CN109014198A - A method of preparing the pure molybdenum part of high-performance - Google Patents
A method of preparing the pure molybdenum part of high-performance Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于粉末增材制造技术领域,特别提供了一种制备高性能纯钼金属件的方法。The invention belongs to the technical field of powder additive manufacturing, and particularly provides a method for preparing high-performance pure molybdenum metal parts.
背景技术Background technique
钼的熔点高、饱和蒸气压低、线膨胀系数小、高温强度较高、较小的比电阻和膜应力、较好的耐酸碱性能以及良好的环保性能;钼金属件在热场、隔热屏、真空镀膜等领域具有广泛的应用。钼金属件的制造通常采用传统粉末冶金工艺,即“钼粉的制备-冷等静压-感应烧结-变形处理”,钼的高熔点导致钼粉烧结致密化困难,需要较高的烧结温度,造成较大的制造能耗;并且在制造形状复杂的件时往往还需较多的机加工和后处理。粉末冶金方法烧结温度对组织的影响很大,温度不同,组织不同,晶粒大小也不同。粉末压制时需要使用坩埚,模具等,容易造成污染,难以制备高纯度的钼板坯。不仅如此,使用模具也难以制备形状复杂和特定尺寸的钼金属件。选区激光熔化技术在制备形状各异的纯Mo金属件领域有着广泛的应用。选区激光熔化(SLM)是一种新型的AM/3D打印技术,它具有无模具生产,快速制备出任何形状的三维部件等独特优势。但选区激光熔化制备钼金属件存在两个问题:易开裂和致密度偏低,大大增加了材料制备加工难度,零件制造成本非常高。难以制备出高致密且性能优异的3D打印纯钼产品的原因主要有两点:一是3D打印往往需要选用流动性非常好的球形粉末,而现有的钼粉团聚现象严重,流动性差,不宜直接用于激光快速成形。采用等离子球化工艺虽然能够制备出球形度高的球形钼粉,但是球形粉末产率低,粉末粒径分布不均匀,制备成本高,因此粒径分布均匀、低氧含量钼粉的制备技术限制了激光快速成形件制备技术的发展;二是钼的SLM制备过程中的“球化”现象(导致产品低致密度)和“网格裂纹”现象。Molybdenum has high melting point, low saturated vapor pressure, small linear expansion coefficient, high temperature strength, small specific resistance and film stress, good acid and alkali resistance and good environmental performance; Screen, vacuum coating and other fields have a wide range of applications. The manufacture of molybdenum metal parts usually adopts the traditional powder metallurgy process, that is, "preparation of molybdenum powder - cold isostatic pressing - induction sintering - deformation treatment". The high melting point of molybdenum makes it difficult to sinter and densify molybdenum powder, which requires a higher sintering temperature. It causes large manufacturing energy consumption; and often requires more machining and post-processing when manufacturing parts with complex shapes. The sintering temperature of the powder metallurgy method has a great influence on the structure, the temperature is different, the structure is different, and the grain size is also different. Crucibles, molds, etc. are required for powder compaction, which are likely to cause pollution and make it difficult to prepare high-purity molybdenum slabs. Not only that, it is also difficult to prepare molybdenum metal parts with complex shapes and specific dimensions using molds. Selective laser melting technology has been widely used in the field of preparing pure Mo metal parts with various shapes. Selected laser melting (SLM) is a new type of AM/3D printing technology, which has unique advantages such as mold-free production and rapid preparation of three-dimensional parts of any shape. However, there are two problems in the preparation of molybdenum metal parts by selective laser melting: easy cracking and low density, which greatly increases the difficulty of material preparation and processing, and the manufacturing cost of parts is very high. There are two main reasons why it is difficult to prepare highly dense and high-performance 3D printing pure molybdenum products: one is that 3D printing often needs to use spherical powders with very good fluidity, and the existing molybdenum powders have serious agglomeration and poor fluidity, so it is not suitable Directly used in laser rapid prototyping. Although the plasma spheroidization process can produce spherical molybdenum powder with high sphericity, the yield of spherical powder is low, the powder particle size distribution is uneven, and the preparation cost is high. Therefore, the preparation technology of molybdenum powder with uniform particle size distribution and low oxygen content is limited. The second is the "spheroidization" phenomenon (resulting in low density of the product) and the "grid crack" phenomenon in the SLM preparation process of molybdenum.
发明内容Contents of the invention
本发明的目的在于提供一种采用选区激光熔化(SLM)技术制备复杂形状的高性能纯钼金属件的方法。以高纯多晶形钼粉为原料,通过改变钼粉颗粒由团聚状态到分散状态、由不规则多晶形到近球形且粒径分布更窄,以满足增材制造工艺过程中粉末高流动性的要求。该方法有助于解决钼产品致密化困难和加工难度高问题,还能显著降低粉末制备成本和工艺能耗。The object of the present invention is to provide a method for preparing high-performance pure molybdenum metal parts with complex shapes by using the selective laser melting (SLM) technology. Using high-purity polycrystalline molybdenum powder as raw material, by changing the molybdenum powder particles from agglomerated state to dispersed state, from irregular polycrystalline to nearly spherical and narrower particle size distribution, in order to meet the high fluidity of the powder in the additive manufacturing process Require. The method helps to solve the problems of difficult densification and high processing difficulty of molybdenum products, and can also significantly reduce powder preparation costs and process energy consumption.
一种制备高性能纯钼金属件的方法,其特征在于:首先采用多次气流磨技术处理得到分散均匀、粒度分布窄的近球形钼粉,然后在氢气氛围的高温炉中对钼粉进行还原,得到低氧含量且流动性良好的还原钼粉;将气流磨后不同粒径的近球形钼粉混合;同时,通过计算机建模软件设计出复杂形状的工件示意图以及控制扫描速度、扫描间距、扫描层厚和扫描方向,导出打印文件;清洗选区激光熔化设备的送粉罐,打印室,确保打印环境纯净无污染;接着,将粉末装入SLM装置并导入打印文件制备出复杂形状的钼金属件,制备工艺如图1所示,具体工艺步骤为:A method for preparing high-performance pure molybdenum metal parts, which is characterized in that: firstly, the nearly spherical molybdenum powder with uniform dispersion and narrow particle size distribution is obtained by multiple jet milling technology, and then the molybdenum powder is reduced in a high-temperature furnace in a hydrogen atmosphere , to obtain reduced molybdenum powder with low oxygen content and good fluidity; mix the nearly spherical molybdenum powder with different particle sizes after jet milling; at the same time, use computer modeling software to design a schematic diagram of a workpiece with a complex shape and control the scanning speed, scanning distance, Scan the layer thickness and scanning direction, and export the print file; clean the powder feeding tank and printing room of the selective laser melting equipment to ensure that the printing environment is clean and pollution-free; then, load the powder into the SLM device and import the printing file to prepare complex shapes of molybdenum metal piece, the preparation process is as shown in Figure 1, and the specific process steps are:
1、气流磨处理钼粉:原料粉末为粒径不等的多晶形钼粉,采用对喷式气流磨装置。设定研磨腔压力为0.5~1.0MPa,采用氮气作为研磨介质,使研磨腔内氧含量≤0.05%,在分选轮的频率为15~60Hz的范围内对钼粉进行处理。采用三次气流磨工艺,即第一次气流磨在45~60Hz高频对钼粉进行初步分散和整形,第二次气流磨在30~45Hz中频对钼粉进行再次分散和整形,第三次气流磨在15~30Hz低频进一步对钼粉整形并粒径筛分,使粉末表面更加圆滑,进一步提高粉末的流动性,气流磨最后得到粒度分布窄、分散良好的近球形钼粉;1. Jet milling treatment of molybdenum powder: The raw material powder is polycrystalline molybdenum powder with different particle sizes, and a counter-jet jet milling device is used. The pressure of the grinding chamber is set at 0.5-1.0 MPa, nitrogen is used as the grinding medium, the oxygen content in the grinding chamber is ≤0.05%, and the molybdenum powder is processed within the frequency range of the sorting wheel of 15-60 Hz. Three jet milling processes are adopted, that is, the first jet mill disperses and shapes the molybdenum powder at a high frequency of 45-60 Hz, the second jet mill disperses and shapes the molybdenum powder at an intermediate frequency of 30-45 Hz, and the third jet mill The molybdenum powder is further shaped and particle size sieved at a low frequency of 15-30Hz to make the surface of the powder smoother and further improve the fluidity of the powder. The jet mill finally obtains a nearly spherical molybdenum powder with narrow particle size distribution and good dispersion;
2、粉末还原:将气流磨处理后的混合钼粉放入管式炉中,通入高纯氢气,于600~650℃、升温速率为7℃/min的条件下还原60~120min得到低氧含量的钼粉;2. Powder reduction: Put the mixed molybdenum powder processed by jet mill into a tube furnace, feed high-purity hydrogen, and reduce it for 60-120 minutes at 600-650°C and a heating rate of 7°C/min to obtain hypoxia content of molybdenum powder;
3、建模:首先用3D Max软件绘制零件三维示意图,然后设置加工参数,在Materialise Magics软件导出参数文件。以激光能量密度表征加工参数,如附图2所示;3. Modeling: first draw the three-dimensional schematic diagram of the part with 3D Max software, then set the processing parameters, and export the parameter file in the Materialize Magics software. The processing parameters are characterized by laser energy density, as shown in Figure 2;
4、选区激光熔化(SLM)成形:首先将模型文件导入SLM选区激光熔化设备的计算机系统,将还原后的气流磨钼粉载入送粉罐,随后在钼基板铺上层厚约为50μm的粉末,采用高纯氩气进行保护,待建造室内氧含量≤0.05%后方可启动激光扫描,实现全程全自动打印成形。最终得到复杂形状且高致密(>98%)的钼金属件。4. Selective laser melting (SLM) forming: first import the model file into the computer system of the SLM selective laser melting equipment, load the reduced jet-milled molybdenum powder into the powder feeding tank, and then spread a layer of powder with a thickness of about 50 μm on the molybdenum substrate , using high-purity argon for protection, and the laser scanning can be started only after the oxygen content in the construction room is ≤0.05%, so as to realize the full-automatic printing and forming. Finally, complex shaped and highly dense (>98%) molybdenum metal parts are obtained.
进一步地,所述的目标高致密度钼金属件,纯度为99.99%以上,致密度达98%以上。Further, the target high-density molybdenum metal piece has a purity of more than 99.99% and a density of more than 98%.
进一步地,采用三次气流磨工艺处理后的钼粉平均粒径分布窄,粉末分散良好,形貌呈现近球形,流动性好,比表面积增大,烧结活性提高,可获得良好的熔池,提高打印质量。Furthermore, the molybdenum powder processed by the three-time jet milling process has a narrow average particle size distribution, good powder dispersion, a nearly spherical shape, good fluidity, increased specific surface area, improved sintering activity, and a good molten pool can be obtained. print quality.
进一步地,采用管式炉还原后钼粉的氧含量≤0.01%。Further, the oxygen content of the molybdenum powder after reduction in a tube furnace is ≤0.01%.
进一步地,SLM各个工作参数为:激光功率E为380W,扫描速度200~700mm/s,扫描间距80~120μm,扫描层厚30~50μm,建造舱氧含量≤0.05%,扫描策略采用45°旋转交替网格式扫描,可以减弱裂纹扩展行为,平衡残余应力,获得高性能的纯钼金属件。Further, the various working parameters of SLM are: laser power E is 380W, scanning speed is 200-700mm/s, scanning distance is 80-120μm, scanning layer thickness is 30-50μm, oxygen content in the construction cabin is ≤0.05%, scanning strategy adopts 45°rotation Alternate grid scanning can weaken crack propagation behavior, balance residual stress, and obtain high-performance pure molybdenum metal parts.
本发明从优化原料粉末的角度出发,对原料钼粉进行气流磨处理,增强原料粉末的流动性,提高粉末激光吸收率,实现致密化。并设计出最优的制备加工参数加以建模,采用选区激光熔化(SLM)3D打印技术,设计出特定的扫描策略减弱裂纹扩展行为,平衡残余应力,提高材料性能,制备具有复杂形状的高性能纯钼金属件。From the perspective of optimizing the raw material powder, the present invention performs jet milling treatment on the raw material molybdenum powder, enhances the fluidity of the raw material powder, improves the laser absorption rate of the powder, and realizes densification. And design the optimal preparation and processing parameters for modeling, using the selective laser melting (SLM) 3D printing technology, design a specific scanning strategy to weaken the crack propagation behavior, balance the residual stress, improve the material performance, and prepare high-performance materials with complex shapes. Pure molybdenum metal parts.
此技术方案的主要技术优点在于:The main technical advantages of this technical solution are:
(1)气流磨处理原料多晶钼粉,可得到近球形的钼粉,改变钼粉流动性,比表面积增大,烧结活性提高,钼粉充分熔融,获得良好的熔池,提高打印质量;(1) The raw material polycrystalline molybdenum powder can be processed by jet mill to obtain nearly spherical molybdenum powder, which can change the fluidity of the molybdenum powder, increase the specific surface area, improve the sintering activity, fully melt the molybdenum powder, obtain a good molten pool, and improve the printing quality;
(2)采用管式炉氢气还原可以进一步降低钼粉含氧量。(2) The oxygen content of molybdenum powder can be further reduced by hydrogen reduction in tube furnace.
(3)首次采用45°旋转交替网格式的扫描策略,减弱裂纹扩展行为,平衡残余应力,制备具有复杂形状的高性能纯钼金属件。(3) For the first time, the scanning strategy of 45° rotating alternating grid pattern is used to weaken the crack propagation behavior, balance the residual stress, and prepare high-performance pure molybdenum metal parts with complex shapes.
附图说明Description of drawings
图1为本发明的工艺流程图;Fig. 1 is a process flow diagram of the present invention;
图2为激光扫描策略示意图。Figure 2 is a schematic diagram of the laser scanning strategy.
具体实施方式Detailed ways
下面结合实例对本发明做进一步阐述,但本发明并不局限于具体实施例。The present invention will be further elaborated below in conjunction with example, but the present invention is not limited to specific embodiment.
实施例1Example 1
原料粉末为平均粒径约15μm的多晶形钼粉,共15kg,采用对喷式气流磨装置。设定研磨腔压力为0.5~1.0MPa,采用氮气作为研磨介质,使研磨腔内氧含量≤0.5%。第一次气流磨在45~60Hz处理,第二次气流磨在30~45Hz处理,第三次气流磨在15~30Hz处理,最后得到平均粒径约为10μm的近球形钼粉。将得到的钼粉放入管式炉中,通入高纯氢气,于600~650℃、升温速率为7℃/min的条件下还原60~120min。用3D Max软件绘制零件三维示意图,然后设置加工参数,在Materialise Magics软件导出参数文件。用无水乙醇分别清洗送料罐,送粉器,铺粉器和基板,吹风机吹干。用氩气枪吹洗建造室和余料回收管。把还原后的混合钼粉载入送粉罐,随后在钼基板铺上层厚约为50μm的粉末,采用高纯氩气进行保护,建造室内氧含量≤0.05%。选区激光熔化参数设置为:激光功率E为380W,扫描速度v为300mm/s,扫描间距h为20μm,扫描层厚为30μm,扫描策略采用45°旋转交替网格式扫描,实现全程全自动打印成形。最终得到复杂形状钼金属件,致密度>98.9%。The raw material powder is polycrystalline molybdenum powder with an average particle size of about 15 μm, a total of 15 kg, and a counter-jet jet milling device is used. The pressure of the grinding chamber is set at 0.5-1.0 MPa, and nitrogen gas is used as the grinding medium so that the oxygen content in the grinding chamber is ≤0.5%. The first jet mill is processed at 45-60Hz, the second jet mill is treated at 30-45Hz, the third jet mill is treated at 15-30Hz, and finally a nearly spherical molybdenum powder with an average particle size of about 10μm is obtained. The obtained molybdenum powder is put into a tube furnace, fed with high-purity hydrogen, and reduced for 60-120 minutes under the conditions of 600-650°C and a heating rate of 7°C/min. Use 3D Max software to draw a three-dimensional schematic diagram of the part, then set the processing parameters, and export the parameter file in Materialize Magics software. Clean the feed tank, powder feeder, powder spreader and substrate with absolute ethanol, and blow dry with a hair dryer. Purge the build chamber and residue recovery tube with an argon gun. The reduced mixed molybdenum powder is loaded into the powder feeding tank, and then a layer of powder with a thickness of about 50 μm is spread on the molybdenum substrate, and high-purity argon is used for protection, and the oxygen content in the construction room is ≤0.05%. The laser melting parameters of the selected area are set as follows: the laser power E is 380W, the scanning speed v is 300mm/s, the scanning distance h is 20μm, and the scanning layer thickness is 30μm. . Finally, molybdenum metal parts with complex shapes are obtained, and the density is >98.9%.
实施例2Example 2
原料粉末为平均粒径约30μm的多晶形钼粉,共15kg,采用对喷式气流磨装置。设定研磨腔压力为0.5~1.0MPa,采用氮气作为研磨介质,使研磨腔内氧含量≤0.5%。第一次气流磨在45~60Hz处理,第二次气流磨在30~45Hz处理,第三次气流磨在15~30Hz处理,最后得到平均粒径约为26μm的近球形钼粉。将得到的钼粉放入管式炉中,通入高纯氢气,于600~650℃、升温速率为7℃/min的条件下还原60~120min。用3D Max软件绘制零件三维示意图,然后设置加工参数,在Materialise Magics软件导出参数文件。用无水乙醇分别清洗送料罐,送粉器,铺粉器和基板,吹风机吹干。用氩气枪吹洗建造室和余料回收管。把还原后的混合钼粉载入送粉罐,随后在钼基板铺上层厚约为50μm的粉末,采用高纯氩气进行保护,建造室内氧含量≤0.05%。选区激光熔化参数设置为:激光功率E为380W,扫描速度v为400mm/s,扫描间距h为50μm,扫描层厚为35μm,扫描策略采用45°旋转交替网格式扫描,实现全程全自动打印成形。最终得到复杂形状钼金属件,致密度>98.5%。The raw material powder is polycrystalline molybdenum powder with an average particle size of about 30 μm, a total of 15 kg, and a counter-jet jet milling device is used. The pressure of the grinding chamber is set at 0.5-1.0 MPa, and nitrogen gas is used as the grinding medium so that the oxygen content in the grinding chamber is ≤0.5%. The first jet mill is processed at 45-60Hz, the second jet mill is treated at 30-45Hz, the third jet mill is treated at 15-30Hz, and finally a nearly spherical molybdenum powder with an average particle size of about 26μm is obtained. The obtained molybdenum powder is put into a tube furnace, fed with high-purity hydrogen, and reduced for 60-120 minutes under the conditions of 600-650°C and a heating rate of 7°C/min. Use 3D Max software to draw a three-dimensional schematic diagram of the part, then set the processing parameters, and export the parameter file in Materialize Magics software. Clean the feed tank, powder feeder, powder spreader and substrate with absolute ethanol, and blow dry with a hair dryer. Purge the build chamber and residue recovery tube with an argon gun. The reduced mixed molybdenum powder is loaded into the powder feeding tank, and then a layer of powder with a thickness of about 50 μm is spread on the molybdenum substrate, and high-purity argon is used for protection, and the oxygen content in the construction room is ≤0.05%. The laser melting parameters of the selected area are set as follows: the laser power E is 380W, the scanning speed v is 400mm/s, the scanning distance h is 50μm, and the scanning layer thickness is 35μm. . Finally, molybdenum metal parts with complex shapes are obtained, and the density is >98.5%.
实施例3Example 3
原料粉末为平均粒径约30μm的多晶形钼粉,共15kg,采用对喷式气流磨装置。设定研磨腔压力为0.6MPa,采用氮气作为研磨介质,使研磨腔内氧含量≤0.5%。第一次气流磨在45Hz处理,第二次气流磨在45Hz处理,第三次气流磨在30Hz处理,最后得到平均粒径约为30μm的近球形钼粉。将得到的钼粉放入管式炉中,通入高纯氢气,于600~650℃、升温速率为7℃/min的条件下还原60~120min。用3D Max软件绘制零件三维示意图,然后设置加工参数,在Materialise Magics软件导出参数文件。用无水乙醇分别清洗送料罐,送粉器,铺粉器和基板,吹风机吹干。用氩气枪吹洗建造室和余料回收管。把还原后的混合钼粉载入送粉罐,随后在钼基板铺上层厚约为50μm的粉末,采用高纯氩气进行保护,建造室内氧含量≤0.05%。选区激光熔化参数设置为:激光功率E为380W,扫描速度v为400mm/s,扫描间距h为50μm,扫描层厚为35μm,扫描策略采用45°旋转交替网格式扫描,实现全程全自动打印成形。最终得到复杂形状钼金属件,致密度>99.5%。The raw material powder is polycrystalline molybdenum powder with an average particle size of about 30 μm, a total of 15 kg, and a counter-jet jet milling device is used. The pressure of the grinding chamber is set to 0.6MPa, and nitrogen is used as the grinding medium so that the oxygen content in the grinding chamber is ≤0.5%. The first jet mill was processed at 45Hz, the second jet mill was processed at 45Hz, the third jet mill was processed at 30Hz, and finally a nearly spherical molybdenum powder with an average particle size of about 30 μm was obtained. The obtained molybdenum powder is put into a tube furnace, fed with high-purity hydrogen, and reduced for 60-120 minutes under the conditions of 600-650°C and a heating rate of 7°C/min. Use 3D Max software to draw a three-dimensional schematic diagram of the part, then set the processing parameters, and export the parameter file in Materialize Magics software. Clean the feed tank, powder feeder, powder spreader and substrate with absolute ethanol, and blow dry with a hair dryer. Purge the build chamber and residue recovery tube with an argon gun. The reduced mixed molybdenum powder is loaded into the powder feeding tank, and then a layer of powder with a thickness of about 50 μm is spread on the molybdenum substrate, and high-purity argon is used for protection, and the oxygen content in the construction room is ≤0.05%. The laser melting parameters of the selected area are set as follows: the laser power E is 380W, the scanning speed v is 400mm/s, the scanning distance h is 50μm, and the scanning layer thickness is 35μm. . Finally, molybdenum metal parts with complex shapes are obtained, and the density is >99.5%.
实施例4Example 4
原料粉末为平均粒径约30μm的多晶形钼粉,共15kg,采用对喷式气流磨装置。设定研磨腔压力为0.9MPa,采用氮气作为研磨介质,使研磨腔内氧含量≤0.5%。第一次气流磨在45Hz处理,第二次气流磨在30Hz处理,第三次气流磨在15Hz处理,最后得到平均粒径约为21μm的近球形钼粉。将得到的钼粉放入管式炉中,通入高纯氢气,于600℃、升温速率为7℃/min的条件下还原60min。用3DMax软件绘制零件三维示意图,然后设置加工参数,在Materialise Magics软件导出参数文件。用无水乙醇分别清洗送料罐,送粉器,铺粉器和基板,吹风机吹干。用氩气枪吹洗建造室和余料回收管。把还原后的混合钼粉载入送粉罐,随后在钼基板铺上层厚约为50μm的粉末,采用高纯氩气进行保护,建造室内氧含量≤0.05%。选区激光熔化参数设置为:激光功率E为380W,扫描速度v为400mm/s,扫描间距h为50μm,扫描层厚为40μm,扫描策略采用45°旋转交替网格式扫描,实现全程全自动打印成形。最终得到复杂形状钼金属件,致密度>99%。The raw material powder is polycrystalline molybdenum powder with an average particle size of about 30 μm, a total of 15 kg, and a counter-jet jet milling device is used. The pressure of the grinding chamber is set to 0.9MPa, and nitrogen is used as the grinding medium so that the oxygen content in the grinding chamber is ≤0.5%. The first jet mill was processed at 45Hz, the second jet mill was processed at 30Hz, the third jet mill was processed at 15Hz, and finally a nearly spherical molybdenum powder with an average particle size of about 21 μm was obtained. The obtained molybdenum powder was put into a tube furnace, fed with high-purity hydrogen, and reduced for 60 minutes at 600°C and a heating rate of 7°C/min. Use 3DMax software to draw a three-dimensional schematic diagram of the part, then set the processing parameters, and export the parameter file in Materialize Magics software. Clean the feed tank, powder feeder, powder spreader and substrate with absolute ethanol, and blow dry with a hair dryer. Purge the build chamber and residue recovery tube with an argon gun. The reduced mixed molybdenum powder is loaded into the powder feeding tank, and then a layer of powder with a thickness of about 50 μm is spread on the molybdenum substrate, and high-purity argon is used for protection, and the oxygen content in the construction room is ≤0.05%. The laser melting parameters of the selected area are set as follows: the laser power E is 380W, the scanning speed v is 400mm/s, the scanning distance h is 50μm, and the scanning layer thickness is 40μm. . Finally, molybdenum metal parts with complex shapes are obtained, and the density is >99%.
以上所述仅为本发明的实施例子,不因此限制本发明的专利使用范围,凡直接或间接运用在其他相关的技术领域,或者利用本发明说明书内容所作的等效结构或类似的生产流程,均将包括在本发明的专利保护范围内。The above description is only an implementation example of the present invention, and does not limit the scope of patent application of the present invention. Any direct or indirect application in other related technical fields, or the equivalent structure or similar production process made by using the contents of the description of the present invention, All will be included in the patent protection scope of the present invention.
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