CN108947216A - A kind of sigmatron astronomical telescope deep camber ultra-thin mirror production method - Google Patents
A kind of sigmatron astronomical telescope deep camber ultra-thin mirror production method Download PDFInfo
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- CN108947216A CN108947216A CN201810672172.1A CN201810672172A CN108947216A CN 108947216 A CN108947216 A CN 108947216A CN 201810672172 A CN201810672172 A CN 201810672172A CN 108947216 A CN108947216 A CN 108947216A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/02—Re-forming glass sheets
- C03B23/023—Re-forming glass sheets by bending
- C03B23/03—Re-forming glass sheets by bending by press-bending between shaping moulds
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Abstract
本发明涉及一种高能X射线天文望远镜用大曲率超薄反射镜制作方法，该方法通过循环优化控制镜片应变点温度到最高热弯成形温度的升温时间、最高热弯成形温度以及最高热弯成形温度恒温时间，形成热弯成形温度曲线，基于所述热弯成形温度曲线，采用直接热弯成形法制作获得所述大曲率超薄反射镜，所述热弯成形温度曲线具体为：从实验室恒定温度T1开始升温，在时间t1内升温至镜片应变点温度T2，在T2温度下恒温一段时间t2；在时间t3内升温至镜片最高热弯成形温度T4，恒温一段时间t4；在时间t5内降温至退火点温度T3，最后自然降温，降温时间为t6。与现有技术相比，本发明具有面形精度高、操作简单、成品率高等优点。
The invention relates to a method for manufacturing a large-curvature ultra-thin reflector for a high-energy X-ray astronomical telescope. The method controls the heating time from the strain point temperature of the lens to the highest hot-bending forming temperature, the highest hot-bending forming temperature, and the highest hot-bending forming through cyclic optimization. The temperature is kept constant for a period of time to form a hot bending forming temperature curve. Based on the hot bending forming temperature curve, the direct hot bending forming method is used to manufacture the large curvature ultra-thin reflector. The hot bending forming temperature curve is specifically: from the laboratory The constant temperature T1 starts to heat up, and the temperature rises to the strain point temperature T2 of the lens within the time t1, and is kept at the temperature of T2 for a period of time t2; the temperature is raised to the highest bending forming temperature of the lens within the time t3 T4, and the temperature is kept for a period of t4; within the time t5 Cool down to the annealing point temperature T3, and finally cool down naturally, and the cooling time is t6. Compared with the prior art, the invention has the advantages of high surface shape precision, simple operation and high yield.
Description
Technical field
The present invention relates to x-ray imaging fields, ultra-thin more particularly, to a kind of sigmatron astronomical telescope deep camber
Reflecting mirror production method.
Background technique
X ray astronomy is the astronomy branch for studying celestial body X-ray radiation, and the photon energy range of observation object exists
Between 0.1~100keV, the X-ray of 0.1~10keV is usually known as grenz ray, 10~100keV is known as hard X ray.X is penetrated
Line telescope is the important observation instrument in x ray astronomy, due to the property of X-ray itself, can only be occurred in glancing incidence
Total reflection phenomenon.According to this phenomenon, the x-ray imaging telescope generallyd use at present is existed by Germany scientist Wolter
The Wolter-I type glancing incidence formula imaging telescope for the naming with him that nineteen fifty-two proposes.But in glancing incidence, X
The energy of ray is higher, and total external reflection critical angle is smaller, so the telescope light harvesting area very little of single group eyeglass.In order to effective
Ground increases telescope light harvesting area, and Van Speybroeck in 1972 proposes the scheme of multilayer nest, the mouth of every layer of telescope
Diameter is different, and the curvature of eyeglass used is different.Since the load space of satellite is limited, so under limited bore, it is expected that reflecting
Eyeglass gets over Bao Yuehao, and the radius of curvature of the reflecting mirror eyeglass of more internal layer is smaller, i.e., curvature is bigger.Simultaneously, it is contemplated that look in the distance
The imaging resolution of mirror also has higher requirement to the face form quality amount of reflecting mirror.
The production method of x-ray telescope reflecting optics mainly experienced for four generations in the world, at present mainly using heat
Curved glass replica method is divided into direct hot bending forming process, pressurized heat o ing method, indirect thermal o ing method and heat of mixing o ing
Method etc., they will respective advantage and disadvantage.Wherein, the principle of direct hot bending forming process is: ultra-thin glass planar sheets are placed on
In the convex molds of required face shape, in high-temperature heater, eyeglass Morphological Transitions are made by heating curve, and pass through constant temperature time
It being bent eyeglass under self gravitation effect and is attached to die surface, eyeglass working face (concave surface) replicates the face shape of convex molds,
Last re-annealing setting.Under the premise of telescope focal length determines, observation energy and the bore of telescope are inversely proportional, the energy of observation
Amount is higher, and the bore of eyeglass is smaller, i.e. the curvature of eyeglass is bigger.
In hot bending forming process, the successful setting of temperature curve is to determine the successful deciding factor of eyeglass hot bending.Heat
The temperature setting that highest point is heated during o ing is determined that is, glass material is in elastomeric state and glass by glass transition temperature
Change corresponding temperature between state, the eyeglass of stable shaping structure can be obtained under elastomeric state.Telescope is penetrated in the observation soft X of low energy
When line, energy range is 1keV to 10keV, and the small curvature eyeglass using diameter in 160mm or more carries out hot bending forming experiment,
In eyeglass thermoforming process, the temperature for heating highest point is slightly above knee pointy temperature.And with to higher energy space
Explore the demand of observation, energy range expands to 10keV to 40keV, for telescope diameter 80mm or so deep camber mirror
Piece production becomes of crucial importance, and existing temperature curve no longer meet demand.In order to increase the bending degree of eyeglass,
It needs further to increase highest point temperature, starts to generate obvious deformation under external force (self gravity) effect.Liter during this
The influence of warm rate and curring time to eyeglass is most important, will not be entered viscous because temperature is excessively high with guaranteeing glass material both
Fluidised form generates expendable serious deformation, and the increasing of eyeglass intermediate frequency surface error will not be caused because of the deviation of heating rate
Add.However above-mentioned requirements are also not achieved in existing method.Therefore in the production of deep camber eyeglass, new hot bending is needed to form work
Skill.
Summary of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide one kind to pass through optimization eyeglass
Two sections of important temperature control curves when hot bending shapes are used greatly to obtain the sigmatron astronomical telescope of good quality propagation rate eyeglass face shape
Curvature ultra-thin mirror production method.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of sigmatron astronomical telescope deep camber ultra-thin mirror production method, this method pass through loop optimization
Control eyeglass strain point temperature to the heating-up time of highest hot bending forming temperature, highest hot bending forming temperature and highest hot bending at
The shape thermostatic time forms hot bending forming temperature curve, is based on the hot bending forming temperature curve, is shaped using direct hot bending
Legal system is made to obtain the deep camber ultra-thin mirror.
Further, the hot bending forming temperature curve specifically:
From laboratory, steady temperature T1 is started to warm up, and eyeglass strain point temperature T2 is warming up in time t1, in T2 temperature
Lower constant temperature t2 for a period of time；It is warming up to eyeglass highest hot bending forming temperature T4 in time t3, constant temperature t4 for a period of time；In the time
Annealing point temperature T3, last Temperature fall, temperature fall time t6 are cooled in t5.
Further, the eyeglass highest hot bending forming temperature T4 is lower than eyeglass softening point temperature T5.
Further, it is tested using the deep camber ultra-thin mirror face shape that laser scanning methods obtain production,
Middle test result realizes the loop optimization.
Further, in the test, the laser irradiation that laser is launched is on cylinder to be measured, and subsequent light beam is by position
Detector receives, and the surface deviation situation of cylinder to be measured is obtained according to the variation of light-beam position, forms test result.
Further, the radius of curvature of the deep camber ultra-thin mirror is 35mm to 45mm.
Further, the X-ray energy range of the deep camber ultra-thin mirror is 10keV to 40keV.
Further, the thickness of the deep camber ultra-thin mirror is less than 0.5mm.
Compared with prior art, the invention has the following advantages:
1) present invention by reasonable set heat maximum temperature, heating rate and constant temperature time, make eyeglass hot bending at
It is preferably bonded with mold during shape, to obtain ideal face shape；
2) the method for the present invention can greatly improve the ultra-thin reflection of deep camber for sigmatron astronomical telescope observation
The surface figure accuracy of mirror eyeglass；
3) present invention is tested by shaping eyeglass face shape to hot bending, to optimize most important two in hot bending forming curve
Temperature control curve, it is easy to operate, it is not easy to make mistakes；
4) the hot bending forming deep camber eyeglass produced through the invention, high yield rate.
Detailed description of the invention
Fig. 1 is nested type class Wolter-I type telescope schematic diagram；
Fig. 2 is 0.25 ° -0.46 ° of grazing angle lower sigmatron telescope lens reflecting rate curve；
Fig. 3 is that eyeglass places the schematic diagram to mold；
Fig. 4 is eyeglass change in shape schematic diagram during heating；
Fig. 5 is schematic diagram of the eyeglass under highest temperature temperature constant state；
Fig. 6 is the eyeglass schematic diagram of final hot bending forming；
Fig. 7 is hot bending forming temperature curve of the invention；
Fig. 8 is the deep camber eyeglass test result that temperature curve through the invention is produced.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present embodiment is with technical solution of the present invention
Premised on implemented, the detailed implementation method and specific operation process are given, but protection scope of the present invention is not limited to
Following embodiments.
The present invention provides a kind of production method of sigmatron astronomical telescope deep camber ultra-thin mirror, made
Reflecting mirror can be applied to class Wolter-I type nested structure telescope.The schematic diagram of the telescope such as Fig. 1, wherein telescope
Focal length is F, and the bore of telescope, the i.e. radius of curvature of ultra-thin mirror eyeglass are R, the glancing incidence angles of incident light to telescope
Calculation relational expression for α, between them are as follows:
4 α=R/F (1)
In the case where telescope focal length is certain, glancing incidence angles are directly proportional to the bore of telescope.And for energy model
The sigmatron for 10keV to 40keV is enclosed, it is main in the world that lens reflecting is improved using the method for being coated with W/Si multilayer film
Rate, for grazing angle α in the range of 0.25 ° -0.46 °, lens reflecting rate curve such as Fig. 2, glancing incidence angles are smaller, eyeglass it is anti-
It is higher to penetrate rate.So lens reflecting rate is inversely proportional with lens curvature radius in High-Energy Telescope part.Because of radius of curvature and song
Rate is at reciprocal relation, so bigger reflectivity in order to obtain, it is necessary to the ultra-thin mirror eyeglass of deep camber.
Sigmatron astronomical telescope provided by the invention deep camber ultra-thin mirror production method, it is excellent by recycling
Change control eyeglass strain point temperature to the heating-up time of highest hot bending forming temperature, highest hot bending forming temperature and highest hot bending
Forming temperature constant temperature time, formed hot bending forming temperature curve, be based on the hot bending forming temperature curve, using direct hot bending at
Shape legal system is made to obtain the deep camber ultra-thin mirror, the hot bending forming temperature curve specifically: from laboratory steady temperature
T1 is started to warm up, and eyeglass strain point temperature T2 is warming up in time t1, the constant temperature t2 for a period of time at a temperature of T2；In time t3
Inside it is warming up to eyeglass highest hot bending forming temperature T4, constant temperature t4 for a period of time；Annealing point temperature T3 is cooled in time t5, most
Temperature fall afterwards, temperature fall time t6, as shown in Figure 7.Eyeglass highest hot bending forming temperature T4 is lower than eyeglass softening point temperature T5,
Different according to the curvature of eyeglass, the selection of highest hot bending forming temperature influences the face shape of forming rear lens extremely important.
For D263 ultra-thin glass piece, settable t3=200min, t4=360min, T4=600 DEG C, other parameters can root
It is configured according to needs.
It is tested using the deep camber ultra-thin mirror face shape that laser scanning methods obtain production, wherein test result
Realize the loop optimization.In the test, the laser irradiation that laser is launched is on cylinder to be measured, and subsequent light beam is by position
Detector receives, and the surface deviation situation of cylinder to be measured is obtained according to the variation of light-beam position, forms test result, and resolution ratio <
0.5arcsec。
The radius of curvature for the deep camber ultra-thin mirror that the method for the present invention obtains is 35mm to 45mm, X-ray energy range
For 10keV to 40keV, thickness is less than 0.5mm.
Embodiment
The present embodiment is with thickness 0.3mm, and for the deep camber eyeglass of radius 41mm, raw material are raw using German Schott AG
The D263 ultra-thin glass plain film with a thickness of 0.3mm produced, the method shaped using hot bending are arrived by controlling eyeglass strain point temperature
Heating-up time, highest hot bending forming temperature and highest hot bending forming temperature constant temperature time three fingers of highest hot bending forming temperature
It marks to produce the sigmatron astronomical telescope deep camber ultra-thin mirror of high surface figure accuracy, specifically includes following
Step:
(1) by the way that complete eyeglass hot bending forming temperature curve is arranged in high-temperature heater to flat ultra-thin glass substrate
It carries out hot bending and makes cylindric X-ray astronomical telescope ultra-thin mirror at the method for cylindrical shape；
(2) reflecting mirror surface shape produced by the quick testing procedure of laser scanning methods (1)；
(3) main hot bending forming temperature curve when eyeglass makes is improved by the test result of step (2)；
(4) pass through the circulation experiment of step (1) (2) (3), the best hot bending of optimization deep camber eyeglass shapes heating curve
And constant temperature time, and carry out practical application.
In high-temperature heater, the ultra-thin panel eyeglass purchased is placed in the formwork for cylindrical columns surface of high surface figure accuracy, is such as schemed
3；Mold and eyeglass are heated, such as Fig. 4；At a certain temperature that temperature is risen above to eyeglass knee pointy temperature,
It constant temperature certain time, comes into full contact with eyeglass with mold, replicates its face shape, such as Fig. 5；It is cooled to room temperature, by eyeglass and mold point
From obtaining the reflecting mirror eyeglass of cylindrical shape, such as Fig. 6.
In the present embodiment, glass plate substrate is D263 glass, with a thickness of 0.3mm, corresponding strain point temperature T2=529
DEG C, annealing point and T3=557 DEG C of knee pointy temperature, T5=736 DEG C of softening point temperature.
In the present embodiment, T1=20 DEG C of laboratory steady temperature (room temperature), time t1=180min.
In the present embodiment, time t2=10min, after reaching strain point temperature, since heating furnace can inertia heating superelevation mistake
Strain point temperature, so it is necessary to stabilize for a period of time, making glass thermally equivalent, internal stress fades away simultaneously.
In the present embodiment, T4=600 DEG C of forming temperature of eyeglass highest hot bending, constant temperature are warming up in time t3=200min
A period of time t4=360min.
Highest hot bending forming temperature T4 needs slow cooling to the temperature fall time t5 of eyeglass annealing point, to guarantee in cooling
During eyeglass not will receive the influence of internal stress and change, in the present embodiment, time t5=180min.
In the present embodiment, time t6=720min, temperature control curve terminates, and eyeglass is naturally cooling to room temperature in furnace, release
Thermal stress.
Finally determine the temperature curve mainly optimized as shown in fig. 7, wherein highest hot bending forming temperature is than eyeglass transition point
Temperature is improved more than 40 DEG C, is 600 DEG C, high temperature facilitates eyeglass form and preferably changes；The heating of highest hot bending forming temperature
Time is 200min, and heating rate is 0.215 DEG C/min；Highest hot bending forming temperature constant temperature time is 360min, enables eyeglass
It is enough to be adequately bonded with mold.The figure that the eyeglass produced is obtained by test is as shown in figure 8, the surface figure accuracy PV value of eyeglass is
0.109μm.Meanwhile after temperature curve determines, the repeatable accuracy of experiment is very high, substantially increases the finished product of such eyeglass production
Rate.
The preferred embodiment of the present invention has been described in detail above.It should be appreciated that those skilled in the art without
It needs creative work according to the present invention can conceive and makes many modifications and variations.Therefore, all technologies in the art
Personnel are available by logical analysis, reasoning, or a limited experiment on the basis of existing technology under this invention's idea
Technical solution, all should be within the scope of protection determined by the claims.
Claims (8)
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114772905A (en) * | 2022-04-29 | 2022-07-22 | 安徽光智科技有限公司 | Method for adjusting surface shape of aspheric surface precision mould pressing lens |
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| US20180134601A1 (en) * | 2014-11-24 | 2018-05-17 | Glasstech, Inc. | Glass sheet forming and annealing system providing edge stress control |
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Patent Citations (6)
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|---|---|---|---|---|
| CN101520547A (en) * | 2009-04-17 | 2009-09-02 | 东南大学 | Method for manufacturing flexure cylindrical mirror condenser |
| CN105408266A (en) * | 2013-07-30 | 2016-03-16 | 日本电气硝子株式会社 | Method for manufacturing glass plate having curved shape, glass plate having curved shape, and manufacturing apparutus for glass plate having curved shape |
| JP2017077973A (en) * | 2014-02-25 | 2017-04-27 | 旭硝子株式会社 | Glass plate slow-cooling method, and apparatus therefor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114772905A (en) * | 2022-04-29 | 2022-07-22 | 安徽光智科技有限公司 | Method for adjusting surface shape of aspheric surface precision mould pressing lens |
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Application publication date: 20181207 |