CN108995395A - The preparation method and equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure - Google Patents
The preparation method and equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure Download PDFInfo
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- CN108995395A CN108995395A CN201810952902.3A CN201810952902A CN108995395A CN 108995395 A CN108995395 A CN 108995395A CN 201810952902 A CN201810952902 A CN 201810952902A CN 108995395 A CN108995395 A CN 108995395A
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- 238000007639 printing Methods 0.000 title claims abstract description 124
- 239000007921 spray Substances 0.000 title claims abstract description 10
- 238000002360 preparation method Methods 0.000 title abstract description 4
- 230000007246 mechanism Effects 0.000 claims abstract description 62
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 58
- 238000005530 etching Methods 0.000 claims abstract description 12
- 238000004544 sputter deposition Methods 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 22
- 230000008569 process Effects 0.000 claims description 10
- 238000005468 ion implantation Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 5
- 239000007943 implant Substances 0.000 claims 1
- 230000011218 segmentation Effects 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 3
- 239000002086 nanomaterial Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000002082 metal nanoparticle Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000010023 transfer printing Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
- B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0041—Digital printing on surfaces other than ordinary paper
- B41M5/0047—Digital printing on surfaces other than ordinary paper by ink-jet printing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M7/00—After-treatment of prints, e.g. heating, irradiating, setting of the ink, protection of the printed stock
- B41M7/009—After-treatment of prints, e.g. heating, irradiating, setting of the ink, protection of the printed stock using thermal means, e.g. infrared radiation, heat
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Abstract
Description
技术领域technical field
本发明涉及电流体动力学喷印技术领域，尤其涉及一种电流体动力学喷印图案三维柔性结构的制备设备及方法。The invention relates to the technical field of electrohydrodynamic jet printing, in particular to a preparation device and method for a three-dimensional flexible structure of electrohydrodynamic jet printing patterns.
背景技术Background technique
电流体动力学喷印技术是在基板和喷嘴之间施加电压，在诱导电场力作用下，喷印溶液中的电荷在液体表面聚集，电荷间的库仑力导致液体表面产生切向应力，在该切向应力的作用下，液体在喷嘴顶端形成锥形液面，通常称为泰勒锥，随着电场强度增加，当电场力克服液体表面张力时，在泰勒锥的顶端产生射流或液滴，能够喷印阵列图形、微图案和薄膜等图形。电流体动力学喷印技术是制造微纳米结构及器件的一种新型技术。The electrohydrodynamic jet printing technology is to apply a voltage between the substrate and the nozzle. Under the action of the induced electric field force, the charges in the jet printing solution accumulate on the surface of the liquid, and the Coulomb force between the charges causes a tangential stress on the liquid surface. Under the action of tangential stress, the liquid forms a conical liquid surface at the top of the nozzle, which is usually called a Taylor cone. As the electric field strength increases, when the electric field force overcomes the surface tension of the liquid, a jet or droplet is generated at the top of the Taylor cone, which can Print graphics such as array graphics, micropatterns and films. Electrohydrodynamic jet printing technology is a new technology for manufacturing micro-nano structures and devices.
微纳米结构及器件一般是三维结构形状，例如柔性电子器件，为了提高其延展性，柔性电子器件以及电极之间互连线制备成波浪形、波纹管形、螺旋形等形状，以便提高柔性电子的延展率，主要采用转印技术进行制备三维结构器件，这种方法存在工艺复杂、制造成本高等问题。电流体动力学喷印技术具有设备简单、可使用材料广、无需掩模、直接成形、成本低、效率高等优点，尤其适用于聚合物和金属纳米颗粒等溶液材料的图案喷印，目前该技术主要用于喷印平面形状的图形，因此，限制了电流体动力学喷印技术在三维结构微纳米结构及器件制备中的应用。Micro-nano structures and devices are generally three-dimensional structural shapes, such as flexible electronic devices. In order to improve their ductility, flexible electronic devices and interconnection lines between electrodes are prepared in shapes such as waves, bellows, and spirals to improve the flexibility of flexible electronics. The elongation rate is mainly used to prepare three-dimensional structure devices by transfer printing technology. This method has problems such as complicated process and high manufacturing cost. The electrohydrodynamic jet printing technology has the advantages of simple equipment, wide range of materials, no need for masks, direct forming, low cost, and high efficiency. It is especially suitable for pattern printing of solution materials such as polymers and metal nanoparticles. It is mainly used to print graphics in planar shape, so it limits the application of electrohydrodynamic jet printing technology in the preparation of three-dimensional micro-nano structures and devices.
发明内容Contents of the invention
本发明的目的在于，针对现有的电流体动力学喷印设备存在的缺点，提出一种电流体动力学喷印图案三维柔性结构的制备方法及设备。The object of the present invention is to propose a method and equipment for preparing a three-dimensional flexible structure of an electrohydrodynamic jet printing pattern in view of the shortcomings of the existing electrohydrodynamic jet printing equipment.
为实现上述目的，本发明提供一种电流体动力学喷印图案三维柔性结构的制备方法，In order to achieve the above object, the present invention provides a method for preparing a three-dimensional flexible structure of an electrohydrodynamic jet printing pattern,
1)将柔性基板平铺固定在电流体动力学喷印设备的喷印平台上；1) Tiling and fixing the flexible substrate on the printing platform of the electrohydrodynamic printing equipment;
2)将喷印溶液装入喷印系统中，根据预喷印图案的宽度，设定电流体动力学喷印的工艺参数；2) Put the printing solution into the printing system, and set the process parameters of electrohydrodynamic printing according to the width of the pre-printing pattern;
3)通过电流体动力学喷印系统移动喷印平台，并将喷印机构的喷嘴定位到柔性基板的喷印的起始位置，开始进行预喷印图案的喷印，同时喷印平台对喷印图案进行加热固化；3) Move the printing platform through the electrohydrodynamic printing system, and position the nozzle of the printing mechanism to the starting position of the printing on the flexible substrate, start printing the pre-printing pattern, and at the same time, the printing platform The printed pattern is heated and cured;
4)喷印结束，并且加热喷印图案处于半固化状态时，通过夹持机构夹持柔性基板的一端并向垂直方向移动，使柔性基板处于垂直状态，柔性基板一端由夹持机构固定，另一端处于自由状态；4) When the printing is finished and the heated spray printing pattern is in a semi-cured state, one end of the flexible substrate is clamped by the clamping mechanism and moved in the vertical direction, so that the flexible substrate is in a vertical state, one end of the flexible substrate is fixed by the clamping mechanism, and the other end is fixed by the clamping mechanism. One end is free;
5)根据预制备的三维结构形状，将柔性基板从固定端向自由端方向，分成若干段，根据预制备的三维结构形状要求，分成的若干个相等或不等的长度；5) According to the pre-prepared three-dimensional structural shape, divide the flexible substrate into several sections from the fixed end to the free end direction, and divide into several equal or unequal lengths according to the pre-prepared three-dimensional structural shape requirements;
6)聚焦离子束设备固定装置在柔性基板平面内的水平方向和竖直方向两个方向移动，并且聚焦离子束设备对着柔性基板的背面；6) The focusing ion beam device fixing device moves in both horizontal and vertical directions within the plane of the flexible substrate, and the focused ion beam device faces the back of the flexible substrate;
7)根据预制备的三维结构形状，设置聚焦离子束设备的工艺参数，根据柔性基板分成若干段数设置聚焦离子束应力引入的刻蚀次数；7) According to the shape of the pre-prepared three-dimensional structure, set the process parameters of the focused ion beam equipment, and set the number of etching times introduced by the focused ion beam stress according to the number of segments that the flexible substrate is divided into;
8)从柔性基板的自由端向固定端方向，聚焦离子束设备按照预先设定的路径，按照柔性基板分成若干段数的局部区域，分别进行局部刻蚀，使离子轰击基板表面时，离子注入和溅射同时发生，离子注入会引入张应力，溅射会引入压应力，局部刻蚀的顺序，根据预制备的三维结构形状，使喷印平面图案的柔性基板发生变形，形成不同形状的三维结构。8) From the free end of the flexible substrate to the fixed end, the focused ion beam equipment is divided into several local areas according to the preset path according to the flexible substrate, and performs local etching respectively, so that when ions bombard the surface of the substrate, ion implantation and Sputtering occurs at the same time, ion implantation will introduce tensile stress, sputtering will introduce compressive stress, the sequence of local etching, according to the shape of the pre-prepared three-dimensional structure, deform the flexible substrate printed with planar patterns, and form three-dimensional structures of different shapes .
聚焦离子束设备的工艺参数包括聚焦离子束的注入剂量、聚焦离子束与喷印图案平面扫描倾斜的角度、聚焦离子束喷头与喷印图案平面的间距。The process parameters of the focused ion beam equipment include the implantation dose of the focused ion beam, the tilt angle between the focused ion beam and the printing pattern plane, and the distance between the focused ion beam nozzle and the printing pattern plane.
步骤8)中可按照柔性基板分段的顺序依次进行，也可按照任意顺序进行局部刻蚀。Step 8) may be performed sequentially in the order of the flexible substrate segments, or may be partially etched in any order.
一种基于上述电流体动力学喷印图案三维柔性结构的制备方法的设备，其包括机架，所述机架上设有承载平台；A device based on the above-mentioned method for preparing a three-dimensional flexible structure of electrohydrodynamic jet printing patterns, which includes a frame, and the frame is provided with a bearing platform;
喷印模块，所述喷印模块通过水平横梁设置在承载平台上方，且其设有用于喷印的喷印机构，用于喷印到柔性基板上形成喷印图案；A jet printing module, the jet printing module is arranged above the carrying platform through a horizontal beam, and it is provided with a jet printing mechanism for jet printing, which is used for jet printing onto a flexible substrate to form a jet printing pattern;
喷印平台，所述喷印平台可X向运动设置在承载平台上；a printing platform, the printing platform can be moved in the X direction and set on the carrying platform;
聚焦离子束设备固定装置，设置在喷印平台机构上端，且所述聚焦离子束设备固定装置包括设置在喷印平台上的底板，所述底板相邻两边分别设有用于夹持柔性基板的夹持机构和用于使得聚焦离子束可扫描柔性基板后侧的移动机构。The focusing ion beam equipment fixing device is arranged on the upper end of the printing platform mechanism, and the focusing ion beam equipment fixing device includes a bottom plate arranged on the printing platform, and the adjacent two sides of the bottom plate are respectively provided with clamps for clamping the flexible substrate A holding mechanism and a moving mechanism for enabling the focused ion beam to scan the backside of the flexible substrate.
所述喷印模块包括固定底座以及沿垂直方向设置的喷印机构，所述喷印机构包括固定座、设置在固定座上可拆卸的注射器，在所述固定座的上端设置可沿垂直方向滑移的操作机构，所述注射器的柱塞部件与所述操作机构联动配合。The printing module includes a fixed base and a printing mechanism arranged in the vertical direction, the printing mechanism includes a fixed seat, a detachable syringe arranged on the fixed seat, and the upper end of the fixed seat is arranged to slide along the vertical direction. An operating mechanism that moves, and the plunger part of the syringe cooperates with the operating mechanism.
所述夹持机构包括设置在底板一侧的第一导轨座、与第一导轨座构成滑移配合的第一滑块以及设置在第一滑块上的夹持组件，所述夹持组件可Z向运动设置在所述第一滑块上。The clamping mechanism includes a first guide rail seat arranged on one side of the bottom plate, a first slider that is slidingly fitted with the first guide rail seat, and a clamping assembly arranged on the first slider. The clamping assembly can Z-direction movement is provided on the first slider.
所述夹持组件包括沿Z轴方向设置在第一滑块上的移动轴、与移动轴构成滑移配合的移动夹具以及用于驱动移动夹具沿Z轴方向运动的丝杆传动机构。The clamping assembly includes a moving shaft arranged on the first slider along the Z-axis direction, a moving clamp that is in sliding fit with the moving shaft, and a screw drive mechanism for driving the moving clamp to move along the Z-axis direction.
所述移动机构包括设置在底板一侧的第二导轨座、与第二导轨座构成滑移配合的第二滑块以及设置在第二滑块上的聚焦离子束设备夹持组件，所述聚焦离子束设备夹持组件可Z向运动设置在所述第二滑块上。The moving mechanism includes a second guide rail seat arranged on one side of the bottom plate, a second slider that is in sliding fit with the second guide rail seat, and a focused ion beam equipment clamping assembly arranged on the second slider. The clamping assembly of the ion beam equipment is movable in the Z direction and arranged on the second slider.
所述聚焦离子束设备夹持组件包括沿Z轴方向设置在第二滑块上的滑移架、与滑移架构成滑移配合的夹持件以及用于驱动夹持件沿Z轴方向运动的丝杆传动机构。The clamping assembly of the focused ion beam equipment includes a sliding frame arranged on the second slider along the Z-axis direction, a clamping piece that forms a sliding fit with the sliding frame, and is used to drive the clamping piece to move along the Z-axis direction screw drive mechanism.
所述底板与喷印平台之间设有加热板。A heating plate is arranged between the bottom plate and the printing platform.
本发明的有益效果：通过电流体动力学喷印系统喷印平面图案，利用加热板对喷印的平面图案进行加热半固化，然后通过夹持机构对柔性基板进行夹持，夹持机构夹持柔性基板Z向运动，使柔性基板处于垂直状态，一端固定在夹持机构上，另一端呈现自由状态，聚焦离子束设备正对柔性基板背面，从柔性基板的自由端向固定端方向，聚焦离子束设备按照预先设定的路径进行局部刻蚀，离子轰击基板表面时，离子注入和溅射同时发生，离子注入会引入张应力，溅射会引入压应力，使喷印平面图案的柔性基板发生变形，形成波浪形、波纹管形、螺旋形、折线形、曲线形等不同形状的三维结构。Beneficial effects of the present invention: the plane pattern is printed by the electrohydrodynamic jet printing system, the printed plane pattern is heated and semi-cured by the heating plate, and then the flexible substrate is clamped by the clamping mechanism, and the clamping mechanism clamps The flexible substrate moves in the Z direction, so that the flexible substrate is in a vertical state, one end is fixed on the clamping mechanism, and the other end is in a free state. The focused ion beam equipment is facing the back of the flexible substrate, and focuses the ions from the free end of the flexible substrate to the fixed end. The beam equipment performs local etching according to a preset path. When ions bombard the surface of the substrate, ion implantation and sputtering occur simultaneously. Deformation to form three-dimensional structures of different shapes such as waves, bellows, spirals, broken lines, and curves.
附图说明Description of drawings
图1为本发明的逻辑示意图Fig. 1 is a logical schematic diagram of the present invention
图2为本发明的结构示意图。Fig. 2 is a structural schematic diagram of the present invention.
图3为本发明的喷印模块的结构示意图。Fig. 3 is a schematic structural diagram of the jet printing module of the present invention.
图4为本发明的聚焦离子束设备照射机构的结构示意图。Fig. 4 is a structural schematic diagram of the irradiation mechanism of the focused ion beam equipment of the present invention.
图5为本发明的夹持机构的结构示意图。Fig. 5 is a schematic structural view of the clamping mechanism of the present invention.
图6为本发明的聚焦离子束设备照射机构的结构示意图。Fig. 6 is a schematic structural diagram of the irradiation mechanism of the focused ion beam device of the present invention.
具体实施方式Detailed ways
下面针对附图对本发明的实施例作进一步说明：Embodiments of the present invention will be further described below with reference to the accompanying drawings:
本发明提供一种电流体动力学喷印图案三维柔性结构的制备方法，The invention provides a method for preparing a three-dimensional flexible structure of an electrohydrodynamic jet printing pattern,
1)将柔性基板平铺固定在电流体动力学喷印设备的喷印平台上；1) Tiling and fixing the flexible substrate on the printing platform of the electrohydrodynamic printing equipment;
2)将喷印溶液装入喷印系统中，根据预喷印图案的宽度，设定电流体动力学喷印的工艺参数，包括喷嘴的直径、施加的电压、喷射高度、喷印溶液的流量、喷印运动平台的移动速度；2) Put the printing solution into the printing system, and set the process parameters of electrohydrodynamic printing according to the width of the pre-printing pattern, including the diameter of the nozzle, the applied voltage, the spray height, and the flow rate of the printing solution , The moving speed of the printing motion platform;
3)通过电流体动力学喷印系统移动喷印平台，并将喷印机构的喷嘴定位到柔性基板的喷印的起始位置，开始进行预喷印图案的喷印，同时喷印平台对喷印图案进行加热固化；3) Move the printing platform through the electrohydrodynamic printing system, and position the nozzle of the printing mechanism to the starting position of the printing on the flexible substrate, start printing the pre-printing pattern, and at the same time, the printing platform The printed pattern is heated and cured;
4)喷印结束，并且加热喷印图案处于半固化状态时，通过夹持机构夹持柔性基板的一端并向垂直方向移动，使柔性基板处于垂直状态，柔性基板一端由夹持机构固定，另一端处于自由状态；4) When the printing is finished and the heated spray printing pattern is in a semi-cured state, one end of the flexible substrate is clamped by the clamping mechanism and moved in the vertical direction, so that the flexible substrate is in a vertical state, one end of the flexible substrate is fixed by the clamping mechanism, and the other end is fixed by the clamping mechanism. One end is free;
5)根据预制备的三维结构形状，将柔性基板从固定端向自由端方向，分成若干段，根据预制备的三维结构形状要求，分成的若干个相等或不等的长度；5) According to the pre-prepared three-dimensional structural shape, divide the flexible substrate into several sections from the fixed end to the free end direction, and divide into several equal or unequal lengths according to the pre-prepared three-dimensional structural shape requirements;
6)聚焦离子束设备固定装置在柔性基板平面内的水平方向和竖直方向两个方向移动，并且聚焦离子束设备对着柔性基板的背面；6) The focusing ion beam device fixing device moves in both horizontal and vertical directions within the plane of the flexible substrate, and the focused ion beam device faces the back of the flexible substrate;
7)根据预制备的三维结构形状，设置聚焦离子束设备的工艺参数，聚焦离子束设备的工艺参数包括聚焦离子束的注入剂量、聚焦离子束与喷印图案平面扫描倾斜的角度、聚焦离子束喷头与喷印图案平面的间距，根据柔性基板分成若干段数设置聚焦离子束应力引入的刻蚀次数；7) According to the pre-prepared three-dimensional structure shape, set the process parameters of the focused ion beam equipment. The process parameters of the focused ion beam equipment include the implantation dose of the focused ion beam, the angle of the focused ion beam and the plane scanning inclination of the printed pattern, the focused ion beam The distance between the nozzle and the printing pattern plane is set according to the number of segments the flexible substrate is divided into, and the number of etching times introduced by the focused ion beam stress is set;
8)从柔性基板的自由端向固定端方向，聚焦离子束设备按照预先设定的路径，按照柔性基板分成若干段数的局部区域，分别进行局部刻蚀，使离子轰击基板表面时，离子注入和溅射同时发生，离子注入会引入张应力，溅射会引入压应力，局部刻蚀的顺序，根据预制备的三维结构形状，可按照柔性基板分段的顺序依次进行，也可按照任意顺序进行局部刻蚀，使喷印平面图案的柔性基板发生变形，形成波浪形、波纹管形、螺旋形、折线形、曲线形等不同形状的三维结构。8) From the free end of the flexible substrate to the fixed end, the focused ion beam equipment is divided into several local areas according to the preset path according to the flexible substrate, and performs local etching respectively, so that when ions bombard the surface of the substrate, ion implantation and Sputtering occurs at the same time, ion implantation will introduce tensile stress, sputtering will introduce compressive stress, the order of local etching, according to the shape of the pre-prepared three-dimensional structure, can be performed sequentially in the order of flexible substrate segments, or in any order Partial etching deforms the flexible substrate printed with planar patterns to form three-dimensional structures of different shapes such as waves, bellows, spirals, broken lines, and curves.
如图所示，本发明公开了一种基于上述电流体动力学喷印图案三维柔性结构的制备方法的设备，其包括机架，其包括机架1，所述机架1上设有承载平台；As shown in the figure, the present invention discloses a device based on the above-mentioned method for preparing a three-dimensional flexible structure of electrohydrodynamic jet printing pattern, which includes a frame, which includes a frame 1, and the frame 1 is provided with a bearing platform ;
喷印模块4，所述喷印模块通过水平横梁设置在承载平台上方，且其设有用于喷印的喷印机构，用于喷印到柔性基板上以进行图案打印，所述喷印模块通过Y轴滑道41设置在水平横梁上，而后再通过Z轴滑道42设置在Y轴滑道上，从而可对喷印机构的高度以及Y向距离进行调节；The jet printing module 4, the jet printing module is arranged above the carrying platform through a horizontal beam, and it is provided with a jet printing mechanism for jet printing, for jet printing onto a flexible substrate for pattern printing, and the jet printing module passes The Y-axis slide 41 is arranged on the horizontal beam, and then the Z-axis slide 42 is arranged on the Y-axis slide, so that the height and the Y-direction distance of the printing mechanism can be adjusted;
喷印平台2，所述喷印平台可X向运动设置在承载平台上，聚焦离子束设备照射机构设置在喷印平台机构上，可实现X向的运动；The printing platform 2, the printing platform can move in the X direction and is arranged on the carrying platform, and the irradiation mechanism of the focused ion beam equipment is arranged on the printing platform mechanism, which can realize the movement in the X direction;
聚焦离子束设备照射机构3，设置在喷印平台上端，且所述聚焦离子束设备照射机构包括设置在喷印平台上的底板，所述底板相邻两边分别设有用于夹持基板的夹持机构31和用于使得聚焦离子束设备可扫描基板后侧的聚焦离子束设备移动机构32。The focused ion beam equipment irradiation mechanism 3 is arranged on the upper end of the jet printing platform, and the focused ion beam equipment irradiation mechanism includes a bottom plate arranged on the jet printing platform, and the adjacent two sides of the bottom plate are respectively provided with clamps for clamping the substrate. A mechanism 31 and a focused ion beam device moving mechanism 32 for enabling the focused ion beam device to scan the rear side of the substrate.
在底板33与喷印平台之间设置加热板34，该加热板设置在柔性基板下方，可对所喷印的图案进行固化。A heating plate 34 is arranged between the bottom plate 33 and the printing platform, and the heating plate is arranged under the flexible substrate to cure the printed patterns.
所述喷印模块包括固定底座43以及沿垂直方向设置的喷印机构，所述喷印机构包括固定座45、设置在固定座上可拆卸的注射器44，在所述固定座的上端设置可沿垂直方向滑移的操作机构，所述注射器的柱塞部件与所述操作机构联动配合，所述操作机构采用卡槽结构，且所述操作机构可滑移设置在固定底座上，柱塞部件嵌设在该卡槽结构内，并被操作机构带动Z向运动。The printing module includes a fixed base 43 and a printing mechanism arranged in a vertical direction. The printing mechanism includes a fixed seat 45 and a detachable syringe 44 arranged on the fixed seat. An operating mechanism that slides in the vertical direction. The plunger part of the syringe cooperates with the operating mechanism. It is arranged in the slot structure and driven by the operating mechanism to move in the Z direction.
在喷印机构的两侧分别设置照射灯和工业相机，两个通过角度可调的支架固定设置在固定底座的两侧，通过调节两个支架的角度，可以实现不同角度的照明和摄像的需求。Illumination lights and industrial cameras are set on both sides of the printing mechanism, and two angle-adjustable brackets are fixed on both sides of the fixed base. By adjusting the angles of the two brackets, different angles of lighting and camera requirements can be realized. .
所述夹持机构31包括设置在底板一侧的第一导轨座311、与第一导轨座构成滑移配合的第一滑块312以及设置在第一滑块上的夹持组件，所述夹持组件可Z向运动设置在所述第一滑块上。所述夹持组件包括沿Z轴方向设置在第一滑块上的移动轴314、与移动轴构成滑移配合的移动夹具313以及用于驱动移动夹具沿Z轴方向运动的丝杆传动机构，移动夹具后端则是与移动轴构成滑移配合的滑移端，其前端延伸形成夹持部。The clamping mechanism 31 includes a first guide rail seat 311 arranged on one side of the bottom plate, a first slider 312 that is in sliding fit with the first guide rail seat, and a clamping assembly arranged on the first slider. The holding assembly is movable in the Z direction and is arranged on the first slider. The clamping assembly includes a moving shaft 314 arranged on the first slider along the Z-axis direction, a moving fixture 313 that is in sliding fit with the moving shaft, and a screw drive mechanism for driving the moving fixture to move along the Z-axis direction, The rear end of the moving fixture is a sliding end that forms a sliding fit with the moving shaft, and its front end extends to form a clamping portion.
所述聚焦离子束设备移动机构包括设置在底板一侧的第二导轨座321、与第二导轨座321构成滑移配合的第二滑块322以及设置在第二滑块322上的聚焦离子束设备器夹持组件，所述聚焦离子束设备器夹持组件可Z向运动设置在所述第二滑块上。所述聚焦离子束设备夹持组件包括沿Z轴方向设置在第二滑块上的滑移架、与滑移架构成滑移配合的夹持件323以及用于驱动夹持件沿Z轴方向运动的丝杆传动机构，所述夹持件用于夹持聚焦离子束设备器5。The moving mechanism of the focused ion beam equipment includes a second guide rail seat 321 arranged on one side of the bottom plate, a second slider 322 that is in sliding fit with the second guide rail seat 321 , and a focused ion beam set on the second slider 322 . An equipment clamping assembly, the focused ion beam equipment clamping assembly is movable in the Z direction and arranged on the second slider. The clamping assembly of the focused ion beam equipment includes a sliding frame arranged on the second slide block along the Z-axis direction, a clamping piece 323 that forms a sliding fit with the sliding frame, and a clamping piece 323 for driving the clamping piece along the Z-axis direction. A moving screw drive mechanism, the clamping member is used to clamp the focused ion beam device 5 .
当聚焦离子束设备移动机构X向运动时，则夹持机构Y向运动，两者的运动方向垂直设置。When the moving mechanism of the focused ion beam equipment moves in the X direction, the clamping mechanism moves in the Y direction, and the moving directions of the two are vertically arranged.
实施例不应视为对本发明的限制，但任何基于本发明的精神所作的改进，都应在本发明的保护范围之内。The embodiments should not be regarded as limiting the present invention, but any improvement based on the spirit of the present invention should be within the protection scope of the present invention.
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