CN109031345A - A kind of MEMS micromirror scanning laser radar system and its scan method - Google Patents
A kind of MEMS micromirror scanning laser radar system and its scan method Download PDFInfo
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- CN109031345A CN109031345A CN201810607382.2A CN201810607382A CN109031345A CN 109031345 A CN109031345 A CN 109031345A CN 201810607382 A CN201810607382 A CN 201810607382A CN 109031345 A CN109031345 A CN 109031345A
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- 238000005259 measurement Methods 0.000 claims abstract description 59
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- 230000003287 optical effect Effects 0.000 claims description 15
- 238000002310 reflectometry Methods 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
- G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
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Abstract
The present invention provides a kind of MEMS micromirror scanning laser radar system and its scan method, including laser emitter, laser pickoff, circulator, MEMS micromirror and timing control and measurement module, laser transmitter projects laser；Laser is transmitted to MEMS micromirror by circulator；The laser reflection that MEMS micromirror exports circulator is to target area, by the reflected light back back loop device of barrier in target area；The reflected light pass for the barrier that circulator reflects MEMS micromirror is to laser pickoff；Laser pickoff is according to the reflection photogenerated echo-signal of the barrier received；The angle information that the echo-signal and MEMS micromirror that timing control and measurement module are generated according to laser pickoff are fed back generates scanning result, so as on the basis of realizing laser radar system high-resolution, the number for reducing laser pickoff in laser radar system, reduces the cost of laser radar system.
Description
Technical field
The present invention relates to technical field of laser detection, more specifically to a kind of MEMS micromirror scanning laser radar system
System and its scan method.
Background technique
Camera, millimetre-wave radar and laser radar are most common three kinds of environment sensings sensings in intelligent driving automobile
Device.Due to laser radar can the environment to vehicle periphery accurately modeled, it is highly automated drive (L3 grade with
On) intelligent driving automobile laser radar must be installed.
Laser radar is scanned according to whether there is or not sweep mechanisms can be divided into non-scanning type laser radar and scanning type laser radar
Formula laser radar can be divided into machinery rotating type, electronic scanning type and MEMS (Micro- according to the different of sweep mechanism again
Electro-MechanicalSystem, MEMS) micro mirror scanning laser radar.Since what is scanned based on MEMS micromirror is consolidated
State scanning technique makes it possible miniaturization, low cost and the low-power consumption of laser radar, therefore, existing intelligent driving automobile
MEMS micromirror scanning laser radar is mostly used greatly.
A kind of existing MEMS micromirror scanning laser radar includes that multiple laser emitters, MEMS micromirror, multiple laser connect
Receive device and processing module, the laser of MEMS micromirror reflection laser transmitter outgoing and according to default rotation angle to target area into
Row laser scanning, laser pickoff receives the laser of object reflection in target area, and is generated back according to the laser that object reflects
Wave signal, so that processing module calculates according to echo-signal the distance of object in target area.
But since existing MEMS micromirror scanning laser radar is using in different laser pickoff reception target areas
The reflected light of different location, therefore, so that the resolution limitations of laser radar are in the number of laser pickoff, also, due to swashing
The price of optical receiver costly, therefore, causes the resolution ratio of the laser radar of low cost lower, high-resolution laser radar
Higher cost.
Summary of the invention
In view of this, the present invention provides a kind of MEMS micromirror scanning laser radar system and its scan method, to solve
The problem of existing MEMS micromirror scanning laser radar resolution is limited to the number of laser pickoff.
To achieve the above object, the invention provides the following technical scheme:
A kind of MEMS micromirror scanning laser radar system, including laser emitter, laser pickoff, circulator, MEMS are micro-
Mirror and timing control and measurement module；
The laser emitter emits laser under the control of the timing control and measurement module；
The circulator exports the laser to the MEMS micromirror；
The MEMS micromirror is under the control of the timing control and measurement module according to default scan pattern to target area
Domain carries out two-dimensional scanning, and the laser reflection for exporting the circulator during scanning is to the target area, by institute
The reflected light back for stating barrier in target area returns the circulator；
The reflection light output for the barrier that the circulator reflects the MEMS micromirror is to the laser pickoff；
The laser pickoff is according to the reflection photogenerated echo-signal of the barrier received；
The echo-signal and the MEMS micromirror that the timing control and measurement module are generated according to the laser pickoff
The angle information of feedback generates scanning result, and the scanning result includes the reflection of the distance, the barrier of the barrier
The level angle and vertical angle of rate, the MEMS micromirror.
Preferably, the circulator includes fiber optic circulator and space Optical circulator, and the circulator has first end, the
Two ends and third end；
The laser of the laser transmitter projects from the first end enter the circulator, from the second end export to
The MEMS micromirror；
The reflected light of the barrier of the MEMS micromirror reflection enters the circulator from the second end, from the third
End is exported to the laser pickoff.
Preferably, there is collimator and extender mirror between the circulator and the MEMS micromirror；
The laser of the circulator output exports after the collimator and extender mirror to the MEMS micromirror；It is described
The reflected light of the barrier of MEMS micromirror reflection enters the circulator after the collimator and extender mirror.
Preferably, the laser radar system includes a pair of laser emitter and the laser pickoff, an institute
State circulator and a collimator and extender mirror.
Preferably, the laser radar system includes the multipair laser emitter and the laser pickoff, Duo Gesuo
State circulator and multiple collimator and extender mirrors；
It is any to the laser emitter and the laser pickoff all with a circulator and a collimation
Beam expanding lens is correspondingly arranged.
Preferably, the horizontal sextant angle of the adjacent two collimator and extender mirrors is the MEMS micromirror maximum deflection angle
Twice, the vertical angle of the collimator and extender mirror of adjacent two is 0.
Preferably, the laser radar system further includes MEMS micromirror driving circuit；
The control MEMS micromirror that the MEMS micromirror driving circuit is issued according to the timing control and measurement module
Control signal generate driving signal, and MEMS micromirror progress two-dimensional scanning is driven by the driving signal.
It preferably, further include power module；
The power module is supplied to the laser emitter, the laser pickoff and the timing control and measurement module
Electricity.
A kind of scan method of MEMS micromirror scanning laser radar system, comprising:
Laser emitter emits laser under the control of timing control and measurement module；
The laser is transmitted to MEMS micromirror by circulator；
The MEMS micromirror is under the control of the timing control and measurement module according to default scan pattern to target area
Domain carries out two-dimensional scanning, and by the laser reflection to the target area during scanning, will be in the target area
The reflected light back of barrier is to the circulator；
The reflected light pass for the barrier that the circulator reflects the MEMS micromirror is to the laser pickoff；
The laser pickoff is according to the reflection photogenerated echo-signal of the barrier received；
The echo-signal and the MEMS micromirror that the timing control and measurement module are generated according to the laser pickoff
The angle information of feedback generates scanning result, and the scanning result includes the reflection of the distance, the barrier of the barrier
The level angle and vertical angle of rate, the MEMS micromirror.
Preferably, when the laser radar system includes the multipair laser emitter and the laser pickoff, swash
Optical transmitting set emits laser under the control of timing control and measurement module
Multiple laser emitters successively emit laser under the control of the timing control and measurement module.With it is existing
Technology is compared, the technical scheme provided by the invention has the following advantages:
MEMS micromirror scanning laser radar system and its scan method provided by the present invention, laser transmitter projects swash
Laser is transmitted to MEMS micromirror, the laser reflection that MEMS micromirror exports circulator to target area, by target by light, circulator
The reflected light pass for the barrier that the reflected light back of barrier reflects MEMS micromirror to circulator, circulator in region to swash
Optical receiver, laser pickoff is according to the reflection photogenerated echo-signal of the barrier received, timing control and measurement module
The angle information of echo-signal and the MEMS micromirror feedback generated according to laser pickoff generates scanning result.
That is, the present invention is received instead by optical path and laser pickoff of the circulator to laser emitter shoot laser
The optical path for penetrating light is merged and has been separated, so as to be passed the reflected light of different location in target area by MEMS micromirror
The same laser pickoff is transported to, and then laser radar can be reduced on the basis of realizing laser radar system high-resolution
The number of laser pickoff in system, reduces the cost of laser radar system.Also, the knot of the laser radar system in the present invention
Structure is simple and compact, adjustment is easy, is easy to volume production.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is a kind of structural schematic diagram of MEMS micromirror scanning laser radar system provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of another MEMS micromirror scanning laser radar system provided in an embodiment of the present invention；
Fig. 3 is the driving signal timing diagram of laser emitter in MEMS micromirror scanning laser radar system shown in Fig. 2；
Fig. 4 is a kind of process of the scan method of MEMS micromirror scanning laser radar system provided in an embodiment of the present invention
Figure.
Specific embodiment
It is core of the invention thought above, to keep the above objects, features and advantages of the present invention more obvious easily
Understand, following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention is clearly and completely retouched
It states, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention
In embodiment, every other implementation obtained by those of ordinary skill in the art without making creative efforts
Example, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a kind of MEMS micromirror scanning laser radar system, the MEMS micromirror scanning laser radars
System is the MEMS micromirror scanning laser radar system coaxially received and dispatched, and is mainly used in intelligent driving automobile.
As shown in Figure 1, the laser radar system includes laser emitter 10, laser pickoff 11, circulator 12, MEMS micro-
Mirror 13 and timing control and measurement module 14.Optionally, laser emitter 10 is that the semiconductor laser with tail optical fiber or optical fiber swash
Light device, laser pickoff 11 are photodetector, and MEMS micromirror 13 is two-dimentional MEMS micromirror, and circulator 12 is fiber optic circulator,
Certainly, the present invention is not limited to this, and in other embodiments, circulator 12 can also be space Optical circulator.It needs to illustrate
, the design of the peak power and pulse width of the laser that laser emitter 10 emits need to meet the safety standard of human eye.
In the present embodiment, laser emitter 10 is used to emit laser under the control of timing control and measurement module 14.Ring
Road device 12 is used to the laser that laser emitter 10 emits being transmitted to MEMS micromirror 13, and the barrier that MEMS micromirror 13 is reflected
Reflected light pass to laser pickoff 11.MEMS micromirror 13 be used for timing control under the control of measurement module 14 according to pre-
If scan pattern carries out two-dimensional scanning to target area, and the laser reflection for exporting circulator 12 during scanning is to mesh
Region is marked, by the reflected light back back loop device 12 of barrier in target area.Laser pickoff 11 is used for what basis received
The reflection photogenerated echo-signal of barrier.The echo that timing control and measurement module 14 are used to be generated according to laser pickoff 11
The angle information that signal and MEMS micromirror 13 are fed back generates scanning result, which includes the distance of barrier, barrier
Reflectivity, MEMS micromirror 13 level angle and vertical angle.
In the present embodiment, as shown in Figure 1, circulator 12 has first end 1, second end 2 and third end 3.Laser emitter
The laser of 10 transmittings enters circulator 12 from first end 1, from the output of second end 2 to MEMS micromirror 13；What MEMS micromirror 13 reflected
The reflected light of barrier enters circulator 12 from second end 2, from the output of third end 3 to laser pickoff 11.
Further, in this embodiment circulator 12 and MEMS micromirror 13 between have collimator and extender mirror 15.Circulator
The laser of 12 outputs exports after 15 collimator and extender of collimator and extender mirror to MEMS micromirror 13；The barrier that MEMS micromirror 13 reflects
Reflected light after collimator and extender mirror 15 enter circulator 12.By the angle of divergence very little of the laser of collimator and extender mirror 15, lead to
Often in a few milliradian magnitudes of zero point.It should be noted that the size of collimator and extender mirror 15 will be with the size phase of MEMS micromirror 13
Match, so that all laser in 13 scanning angle of entire MEMS micromirror can be reflected by MEMS micromirror 13, to improve the benefit of laser
With rate.
Based on any of the above embodiments, as shown in Figure 1, laser radar system provided in this embodiment further includes
MEMS micromirror driving circuit 16.The control MEMS that the MEMS micromirror driving circuit 16 is issued according to timing control and measurement module 14
Driving signal needed for the control signal of micro mirror 13 generates MEMS micromirror 13, and driving signal is sent to MEMS micromirror 13, to drive
Dynamic MEMS micromirror 13 carries out two-dimensional scanning.
Based on any of the above embodiments, as shown in Figure 1, laser radar system provided in this embodiment further includes electricity
Source module 17.The power module 17 is used to supply to laser emitter 10, laser pickoff 11 and timing control and measurement module 14
Electricity.
In the present embodiment, as shown in Figure 1, laser radar system include a pair of of laser emitter 10 and laser pickoff 11,
One circulator 12 and a collimator and extender mirror 16, certainly, the present invention is not limited to this, in other embodiments, laser thunder
It can also include multipair laser emitter 10 and laser pickoff 11, multiple circulators 12 and multiple collimator and extender mirrors up to system
16。
Below to a pair of of 11, circulators 12 of laser emitter 10 and laser pickoff and a collimator and extender mirror
The course of work of 16 laser radar systems is illustrated.
It is opened firstly, timing control issues the Start signal that repetition rate is k to laser emitter 10 with measurement module 14
Beginning signal, laser emitter 10 issue the narrow laser pulse that repetition rate is k according to the Start signal received.
The laser that the repetition rate that laser emitter 10 issues is k enters circulator 12 from the first end 1 of circulator 12, from
The second end 2 of circulator 12 is transmitted to collimator and extender mirror 15, is transmitted to MEMS micromirror 13 after collimated 15 collimator and extender of beam expanding lens.
MEMS micromirror 13 is under the control of timing control and measurement module 14 and MEMS micromirror driving circuit 16 according to default
Scan pattern carries out two-dimensional scanning to target area, wherein carries out two-dimensional scanning packet to target area according to default scan pattern
It includes and two-dimensional scanning is carried out to target area in the way of progressively scanning or scanning by column.
By taking progressive scan as an example, during any row scanning, timing control and measurement module 14 and MEMS micromirror are driven
Dynamic circuit 16 can constantly change the level angle of MEMS micromirror 13, to drive MEMS micromirror 13 to turn left from left to right or from the right side to one
Row scanning element is scanned, and when scanning completion to a line scanning element, timing control and measurement module 14 and MEMS micromirror are driven
Circuit 16 can change the vertical angles of MEMS micromirror 13, to drive MEMS micromirror 13 to be scanned next line scanning element.Similarly,
When scanning by column, during any column scan spot scan, timing control and measurement module 14 and MEMS micromirror driving circuit
16 can constantly change the vertical angles of MEMS micromirror 13, to drive MEMS micromirror 13 from top to bottom or from the bottom up to a column scan
Point is scanned, when a column scan spot scan is completed, timing control and 16 meeting of measurement module 14 and MEMS micromirror driving circuit
Change the level angle of MEMS micromirror 13, to drive MEMS micromirror 13 to be scanned next column scanning element.
During being scanned to any scanning element in any row or either rank, MEMS micromirror 13 can expand collimation
The laser reflection that beam mirror 15 exports is to target area, by the reflected light back of barrier in target area to collimator and extender mirror 15,
Enter circulator 12 from the second end 2 of circulator 12 after collimated beam expanding lens 15, from the output of the third end 3 of circulator 12 to laser
Receiver 11.
The reflected light signal of the barrier received is converted to electric signal by laser pickoff 11, carries out the moment to electric signal
Echo-signal is generated after identification, which includes Stop signal i.e. stop signal and amplitude information.Timing control and measurement
Module 14 is the time for receiving Stop signal and sending Start signal using the flight time according to Stop signal and Start signal
Difference calculates the distance of the barrier in target area to laser radar system, which is equal to (the flight time * light velocity)/2, and
And amplitude information can be converted to reflectivity by timing control and measurement module 14, the corresponding pass between amplitude information and reflectivity
System is obtained using the method for calibration.
Later, timing control records the angle information that MEMS micromirror 13 is fed back with measurement module 14, angle letter
Breath includes the level angle and vertical angle of MEMS micromirror 13, and the scanning of a scanning element can be completed, obtain a scanning element
Scanning result, which includes barrier at a distance from laser radar, the water of the reflectivity of barrier, MEMS micromirror 13
Straight angle degree and vertical angles.
Timing control drives MEMS micromirror 13 line by line with measurement module 14 and MEMS micromirror driving circuit 16 or scans by column
After the completion, the scanning that a frame can be completed has obtained the three-dimensional spatial information of target area, so as to carry out to target area
Precisely modeling, and then the barrier in target area can be accurately avoided during intelligent driving running car.
Based on this, the scanning field of view of the laser radar system in the present embodiment is by 13 horizontal direction of MEMS micromirror and vertical side
To deflection angle determine.If the maximum deflection angle of 13 horizontal direction of MEMS micromirror is θ x, the maximum deflection angle of vertical direction
Degree is θ y, then the field angle of laser radar system horizontal direction is 2 θ x, and the field angle of vertical direction is 2 θ y.
The horizontal angular resolution and vertical angular resolution of laser radar system are by laser pulse repetition frequency k and MEMS micromirror
The scanning harness in 13 horizontal or vertical directions determines.If the number of scanning lines (scanning element) of 13 horizontal direction of MEMS micromirror is Nx, erect
Histogram to number of scanning lines (scanning element) be Ny, then the angular resolution of laser radar horizontal direction be 2 θ x/Nx, vertical direction
Angular resolution is 2 θ y/Ny.Nx and Ny meets Nx*Ny=k/f, and wherein f is the frame frequency of laser radar.Determining for these parameters needs
Determination is comprehensively considered according to the device parameters of demand and laser emitter 10, MEMS micromirror 13 to field angle, resolution ratio.
MEMS micromirror scanning laser radar system provided in this embodiment, by circulator to laser emitter shoot laser
Optical path and laser pickoff receive the optical path of reflected light and merged and separated, so as to pass through MEMS micromirror for target
The reflected light pass of the barrier of different location is to the same laser pickoff in region, and then can realize laser radar system
On the basis of high-resolution of uniting, the number of laser pickoff in laser radar system is reduced, the cost of laser radar system is reduced.
Also, simple and compact for structure, the adjustment of the laser radar system in the present embodiment are easy, are easy to volume production.
Another embodiment of the present invention provides a kind of MEMS micromirror scanning laser radar systems, the difference with above-described embodiment
Place is, as shown in Fig. 2, the MEMS micromirror scanning laser radar system in the present embodiment includes multipair 10 He of laser emitter
Laser pickoff 11, multiple circulators 12 and multiple collimator and extender mirrors 16.
Wherein, any pair of laser emitter 10 and laser pickoff 11 all with a circulator 12 and a collimator and extender mirror
15 are correspondingly arranged.Also, the horizontal sextant angle of two adjacent collimator and extender mirrors 15 is the two of 13 maximum deflection angle of MEMS micromirror
Times, so that the scanning field of view of each pair of laser emitter 10 and laser pickoff 11 is tangent (both without gap or without weight
It is folded), so as to which the scanning field of view of adjacent two pairs of laser emitters 10 and laser pickoff 11 is stitched together, and then can expand
Open up the visual field of laser radar.
In addition, alsoing differ in that with above-described embodiment, multiple laser emitters 10 in the present embodiment are in timing
Successively emit laser under control and the control of measurement module 14.Specifically, it is assumed that laser radar system has n laser emitter
10, n are more than or equal to 2, then timing control and measurement module 14 can issue that n group repetition rate is k (period T), pulsewidth is that tp (leads to
Often in ns magnitude) Start signal, the time interval between n Start signal is T/n.N laser emitter 10 is according to receipts
To Start signal successively issue repetition rate be k narrow laser pulse.
Be equal to for 3, k is equal to 100kHz by n, the signal sequence that timing control and measurement module 14 issue as shown in figure 3,
Laser pickoff LD1, LD2 and LD3 successively emit laser, also, the time interval between laser pulse is 3.3 μ s.
The laser that each laser emitter 10 emits respectively enters the first end 1 of corresponding circulator 12, and in respective rings
The second end 2 of road device 12 exports, and after collimator and extender mirror 15, reaches MEMS micromirror 13, MEMS micromirror 13 expands all collimations
The reflected light back of barrier in target area is returned corresponding collimator and extender mirror to target area by the laser reflection that beam mirror 15 exports
15, the second end 2 of corresponding circulator 12 is entered after collimated beam expanding lens 15, so that circulator 12 is by third end 3 by MEMS
The reflected light pass for the barrier that micro mirror 13 reflects is to corresponding laser pickoff 11.Laser pickoff 11 and timing control and survey
The course of work for measuring module 14 is same as the previously described embodiments, and details are not described herein.
In the present embodiment, multipair laser emitter 10 and laser pickoff 11 can be arranged successively in the horizontal direction, can also
To be arranged successively along the vertical direction, multiple lines and multiple rows can also be arranged in along horizontal and vertical direction.It is more when having in horizontal direction
It, can be with the field angle of expanded laser light radar system horizontal direction when to laser emitter 10 and laser pickoff 11；When vertical side
It, can be with the visual field of expanded laser light radar system vertical direction when there is multipair laser emitter 10 and laser pickoff 11 upwards
Angle；It, both can be with expanded laser light thunder when all there is multipair laser emitter 10 and laser pickoff 11 on horizontal and vertical direction
Up to the field angle in system level direction, and can be with the field angle of expanded laser light radar system vertical direction.
If the maximum deflection angle of 13 horizontal direction of MEMS micromirror is θ x, the maximum deflection angle of vertical direction is θ y, if
There is n in horizontal directionxTo laser emitter 10 and laser pickoff 11, there is n on vertical directionyTo laser emitter 10 and laser
Receiver 11, then the field angle of laser radar system horizontal direction is 2nx* θ x, the field angle of vertical direction are 2ny* θ y, nxGreatly
In or equal to 2, nyMore than or equal to 2.
It should be noted that multipair laser emitter 10 and laser pickoff 11 only have shadow to the field angle of laser radar
It rings, influence is had no on resolution ratio.
MEMS micromirror scanning laser radar system provided in this embodiment is emitted laser emitter by fiber optic circulator
The optical path that the optical path and laser pickoff of laser receive reflected light is merged and has been separated, so as to be incited somebody to action by MEMS micromirror
The reflected light pass of the barrier of different location is to the same laser pickoff in target area, and then can realize laser thunder
Up on the basis of system high-resolution, the number of laser pickoff in laser radar system is reduced, laser radar system is reduced
Cost.Also, simple and compact for structure, the adjustment of the laser radar system in the present embodiment are easy, are easy to volume production.
The present invention also embodiment provides a kind of scan method of MEMS micromirror scanning laser radar system, as shown in figure 4,
Include:
S401: laser emitter emits laser under the control of timing control and measurement module；
S402: the laser is transmitted to MEMS micromirror by circulator；
S403: the MEMS micromirror is under the control of the timing control and measurement module according to default scan pattern to mesh
It marks region and carries out two-dimensional scanning, and by the laser reflection to the target area during scanning, by the target area
The reflected light back of barrier is to the circulator in domain；
S404: the reflected light pass for the barrier that the circulator reflects the MEMS micromirror to the laser pick-off
Device；
S405: the laser pickoff is according to the reflection photogenerated echo-signal of the barrier received；
S406: the echo-signal and the MEMS that the timing control and measurement module are generated according to the laser pickoff
The angle information of micro mirror feedback generates scanning result, and the scanning result includes the distance of the barrier, the barrier
The level angle and vertical angle of reflectivity, the MEMS micromirror.
Specifically, there is a pair of of laser emitter and laser pickoff, a circulator and a collimation with shown in FIG. 1
For the laser radar system of beam expanding lens, scanning process is as follows:
It is opened firstly, timing control issues the Start signal that repetition rate is k to laser emitter 10 with measurement module 14
Beginning signal, laser emitter 10 issue the narrow laser pulse that repetition rate is k according to the Start signal received.
The laser that the repetition rate that laser emitter 10 issues is k enters circulator 12 from the first end 1 of circulator 12, from
The second end 2 of circulator 12 is transmitted to collimator and extender mirror 15, is transmitted to MEMS micromirror 13 after collimated 15 collimator and extender of beam expanding lens.
MEMS micromirror 13 is under the control of timing control and measurement module 14 and MEMS micromirror driving circuit 16 according to default
Scan pattern carries out two-dimensional scanning to target area, wherein carries out two-dimensional scanning packet to target area according to default scan pattern
It includes and two-dimensional scanning is carried out to target area in the way of progressively scanning or scanning by column.It should be noted that in the present embodiment
2 dimensional region is divided into multiframe picture by the direction of travel along intelligent driving automobile, and each frame picture is divided into more according to multirow again
Arrange multiple scanning elements of arrangement.By taking progressive scan as an example, during any row scanning, timing control and measurement module 14 and
MEMS micromirror driving circuit 16 can constantly change MEMS micromirror 13 level angle, with drive MEMS micromirror 13 from left to right or from
The right side, which is turned left, is scanned a line scanning element, when a line scanning element is scanned complete when, timing control and measurement module 14 and
MEMS micromirror driving circuit 16 can change the vertical angles of MEMS micromirror 13, be clicked through with driving MEMS micromirror 13 to scan next line
Row scanning.Similarly, when scanning by column, during any column scan spot scan, timing control and measurement module 14 and MEMS
Micro mirror driving circuit 16 can constantly change the vertical angles of MEMS micromirror 13, to drive MEMS micromirror 13 from top to bottom or from lower past
On a column scan point is scanned, when a column scan spot scan is completed, timing control and measurement module 14 and MEMS micromirror
Driving circuit 16 can change the level angle of MEMS micromirror 13, to drive MEMS micromirror 13 to be scanned next column scanning element.
During being scanned to any scanning element in any row or either rank, MEMS micromirror 13 can expand collimation
The laser reflection that beam mirror 15 exports is to target area, by the reflected light back of barrier in target area to collimator and extender mirror 15,
Enter circulator 12 from the second end 2 of circulator 12 after collimated beam expanding lens 15, from the output of the third end 3 of circulator 12 to laser
Receiver 11.
The reflected light signal of the barrier received is converted to electric signal by laser pickoff 11, carries out the moment to electric signal
Echo-signal is generated after identification, which includes Stop signal i.e. stop signal and amplitude information.Timing control and measurement
Module 14 is the time for receiving Stop signal and sending Start signal using the flight time according to Stop signal and Start signal
Difference calculates the distance of the barrier in target area to laser radar system, which is equal to (the flight time * light velocity)/2, and
And amplitude information can be converted to reflectivity by timing control and measurement module 14, the corresponding pass between amplitude information and reflectivity
System is obtained using the method for calibration.
Later, timing control records the angle information that MEMS micromirror 13 is fed back with measurement module 14, angle letter
Breath includes the level angle and vertical angle of MEMS micromirror 13, and the scanning of a scanning element can be completed, obtain a scanning element
Scanning result, which includes barrier at a distance from laser radar, the water of the reflectivity of barrier, MEMS micromirror 13
Straight angle degree and vertical angles.
Timing control drives MEMS micromirror 13 line by line with measurement module 14 and MEMS micromirror driving circuit 16 or scans by column
After the completion, the scanning that a frame can be completed can obtain mesh according to the scanning result of all scanning elements after the completion of multiframe scanning
The two-dimensional space information in region is marked, so as to precisely be modeled to target area, and then can be in intelligent driving garage
The barrier in target area is accurately avoided during sailing.
Certainly, in another embodiment of the present invention, laser radar system can also include that as shown in Figure 2 multipair swashs
Optical transmitting set 10 and laser pickoff 11, multiple circulators 12 and multiple collimator and extender mirrors 16, scanning process and above-mentioned scanning
Process is essentially identical, the difference is that, multiple laser emitters 10 under the control of timing control and measurement module 14 according to
Secondary transmitting laser.
Also, the laser that each laser emitter 10 emits respectively enters the first end 1 of corresponding circulator 12, and in phase
It answers the second end 2 of circulator 12 to export, after collimator and extender mirror 15, reaches MEMS micromirror 13, MEMS micromirror 13 is by all standards
The reflected light back of barrier in target area is returned corresponding collimation and expanded by the laser reflection that straight beam expanding lens 15 exports to target area
Beam mirror 15 enters the second end 2 of corresponding circulator 12 after collimated beam expanding lens 15, so that circulator 12 passes through the general of third end 3
The reflected light pass for the barrier that MEMS micromirror 13 reflects is to corresponding laser pickoff 11.Laser pickoff 11 and timing control
Same as the previously described embodiments with the course of work of measurement module 14, details are not described herein.
The scan method of MEMS micromirror scanning laser radar system provided in this embodiment, by circulator to Laser emission
The optical path that the optical path and laser pickoff of device shoot laser receive reflected light is merged and has been separated, so as to pass through MEMS
Micro mirror can realize the reflected light pass of the barrier of different location in target area to the same laser pickoff
On the basis of laser radar system high-resolution, the number of laser pickoff in laser radar system is reduced, reduces laser radar
The cost of system.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.For device disclosed in embodiment
For, since it is corresponded to the methods disclosed in the examples, so being described relatively simple, related place is said referring to method part
It is bright.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (10)
1. a kind of MEMS micromirror scanning laser radar system, which is characterized in that including laser emitter, laser pickoff, loop
Device, MEMS micromirror and timing control and measurement module；
The laser emitter emits laser under the control of the timing control and measurement module；
The circulator exports the laser to the MEMS micromirror；
The MEMS micromirror under the control of the timing control and measurement module according to default scan pattern to target area into
Row two-dimensional scanning, and the laser reflection for exporting the circulator during scanning is to the target area, by the mesh
The reflected light back for marking barrier in region returns the circulator；
The reflection light output for the barrier that the circulator reflects the MEMS micromirror is to the laser pickoff；
The laser pickoff is according to the reflection photogenerated echo-signal of the barrier received；
The echo-signal and the MEMS micromirror that the timing control and measurement module are generated according to the laser pickoff are fed back
Angle information generate scanning result, the scanning result includes the distance of the barrier, the reflectivity of the barrier, institute
State the level angle and vertical angle of MEMS micromirror.
2. system according to claim 1, which is characterized in that the circulator includes fiber optic circulator and space optical loop
Device, the circulator have first end, second end and third end；
The laser of the laser transmitter projects enters the circulator from the first end, exports from the second end to described
MEMS micromirror；
The reflected light of the barrier of the MEMS micromirror reflection enters the circulator from the second end, defeated from the third end
Out to the laser pickoff.
3. system according to claim 2, which is characterized in that have collimation between the circulator and the MEMS micromirror
Beam expanding lens；
The laser of the circulator output exports after the collimator and extender mirror to the MEMS micromirror；The MEMS is micro-
The reflected light of the barrier of mirror reflection enters the circulator after the collimator and extender mirror.
4. system according to claim 3, which is characterized in that the laser radar system includes a pair of Laser emission
Device and the laser pickoff, a circulator and a collimator and extender mirror.
5. system according to claim 3, which is characterized in that the laser radar system includes the multipair Laser emission
Device and the laser pickoff, multiple circulators and multiple collimator and extender mirrors；
It is any to the laser emitter and the laser pickoff all with a circulator and a collimator and extender
Mirror is correspondingly arranged.
6. system according to claim 5, which is characterized in that the horizontal sextant angle of the collimator and extender mirror of adjacent two is
Twice of the MEMS micromirror maximum deflection angle.
7. system according to claim 1, which is characterized in that the laser radar system further includes MEMS micromirror driving electricity
Road；
The control for the control MEMS micromirror that the MEMS micromirror driving circuit is issued according to the timing control and measurement module
Signal processed generates driving signal, and drives the MEMS micromirror to carry out two-dimensional scanning by the driving signal.
8. system according to claim 1, which is characterized in that further include power module；
The power module is powered to the laser emitter, the laser pickoff and the timing control and measurement module.
9. a kind of scan method of MEMS micromirror scanning laser radar system characterized by comprising
Laser emitter emits laser under the control of timing control and measurement module；
The laser is transmitted to MEMS micromirror by circulator；
The MEMS micromirror under the control of the timing control and measurement module according to default scan pattern to target area into
Row two-dimensional scanning, and by the laser reflection to the target area during scanning, by obstacle in the target area
The reflected light back of object returns the circulator；
The reflected light pass for the barrier that the circulator reflects the MEMS micromirror is to the laser pickoff；
The laser pickoff is according to the reflection photogenerated echo-signal of the barrier received；
The echo-signal and the MEMS micromirror that the timing control and measurement module are generated according to the laser pickoff are fed back
Angle information generate scanning result, the scanning result includes the distance of the barrier, the reflectivity of the barrier, institute
State the level angle and vertical angle of MEMS micromirror.
10. according to the method described in claim 9, it is characterized in that, when the laser radar system includes the multipair laser
When transmitter and the laser pickoff, laser emitter emits laser under the control of timing control and measurement module and includes:
Multiple laser emitters successively emit laser under the control of the timing control and measurement module.
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