection, to obtain optimal process window.Because different laser beams can exist due to the error for manufacturing and installing
Pinpointed focus and power are not duplicate, and laser beam belongs to Precision Machining, and laser beam power and laser beam focal length are simultaneously
It is non-to be the bigger the better.
The technological ability of laser scribing machine, which refers to, will reach corresponding line width specification requirement, adjustable laser beam power
With the range of laser beam focal length.Such as: laser grooving and scribing is confidential to reach the technique requirement that delineation line width is 2um ± 0.5um, Ke Yitong
The numerical value of adjustment laser beam power or laser beam focal length is crossed to reach technique requirement.But if necessary to structure adjusting laser beam
The relationship of power and laser beam focal length then needs the evaluating method using laser scribing machine technological ability described herein,
Especially when the laser scribing machine is there are when the engraving head of multiple laser beams, the method that the application provides is particularly important.
Referring to Fig. 1, providing a kind of evaluating method of laser scribing machine technological ability, include the following steps
S100 obtains pre-stored process matching data.The process matching data can be laser scribing machine and execute
The various parameters for needing to be arranged during scribing process.The process matching data can be table, diagram or logical value.?
Under different process requirements, different technological parameters can choose.In one embodiment, the basis of the process matching data
Parameter includes laser beam power and laser beam focal length.
S200 obtains process requirements.The process requirements can be the demand that the laser scribing machine carries out scribing process
Parameter, for example can be delineation width 80nm, cutting depths 20nm or other process requirements parameters.
S300 is searched in the process matching data according to the process requirements and is determined that the technique of laser scribing machine is held
Row data.For example the process requirements are to delineate width 80nm to substrate, the technique found executes data and may be, using 2
Laser beam delineates substrate, and the laser beam power of first laser beam is 0.5W, and focal length is -0.4 μm.Second laser beam
Laser beam power is 0.6W, and focal length is 0.3 μm.
In the step S100, the obtaining step of the process matching data includes
S110 opens single laser beam and carries out scribing process.In this step, the laser scribing machine is set and is swashed into single
Light beam operating mode avoids carrying out influencing each other when technological operation between multiple laser beams.
S120 obtains the process window of single laser beam.In this step, the process window of single laser beam, which refers to, to be met
Under conditions of production requirement standard, the range of the laser beam power and focal length that can use.
S130 repeats step S110 and step S120, to obtain the process window of multiple single laser beams.
S140 summarizes the data of the process window of the multiple single laser beam, to form the process matching data.Institute
Stating process matching data can be table, diagram or logical value.In this step, multiple test datas are gathered, shape
At the process matching data, for example it can be and summarize laser beam power and laser beam focal length in the form of matrix.Work as needs
When technique, process requirements are first searched.
In the present embodiment, the specific steps for preparing the process matching data are given, using the method in the present embodiment
The acquisition of the process matching data can be made simpler, conveniently.
In the present embodiment, the evaluating method of the laser scribing machine technological ability can be according to the process requirements described
It is searched in process matching data and determines that the technique of laser scribing machine executes data and fast and accurately controls laser scribing machine technique
Parameter.Specifically, the controller that can be the laser scribing machine obtains process requirements.It is obtained from the laser scribing machine pre-
The process matching data of storage.The parameter of the corresponding process requirements is chosen from the process matching data, and is made
The laser scribing machine carries out laser irradiation, realizes accurate laser scribing process.Laser scribing machine technique in the present embodiment
The evaluating method of ability is simple to operation, the process matching data can be pre-stored with comprehensive considering various effects, quick and precisely
Control laser scribing machine technological parameter.
In one embodiment, the step S120, including S121, fixed laser beam power during scribing process,
Change laser beam focal length, to obtain the laser beam focal length and technique corresponding relationship of single laser beam.
S122, fixed laser beam focal length during scribing process change laser beam power, to obtain single laser beam
Laser beam power and technique corresponding relationship.
S123 is obtained with technique corresponding relationship and the laser beam power with technique corresponding relationship according to the laser beam focal length
The process window of the single laser beam out.
In the present embodiment, the specific steps for obtaining the process window of single laser beam are given.Using control in the present embodiment
The method of variable processed makes the more efficient of the implementation method for obtaining the process window of single laser beam.In the present embodiment, may be used also
The parameter for obtaining other process windows is arranged.
It in one embodiment, further include S131 after the step S130, to the technique of the multiple single laser beam
Window carries out logic and operation, with the optimal processing parameter formed in the process matching data.
In the present embodiment, carrying out logic and operation can be the logic and operation process of technological parameter, be also possible to technique
The logic and operation process of window.In the present embodiment, the method provided makes the process for finding optimal processing parameter simpler,
It is easy to accomplish.
In one embodiment, further include S400, obtain the technique and execute data and substrate is delineated.
S500, judge the technique execute data and the process requirements whether successful match.
S600 continues scribing process, such as if the technique executes data and the process requirements successful match
Technique described in fruit execute data matched with the process requirements it is unsuccessful, then return technology controlling and process unsuccessfully information.
In the present embodiment, the evaluating method of the laser scribing machine technological ability further includes detecting the technique to execute data
Know no accurate step.The present embodiment provides the method that detects automatically of one kind, can be tested by detecting judgment means and
Correction.Whether the scribing process that the detection judgment means can timely find that the laser scribing machine executes is accurate.Institute
Stating in detection judgment means can be set technological parameter correlation data appropriate.When the scribing process that the laser scribing machine executes
It can timely remind the controller to carry out the adjustment of technological parameter when inaccurate, reduce the fault in scribing process, reduce
Process costs improve process efficiency.In the present embodiment, can also include after being delineated to substrate continue it is durable or
Person's corrosion test facilitates comprehensive control of process window.
In one embodiment, the step S500 includes S510, the backlight absorptivity of the substrate after detection delineation.
S520, if the backlight absorptivity is within a preset range, the technique executes data and the process requirements successful match.
S530, if the backlight absorptivity is not within a preset range, the technique executes data and matches mistake with the process requirements
It loses.
In the present embodiment, the backlight absorptivity of the metacoxal plate of detection delineation is given to judge that the technique executes number
According to the process requirements successful match.The backlight absorptivity acquisition methods are simple, and the backlight absorptivity is to delineation
Technique is affected, therefore the reference significance of the backlight absorptivity is higher.The preset range of the specific backlight absorptivity
It can be what the matching demand with reference to those skilled in the art was configured.
In one embodiment, the step S500 includes S511, the preceding light transmission with the substrate after delineation of comparison delineation
Field color.S512, if the difference of the transmission region color is within a preset range, the technique execute data with it is described
Process requirements successful match.S513, if the difference of the transmission region color is not within a preset range, the technique is executed
It fails to match with the process requirements for data.
In the present embodiment, transmission region color described in the metacoxal plate of detection delineation is given to judge that the technique executes number
According to the process requirements successful match.The transmission region color acquisition methods are simple, and the transmission region color pair
The display effect of delineation metacoxal plate is affected, therefore the reference significance of the transmission region color is also higher.It is specific described
The difference of light field color is also to be configured with reference to the matching demand of those skilled in the art in which kind of preset range.In addition
In the present embodiment, field color can be shown by the matching rate of pixel, or pass through the feux rouges of acquisition delineation metacoxal plate
Transmitance and reflectivity are determined.
Referring to Fig. 3, providing a kind of laser scribing machine 100 includes laser generator 10, controller 20 and memory 30.
The laser generator 10 is used to generate the laser beam of different-energy.The laser generator 10 may include
Multiple laser beams.When carrying out technique, it can choose one or more laser beam and carry out laser irradiation.
The controller 20 is connect with 10 signal of laser generator.The controller 20 is used for according to process requirements
It is searched in process matching data and determines that the technique of laser scribing machine executes data.The controller 20 is also used to obtain technique
Demand and pre-stored process matching data.The controller 20 can be computer, single-chip microcontroller or other with operation and
The arithmetic unit of judgement.The concrete form of the controller 20 is not construed as limiting, as long as corresponding function operation can be completed i.e.
It can.
The memory 30 is connect with 10 signal of laser generator, for storing the process matching data.Institute
Stating process matching data can be table, diagram or logical value.For example Fig. 4 and Fig. 5 are please referred to, it is given in Fig. 4 described sharp
Multiple single laser beams carry out the comparative diagram of power and focal length when technique in light rose engine 100.Each ellipse is a kind of laser
The optional technological parameter of beam.Ellipse in Fig. 4 takes the part of intersection for preferable laser beam power and focal length two-by-two, in Fig. 4
It is optimal laser beam power and focal length that ellipse three or three, which takes the part of intersection,.It in Fig. 5, gives after laser grooving and scribing, serves as a contrast
The difference of the transmission region color of substrate.The transmission region color difference of the elliptic region in Fig. 5 it can be seen that center is single
The optimised process window of one laser beam.The process matching data in figure 4 above and Fig. 5 are stored to the memory 30,
When the controller 20 obtains or when being entered certain process requirements, the controller 20 searched from the memory 30 and
Call the pre-stored process matching data.
In the present embodiment, the laser scribing machine 100 can be according to the process requirements in the process matching data
It searches and determines that the technique of laser scribing machine executes data and fast and accurately controls laser scribing machine technological parameter.Specifically, can
To be that the controller 20 obtains process requirements, obtained from the memory 30 according to the process requirements described in being pre-stored
Process matching data.The parameter of the corresponding process requirements is chosen from the process matching data, and is transported to described
Laser generator 10 carries out laser irradiation, realizes accurate laser scribing process.
It in one embodiment, further include detection judgment means 40.The detection judgment means 40 and the controller 20
Signal connection.The detection judgment means 40 for detect and judge the technique execute data and the process requirements whether
Match, and judging result is fed back into the controller 20.In one embodiment, the detection judgment means 40 are programmable patrol
Collect controller.The automated process of the detection judgment means 40 is higher, and the process for needing manually to participate in is less, improves described sharp
The automatic capability of light rose engine 100.
The detection judgment means 40 are the devices of a kind of inspection and correction.The detection judgment means 40 can be timely
It was found that whether the scribing process that the laser scribing machine 100 executes is accurate.When the scribing process that the laser scribing machine 100 executes
It can timely remind the controller 20 to carry out the adjustment of technological parameter when inaccurate, reduce the fault in scribing process, drop
Low process costs improve process efficiency.
In specific embodiment, the laser scribing machine 100 may have 10 laser beams, that is, the laser generates dress
10 laser beams can be simultaneously emitted by or arbitrarily issue one or several laser beam by setting 10.The laser beam is carrying out laser incising
During drawing, intersection is taken to the laser beam of transmitting, is superimposed, processing range can very little.Such as: the technique of laser beam one
Focal length is -0.4 micron to 0.4 micron, and the technique focal length of laser beam two is that technique focal length is -0.3W to 0.6W, after taking intersection
Range be exactly -0.3W to 0.4W.
In one embodiment, when obtaining the process matching data, it can use while adjust the laser grooving and scribing
The laser beam power of machine 100 and the mode of laser beam focal length form the pattern matrix under different condition, and by quantifying accordingly
Method, calculates the process window of different laser beams, to characterize the technological ability of laser scribing machine and the optimization for production
Reliable and effective reference data is provided.The pre-stored process matching data are just formd in the memory 30 above.
In one embodiment, the evaluating method of laser scribing machine technological ability described in actual technical process may be used also
To include being further processed to substrate.To substrate be further processed can be to test specimen carry out subsequent durability or
Person's erosion test depends on the product characteristic that production technology is most paid close attention to as using which kind of test mode, can be to laser beam
The technique of power and laser beam focal length is further verified or the selection of range.
In a specific embodiment, need to form the scribing process of line width 80nm, actually delineation bull with model
Enclosing may be between 60nm-100nm.It can make score line is wide to become by changing laser beam focal length and laser beam power
Change.Laser beam power can be set between 0.3W-0.8W when forming the process matching data as shown in Figure 4, every
It is primary every 0.1W test test, it tests 6 times altogether.Laser beam focal length is between -0.5 micron to 0.5 micron, at interval of 0.1 micron
Test is primary, tests 11 times altogether.Make laser beam focal length and laser beam power within the scope of one above, selects a technique
The position of range, range bosom carries out technique.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The several embodiments of the application above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the concept of this application, various modifications and improvements can be made, these belong to the protection of the application
Range.Therefore, the scope of protection shall be subject to the appended claims for the application patent.
Claims (10)
1. a kind of evaluating method of laser scribing machine technological ability, which comprises the following steps:
S100 obtains pre-stored process matching data；
S200 obtains process requirements；
S300 is searched in the process matching data according to the process requirements and is determined that the technique of laser scribing machine executes number
According to；
The obtaining step of the process matching data includes:
S110 opens single laser beam and carries out scribing process；
S120 obtains the process window of single laser beam；
S130 repeats step S110 and step S120, to obtain the process window of multiple single laser beams；
S140 summarizes the data of the process window of the multiple single laser beam, to form the process matching data.
2. the evaluating method of laser scribing machine technological ability as described in claim 1, which is characterized in that the step S120,
Include:
S121, fixed laser beam power during scribing process change laser beam focal length, to obtain the laser of single laser beam
Beam focal length and technique corresponding relationship；
S122, fixed laser beam focal length during scribing process change laser beam power, to obtain the laser of single laser beam
Beam power and technique corresponding relationship；
S123 obtains institute according to the laser beam focal length and technique corresponding relationship and the laser beam power and technique corresponding relationship
State the process window of single laser beam.
3. the evaluating method of laser scribing machine technological ability as described in claim 1, which is characterized in that the step S130 it
Afterwards, further includes:
S131 carries out logic and operation to the process window of the multiple single laser beam, to form the process matching data
In optimal processing parameter.
4. the evaluating method of laser scribing machine technological ability as described in claim 1, which is characterized in that the process matching number
According to underlying parameter include laser beam power and laser beam focal length.
5. the evaluating method of laser scribing machine technological ability as described in claim 1, which is characterized in that further include:
S400 obtains the technique and executes data and delineate to substrate；
S500, judge the technique execute data and the process requirements whether successful match；
S600 continues scribing process, if institute if the technique executes data and the process requirements successful match
State technique execute data matched with the process requirements it is unsuccessful, then return technology controlling and process unsuccessfully information.
6. the evaluating method of laser scribing machine technological ability as claimed in claim 5, which is characterized in that the step S500 packet
It includes:
S510, the backlight absorptivity of the substrate after detection delineation；
S520, if the backlight absorptivity is within a preset range, the technique executes data and matches with the process requirements
Success；
S530, if the backlight absorptivity is not within a preset range, the technique executes data and the process requirements
With failure.
7. the evaluating method of laser scribing machine technological ability as claimed in claim 5, which is characterized in that the step S500 packet
It includes:
S511, the preceding transmission region color with the substrate after delineation of comparison delineation；
S512, if the difference of the transmission region color is within a preset range, the technique executes data and the technique
Demand successful match；
S513, if the difference of the transmission region color is not within a preset range, the technique executes data and the work
It fails to match for skill demand.
8. a kind of laser scribing machine characterized by comprising
Laser generator (10), for generating the laser beam of different-energy；
Controller (20) is connect with the laser generator (10) signal, is used for according to process requirements in process matching data
Middle lookup simultaneously determines that the technique of laser scribing machine executes data；And
Memory (30) is connect, for storing the process matching data with the laser generator (10) signal.
9. laser scribing machine as claimed in claim 8, which is characterized in that further include:
It detects judgment means (40), is connect with the controller (20) signal, for detecting and judging that the technique executes data
Whether matched with the process requirements, and judging result is fed back into the controller (20).
10. laser scribing machine as claimed in claim 9, which is characterized in that the detection judgment means (40) are programmable patrol
Collect controller.
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