CN108996106A - A kind of vacuum equipment live-roller with on-line monitoring function - Google Patents
A kind of vacuum equipment live-roller with on-line monitoring function Download PDFInfo
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- CN108996106A CN108996106A CN201810782250.3A CN201810782250A CN108996106A CN 108996106 A CN108996106 A CN 108996106A CN 201810782250 A CN201810782250 A CN 201810782250A CN 108996106 A CN108996106 A CN 108996106A
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 30
- 230000005540 biological transmission Effects 0.000 claims abstract description 65
- 238000012806 monitoring device Methods 0.000 claims abstract description 20
- 230000001360 synchronised effect Effects 0.000 claims description 31
- 239000011553 magnetic fluid Substances 0.000 claims description 27
- 238000007789 sealing Methods 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims 1
- 238000013024 troubleshooting Methods 0.000 abstract description 2
- 238000005457 optimization Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000011554 ferrofluid Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000009776 industrial production Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
本发明公开了一种具有在线监测功能的真空设备传动辊，包括驱动装置、真空腔体、至少一组传动辊单元和监测装置；所述传动辊单元转动连接在所述真空腔体内，所述传动辊单元的输入端和所述驱动装置传动连接，所述传动辊单元的输出端与监测装置连接。本发明通过在真空设备传动辊的每一个传动辊单元的输出端均与监测装置连接，可以直接监测每一传动辊单元的工作状态，当某一传动辊单元发生故障时，监测装置可以准确的监测并发现是哪个传动辊单元发生故障，可以实现快速排查，确保对设备及时采取应对措施，避免因故障造成更大损失。本发明应用真空设备技术领域。
The invention discloses a driving roller of vacuum equipment with an online monitoring function, which comprises a driving device, a vacuum chamber, at least one group of driving roller units and a monitoring device; the driving roller unit is rotatably connected in the vacuum chamber, and the The input end of the transmission roller unit is connected to the driving device in transmission, and the output end of the transmission roller unit is connected to the monitoring device. The present invention can directly monitor the working status of each drive roller unit by connecting the output end of each drive roller unit of the vacuum equipment drive roller to the monitoring device. When a certain drive roller unit breaks down, the monitoring device can accurately Monitoring and discovering which drive roller unit is faulty can realize quick troubleshooting to ensure timely response to the equipment and avoid greater losses due to faults. The invention applies to the technical field of vacuum equipment.
Description
技术领域technical field
本发明涉及真空设备技术领域，特别是涉及一种具有在线监测功能的真空设备传动辊。The invention relates to the technical field of vacuum equipment, in particular to a vacuum equipment driving roller with an online monitoring function.
背景技术Background technique
真空设备被广泛应用于现代化工业生产，例如物理气相沉积技术、化学气相沉积技术、气相运输沉积技术和等离子体表面处理技术等工业生产领域。大多数真空设备和其他设备构成自动化或半自动化生产线，真空设备传动辊失效的在线监测对于生产线的正常运行具有重要意义。传动辊是真空设备主要的传动方式之一，其运行状态在线监测尤为重要。Vacuum equipment is widely used in modern industrial production, such as physical vapor deposition technology, chemical vapor deposition technology, vapor transport deposition technology and plasma surface treatment technology and other industrial production fields. Most of the vacuum equipment and other equipment constitute an automatic or semi-automatic production line, and the online monitoring of the failure of the transmission roller of the vacuum equipment is of great significance to the normal operation of the production line. The transmission roller is one of the main transmission modes of the vacuum equipment, and the online monitoring of its operation status is particularly important.
真空设备目前主要通过以下一种或多种方式监测传动辊：1.监测传动辊的动力输入装置(例如电动机等)的工作状态；2.监测传动件(例如同步轮、同步带等)的工作状态；3.监测传动辊输入端连接件(例如磁流体密封传动装置、联轴器等)的工作状态；4.监测真空设备所加工的工件的位置。以上方法均是通过监测传动辊中某个零部件的工作状态或者通过监测真空设备所加工工件的位置判断传动辊工作状态，不能完整地反应整个传动辊的工作状态，可靠性偏低。At present, the vacuum equipment mainly monitors the driving roller through one or more of the following methods: 1. Monitoring the working status of the power input device (such as a motor, etc.) of the driving roller; 2. Monitoring the work of the transmission parts (such as synchronous wheels, timing belts, etc.) 3. Monitor the working status of the connecting parts at the input end of the transmission roller (such as magnetic fluid seal transmission device, coupling, etc.); 4. Monitor the position of the workpiece processed by the vacuum equipment. The above methods all judge the working state of the driving roller by monitoring the working state of a certain part in the driving roller or by monitoring the position of the workpiece processed by the vacuum equipment, which cannot completely reflect the working state of the entire driving roller, and the reliability is low.
发明内容Contents of the invention
本发明的目的在于提供一种具有在线监测功能的真空设备传动辊，可以监测每一传动辊的工作状态，并及时给出传动辊失效报警，确保对设备及时采取应对措施，避免因故障造成更大损失。The purpose of the present invention is to provide a vacuum equipment transmission roller with an online monitoring function, which can monitor the working status of each transmission roller, and give a timely alarm for the failure of the transmission roller, so as to ensure that timely countermeasures are taken for the equipment, and avoid damage caused by failures. Big loss.
本发明所采用的技术方案是：一种具有在线监测功能的真空设备传动辊，包括驱动装置、真空腔体、至少一组传动辊单元和监测装置；所述传动辊单元转动连接在所述真空腔体内，所述传动辊单元的输入端和所述驱动装置传动连接，所述传动辊单元的输出端与监测装置连接；The technical solution adopted in the present invention is: a vacuum equipment driving roller with online monitoring function, including a driving device, a vacuum cavity, at least one group of driving roller units and a monitoring device; the driving roller unit is rotatably connected to the vacuum In the cavity, the input end of the transmission roller unit is connected to the driving device by transmission, and the output end of the transmission roller unit is connected to the monitoring device;
所述传动辊单元包括传动辊、第一磁流体密封传动装置和第二磁流体密封传动装置，所述传动辊的一端通过第一联轴器和第一磁流体密封传动装置的输出轴相接，另一端通过第二联轴器和第二磁流体密封传动装置的输入轴相接。The driving roller unit includes a driving roller, a first magnetic fluid sealing transmission device and a second magnetic fluid sealing transmission device, and one end of the driving roller is connected to the output shaft of the first magnetic fluid sealing transmission device through a first coupling , and the other end connects with the input shaft of the second magnetic fluid seal transmission device through the second coupling.
进一步优化，若干所述传动辊单元平行排列并转动连接在所述真空腔体内，相邻所述传动辊单元之间通过传动件同步转动，其中一个所述传动辊单元的输入端和所述驱动装置传动连接，每一所述传动辊单元的输出端均与监测装置连接。Further optimization, several drive roller units are arranged in parallel and are rotatably connected in the vacuum chamber, and the adjacent drive roller units rotate synchronously through transmission parts, and the input end of one of the drive roller units and the drive The device is connected by transmission, and the output end of each drive roller unit is connected with the monitoring device.
进一步优化，所述传动件包括第一同步轮、第二同步轮和同步带，所述第一同步轮和第二同步轮固定连接在所述第一磁流体密封传动装置的输入轴上，所述第一同步轮位于第二同步轮的外侧，相邻的两个所述第一磁流体密封传动装置上的第一同步轮或第二同步轮通过所述同步带传动相接。Further optimization, the transmission member includes a first synchronous wheel, a second synchronous wheel and a synchronous belt, and the first synchronous wheel and the second synchronous wheel are fixedly connected to the input shaft of the first magnetic fluid sealed transmission, so The first synchronous wheel is located outside the second synchronous wheel, and the first synchronous wheel or the second synchronous wheel on two adjacent first magnetic fluid sealed transmission devices are connected through the synchronous belt transmission.
进一步优化，所述监测装置包括若干监测单元，每一所述第二磁流体密封传动装置的输出轴均对应连接有所述监测单元。In a further optimization, the monitoring device includes several monitoring units, and each output shaft of the second ferrofluid sealed transmission device is correspondingly connected to the monitoring units.
进一步优化，每一所述监测单元均与报警装置电性连接。Further optimization, each of the monitoring units is electrically connected to an alarm device.
进一步优化，所述驱动装置通过传动带和第一同步轮或第二同步轮传动连接。Further optimization, the driving device is connected to the first synchronous wheel or the second synchronous wheel through a transmission belt.
本发明的有益效果：本发明通过在真空设备传动辊的每一个传动辊单元的输出端均与监测装置连接，可以直接监测每一传动辊单元的工作状态，当某一传动辊单元发生故障时，监测装置可以准确的监测并发现是哪个传动辊单元发生故障，可以实现快速排查，确保对设备及时采取应对措施，避免因故障造成更大损失。Beneficial effects of the present invention: the present invention can directly monitor the working status of each drive roller unit by connecting the output end of each drive roller unit of the vacuum equipment drive roller to the monitoring device, and when a certain drive roller unit breaks down , the monitoring device can accurately monitor and find out which transmission roller unit is faulty, and can realize quick troubleshooting to ensure timely response to the equipment and avoid greater losses due to faults.
附图说明Description of drawings
下面结合附图和实施方式对本发明进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
图1是本实施例的结构示意图；Fig. 1 is the structural representation of present embodiment;
图2是驱动装置和传动件的连接示意图。Fig. 2 is a schematic diagram of the connection between the driving device and the transmission member.
具体实施方式Detailed ways
如图1和图2所示的具有在线监测功能的真空设备传动辊，包括驱动装置1、真空腔体2、至少一组传动辊单元和监测装置，传动辊单元转动连接在所述真空腔体2内，传动辊单元的输入端和驱动装置1传动连接，传动辊单元的输出端与监测装置连接，传动辊单元在驱动装置的带动下转动，并通过监测装置监测传动辊单元的转速。The vacuum equipment driving roller with online monitoring function shown in Figure 1 and Figure 2 includes a driving device 1, a vacuum chamber 2, at least one set of driving roller units and a monitoring device, and the driving roller unit is rotatably connected to the vacuum chamber 2, the input end of the driving roller unit is connected to the driving device 1, the output end of the driving roller unit is connected to the monitoring device, the driving roller unit rotates under the drive of the driving device, and the speed of the driving roller unit is monitored by the monitoring device.
传动辊单元包括传动辊41、第一磁流体密封传动装置42和第二磁流体密封传动装置43，传动辊41的一端通过第一联轴器44和第一磁流体密封传动装置42的输出轴相接，另一端通过第二联轴器45和第二磁流体密封传动装置43的输入轴相接。第一磁流体密封传动装置42和第二磁流体密封传动装置43形成的“O型密封圈”达到对真空腔体2的密封效果。同时传动辊41的一端通过第一联轴器44和第一磁流体密封传动装置42的输出轴连接，传动辊41的另一端通过第二联轴器45和第二磁流体密封传动装置43的输入轴相接，使第一磁流体密封传动装置42、传动辊41和第二磁流体密封传动装置43具有相同的转速。The driving roller unit comprises a driving roller 41, a first magnetic fluid sealing transmission device 42 and a second magnetic fluid sealing transmission device 43, and one end of the driving roller 41 passes through the output shaft of the first shaft coupling 44 and the first magnetic fluid sealing transmission device 42 The other end is connected with the input shaft of the second magnetic fluid seal transmission device 43 through the second coupling 45 . The "O-ring" formed by the first magnetic fluid sealing transmission device 42 and the second magnetic fluid sealing transmission device 43 achieves the sealing effect on the vacuum cavity 2 . Simultaneously, one end of the drive roller 41 is connected with the output shaft of the first magnetic fluid seal transmission device 42 through the first shaft coupling 44, and the other end of the transmission roller 41 is passed through the second shaft coupling 45 and the second magnetic fluid seal transmission device 43. The input shafts are connected so that the first magnetic fluid seal transmission device 42 , the transmission roller 41 and the second magnetic fluid seal transmission device 43 have the same rotational speed.
当传动辊单元的数量为多个时，所有的传动辊单元平行排列并转动连接在真空腔体2内，相邻传动辊单元之间通过传动件同步转动，其中一个传动辊单元的输入端和驱动装置1传动连接，每一传动辊单元的输出端和监测装置连接。每一传动辊单元在驱动装置和传动件的带动下同步转动，每一传动辊单元的输出端均与监测装置连接，当某一个传动辊单元出现故障时，监测装置监测到对应的转速和监测装置设置的转速不同，进而判断出是具体的那一传动辊单元出现故障，实现快速排查，确保及时对真空设备的传动辊失效采取应对措施，避免因故障造成更大损失。When the number of driving roller units is multiple, all driving roller units are arranged in parallel and are rotatably connected in the vacuum cavity 2, and the adjacent driving roller units rotate synchronously through transmission parts, and the input end of one of the driving roller units and The driving device 1 is connected in transmission, and the output end of each driving roller unit is connected with the monitoring device. Each driving roller unit rotates synchronously under the drive of the driving device and the transmission parts, and the output end of each driving roller unit is connected with the monitoring device. When a certain driving roller unit fails, the monitoring device monitors the corresponding speed and monitors The rotating speed of the device is different, and then it can be judged that the specific transmission roller unit is faulty, so as to realize rapid investigation and ensure timely response to the failure of the transmission roller of the vacuum equipment to avoid greater losses due to failure.
传动件包括第一同步轮51、第二同步轮52和同步带53，第一同步轮51和第二同步轮52固定连接在第一磁流体密封传动装置42的输入轴上，第一同步轮51位于第二同步轮52的外侧，相邻的两个第一磁流体密封传动装置42上的第一同步轮51或第二同步轮52通过同步带53相接，使相邻的两个第一磁流体密封传动装置同步转动。The transmission member includes a first synchronous wheel 51, a second synchronous wheel 52 and a synchronous belt 53, the first synchronous wheel 51 and the second synchronous wheel 52 are fixedly connected on the input shaft of the first magnetic fluid seal transmission 42, the first synchronous wheel 51 is located on the outer side of the second synchronous wheel 52, and the first synchronous wheel 51 or the second synchronous wheel 52 on two adjacent first magnetic fluid sealed transmissions 42 are connected by a synchronous belt 53, so that the adjacent two second synchronous wheels A ferrofluid sealed gear rotates synchronously.
监测装置包括若干监测单元31，每一个第二磁流体密封传动装置43的输出轴均连接有对应的监测单元31，每一个监测单元31均与报警装置6电性连接。当第二磁流体密封传动装置43对应的监测单元31监测到第二磁流体密封传动装置43的转速和监测单元31所设定值不同时，即可判断对应的传动辊单元出现故障，再通过报警器发出警报及时通知管理人员进行处理。The monitoring device includes several monitoring units 31 , each output shaft of the second ferrofluid sealed transmission device 43 is connected to a corresponding monitoring unit 31 , and each monitoring unit 31 is electrically connected to the alarm device 6 . When the monitoring unit 31 corresponding to the second magnetic fluid sealing transmission device 43 detects that the rotating speed of the second magnetic fluid sealing transmission device 43 is different from the set value of the monitoring unit 31, it can be judged that the corresponding drive roller unit has failed, and then pass The alarm sends out an alarm to notify the management personnel in time to deal with it.
驱动装置1通过传动带7和第一同步轮51或第二同步轮52传动连接。采用传动带7传动的方式可以利用原本设计的第一同步轮51或第二同步轮52可以简化装置的结构，同时传动带传动方式还具有传动平稳的特点。The driving device 1 is in transmission connection with the first synchronous wheel 51 or the second synchronous wheel 52 through the transmission belt 7 . Adopting the transmission mode of the transmission belt 7 can utilize the originally designed first synchronous wheel 51 or the second synchronous wheel 52 to simplify the structure of the device, and the transmission mode of the transmission belt also has the characteristics of stable transmission.
当然，本发明并不局限于上述实施方式，熟悉本领域的技术人员在不违背本发明精神的前提下还可作出等同变形或替换，这些等同的变型或替换均包含在本申请权利要求所限定的范围内。Of course, the present invention is not limited to the above-mentioned embodiments. Those skilled in the art can also make equivalent modifications or replacements without departing from the spirit of the present invention. These equivalent modifications or replacements are all included in the claims of the present application. In the range.
Claims (6)
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109573615A (en) * | 2018-12-17 | 2019-04-05 | 惠科股份有限公司 | Conveying device, detection method thereof and conveying system |
| CN110456173A (en) * | 2019-08-09 | 2019-11-15 | 三峡大学 | A device for quickly measuring the strength and changes of high-voltage electric fields and magnetic fields |
Citations (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004026503A (en) * | 2002-05-08 | 2004-01-29 | Ito Denki Kk | Transfer device |
| CN201670558U (en) * | 2010-04-20 | 2010-12-15 | 中原特钢股份有限公司 | Roller way operation monitoring device |
| WO2010142029A1 (en) * | 2009-06-09 | 2010-12-16 | Tca Technologies Inc. | Systems and methods for monitoring rollers for conveyors |
| CN201695081U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Substrate delivery mechanism of horizontal vacuum coating machine |
| CN102005402A (en) * | 2009-08-28 | 2011-04-06 | 东京毅力科创株式会社 | Substrate transfer apparatus and substrate transfer method |
| CN201864773U (en) * | 2010-10-21 | 2011-06-15 | 湖南玉丰真空科学技术有限公司 | Slewing mechanism for vacuum continuous film-coating production line |
| CN102161429A (en) * | 2010-12-31 | 2011-08-24 | 聚光科技(杭州)股份有限公司 | On-line monitoring device and method of belt conveyor fault based on optical fiber technology |
| CN202038669U (en) * | 2011-03-31 | 2011-11-16 | 苏州凡特真空溅镀科技有限公司 | Conveying mechanism for vacuum sputtering workpieces |
| CN102328806A (en) * | 2011-05-30 | 2012-01-25 | 泰安力博机电科技有限公司 | Hydraulic controllable braking device |
| CN102328812A (en) * | 2011-05-30 | 2012-01-25 | 泰安力博机电科技有限公司 | Self-cooling controllable braking device |
| US20120048682A1 (en) * | 2010-08-31 | 2012-03-01 | Kazuo Itoh | Fault diagnosis method for roller conveyor, roller conveyor, and controller for conveyor |
| WO2012057680A1 (en) * | 2010-10-25 | 2012-05-03 | Eistec Ab | Roller for a belt transporter comprising sensors for monitoring the condition of the roller |
| CN102442534A (en) * | 2010-10-13 | 2012-05-09 | 施耐德电器工业公司 | Detection device for conveyor |
| CN202323004U (en) * | 2011-11-15 | 2012-07-11 | 承德新新机电设备制造有限公司 | Substrate frame transmission device on vertical vacuum continuous coating production line |
| CN102897535A (en) * | 2012-10-17 | 2013-01-30 | 深圳市华星光电技术有限公司 | Substrate-conveying system and substrate positioner |
| CN103112700A (en) * | 2013-01-17 | 2013-05-22 | 辽宁科技大学 | Long-distance belt conveyor roller fault detecting device |
| CN104213094A (en) * | 2013-06-04 | 2014-12-17 | 金弼 | Vacuum coating device |
| CN104444050A (en) * | 2014-11-10 | 2015-03-25 | 芜湖真空科技有限公司 | Conveying unit and transmission |
| CN104512702A (en) * | 2013-09-26 | 2015-04-15 | 大福自动化洁净设备公司 | Roller driving unit and roller conveying device having the same |
| CN204705198U (en) * | 2015-06-03 | 2015-10-14 | 苏州汇科机电设备有限公司 | The fire grate drives structure that a kind of chain can conveniently overhaul |
| CN204847154U (en) * | 2015-07-30 | 2015-12-09 | 于远华 | Belt conveyor with soft starting drive |
| CN105189318A (en) * | 2013-04-30 | 2015-12-23 | 伊东电机株式会社 | Roller conveyor device, controller, and mechanical device abnormality detection method |
| WO2016019431A1 (en) * | 2014-08-04 | 2016-02-11 | Ezifix Mining Solutions Pty Ltd | Conveyor roller monitoring apparatus, system and method |
| CN205471354U (en) * | 2016-02-16 | 2016-08-17 | 重庆市欧华陶瓷有限责任公司 | Roller fracture alarm device in roll table transfer chain |
| CN107235288A (en) * | 2017-06-01 | 2017-10-10 | 昆山国显光电有限公司 | A kind of roll-type transporting device |
| CN206750740U (en) * | 2017-03-30 | 2017-12-15 | 镇江北新建材有限公司 | A kind of live-roller gear of plaster tablet drying machine |
| CN107521900A (en) * | 2017-08-07 | 2017-12-29 | 武汉华星光电技术有限公司 | A kind of transmission system with pressure sensitive |
| CN207275515U (en) * | 2017-09-26 | 2018-04-27 | 江苏微导纳米装备科技有限公司 | A kind of high-temperature vacuum cavity transmission mechanism |
| CN208683674U (en) * | 2018-07-17 | 2019-04-02 | 中山瑞科新能源有限公司 | A vacuum equipment drive roller with online monitoring function |
-
2018
- 2018-07-17 CN CN201810782250.3A patent/CN108996106A/en active Pending
Patent Citations (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004026503A (en) * | 2002-05-08 | 2004-01-29 | Ito Denki Kk | Transfer device |
| WO2010142029A1 (en) * | 2009-06-09 | 2010-12-16 | Tca Technologies Inc. | Systems and methods for monitoring rollers for conveyors |
| CN102005402A (en) * | 2009-08-28 | 2011-04-06 | 东京毅力科创株式会社 | Substrate transfer apparatus and substrate transfer method |
| CN201670558U (en) * | 2010-04-20 | 2010-12-15 | 中原特钢股份有限公司 | Roller way operation monitoring device |
| CN201695081U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Substrate delivery mechanism of horizontal vacuum coating machine |
| US20120048682A1 (en) * | 2010-08-31 | 2012-03-01 | Kazuo Itoh | Fault diagnosis method for roller conveyor, roller conveyor, and controller for conveyor |
| CN102442534A (en) * | 2010-10-13 | 2012-05-09 | 施耐德电器工业公司 | Detection device for conveyor |
| CN201864773U (en) * | 2010-10-21 | 2011-06-15 | 湖南玉丰真空科学技术有限公司 | Slewing mechanism for vacuum continuous film-coating production line |
| WO2012057680A1 (en) * | 2010-10-25 | 2012-05-03 | Eistec Ab | Roller for a belt transporter comprising sensors for monitoring the condition of the roller |
| CN102161429A (en) * | 2010-12-31 | 2011-08-24 | 聚光科技(杭州)股份有限公司 | On-line monitoring device and method of belt conveyor fault based on optical fiber technology |
| CN202038669U (en) * | 2011-03-31 | 2011-11-16 | 苏州凡特真空溅镀科技有限公司 | Conveying mechanism for vacuum sputtering workpieces |
| CN102328812A (en) * | 2011-05-30 | 2012-01-25 | 泰安力博机电科技有限公司 | Self-cooling controllable braking device |
| CN102328806A (en) * | 2011-05-30 | 2012-01-25 | 泰安力博机电科技有限公司 | Hydraulic controllable braking device |
| CN202323004U (en) * | 2011-11-15 | 2012-07-11 | 承德新新机电设备制造有限公司 | Substrate frame transmission device on vertical vacuum continuous coating production line |
| CN102897535A (en) * | 2012-10-17 | 2013-01-30 | 深圳市华星光电技术有限公司 | Substrate-conveying system and substrate positioner |
| CN103112700A (en) * | 2013-01-17 | 2013-05-22 | 辽宁科技大学 | Long-distance belt conveyor roller fault detecting device |
| CN105189318A (en) * | 2013-04-30 | 2015-12-23 | 伊东电机株式会社 | Roller conveyor device, controller, and mechanical device abnormality detection method |
| CN104213094A (en) * | 2013-06-04 | 2014-12-17 | 金弼 | Vacuum coating device |
| CN104512702A (en) * | 2013-09-26 | 2015-04-15 | 大福自动化洁净设备公司 | Roller driving unit and roller conveying device having the same |
| WO2016019431A1 (en) * | 2014-08-04 | 2016-02-11 | Ezifix Mining Solutions Pty Ltd | Conveyor roller monitoring apparatus, system and method |
| CN104444050A (en) * | 2014-11-10 | 2015-03-25 | 芜湖真空科技有限公司 | Conveying unit and transmission |
| CN204705198U (en) * | 2015-06-03 | 2015-10-14 | 苏州汇科机电设备有限公司 | The fire grate drives structure that a kind of chain can conveniently overhaul |
| CN204847154U (en) * | 2015-07-30 | 2015-12-09 | 于远华 | Belt conveyor with soft starting drive |
| CN205471354U (en) * | 2016-02-16 | 2016-08-17 | 重庆市欧华陶瓷有限责任公司 | Roller fracture alarm device in roll table transfer chain |
| CN206750740U (en) * | 2017-03-30 | 2017-12-15 | 镇江北新建材有限公司 | A kind of live-roller gear of plaster tablet drying machine |
| CN107235288A (en) * | 2017-06-01 | 2017-10-10 | 昆山国显光电有限公司 | A kind of roll-type transporting device |
| CN107521900A (en) * | 2017-08-07 | 2017-12-29 | 武汉华星光电技术有限公司 | A kind of transmission system with pressure sensitive |
| CN207275515U (en) * | 2017-09-26 | 2018-04-27 | 江苏微导纳米装备科技有限公司 | A kind of high-temperature vacuum cavity transmission mechanism |
| CN208683674U (en) * | 2018-07-17 | 2019-04-02 | 中山瑞科新能源有限公司 | A vacuum equipment drive roller with online monitoring function |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109573615A (en) * | 2018-12-17 | 2019-04-05 | 惠科股份有限公司 | Conveying device, detection method thereof and conveying system |
| CN110456173A (en) * | 2019-08-09 | 2019-11-15 | 三峡大学 | A device for quickly measuring the strength and changes of high-voltage electric fields and magnetic fields |
| CN110456173B (en) * | 2019-08-09 | 2022-01-25 | 三峡大学 | Device for rapidly measuring strength and change of high-voltage electric field and magnetic field |
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