CN108994549B - A kind of manufacturing process of vacuum chamber - Google Patents
A kind of manufacturing process of vacuum chamber Download PDFInfo
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- CN108994549B CN108994549B CN201811141048.9A CN201811141048A CN108994549B CN 108994549 B CN108994549 B CN 108994549B CN 201811141048 A CN201811141048 A CN 201811141048A CN 108994549 B CN108994549 B CN 108994549B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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Abstract
This application discloses a kind of manufacturing process of vacuum chamber, comprising: selected material is pressed design size cutting stock, obtains the plate welding part with punch structure, wherein when to the punching blanking, punching is unilateral to reserve scheduled machining allowance；The plate welding part is subjected to pre-welding, obtains cavity prefabrication；Weld defect detection is carried out to the cavity prefabrication；If it is detected that weld defect, polishing repair welding is carried out to detecting qualification to the fault location of the cavity prefabrication；The cavity prefabrication qualified to the detection carries out whole weldering, obtains the cavity product of the vacuum chamber.The application, which reserves unilateral machining allowance appropriate to punching in advance, ensure that the machining accuracy of punch center, increases weld seam detection and finds weld defect and advanced processing in advance, improves the qualification rate of vacuum cavity manufacture.
Description
Technical field
This application involves manufacture fields, and in particular to a kind of vacuum cavity manufacturing process.
Background technique
When manufacturing vacuum chamber, the method for processing flange on vacuum chamber is first to process punching by drawing on substrate
Hole, then will be on flange welding to the punching of substrate corresponding with aperture.Whether the flange of postwelding is relative to benchmark in parallel or in hole
Whether the heart deviates, and is the biggish technical matters of difficulty.Prior art manufactures vacuum chamber manufacturing procedure are as follows: blanking-
Veneer welding-group weldering-shaping-machining-sandblasting-polishing-cleaning-leak rate detection-dimension control-packaging.Existing manufacturing procedure
It has following defects that
(1) group welder's sequence is completed and after shaping, and it is serious usually to find that the center of flange hole occurs when being machined out
Offset, hole center offset reach 2-4mm, have already appeared lack part at hole position and can not further machine.It saves
Mode can only be that progress built-up welding, this built-up welding are likely to occur the wind of layering, cracking in the subsequent use process at " misrun "
Danger, directly affects the function of cavity leakproofness.
(2) vacuum side weld part leak source when carrying out leak rate detection with helium mass analyzer is more, needs to do over again, does over again and be related to
Multiple processes such as repair welding, shaping, sandblasting again, cause the process-cycle longer and manufacturing cost increases.
(3) after the completion of group weldering, the small parts such as stud, fixed block that veneer is completed when welding also are easy to happen dislocation, deviate
Amount reaches 2-3mm, can not carry out the installation of thermal insulation board in cavity in assembling process, need all to slice off stud and weld again,
It takes time and effort, influences the duration.
Therefore, it is necessary to which the manufacturing process to vacuum chamber optimizes, to solve drawbacks described above.
Summary of the invention
The application provides a kind of manufacturing process of vacuum chamber, greatly can not with solving existing manufacturing process punching position offset
It repairs, leak source is more when leak rate detects and the position offset of the mounting portions such as stud is big and the problem that causes rework rate big.
The application provides a kind of manufacturing process of vacuum chamber, comprising:
Selected material is pressed into design size cutting stock, obtains the plate welding part with punch structure, wherein to described
When punching blanking, punching is unilateral to reserve scheduled machining allowance；
The plate welding part is subjected to pre-welding, obtains cavity prefabrication；
Weld defect detection is carried out to the cavity prefabrication；If it is detected that weld defect, to the cavity prefabrication
Fault location carry out polishing repair welding to detecting qualification；
The cavity prefabrication qualified to the detection carries out whole weldering, obtains the cavity product of the vacuum chamber.
When optionally, to the punching blanking, the unilateral machining allowance reserved of the punching is not less than 5mm.
It is optionally, described that weld defect detection is carried out to the cavity prefabrication, comprising:
Shape correction is carried out to the cavity prefabrication；
Using detection means, weld defect detection is carried out to the inlet side of the cavity prefabrication after the shaping.
Optionally, the weld defect detection includes Liquid penetrant testing, X-ray detection, ultrasound detection, Magnetic testing and TOFD
At least one of detection.
Optionally, before the cavity prefabrication qualified to the detection carries out whole weldering, further includes: to the detection
The qualified cavity prefabrication is machined out.
Optionally, the cavity prefabrication qualified to the detection carries out whole weldering, comprising:
Positioning and punching on selected substrate obtain substrate punching hole location tooling group corresponding with welding workpiece hole location
Part；
Obtain fixing tool；
According to design requirement, butt-joint is carried out to the welding workpiece on the fixing tool.
Optionally, the butt-joint includes:
Welding machine, which is met and discussed, clamps the welding workpiece, it is described meet and discuss it is corresponding with the substrate punching hole location, wherein the punching
Pore size be equal to the diameter met and discussed of welding machine, and it is described meet and discuss perpendicular to the cavity portion for needing to weld the welding workpiece,
Butt-welding machine is opened butt-joint movement and is welded.
Optionally, the substrate includes at least one of stainless steel plate, aluminium sheet and iron plate metal material；The Welder
Part includes stud and/or fixed block.
Optionally, the manufacturing process further include: the cavity product is polished, is cleaned, leak rate detection and packaging,
Ultimately form vacuum chamber.
Optionally, the selected material includes stainless steel steel and/or alloy material；The vacuum chamber is that vacuum degree is low
In 1.333 × 10-6~1.333 × 10-1The vacuum chamber of Pa.
Compared with prior art, the application has the following advantages:
This application discloses a kind of manufacturing process of vacuum chamber, comprising: selected material is pressed into design size cutting stock,
Obtain the plate welding part with punch structure, wherein when to the punching blanking, punching is unilateral to be reserved more than scheduled processing
Amount；The plate welding part is subjected to pre-welding, obtains cavity prefabrication；Weld defect inspection is carried out to the cavity prefabrication
It surveys；If it is detected that weld defect, polishing repair welding is carried out to detecting qualification to the fault location of the cavity prefabrication；To the inspection
It surveys qualified cavity prefabrication and carries out whole weldering, obtain the cavity product of the vacuum chamber.The application is reserved to punching in advance suitable
When unilateral machining allowance ensure that the machining accuracy of punch center, increase weld seam detection and find weld defect in advance and locate in advance
Reason improves the qualification rate of vacuum cavity manufacture.
It is welded in addition, the small parts such as stud, fixed block are placed on after the final shaping product by the application, and makes weldering
Tooling is connect, the precision of welding position is improved.
Detailed description of the invention
Fig. 1 is the whole manufacturing process flow schematic diagrames for the vacuum chamber that the embodiment of the present application 1 provides.
Fig. 2 is the heating cavity flange hole fabrication drawing schematic diagram of the vacuum cavity of the embodiment of the present application 1.
Fig. 3 is the heating cavity sterogram of the vacuum cavity of the embodiment of the present application 1.
Fig. 4 is that the vacuum chamber that the embodiment of the present application 2 provides is partly improved manufacturing process flow schematic diagram.
Specific embodiment
It is with reference to the accompanying drawing and specific real in order to be more clearly understood that the above objects, features, and advantages of the application
Mode is applied the application is further described in detail.It should be noted that in the absence of conflict, the implementation of the application
Feature in example and embodiment can be combined with each other.
Many details are explained in the following description in order to fully understand the application.But the application can be with
Much it is different from other way described herein to implement, those skilled in the art can be without prejudice to present specification intension
In the case of do similar popularization, therefore the application is not limited by following public specific implementation.Below by way of specific embodiment
The manufacturing process improved method of vacuum chamber provided by the present application is described in detail and is illustrated.
The embodiment of the present application is described in further detail below in conjunction with attached drawing.
This application provides a kind of manufacturing process of vacuum chamber, including vacuum degree to be lower than 1.333 × 10-6~1.333 ×
10-1Pa high-vacuum chamber.
The application is lower than 1.333 × 10 with a kind of vacuum degree-6~1.333 × 10-1The copper indium gallium selenium solar cell of Pa
(CIGS) it is illustrated for the manufacturing process of vacuum chamber.
CIGS vacuum cavity shares 13 cavitys, including stock shelf, heating chamber (HM), process cavity (PM), cooling chamber (CM)
And discharge rack (US) etc., when CIGS vacuum cavity works, inside cavity is in high vacuum in negative pressure and pressure, and vacuum degree is lower than
1.333×10-6~1.333 × 10-1Pa。
Embodiment 1
Embodiment 1 is illustrated by taking the heating cavity (HM) of CIGS vacuum cavity as an example.HM selects high pressure resistant stainless steel steel
Material manufactures vacuum chamber, the national standard S30408 stainless steel that HM selects with a thickness of 25-30mm hot rolling or cold rolling in the present embodiment
Plate.For being equally suitable for the selection of HM for the high pressure resistant stainless steel steel and alloy material of vacuum chamber using other,
Herein with no restrictions.
As shown in Figure 1, it is whole manufacturing process flow schematic diagrames of CIGS vacuum chamber provided by the embodiments of the present application.
Embodiment 1 provides a kind of entire manufacturing process of CIGS vacuum chamber, and detailed process is as follows:
(1) blanking.
Selected material is pressed into design size cutting stock, obtains the veneer weldment with punch structure.This cutting mode
It can be generalized to the punching that all diameters on vacuum chamber are greater than 16mm (comprising 16mm).Punching of the diameter less than 16mm needs
Punching processing is carried out on lathe.
As shown in figure 3, it is the heating cavity HM sterogram of 1 vacuum cavity of the embodiment of the present application, wherein marked in Fig. 3
Be three kinds in heating cavity different dimensions flange hole KF16, KF40 and DN250.It is processed in the cavity of high vacuum
Cheng Zhong, once hole Centre position deviation, will appear lack part in hole a part and can not further machine, to the above problem
The mode for the redemption taken can only be lack part carry out built-up welding, and this built-up welding in the follow-up process there may be layering,
The risk of cracking, to directly affect cavity leakproofness.
In order to overcome influence caused by the technical process flange hole Centre position deviation such as above-mentioned welding, processing, under the application
Expect that technique is improved using following: the unilateral surplus stopped greater than 5mm of flange hole in blanking.The embodiment of the present application technology for blanking tool
Body is illustrated by taking the blanking of flange hole as an example.
In the prior art using flange hole blanking specific step is as follows description:
By 25-30mm hot rolling or cold rolling S30408 stainless steel plate according to KF16, KF40, DIN250 on cavity fabrication drawing
Flange hole is machined directly to drawing requirement size, as shown in Figure 2.Specially the flange hole of KF16 is directly processed into
Through-hole, the flange hole of KF40 is directly processed intoThrough-hole, the flange hole of DIN250 is directly processed intoThrough-hole.
The application improves on the basis of existing technology, and specific embodiment is as follows:
25mm hot rolling S30408 stainless steel plate is subjected to cutting stock with water jet according to the requirement of drawing.Specifically, will
The machining flange hole of KF16 atThrough-hole, the machining flange hole of KF40 atThrough-hole, the machining flange hole of DIN250 atThrough-hole, that is, will
The flange hole is unilateral to stop 5mm machining allowance.
(2) veneer welds.
Veneer welding refers to the welding that cooling water channel or reinforcing rib are carried out to the weldment after blanking.
(3) group weldering.
Group weldering is the process for carrying out assembled welding to each soldered veneer.The welding method of group weldering can use tungsten electrode
Inert gas-shielded arc welding (TIG weldering) or metal argon arc welding (MIG weldering).The present embodiment is illustrated so that TIG is welded as an example.
In group welder's sequence, usually when pressure vessel of the operating pressure greater than 0.1MPa welds, container and relevant connection
Member Welding majority all uses two-sided welding；And for some containers, pipe fitting diameter and the small structure in space, using two-sided welding
It is more difficult to find welding position, therefore single-side welding double-side forming welding procedure can be used.Group welder's sequence in the present embodiment is with list
It is illustrated for the sequence welding of face welding.
Specific step is as follows for sequence welding:
The weldment after two pieces of blankings to be selected first, prepares double V-groove, 30 ° ± 2 ° of angle of bevel, groove face is straight,
Root face is 1mm, the smooth no deformation of weldment；Later with tools such as file, abrasive machine, wire brushes, groove two sides 20mm range is cleared up
The dirts such as interior iron rust, oxide skin, until exposing metallic luster；The weldment after blanking is finally fixed on weldering with rigid fixation
It connects on platform, specially selects or material identical with weldment material close and be better than the welding rod of weldment and welded, it must be through before weldering
150 DEG C~200 DEG C bake 1 hour, then according to the first welding position carry out sequence welding of default welding parameter butt-welding fitting.It needs
It is noted that after wanting to-be-welded pieces cooling, then next layer is welded, after welding, using the side of vibration after every one layer of welding
Welding stress is eliminated in formula destressing.For the requirement for reaching cavity throat depth, pre-welding can be welded twice or more；Welding terminates
Afterwards, scarfing cinder processing is carried out, it is final to obtain cavity prefabrication.
(4) shaping.
Since the cavity prefabrication after welding is easy to appear deformation, to prevent the cavity prefabrication deformation after welding, need
Cavity prefabrication after welding is subjected to shaping.
(5) weld seam detection.
Weld seam detection refers to using some corresponding detection methods, such as Liquid penetrant testing, X-ray detection, ultrasound detection, magnetic
The part that the detection methods detection face of weld defect such as powder detection, TOFD detection extends, the process to find weld defect in advance.
The application weld seam detection refer to it is shaped to cavity prefabrication after, it is prefabricated to the cavity after shaping using corresponding detection means
Product carry out weld defect detection.
In the present embodiment, illustrate by taking Liquid penetrant testing as an example, specific steps are as follows:
The spare part workpiece even application bleeding agent that will be crossed first with chemical cleaning, is put into 20 for the component for spraying bleeding agent later
DEG C isoperibol in permeate 2 hours；After 2 hours, with water temperature be 10~40 DEG C, water of the hydraulic pressure no more than 0.34MPa cleans
Bleeding agent on spare part workpiece；After washing, angle is used on the tested surface for the spare part workpiece that distance is 300~400mm
For 30~40 ° of spraying direction spray development agent, fluorescence detection is carried out after finally standing 50 minutes.
If there is weld defect in detection, using at grinder buffing to weld defect decoloration, weld seam is lacked later
It falls into place and carries out repair welding to PT detection qualification；If detection does not find weld defect, it is machined out process.
Weld defect is also possible to carry out before shaping is processed, and method and steps is completely the same with abovementioned steps, herein
It repeats no more.
(6) it machines.
Machining is machined, and machining mainly has manual processing and numerical control processing two major classes.Manual processing refers to
It is realized by mechanical equipments such as mechanic's manual operations milling machine, lathe, drilling machine and sawing machines and a variety of materials is processed
Method.Numerical control processing (CNC) refers to mechanic with numerical control device to process, these numerical control devices include in processing
The heart, turning milling center, Wire EDM equipment, screw chasing machine etc..Computerized Numerical Control processing technology mainly passes through programming and workpiece is existed
Position coordinates (X, Y, Z) in cartesian coordinate system are converted into program language, and the CNC controller of numerically-controlled machine tool passes through identification reconciliation
Program language is released to control the axis of numerically-controlled machine tool, removes material as required automatically, to obtain finishing workpiece.
(7) weldering eventually.
Weldering, which refers to, eventually carries out the process that the welding workpieces such as stud, fixed block are welded to the vacuum cavity after machining.
The application weld process eventually specifically includes the following steps:
Firstly, carrying out positioning and punching on selected substrate, tool component is obtained, wherein the pore size etc. of punching
In the diameter that welding machine is met and discussed；Fixing tool is obtained later；Finally according to design requirement, welding workpiece is carried out on fixing tool
Butt-joint.
The present embodiment illustrates by taking stud as an example: specifically, using welding tooling and stud butt-welding machine by stud welding to machine
On cavity wall after processing is completed；The stud includes M6-M10 stud, but is not limited to M6-M10 stud；Wherein, the welding
Tooling is a kind of welding auxiliary tool, it is substrate identical with cavity portion structure, the spiral shell of welding in need on this substrate
Column position punch.The present embodiment is illustrated by taking M6-M10 stud as an example, the specific steps are as follows:
1) punching positions: preparing one piece of plate thickness in advance is 1-10mm stainless steel plate or aluminium sheet, and the present embodiment uses 0.5-2mm
S30408 stainless steel plate.More specifically, inputting M6-M10 stud welding by the way of numerical control programming according to drawing size
Position determines punching position on the stainless steel plate or aluminium sheet；
2) it punching: centered on determining punching position, is rushed on S30408 stainless steel plate or aluminium sheet with laser cutting machine
Hole, punching size are equal to butt-welding machine and meet and discuss diameter, such as butt-welding machine diameter of meeting and discussing is 15mm, then punching hole diameter 15mm, after punching
Obtain tooling；
3) fixed: to be fixed to above-mentioned tooling clip or similar to the tool of clip the chamber for needing welding screw accordingly
Body portion；
4) butt-joint: clamping stud with meeting and discussing for butt-welding machine, corresponding with the punching hole location of tooling by meeting and discussing, and meet and discuss perpendicular to
Butt-joint welding screw is opened in the part of welding later.This ensure that stud welding position is accurate and skew does not occur, while really
Protect the smooth installation of the parts such as subsequent thermal insulation board.
(8) sandblasting.
Sandblasting refers to the process of percussion cleaning and roughening matrix surface using high speed sand flow.It is with compressed air
Material spray (copper ore, quartz sand, diamond dust, iron sand, SEMEN AMOMI LONGILIGULA) is ejected at a high speed to be treated by power, formation high velocity spray beam
Workpiece surface makes the appearance of the outer surface of workpiece surface or shape change, in sandblasting procedures, since abrasive material is to workpiece table
The impact and shear action in face make the surface of workpiece obtain certain cleannes and different roughness, while making workpiece surface
Mechanical performance improved, therefore improve the fatigue resistance of workpiece, increase its adhesive force between coating, extend
The durability of film is also beneficial to the levelling and decoration of coating.
(9) it polishes.
Polishing refers to the effect using mechanical, chemistry or electrochemistry, reduces workpiece surface roughness, bright with acquisition,
The processing method of flat surface.It is the modification carried out using polishing tool and abrasive grain or other polishing mediums to workpiece surface
Processing.
(10) it cleans.
Cleaning process refers to that workpiece is carried out soaking and washing by the lye using pH value between 7~9.
The detection of (11) leak rate.
Leak rate detection refers under prescribed conditions, uses the leak rate of defined test gas detection workpiece.
(12) size detection.
Size detection includes three-D, the detection means such as laser.
(13) it packs.
Embodiment 2
The embodiment of the present application 2 is the improvement carried out for above-mentioned 13 procedure process portion, and it is as shown in Figure 4 to improve technique.
S101: selected material is pressed into design size cutting stock, obtains the plate welding part with punch structure, wherein
When to punching blanking, punching is unilateral to reserve scheduled machining allowance.
The technology for blanking flow elements of blanking concrete technology in embodiment 1 are it is stated that details are not described herein again.When blanking
It is unilateral to punching to stop machining allowance, specifically, the machining allowance stopped not less than 5mm unilateral to punching when referring to blanking.
The flange hole is unilateral to stop the foundation not less than 5mm machining allowance are as follows: uses gas tungsten arc welding
(TIG weldering), in long 3000-4000mm, wide 1200-2000mm, thickness 25-30mm S30408 steel plate on continuously weld, when weldering is high
When for 3-5mm, length direction welds deformation quantity about between 2-4mm, and width direction welds deformation quantity between 1-3 mm, removes
The influence of welding deformation, length direction still have the machining allowance of 3-1mm, and width direction has 4-2mm machining allowance, to guarantee
The diameter of the flange holes such as KF16, KF40, DN250 center and punching.
S102: the plate welding part of acquisition is subjected to pre-welding, obtains cavity prefabrication.
Obtain the mode of cavity prefabrication in embodiment 1 assembly welding technique flow elements it is stated that no longer superfluous herein
It states.Sequence welding step part in the specific mode detailed in Example 1 for obtaining cavity prefabrication.
S103: weld defect detection is carried out to cavity prefabrication；If it is detected that weld defect, to cavity prefabrication
Fault location carries out polishing repair welding to detecting qualification.
Weld defect detection is carried out to cavity prefabrication to have said in the middle weld seam detection process flow part of embodiment 1
Bright, details are not described herein again.The Liquid penetrant testing part in weld defect detection detailed in Example 1 is specifically carried out to cavity prefabrication.
At present in the manufacturing process of vacuum chamber, group weldering after the completion of, machining start before no-welding-seam detect, cause
The punch centers such as KF16, KF40, DN250 have occurred seriously to deviate when being machined out, and the method for using built-up welding is remedied to obtain
Layer is insecure and unbearable high pressure；And using welding will cause weld seam there are gas punching, undercut, do not melt completely etc. it is scarce
Fall into, thus after the completion of group weldering, machining increase weld seam detection before starting to polish repair welding to zero defect to welding defect, reduce
Number of doing over again greatly improves leak rate and detects one-pass probability.
S104: whole weldering is carried out to the qualified cavity prefabrication of detection, obtains the cavity product of vacuum chamber.
Specifically, progress end weldering after the completion of machining, to the tiny components of stud, fixed block etc..Specific weldering eventually
Process is in the middle whole Welding flow elements of embodiment 1 it is stated that details are not described herein again.Increase eventually after the completion of machining
Welder's sequence, cavity without redeformation a possibility that, using the welding tooling of production, effectively prevent stud, fixed block after welding
Position occurs to shift, to guarantee the Fast Installation of subsequent thermal insulation board.
The technical solution of the present embodiment is by improving technique: in vacuum cavity processing technology, to flange hole list when blanking
While stopping machining allowance, prevent flange center's punching from shifting, solves the problems, such as punching existing defects；In the shaping of group postwelding
Increase Liquid penetrant testing between sandblasting, face of weld microdefect can be found in advance, pre-processed, exclude leak source, is subsequent
Leak rate detection is once by improving probability；Increase whole welder's sequence between machining and sandblasting, by the small material such as stud, fixed block
It is placed on final products sizing to be welded later, makes welding tooling, guarantee the position precision of stud etc..
Although the application is disclosed as above with preferred embodiment, it is not for limiting the application, any this field skill
Art personnel are not departing from spirit and scope, can make possible variation and modification, therefore the guarantor of the application
Shield range should be subject to the range that the claim of this application defined.
Claims (10)
1. a kind of manufacturing process of vacuum chamber characterized by comprising
Selected material is pressed into design size cutting stock, obtains the plate welding part with punch structure, wherein to the punching
When blanking, punching is unilateral to reserve scheduled machining allowance；
The plate welding part is subjected to pre-welding, obtains cavity prefabrication；
Weld defect detection is carried out to the cavity prefabrication；If it is detected that weld defect, lacks the cavity prefabrication
Sunken place carries out polishing repair welding to detecting qualification；
The cavity prefabrication qualified to the detection carries out whole weldering, obtains the cavity product of the vacuum chamber.
2. a kind of manufacturing process of vacuum chamber according to claim 1, which is characterized in that when to the punching blanking,
The unilateral machining allowance reserved of the punching is not less than 5mm.
3. a kind of manufacturing process of vacuum chamber according to claim 1, which is characterized in that described prefabricated to the cavity
Product carry out weld defect detection, comprising:
Shape correction is carried out to the cavity prefabrication；
Using detection means, weld defect detection is carried out to the inlet side of the cavity prefabrication after the shaping.
4. a kind of manufacturing process of vacuum chamber according to claim 1 or 3, which is characterized in that the weld defect inspection
Survey includes at least one of Liquid penetrant testing, X-ray detection, ultrasound detection, Magnetic testing and TOFD detection.
5. a kind of manufacturing process of vacuum chamber according to claim 4, which is characterized in that the detection qualification
The cavity prefabrication carries out before whole weldering, further includes: the cavity prefabrication qualified to the detection is machined out.
6. a kind of manufacturing process of vacuum chamber according to claim 5, which is characterized in that described qualified to the detection
The cavity prefabrication carry out whole weldering, comprising:
Positioning and punching on selected substrate obtain substrate punching hole location tool component corresponding with welding workpiece hole location；
Obtain fixing tool；
According to design requirement, butt-joint is carried out to the welding workpiece on the fixing tool.
7. a kind of manufacturing process of vacuum chamber according to claim 6, which is characterized in that the butt-joint includes:
Welding machine, which is met and discussed, clamps the welding workpiece, it is described meet and discuss it is corresponding with the substrate punching hole location, wherein the hole of the punching
Diameter size is equal to the diameter met and discussed of welding machine, and described meets and discusses perpendicular to the cavity portion for needing to weld the welding workpiece, butt-joint
Machine is opened butt-joint movement and is welded.
8. a kind of manufacturing process of vacuum chamber according to claim 6, which is characterized in that the substrate includes stainless steel
At least one of plate, aluminium sheet and iron plate metal material；The welding workpiece includes stud and/or fixed block.
9. a kind of manufacturing process of vacuum chamber according to claim 1, which is characterized in that the manufacturing process is also wrapped
Include: the cavity product is polished, is cleaned, leak rate detection and packaging, ultimately form vacuum chamber.
10. a kind of manufacturing process of vacuum chamber described in claim according to claim 1, which is characterized in that described selected
Material includes alloy material；The vacuum chamber is that vacuum degree is lower than 1.333 × 10-6~1.333 × 10-1The vacuum chamber of Pa.
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| CN109746544A (en) * | 2019-03-19 | 2019-05-14 | 江阴市光科光电精密设备有限公司 | A kind of welding procedure of ultrahigh vacuum stainless steel chamber |
| CN109877583B (en) * | 2019-03-21 | 2020-11-06 | 江苏申阳电梯部件有限公司 | Intelligent manufacturing system and method for escalator driving main shaft |
| CN110102964B (en) * | 2019-03-26 | 2021-03-09 | 光科真空科技(泰兴)有限公司 | Cavity processing technology of optical component anti-reflection coating equipment |
| CN113334032B (en) * | 2021-06-09 | 2022-06-03 | 深圳市精创科技有限公司 | Processing technology and processing system of circuit fixing plate |
| CN116133225B (en) * | 2022-09-08 | 2023-08-04 | 中国科学院近代物理研究所 | Method for making ultra-thin-walled metal-lined vacuum chamber |
| CN117009790A (en) * | 2023-09-28 | 2023-11-07 | 潍柴动力股份有限公司 | Casting processing control method, device, equipment and storage medium |
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