CN109037118B - Method and equipment for taking and placing permanent magnet for multiple grains - Google Patents
Method and equipment for taking and placing permanent magnet for multiple grains Download PDFInfo
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- CN109037118B CN109037118B CN201811045952.XA CN201811045952A CN109037118B CN 109037118 B CN109037118 B CN 109037118B CN 201811045952 A CN201811045952 A CN 201811045952A CN 109037118 B CN109037118 B CN 109037118B
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- 238000000034 method Methods 0.000 title claims abstract description 35
- 238000005192 partition Methods 0.000 claims abstract description 17
- 239000013078 crystal Substances 0.000 claims abstract description 14
- 229910001172 neodymium magnet Inorganic materials 0.000 claims abstract description 6
- 238000005530 etching Methods 0.000 claims description 17
- 238000009434 installation Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 230000005484 gravity Effects 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 6
- 239000000696 magnetic material Substances 0.000 abstract description 8
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 abstract description 3
- 230000000903 blocking effect Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
本发明公开了一种将永久磁铁用于多颗晶粒的取放方法及设备,使用钕铁硼磁铁,能够保证吸引磁力恒久稳定,保证稳定性,配合隔板使用,通过隔板将芯片与永磁块分隔开,不会有阻隔磁力的效果,避免芯片与永磁块直接接触吸住而造成无法分离,方便芯片的拿取与卸下。使用气缸推动永磁块移动,能够使永磁块缓慢运动,可使磁力缓慢的减弱,避免了在向上吸引和向下脱离的过程中,造成磁力材料的剧烈晃动的问题。能够同时拿取多个芯片,且通过一个气缸推动多个顶杆,使多个芯片同时完成拿取卸下的操作,同步率高,提高了工作效率。可通过调节气缸的伸长量来改变芯片所受磁力的大小,进而适应不同重量的芯片,适用范围广。
The invention discloses a method and equipment for using permanent magnets to pick and place multiple crystal grains. The use of neodymium iron boron magnets can ensure permanent and stable magnetic attraction and ensure stability. It is used in conjunction with a partition, through which the chip and the The permanent magnet blocks are separated and will not have the effect of blocking the magnetic force. This prevents the chip and the permanent magnet block from being inseparable due to direct contact and attraction, making it easier to pick up and remove the chip. Using a cylinder to push the permanent magnet block to move can make the permanent magnet block move slowly, which can slowly weaken the magnetic force and avoid the problem of violent shaking of the magnetic material during the process of upward attraction and downward detachment. It can pick up multiple chips at the same time, and push multiple ejector pins through one cylinder, so that multiple chips can be picked up and removed at the same time. The synchronization rate is high and the work efficiency is improved. The size of the magnetic force on the chip can be changed by adjusting the extension of the cylinder, thereby adapting to chips of different weights and having a wide range of applications.
Description
技术领域Technical field
本发明涉及封装制程设备领域,具体涉及一种将永久磁铁用于多颗晶粒的取放方法及设备。The invention relates to the field of packaging process equipment, and in particular to a method and equipment for picking and placing a plurality of crystal grains using permanent magnets.
背景技术Background technique
IC封装,就是指把硅片上的电路管脚,用导线接引到外部接头处,以便与其它器件连接。封装形式是指安装半导体集成电路芯片用的外壳。它不仅起着安装、固定、密封、保护芯片及增强电热性能等方面的作用,而且还通过芯片上的接点用导线连接到封装外壳的引脚上,这些引脚又通过印刷电路板上的导线与其他器件相连接,从而实现内部芯片与外部电路的连接。IC packaging refers to connecting the circuit pins on the silicon chip to external connectors with wires to connect them to other devices. Package form refers to the housing used to install semiconductor integrated circuit chips. It not only plays the role of installing, fixing, sealing, protecting the chip and enhancing the electrical and thermal performance, but also connects to the pins of the package shell with wires through the contacts on the chip, which in turn pass through the wires on the printed circuit board. Connect with other devices to realize the connection between the internal chip and the external circuit.
IC封装使用导线架蚀刻成形,目前使用的方式是真空泵连接软性吸嘴进行取放操作,真空泵是指利用机械、物理、化学或物理化学的方法对被抽容器进行抽气而获得真空的器件或设备。通俗来讲,真空泵是用各种方法在某一封闭空间中改善、产生和维持真空的装置,现有技术下,软性吸嘴的吸头容易变形,导致取放操作时的稳定性较差,影响工作效率。IC packaging is formed by etching the lead frame. The currently used method is to connect a vacuum pump to a soft suction nozzle for pick-and-place operations. A vacuum pump refers to a device that uses mechanical, physical, chemical or physical and chemical methods to evacuate the pumped container to obtain a vacuum. or equipment. Generally speaking, a vacuum pump is a device that uses various methods to improve, generate and maintain vacuum in a certain closed space. Under the current technology, the suction head of a soft suction nozzle is easily deformed, resulting in poor stability during pick and place operations. , affecting work efficiency.
机械臂是指高精度,高速点胶机器手,机械臂是一个多输入多输出、高度非线性、强耦合的复杂系统。因其独特的操作灵活性,已在工业装配,安全防爆等领域得到广泛应用。The robotic arm refers to a high-precision, high-speed dispensing robot. The robotic arm is a complex system with multiple inputs and multiple outputs, high nonlinearity, and strong coupling. Because of its unique operational flexibility, it has been widely used in industrial assembly, safety and explosion-proof and other fields.
毛边机是用于处理压缩或射出成型之热硬性塑料制品毛边的设备,自给式投射装置、机箱、环带输送装置、集尘装置等组合为一体,是一种外观简洁,不占空间,效率又高的喷洗机,可用于IC封装的蚀刻工序。The burring machine is a device used to process the burrs of compression or injection molded thermosetting plastic products. It is a self-contained projection device, chassis, endless belt conveyor, dust collection device, etc. It is a simple appearance, does not take up space, and is efficient. This high-end spray cleaning machine can be used in the etching process of IC packaging.
发明内容Contents of the invention
为了解决上述的技术问题,本发明的目的在于提供一种将永久磁铁用于多颗晶粒的取放方法及设备,通过调节磁力大小取放芯片,提升了稳定性,省时省力,提高了工作效率。In order to solve the above technical problems, the purpose of the present invention is to provide a method and equipment for using permanent magnets to pick and place multiple crystal grains. By adjusting the size of the magnetic force to pick and place the chips, the stability is improved, time and effort are saved, and the efficiency is improved. Work efficiency.
本发明的目的可以通过以下技术方案实现:The object of the present invention can be achieved through the following technical solutions:
一种将永久磁铁用于多颗晶粒的取放方法,包括IC托盘、机械臂、取放设备和蚀刻装置,所述一种将永久磁铁用于多颗晶粒的取放方法包括:A pick-and-place method using permanent magnets for multiple crystal grains, including an IC tray, a robotic arm, pick-and-place equipment, and an etching device. The pick-and-place method using permanent magnets for multiple crystal grains includes:
S1.芯片的取出及固定:机械臂与取放设备固定连接,机械臂控制取放设备运动,使取放设备与放置在工作台上的IC托盘对齐并靠近,取放设备抵触在IC托盘的上端面后,使机械臂位置固定,同时取放设备启动,通过增加磁力将芯片从IC托盘中吸出,使芯片吸附在取放设备的下端面,完成取出固定的工序;S1. Removing and fixing chips: The robotic arm is fixedly connected to the pick-and-place equipment. The robotic arm controls the movement of the pick-and-place equipment so that the pick-and-place equipment is aligned and close to the IC tray placed on the workbench. The pick-and-place equipment conflicts with the IC tray. After the upper end surface, the position of the robotic arm is fixed, and the pick-and-place equipment is started at the same time. The chip is sucked out of the IC tray by increasing the magnetic force, so that the chip is adsorbed on the lower end surface of the pick-and-place equipment, and the process of taking out and fixing is completed;
S2.芯片的蚀刻:控制机械臂将吸附固定有芯片的取放设备水平传送至蚀刻装置中,随后改变芯片所受磁力的大小,当芯片的重力大于磁力,使芯片与取放设备分离,蚀刻装置对芯片进行加工;S2. Etching of chips: Control the robotic arm to horizontally transport the pick-and-place equipment with the chip attached to the etching device, and then change the magnitude of the magnetic force on the chip. When the gravity of the chip is greater than the magnetic force, the chip is separated from the pick-and-place equipment and etched. The device processes the chip;
S3.芯片的转移:待蚀刻装置对芯片加工完成后,重复S1的操作,使完成加工的芯片与取放设备重新吸附固定在一起,通过机械臂运输至下一个加工设备中。S3. Chip transfer: After the etching device has completed processing the chip, repeat the operation of S1 so that the processed chip and the pick-and-place equipment are re-adsorbed and fixed together, and then transported to the next processing equipment through the robotic arm.
进一步的,所述蚀刻装置为毛边机。Further, the etching device is a burring machine.
进一步的,所述芯片为QFN IC Package。Further, the chip is a QFN IC Package.
进一步的,所述IC托盘为QFN Matrix IC Tray,所述IC托盘的表面开设有四十八个呈矩阵分布的固定槽,所述固定槽为立方体结构。Further, the IC tray is a QFN Matrix IC Tray, and the surface of the IC tray is provided with forty-eight fixing slots distributed in a matrix, and the fixing slots have a cubic structure.
该方法的有益效果:使用磁力吸引,在拿取和放置时,能够保证受力稳定,不会由于软性吸嘴的吸头变形而产生的稳定性问题,且省时省力,提高了工作效率。The beneficial effects of this method: the use of magnetic attraction can ensure stable force when picking and placing, and will not cause stability problems due to the deformation of the suction head of the soft suction nozzle. It also saves time and effort, and improves work efficiency. .
一种将永久磁铁用于多颗晶粒的取放设备,包括气缸,所述气缸固定连接有连接螺纹柱,所述连接螺纹柱与机械臂螺纹连接,所述气缸的活塞杆固定连接有推板,所述推板的下端面垂直固定连接有匹配固定槽的四十八个顶杆,所述气缸的外侧壁通过固定支架连接有安装盒,所述安装盒位于气缸的正下方,且安装盒与推板平行设置,所述安装盒的下端面开设有匹配固定槽的四十八个滑动槽,所述滑动槽的内顶壁开设有连通安装盒上端面的插孔,所述插孔、滑动槽和顶杆同轴设置,所述滑动槽内滑动连接有永磁块,所述永磁块的上端通过复位弹簧与滑动槽的内顶壁连接,所述复位弹簧活动套设在顶杆上,所述顶杆的下端穿过插孔并与永磁块的上端面相抵触,所述安装盒下端面的四个端点处均固定连接有连接柱的一端,四个所述连接柱的另一端固定连接在同一个隔板上,所述隔板为无磁性反应的材质。A pick-and-place equipment that uses permanent magnets for multiple crystal grains, including a cylinder. The cylinder is fixedly connected with a connecting threaded column. The connecting threaded column is threadedly connected with a mechanical arm. The piston rod of the cylinder is fixedly connected with a pusher. The lower end surface of the push plate is vertically fixedly connected with forty-eight push rods matching the fixing grooves. The outer side wall of the cylinder is connected with a mounting box through a fixed bracket. The mounting box is located directly below the cylinder, and the mounting box is connected to the The push plates are arranged in parallel, and the lower end surface of the installation box is provided with forty-eight sliding grooves that match the fixed grooves. The inner top wall of the sliding groove is provided with a jack hole that communicates with the upper end surface of the installation box. The jack hole, sliding groove and The ejector rod is coaxially arranged, and a permanent magnet block is slidably connected in the sliding groove. The upper end of the permanent magnet block is connected to the inner top wall of the sliding groove through a return spring. The return spring is movably sleeved on the ejector rod, so The lower end of the push rod passes through the jack and conflicts with the upper end surface of the permanent magnet block. One end of the connecting post is fixedly connected to the four end points of the lower end surface of the installation box, and the other ends of the four connecting posts are fixedly connected. On the same separator, the separator is made of non-magnetic reactive material.
进一步的,所述永磁块为钕铁硼磁铁,所述永磁块为圆柱体结构,且永磁块的底面面积小于芯片的面积。Further, the permanent magnet block is a neodymium iron boron magnet, the permanent magnet block has a cylindrical structure, and the bottom surface area of the permanent magnet block is smaller than the area of the chip.
进一步的,所述气缸为单作用气缸,且气缸的推动速度不超过1mm/s。Further, the cylinder is a single-acting cylinder, and the pushing speed of the cylinder does not exceed 1mm/s.
进一步的,所述隔板厚度不超过1mm,且滑动槽的长度不小于7cm。Further, the thickness of the partition is no more than 1 mm, and the length of the sliding groove is no less than 7 cm.
在拿取芯片时,将IC托盘上的固定槽与永磁块一一对应,将气缸启动,推动推板向下运动,使顶杆推动永磁块沿滑动槽向下运动,此时由于永磁块与芯片的距离以1mm/s的速度缓慢减小,保证在向上吸引和向下脱离的过程中,不会造成磁力材料的剧烈晃动,且芯片含有导线金属架,属于磁力材料,磁力增大且大于芯片的重力,即可将芯片从IC托盘吸出,紧紧吸附在隔板的下端面上,通过无磁性反应的材料的隔板保证不会影响磁力大小,且使永磁块与芯片隔开,避免了芯片与永磁块直接吸住而造成无法分离的问题。When taking the chip, match the fixed groove on the IC tray with the permanent magnet block one by one, start the cylinder, push the push plate to move downward, and make the ejector push the permanent magnet block to move downward along the sliding groove. At this time, due to the permanent The distance between the magnet block and the chip slowly decreases at a speed of 1mm/s to ensure that the magnetic material will not shake violently during the process of upward attraction and downward detachment. Moreover, the chip contains a wire metal frame, which is a magnetic material, and the magnetic force increases. If the gravity is larger than the chip, the chip can be sucked out of the IC tray and tightly attached to the lower end surface of the partition. The partition made of non-magnetic reaction material ensures that the magnetic force will not be affected, and the permanent magnet block and chip will be Separation avoids the problem that the chip and the permanent magnet block are directly attracted and cannot be separated.
在卸下芯片时,只需将气缸启动,推动推板向上运动,复位弹簧拉动永磁块沿滑动槽向上运动,同时永磁块与顶杆保持抵触,保证永磁块缓慢上升,磁力缓慢减小,芯片重力大于磁力时,芯片与隔板分离。When removing the chip, just start the cylinder and push the push plate to move upward. The return spring pulls the permanent magnet block to move upward along the sliding groove. At the same time, the permanent magnet block maintains conflict with the ejector pin to ensure that the permanent magnet block rises slowly and the magnetic force slowly decreases. Small, when the gravity of the chip is greater than the magnetic force, the chip is separated from the separator.
本取放设备的有益效果:Beneficial effects of this pick and place equipment:
(1)使用钕铁硼磁铁,能够保证吸引磁力恒久稳定,保证稳定性,配合隔板使用,通过1mm厚的无磁性反应材料制作的隔板将芯片与永磁块分隔开,不会有阻隔磁力的效果,避免芯片与永磁块直接接触吸住而造成无法分离,方便芯片的拿取与卸下。(1) The use of neodymium iron boron magnets can ensure permanent and stable magnetic attraction and ensure stability. Use it with a separator to separate the chip and the permanent magnet block through a 1mm thick separator made of non-magnetic reactive material. There will be no The effect of blocking magnetic force prevents the chip and the permanent magnet block from being in direct contact and being unable to separate, making it easier to pick up and remove the chip.
(2)使用气缸推动永磁块移动,能够使永磁块缓慢运动,可使磁力缓慢的减弱,避免了在向上吸引和向下脱离的过程中,造成磁力材料的剧烈晃动的问题。(2) Using a cylinder to push the permanent magnet block to move can make the permanent magnet block move slowly, which can slowly weaken the magnetic force and avoid the problem of violent shaking of the magnetic material during the process of upward attraction and downward detachment.
(3)能够同时拿取多个芯片,且通过一个气缸推动多个顶杆,使多个芯片同时完成拿取卸下的操作,同步率高,提高了工作效率。(3) Multiple chips can be picked up at the same time, and multiple ejector pins are pushed through one cylinder, so that multiple chips can be picked up and removed at the same time. The synchronization rate is high and work efficiency is improved.
(4)可通过调节气缸的伸长量来改变芯片所受磁力的大小,进而适应不同重量的芯片,适用范围广。(4) The magnitude of the magnetic force on the chip can be changed by adjusting the extension of the cylinder, thereby adapting to chips of different weights and having a wide range of applications.
附图说明Description of the drawings
下面结合附图对本发明作进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings.
图1是本发明的取放设备的结构示意图;Figure 1 is a schematic structural diagram of the pick and place equipment of the present invention;
图2是本发明的取放设备的内部结构示意图;Figure 2 is a schematic diagram of the internal structure of the pick and place equipment of the present invention;
图3是本发明的IC托盘的结构示意图。Figure 3 is a schematic structural diagram of the IC tray of the present invention.
图中:气缸1、连接螺纹柱2、推板3、顶杆4、固定支架5、安装盒6、连接柱7、隔板8、复位弹簧9、永磁块10、IC托盘11、固定槽12。In the picture: cylinder 1, connecting threaded column 2, push plate 3, ejector rod 4, fixed bracket 5, installation box 6, connecting column 7, partition 8, return spring 9, permanent magnet block 10, IC tray 11, fixed groove 12.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.
请参阅图1-3所示,本实施例提供了一种将永久磁铁用于多颗晶粒的取放方法及设备,包括IC托盘11、机械臂、取放设备和蚀刻装置,所述一种将永久磁铁用于多颗晶粒的取放方法包括:Please refer to Figures 1-3. This embodiment provides a method and equipment for picking and placing multiple dies using permanent magnets, including an IC tray 11, a robotic arm, a picking and placing device, and an etching device. Several pick-and-place methods using permanent magnets for multiple dies include:
S1.芯片的取出及固定:机械臂与取放设备固定连接,机械臂控制取放设备运动,使取放设备与放置在工作台上的IC托盘11对齐并靠近,取放设备抵触在IC托盘11的上端面后,使机械臂位置固定,同时取放设备启动,通过增加磁力将芯片从IC托盘11中吸出,使芯片吸附在取放设备的下端面,完成取出固定的工序;S1. Removing and fixing the chip: The robotic arm is fixedly connected to the pick-and-place equipment. The robotic arm controls the movement of the pick-and-place equipment so that the pick-and-place equipment is aligned and close to the IC tray 11 placed on the workbench. The pick-and-place equipment conflicts with the IC tray. After the upper end surface of 11, the position of the robotic arm is fixed, and the pick-and-place equipment is started at the same time. The chip is sucked out of the IC tray 11 by increasing the magnetic force, so that the chip is adsorbed on the lower end surface of the pick-and-place equipment, and the process of taking out and fixing is completed;
S2.芯片的蚀刻:控制机械臂将吸附固定有芯片的取放设备水平传送至蚀刻装置中,随后改变芯片所受磁力的大小,当芯片的重力大于磁力,使芯片与取放设备分离,蚀刻装置对芯片进行加工;S2. Etching of chips: Control the robotic arm to horizontally transport the pick-and-place equipment with the chip attached to the etching device, and then change the magnitude of the magnetic force on the chip. When the gravity of the chip is greater than the magnetic force, the chip is separated from the pick-and-place equipment and etched. The device processes the chip;
S3.芯片的转移:待蚀刻装置对芯片加工完成后,重复S1的操作,使完成加工的芯片与取放设备重新吸附固定在一起,通过机械臂运输至下一个加工设备中。S3. Chip transfer: After the etching device has completed processing the chip, repeat the operation of S1 so that the processed chip and the pick-and-place equipment are re-adsorbed and fixed together, and then transported to the next processing equipment through the robotic arm.
所述蚀刻装置为毛边机。The etching device is a burring machine.
所述芯片为QFN IC Package,其内部包含导线金属架,属于磁力材料。The chip is a QFN IC Package, which contains a wire metal frame inside and is a magnetic material.
所述IC托盘11为QFN Matrix IC Tray,所述IC托盘11的表面开设有四十八个呈矩阵分布的固定槽12,所述固定槽12为立方体结构。The IC tray 11 is a QFN Matrix IC Tray. The surface of the IC tray 11 is provided with forty-eight fixing slots 12 distributed in a matrix. The fixing slots 12 have a cubic structure.
该方法的有益效果:使用磁力吸引,在拿取和放置时,能够保证受力稳定,不会由于软性吸嘴的吸头变形而产生的稳定性问题,且省时省力,提高了工作效率。The beneficial effects of this method: the use of magnetic attraction can ensure stable force when picking and placing, and will not cause stability problems due to the deformation of the suction head of the soft suction nozzle. It also saves time and effort, and improves work efficiency. .
一种将永久磁铁用于多颗晶粒的取放设备,包括气缸1,所述气缸1为单作用气缸,且气缸1的推动速度不超过1mm/s,磁力会因为距离变远,而很快的减弱,但并不是等比例的变化;故移动永久磁铁必须很缓慢才能轻巧的分离,所述气缸1固定连接有连接螺纹柱2,所述连接螺纹柱2与机械臂螺纹连接,所述气缸1的活塞杆固定连接有推板3,所述推板3的下端面垂直固定连接有匹配固定槽12的四十八个顶杆4,保证取放多个芯片的同步率,所述气缸1的外侧壁通过固定支架5连接有安装盒6,所述安装盒6位于气缸1的正下方,且安装盒6与推板3平行设置,所述安装盒6的下端面开设有匹配固定槽12的四十八个滑动槽,且滑动槽的长度不小于7cm,能够适用不同重量的芯片,所述滑动槽的内顶壁开设有连通安装盒6上端面的插孔,所述插孔、滑动槽和顶杆4同轴设置,所述滑动槽内滑动连接有永磁块10,所述永磁块10为钕铁硼磁铁,所述永磁块10为圆柱体结构,且永磁块10的底面面积小于芯片的面积,所述永磁块10的上端通过复位弹簧9与滑动槽的内顶壁连接,所述复位弹簧9活动套设在顶杆4上,所述顶杆4的下端穿过插孔并与永磁块10的上端面相抵触,所述安装盒6下端面的四个端点处均固定连接有连接柱7的一端,四个所述连接柱7的另一端固定连接在同一个隔板8上,有磁性反应的铁片,最能阻隔磁力;而无磁性反应的材料,反而不会阻挡磁力,因此所述隔板8为无磁性反应的材质,脱离关键是利用隔板8,未来不被永磁块10直接吸住而造成无法分离,所述隔板8厚度不超过1mm。A pick-and-place equipment that uses permanent magnets for multiple crystal grains, including a cylinder 1. The cylinder 1 is a single-acting cylinder, and the pushing speed of the cylinder 1 does not exceed 1 mm/s. The magnetic force will be greatly affected by the distance becoming farther. It weakens quickly, but it does not change in equal proportion; therefore, the moving permanent magnet must be moved very slowly to be separated lightly. The cylinder 1 is fixedly connected with a connecting threaded column 2, and the connecting threaded column 2 is threadedly connected to the mechanical arm. The piston rod of the cylinder 1 is fixedly connected to a push plate 3, and the lower end surface of the push plate 3 is vertically fixedly connected to forty-eight ejector pins 4 matching the fixing groove 12 to ensure the synchronization rate of picking and placing multiple chips. The outer wall is connected to a mounting box 6 through a fixed bracket 5. The mounting box 6 is located directly below the cylinder 1, and the mounting box 6 is arranged parallel to the push plate 3. The lower end of the mounting box 6 is provided with a matching fixing groove 12. Forty-eight sliding grooves, and the length of the sliding groove is not less than 7cm, which can be used for chips of different weights. The inner top wall of the sliding groove is provided with a jack connecting the upper end surface of the installation box 6. The jack, sliding groove and top The rod 4 is coaxially arranged, and a permanent magnet block 10 is slidably connected in the sliding groove. The permanent magnet block 10 is a neodymium iron boron magnet. The permanent magnet block 10 has a cylindrical structure, and the bottom surface area of the permanent magnet block 10 is Smaller than the area of the chip, the upper end of the permanent magnet block 10 is connected to the inner top wall of the sliding groove through a return spring 9. The return spring 9 is movably sleeved on the push rod 4, and the lower end of the push rod 4 passes through the insert. hole and conflicts with the upper end surface of the permanent magnet block 10. One end of the connecting post 7 is fixedly connected to the four end points of the lower end surface of the installation box 6, and the other ends of the four connecting posts 7 are fixedly connected to the same partition. On the plate 8, the iron piece with magnetic reaction can best block the magnetic force; while the material without magnetic reaction will not block the magnetic force. Therefore, the partition 8 is made of non-magnetic reaction material. The key to separation is to use the partition 8. If it is not directly attracted by the permanent magnet block 10 and cannot be separated in the future, the thickness of the partition plate 8 should not exceed 1 mm.
本取放设备使用钕铁硼磁铁,能够保证吸引磁力恒久稳定,保证稳定性,配合隔板8使用,通过1mm厚的无磁性反应材料制作的隔板8将芯片与永磁块10分隔开,不会有阻隔磁力的效果,避免芯片与永磁块10直接接触吸住而造成无法分离,方便芯片的拿取与卸下。使用气缸1推动永磁块10移动,能够使永磁块10缓慢运动,可使磁力缓慢的减弱,避免了在向上吸引和向下脱离的过程中,造成磁力材料的剧烈晃动的问题。能够同时拿取多个芯片,且通过一个气缸1推动多个顶杆4,使多个芯片同时完成拿取卸下的操作,同步率高,提高了工作效率。可通过调节气缸1的伸长量来改变芯片所受磁力的大小,进而适应不同重量的芯片,适用范围广。This pick-and-place equipment uses neodymium iron boron magnets, which can ensure permanent and stable magnetic attraction and ensure stability. It is used with the partition 8. The chip and the permanent magnet block 10 are separated by the partition 8 made of 1mm thick non-magnetic reactive material. , there will be no magnetic blocking effect, and the chip and the permanent magnet block 10 will be prevented from being inseparable due to direct contact and adsorption, thereby facilitating the taking and removal of the chip. Using the cylinder 1 to push the permanent magnet block 10 to move can make the permanent magnet block 10 move slowly, which can slowly weaken the magnetic force and avoid the problem of violent shaking of the magnetic material during the process of upward attraction and downward detachment. It can pick up multiple chips at the same time, and push multiple ejector pins 4 through one cylinder 1, so that multiple chips can be picked up and removed at the same time. The synchronization rate is high and the work efficiency is improved. The magnitude of the magnetic force on the chip can be changed by adjusting the elongation of the cylinder 1, thereby adapting to chips of different weights and having a wide range of applications.
本取放设备的具体工作过程如下:The specific working process of this pick and place equipment is as follows:
1)在拿取芯片时,将IC托盘11上的固定槽12与永磁块10一一对应,将气缸1启动,推动推板3向下运动,使顶杆4推动永磁块10沿滑动槽向下运动,此时由于永磁块10与芯片的距离以1mm/s的速度缓慢减小,保证在向上吸引和向下脱离的过程中,不会造成磁力材料的剧烈晃动,且芯片含有导线金属架,属于磁力材料,磁力增大且大于芯片的重力,即可将芯片从IC托盘11吸出,紧紧吸附在隔板8的下端面上,通过无磁性反应的材料的隔板8保证不会影响磁力大小,且使永磁块10与芯片隔开,避免了芯片与永磁块10直接吸住而造成无法分离的问题;1) When taking the chip, match the fixed groove 12 on the IC tray 11 with the permanent magnet block 10 one by one, start the cylinder 1, push the push plate 3 to move downward, and make the ejector pin 4 push the permanent magnet block 10 to slide along The groove moves downward. At this time, since the distance between the permanent magnet block 10 and the chip slowly decreases at a speed of 1mm/s, it is ensured that the magnetic material will not shake violently during the upward attraction and downward detachment process, and the chip contains The wire metal frame is a magnetic material. When the magnetic force increases and is greater than the gravity of the chip, the chip can be sucked out from the IC tray 11 and tightly attached to the lower end surface of the partition 8. This is ensured by the partition 8 of non-magnetic reaction material. It will not affect the magnitude of the magnetic force and separate the permanent magnet block 10 from the chip, thus avoiding the problem that the chip and the permanent magnet block 10 are directly attracted and cannot be separated;
2)在卸下芯片时,只需将气缸1启动,推动推板3向上运动,复位弹簧9拉动永磁块10沿滑动槽向上运动,同时永磁块10与顶杆4保持抵触,保证永磁块10缓慢上升,磁力缓慢减小,芯片重力大于磁力时,芯片与隔板8分离。2) When removing the chip, just start the cylinder 1 and push the push plate 3 to move upward. The return spring 9 pulls the permanent magnet block 10 to move upward along the sliding groove. At the same time, the permanent magnet block 10 keeps in conflict with the push rod 4 to ensure permanent The magnetic block 10 rises slowly and the magnetic force slowly decreases. When the gravity of the chip is greater than the magnetic force, the chip is separated from the partition 8 .
以上内容仅仅是对本发明结构所作的举例和说明,所属本技术领域的技术人员对所描述的具体实施例做各种各样的修改或补充或采用类似的方式替代,只要不偏离发明的结构或者超越本权利要求书所定义的范围,均应属于本发明的保护范围。The above contents are only examples and descriptions of the structure of the present invention. Those skilled in the art may make various modifications or supplements to the described specific embodiments or substitute them in similar ways, as long as they do not deviate from the structure of the invention or Anything beyond the scope defined by the claims shall belong to the protection scope of the present invention.
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