[go: up one dir, main page]

CN109082708B - Method for preparing c-axis YBCO high-temperature superconducting thick film with two a-axis grains - Google Patents

Method for preparing c-axis YBCO high-temperature superconducting thick film with two a-axis grains Download PDF

Info

Publication number
CN109082708B
CN109082708B CN201810824851.6A CN201810824851A CN109082708B CN 109082708 B CN109082708 B CN 109082708B CN 201810824851 A CN201810824851 A CN 201810824851A CN 109082708 B CN109082708 B CN 109082708B
Authority
CN
China
Prior art keywords
temperature
axis
powder
solution
ybco
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201810824851.6A
Other languages
Chinese (zh)
Other versions
CN109082708A (en
Inventor
姚忻
万炎
钱俊
黄思敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Jiao Tong University
Original Assignee
Shanghai Jiao Tong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jiao Tong University filed Critical Shanghai Jiao Tong University
Priority to CN201810824851.6A priority Critical patent/CN109082708B/en
Publication of CN109082708A publication Critical patent/CN109082708A/en
Application granted granted Critical
Publication of CN109082708B publication Critical patent/CN109082708B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/16Oxides
    • C30B29/22Complex oxides
    • C30B29/225Complex oxides based on rare earth copper oxides, e.g. high T-superconductors
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

本发明公开了一种制备具有两种a轴晶粒的c轴YBCO高温超导厚膜的方法,包括步骤:1)将BaCO3粉末和CuO粉末进行配料并烧结,制得Ba‑Cu‑O粉末;2)将Ba‑Cu‑O粉末加入到Y2O3坩埚中加热至高温待其充分融化后,向其中加入重量固定的Ba‑Cu‑O粉末并通过长期的保温,获得初始状态恒定的Y‑Ba‑Cu‑O溶液;3)在高温溶液中加入重量固定的Ba‑Cu‑O粉末,通过改变Ba‑Cu‑O粉末的熔化时间△tm来调节欠过饱和度的中间状态Uint,使溶液的状态达到Uint2;4)将溶液降温至第二温度;5)将固定在连接杆的籽晶材料插入到步骤4)中生长5~15s。本发明通过精细地调节溶液过饱和度,使Y‑Ba‑Cu‑O溶液在亚稳区准确的达到指定的过饱和度的状态,生长得到具有两种a轴晶粒的c轴YBCO高温超导厚膜,工艺简单,操作方便。The invention discloses a method for preparing a c -axis YBCO high-temperature superconducting thick film with two kinds of a-axis crystal grains. powder; 2) adding the Ba-Cu-O powder into the Y 2 O 3 crucible and heating it to a high temperature until it is fully melted, then adding the Ba-Cu-O powder with a fixed weight to it and maintaining a constant initial state for a long time 3) Add Ba-Cu-O powder with a fixed weight to the high-temperature solution, and adjust the intermediate state of undersaturation by changing the melting time Δt m of the Ba-Cu-O powder U int , making the state of the solution reach U int2 ; 4) cooling the solution to the second temperature; 5) inserting the seed crystal material fixed on the connecting rod into step 4) for 5-15 s growth. By finely adjusting the supersaturation of the solution, the invention makes the Y-Ba-Cu-O solution reach the state of the specified supersaturation accurately in the metastable region, and grows to obtain a c-axis YBCO high-temperature ultra-high temperature with two kinds of a-axis crystal grains. Thick film, simple process and convenient operation.

Description

一种制备具有两种a轴晶粒的c轴YBCO高温超导厚膜的方法A method for preparing c-axis YBCO high-temperature superconducting thick films with two types of a-axis grains

技术领域technical field

本发明涉及一种高温超导材料的制备方法,尤其涉及一种制备c轴YBCO高温超导厚膜的方法,更具体地涉及一种制备具有两种a轴晶粒的c轴YBCO高温超导厚膜的方法。The present invention relates to a preparation method of high-temperature superconducting material, in particular to a method for preparing c-axis YBCO high-temperature superconducting thick film, and more particularly to a method for preparing c-axis YBCO high-temperature superconducting film with two kinds of a-axis grains thick film method.

背景技术Background technique

自从高温超导体发现以来,大量的晶体工作者投入到了高品质膜的基础研究和制备领域。由于YBa2Cu3Ox(简称YBCO、Y123、钇钡铜氧)具有高于液氮温度的超导转变温度Tc,在低于Tc的温度环境下表现出迈斯纳效应和零电阻效应等特性。正是由于YBCO高温超导材料的这些重要特性,YBCO超导厚膜在诸如限流器、滤波器等超导器件方面具有许多潜在的应用。Since the discovery of high-temperature superconductors, a large number of crystallographers have devoted themselves to the basic research and preparation of high-quality films. Because YBa 2 Cu 3 O x (referred to as YBCO, Y123, yttrium barium copper oxide) has a superconducting transition temperature Tc higher than the temperature of liquid nitrogen, it exhibits Meissner effect and zero resistance effect in a temperature environment lower than Tc characteristic. It is precisely because of these important properties of YBCO high-temperature superconducting materials that YBCO superconducting thick films have many potential applications in superconducting devices such as current limiters and filters.

材料的应用取决于材料的性能,而材料的结构决定了材料的性能,进而影响了材料在实际中的应用。一般来说,由于YBCO超导晶体的晶格常数在两个方向a 轴和b轴近似相等,因而YBCO超导厚膜具有两种取向,即a轴取向和c轴取向。 c轴取向的REBCO高温超导厚膜具有较高的临界电流密度,因而在电力运输方面有重要的应用,而a轴取向的REBCO高温超导厚膜在约瑟夫森结器件方面有至关重要的应用。The application of the material depends on the properties of the material, and the structure of the material determines the properties of the material, which in turn affects the application of the material in practice. In general, since the lattice constants of YBCO superconducting crystals are approximately equal in two directions, a-axis and b-axis, YBCO superconducting thick films have two orientations, ie, a-axis orientation and c-axis orientation. The c-axis oriented REBCO high-temperature superconducting thick film has a high critical current density, so it has important applications in power transportation, while the a-axis oriented REBCO high-temperature superconducting thick film has a crucial role in Josephson junction devices. application.

液相外延(Liquid Phase Epitaxy,LPE)被普遍认为是一种极具潜力的YBCO 超导厚膜的制备方法。在液相外延生长YBCO超导厚膜的过程中,籽晶被固定在连接杆上缓慢靠近饱和溶液表面,作为唯一的形核点诱导YBCO超导厚膜的生长。由于LPE的生长条件接近平衡态,使用薄膜材料作为籽晶诱导生长得到的厚膜具有低缺陷、高平整度、高结晶性能等特点。另外,由于LPE在非真空条件下进行,因而这种方法具有制备成本低等优点。并且与一般的成膜技术相比,LPE具有较快的生长速度。Liquid Phase Epitaxy (LPE) is generally regarded as a promising method for the preparation of YBCO superconducting thick films. In the process of liquid-phase epitaxy growth of YBCO superconducting thick film, the seed crystal was fixed on the connecting rod and slowly approached the surface of the saturated solution as the only nucleation point to induce the growth of YBCO superconducting thick film. Since the growth conditions of LPE are close to the equilibrium state, the thick film obtained by using the thin film material as the seed crystal induced growth has the characteristics of low defect, high flatness, and high crystallinity. In addition, since LPE is carried out under non-vacuum conditions, this method has the advantages of low preparation cost. And compared with the general film-forming technology, LPE has a faster growth rate.

因此,能够利用LPE制备特异性的c轴取向的YBCO高温超导厚膜,对于约瑟夫森结器件开发及超导机理的基础研究具有重要意义。Therefore, it is of great significance for the development of Josephson junction devices and the basic research of superconducting mechanism to be able to prepare a specific c-axis oriented YBCO high-temperature superconducting thick film by using LPE.

发明内容SUMMARY OF THE INVENTION

鉴于现有技术的上述缺陷,本发明所要解决的技术问题是提供一种方便、高效的方法,用于在NGO基板上生长镶嵌有两种a轴晶粒的c轴YBCO高温超导厚膜,克服了溶液初始状态无法固定,以及无法将溶液的过饱和度状态调节至σint2等难题。In view of the above-mentioned defects of the prior art, the technical problem to be solved by the present invention is to provide a convenient and efficient method for growing a c-axis YBCO high-temperature superconducting thick film embedded with two kinds of a-axis grains on an NGO substrate, It overcomes the difficulties that the initial state of the solution cannot be fixed and the supersaturation state of the solution cannot be adjusted to σ int2 .

本发明的构思为:当在NdGaO3(NGO、镓酸钕)基板上液相外延生长YBCO 晶体时,根据溶液过饱和度状态的不同,在c轴膜上会得到两种不同成核方向的a 轴晶粒a1和a2。通常情况下,生长c轴膜中只有a1晶粒的YBCO膜以及生长c轴膜中同时有a1和a2晶粒的YBCO膜所需的两种溶液过饱和度状态(σint1和σint2),介于极大的以及极小的过饱和度之间。以往使用NGO单晶基板制备液相外延 YBCO膜时,一般是通过控制加入新鲜Ba-Cu-O粉末的重量以及保温时间的长短来调节溶液的过饱和度状态的,但是这种方法忽略了溶液的初始状态,通常很难将溶液的过饱和度调节到中间状态,只能调节到极大的以及极小两种极端的过饱和度状态。本发明技术特征如下:首先在高温下通过长时间的保温,获得较为恒定的溶液初始状态U0;其次加入固定重量的Ba-Cu-O粉末,并通过改变调节熔化时间△tm来调节欠过饱和度的中间状态Uint。不同于以前报道的技术,该条件下Uint可容易地细分成Uint1和Uint2。最后在生长温度时获得对应的中间过饱和度状态σint1和σint2。在σint2条件下,基板材料上能可靠地制备具有两种a轴晶粒的c轴YBCO高温超导厚膜。The idea of the present invention is: when YBCO crystal is grown by liquid phase epitaxy on a NdGaO 3 (NGO, neodymium gallate) substrate, two kinds of nucleation directions with different nucleation directions will be obtained on the c-axis film according to the state of the supersaturation of the solution. a-axis grains a 1 and a 2 . Typically, the two solution supersaturation states (σ int1 and σ int1 and σ int1 and σ int1 and σ int1 and σ int1 and σ int1 and σ int1 and σ int1 and σ int2 ), between very large and very small supersaturation. In the past, when using NGO single crystal substrates to prepare liquid phase epitaxial YBCO films, the supersaturation state of the solution was generally adjusted by controlling the weight of fresh Ba-Cu-O powder and the length of the holding time, but this method ignored the solution. It is usually difficult to adjust the supersaturation of the solution to an intermediate state, and it can only be adjusted to two extreme supersaturation states, the maximum and the minimum. The technical features of the present invention are as follows: firstly, a relatively constant initial state U 0 of the solution is obtained through a long-term heat preservation at a high temperature; secondly, a fixed weight of Ba-Cu-O powder is added, and the underflow is adjusted by changing and adjusting the melting time Δt m Intermediate state of supersaturation U int . Unlike previously reported techniques, U int can be easily subdivided into U int1 and U int2 under this condition. Finally, the corresponding intermediate supersaturation states σ int1 and σ int2 are obtained at the growth temperature. Under the condition of σ int2 , the c-axis YBCO high-temperature superconducting thick film with two kinds of a-axis grains can be reliably prepared on the substrate material.

为实现上述目的,本发明提供了一种制备具有两种a轴晶粒的c轴YBCO高温超导厚膜的方法,包括如下工序:In order to achieve the above object, the present invention provides a method for preparing a c-axis YBCO high temperature superconducting thick film with two kinds of a-axis grains, comprising the following steps:

a)制备Ba-Cu-O相的先驱粉末;a) Preparation of the precursor powder of Ba-Cu-O phase;

b)将Ba-Cu-O先驱粉末加入到晶体生长炉中的Y2O3材料的坩埚中;b) adding the Ba-Cu - O precursor powder to the crucible of the Y2O3 material in the crystal growth furnace;

c)将工序b)中的Ba-Cu-O先驱粉末和Y2O3材料的坩埚加热至第一温度进行保温,获得Y-Ba-Cu-O溶液;c) heating the crucible of the Ba-Cu-O precursor powder and the Y 2 O 3 material in the step b) to the first temperature for heat preservation to obtain a Y-Ba-Cu-O solution;

d)在晶体生长炉中顶部籽晶提拉法液相外延生长YBCO超导厚膜;其中,工序d)中的液相外延生长包括以下步骤:d) liquid phase epitaxy growth of YBCO superconducting thick film by top seed crystal pulling method in the crystal growth furnace; wherein, the liquid phase epitaxy growth in step d) comprises the following steps:

e)在工序c)中的Y-Ba-Cu-O溶液中加入的Ba-Cu-O先驱粉末,并在第一温度进行长时间的保温;e) the Ba-Cu-O precursor powder added to the Y-Ba-Cu-O solution in step c), and the first temperature is kept for a long time;

f)将步骤e)中的Y-Ba-Cu-O溶液以第一降温速度降低至第二温度;f) reducing the Y-Ba-Cu-O solution in step e) to the second temperature at the first cooling rate;

g)在步骤f)中Y-Ba-Cu-O溶液中加入Ba-Cu-O先驱粉末,并以第一升温速度升温至第一温度进行保温;g) adding Ba-Cu-O precursor powder to the Y-Ba-Cu-O solution in step f), and warming up to the first temperature at the first heating rate for insulation;

h)将步骤g)中的Y-Ba-Cu-O溶液以第一降温速度降低至第二温度;h) reducing the Y-Ba-Cu-O solution in step g) to the second temperature at the first cooling rate;

i)将固定在连接杆的籽晶材料插入到步骤h)得到的Y-Ba-Cu-O溶液,外延生长一段时间后取出,获得具有两种a轴晶粒的c轴YBCO高温超导厚膜。i) Insert the seed crystal material fixed on the connecting rod into the Y-Ba-Cu-O solution obtained in step h), and take it out after epitaxial growth for a period of time to obtain a c-axis YBCO high-temperature superconducting thickness with two kinds of a-axis grains membrane.

进一步,工序a)包括:Further, process a) comprises:

按照Ba:Cu=0.3~0.8的比例将BaCO3和CuO粉末混合,放入球磨罐,加入无水乙醇或水进行湿磨以获得BaCO3和CuO的混合浆料,湿磨时间为2~4小时;Mix BaCO3 and CuO powder according to the ratio of Ba:Cu=0.3~0.8, put it into the ball mill, add absolute ethanol or water for wet grinding to obtain the mixed slurry of BaCO3 and CuO , the wet grinding time is 2~4 Hour;

将BaCO3和CuO的混合浆料置于90℃~120℃温度下加热烘干,得到BaCO3和CuO的混合粉料;The mixed slurry of BaCO 3 and CuO is heated and dried at a temperature of 90 ℃ to 120 ℃ to obtain a mixed powder of BaCO 3 and CuO;

将BaCO3和CuO的混合粉料在空气中890℃~910℃烧结40~50小时,得到 Ba-Cu-O相的前驱粉体。The mixed powder of BaCO 3 and CuO is sintered in air at 890° C. to 910° C. for 40 to 50 hours to obtain the precursor powder of Ba-Cu-O phase.

进一步,工序c)中的第一温度为YBCO的包晶温度以上5~35℃,保温时间为 20~24小时。Further, the first temperature in step c) is 5 to 35°C higher than the peritectic temperature of YBCO, and the holding time is 20 to 24 hours.

进一步,步骤e)中的Ba-Cu-O先驱粉末的加入量为15~20克,保温时间为11~13小时。其中,在发明过程中,发明人发现步骤e)中较短的保温时间不利于获得初始状态恒定的Y-Ba-Cu-O溶液。事实上,当采用较短的保温时间时,往往容易获得始状态不固定的Y-Ba-Cu-O溶液,从而导致下一步调节溶液状态时只能得到极大的或者极小的过饱和度状态,很难得到中间过饱和度状态。基于此,发明人通过反复试验,创新性地提出“Ba-Cu-O先驱粉末的加入量为15~20克,保温时间为11~13 小时”的优化工艺。Further, the addition amount of the Ba-Cu-O precursor powder in step e) is 15-20 grams, and the holding time is 11-13 hours. Among them, in the process of invention, the inventor found that a short holding time in step e) is not conducive to obtaining a Y-Ba-Cu-O solution with a constant initial state. In fact, when a short holding time is used, it is often easy to obtain a Y-Ba-Cu-O solution whose initial state is not fixed, so that only a very large or very small degree of supersaturation can be obtained when the solution state is adjusted in the next step. state, it is difficult to get an intermediate supersaturation state. Based on this, the inventor innovatively proposed an optimized process of "the addition amount of the Ba-Cu-O precursor powder is 15-20 grams, and the holding time is 11-13 hours" through repeated experiments.

进一步,步骤f)中的第一降温速度为1.5~3℃/min,第二温度为YBCO的包晶温度以下3~30℃。Further, the first cooling rate in step f) is 1.5-3°C/min, and the second temperature is 3-30°C below the peritectic temperature of YBCO.

进一步,步骤g)中的Ba-Cu-O先驱粉末的加入量为15~20克,保温时间为2~4 小时。发明人发现,在步骤g)中,由于保温时间的不同,会对应得到两种不同的中间过饱和度状态σint1和σint2。其中,当保温时间较短时,会得到较低的中间过饱和度状态σint1,当保温时间较长时,会得到较高的中间过饱和度状态σint2。在中间过饱和度状态σint1的条件下,容易获得具有一种a轴晶粒的c轴YBCO高温超导厚膜。只有在中间过饱和度状态σint2的条件下,才会获得具有两种a轴晶粒的c轴 YBCO高温超导厚膜。在发明过程中,发明人通过精细地调节溶液过饱和度,创新性地总结出,在Ba-Cu-O先驱粉末的加入量为15~20克,保温时间为2~4小时,溶液能够获得σint2的中间过饱和度状态,有利于具有两种a轴晶粒的c轴YBCO 高温超导厚膜的制备和生长。Further, the addition amount of the Ba-Cu-O precursor powder in step g) is 15-20 grams, and the holding time is 2-4 hours. The inventors found that, in step g), two different intermediate supersaturation states σ int1 and σ int2 are obtained correspondingly due to the difference in the holding time. Among them, when the holding time is short, a lower intermediate supersaturation state σ int1 will be obtained, and when the holding time is long, a higher intermediate supersaturation state σ int2 will be obtained. Under the condition of the intermediate supersaturation state σ int1 , it is easy to obtain a c-axis YBCO high-temperature superconducting thick film with a kind of a-axis grains. The c-axis YBCO high-temperature superconducting thick film with two kinds of a-axis grains is obtained only under the condition of the intermediate supersaturation state σ int2 . In the process of invention, the inventor innovatively concluded that the addition amount of Ba-Cu-O precursor powder is 15-20 grams and the holding time is 2-4 hours, the solution can be obtained by finely adjusting the supersaturation degree of the solution. The intermediate supersaturation state of σ int2 is favorable for the preparation and growth of c-axis YBCO high-temperature superconducting thick films with two types of a-axis grains.

进一步,步骤g)中的第一升温速度为1.5~3℃/min。Further, the first heating rate in step g) is 1.5˜3° C./min.

进一步,步骤i)中的籽晶材料是NdGaO3单晶基板,尺寸为10mm×3mm。Further, the seed crystal material in the step i) is an NdGaO 3 single crystal substrate with a size of 10mm×3mm.

进一步,步骤i)中的外延生长的旋转速度为10~20rpm,生长时间为5~15s。Further, the rotation speed of the epitaxial growth in step i) is 10-20 rpm, and the growth time is 5-15 s.

综上所述,本发明公开了一种制备具有两种a轴晶粒的c轴YBCO高温超导厚膜的方法,包括步骤:1)将BaCO3粉末和CuO粉末进行配料并烧结,制得Ba-Cu-O粉末;2)将Ba-Cu-O粉末加入到Y2O3坩埚中加热至高温,并通过长期的保温,获得初始状态恒定的Y-Ba-Cu-O溶液;3)在高温溶液中加入重量固定的 Ba-Cu-O粉末,通过改变Ba-Cu-O粉末的熔化时间Δtm来调节欠过饱和度的中间状态Uint,使溶液的状态达到Uint2;4)将溶液降温至第二温度;5)将固定在连接杆的籽晶材料插入到步骤4)中生长5~15s。本发明在溶液的初始阶段开创性的引入了长期的保温程序,解决了溶液初始状态不固定的问题,为后期精细的调节溶液状态打下了基础,使溶液最终准确的达到指定的状态,生长出具有两种a轴晶粒的c轴 YBCO高温超导厚膜。To sum up, the present invention discloses a method for preparing a c-axis YBCO high-temperature superconducting thick film with two kinds of a-axis grains, comprising the steps of: 1) batching BaCO powder and CuO powder and sintering to obtain Ba-Cu-O powder; 2) Add Ba-Cu-O powder into a Y 2 O 3 crucible and heat it to a high temperature, and through long-term heat preservation, a Y-Ba-Cu-O solution with a constant initial state is obtained; 3) Add a fixed weight of Ba-Cu-O powder to the high temperature solution, adjust the intermediate state U int of under-saturation by changing the melting time Δt m of the Ba-Cu-O powder, so that the state of the solution reaches U int2 ; 4) Cool the solution to the second temperature; 5) insert the seed crystal material fixed on the connecting rod into step 4) to grow for 5-15 s. The invention innovatively introduces a long-term heat preservation procedure in the initial stage of the solution, solves the problem that the initial state of the solution is not fixed, and lays a foundation for the fine adjustment of the solution state in the later stage, so that the solution finally reaches the specified state accurately and grows out A c-axis YBCO high temperature superconducting thick film with two types of a-axis grains.

技术效果:Technical effect:

1.本发明在液相外延法的高温阶段首次加入Ba-Cu-O粉末,并且保温11~13 小时,目的是获得初始状态恒定的溶液。在液相外延法的高温阶段再次加入 Ba-Cu-O粉末,并且保温2~4小时,通过控制加入Ba-Cu-O粉末的重量以及保温时间的长短,精细的调节溶液过饱和度,使Y-Ba-Cu-O溶液在亚稳区准确的达到指定的过饱和度的状态,生长得到具有两种a轴晶粒的c轴YBCO高温超导厚膜,工艺简单,操作方便。1. In the present invention, Ba-Cu-O powder is added for the first time in the high temperature stage of the liquid phase epitaxy method, and the temperature is kept for 11-13 hours, in order to obtain a solution with a constant initial state. Add Ba-Cu-O powder again in the high temperature stage of liquid phase epitaxy, and keep it for 2 to 4 hours. By controlling the weight of Ba-Cu-O powder added and the length of holding time, the supersaturation of the solution is finely adjusted to make the solution supersaturated. The Y-Ba-Cu-O solution accurately reaches the specified supersaturation state in the metastable region, and a c-axis YBCO high-temperature superconducting thick film with two types of a-axis grains is grown. The process is simple and the operation is convenient.

2.本发明可人为调控液相外延的生长时间,从而控制所要求的混合晶界结构YBCO外延膜的厚度。2. The present invention can artificially regulate the growth time of liquid phase epitaxy, thereby controlling the required thickness of the YBCO epitaxial film with mixed grain boundary structure.

3.本发明液相外延法生长特定混合取向的YBCO超导厚膜,使得两种不同取向的a轴YBCO晶粒广泛分布于c轴取向的YBCO厚膜中,用于获得两种a轴晶粒与c轴YBCO膜相接的晶界,对于约瑟夫森结器件开发及超导机理的基础研究具有重要意义。3. The liquid phase epitaxy method of the present invention grows a YBCO superconducting thick film with a specific mixed orientation, so that the a-axis YBCO grains of two different orientations are widely distributed in the YBCO thick film with a c-axis orientation, which is used to obtain two kinds of a-axis crystals The grain boundary where the grain meets the c-axis YBCO film is of great significance for the development of Josephson junction devices and basic research on the superconducting mechanism.

具体实施方式Detailed ways

本发明采用NGO单晶基板作为籽晶,液相外延生长具有两种a轴晶粒的c轴 YBCO高温超导厚膜,通过固定溶液的初始状态以及控制溶液的过饱和度液相外延生长具有两种a轴晶粒的c轴YBCO高温超导厚膜。The invention adopts the NGO single crystal substrate as the seed crystal to grow the c-axis YBCO high-temperature superconducting thick film with two kinds of a-axis grains by liquid phase epitaxy. By fixing the initial state of the solution and controlling the supersaturation of the solution, the liquid phase epitaxy growth has C-axis YBCO high-temperature superconducting thick films of two types of a-axis grains.

实施例一Example 1

本实施例提供了一种制备具有两种a轴晶粒的c轴YBCO高温超导厚膜的方法,包括如下步骤:This embodiment provides a method for preparing a c-axis YBCO high-temperature superconducting thick film with two types of a-axis grains, including the following steps:

1.按照Ba:Cu=0.6的比例将BaCO3粉末和CuO粉末混合,放入球磨罐,加入无水乙醇或水进行湿磨以获得BaCO3和CuO的混合浆料,湿磨时间为3小时。1. Mix BaCO3 powder and CuO powder according to the ratio of Ba:Cu=0.6, put it into a ball milling jar, add absolute ethanol or water for wet milling to obtain a mixed slurry of BaCO3 and CuO , the wet milling time is 3 hours .

2.将步骤1所得的BaCO3和CuO的混合浆料置于105℃温度下加热烘干,得到BaCO3和CuO的混合粉料。2. The mixed slurry of BaCO 3 and CuO obtained in step 1 is heated and dried at a temperature of 105° C. to obtain a mixed powder of BaCO 3 and CuO.

3.将步骤2所得的BaCO3和CuO的混合粉料在空气中900℃烧结48小时,得到Ba-Cu-O相的前驱粉体。3. The mixed powder of BaCO 3 and CuO obtained in step 2 was sintered in air at 900° C. for 48 hours to obtain the precursor powder of Ba-Cu-O phase.

4.将Ba-Cu-O先驱粉末加入到晶体生长炉中的Y2O3材料的坩埚中,Ba-Cu-O 先驱粉的加入至与坩埚上沿齐平。4. Add the Ba-Cu-O precursor powder into the crucible of the Y 2 O 3 material in the crystal growth furnace, and add the Ba-Cu-O precursor powder to be flush with the top edge of the crucible.

5.将步骤4中的Ba-Cu-O先驱粉末和Y2O3材料的坩埚加热至1030℃(即 YBCO的包晶温度以上25℃),并保温24小时,以获得Y-Ba-Cu-O溶液;5. Heat the Ba-Cu-O precursor powder and the crucible of the Y2O3 material in step 4 to 1030°C (that is, 25°C above the peritectic temperature of YBCO), and keep the temperature for 24 hours to obtain Y-Ba-Cu -O solution;

6.在经过步骤5获得的Y-Ba-Cu-O溶液加入的20g的Ba-Cu-O先驱粉末,继续在1030℃保温12小时。6. Add 20 g of Ba-Cu-O precursor powder to the Y-Ba-Cu-O solution obtained in step 5, and continue to keep the temperature at 1030° C. for 12 hours.

7.将经过步骤6获得的Y-Ba-Cu-O溶液以2.25℃/min的冷却速率冷却至985℃ (即YBCO的包晶温度以下20℃)。7. Cool the Y-Ba-Cu-O solution obtained in step 6 to 985°C (ie, 20°C below the peritectic temperature of YBCO) at a cooling rate of 2.25°C/min.

8.在经过步骤7获得的Y-Ba-Cu-O溶液加入的15g的Ba-Cu-O先驱粉末,之后以2.25℃/min的升温速率升温至1030℃保温3小时。8. 15g of Ba-Cu-O precursor powder was added to the Y-Ba-Cu-O solution obtained in step 7, and then heated to 1030°C at a heating rate of 2.25°C/min for 3 hours.

9.将经过步骤8获得的Y-Ba-Cu-O溶液以2.25℃/min的冷却速率冷却至 985℃。9. Cool the Y-Ba-Cu-O solution obtained in step 8 to 985°C at a cooling rate of 2.25°C/min.

10.采用尺寸为3mm×10mm的NGO单晶基板作为籽晶并固定在连接杆上,将NGO基板的表面插入到Y-Ba-Cu-O溶液,采用顶部籽晶提拉法液相外延生长 YBCO超导厚膜。生长过程中具体工艺参数为:籽晶的旋转速度为16rpm,生长时间为10s。10. The NGO single crystal substrate with a size of 3mm×10mm was used as the seed crystal and fixed on the connecting rod. The surface of the NGO substrate was inserted into the Y-Ba-Cu-O solution, and the top seed crystal pulling method was used for liquid phase epitaxy growth. YBCO superconducting thick film. The specific process parameters in the growth process are: the rotation speed of the seed crystal is 16 rpm, and the growth time is 10 s.

实施例二Embodiment 2

本实施例提供了一种制备具有两种a轴晶粒的c轴YBCO高温超导厚膜的方法,包括如下步骤:This embodiment provides a method for preparing a c-axis YBCO high-temperature superconducting thick film with two types of a-axis grains, including the following steps:

1.按照Ba:Cu=0.6的比例将BaCO3粉末和CuO粉末混合,放入球磨罐,加入无水乙醇或水进行湿磨以获得BaCO3和CuO的混合浆料,湿磨时间为4小时。1. Mix BaCO3 powder and CuO powder according to the ratio of Ba:Cu=0.6, put it into a ball milling jar, add absolute ethanol or water for wet milling to obtain a mixed slurry of BaCO3 and CuO , the wet milling time is 4 hours .

2.将步骤1所得的BaCO3和CuO的混合浆料置于120℃温度下加热烘干,得到BaCO3和CuO的混合粉料。2. Heat and dry the mixed slurry of BaCO 3 and CuO obtained in step 1 at a temperature of 120° C. to obtain a mixed powder of BaCO 3 and CuO.

3.将步骤2所得的BaCO3和CuO的混合粉料在空气中910℃烧结50小时,得到Ba-Cu-O相的前驱粉体。3. Sinter the mixed powder of BaCO 3 and CuO obtained in step 2 at 910° C. for 50 hours in air to obtain the precursor powder of Ba-Cu-O phase.

4.将Ba-Cu-O先驱粉末加入到晶体生长炉中的Y2O3材料的坩埚中,Ba-Cu-O 先驱粉的加入至与坩埚上沿齐平。4. Add the Ba-Cu-O precursor powder into the crucible of the Y 2 O 3 material in the crystal growth furnace, and add the Ba-Cu-O precursor powder to be flush with the top edge of the crucible.

5.将步骤4中的Ba-Cu-O先驱粉末和Y2O3材料的坩埚加热至1020℃(即 YBCO的包晶温度以上15℃),并保温24小时,以获得Y-Ba-Cu-O溶液;5. Heat the Ba-Cu-O precursor powder and the crucible of the Y2O3 material in step 4 to 1020°C (i.e. 15°C above the peritectic temperature of YBCO), and keep the temperature for 24 hours to obtain Y-Ba-Cu -O solution;

6.在经过步骤5获得的Y-Ba-Cu-O溶液加入的15g的Ba-Cu-O先驱粉末,继续在1030℃保温10小时。6. Add 15 g of Ba-Cu-O precursor powder to the Y-Ba-Cu-O solution obtained in step 5, and continue to keep the temperature at 1030° C. for 10 hours.

7.将经过步骤6获得的Y-Ba-Cu-O溶液以1.75℃/min的冷却速率冷却至985℃ (即YBCO的包晶温度以下20℃)。7. Cool the Y-Ba-Cu-O solution obtained in step 6 to 985°C (ie, 20°C below the peritectic temperature of YBCO) at a cooling rate of 1.75°C/min.

8.在经过步骤7获得的Y-Ba-Cu-O溶液加入的16g的Ba-Cu-O先驱粉末,之后以1.75℃/min的升温速率升温至1020℃保温3小时。8. 16g of Ba-Cu-O precursor powder was added to the Y-Ba-Cu-O solution obtained in step 7, and then heated to 1020°C at a heating rate of 1.75°C/min for 3 hours.

9.将经过步骤8获得的Y-Ba-Cu-O溶液以1.75℃/min的冷却速率冷却至 985℃。9. Cool the Y-Ba-Cu-O solution obtained in step 8 to 985°C at a cooling rate of 1.75°C/min.

10.采用尺寸为3mm×10mm的NGO单晶基板作为籽晶并固定在连接杆上,将NGO基板的表面插入到Y-Ba-Cu-O溶液,采用顶部籽晶提拉法液相外延生长 YBCO超导厚膜。生长过程中具体工艺参数为:籽晶的旋转速度为20rpm,生长时间为8s。10. The NGO single crystal substrate with a size of 3mm×10mm was used as the seed crystal and fixed on the connecting rod. The surface of the NGO substrate was inserted into the Y-Ba-Cu-O solution, and the top seed crystal pulling method was used for liquid phase epitaxy growth. YBCO superconducting thick film. The specific process parameters in the growth process are: the rotation speed of the seed crystal is 20 rpm, and the growth time is 8 s.

以上详细描述了本发明的较佳具体实施例。应当理解,本领域的普通技术无需创造性劳动就可以根据本发明的构思作出诸多修改和变化。因此,凡本技术领域中技术人员依本发明的构思在现有技术的基础上通过逻辑分析、推理或者有限的实验可以得到的技术方案,皆应在由权利要求书所确定的保护范围内。The preferred embodiments of the present invention have been described in detail above. It should be understood that many modifications and changes can be made according to the concept of the present invention by those skilled in the art without creative efforts. Therefore, any technical solutions that can be obtained by those skilled in the art through logical analysis, reasoning or limited experiments on the basis of the prior art according to the concept of the present invention shall fall within the protection scope determined by the claims.

Claims (4)

1.一种制备具有两种a轴晶粒的c轴YBCO高温超导厚膜的方法,包括如下工序:1. A method for preparing a c-axis YBCO high-temperature superconducting thick film with two kinds of a-axis grains, comprising the following steps: a) 制备Ba-Cu-O相的先驱粉末;a) Preparation of the precursor powder of Ba-Cu-O phase; b) 将Ba-Cu-O先驱粉末加入到晶体生长炉中的Y2O3坩埚中;b) adding the Ba-Cu-O precursor powder to the Y 2 O 3 crucible in the crystal growth furnace; c) 将工序b)中的Ba-Cu-O先驱粉末和Y2O3材料的坩埚加热至第一温度进行保温,获得Y-Ba-Cu-O溶液;其中,所述第一温度为所述YBCO的包晶反应温度以上5~35℃,保温时间为20~24小时;c) heating the crucible of the Ba-Cu-O precursor powder and the Y 2 O 3 material in the step b) to a first temperature for heat preservation to obtain a Y-Ba-Cu-O solution; wherein the first temperature is the The above-mentioned peritectic reaction temperature of YBCO is 5~35°C, and the holding time is 20~24 hours; d) 在晶体生长炉中顶部籽晶提拉法液相外延生长YBCO超导厚膜;d) Liquid phase epitaxy growth of YBCO superconducting thick film by top seed pulling method in a crystal growth furnace; 其特征在于,工序d)中的液相外延生长包括以下步骤:It is characterized in that, the liquid phase epitaxial growth in step d) includes the following steps: e) 在工序c)中的Y-Ba-Cu-O溶液中加入Ba-Cu-O先驱粉末,并在第一温度进行长时间的保温以获得初始状态恒定的溶液;所述Ba-Cu-O先驱粉末的加入量为15~20克,保温时间为11~13小时;e) adding the Ba-Cu-O precursor powder to the Y-Ba-Cu-O solution in step c), and keeping it at the first temperature for a long time to obtain a solution with a constant initial state; the Ba-Cu-O The amount of O precursor powder added is 15-20 grams, and the holding time is 11-13 hours; f) 将所述步骤e)中获得的Y-Ba-Cu-O溶液以第一降温速度降低至第二温度;其中,所述第一降温速度为1.5~3℃/min,所述第二温度为所述YBCO的包晶温度以下3~30℃;f) reducing the Y-Ba-Cu-O solution obtained in the step e) to a second temperature at a first cooling rate; wherein, the first cooling rate is 1.5~3°C/min, and the second cooling rate The temperature is 3~30°C below the peritectic temperature of the YBCO; g) 在所述步骤f)中获得的Y-Ba-Cu-O溶液中加入Ba-Cu-O先驱粉末,并以第一升温速度升温至第一温度进行保温;其中,所述Ba-Cu-O先驱粉末的加入量为15~20克,所述第一升温速度为1.5~3℃/min,保温时间为2~4小时;g) adding Ba-Cu-O precursor powder to the Y-Ba-Cu-O solution obtained in the step f), and heating up to a first temperature at a first heating rate for heat preservation; wherein, the Ba-Cu-O The add-on of -O pioneer powder is 15~20 grams, the described first heating rate is 1.5~3 ℃/min, and the holding time is 2~4 hours; h) 将步骤g)中获得的Y-Ba-Cu-O溶液以第一降温速度降低至第二温度;h) reducing the Y-Ba-Cu-O solution obtained in step g) to the second temperature at the first cooling rate; i) 将固定在连接杆的籽晶材料插入到步骤h)得到的Y-Ba-Cu-O溶液,外延生长一段时间后取出,获得具有两种a轴晶粒的c轴YBCO高温超导厚膜。i) Insert the seed material fixed on the connecting rod into the Y-Ba-Cu-O solution obtained in step h), and take it out after epitaxial growth for a period of time to obtain a c-axis YBCO high-temperature superconducting thickness with two kinds of a-axis grains membrane. 2.如权利要求1所述的方法,其中,所述工序a)包括:2. The method of claim 1, wherein the process a) comprises: 按照Ba:Cu=0.3~0.8的比例将BaCO3和CuO粉末混合,放入球磨罐,加入无水乙醇或水进行湿磨以获得BaCO3和CuO的混合浆料,湿磨时间为2~4小时;Mix BaCO3 and CuO powder according to the ratio of Ba:Cu=0.3~0.8, put it into the ball mill, add absolute ethanol or water for wet milling to obtain the mixed slurry of BaCO3 and CuO , the wet milling time is 2~4 Hour; 将所述BaCO3和CuO的混合浆料置于90℃~120℃温度下加热烘干,得到BaCO3和CuO的混合粉料;heating and drying the mixed slurry of BaCO 3 and CuO at a temperature of 90° C. to 120° C. to obtain a mixed powder of BaCO 3 and CuO; 将所述BaCO3和CuO的混合粉料在空气中890℃~910℃烧结40~50小时,得到Ba-Cu-O相的前驱粉体。The mixed powder of BaCO 3 and CuO is sintered in air at 890° C. to 910° C. for 40 to 50 hours to obtain a Ba-Cu-O phase precursor powder. 3.如权利要求1所述的方法,其中,步骤i)中的所述籽晶材料是NdGaO3单晶基板,尺寸为10mm×3mm。3. The method of claim 1, wherein the seed crystal material in step i) is a NdGaO 3 single crystal substrate with a size of 10 mm×3 mm. 4.如权利要求1所述的方法,其中,步骤i)中的所述外延生长的旋转速度为10~20rpm,生长时间为5-15s。4. The method according to claim 1, wherein the rotational speed of the epitaxial growth in step i) is 10-20 rpm, and the growth time is 5-15 s.
CN201810824851.6A 2018-07-25 2018-07-25 Method for preparing c-axis YBCO high-temperature superconducting thick film with two a-axis grains Expired - Fee Related CN109082708B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810824851.6A CN109082708B (en) 2018-07-25 2018-07-25 Method for preparing c-axis YBCO high-temperature superconducting thick film with two a-axis grains

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810824851.6A CN109082708B (en) 2018-07-25 2018-07-25 Method for preparing c-axis YBCO high-temperature superconducting thick film with two a-axis grains

Publications (2)

Publication Number Publication Date
CN109082708A CN109082708A (en) 2018-12-25
CN109082708B true CN109082708B (en) 2020-12-25

Family

ID=64838500

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810824851.6A Expired - Fee Related CN109082708B (en) 2018-07-25 2018-07-25 Method for preparing c-axis YBCO high-temperature superconducting thick film with two a-axis grains

Country Status (1)

Country Link
CN (1) CN109082708B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5968877A (en) * 1995-04-10 1999-10-19 Lockheed Martin Energy Research Corp High Tc YBCO superconductor deposited on biaxially textured Ni substrate

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102925976B (en) * 2012-11-06 2015-07-15 上海交通大学 Method using NGO monocrystal substrate to prepare a shaft REBCO high temperature superconductor thick film
CN103276447B (en) * 2013-06-18 2016-06-01 上海交通大学 A kind of method preparing specific blend orientation YBCO high temperature superconductive thick film
CN103526283B (en) * 2013-10-31 2016-07-06 上海交通大学 A kind of method of the YBCO liquid phase epitaxy film preparing pure a axle orientation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5968877A (en) * 1995-04-10 1999-10-19 Lockheed Martin Energy Research Corp High Tc YBCO superconductor deposited on biaxially textured Ni substrate

Also Published As

Publication number Publication date
CN109082708A (en) 2018-12-25

Similar Documents

Publication Publication Date Title
CN102925976B (en) Method using NGO monocrystal substrate to prepare a shaft REBCO high temperature superconductor thick film
CN103276447B (en) A kind of method preparing specific blend orientation YBCO high temperature superconductive thick film
CN102877124B (en) Method for preparing wide-crack spacing REBCO high-temperature superconducting thick films using YBCO/LAO seed films
CN103696009B (en) A kind of method preparing a axle orientation high temperature superconducting film in atmosphere
CN103526283B (en) A kind of method of the YBCO liquid phase epitaxy film preparing pure a axle orientation
CN110373717B (en) A method for growing REBCO high-temperature superconducting bulk material by component layering control method
CN102925985B (en) Method for batch growth of REBCO high temperature superconducting bulks based on two-layer silicon carbide support
CN1970849A (en) Oxygen atmosphere control preparation method for alpha-axis oriented Yt-Ba-Cu-O superconductive thick film
CN109082708B (en) Method for preparing c-axis YBCO high-temperature superconducting thick film with two a-axis grains
CN104120490B (en) A kind of method for preparing a axle orientation high temperature superconducting film
CN103603034B (en) A kind of method preparing large scale HTS single crystals body
Yao et al. Large-sized SmBCO single crystals with Tc over 93 K grown in atmospheric ambient by crystal pulling
CN109023526B (en) A method for preparing calcium-doped YBCO high-temperature superconducting single crystal
CN1190526C (en) Liquid phase epitaxial growth of superconductive thick film material with overheated seed film as seed crystal
US6083884A (en) A-axis high temperature superconducting films with preferential in-plane alignment
CN104178808B (en) Liquid-phase epitaxial method for preparing high-temperature superconductive artificial crystal boundary
Kwon et al. Fabrication and characterization of (rare-earth)-barium-copper-oxide (RE123 with RE= Y, Er, and Sm) films
CN100494516C (en) Preparation method of in-plane orientation growth of yttrium barium copper oxide superconducting thick film controlled by oxygen atmosphere
CN104109905A (en) Method for preparing crack-free YBCO liquid phase epitaxial film
CN104233455B (en) A kind of method preparing high-temperature superconductor doped crystal
Kitamura et al. Growth mechanism of thick c-axis oriented YBa2Cu3O7− y films prepared by liquid phase epitaxy
Zhao et al. Effect of precursor stoichiometry on the superconducting properties of fluorine-free sol–gel YBCO thin films
Zeng et al. YBCO melt-textured growth seeded by NdBCO liquid phase epitaxy thick film
Simon 0Substrates for HTS Films
CN104164701A (en) Method for preparing high-temperature superconducting film by liquid-phase epitaxy

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20201225

Termination date: 20210725