CN108965271A - A kind of SECS/GEM means of communication - Google Patents
A kind of SECS/GEM means of communication Download PDFInfo
- Publication number
- CN108965271A CN108965271A CN201810704782.5A CN201810704782A CN108965271A CN 108965271 A CN108965271 A CN 108965271A CN 201810704782 A CN201810704782 A CN 201810704782A CN 108965271 A CN108965271 A CN 108965271A
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- 230000006854 communication Effects 0.000 title claims abstract description 35
- 238000004891 communication Methods 0.000 title claims abstract description 34
- 238000013461 design Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- 238000012937 correction Methods 0.000 claims description 3
- 238000013480 data collection Methods 0.000 claims description 3
- 238000009472 formulation Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 2
- 238000011161 development Methods 0.000 abstract description 6
- 238000012546 transfer Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 230000006855 networking Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000003796 beauty Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L69/00—Network arrangements, protocols or services independent of the application payload and not provided for in the other groups of this subclass
- H04L69/26—Special purpose or proprietary protocols or architectures
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L12/00—Data switching networks
- H04L12/02—Details
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L69/00—Network arrangements, protocols or services independent of the application payload and not provided for in the other groups of this subclass
- H04L69/03—Protocol definition or specification
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- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Computer Security & Cryptography (AREA)
- Computing Systems (AREA)
- Programmable Controllers (AREA)
- Communication Control (AREA)
Abstract
The invention discloses a kind of SECS/GEM means of communication, including upper-level system and apparatus control system, and are directly communicated by SECS/GEM agreement；The core PLC of apparatus control system directly passes through SECS/GEM agreement and interacts with upper-level system progress facility information, the software of PLC is provided with user program parsing firmware, self-diagnostic program, user program, and there are also SECS/GEM protocol configuration program, SECS/GEM protocol program and SECS/GEM agreements to execute program.Embodiments of the present invention hardware cost, software cost are below the transfer framework of traditional industrial computer or dedicated transponders, this SECS/GEM means of communication based on programmable logic controller (PLC), its implementation apparatus structure is simple, communication delay is small, development difficulty is reduced, the development cycle is shortened.
Description
Technical field
The present invention relates to a kind of means of communication, specifically a kind of SECS/GEM means of communication.
Background technique
SECS/GEM is the universal communication agreement between semicon industry upper-level system and automation equipment, through this agreement
The instruction of unlatching or stopping can be assigned to equipment, change process parameter and selection formula.SECS/GEM protocol program is usual
It places on and is realized on situ industrial computer (PC), the role of transponder is played the part of in equipment networking function, this requires equipment bottom
Programmable logic controller (PLC) (PLC) design relevant functional interface and cooperated.The structure can allow automation equipment to take
PC is carried, is a kind of greatly waste for some simple equipment；On the other hand, control instruction, process parameter will pass through PC's
Transfer could be interacted with equipment control PLC, and communication efficiency is low, communication delay is high, and it is very high that initial stage imports cost, and be existed latent
Unstability, indirectly increase the complexity of equipment.
Chinese patent (CN201310505310.4) discloses a kind of SECS/GEM message switching equipment and method, to overcome
It carries out communicating bring defect problem between semiconductor automation equipment and upper-level system by EAP system in the prior art.It should
Invention has used the structure using transponder as core, to realize that the SECS/GEM between upper-level system and apparatus control system is logical
News.
Above-mentioned patent still falls within the SECS/GEM communication using transponder, cannot achieve upper-level system and apparatus control system
Between SECS/GEM Direct Communication.
With programmable logic controller (PLC) fast development, operational capability, processing speed, communication speed are all substantially mentioned
Height can match in excellence or beauty industrial computer in some specific occasions, have the hardware foundation of SECS/GEM communication.
Summary of the invention
The purpose of the present invention is to provide a kind of SECS/GEM means of communication, to solve mentioned above in the background art ask
Topic.
To achieve the above object, the invention provides the following technical scheme:
A kind of SECS/GEM means of communication, including upper-level system and apparatus control system, and directly pass through SECS/GEM agreement
It is communicated.
Further: the core PLC of apparatus control system directly passes through SECS/GEM agreement and upper-level system carries out equipment
Information exchange, the software of PLC are provided with user program parsing firmware, self-diagnostic program, user program, and there are also SECS/GEM agreements
Configurator, SECS/GEM protocol program and SECS/GEM agreement execute program.
Further: PLC hardware has high speed Ethernet interface, and firmware supports the data frame knot of customized Ethernet interface
Structure and content realize the communication of the SECS/GEM based on HSMS.
Further: upper-level system uses EAP or MES.
Further: SECS/GEM protocol configuration program is worked out in the form of user program, in user program initialization
It executes.
Further: SECS/GEM protocol program is worked out in the form of user program, with program block or subprogram
Mode tissue is mainly used for information coding when sending, or information decoding when reception；The program is according to SECS/GEM agreement
Design error correction.
Further: SECS/GEM agreement is executed program and is worked out in the form of user program, is mainly used for preparing to upper layer
The facility information that system is sent, and the decoded instruction of processing；The facility information sent to upper-level system includes: board state
Information, board diagnostic message, materials behavior, formula information, data collection, system error message；Handle decoded instruction packet
Include: equipment remotely controls, machine operations management, control of material, formulation management.
Compared with prior art, the beneficial effects of the present invention are: embodiments of the present invention hardware cost, software cost are equal
Lower than the transfer framework of traditional industrial computer or dedicated transponders, this SECS/GEM based on programmable logic controller (PLC) is logical
Communication method, implementation apparatus structure is simple, communication delay is small.This method is built upon mature and stable industrial programmable controller
On the basis of carry out secondary development, and ladder diagram can be used to carry out the exploitation of SECS/GEM communication function, this is undoubtedly reduced
Development difficulty shortens the development cycle.Invention can effectively reduce the threshold of equipment networking, puopulsion equipment is intelligentized build into
Journey, the upgrading of used equipment, new equipment design and manufacture in terms of have positive meaning.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of SECS/GEM means of communication；
In figure: 1- upper-level system, 2- apparatus control system.
Specific embodiment
Please refer to figure, in the embodiment of the present invention, a kind of SECS/GEM means of communication, including upper-level system 1 and equipment are controlled
System 2, and directly communicated by SECS/GEM agreement；In the communication structure, the core PLC of apparatus control system 2 is straight
Connected SECS/GEM agreement and upper-level system 1 and carry out facility information and interact, upper-level system 1 using EAP or MES or other lead to
Believe agreement, communication process is not necessarily to transponder, this can effectively avoid situ industrial computer or dedicated without situ industrial computer transfer
The risk that upper-level system can not work when transponder failure.
The software of PLC is other than user program parses firmware, self-diagnostic program, user program, and there are also SECS/GEM agreements
Configurator, SECS/GEM protocol program and SECS/GEM agreement execute program.The mutual cooperation of procedure above, can be real
It is existing: services and the function such as human-computer interaction, I/O logic processing, motion control, bus marco, SECS/GEM protocol.
PLC hardware has high speed Ethernet interface, and firmware supports the data frame structure and content of customized Ethernet interface,
It is easily achieved the SECS/GEM communication based on HSMS.
In order to realize structure, Electrical and Mechanical Engineer can be after PLC automation control program development, then carries out SECS/GEM communication
The exploitation of related service.Usually first carry out the programming of SECS/GEM protocol；Further according to Stream Function
Message and practical demand for control design SECS/GEM protocol configuration program；The automation control program of board is finally combined,
It designs SECS/GEM agreement and executes program.Ladder diagram can be used to be designed for the exploitation of SECS/GEM communication related service, electromechanical
Engineer can quickly go up hand.
Working principle: program mentioned below belongs to the program editing in programmable logic controller (PLC).The invention
Property use programmable logic controller (PLC), write SECS/GEM protocol configuration program, SECS/GEM protocol program and
SECS/GEM agreement executes program, interacts to realize with the facility information of upper-level system.
SECS/GEM protocol configuration program is worked out in the form of user program, is executed in user program initialization, mainly
IP, variable mappings needed for configuring SECS/GEM protocol etc..
SECS/GEM protocol program is worked out in the form of user program, the tissue in a manner of program block or subprogram,
Information decoding when being mainly used for information coding when sending, or receiving；The program is according to SECS/GEM Protocol Design error correction
Function further increases the reliability of communication.
SECS/GEM agreement is executed program and is worked out in the form of user program, is mainly used for preparing to upper-level system transmission
Facility information, and the decoded instruction of processing；The facility information sent to upper-level system includes: board status information, board
Diagnostic message, materials behavior, formula information, data collection, system error message etc.；Handling decoded instruction includes: equipment
Long-range control, machine operations management, control of material, formulation management etc..
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (7)
1. a kind of SECS/GEM means of communication, it is characterised in that: pass through including upper-level system and apparatus control system, and directly
SECS/GEM agreement is communicated.
2. a kind of SECS/GEM means of communication according to claim 1, it is characterised in that: the core of apparatus control system
PLC directly passes through SECS/GEM agreement and interacts with upper-level system progress facility information, and the software of PLC is provided with user program parsing
Firmware, self-diagnostic program, user program, there are also SECS/GEM protocol configuration program, SECS/GEM protocol program and SECS/
GEM agreement executes program.
3. a kind of SECS/GEM means of communication according to claim 1, it is characterised in that: PLC hardware has high speed ether
Network interface, firmware support the data frame structure and content of customized Ethernet interface, realize that the SECS/GEM's based on HSMS is logical
News.
4. a kind of SECS/GEM means of communication according to claim 1, it is characterised in that: upper-level system using EAP or
MES。
5. a kind of SECS/GEM means of communication according to claim 2, it is characterised in that: SECS/GEM protocol configuration program
It is worked out in the form of user program, is executed in user program initialization.
6. a kind of SECS/GEM means of communication according to claim 2, it is characterised in that: SECS/GEM protocol program
It is worked out in the form of user program, the tissue in a manner of program block or subprogram, is mainly used for information coding when sending, or
Information decoding when reception；The program is according to SECS/GEM Protocol Design error correction.
7. a kind of SECS/GEM means of communication according to claim 2, it is characterised in that: SECS/GEM agreement executes program
It is worked out in the form of user program, is mainly used for the facility information for preparing to send to upper-level system, and the decoded finger of processing
It enables；To upper-level system send facility information include: board status information, board diagnostic message, materials behavior, formula information,
Data collection, system error message；Handle it is decoded instruction include: equipment remotely control, machine operations management, material control
System, formulation management.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810704782.5A CN108965271A (en) | 2018-07-02 | 2018-07-02 | A kind of SECS/GEM means of communication |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810704782.5A CN108965271A (en) | 2018-07-02 | 2018-07-02 | A kind of SECS/GEM means of communication |
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| CN108965271A true CN108965271A (en) | 2018-12-07 |
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| CN201810704782.5A Pending CN108965271A (en) | 2018-07-02 | 2018-07-02 | A kind of SECS/GEM means of communication |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110995709A (en) * | 2019-12-05 | 2020-04-10 | 南京品微智能科技有限公司 | SECSGEM communication protocol conversion method |
| CN114281035A (en) * | 2021-12-03 | 2022-04-05 | 北京京仪自动化装备技术股份有限公司 | Production safety operation and maintenance monitoring and management system |
| CN116055523A (en) * | 2022-12-29 | 2023-05-02 | 西安奕斯伟材料科技有限公司 | Wafer factory communication method, system, electronic equipment and readable storage medium |
| CN117411763A (en) * | 2023-09-27 | 2024-01-16 | 深圳市网联通信技术有限公司 | An implementation method of SECS HSMS reader and writer based on semiconductor protocol |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1418332A (en) * | 2000-03-17 | 2003-05-14 | 迪吉多电子股份有限公司 | Control server, control terminal, control system, and recording medium storing control communication program |
| US20040118436A1 (en) * | 2002-12-21 | 2004-06-24 | Joyce James M. | Method and apparatus for thermal gas purging |
| TW200532408A (en) * | 2004-03-24 | 2005-10-01 | Charming Systems Corp | System and method for managing equipments |
| US7072985B1 (en) * | 2001-05-02 | 2006-07-04 | Mks Instruments, Inc. | Method and apparatus for two phase structured message to tagged message translation |
| CN101151865A (en) * | 2005-02-02 | 2008-03-26 | 阿西斯特技术公司 | Multi-protocol multi-client equipment server |
| CN101552794A (en) * | 2008-04-03 | 2009-10-07 | 沈阳中科博微自动化技术有限公司 | SECS Communication Method Based on SEMI Standard |
| CN102467467A (en) * | 2010-11-16 | 2012-05-23 | 财团法人工业技术研究院 | Message exchange device and message exchange method for communication standard of semiconductor equipment |
| CN103607340A (en) * | 2013-10-23 | 2014-02-26 | 上海华力微电子有限公司 | SECS/GEM message exchange equipment and SECS/GEM message exchange method |
| CN104519011A (en) * | 2013-09-27 | 2015-04-15 | 无锡华润微电子有限公司 | Semiconductor equipment management system, protocol conversion module thereof and semiconductor equipment management method |
| CN205353260U (en) * | 2015-11-30 | 2016-06-29 | 汕头超声印制板（二厂）有限公司 | Printed circuit board coil short -circuit detection device |
| CN107615444A (en) * | 2015-06-12 | 2018-01-19 | 富士机械制造株式会社 | Relay device and manufacturing system |
-
2018
- 2018-07-02 CN CN201810704782.5A patent/CN108965271A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1418332A (en) * | 2000-03-17 | 2003-05-14 | 迪吉多电子股份有限公司 | Control server, control terminal, control system, and recording medium storing control communication program |
| US7072985B1 (en) * | 2001-05-02 | 2006-07-04 | Mks Instruments, Inc. | Method and apparatus for two phase structured message to tagged message translation |
| US20040118436A1 (en) * | 2002-12-21 | 2004-06-24 | Joyce James M. | Method and apparatus for thermal gas purging |
| TW200532408A (en) * | 2004-03-24 | 2005-10-01 | Charming Systems Corp | System and method for managing equipments |
| CN101151865A (en) * | 2005-02-02 | 2008-03-26 | 阿西斯特技术公司 | Multi-protocol multi-client equipment server |
| CN101552794A (en) * | 2008-04-03 | 2009-10-07 | 沈阳中科博微自动化技术有限公司 | SECS Communication Method Based on SEMI Standard |
| CN102467467A (en) * | 2010-11-16 | 2012-05-23 | 财团法人工业技术研究院 | Message exchange device and message exchange method for communication standard of semiconductor equipment |
| CN104519011A (en) * | 2013-09-27 | 2015-04-15 | 无锡华润微电子有限公司 | Semiconductor equipment management system, protocol conversion module thereof and semiconductor equipment management method |
| CN103607340A (en) * | 2013-10-23 | 2014-02-26 | 上海华力微电子有限公司 | SECS/GEM message exchange equipment and SECS/GEM message exchange method |
| CN107615444A (en) * | 2015-06-12 | 2018-01-19 | 富士机械制造株式会社 | Relay device and manufacturing system |
| CN205353260U (en) * | 2015-11-30 | 2016-06-29 | 汕头超声印制板（二厂）有限公司 | Printed circuit board coil short -circuit detection device |
Non-Patent Citations (1)
| Title |
|---|
| 张鹏程等: "《SECS／GEM标准模型分析及应用》", 《电子设计工程》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110995709A (en) * | 2019-12-05 | 2020-04-10 | 南京品微智能科技有限公司 | SECSGEM communication protocol conversion method |
| CN114281035A (en) * | 2021-12-03 | 2022-04-05 | 北京京仪自动化装备技术股份有限公司 | Production safety operation and maintenance monitoring and management system |
| CN116055523A (en) * | 2022-12-29 | 2023-05-02 | 西安奕斯伟材料科技有限公司 | Wafer factory communication method, system, electronic equipment and readable storage medium |
| CN117411763A (en) * | 2023-09-27 | 2024-01-16 | 深圳市网联通信技术有限公司 | An implementation method of SECS HSMS reader and writer based on semiconductor protocol |
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