CN109037077B - Semiconductor chip packaging method - Google Patents
Semiconductor chip packaging method Download PDFInfo
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- CN109037077B CN109037077B CN201810608523.2A CN201810608523A CN109037077B CN 109037077 B CN109037077 B CN 109037077B CN 201810608523 A CN201810608523 A CN 201810608523A CN 109037077 B CN109037077 B CN 109037077B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
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Abstract
The application discloses a semiconductor chip packaging method, which comprises the following steps: providing a metal plate with a first surface and a second surface; forming a first groove on the first surface of the metal plate to define a plurality of bearing units arranged in a matrix; electrically connecting the chip to the bearing unit; carrying out plastic package on the bearing unit by using a plastic package material to form a plastic package layer, wherein the first groove is filled with the plastic package material; forming a second groove and a third groove on the second surface of the metal plate, wherein the second groove is communicated with the first groove to form a through hole, and the third groove is connected with the adjacent bearing unit; forming an electroplated layer on the second surface of the metal plate, wherein the electroplated layer extends into the third groove or the second groove and the third groove; and separating the plastic packaging layer to form an independent semiconductor chip packaging device. Through the mode, the area of the pins of the semiconductor packaging device for the soldering tin to climb can be increased.
Description
Technical Field
The present disclosure relates to semiconductor chip technologies, and in particular, to a semiconductor chip packaging method.
Background
With the rapid development of science and technology, the development and production of semiconductor chip packaging devices are continuously developing towards high density, high performance, high reliability and low cost. As a result, the size of the semiconductor chip package device is continuously reduced, the number of pins provided on the semiconductor chip package device is greatly increased, the distance between the pins is increasingly small, and the density of the pins is increasingly high.
The inventor of the present application found in the course of long-term research that poor soldering performance often occurs during soldering of existing semiconductor chip package devices (e.g., quad flat non-leaded package devices, etc.), because the leads of the existing semiconductor chip package devices have only a small area at the bottom for solder to climb.
Disclosure of Invention
The technical problem mainly solved by the application is to provide a semiconductor chip packaging method, which can increase the area of pins of a semiconductor packaging device for soldering tin to climb.
In order to solve the technical problem, the application adopts a technical scheme that: provided is a semiconductor chip packaging method including: providing a metal plate with a first surface and a second surface; forming a first groove on the first surface of the metal plate to define a plurality of bearing units arranged in a matrix; electrically connecting the chip to the bearing unit; carrying out plastic package on the bearing unit by using a plastic package material to form a plastic package layer, wherein the first groove is filled with the plastic package material; forming a second groove and a third groove on the second surface of the metal plate, wherein the second groove is communicated with the first groove to form a through hole, and the third groove is connected with the adjacent bearing unit; forming an electroplated layer on the second surface of the metal plate, wherein the electroplated layer extends into the third groove or the second groove and the third groove; and separating the plastic packaging layer to form an independent semiconductor chip packaging device.
Wherein, the bearing unit is provided with the base island and the pin at the interval of through-hole, the pin is including being located the interior pin of first surface one side of metal sheet and being located the outer pin of second surface one side of metal sheet, with chip electric connection in bearing unit, include: and installing the chip on the base island of the bearing unit, and electrically connecting the chip and the inner pin of the bearing unit by adopting a lead.
Wherein, before adopting wire electric connection the chip with the inner pin of bearing unit, still include: forming a metal layer on the surface of the inner pin; adopt wire electric connection the chip with the inner pin of bearing unit includes: and the chip is electrically connected with the metal layer on the surface of the inner pin of the bearing unit by adopting a lead.
Wherein, the bearing unit is provided with the pin of through-hole interval, the pin is including being located the interior pin of first surface one side of metal sheet and being located the outer pin of second surface one side of metal sheet, with chip electric connection in bearing unit includes: the surface of the chip is provided with a convex column which is electrically connected with the inner pins around the through hole.
Wherein the step of forming a second groove and a third groove in the second surface of the metal plate specifically comprises: forming a patterned mask on the second surface of the metal plate; etching the area of the second surface of the metal plate, which is not covered by the mask, to form the second groove and a third groove, and communicating the second groove with the first groove.
The projection of the second groove on the first surface covers the projection of the first groove on the first surface, and the bottom of the first groove protrudes out of the second groove, so that the plastic package material in the first groove protrudes out of the second groove.
Wherein, carry out the plastic envelope with the plastic envelope material pair the unit that bears carries out the plastic envelope in order to form the plastic envelope layer, include: and forming one or more plastic packaging bodies, wherein each plastic packaging body comprises a plurality of bearing units arranged in a matrix.
Wherein, carry out the plastic envelope with the plastic envelope material pair the unit that bears carries out the plastic envelope in order to form the plastic envelope layer, include: and forming a plurality of discrete plastic-sealed bodies arranged in a matrix, wherein the plastic-sealed bodies correspond to the bearing units one by one.
And the distance between the adjacent plastic packaging bodies is larger than the third groove.
Wherein the step of separating the molding layer to form individual semiconductor chip package devices comprises: and cutting the plastic packaging layer to obtain an independent semiconductor chip packaging device, wherein the vertical section of the pin of the semiconductor chip packaging device in the direction along the connecting line of the second groove and the third groove is in a T shape.
The beneficial effect of this application is: in contrast to the prior art, the semiconductor chip packaging method provided by the present application includes: and forming a second groove and a third groove on the second surface of the metal plate, wherein the electroplated layer covers the second surface of the metal plate and extends into the third groove or the second groove and the third groove. By the mode, the pins of the semiconductor chip packaging device can form a structure with a plurality of electroplated layers, the area for soldering tin to climb is increased, welding performance is improved, and the yield of the semiconductor chip packaging device is increased.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts. Wherein:
FIG. 1 is a schematic flow chart diagram illustrating an embodiment of a semiconductor chip packaging method according to the present application;
FIG. 2 is a schematic structural diagram of an embodiment corresponding to steps S101-S107 in FIG. 1;
FIG. 3 is a schematic structural diagram of another embodiment corresponding to steps S103-S107 in FIG. 1;
FIG. 4 is a schematic structural diagram of another embodiment corresponding to steps S104-S107 in FIG. 1;
FIG. 5 is a schematic structural diagram of another embodiment corresponding to steps S104-S107 in FIG. 1;
FIG. 6 is a schematic structural diagram of an embodiment of a semiconductor chip package array according to the present application;
FIG. 7 is a schematic structural diagram of another embodiment of a semiconductor chip package array according to the present application;
FIG. 8 is a schematic structural diagram of another embodiment of a semiconductor chip package array according to the present application;
FIG. 9 is a schematic structural diagram of another embodiment of a semiconductor chip package array according to the present application;
FIG. 10 is a schematic structural diagram of another embodiment of a semiconductor chip package array according to the present application;
FIG. 11 is a schematic structural diagram of one embodiment of a semiconductor chip package device according to the present application;
FIG. 12 is a schematic structural diagram of another embodiment of a semiconductor chip package device according to the present application;
FIG. 13 is a schematic structural diagram of another embodiment of a semiconductor chip package device according to the present application;
FIG. 14 is a schematic structural diagram of another embodiment of a semiconductor chip package device in accordance with the present application;
fig. 15 is a schematic structural diagram of another embodiment of a semiconductor chip package device according to the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1-2, fig. 1 is a schematic flow chart diagram of an embodiment of a semiconductor chip packaging method of the present application, fig. 2 is a schematic structural diagram of an embodiment corresponding to steps S101-S107 in fig. 1, fig. 3 is a schematic structural diagram of another embodiment corresponding to steps S103-S107 in fig. 1, fig. 4 is a schematic structural diagram of another embodiment corresponding to steps S104-S107 in fig. 1, and fig. 5 is a schematic structural diagram of another embodiment corresponding to steps S104-S107 in fig. 1, the method including:
s101: a metal plate having a first surface and a second surface is provided.
Specifically, referring to fig. 2a, the metal plate 10 includes a first surface 100 and a second surface 102. In an application scenario, the material of the metal plate 10 may be copper, an alloy thereof, or an iron-nickel alloy, which has good electrical conductivity, thermal conductivity, and mechanical strength, and the metal plate 10 only needs to satisfy the condition of being able to be used for manufacturing a lead frame of a semiconductor chip package device.
S102: a first groove is formed on the first surface of the metal plate to define a plurality of bearing units arranged in a matrix.
Specifically, referring to fig. 2b, in an application scenario, a plurality of first grooves 12 may be formed on the first surface 100 of the metal plate 10 by etching or the like, so as to define a plurality of carrying units (not shown) arranged in a matrix. The carrier unit is a minimum unit for carrying a chip, and a specific range of the carrier unit may be determined by a way of forward mounting or flip mounting a subsequent chip, which is described in the following. According to the method, the first groove 12 is formed by performing half etching on one side of the metal plate 10, then the subsequent chip 14 plastic package is performed on the metal plate 10, and compared with the traditional chip plastic package performed on a corroded lead frame, the strength of the frame is enhanced by the scheme provided by the application.
S103: the chip is electrically connected to the bearing unit.
Specifically, in one embodiment, as shown in fig. 2c-2d, the chip 14 may be mounted on the carrier unit 16, the carrier unit 16 is provided with a base island 160 and pins 162 (only one is schematically labeled, one carrier unit 16 may include a plurality of pins 162), the pins 162 include an inner pin 1620 located on the first surface 100 side of the metal plate 10 and an outer pin 1622 located on the second surface 102 side of the metal plate 10, and the step S103 specifically includes: the chip 14 is mounted on the base island 160 of the carrier unit 16, and the chip 14 and the inner leads 1620 of the carrier unit 16 are electrically connected by the wires 18. In the present embodiment, the chip 14 may transmit a signal to the pin 162 through the wire 18 or receive a signal transmitted by the pin 162 through the wire 18. The material of the conductive wire 18 may be any one or a combination of gold, aluminum, copper-iron alloy, copper-nickel-silicon alloy, copper-chromium alloy, and copper-nickel-tin alloy, as long as the conductive wire 18 has a conductive function, good mechanical strength, and stress relaxation resistance.
In an application scenario, before the above steps of electrically connecting the chip 14 and the inner leads 1620 of the carrying unit 16 by using the wires 18, the method further includes: forming a metal layer 11 on the surface of the inner lead 1620; the above steps of electrically connecting the chip 14 and the inner leads 1620 of the carrying unit 16 by using the wires 18 include: the chip 14 and the metal layer 11 on the surface of the inner lead 1620 of the carrying unit 16 are electrically connected by using the wire 18. In this embodiment, the metal layer 11 may be formed on the inner lead 1620 by electroplating (e.g., partial plating, composite plating, pulse plating, electroforming, mechanical plating, etc.), and the material of the metal layer 11 may be a conductive metal material such as nickel, chromium, copper, zinc, cadmium, etc., which is not limited in this application.
In another embodiment, as shown in fig. 3a, the chip 14 may be flip-chip mounted on a carrier unit 16a, the carrier unit 16a is provided with pins 162a (only one is schematically indicated, and one carrier unit 16a may include a plurality of pins 162a) spaced by the first groove 12, the pins 162a include inner pins 1620a located on the first surface 100 side of the metal plate 10 and outer pins 1622a located on the second surface 102 side of the metal plate 10, and the step S103 specifically includes: the surface of the chip 14 is provided with a pillar 140, and the pillar 140 is electrically connected to the inner leads 1620a around the first groove 12.
S104: and plastic packaging is carried out on the bearing unit by using a plastic packaging material to form a plastic packaging layer, and the first groove is filled with the plastic packaging material.
Specifically, the material of the molding compound may be a transparent or non-transparent material such as epoxy resin. When the chip 14 is mounted, as shown in fig. 2e, the step S104 specifically includes: a plurality of discrete plastic-sealed bodies 13 arranged in a matrix are formed, and the plastic-sealed bodies 13 correspond to the bearing units 16 one by one. In the present embodiment, the molding layers 15 between the adjacent molding bodies 13 are not connected to each other. The molding compound layer 15 covers the first groove 12 corresponding to the carrying unit 16, the chip 14, the wires 18, and the area of the first surface 100 of the metal plate 10 corresponding to the inner leads 1620.
Of course, in other application scenarios, when the chip 14 is mounted, the plastic package body may be formed in other ways, as shown in fig. 4a, the step S104 specifically includes: one or more plastic-sealed bodies 13a are formed, and a plurality of carrying units 16 arranged in a matrix are contained in a single plastic-sealed body 13 a.
Similarly, when the chip 14 is flipped, the plastic package is similar to the flip chip 14 in the above embodiment, and reference may be specifically made to fig. 3b and fig. 5a, which is not described herein again.
S105: and forming a second groove and a third groove on the second surface of the metal plate, wherein the second groove is communicated with the first groove to form a through hole, and the third groove is connected with the adjacent bearing units.
Specifically, in an application scenario, referring to fig. 2f-2g, the step S105 specifically includes:
A. forming a patterned mask 17 on the second surface 102 of the metal plate 10;
B. the area of the second surface 102 of the metal plate 10 not covered by the mask 17 is etched to form a second groove 190 and a third groove 192, and the second groove 190 is communicated with the first groove 12.
In the present embodiment, a patterned mask 17 is formed on the second surface 102 of the metal plate 10, and the mask 17 covers the area of the second surface 102 of the metal plate 10 that is not required to be etched. The area of the second surface 102 corresponding to the leads 162 and the base island 160 on both sides of the first recess 12 is covered with the mask 17, the mask 17 forms an opening (not labeled) below the first recess 12, an orthographic projection (not labeled) of the first recess 12 on the second surface 102 of the metal plate 10 is located in the opening, and a boundary (not labeled) of the orthographic projection is not in contact with a boundary of the opening. The area of the second surface 102 of the metal plate 10 not covered with the mask 17 is etched to simultaneously form the second recess 190 and the third recess 192. The second surface 102 of the metal plate 10 is etched without the mask 17, so that the bottom surface x1 of the second groove 190 is higher than the bottom surface x2 of the first groove 12, and the second groove 190 is communicated with the first groove 12. At this time, the projection of the second groove 190 on the first surface 100 covers the projection of the first groove 12 on the first surface 100, and the bottom x2 of the first groove 12 protrudes into the second groove 190, so that the molding compound 15 in the first groove 12 protrudes into the second groove 190. The protruding portion of the molding compound 15 can prevent the leads 162 from being connected to the solder on the substrate 160 and short-circuiting during the solder mounting operation of the semiconductor chip package device, and can also enhance the strength of the metal plate 10. Of course, in other embodiments, the bottom surface x1 of the second groove 190 formed by etching the second surface 102 of the metal plate 10 may also coincide with the bottom surface x2 of the first groove 12, which is not limited in this application.
In another application scenario, when the plastic packages 13 formed in step S104 correspond to the carrying unit 16 one by one, a distance d1 between adjacent plastic packages 13 is greater than a width d2 of the third groove 192, where the distance d1 between adjacent plastic packages 13 refers to a distance between projections of edges of adjacent plastic packages 15 of adjacent plastic packages 13 on the first surface 100, and the width d2 of the third groove 192 refers to a distance between projections of two sides of the third groove 192 on the first surface 100. The design method can avoid the bending or falling off phenomenon of the pins 162 when the plastic package body 13 is cut and separated subsequently.
In other application scenarios, the chip 14 may adopt a flip-chip manner, and the manner of forming the second groove and the third groove is similar to that described above, and details are not repeated here, and refer to fig. 3c-3d, fig. 4b-4c, and fig. 5b-5c specifically.
S106: and forming an electroplated layer on the second surface of the metal plate, wherein the electroplated layer extends into the third groove or the second groove and the third groove.
Specifically, referring to fig. 2h, a plating layer 110 may be formed on the second surface 102 of the metal plate 10 by a plating process, and the material of the plating layer 110 may be tin, copper, gold, nickel, lead, or other metals. In the present embodiment, the plating layer 110 extends into the second and third grooves 190 and 192, and the plating layer 110 may cover only the sidewalls of the two grooves, or may also cover the bottom surfaces of the two grooves. In other embodiments, the plating layer 110 may extend into only the third recess 192 or the second recess 190.
In other application scenarios, the flip chip 14 is flipped to form the plating layer in a manner similar to that described above, and details are not repeated herein, and refer to fig. 3e, fig. 4d, and fig. 5 d.
S107: and separating the plastic packaging layer to form the independent semiconductor chip packaging device.
Specifically, this step S107 includes: and cutting the plastic package layer 15 to obtain the independent semiconductor chip package device 2, wherein the vertical section of the pin 162 of the semiconductor chip package device 2 along the connecting line direction of the second groove 190 and the third groove 192 is in a T shape.
In an application scenario, the molding compound layer 15 may be separated by die cutting or cutting to obtain individual semiconductor chip package devices 2, where each obtained semiconductor package device 2 is a complete chip package unit, and the semiconductor package device 2 includes a chip 14, the molding compound layer 15 covering the chip 14, and a wire 18 corresponding to the chip 14. When the plastic package layer 15 is separated, the plastic package layer 15 needs to be separated along a separation line 111 passing through the metal plate 10, wherein the separation line 111 is located in a region corresponding to the third groove 192, and the separation line 111 may be located in a central region corresponding to the third groove 192 or may be offset from the central region, which is not limited in this application.
In another application scenario, when separating the molding compound layer 15, in order to prevent the pins 162 on the metal plate 10 from bending during separation, spacers (not shown) may be further disposed below the second and third grooves 190 and 192, wherein the spacers may completely fill the second and third grooves 190 and 192 on the second surface 102 of the metal plate 10. In other embodiments, the pad may only fill the third groove 192, or partially support the bottom surface of the third groove 192, which is not limited in this application.
In summary, the outer leads 1622 formed by the semiconductor package method provided by the present application include a step portion (e.g., an area formed by the third groove 192 and the second groove 190) for solder climbing in addition to the conventional area corresponding to the second surface 102 for solder climbing, and both the side edge and the bottom edge of the step portion can be used for solder climbing, so as to increase the area of the outer leads 1622 for solder climbing, thereby improving the soldering performance and increasing the yield of the semiconductor chip package device.
Referring to fig. 6 to 10, fig. 6 is a schematic structural diagram of an embodiment of a semiconductor chip package array of the present application, fig. 7 is a schematic structural diagram of another embodiment of the semiconductor chip package array of the present application, fig. 8 is a schematic structural diagram of another embodiment of the semiconductor chip package array of the present application, fig. 9 is a schematic structural diagram of another embodiment of the semiconductor chip package array of the present application, and fig. 10 is a schematic structural diagram of another embodiment of the semiconductor chip package array of the present application. The semiconductor chip package array 3 is prepared by the above-described methods S101 to S106. Specifically, the semiconductor chip package array 3 includes:
a lead frame 30, the lead frame 30 comprising: the lead frame comprises a plurality of carrier units 300 arranged in a matrix, first grooves 306 extending from a first surface 302 to a second surface 304 of the lead frame 30, second grooves 308 extending from the second surface 304 to the first surface 302, and third grooves 301 extending from the second surface 304 to the first surface 302, wherein the first grooves 306 and the second grooves 308 are communicated to form through holes, and the third grooves 301 are connected with adjacent carrier units 300;
the chip 32 is arranged on the bearing unit 300, and the chip 32 is electrically connected with the bearing unit 300; in an application scenario, as shown in fig. 6, the chip 32 is electrically connected to the carrying unit 300 in a normal manner. The carrier 300 is provided with a base island 3000 and leads 3002 spaced by through holes (or first grooves 306), the leads 3002 include an inner lead a on the first surface 302 side of the lead frame 30 and an outer lead B on the second surface 304 side of the lead frame 30, and the chip 32 is electrically connected to the inner lead a through a wire C. In one embodiment, the inner lead a has a metal layer D on its surface, and the wire C electrically connects the chip 32 and the metal layer D. In this embodiment, the vertical cross section of the pin 3002 along the connection line of the second groove 308 and the third groove 301 is T-shaped, but in other embodiments, the pin 3002 may have other shapes, which is not limited in this application. In another application scenario, as shown in fig. 7, the chip 32 may also be electrically connected to the carrier unit 300' in a flip-chip manner. The carrier 300' is provided with pins 3002' spaced by through holes (or first grooves 306'), the pins 3002' include an inner pin a ' located at one side of the first surface 302' of the lead frame 30' and an outer pin B ' located at one side of the second surface 304' of the lead frame 30', the surface of the chip 32 is provided with a convex pillar 320, and the convex pillar 320 is electrically connected with the inner pin a ' around the through holes.
A molding compound layer 34, wherein the chip 32 and at least part of the carrying unit 300 are wrapped by the molding compound, and the first groove 306 is filled with the molding compound to form the molding compound layer 34; in an application scenario, the projection of the second groove 308 on the first surface 302 covers the projection of the first groove 306 on the first surface 302, and the molding layer 34 fills the first groove 306 and protrudes out of the second groove 308, but in other application scenarios, the molding layer 34 may only fill the first groove 306 and does not protrude out of the second groove 308, which is not limited in this application. In another application scenario, please continue to refer to fig. 6, the molding layer 34 is formed by a plurality of discrete molding bodies (not labeled) arranged in a matrix, and the molding bodies correspond to the carrying units 300 one by one. The spacing d3 between the adjacent plastic packages is larger than the width d4 of the third groove. In another application scenario, as shown in fig. 8, the molding compound layer 34 ″ is composed of one or more molding compounds, and a single molding compound contains a plurality of carrier units 300 arranged in a matrix. When the chip is in a flip-chip form, the structure of the molding compound layer is similar to that described above, and details are not repeated here, and refer to fig. 7 and 9 specifically.
The plating layer 36, the plating layer 36 is disposed on the second surface 304 of the lead frame 30 and extends into the third groove 301 and the second groove 308, specifically, the plating layer 36 extends into the side (not labeled) and the bottom (not labeled) of the third groove 301, and the side (not labeled) and the bottom (not labeled) of the second groove 308 that are not covered by the molding compound. In other embodiments, as shown in FIG. 10, the plating layer 36 "may extend only into the sides and bottom of the third recess 308".
Referring to fig. 11 to 15, fig. 11 is a schematic structural diagram of an embodiment of a semiconductor chip package device of the present application, fig. 12 is a schematic structural diagram of another embodiment of the semiconductor chip package device of the present application, fig. 13 is a schematic structural diagram of another embodiment of the semiconductor chip package device of the present application, fig. 14 is a schematic structural diagram of another embodiment of the semiconductor chip package device of the present application, and fig. 15 is a schematic structural diagram of another embodiment of the semiconductor chip package device of the present application. The semiconductor chip package device 4 is prepared by the above-described methods S101 to S107. Specifically, the semiconductor chip package device 4 includes:
the lead frame 40 comprises a first groove 404 extending from the first surface 400 to the second surface 402 of the lead frame 40, a second groove 406 extending from the second surface 402 to the first surface 400, and a third groove 408 extending from the second surface 402 to the first surface 400, wherein the first groove 404 is communicated with the second groove 406 to form a through hole, and the third groove 408 is positioned at the edge of the lead frame 40; in an application scenario, as shown in fig. 11, a projection of the second groove 406 on the first surface 400 covers a projection of the first groove 404 on the first surface 400, and the projection of the second groove 406 on the first surface 400 may be larger than or the same as the projection of the first groove 404 on the first surface 400, which is not limited in this application; in another application scenario, with continued reference to fig. 11, the third groove 408 forms a step at the end of the lead frame 40, and the step makes the lead 401 of the semiconductor package device 4 have a T-shaped vertical cross section along the connecting direction of the second groove 406 and the third groove 408. Of course, in other application scenarios, the third groove 408 may also be formed in other shapes at the end of the lead frame 40, such as a slope, etc., which is not limited in this application.
A chip 42 electrically connected to the lead frame 40; in one application scenario, as shown in fig. 11, the chip 42 is electrically connected to the lead frame 40 in a positive manner; the lead frame 40 includes a base island 403 and leads 401 located around the base island 403, the leads 401 include inner leads E located on one side of the first surface 400 and outer leads F located on one side of the second surface 402, the base island 403 and the leads 401 are spaced by through holes (or first grooves 404), the chip 42 is mounted on the base island 403, and the chip 42 is electrically connected to the inner leads E through wires G. In the present embodiment, a metal layer H is further formed on the surface of the inner lead E, and the chip 42 is electrically connected to the metal layer H through a wire G. In another embodiment, as shown in fig. 12, the chip 42 is electrically connected to the lead frame 40' in a flip-chip manner. The lead frame 40 'includes pins 401' spaced apart by through holes (or first grooves 404), the pins 401 'include inner pins E' located at one side of the first surface 400 'and outer pins F' located at one side of the second surface 402', and the surface of the chip 42 is provided with pillars 420, and the pillars 420 are electrically connected to the inner pins E' around the through holes.
A molding compound layer 44, wherein the molding compound wraps all or part of the first side 400 of the lead frame 40 and the chip 42, and the first groove 404 is filled with the molding compound to form the molding compound layer 44; in the present embodiment, the molding layer 44 fills the first groove 404 and protrudes out of the second groove 406, but in other embodiments, the molding layer 44 may only fill the first groove 404 and does not protrude out of the second groove 406. In addition, in the present embodiment, with reference to fig. 11, the molding layer 44 partially covers the first surface 400 of the lead frame 40, and the step portion (i.e., the third groove 408) includes a side edge J in the vertical direction close to the molding layer 44, and the side edge J is located outside the projection area of the molding layer 44. In another embodiment, referring to fig. 13, the molding layer 44 'completely covers the first surface 400 of the lead frame 40, and the edge of the step portion (i.e., the third groove 408) is located in the projection area of the molding layer 44'. Similarly, when the chip 42 is flipped, the structure of the molding layer can be seen in fig. 12 and 14, and will not be described herein.
A plating layer 46, the plating layer 46 disposed on the second surface 402 of the lead frame 40 and extending into the third groove 408 and the second groove 406. Specifically, the plating layer 46 extends into the side (not labeled) and bottom (not labeled) of the third groove 408, and the side (not labeled) and bottom (not labeled) of the second groove 406 that are not covered by the molding compound. In other embodiments, referring to FIG. 15, the plating layer 46' may extend only into the sides and bottom of the third recess 408, but not into the second recess 406.
In summary, unlike the state of the art, the semiconductor chip packaging method provided by the present application includes: and forming a second groove and a third groove on the second surface of the metal plate, wherein the electroplated layer covers the second surface of the metal plate and extends into the third groove or the second groove and the third groove. By the mode, the semiconductor chip packaging device can form a structure with a plurality of electroplated layers, the area for soldering tin to climb is increased, welding performance is improved, and the yield of the semiconductor chip packaging device is increased.
The above embodiments are merely examples and are not intended to limit the scope of the present disclosure, and all modifications, equivalents, and flow charts using the contents of the specification and drawings of the present disclosure or those directly or indirectly applied to other related technical fields are intended to be included in the scope of the present disclosure.
Claims (9)
1. A method of packaging a semiconductor chip, comprising:
providing a metal plate with a first surface and a second surface;
forming a first groove on the first surface of the metal plate to define a plurality of bearing units arranged in a matrix;
electrically connecting the chip to the bearing unit;
carrying out plastic package on the bearing unit by using a plastic package material to form a plastic package layer, wherein the first groove is filled with the plastic package material;
forming a second groove and a third groove on the second surface of the metal plate, wherein the second groove is communicated with the first groove to form a through hole, the projection of the second groove on the first surface covers the projection of the first groove on the first surface, the bottom of the first groove protrudes out of the second groove so that the plastic packaging material in the first groove protrudes out of the second groove, the second groove is not filled with the plastic packaging material, and the third groove is connected with an adjacent bearing unit;
forming an electroplated layer on the second surface of the metal plate, wherein the electroplated layer extends into the third groove or the second groove and the third groove;
and arranging a cushion block below the third groove, and separating the plastic packaging layer to form an independent semiconductor chip packaging device.
2. The semiconductor chip packaging method according to claim 1, wherein the carrier unit is provided with a base island and pins spaced by the through hole, the pins including an inner pin on a side of the first surface of the metal plate and an outer pin on a side of the second surface of the metal plate, the electrically connecting the chip to the carrier unit includes:
and installing the chip on the base island of the bearing unit, and electrically connecting the chip and the inner pin of the bearing unit by adopting a lead.
3. The semiconductor chip packaging method according to claim 2,
before adopting wire electric connection the chip with the inner pin of bearing unit, still include: forming a metal layer on the surface of the inner pin;
adopt wire electric connection the chip with the inner pin of bearing unit includes: and the chip is electrically connected with the metal layer on the surface of the inner pin of the bearing unit by adopting a lead.
4. The semiconductor chip packaging method according to claim 1, wherein the carrier unit is provided with pins spaced by the through holes, the pins including inner pins located at one side of the first surface of the metal plate and outer pins located at one side of the second surface of the metal plate, and the electrically connecting the chip to the carrier unit includes:
the surface of the chip is provided with a convex column which is electrically connected with the inner pins around the through hole.
5. The semiconductor chip packaging method according to claim 1, wherein the step of forming the second groove and the third groove on the second surface of the metal plate specifically comprises:
forming a patterned mask on the second surface of the metal plate;
etching the area of the second surface of the metal plate, which is not covered by the mask, to form the second groove and a third groove, and communicating the second groove with the first groove.
6. The semiconductor chip packaging method according to any one of claims 1 to 5, wherein the plastic-encapsulating the carrier unit with a plastic-encapsulating material to form a plastic-encapsulating layer comprises:
and forming one or more plastic packaging bodies, wherein each plastic packaging body comprises a plurality of bearing units arranged in a matrix.
7. The semiconductor chip packaging method according to any one of claims 1 to 5, wherein the plastic-encapsulating the carrier unit with a plastic-encapsulating material to form a plastic-encapsulating layer comprises:
and forming a plurality of discrete plastic-sealed bodies arranged in a matrix, wherein the plastic-sealed bodies correspond to the bearing units one by one.
8. The semiconductor chip packaging method according to claim 7, wherein a distance between adjacent plastic-sealed bodies is larger than the third groove.
9. The semiconductor chip packaging method according to any one of claims 2 to 4, wherein the step of separating the molding layer to form individual semiconductor chip package devices comprises:
and cutting the plastic packaging layer to obtain an independent semiconductor chip packaging device, wherein the vertical section of the pin of the semiconductor chip packaging device in the direction along the connecting line of the second groove and the third groove is in a T shape.
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| CN201810608523.2A CN109037077B (en) | 2018-06-13 | 2018-06-13 | Semiconductor chip packaging method |
| US16/440,809 US11127661B2 (en) | 2018-06-13 | 2019-06-13 | Semiconductor chip package method and semiconductor chip package device |
| US17/458,974 US11670571B2 (en) | 2018-06-13 | 2021-08-27 | Semiconductor chip package device |
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| CN110310915B (en) * | 2019-06-03 | 2023-03-24 | 通富微电子股份有限公司 | Ejection mechanism and plastic packaging device |
| CN217507315U (en) * | 2020-12-18 | 2022-09-27 | 意法半导体股份有限公司 | Semiconductor device and lead frame |
| CN217521998U (en) * | 2020-12-18 | 2022-09-30 | 意法半导体股份有限公司 | Semiconductor device with a plurality of semiconductor chips |
| CN112530895A (en) * | 2020-12-22 | 2021-03-19 | 宁波康强电子股份有限公司 | Lead frame for packaging, semiconductor packaging structure and packaging method |
| CN112985471B (en) * | 2021-04-30 | 2021-11-02 | 深圳市汇顶科技股份有限公司 | Capacitive sensor and manufacturing method thereof |
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