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CN108982061B - Automated point source transmittance stray light test system and method - Google Patents

Automated point source transmittance stray light test system and method Download PDF

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CN108982061B
CN108982061B CN201810603452.7A CN201810603452A CN108982061B CN 108982061 B CN108982061 B CN 108982061B CN 201810603452 A CN201810603452 A CN 201810603452A CN 108982061 B CN108982061 B CN 108982061B
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computer
point source
detection system
optical
stray light
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CN108982061A (en
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汪洪源
刘祥
康文
颜志强
王秉文
郭雨桐
武少冲
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Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology Shenzhen
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    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract

自动化点源透过率杂散光测试系统及方法,涉及杂散光测试技术领域,为了解决采用手动操作测试系统测量点源透过率,测量精度低、效率低的问题。脉冲激光器出射的激光经光束整形器整形后入射至平行光管,激光经平行光管准直后入射至旋转台上的待测光学系统;第一探测系统位于待测光学系统的入瞳处,且固定在平移机构上;第二探测系统位于待测光学系统的焦面处,且位于旋转台上;第一探测系统和第二探测系统均用于测量辐照度,信号采集系统采集测量结果并将测量结果发送给计算机;计算机用于接收测量结果并计算点源透过率,还用于控制平移机构、旋转台和信号采集系统实现点源透过率的自动化测量。本发明适用于测试点源透过率。

Figure 201810603452

The automatic point source transmittance stray light testing system and method relate to the technical field of stray light testing, in order to solve the problems of low measurement accuracy and low efficiency by using a manual operation testing system to measure point source transmittance. The laser light emitted by the pulsed laser is shaped by the beam shaper and then incident on the collimator. The laser is collimated by the collimator and then incident on the optical system to be measured on the rotating stage; the first detection system is located at the entrance pupil of the optical system to be measured. and fixed on the translation mechanism; the second detection system is located at the focal plane of the optical system to be measured, and is located on the rotating table; the first detection system and the second detection system are both used to measure the irradiance, and the signal acquisition system collects the measurement results The measurement results are sent to the computer; the computer is used to receive the measurement results and calculate the point source transmittance, and is also used to control the translation mechanism, the rotary table and the signal acquisition system to realize the automatic measurement of the point source transmittance. The present invention is suitable for testing point source transmittance.

Figure 201810603452

Description

Automatic point source transmittance stray light testing system and method
Technical Field
The invention relates to the technical field of stray light testing.
Background
Stray light refers to a non-imaging light beam that reaches the image plane of the optical system, forming background noise on the detection element. The existence of stray light affects the imaging quality of the optical system, reduces the contrast of a target, and can cause the optical system to be incapable of working normally in severe cases.
The reasons for the stray light of the optical system are complicated, and are related to not only the manufacturing process and the materials, but also the diffraction phenomenon, the target characteristics and the background special effect. At present, two main methods for measuring stray light are black spot method and point source method. The black spot method device is difficult to realize and has low accuracy. The point source method has high precision and accords with the development trend of space optical technology.
The point source method generally uses point source transmittance to evaluate the stray light suppression level of the system. The Point Source Transmission (PST) is defined as: irradiance E generated on a focal plane after a light source with an off-axis angle theta outside a field of view of an optical system passes through the optical systemd(theta, lambda) and irradiance E incident at the entrance pupil of the optical systemi(θ, λ) ratio.
The existing test system mostly adopts manual operation to measure the point source transmittance at different off-axis angles in the test process, and excessive human intervention influences the measurement precision to a certain extent, so that the existing test system is difficult to measure the system with high precision and high efficiency.
Disclosure of Invention
The invention aims to solve the problems of low measurement precision and low efficiency of measuring the point source transmittance by adopting a manual operation test system, thereby providing an automatic point source transmittance stray light test system and method.
The automatic point source transmittance stray light testing system comprises a pulse laser 1, a beam shaper 2, a collimator 3, a first detection system 4, a translation mechanism 5, a rotating table 6, a second detection system 7, a signal acquisition system 8, a computer 9 and a darkroom 10;
laser emitted by the pulse laser 1 is incident to the collimator 3 after being shaped by the beam shaper 2, and the laser is incident to the optical system to be measured 11 on the rotating platform 6 after being collimated by the collimator 3;
the first detection system 4 is positioned at the entrance pupil of the optical system to be detected 11 and is fixed on the translation mechanism 5; the second detection system 7 is positioned at the focal plane of the optical system to be detected 11 and is positioned on the rotating platform 6; the first detection system 4 and the second detection system 7 are used for measuring irradiance, and the signal acquisition system 8 is used for acquiring a measurement result and sending the measurement result to the computer 9;
the computer 9 is used for receiving the measurement result and calculating the point source transmittance; the device is also used for controlling the translation mechanism 5, the rotary table 6 and the signal acquisition system 8 to realize automatic measurement of the point source transmittance;
the first detection system 4, the translation mechanism 5, the rotating platform 6, the second detection system 7, the signal acquisition system 8 and the optical system to be detected 11 are all positioned in the darkroom 10.
Preferably, the optical attenuator further comprises a first optical attenuator and a second optical attenuator;
laser emitted by the collimator 3 is incident to the first detection system 4 after passing through the first optical attenuation device, and the first optical attenuation device is fixedly connected with the first detection system 4; stray light emitted by the optical system to be detected 11 enters the second detection system 7 through the second optical attenuation device, and the second optical attenuation device is fixedly connected with the second detection system 7.
Preferably, the attenuation factor of the second optical attenuation means is variable.
Preferably, the computer controls the translation mechanism 5, the rotary table 6 and the signal acquisition system 8 to realize the automatic measurement of the point source transmittance, which specifically comprises:
a user sets a measurement mode on an interface of the computer 9, when the measurement mode is an entrance illuminance measurement mode, the computer 9 controls the translation mechanism 5 to place the first detection system 4 at the entrance pupil of the optical system to be measured 11, the optical system to be measured 11 measures irradiance at the entrance pupil, and the computer 9 also controls the signal acquisition system 8 to acquire a measurement result; when the measurement mode is the focal plane illumination measurement mode, the computer 9 controls the translation mechanism 5 to move the first detection system 4 away until the laser emitted by the collimator 3 is not blocked, the computer 9 also controls the rotating table 6 to rotate, the second detection system 7 measures the irradiance at the focal plane, and the computer 9 controls the signal acquisition system 8 to acquire the measurement result.
Preferably, the computer 9 controls the rotation table 6 to start rotating from the maximum off-axis angle.
Preferably, the second optical attenuator is in a non-transmissive mode when the entrance illuminance measurement mode and the focal plane illuminance measurement mode are switched.
Preferably, the attenuation factor of the second optical attenuation device is initially at a maximum level, and the computer 9 controls the attenuation factor of the second optical attenuation device to gradually decrease until the measurement result acquired by the signal acquisition system 8 reaches a threshold value.
The invention discloses an automatic point source transmittance stray light testing method, which comprises the following steps:
step one, turning on a pulse laser 1, and waiting for the pulse laser 1 to be stable;
positioning the optical system 11 to be measured to enable the parallel light emitted by the collimator 3 to fill the inlet of the optical system 11 to be measured and enable the center of the optical system 11 to be measured to be located at the rotating center of the rotating table 6;
thirdly, the first detection system 4 measures the irradiance at the entrance pupil of the optical system to be measured 11, and the signal acquisition system 8 acquires the measurement result;
step four, the computer 9 controls the translation mechanism 5 to move away the first detection system 4 until the laser emitted by the collimator 3 is not blocked;
step five, the computer 9 controls the attenuation times of the second optical attenuation device to be initialized to the maximum level;
step six, the computer 9 controls the rotating platform 6 to rotate to the maximum off-axis angle;
step seven, the second detection system 7 measures the irradiance at the focal plane, and the signal acquisition system 8 acquires the measurement result;
step eight, the computer 9 judges whether the measurement result acquired by the signal acquisition system 8 reaches a threshold value, if so, the computer 9 records the measurement result, otherwise, the computer 9 controls the attenuation multiple of the second optical attenuation device to reduce by one grade and returns to the step seven;
step nine, the computer 9 controls the rotating platform 6 to rotate to the next off-axis angle according to the set rule;
step ten, repeating the step seven to the step nine, and calculating the point source transmittance under different off-axis angles by the computer 9 according to the measurement result;
and eleventh, drawing a point source transmittance curve under different off-axis angles, and evaluating the stray light suppression capability of the optical system 11 to be tested according to the curve.
Preferably, the setting rule in step nine is specifically: the rotating platform 6 starts to rotate from the maximum positive off-axis angle, gradually reduces the off-axis angle according to the set step length until the minimum positive off-axis angle is reached, then starts to rotate from the maximum negative off-axis angle, and gradually reduces the off-axis angle according to the set step length until the minimum negative off-axis angle is reached.
The invention integrates the translation mechanism, the rotating platform and the signal acquisition system of the mechanical part of the point source transmittance stray light test system into software, thereby realizing the computer automatic measurement of the point source transmittance stray light test system. The invention reduces the human intervention in the measuring process, reduces the operation difficulty and realizes the high-speed and high-precision point source transmittance measurement.
Drawings
FIG. 1 is a schematic diagram of an automated point source transmittance stray light testing system according to one embodiment;
fig. 2 is a schematic block diagram of an automated measurement by computer control according to a first embodiment.
Detailed Description
The first embodiment is as follows: the automatic stray light testing system for the point source transmittance is specifically described with reference to fig. 1 and 2, and includes a pulse laser 1, a beam shaper 2, a collimator 3, a first detection system 4, a translation mechanism 5, a rotary table 6, a second detection system 7, a signal acquisition system 8, a computer 9, and a darkroom 10;
laser emitted by the pulse laser 1 is incident to the collimator 3 after being shaped by the beam shaper 2, and the laser is incident to the optical system to be measured 11 on the rotating platform 6 after being collimated by the collimator 3; the light beam is reflected, refracted, scattered or diffracted by elements and mechanical structures of the optical system 11 to be detected to reach the focal plane of the optical system 11 to be detected;
the first detection system 4 is positioned at the entrance pupil of the optical system to be detected 11 and is fixed on the translation mechanism 5; the second detection system 7 is positioned at the focal plane of the optical system to be detected 11 and is positioned on the rotating platform 6; the first detection system 4 and the second detection system 7 are used for measuring irradiance, and the signal acquisition system 8 is used for acquiring a measurement result and sending the measurement result to the computer 9;
the computer 9 is used for receiving the measurement result and calculating the point source transmittance; and the device is also used for controlling the translation mechanism 5, the rotating platform 6 and the signal acquisition system 8 to realize the automatic measurement of the point source transmittance. The rotating platform 6 drives the optical system 11 to be measured to rotate so as to realize stray light measurement at different off-axis angles.
In order to extend the dynamic range of the stray light test system, the test system further comprises a light attenuation device. A first optical attenuation device is arranged at the entrance pupil of the optical system to be detected 11 to protect the detection system; and a second optical attenuation device with variable attenuation times is placed at the focal plane, so that the dynamic range of the stray light test system is expanded.
The first detection system 4, the translation mechanism 5, the rotating table 6, the second detection system 7, the signal acquisition system 8, the optical system to be detected 11, the first optical attenuation device and the second optical attenuation device are all located in the darkroom 10. So as to reduce the influence of scattering of the inner wall of the environment on the measurement result.
The test system is provided with two sets of detection systems, wherein one set of detection system is positioned at the entrance pupil of the optical system 11 to be tested, the detection system at the entrance pupil is carried on the translation mechanism 5, and the detection system at the entrance pupil can be moved away by controlling the translation mechanism 5. The other set of detection system is located at the focal plane of the optical system to be detected 11, and the signal acquisition system 8 respectively acquires signals of the entrance pupil and the focal plane detection system.
For the asymmetric optical system 11 to be tested, the test system needs to have the function of measuring the transmittance of the point source corresponding to the positive and negative off-axis angles. In order to realize the measurement of the point source transmittance of the optical system with positive and negative off-axis angles, the detection system needs to be protected when the angle is close to the field angle, so that the second optical attenuation device at the focal plane is in a light-tight mode when the positive and negative off-axis angles are converted.
The control of the computer 9 comprises an entrance illumination measurement mode and a focal plane illumination measurement mode, the focal plane illumination measurement mode is divided into positive off-axis angle stray light measurement and negative off-axis angle stray light measurement, and a user only needs to set parameters such as an off-axis range and the number of collected data on a computer interface, so that the automatic measurement of the point source transmittance of the optical system to be measured 11 can be realized.
A user sets a measurement mode on an interface of the computer 9, when the measurement mode is an entrance illuminance measurement mode, the computer 9 controls the translation mechanism 5 to place the first detection system 4 at the entrance pupil of the optical system to be measured 11, the optical system to be measured 11 measures irradiance at the entrance pupil, and the computer 9 also controls the signal acquisition system 8 to acquire a measurement result; when the measurement mode is the focal plane illumination measurement mode, the computer 9 controls the translation mechanism 5 to move the first detection system 4 away until the laser emitted by the collimator 3 is not blocked, the computer 9 also controls the rotating table 6 to rotate, the second detection system 7 measures the irradiance at the focal plane, and the computer 9 controls the signal acquisition system 8 to acquire the measurement result.
The computer 9 controls the rotating platform 6 to rotate from the maximum off-axis angle to the small off-axis angle. The attenuation multiple of the second optical attenuation device is initially in a maximum level, i.e., a light-tight mode, and the computer 9 controls the attenuation multiple of the second optical attenuation device to gradually decrease until the measurement result acquired by the signal acquisition system 8 reaches a threshold value. The detection system is effectively protected.
The second embodiment is as follows: the automated stray light testing method for the point source transmittance described in the present embodiment is implemented based on the automated stray light testing system for the point source transmittance described in the first embodiment, and includes the following steps:
step one, turning on a pulse laser 1, and waiting for the pulse laser 1 to be stable;
positioning the optical system 11 to be measured to enable the parallel light emitted by the collimator 3 to fill the inlet of the optical system 11 to be measured and enable the center of the optical system 11 to be measured to be located at the rotating center of the rotating table 6;
thirdly, the first detection system 4 measures the irradiance at the entrance pupil of the optical system to be measured 11, and the signal acquisition system 8 acquires the measurement result;
step four, the computer 9 controls the translation mechanism 5 to move away the first detection system 4 until the laser emitted by the collimator 3 is not blocked;
step five, the computer 9 controls the attenuation times of the second optical attenuation device to be initialized to the maximum level;
step six, the computer 9 controls the rotating platform 6 to rotate to the maximum off-axis angle;
step seven, the second detection system 7 measures the irradiance at the focal plane, and the signal acquisition system 8 acquires the measurement result;
step eight, the computer 9 judges whether the measurement result acquired by the signal acquisition system 8 reaches a threshold value, if so, the computer 9 records the measurement result, otherwise, the computer 9 controls the attenuation multiple of the second optical attenuation device to reduce by one grade and returns to the step seven;
step nine, the computer 9 controls the rotating platform 6 to rotate to the next off-axis angle according to the set rule;
step ten, repeating the step seven to the step nine, and calculating the point source transmittance under different off-axis angles by the computer 9 according to the measurement result;
and eleventh, drawing a point source transmittance curve under different off-axis angles, and evaluating the stray light suppression capability of the optical system 11 to be tested according to the curve.
The setting rule in the ninth step is specifically as follows: the rotating platform 6 starts to rotate from the maximum positive off-axis angle, gradually reduces the off-axis angle according to the set step length until the minimum positive off-axis angle is reached, then starts to rotate from the maximum negative off-axis angle, and gradually reduces the off-axis angle according to the set step length until the minimum negative off-axis angle is reached.

Claims (7)

1.自动化点源透过率杂散光测试方法,其特征在于,该方法包括以下步骤:1. automated point source transmittance stray light test method, is characterized in that, the method comprises the following steps: 步骤一、打开脉冲激光器(1),等待脉冲激光器(1)稳定;Step 1. Turn on the pulsed laser (1) and wait for the pulsed laser (1) to stabilize; 步骤二、定位待测光学系统(11),使平行光管(3)出射的平行光充满待测光学系统(11)入口,并使得待测光学系统(11)的中心位于旋转台(6)的旋转中心;Step 2: Positioning the optical system (11) to be measured, so that the parallel light emitted by the collimator (3) fills the entrance of the optical system (11) to be measured, and the center of the optical system (11) to be measured is located on the rotating table (6) the center of rotation; 步骤三、第一探测系统(4)对待测光学系统(11)入瞳处的辐照度进行测量,信号采集系统(8)采集测量结果;Step 3: The first detection system (4) measures the irradiance at the entrance pupil of the optical system to be measured (11), and the signal acquisition system (8) collects the measurement results; 步骤四、计算机(9)控制平移机构(5)将第一探测系统(4)移开,直至不再阻挡平行光管(3)出射的激光;Step 4, the computer (9) controls the translation mechanism (5) to move the first detection system (4) away until the laser emitted by the collimator (3) is no longer blocked; 步骤五、计算机(9)控制第二光学衰减装置的衰减倍数初始化为最大等级;Step 5, the computer (9) controls the attenuation factor of the second optical attenuation device to be initialized to the maximum level; 步骤六、计算机(9)控制旋转台(6)转动到最大离轴角度;Step 6, the computer (9) controls the rotary table (6) to rotate to the maximum off-axis angle; 步骤七、第二探测系统(7)对焦面处的辐照度进行测量,信号采集系统(8)采集测量结果;Step 7: The second detection system (7) measures the irradiance at the focal plane, and the signal acquisition system (8) collects the measurement results; 步骤八、计算机(9)判断信号采集系统(8)采集的测量结果是否达到阈值,如果判断结果为是则计算机(9)记录测量结果,否则计算机(9)控制第二光学衰减装置的衰减倍数减小一个等级并返回步骤七;Step 8, the computer (9) judges whether the measurement result collected by the signal acquisition system (8) reaches the threshold value, if the judgment result is yes, the computer (9) records the measurement result, otherwise the computer (9) controls the attenuation factor of the second optical attenuation device Decrease one level and return to step seven; 步骤九、计算机(9)控制旋转台(6)按设定规则转动到下一个离轴角度;Step 9, the computer (9) controls the rotary table (6) to rotate to the next off-axis angle according to the set rule; 步骤十、重复步骤七至步骤九,计算机(9)根据测量结果计算不同离轴角度下的点源透过率;Step ten, repeating step seven to step nine, the computer (9) calculates the point source transmittance under different off-axis angles according to the measurement result; 步骤十一、绘制不同离轴角度下的点源透过率曲线,根据该曲线评价待测光学系统(11)的杂散光抑制能力;Step 11: Draw point source transmittance curves under different off-axis angles, and evaluate the stray light suppression capability of the optical system (11) under test according to the curve; 该方法基于自动化点源透过率杂散光测试系统实现;The method is implemented based on an automated point source transmittance stray light test system; 自动化点源透过率杂散光测试系统,包括脉冲激光器(1)、光束整形器(2)、平行光管(3)、第一探测系统(4)、平移机构(5)、旋转台(6)、第二探测系统(7)、信号采集系统(8)、计算机(9)和暗室(10);An automated point source transmittance stray light test system, comprising a pulsed laser (1), a beam shaper (2), a collimator (3), a first detection system (4), a translation mechanism (5), and a rotating stage (6) ), a second detection system (7), a signal acquisition system (8), a computer (9) and a dark room (10); 脉冲激光器(1)出射的激光经光束整形器(2)整形后入射至平行光管(3),激光经平行光管(3)准直后入射至旋转台(6)上的待测光学系统(11);The laser light emitted by the pulsed laser (1) is shaped by the beam shaper (2) and then incident on the collimator (3), and the laser is collimated by the collimator (3) and then incident on the optical system to be measured on the rotating table (6). (11); 第一探测系统(4)位于待测光学系统(11)的入瞳处,且固定在平移机构(5)上;第二探测系统(7)位于待测光学系统(11)的焦面处,且位于旋转台(6)上;第一探测系统(4)和第二探测系统(7)均用于测量辐照度,信号采集系统(8)采集测量结果并将测量结果发送给计算机(9);The first detection system (4) is located at the entrance pupil of the optical system to be measured (11), and is fixed on the translation mechanism (5); the second detection system (7) is located at the focal plane of the optical system to be measured (11), and is located on the rotary table (6); the first detection system (4) and the second detection system (7) are both used for measuring irradiance, and the signal acquisition system (8) collects the measurement results and sends the measurement results to the computer (9). ); 计算机(9),用于接收测量结果并计算点源透过率;还用于控制平移机构(5)、旋转台(6)和信号采集系统(8)实现点源透过率的自动化测量;A computer (9) is used to receive the measurement results and calculate the point source transmittance; it is also used to control the translation mechanism (5), the rotary table (6) and the signal acquisition system (8) to realize the automatic measurement of the point source transmittance; 第一探测系统(4)、平移机构(5)、旋转台(6)、第二探测系统(7)、信号采集系统(8)和待测光学系统(11)均位于暗室(10)内;The first detection system (4), the translation mechanism (5), the rotary table (6), the second detection system (7), the signal acquisition system (8) and the optical system to be measured (11) are all located in the dark room (10); 自动化点源透过率杂散光测试系统,还包括第一光学衰减装置和第二光学衰减装置;An automated point source transmittance stray light test system, further comprising a first optical attenuation device and a second optical attenuation device; 平行光管(3)出射的激光经第一光学衰减装置后入射至第一探测系统(4),第一光学衰减装置与第一探测系统(4)固定连接;待测光学系统(11)出射的杂散光经第二光学衰减装置入射至第二探测系统(7),第二光学衰减装置与第二探测系统(7)固定连接。The laser light emitted from the collimator (3) is incident on the first detection system (4) after passing through the first optical attenuation device, and the first optical attenuation device is fixedly connected to the first detection system (4); the optical system (11) to be tested emits The stray light is incident to the second detection system (7) through the second optical attenuation device, and the second optical attenuation device is fixedly connected to the second detection system (7). 2.根据权利要求1所述的自动化点源透过率杂散光测试方法,其特征在于,步骤九所述的设定规则具体为:旋转台(6)由正向最大离轴角度开始转起,按照设定的步幅逐渐减小离轴角度,直至达到正向最小离轴角度,再由反向最大离轴角度开始转起,按照设定的步幅逐渐减小离轴角度,直至达到反向最小离轴角度。2. The automatic point source transmittance stray light test method according to claim 1, wherein the setting rule described in step 9 is specifically: the rotary table (6) starts to rotate from the positive maximum off-axis angle , gradually reduce the off-axis angle according to the set step, until reaching the positive minimum off-axis angle, then start from the reverse maximum off-axis angle, and gradually reduce the off-axis angle according to the set step until reaching Reverse minimum off-axis angle. 3.根据权利要求1所述的自动化点源透过率杂散光测试方法,其特征在于,第二光学衰减装置的衰减倍数可变。3 . The automated point source transmittance stray light test method according to claim 1 , wherein the attenuation factor of the second optical attenuation device is variable. 4 . 4.根据权利要求3所述的自动化点源透过率杂散光测试方法,其特征在于,计算机控制平移机构(5)、旋转台(6)和信号采集系统(8)实现点源透过率的自动化测量,具体为:4. The automatic point source transmittance stray light test method according to claim 3, wherein the computer controls the translation mechanism (5), the rotary table (6) and the signal acquisition system (8) to realize the point source transmittance The automated measurement of , specifically: 用户在计算机(9)界面设定测量模式,当为入口照度测量模式时,计算机(9)控制平移机构(5)将第一探测系统(4)放置在待测光学系统(11)的入瞳处,待测光学系统(11)对入瞳处的辐照度进行测量,计算机(9)还控制信号采集系统(8)采集测量结果;当为焦面照度测量模式时,计算机(9)控制平移机构(5)将第一探测系统(4)移开,直至不再阻挡平行光管(3)出射的激光,计算机(9)还控制旋转台(6)转动,第二探测系统(7)对焦面处的辐照度进行测量,计算机(9)控制信号采集系统(8)采集测量结果。The user sets the measurement mode on the computer (9) interface, and when it is the entrance illuminance measurement mode, the computer (9) controls the translation mechanism (5) to place the first detection system (4) at the entrance pupil of the optical system (11) to be measured , the optical system (11) to be measured measures the irradiance at the entrance pupil, and the computer (9) also controls the signal acquisition system (8) to collect the measurement results; when it is in the focal plane illuminance measurement mode, the computer (9) controls The translation mechanism (5) moves the first detection system (4) away until the laser light emitted by the collimator (3) is no longer blocked, the computer (9) also controls the rotation of the rotary table (6), and the second detection system (7) The irradiance at the focal plane is measured, and the computer (9) controls the signal acquisition system (8) to collect the measurement results. 5.根据权利要求4所述的自动化点源透过率杂散光测试方法,其特征在于,计算机(9)控制旋转台(6)由最大离轴角度开始转起。5 . The automatic point source transmittance stray light test method according to claim 4 , wherein the computer ( 9 ) controls the turntable ( 6 ) to rotate from the maximum off-axis angle. 6 . 6.根据权利要求4所述的自动化点源透过率杂散光测试方法,其特征在于,入口照度测量模式与焦面照度测量模式相互转换时第二光学衰减装置为不透光模式。6 . The automated point source transmittance stray light test method according to claim 4 , wherein the second optical attenuation device is in an opaque mode when the entrance illuminance measurement mode and the focal plane illuminance measurement mode are mutually converted. 7 . 7.根据权利要求4所述的自动化点源透过率杂散光测试方法,其特征在于,第二光学衰减装置的衰减倍数初始为最大等级,计算机(9)控制第二光学衰减装置的衰减倍数逐渐减小,直至信号采集系统(8)采集的测量结果达到阈值。7. The automatic point source transmittance stray light test method according to claim 4, wherein the attenuation factor of the second optical attenuation device is initially a maximum level, and the computer (9) controls the attenuation factor of the second optical attenuation device. It gradually decreases until the measurement result collected by the signal collection system (8) reaches the threshold.
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