CN108931498A - Multi-pass pool gas absorption spectrum and the device and method for absorbing light path synchro measure - Google Patents
Multi-pass pool gas absorption spectrum and the device and method for absorbing light path synchro measure Download PDFInfo
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Abstract
多通池内气体吸收光谱和吸收光程同步测量的装置和方法,涉及多通池内气体吸收光谱和吸收光程的同步测量技术,为了解决现有的定量气体检测中多通池的光程和气体吸收光谱分开测量且光程的测量精度不高的问题。可调谐光源输出的激光分别入射至辅助干涉仪和主干涉仪;辅助干涉仪用于产生时钟信号,并发送给数据采集卡的时钟端;主干涉仪的光路中包括本征光和测试光,测试光在多通池内传输后与本征光发生拍频相干;数据采集卡用于对主干涉仪产生的拍频相干信号进行采集,并发送给计算模块;计算模块用于根据拍频相干信号计算吸收光程和吸收光谱。本发明适用于同步测量吸收光谱和吸收光程。
A device and method for synchronous measurement of gas absorption spectrum and absorption optical path in a multi-pass cell relates to the simultaneous measurement technology of gas absorption spectrum and absorption optical path in a multi-pass cell, in order to solve the optical path and gas The absorption spectrum is measured separately and the measurement accuracy of the optical path is not high. The laser output from the tunable light source is respectively incident on the auxiliary interferometer and the main interferometer; the auxiliary interferometer is used to generate a clock signal and send it to the clock terminal of the data acquisition card; the optical path of the main interferometer includes intrinsic light and test light, After the test light is transmitted in the multi-pass cell, the beat frequency coherence occurs with the intrinsic light; the data acquisition card is used to collect the beat frequency coherent signal generated by the main interferometer, and sends it to the calculation module; Calculate the absorption pathlength and absorption spectrum. The invention is suitable for synchronous measurement of absorption spectrum and absorption light path.
Description
技术领域technical field
本发明涉及多通池内气体吸收光谱和吸收光程的同步测量技术,属于激光吸收光谱和气体传感领域。The invention relates to a synchronous measurement technology of gas absorption spectrum and absorption light path in a multi-pass cell, belonging to the field of laser absorption spectrum and gas sensing.
背景技术Background technique
在激光吸收光谱技术中,多通池被广泛用于延长吸收光程,提高测量的灵敏度,其中最常用的多通池是基于怀特型和赫里奥特型设计的。为了满足实际不同的测量要求,开发出了不同类型的多通池,例如光学矩阵型气池、圆柱镜子组合型气池。为了实现装置的高度紧凑,出现了诸如混沌光学多通腔体和圆形多反射气池等设计类型。In laser absorption spectroscopy, multi-pass cells are widely used to extend the absorption path and improve measurement sensitivity, among which the most commonly used multi-pass cells are designed based on White type and Heriott type. In order to meet different actual measurement requirements, different types of multi-pass cells have been developed, such as optical matrix gas cells and cylindrical mirror combination gas cells. To achieve highly compact devices, design types such as chaotic optical multi-pass cavities and circular multi-reflecting gas cells have emerged.
对于定量气体检测,必须精确确定吸收光谱和多通池的光程。现有检测中,气体吸收光谱和吸收光程通常分别独立地测量。吸收光程是在获取气体吸收光谱之前通过机械测量法、气体吸收光谱法、相移法、或干涉技术来进行校准。但是,由于结构变形,特别是在恶劣环境下的长期测量中,多通池的预校准光程可能会发生变化,导致测量精度下降。另一方面,在需要不同光学深度的应用场合下,虽然多通池的光程可通过调整反射镜间隔或激光对准调整反射次数来改变,但过程复杂且耗时。For quantitative gas detection, the absorption spectrum and the pathlength of the multipass cell must be precisely determined. In existing detection, gas absorption spectrum and absorption optical path are usually measured independently. Absorption pathlengths are calibrated by mechanical measurements, gas absorption spectroscopy, phase shifting, or interferometric techniques prior to acquiring gas absorption spectra. However, due to structural deformation, especially in long-term measurements in harsh environments, the pre-calibrated optical path of the multipass cell may change, resulting in a decrease in measurement accuracy. On the other hand, in applications that require different optical depths, although the optical path of the multipass cell can be changed by adjusting the mirror spacing or laser alignment to adjust the number of reflections, the process is complicated and time-consuming.
发明内容Contents of the invention
本发明的目的是为了解决现有的定量气体检测中多通池的光程和气体吸收光谱分开测量且光程的测量精度不高的问题,从而提供多通池内气体吸收光谱和吸收光程同步测量的装置和方法。The purpose of the present invention is to solve the problem that the optical path and gas absorption spectrum of the multi-pass cell are measured separately in the existing quantitative gas detection and the measurement accuracy of the optical path is not high, so as to provide synchronization of the gas absorption spectrum and the absorption optical path in the multi-pass cell Measuring devices and methods.
本发明所述的多通池内气体吸收光谱和吸收光程同步测量的装置,该装置包括:可调谐光源1、辅助干涉仪、主干涉仪、数据采集卡10和计算模块11;The device for synchronous measurement of gas absorption spectrum and absorption optical path in a multi-pass cell according to the present invention includes: a tunable light source 1, an auxiliary interferometer, a main interferometer, a data acquisition card 10 and a calculation module 11;
可调谐光源1输出的激光分别入射至辅助干涉仪和主干涉仪;The laser output from the tunable light source 1 is respectively incident on the auxiliary interferometer and the main interferometer;
辅助干涉仪,用于产生时钟信号,并发送给数据采集卡10的时钟端;Auxiliary interferometer, for generating clock signal, and send to the clock terminal of data acquisition card 10;
主干涉仪的光路中包括本征光和测试光,测试光在多通池内传输后与本征光发生拍频相干;The optical path of the main interferometer includes intrinsic light and test light, and the test light is coherent with the intrinsic light after being transmitted in the multipass cell;
数据采集卡10,用于对主干涉仪产生的拍频相干信号进行采集,并发送给计算模块;The data acquisition card 10 is used to collect the beat-frequency coherent signal generated by the main interferometer and send it to the calculation module;
计算模块11,用于根据拍频相干信号计算吸收光程和吸收光谱。The calculating module 11 is used for calculating the absorption optical path and the absorption spectrum according to the beat frequency coherent signal.
优选的是,可调谐光源1输出的激光经第一耦合器2-1分成两路光,一路光入射至辅助干涉仪,另一路光入射至主干涉仪。Preferably, the laser light output by the tunable light source 1 is divided into two paths of light by the first coupler 2-1, one path of light is incident on the auxiliary interferometer, and the other path of light is incident on the main interferometer.
优选的是,辅助干涉仪包括第三耦合器2-3、第一法拉第旋转镜5-1、第二法拉第旋转镜5-2和光纤6;Preferably, the auxiliary interferometer includes a third coupler 2-3, a first Faraday rotating mirror 5-1, a second Faraday rotating mirror 5-2 and an optical fiber 6;
第三耦合器2-3是分光比为50:50的2×2的耦合器;The third coupler 2-3 is a 2×2 coupler with a splitting ratio of 50:50;
第一耦合器2-1输出的一路光经第三耦合器2-3分成两路,一路光经第一法拉第旋转镜5-1反射后耦合进入第三耦合器2-3,另一路光经光纤6后入射至第二法拉第旋转镜5-2,再经第二法拉第旋转镜5-2反射后耦合进入第三耦合器2-3,第三耦合器2-3输出拍频相干信号,然后经TTL时钟发生器9产生方波信号,该方波信号即为时钟信号。One path of light output by the first coupler 2-1 is divided into two paths by the third coupler 2-3, one path of light is coupled into the third coupler 2-3 after being reflected by the first Faraday rotating mirror 5-1, and the other path of light passes through The optical fiber 6 is incident to the second Faraday rotating mirror 5-2, and then coupled into the third coupler 2-3 after being reflected by the second Faraday rotating mirror 5-2, and the third coupler 2-3 outputs a beat frequency coherent signal, and then A square wave signal is generated by the TTL clock generator 9, and the square wave signal is a clock signal.
优选的是,主干涉仪包括第二耦合器2-2、第四耦合器2-4、偏振控制器3、光纤环形器4和平衡探测器8;Preferably, the main interferometer includes a second coupler 2-2, a fourth coupler 2-4, a polarization controller 3, a fiber circulator 4 and a balance detector 8;
第二耦合器2-2是1×2的耦合器,第四耦合器2-4是分光比为50:50的2×2的耦合器;The second coupler 2-2 is a 1×2 coupler, and the fourth coupler 2-4 is a 2×2 coupler with a splitting ratio of 50:50;
第一耦合器2-1输出的另一路光经第二耦合器2-2分成两路光,一路光作为本征光经偏振控制器3后入射至第四耦合器2-4的一个输入端口,另一路光作为测试光由光纤环形器4的1端口进入,由光纤环形器4的2端口出射至多通池7,在多通池7内经多级反射以及气体的吸收后反射光重新进入光纤环行器4的2端口并从3端口耦合进入第四耦合器2-4的另一个输入端口,本征光与测试光发生拍频相干并由第四耦合器2-4的2个输出端输出至平衡探测器8,平衡探测器8的输出端连接数据采集卡10的采集信号输入端,数据采集卡10的输出端连接计算模块11的输入端。Another path of light output by the first coupler 2-1 is divided into two paths of light by the second coupler 2-2, and one path of light is incident to an input port of the fourth coupler 2-4 after passing through the polarization controller 3 as intrinsic light , another path of light enters from port 1 of the fiber optic circulator 4 as test light, exits from port 2 of the fiber optic circulator 4 to the multi-pass cell 7, and in the multi-pass cell 7, the reflected light re-enters the optical fiber after multi-stage reflection and gas absorption The 2-port of the circulator 4 is coupled into another input port of the fourth coupler 2-4 from the 3-port, and the intrinsic light and the test light undergo beat frequency coherence and are output from the 2 output ports of the fourth coupler 2-4 To the balance detector 8 , the output end of the balance detector 8 is connected to the acquisition signal input end of the data acquisition card 10 , and the output end of the data acquisition card 10 is connected to the input end of the calculation module 11 .
优选的是,计算模块11根据拍频相干信号计算吸收光程和吸收光谱,具体为:Preferably, the calculation module 11 calculates the absorption optical path and absorption spectrum according to the beat frequency coherent signal, specifically:
计算模块11对接收到的拍频相干信号进行傅里叶变换,实现由频域谱到时域谱的变换,根据反射峰间的光程差得到吸收光程;The calculation module 11 performs Fourier transform on the received beat-frequency coherent signal, realizes the conversion from the frequency domain spectrum to the time domain spectrum, and obtains the absorption optical path according to the optical path difference between reflection peaks;
对时域谱上感兴趣的信息数据段进行逆傅里叶变换,再对幅值数据作平方处理,得到气体的吸收光谱强度信息,再进行归一化处理,得到归一化的吸收光谱。Perform inverse Fourier transform on the information data segment of interest in the time domain spectrum, and then square the amplitude data to obtain the absorption spectrum intensity information of the gas, and then perform normalization processing to obtain a normalized absorption spectrum.
本发明所述的多通池内气体吸收光谱和吸收光程同步测量的方法,该方法包括:The method for synchronous measurement of gas absorption spectrum and absorption optical path in a multi-pass cell according to the present invention, the method comprises:
步骤一、将一定浓度的待测气体充入多通池7中;Step 1, filling a certain concentration of the gas to be tested into the multi-pass cell 7;
步骤二、开启可调谐光源1线性扫频输出,同时可调谐光源1输出触发信号触发数据采集卡10作数据采集准备;Step 2: Turn on the linear sweep output of the tunable light source 1, and at the same time, the tunable light source 1 outputs a trigger signal to trigger the data acquisition card 10 to prepare for data acquisition;
步骤三、辅助干涉仪产生时钟信号,传输至数据采集卡10,使数据采集卡10对主干涉仪的拍频信号进行等频率间隔采集;Step 3, the auxiliary interferometer generates a clock signal, which is transmitted to the data acquisition card 10, so that the data acquisition card 10 collects the beat frequency signal of the main interferometer at equal frequency intervals;
主干涉仪的测试光由光纤环行器4的2端口导入多通池7,在多通池7内经多级反射以及气体的吸收后反射光重新进入光纤环行器4;调节拍偏振控制器3使得从光纤环行器4的3端口导出的光与本振光发生拍频相干,然后由平衡探测器8传输至数据采集卡10;The test light of the main interferometer is introduced into the multi-pass cell 7 by the 2 ports of the optical fiber circulator 4, and the reflected light re-enters the optical fiber circulator 4 after multi-stage reflection and gas absorption in the multi-pass cell 7; adjust the polarization controller 3 so that The light derived from port 3 of the optical fiber circulator 4 is coherent with the local oscillator light, and is then transmitted to the data acquisition card 10 by the balance detector 8;
步骤四、数据采集卡10采集拍频信号,计算模块11对拍频信号进行保存;Step 4, the data acquisition card 10 collects the beat frequency signal, and the calculation module 11 saves the beat frequency signal;
步骤五、计算模块11对拍频相干信号进行傅里叶变换,实现由频域谱到时域谱的变换,根据反射峰间的光程差得到吸收光程;Step 5, the calculation module 11 performs Fourier transform on the beat-frequency coherent signal, realizes the conversion from the frequency domain spectrum to the time domain spectrum, and obtains the absorption optical path according to the optical path difference between reflection peaks;
步骤六、在步骤五得到的时域谱中选取感兴趣的信息数据段,进行逆傅里叶变换,实现由时域谱到频域谱的变换;Step 6, select the information data segment of interest in the time-domain spectrum obtained in step 5, and carry out inverse Fourier transform to realize the transformation from the time-domain spectrum to the frequency-domain spectrum;
步骤七、对频域谱中的幅值数据作平方处理,获得气体的吸收光谱强度信息;Step 7, performing square processing on the amplitude data in the frequency domain spectrum to obtain the absorption spectrum intensity information of the gas;
步骤八、对获得的气体吸收光谱强度信息进行归一化处理,得到归一化的吸收光谱。Step 8: Perform normalization processing on the obtained gas absorption spectrum intensity information to obtain a normalized absorption spectrum.
优选的是,步骤五中计算模块11对多组拍频相干信号进行傅里叶变换,得到多组数据,对多组数据取平均后根据反射峰间的光程差得到吸收光程。Preferably, in step five, the calculation module 11 performs Fourier transform on multiple sets of beat-frequency coherent signals to obtain multiple sets of data, and obtains the absorption optical path according to the optical path difference between reflection peaks after averaging the multiple sets of data.
优选的是,重复步骤五多次,得到多组时域谱,对多组时域谱取平均后再进行步骤六。Preferably, step five is repeated to obtain multiple sets of time-domain spectra, and step six is performed after averaging the multiple sets of time-domain spectra.
现有的气体传感中,吸收光谱和吸收光程需要分开测量且容易产生较大的误差。本发明的多通池内气体吸收光谱和吸收光程同步测量的装置和方法,可实现吸收光程的高精度测量且同时得到吸收光谱。本发明在不改变多通池物理状态情况下获得各种光程下的吸收光谱,实现灵活扩展气体传感测量的动态范围。In the existing gas sensing, the absorption spectrum and the absorption optical path need to be measured separately and are prone to large errors. The device and method for synchronous measurement of gas absorption spectrum and absorption optical path in a multi-pass cell of the present invention can realize high-precision measurement of absorption optical path and obtain absorption spectrum at the same time. The invention obtains absorption spectra under various optical paths without changing the physical state of the multi-pass cell, and realizes flexible expansion of the dynamic range of gas sensing measurement.
附图说明Description of drawings
图1是具体实施方式一所述的多通池内气体吸收光谱和吸收光程同步测量的装置的结构示意图;Fig. 1 is a structural schematic diagram of a device for synchronous measurement of gas absorption spectrum and absorption optical path in the multi-pass cell described in Embodiment 1;
图2是具体实施方式二中的多通池内气体吸收光谱和吸收光程同步测量的方法的流程图;Fig. 2 is the flowchart of the method for synchronous measurement of gas absorption spectrum and absorption optical path in the multi-pass cell in the second embodiment;
图3是采集到的拍频相干信号图;Figure 3 is a graph of the collected beat-frequency coherent signal;
图4是对100组拍频相干信号进行傅里叶变换得到的时域谱图;Fig. 4 is the time-domain spectrogram obtained by performing Fourier transform on 100 groups of beat-frequency coherent signals;
Cir对应光纤环形器的2端口处,Con对应入口密封窗I与光纤环形器之间的法兰所在位置,I1和I2分别对应入口密封窗的前端面和后端面,O对应出口密封窗处;Cir corresponds to port 2 of the fiber optic circulator, Con corresponds to the position of the flange between the inlet sealing window I and the fiber optic circulator, I 1 and I 2 correspond to the front and rear surfaces of the inlet sealing window, and O corresponds to the outlet sealing window place;
图5是选取出口密封窗O处的信号(即虚线框内)得到的吸收光谱强度信息图;Fig. 5 is the absorption spectrum intensity information figure that selects the signal (i.e. in the dotted line box) at the outlet sealing window O place to obtain;
图6是图5对应的归一化的吸收光谱与HITRAN数据库的仿真谱对比图;Fig. 6 is the comparison chart of the normalized absorption spectrum corresponding to Fig. 5 and the simulated spectrum of the HITRAN database;
图7是多通池中4个不同反射位置处的1600ppm乙炔的气体吸收谱图,相应的光程分别为4.8196m,8.0342m,16.0713m和22.4972m,下部的2个图分别为强吸收线和相对较弱吸收线的放大图。Figure 7 is the gas absorption spectrum of 1600ppm acetylene at 4 different reflection positions in the multi-pass cell. The corresponding optical paths are 4.8196m, 8.0342m, 16.0713m and 22.4972m respectively, and the lower two graphs are strong absorption lines and a zoom-in view of a relatively weak absorption line.
具体实施方式Detailed ways
具体实施方式一:结合图1具体说明本实施方式,本实施方式所述的多通池内气体吸收光谱和吸收光程同步测量的装置,该装置包括:可调谐光源1、辅助干涉仪、主干涉仪、数据采集卡10和计算模块11;Specific Embodiment 1: This embodiment is described in detail in conjunction with FIG. 1 . The device for synchronous measurement of gas absorption spectrum and absorption optical path in a multi-pass cell described in this embodiment includes: a tunable light source 1, an auxiliary interferometer, a main interferometer instrument, data acquisition card 10 and computing module 11;
可调谐光源1输出的激光分别入射至辅助干涉仪和主干涉仪;The laser output from the tunable light source 1 is respectively incident on the auxiliary interferometer and the main interferometer;
辅助干涉仪,用于产生时钟信号,并发送给数据采集卡10的时钟端;Auxiliary interferometer, for generating clock signal, and send to the clock terminal of data acquisition card 10;
主干涉仪的光路中包括本征光和测试光,测试光在多通池内传输后与本征光发生拍频相干;The optical path of the main interferometer includes intrinsic light and test light, and the test light is coherent with the intrinsic light after being transmitted in the multipass cell;
数据采集卡10,用于对主干涉仪产生的拍频相干信号进行采集,并发送给计算模块;The data acquisition card 10 is used to collect the beat-frequency coherent signal generated by the main interferometer and send it to the calculation module;
计算模块11,用于根据拍频相干信号计算吸收光程和吸收光谱。The calculating module 11 is used for calculating the absorption optical path and the absorption spectrum according to the beat frequency coherent signal.
可调谐光源1输出的线性调谐的窄线宽激光经第一耦合器2-1分成两路光,1%一路光入射至辅助干涉仪,99%一路光入射至主干涉仪。The linearly tunable narrow-linewidth laser output by the tunable light source 1 is divided into two paths of light by the first coupler 2-1, 1% of the light is incident on the auxiliary interferometer, and 99% of the light is incident on the main interferometer.
辅助干涉仪采用迈克尔逊干涉仪结构,包括第三耦合器2-3、第一法拉第旋转镜5-1、第二法拉第旋转镜5-2和光纤6;The auxiliary interferometer adopts a Michelson interferometer structure, including a third coupler 2-3, a first Faraday rotating mirror 5-1, a second Faraday rotating mirror 5-2 and an optical fiber 6;
第三耦合器2-3是分光比为50:50的2×2的耦合器;The third coupler 2-3 is a 2×2 coupler with a splitting ratio of 50:50;
第一耦合器2-1输出的一路光经第三耦合器2-3分成两路,一路光经第一法拉第旋转镜5-1反射后耦合进入第三耦合器2-3,另一路光经光纤6后入射至第二法拉第旋转镜5-2,再经第二法拉第旋转镜5-2反射后耦合进入第三耦合器2-3,第三耦合器2-3输出拍频相干信号,然后经TTL时钟发生器9产生方波信号,该方波信号即为时钟信号。One path of light output by the first coupler 2-1 is divided into two paths by the third coupler 2-3, one path of light is coupled into the third coupler 2-3 after being reflected by the first Faraday rotating mirror 5-1, and the other path of light passes through The optical fiber 6 is incident to the second Faraday rotating mirror 5-2, and then coupled into the third coupler 2-3 after being reflected by the second Faraday rotating mirror 5-2, and the third coupler 2-3 outputs a beat frequency coherent signal, and then A square wave signal is generated by the TTL clock generator 9, and the square wave signal is a clock signal.
光纤6用于延时,长度为10m~3000m。The optical fiber 6 is used for time delay, and the length is 10m-3000m.
主干涉仪包括第二耦合器2-2、第四耦合器2-4、偏振控制器3、光纤环形器4和平衡探测器8;The main interferometer includes a second coupler 2-2, a fourth coupler 2-4, a polarization controller 3, a fiber circulator 4 and a balance detector 8;
第二耦合器2-2是1×2的耦合器,第四耦合器2-4是分光比为50:50的2×2的耦合器;The second coupler 2-2 is a 1×2 coupler, and the fourth coupler 2-4 is a 2×2 coupler with a splitting ratio of 50:50;
第一耦合器2-1输出的另一路光经1:99的第二耦合器2-2分成两路光,1%一路光作为本征光,本征光的偏振态通过偏振控制器3的调整后入射至第四耦合器2-4的一个输入端口,99%一路光作为测试光由光纤环形器4的1端口进入,由光纤环形器4的2端口出射至多通池7,在多通池7内经凹面镜一7-1、凹面镜二7-2、凹面镜三7-3的多级反射以及气体的吸收后反射光重新进入光纤环行器4的2端口并从3端口耦合进入第四耦合器2-4的另一个输入端口,本征光与测试光发生拍频相干,拍频相干信号由平衡探测器8探测并转换为电压信号,输入至数据采集卡10,数据采集卡10将模拟的电压信号转换成数字的电压信号。辅助干涉仪的作用是实现数据采集卡10对平衡探测器8探测到的拍频相干信号进行采集。The other path of light output by the first coupler 2-1 is divided into two paths of light by the second coupler 2-2 of 1:99, and 1% of the path of light is used as the intrinsic light, and the polarization state of the intrinsic light passes through the polarization of the polarization controller 3 After adjustment, it is incident on an input port of the fourth coupler 2-4, and 99% of the one-way light enters through port 1 of the optical fiber circulator 4 as test light, and exits from port 2 of the optical fiber circulator 4 to the multi-pass pool 7, where the multi-pass In the pool 7, the reflected light re-enters the 2nd port of the optical fiber circulator 4 through the multi-stage reflection of the concave mirror 1 7-1, the concave mirror 2 7-2, the concave mirror 3 7-3 and the absorption of the gas, and is coupled into the 2nd port from the 3rd port. Another input port of the four-coupler 2-4, the intrinsic light and the test light have beat frequency coherence, and the beat frequency coherent signal is detected by the balance detector 8 and converted into a voltage signal, which is input to the data acquisition card 10, and the data acquisition card 10 Convert the analog voltage signal into a digital voltage signal. The role of the auxiliary interferometer is to enable the data acquisition card 10 to collect the beat frequency coherent signal detected by the balance detector 8 .
多通池7内充有待测的气体,测试光进入多通池7中,由于其内部有三个凹面镜组成的反射系统,测试光在多通池内部发生多级反射,测试光的吸收光程大大增加。反射回来的光信号包含了气体的吸收强度信息,通过信号处理的数学方法,傅里叶变换后可以获得气体的吸收光程,逆傅里叶变换后反演出气体的吸收光谱,得到气体的吸收光程以及吸收光谱信息,解调出气体的浓度。The multi-pass cell 7 is filled with the gas to be tested, and the test light enters the multi-pass cell 7. Since there is a reflection system composed of three concave mirrors inside the multi-pass cell, the test light undergoes multi-stage reflection inside the multi-pass cell, and the absorption light of the test light greatly increased. The reflected optical signal contains the absorption intensity information of the gas. Through the mathematical method of signal processing, the absorption optical path of the gas can be obtained after Fourier transform, and the absorption spectrum of the gas can be obtained after the inverse Fourier transform. The optical path and absorption spectrum information are used to demodulate the gas concentration.
在连续波调频技术中,反射信号本质上包含了气体的吸收信息。本发明涉及两次傅立叶变换的数据处理过程。在第一次傅里叶变换中,与传统的连续波调频一样,将频域(光谱域)中记录的拍频信号转换为时域(空间域)信息。在空间域中,可以很清楚地看到沿长度分布的多通池内部各凹面镜的反射强度,可通过多通池入口及出口处密封窗所对应的强反射峰的光程差确定多通池的光程。在几十米的测量范围内,测量的空间分辨率可达到亚毫米量级。在第二次的逆傅里叶变换中,选取空间域中感兴趣的一段反射信号将其逆傅里叶变换,重新转换回光谱域,以此获取该反射信号对应的吸收光程下目标气体的吸收光谱,比如选取多通池出口密封窗处的反射信号,可获取对应吸收光程最大时的吸收光谱。由于测量的是反射信号,气体的吸收的光程是多通池透射光程的两倍。In continuous wave frequency modulation technology, the reflected signal essentially contains the absorption information of the gas. The invention relates to the data processing process of two Fourier transforms. In the first Fourier transform, the beat signal recorded in the frequency domain (spectral domain) is converted into time domain (spatial domain) information as in conventional CW FM. In the space domain, the reflection intensity of each concave mirror inside the multi-pass cell distributed along the length can be clearly seen, and the multi-pass can be determined by the optical path difference of the strong reflection peak corresponding to the sealing window at the entrance and exit of the multi-pass cell The optical path of the pool. In the measurement range of tens of meters, the spatial resolution of the measurement can reach the order of submillimeters. In the second inverse Fourier transform, a reflection signal of interest in the spatial domain is selected to inverse Fourier transform it, and then converted back to the spectral domain, so as to obtain the target gas under the absorption path corresponding to the reflection signal For example, if the reflection signal at the sealing window at the outlet of the multi-pass cell is selected, the absorption spectrum corresponding to the maximum absorption optical path can be obtained. Since the reflected signal is measured, the absorption path length of the gas is twice the transmission path length of the multipass cell.
在主干涉仪中,测试光光强在多通池内受到光谱吸收信息的调制,并与本振光发生拍频干涉,得到的拍频信号最终由数据采集卡10采集得到,其强度大小由测试光振幅与本征光振幅的矢量乘积以及平衡探测器8的响应灵敏度所决定,由于光强与振幅之间存在平方关系,吸收信息为光的强度信息,为获得气体对测试光的吸收强度信息,在两次傅里叶变换处理后,对反演得到的频域谱的幅值数据进行平方处理,从而获得测试光的强度信息。为提高信噪比,对采集到的多组拍频相干信号在第一次傅里叶变换后先进行平均处理,再对平均结果作逆傅里叶变换,并对得到的反演结果作平方。In the main interferometer, the light intensity of the test light is modulated by the spectral absorption information in the multi-pass cell, and beat frequency interference occurs with the local oscillator light, and the obtained beat frequency signal is finally collected by the data acquisition card 10, and its intensity is determined by the test Determined by the vector product of the light amplitude and the intrinsic light amplitude and the response sensitivity of the balance detector 8, since there is a square relationship between the light intensity and the amplitude, the absorption information is the light intensity information, in order to obtain the absorption intensity information of the gas to the test light , after two Fourier transform processes, square the amplitude data of the frequency domain spectrum obtained from the inversion, so as to obtain the intensity information of the test light. In order to improve the signal-to-noise ratio, after the first Fourier transform of the multiple sets of beat-frequency coherent signals collected, the average processing is performed, and then the average result is inverse Fourier transform, and the obtained inversion result is squared .
根据所测气体的吸收波段,可调谐光源1的线性调谐范围可以选择。针对不同的气体,可以设置光源不同的调谐范围以适应不同范围的气体吸收光谱。线性调谐速率、采集卡参数均可调。光源输出功率在毫瓦量级,可根据具体需求设置。According to the absorption band of the measured gas, the linear tuning range of the tunable light source 1 can be selected. For different gases, different tuning ranges of the light source can be set to adapt to different ranges of gas absorption spectra. The linear tuning rate and acquisition card parameters can be adjusted. The output power of the light source is on the order of milliwatts and can be set according to specific needs.
具体实施方式二:结合图2~图7具体说明本实施方式,基于具体实施方式一所述的多通池内气体吸收光谱和吸收光程同步测量的装置的气体吸收光谱和吸收光程同步测量的方法,该方法包括:Specific embodiment 2: This embodiment is described in detail in conjunction with Fig. 2 to Fig. 7, based on the gas absorption spectrum and absorption optical path synchronous measurement of the device for synchronous measurement of gas absorption spectrum and absorption optical path in the multi-pass cell described in specific embodiment 1 method, which includes:
步骤一、将一定浓度的待测气体充入多通池7中;Step 1, filling a certain concentration of the gas to be tested into the multi-pass cell 7;
步骤二、开启可调谐光源1线性扫频输出,同时可调谐光源1输出触发信号触发数据采集卡10作数据采集准备;Step 2: Turn on the linear sweep output of the tunable light source 1, and at the same time, the tunable light source 1 outputs a trigger signal to trigger the data acquisition card 10 to prepare for data acquisition;
步骤三、辅助干涉仪产生时钟信号,传输至数据采集卡10,使数据采集卡10对主干涉仪的拍频信号进行等频率间隔采集;Step 3, the auxiliary interferometer generates a clock signal, which is transmitted to the data acquisition card 10, so that the data acquisition card 10 collects the beat frequency signal of the main interferometer at equal frequency intervals;
主干涉仪的测试光由光纤环行器4的2端口导入多通池7,在多通池7内经多级反射以及气体的吸收后反射光重新进入光纤环行器4;调节拍偏振控制器3使得从光纤环行器4的3端口导出的光与本振光发生拍频相干,然后由平衡探测器探测8传输至数据采集卡10;The test light of the main interferometer is introduced into the multi-pass cell 7 by the 2 ports of the optical fiber circulator 4, and the reflected light re-enters the optical fiber circulator 4 after multi-stage reflection and gas absorption in the multi-pass cell 7; adjust the polarization controller 3 so that The light derived from port 3 of the optical fiber circulator 4 is coherent with the local oscillator light, and is then detected by the balance detector 8 and transmitted to the data acquisition card 10;
步骤四、数据采集卡10采集拍频信号,计算模块11对拍频信号进行保存;Step 4, the data acquisition card 10 collects the beat frequency signal, and the calculation module 11 saves the beat frequency signal;
步骤五、计算模块11对拍频相干信号进行傅里叶变换,实现由频域谱到时域谱的变换,根据反射峰间的光程差得到吸收光程;Step 5, the calculation module 11 performs Fourier transform on the beat-frequency coherent signal, realizes the conversion from the frequency domain spectrum to the time domain spectrum, and obtains the absorption optical path according to the optical path difference between reflection peaks;
步骤六、在步骤五得到的时域谱中选取感兴趣的信息数据段,进行逆傅里叶变换,实现由时域谱到频域谱的变换;Step 6, select the information data segment of interest in the time-domain spectrum obtained in step 5, and carry out inverse Fourier transform to realize the transformation from the time-domain spectrum to the frequency-domain spectrum;
步骤七、对频域谱中的幅值数据作平方处理,获得气体的吸收光谱强度信息;Step 7, performing square processing on the amplitude data in the frequency domain spectrum to obtain the absorption spectrum intensity information of the gas;
步骤八、对获得的气体吸收光谱强度信息进行归一化处理,得到归一化的吸收光谱。Step 8: Perform normalization processing on the obtained gas absorption spectrum intensity information to obtain a normalized absorption spectrum.
步骤五中计算模块11对多组拍频相干信号进行傅里叶变换,得到多组数据,对多组数据取平均后根据反射峰间的光程差得到吸收光程。In Step 5, the calculation module 11 performs Fourier transform on multiple sets of beat-frequency coherent signals to obtain multiple sets of data, and obtains the absorption optical path according to the optical path difference between reflection peaks after averaging the multiple sets of data.
重复步骤五多次,得到多组时域谱,对多组时域谱取平均后再进行步骤六。Repeat step five times to obtain multiple sets of time-domain spectra, and perform step six after averaging multiple sets of time-domain spectra.
本实施方式以White型多通池为例,参照图1,其内部有三个凹面镜,光在其内部多次反射传播形成总的吸收光程。图2为本实施方式的方法的流程图。图3为标准大气压下对多通池充入100ppm的乙炔,采集的原始的拍频相干信号,数字化生成频域中相关的干涉条纹。In this embodiment, the White type multipass cell is taken as an example. Referring to FIG. 1 , there are three concave mirrors inside, and the light is reflected and propagated multiple times inside to form a total absorption optical path. FIG. 2 is a flow chart of the method of this embodiment. Figure 3 shows the original beat-frequency coherent signal collected by filling the multipass cell with 100ppm acetylene under standard atmospheric pressure, and digitally generating related interference fringes in the frequency domain.
图4是进行100次连续测量数据作傅里叶变换取平均后得到的。在第一次傅里叶变换得到的空间域中,得到由于光在三个凹面镜中形成多级反射而产生的反射峰,反射峰幅值比出口密封窗处的幅值弱两个数量级。Figure 4 is obtained after 100 consecutive measurement data are averaged by Fourier transform. In the space domain obtained by the first Fourier transform, reflection peaks are obtained due to the multi-level reflection of light in the three concave mirrors, and the amplitude of the reflection peaks is two orders of magnitude weaker than that at the exit sealing window.
图5为逆傅里叶变换时,选取出口密封窗O处的信号的逆傅里叶变换结果,得到最大吸收光程所对应的吸收光谱。对数据逆傅里叶变换处理后,对得到的频域结果的幅值数据进行平方处理,得到对应的吸收光谱信息。通过基线拟合的方式校正,得到归一化的吸收光谱。Fig. 5 is an inverse Fourier transform result of selecting the signal at the outlet sealing window O during the inverse Fourier transform, and the absorption spectrum corresponding to the maximum absorption optical path is obtained. After the inverse Fourier transform of the data is processed, the amplitude data of the obtained frequency domain result is squared to obtain the corresponding absorption spectrum information. Corrected by baseline fitting, the normalized absorption spectrum was obtained.
最终的气体吸收光谱如图6所示。为了比较,引用基于HITRAN数据库的仿真结果。对比显示,本发明的实验数据和仿真结果之间的残差水平很低,说明了本实施方式的方法在精确检测气体吸收谱方面的成功。根据残差的标准偏差,最小可检测吸收量约为0.01,对应测量乙炔气体的检测极限为5ppm。The final gas absorption spectrum is shown in Fig. 6. For comparison, simulation results based on the HITRAN database are cited. The comparison shows that the residual error level between the experimental data and the simulation results of the present invention is very low, which illustrates the success of the method of this embodiment in accurately detecting the gas absorption spectrum. Based on the standard deviation of the residuals, the minimum detectable absorbance is about 0.01, which corresponds to a detection limit of 5 ppm for the measured acetylene gas.
根据气体传感Beer-Lambert定律,产生相同的吸收强度,吸收光程越短所需的气体浓度越高。当气体浓度较高时,由出口密封窗处得到的吸收光谱会出现吸收饱和现象,而不适宜做气体传感,此时应选取多通池内部凹面镜的反射信号做逆傅里叶变换,得到没有饱和的吸收光谱。对多通池内部凹面镜反射信号作逆傅里叶反变换,可以极大地提高本发明所提出方法的测量动态范围。图7展示了对多通池中不同光程所对应的反射位置的气体吸收光谱的同步测量。利用该方法扩大的测量动态范围方面的优势,测量了相对高浓度的1600ppm乙炔气体。参照图7显示了在4个不同反射位置处所测得的吸收光谱,相应的吸收光程分别为4.8196m,8.0342m,16.0713m和22.4972m。每个吸收光谱都按前面所述的步骤进行检测得到。可以清楚地看出,在最大吸收光程所对应的22.4972米位置处,强吸收接近饱和,因此不能用于气体传感。相比之下,对于相对较短的吸收光程,吸收谱线仍然可以工作。为了检测更高浓度的气体,短吸收光程可以与弱吸收线组合使用。显然,通过选取不同的光程对于扩大测量的有效动态范围是非常有利的。According to the Beer-Lambert law of gas sensing, the shorter the absorption path, the higher the gas concentration required to produce the same absorption intensity. When the gas concentration is high, the absorption spectrum obtained from the outlet sealing window will appear absorption saturation, which is not suitable for gas sensing. At this time, the reflection signal of the concave mirror inside the multi-pass cell should be selected for inverse Fourier transform. Obtain an absorption spectrum without saturation. The inverse Fourier transformation is performed on the reflection signal of the concave mirror inside the multi-pass cell, which can greatly improve the measurement dynamic range of the method proposed by the invention. Figure 7 shows the simultaneous measurement of the gas absorption spectra at the reflection positions corresponding to different optical paths in the multipass cell. Taking advantage of the extended measurement dynamic range of this method, a relatively high concentration of 1600ppm acetylene gas was measured. Referring to Fig. 7, the absorption spectra measured at four different reflection positions are shown, and the corresponding absorption paths are 4.8196m, 8.0342m, 16.0713m and 22.4972m respectively. Each absorption spectrum is detected according to the steps described above. It can be clearly seen that at the position of 22.4972 m corresponding to the maximum absorption optical path, the strong absorption is close to saturation, so it cannot be used for gas sensing. In contrast, for relatively short absorption pathlengths, absorption lines still work. To detect higher concentrations of gases, short absorption pathlengths can be combined with weak absorption lines. Obviously, it is very beneficial to expand the effective dynamic range of measurement by selecting different optical paths.
对于本领域技术人员而言,显然本发明不限于上述示范性实施例的细节,而且在不背离本发明的精神或基本特征的情况下,能够以其他的具体形式实现本发明。因此,无论从哪一点来看,均应将实施例看作是示范性的,而且是非限制性的,本发明的范围由所附权利要求而不是上述说明限定,因此旨在将落在权利要求的等同要件的含义和范围内的所有变化囊括在本发明内。It will be apparent to those skilled in the art that the invention is not limited to the details of the above-described exemplary embodiments, but that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Accordingly, the embodiments should be regarded in all points of view as exemplary and not restrictive, the scope of the invention being defined by the appended claims rather than the foregoing description, and it is therefore intended that the scope of the invention be defined by the appended claims rather than by the foregoing description. All changes within the meaning and range of equivalents of the elements are embraced in the present invention.
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