CN108913851A - A kind of bell-type furnace - Google Patents
A kind of bell-type furnace Download PDFInfo
- Publication number
- CN108913851A CN108913851A CN201810274275.2A CN201810274275A CN108913851A CN 108913851 A CN108913851 A CN 108913851A CN 201810274275 A CN201810274275 A CN 201810274275A CN 108913851 A CN108913851 A CN 108913851A
- Authority
- CN
- China
- Prior art keywords
- inner cover
- bell
- type furnace
- wind
- bumping post
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 32
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 24
- 230000000694 effects Effects 0.000 claims abstract description 8
- 239000011521 glass Substances 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 62
- 229910052802 copper Inorganic materials 0.000 abstract description 62
- 239000010949 copper Substances 0.000 abstract description 62
- 230000009471 action Effects 0.000 description 5
- 239000011449 brick Substances 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 239000000872 buffer Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 244000144992 flock Species 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001739 rebound effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000000153 supplemental effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/26—Methods of annealing
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/663—Bell-type furnaces
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/663—Bell-type furnaces
- C21D9/673—Details, accessories, or equipment peculiar to bell-type furnaces
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/663—Bell-type furnaces
- C21D9/677—Arrangements of heating devices
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/08—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a kind of bell-type furnaces, the main points of its technical scheme are that：Including pedestal, the inner cover on pedestal and the heating mantles being sheathed on outside inner cover, pedestal is equipped with supporting station, and supporting station is equipped with for the air compressor to inner cover top jet compressed gas；Supporting station side wall and inner cover inner wall interval are arranged, and return air inlet is offered on the side wall of supporting station；Copper strips is held up using compressed air and is in suspended state by the way that air compressor is arranged on pedestal by the present invention, has achieved the effect that copper strips thermally equivalent.
Description
Technical field
The present invention relates to Improvement For Production Equipment of Copper Strip, in particular to a kind of bell-type furnace.
Background technique
In copper strips production process, need to anneal to it using bell-type furnace to achieve the effect that improve its ductility.
Common bell-type furnace includes pedestal, inner cover, heating mantles and cooling dome, after copper strips is heated and kept the temperature in heating mantles, will be added
Heat cover, which is removed and installs cooling dome, cools down copper strips.And heating process is being carried out to the copper strips inside inner cover using heating mantles
In, often since heat transfer unevenness leads to occur the temperature difference on copper strips, and then influence the quality of copper strips.
The Chinese patent that application publication number is CN104764323A, data of publication of application is on 07 08th, 2015 discloses one
Kind core type bell-type furnace, including outer cover, pedestal and center heating rod；The center heating rod is fixed on the base center position.
Outer cover is as main heating source, and center heating rod is as supplemental heat source；Using center and external concentric circle heat simultaneously by the way of into
Row heating.
It is in place of the deficiencies in the prior art, in copper strips heating process, copper strips is placed directly on pedestal, this just makes
Part and the heated difference of rest part for obtaining copper strips and base contacts, lead to copper strips uneven heating.
Summary of the invention
The object of the present invention is to provide a kind of bell-type furnaces, by the way that air compressor is arranged on pedestal, utilize compressed air
Copper strips is held up to and is in suspended state, has achieved the effect that copper strips thermally equivalent.
Above-mentioned technical purpose of the invention technical scheme is that：
A kind of bell-type furnace, including pedestal, the inner cover on pedestal and the heating mantles being sheathed on outside the inner cover, the pedestal
It is equipped with supporting station, the supporting station is equipped with for the air compressor to inner cover top jet compressed gas；The bearing
Platform side wall and inner cover inner wall interval are arranged, and offer return air inlet on the side wall of the supporting station.
By adopting the above technical scheme, it in use, placing copper strips on supporting station, then opens air compressor order and ejects
The compressed gas come overcomes the gravity of copper strips, so that copper strips is in suspended state.Then inner cover is successively installed on pedestal and added
Heat cover, heats heating mantles to inner cover.Gas can be compressed and be discharged by air compressor, be formed biggish dynamic
Power.Copper strips is suspended in inner cover under the action of compressed gas, and the compressed gas passed through from copper strips central hollow is not having
The top of inner cover is moved in the case where resistance, and the side wall under the reaction force acts of inner cover along inner cover moves downward, and
The raw material for becoming air compressor are entered in supporting station from the return air inlet of supporting station, and continue to carry out compressed gas, return air
Following for being compressed again is bad, so that the heat inside inner cover is more uniformly transmitted on copper strips.Meanwhile copper strips is in suspension
State avoids copper strips from contacting pedestal, so that the heating of copper strips is more uniform and in all directions.
Further preferably：The supporting station top horizontal is equipped with split-wind plate, and perforation setting is offered on the split-wind plate
Air outlet.
By adopting the above technical scheme, compressed gas spouting in air compressor is sprayed from the air outlet on split-wind plate
And go out, more uniform and stable air-flow is formed, so that the active force that copper strips bottom is subject to is also more stable, including reduction copper strips
Positional shift leads to strike the situation on inner cover in cover.
Further preferably：The inner cover is equipped with multiple bumping posts, and the bumping post is circumferentially uniformly distributed along inner cover.
By adopting the above technical scheme, when the position of copper strips occurs mobile, copper strips is after striking bumping post in bumping post
Original position is returned under the reaction force acts of offer, and copper strips tends towards stability after multiple move back and forth, reduce copper
Band directly impinges upon the case where causing copper strips and inner cover to damage on inner cover.
Further preferably：One end on the bumping post far from inner cover is equipped with the perpendicular rib of protrusion.
By adopting the above technical scheme, after copper strips collides bumping post, the real area contacted on bumping post with copper strips is only
To erect the area that rib is contacted with copper strips, reduce the area that copper strips is contacted with bumping post, to reduce since the two contact causes
The situation that the portions under heat unevenness of bumping post is contacted on copper strips, improves the uniformity of heating.
Further preferably：The perpendicular rib is equipped with elastic insert.
By adopting the above technical scheme, the active force generated when colliding to copper strips with bumping post buffers, and reduces to copper strips
With the damage of inner cover.
Further preferably：The sliding rail of closure, one end of the bumping post and sliding rail are circumferentially on the inner cover along it
It is slidably matched；The bottom of bumping post is equipped with the first wind-guiding face for pushing bumping post to move along sliding rail under the action of the wind.
By adopting the above technical scheme, air compressor sprays upward compressed gas and gives bumping post upward active force,
And due to the presence of guide plate, stress of the bumping post in bottom is being gradually changed along the inclined direction of guide plate.This is allowed for
Bumping post is circumferentially rotated along sliding rail under compressed gas effect and around inner cover, thus when changing copper strips close to inner cover side wall
Position when bumping post is struck, causes the position on copper strips since copper strips repeatedly impinges upon same position with bumping post to reduce
The case where setting uneven heating further increases the uniformity of heating.
Further preferably：The top of the bumping post is equipped with for pushing bumping post to move along sliding rail under the action of the wind
The second wind-guiding face, second wind-guiding face and the first wind-guiding face are symmetrical arranged with horizontal plane.
By adopting the above technical scheme, by the compressed gas at copper strips center under the reaction force acts at the top of inner cover along
Inner cover inner wall moves downward, and under the guiding role of the second wind-guiding face, the compressed gas of return gives the power of bumping post rotation,
So that bumping post is consistent with the power direction that the compressed gas acted in the first wind-guiding face is given, to accelerate bumping post
Movement velocity is further reduced and causes the position uneven heating on copper strips since copper strips repeatedly impinges upon same position with bumping post
The case where.
Further preferably：Connecting rod is fixed between multiple bumping posts.
By adopting the above technical scheme, connecting rod makes multiple bumping posts become an entirety and moves synchronously, and reduces multiple
Bumping post movement degree is different and flocks together and causes to lose the consequence of anticollision effect.
Further preferably：The arc-shaped setting in the top of the inner cover, and the wavy setting of inner wall of the inner cover.
By adopting the above technical scheme, arc-shaped at the top of inner cover to be arranged so that the compressed gas impacted at the top of inner cover is returning
The case where Shi Gengjia is smooth, and reduction causes air turbulence.Inner cover inner wall setting waviness can be accelerated into heat transfer, improved
Copper strips thermal efficiency.
Further preferably：The inner cover is equipped with glass viewing port.
By adopting the above technical scheme, the motion conditions of the convenient copper strips after installing inner cover, and accordingly adjustment air compression
The power that machine provides.
In conclusion the invention has the advantages that：
1, the gravity of copper strips is overcome to reach equal so that copper strips is suspended in inner cover by the way that air compressor is arranged on pedestal
The effect of even heating；
2, by be arranged on inner cover according in inner cover gas motion and the bumping post that rotates, reduce the same of copper strips and inner cover damage
When avoid same position on copper strips from repeatedly contradicting the case where bumping post causes uneven heating.
Detailed description of the invention
Fig. 1 is the overall structure diagram of embodiment；
Fig. 2 is the structure chart of bumper assembly；
Fig. 3 is the cross-sectional view of bumper assembly.
In figure, 1, pedestal；2, inner cover；21, glass viewing port；3, heating mantles；31, outer wall is kept the temperature；32, refractory brick；321,
Resistance band；4, supporting station；41, split-wind plate；411, air outlet；42, return air inlet；5, air compressor；6, bumper assembly；61, sliding
Rail；62, bumping post；621, the first wind-guiding face；622, the second wind-guiding face；7, connecting rod；8, rib is erected；81, elastic insert.
Specific embodiment
Below in conjunction with attached drawing, invention is further described in detail.
Embodiment：A kind of bell-type furnace, as shown in Figure 1, including pedestal 1, inner cover 2 and heating mantles 3, pedestal 1, which is stepped, to be set
It sets.The top of pedestal 1 is equipped with air compressor 5, and supporting station 4 is surrounded by outside air compressor 5, is fixed at the top of supporting station 4
There is split-wind plate 41, the air outlet 411 of multiple perforation settings is uniformly provided on split-wind plate 41.It is placed on the holding table 4 when use
Air compressor 5 is opened after copper strips, so that in the air, then on pedestal 1 successively copper strips is suspended under the action of compressed gas
Inner cover 2 and heating mantles 3 are installed.
Referring to Fig.1, heating mantles 3 include the heat preservation outer wall 31 and refractory brick 32 that set gradually from outer to inner, on refractory brick 32
Resistance band 321 is evenly equipped with for heating along its short transverse.The arc-shaped setting in the top of inner cover 2, the wavy setting of side wall,
And the side wall of inner cover 2 is equipped with for observing the glass viewing port 21 inside inner cover 2.
Referring to Fig.1, side wall and inner cover 2 interval of the setting funnel-shaped of supporting station 4, supporting station 4 are arranged and 4 side wall of supporting station
On offer return air inlet 42.Compressed gas is ejected into the part at 2 top of inner cover in inner cover 2 after generating in air compressor 5
4 inside of supporting station is entered from return air inlet 42 along the side wall of inner cover 2 under reaction force acts and is compressed as raw material by air
Machine 5 is utilized generation compressed gas again.
Combined with Figure 1 and Figure 2, in order to avoid the copper strips of suspension is struck during heating on inner cover 2, added on inner cover 2
There is bumper assembly 6.Bumper assembly 6 includes the sliding rail 61 for the ring seal being fixed on inner cover 2, is sliding combined with three on sliding rail 61
A uniformly distributed bumping post 62, bumping post 62 are horizontally disposed.One end of bumping post 62 is embedded in sliding rail 61, and three bumping posts 62
An entirety is connected as by connecting rod 7.The top and bottom of bumping post 62 are equipped with symmetrically arranged second wind-guiding of horizontal plane
Face 622 and the first wind-guiding face 621, and the first wind-guiding face 621 and the intersection setting of the second wind-guiding face 622.
The position uneven heating on copper strips is caused since copper strips repeatedly impinges upon same position with bumping post 62 in order to reduce
The case where, one end on bumping post 62 far from sliding rail 61 is equipped with the perpendicular rib 8 of multiple protrusions, and erect on rib 8 with 62 phase of bumping post
Pair side be fixed with elastic insert 81.
It is of the invention use process is as follows, first copper strips is placed on supporting station 4, air compressor 5 is then turned on and makes
Spouting compressed gas offsets the gravity of copper strips.Inner cover 2 is then installed, and observes the position of copper strips in glass viewing port 21
It sets, and air compressor 5 is adjusted, so that copper strips corresponds to the position of bumper assembly 6.Then heating mantles 3 are installed, to inner cover
2 are heated.Meanwhile three bumping posts 62 on inner cover 2 are rotated synchronously along track under the action of the wind.When in inner cover 2
When copper strips position shifts, copper strips is struck on the elastic insert 81 of bumping post 62, is then tended under multiple rebound effect
Stablize.After heating, dismantle heating mantles 3, then again slowly change air compressor 5 power output so that copper strips by
It gradually falls on down on supporting station 41, while being observed by glass viewing port 21, preferably to control the dynamic of air compressor 5
Power output.
This specific embodiment is only explanation of the invention, is not limitation of the present invention, those skilled in the art
Member can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but as long as at this
All by the protection of Patent Law in the protection scope of invention.
Claims (10)
1. a kind of bell-type furnace including pedestal (1), the inner cover (2) being set on pedestal (1) and is sheathed on the inner cover (2) outside
Heating mantles (3), which is characterized in that the pedestal (1) is equipped with supporting station (4), and the supporting station (4) is equipped with for inner cover
(2) air compressor (5) of top jet compressed gas；Supporting station (4) side wall is set with the inner cover (2) inner wall interval
It sets, and offers return air inlet (42) on the side wall of the supporting station (4).
2. a kind of bell-type furnace according to claim 1, which is characterized in that supporting station (4) top horizontal, which is equipped with, divides wind
Plate (41) offers the air outlet (411) of perforation setting on the split-wind plate (41).
3. a kind of bell-type furnace according to claim 1, which is characterized in that the inner cover (2) is equipped with multiple bumping posts
(62), the bumping post (62) is circumferentially uniformly distributed along inner cover (2).
4. a kind of bell-type furnace according to claim 3, which is characterized in that far from inner cover (2) on the bumping post (62)
One end is equipped with the perpendicular rib (8) of protrusion.
5. a kind of bell-type furnace according to claim 4, which is characterized in that the perpendicular rib (8) is equipped with elastic insert (81).
6. a kind of bell-type furnace according to claim 3, which is characterized in that be circumferentially with closure along it on the inner cover (2)
Sliding rail (61), one end and the sliding rail (61) of the bumping post (62) be slidably matched；The bottom of bumping post (62) be equipped with for
Lower the first wind-guiding face (621) for pushing bumping post (62) to move along sliding rail (61) of wind-force effect.
7. a kind of bell-type furnace according to claim 6, which is characterized in that the top of the bumping post (62) be equipped with for
Lower the second wind-guiding face (622) for pushing bumping post (62) to move along sliding rail (61) of wind-force effect, second wind-guiding face (622) and
First wind-guiding face (621) is symmetrical arranged with horizontal plane.
8. a kind of bell-type furnace according to claim 7, which is characterized in that the company of being fixed between multiple bumping posts (62)
Extension bar (7).
9. a kind of bell-type furnace according to claim 1, which is characterized in that the arc-shaped setting in top of the inner cover (2), and
The wavy setting of inner wall of the inner cover (2).
10. a kind of bell-type furnace according to claim 1, which is characterized in that the inner cover (2) is equipped with glass viewing port
(21)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810274275.2A CN108913851A (en) | 2018-03-29 | 2018-03-29 | A kind of bell-type furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810274275.2A CN108913851A (en) | 2018-03-29 | 2018-03-29 | A kind of bell-type furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108913851A true CN108913851A (en) | 2018-11-30 |
Family
ID=64402830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810274275.2A Pending CN108913851A (en) | 2018-03-29 | 2018-03-29 | A kind of bell-type furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108913851A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1056886A (en) * | 1990-04-18 | 1991-12-11 | 范布兰德韦克系统程序编制有限公司 | Method and apparatus for thermally treating strips with liquid or pasty preparations |
| CN201659079U (en) * | 2010-04-22 | 2010-12-01 | 温州神力机械制造有限公司 | Air-floatation type oven system |
| CN202380053U (en) * | 2011-12-16 | 2012-08-15 | 中冶南方(武汉)威仕工业炉有限公司 | Air floatation type aluminum belt heating conveying device |
| CN202430260U (en) * | 2011-12-14 | 2012-09-12 | 丹阳市恒泰电炉有限公司 | Severe-convection bell type bright annealing furnace |
| CN104180642A (en) * | 2013-05-23 | 2014-12-03 | 宜兴市新芳铜厂有限公司 | Anti-collision segment for vertical copper smelting furnace |
| CN204125483U (en) * | 2014-07-29 | 2015-01-28 | 江苏凯特尔工业炉有限公司 | The Full Hydrogen Bell Type Annealing Furnace of the floated pod of tool |
| CN106409730A (en) * | 2016-10-25 | 2017-02-15 | 北京鼎泰芯源科技发展有限公司 | Non-contact wafer annealing device and method |
| CN206173408U (en) * | 2016-11-11 | 2017-05-17 | 浙江东南金属薄板有限公司 | Bell type furnace unit |
| CN106766793A (en) * | 2016-12-30 | 2017-05-31 | 常州大学 | A kind of integrated circular thermal current air supporting heating plate band units and method |
-
2018
- 2018-03-29 CN CN201810274275.2A patent/CN108913851A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1056886A (en) * | 1990-04-18 | 1991-12-11 | 范布兰德韦克系统程序编制有限公司 | Method and apparatus for thermally treating strips with liquid or pasty preparations |
| CN201659079U (en) * | 2010-04-22 | 2010-12-01 | 温州神力机械制造有限公司 | Air-floatation type oven system |
| CN202430260U (en) * | 2011-12-14 | 2012-09-12 | 丹阳市恒泰电炉有限公司 | Severe-convection bell type bright annealing furnace |
| CN202380053U (en) * | 2011-12-16 | 2012-08-15 | 中冶南方(武汉)威仕工业炉有限公司 | Air floatation type aluminum belt heating conveying device |
| CN104180642A (en) * | 2013-05-23 | 2014-12-03 | 宜兴市新芳铜厂有限公司 | Anti-collision segment for vertical copper smelting furnace |
| CN204125483U (en) * | 2014-07-29 | 2015-01-28 | 江苏凯特尔工业炉有限公司 | The Full Hydrogen Bell Type Annealing Furnace of the floated pod of tool |
| CN106409730A (en) * | 2016-10-25 | 2017-02-15 | 北京鼎泰芯源科技发展有限公司 | Non-contact wafer annealing device and method |
| CN206173408U (en) * | 2016-11-11 | 2017-05-17 | 浙江东南金属薄板有限公司 | Bell type furnace unit |
| CN106766793A (en) * | 2016-12-30 | 2017-05-31 | 常州大学 | A kind of integrated circular thermal current air supporting heating plate band units and method |
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