CN108899293B - A solar cell crystalline silicon cleaning device that prevents cleaning dead corners - Google Patents
A solar cell crystalline silicon cleaning device that prevents cleaning dead corners Download PDFInfo
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- 238000004140 cleaning Methods 0.000 title claims abstract description 47
- 229910021419 crystalline silicon Inorganic materials 0.000 title claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 18
- 230000000694 effects Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
Description
技术领域Technical field
本发明涉及单晶硅片生产制造技术领域,尤其涉及一种防清洁死角的太阳能电池晶体硅清洗装置。The invention relates to the technical field of single crystal silicon wafer production and manufacturing, and in particular to a solar cell crystalline silicon cleaning device that prevents cleaning of dead corners.
背景技术Background technique
单晶硅片在生产打磨好后需要清洗表面的污垢,现有的清洗设备比较传统,就是将单晶硅片放入放入水槽中冲洗。这样方式洗得很不干净,而且由于单晶硅片比较薄,很多都重叠在一起,容易造成清洗死角。After the monocrystalline silicon wafer is produced and polished, the surface dirt needs to be cleaned. The existing cleaning equipment is more traditional, which is to put the monocrystalline silicon wafer into a sink and rinse it. This method of cleaning is not very clean, and because the single crystal silicon wafers are relatively thin, many of them overlap each other, which can easily cause cleaning dead spots.
发明内容Contents of the invention
基于上述背景技术存在的技术问题,本发明提出一种防清洁死角的太阳能电池晶体硅清洗装置。Based on the technical problems existing in the above background technology, the present invention proposes a solar cell crystalline silicon cleaning device that prevents cleaning dead corners.
本发明提出了一种防清洁死角的太阳能电池晶体硅清洗装置,包括:水槽、托盘组、以及用于提供高压气流的高压气流供给机构,其中:The invention proposes a solar cell crystalline silicon cleaning device that prevents cleaning dead corners, including: a water tank, a tray group, and a high-pressure airflow supply mechanism for providing high-pressure airflow, wherein:
水槽的内侧壁上设有竖直延伸的第一滑槽和与第一滑槽相对布置的第二滑槽;The inner wall of the water tank is provided with a vertically extending first chute and a second chute arranged opposite to the first chute;
托盘组包括至少一个托盘,且托盘的一侧设有用于卡入第一滑槽内的第一滑块,其远离第一滑块的一侧设有用于卡入第二滑槽内的第二滑块;The pallet group includes at least one pallet, and a first slider is provided on one side of the pallet for being inserted into the first chute, and a second slider is provided on a side away from the first slider for being inserted into the second chute. slider;
托盘包括底板和若干个侧板,底板为镂空结构,底板的下方设有竖直布置并与其固定的限位柱,各侧板均固定在底板的上方并在任意相邻的两个侧板之间预留间距以形成供工件放入的卡槽;各侧板的内均均设有夹腔,且各侧板上的夹腔通过管路彼此连通;任意相邻的两个侧板相互靠近的一侧侧壁上均设有与其夹腔连通的气孔;The pallet includes a bottom plate and several side plates. The bottom plate is a hollow structure. There are vertically arranged and fixed limit columns below the bottom plate. Each side plate is fixed above the bottom plate and between any two adjacent side plates. Leave a gap between them to form a slot for the workpiece to be placed; each side plate is equipped with a clamping cavity, and the clamping cavity on each side plate is connected to each other through pipelines; any two adjacent side plates are close to each other There are air holes connected to its sandwich cavity on one side wall;
高压气流供给机构与所述管路可拆卸连接。The high-pressure air flow supply mechanism is detachably connected to the pipeline.
优选地,管路包括主管若干个与主管连通的支管,各支管与各侧板的夹腔一一对应并分别与对应的夹腔连通。Preferably, the pipeline includes a main pipe and several branch pipes connected with the main pipe. Each branch pipe corresponds to the clamping cavity of each side plate and communicates with the corresponding clamping cavity respectively.
优选地,任意一个支管均通过可自动控制开合度的控制阀与对应的夹腔连通。Preferably, any branch pipe is connected to the corresponding clamping cavity through a control valve that can automatically control the opening and closing degree.
优选地,任意一个侧板的两侧侧壁上均分别安装有用于检测卡槽内的工件是否与侧板的侧壁抵靠的传感器,且当其中任意一个传感器检测到工件与侧板的侧壁抵靠时,与该侧板对应的控制阀控制其开合度增大。Preferably, sensors for detecting whether the workpiece in the slot abuts against the side wall of the side plate are respectively installed on both side walls of any side plate, and when any one of the sensors detects that the workpiece is in contact with the side wall of the side plate, When the wall abuts, the control valve corresponding to the side plate controls its opening and closing to increase.
优选地,卡槽的两端均设有与底板固定的挡板,且挡板为镂空结构。Preferably, both ends of the slot are provided with baffles fixed to the bottom plate, and the baffles have a hollow structure.
优选地,卡槽内部设有多个与底板固定的挡板,各挡板均为镂空结构,且各挡板在卡槽内部由其一端向其另一端间距布置以将卡槽分隔成多个槽腔。Preferably, the card slot is provided with a plurality of baffles fixed to the bottom plate, each baffle is a hollow structure, and the baffles are spaced from one end to the other end of the card slot to separate the card slot into multiple cavity.
优选地,托盘设有多个,且任意一个托盘的上盘面上均设有限位槽,且该限位槽与该托盘上的限位柱位于同一直线上。Preferably, there are multiple pallets, and a limiting groove is provided on the upper surface of any pallet, and the limiting groove is located on the same straight line as the limiting column on the pallet.
优选地,高压气流供给机构固定安装在水槽的外壁上。Preferably, the high-pressure air flow supply mechanism is fixedly installed on the outer wall of the water tank.
本发明中,通过在水槽内侧壁上设置相对布置的第一滑槽、第二滑槽,在托盘上设置第一滑块和第二滑块,以利用第一滑块、第二滑块分别与第一滑槽、第二滑槽配合使得托盘可以在水槽内部滑上滑下,以便于对托盘进行上料、下料动作;同时,通过对托盘的结构进行设置,使得托盘上具有多个卡槽,以用于放置待清洗工件,同时,利用高压气流供给机构与管路配合分别向各夹腔内部输送高压气流,从而在各卡槽的内部形成两股相向流动的高压气流,以利用该两股气流使位于卡槽内的工件处于竖立状,以使得工件在清洗过程中除底部与托盘接触外其他各部位均处于悬空状态,使其没有清洗死角,且水槽内的水流在气流的作用下不断对工件形成冲刷,进而可以有效提高工件的清洗效果。In the present invention, a first slider and a second slider arranged oppositely are provided on the inner wall of the water tank, and a first slider and a second slider are provided on the tray, so that the first slider and the second slider can be used to respectively Cooperating with the first chute and the second chute, the tray can slide up and down inside the sink to facilitate loading and unloading of the tray; at the same time, by configuring the structure of the tray, the tray has multiple The clamping slot is used to place the workpiece to be cleaned. At the same time, the high-pressure air supply mechanism and the pipeline are used to transport high-pressure airflow to the inside of each clamping cavity, thereby forming two high-pressure airflows flowing in opposite directions inside each clamping slot to utilize The two airflows make the workpiece in the slot stand upright, so that during the cleaning process, except for the bottom contact with the tray, all other parts of the workpiece are in a suspended state, so that there are no cleaning dead corners, and the water flow in the sink is in the airflow. Under the action, the workpiece is continuously flushed, which can effectively improve the cleaning effect of the workpiece.
附图说明Description of the drawings
图1为本发明提出的一种防清洁死角的太阳能电池晶体硅清洗装置的结构示意图;Figure 1 is a schematic structural diagram of a solar cell crystalline silicon cleaning device that prevents cleaning dead corners proposed by the present invention;
图2为本发明提出的一种防清洁死角的太阳能电池晶体硅清洗装置中所述侧板的结构示意图。Figure 2 is a schematic structural diagram of the side plate in a solar cell crystalline silicon cleaning device that prevents cleaning dead corners proposed by the present invention.
具体实施方式Detailed ways
下面,通过具体实施例对本发明的技术方案进行详细说明。Below, the technical solution of the present invention is described in detail through specific embodiments.
如图1-2所示,图1为本发明提出的一种防清洁死角的太阳能电池晶体硅清洗装置的结构示意图;图2为本发明提出的一种防清洁死角的太阳能电池晶体硅清洗装置中所述侧板的结构示意图。As shown in Figures 1-2, Figure 1 is a schematic structural diagram of a solar cell crystalline silicon cleaning device that prevents cleaning dead spots proposed by the present invention; Figure 2 is a solar cell crystalline silicon cleaning device that prevents cleaning dead spots proposed by the present invention. Structural diagram of the side panels described in .
参照图1-2,本发明实施例提出的一种防清洁死角的太阳能电池晶体硅清洗装置,包括:水槽1、托盘组、以及用于提供高压气流的高压气流供给机构2,其中:水槽1的内侧壁上设有竖直延伸的第一滑槽和与第一滑槽相对布置的第二滑槽。托盘组包括多个托盘3,且各托盘3的一侧均设有用于卡入第一滑槽内的第一滑块,其远离第一滑块的一侧设有用于卡入第二滑槽内的第二滑块。Referring to Figures 1-2, an embodiment of the present invention proposes a solar cell crystalline silicon cleaning device that prevents cleaning dead spots, including: a water tank 1, a tray group, and a high-pressure airflow supply mechanism 2 for providing high-pressure airflow, wherein: water tank 1 The inner side wall is provided with a vertically extending first chute and a second chute arranged opposite to the first chute. The pallet group includes a plurality of pallets 3, and one side of each pallet 3 is provided with a first slide block for being inserted into the first chute, and the side away from the first slide block is provided with a second slide block for being inserted into the first chute. inside the second slider.
托盘3包括底板31和若干个侧板32,底板31为镂空结构,底板31的下方设有竖直布置并与其固定的限位柱4,各侧板32均固定在底板31的上方并在任意相邻的两个侧板32之间预留间距以形成供工件放入的卡槽;各侧板32的内均均设有夹腔a,且各侧板32上的夹腔a通过管路5彼此连通;任意相邻的两个侧板32相互靠近的一侧侧壁上均设有与其夹腔a连通的气孔b。高压气流供给机构2与所述管路5可拆卸连接。The pallet 3 includes a bottom plate 31 and several side plates 32. The bottom plate 31 is a hollow structure. A limiting column 4 is arranged vertically below the bottom plate 31 and fixed thereto. Each side plate 32 is fixed above the bottom plate 31 and at any position. A gap is reserved between two adjacent side plates 32 to form a slot for the workpiece to be placed; each side plate 32 is provided with a clamping cavity a, and the clamping cavity a on each side plate 32 passes through the pipeline. 5 are connected with each other; the side walls of any two adjacent side plates 32 that are close to each other are provided with air holes b that are connected to the sandwich cavity a. The high-pressure air flow supply mechanism 2 is detachably connected to the pipeline 5 .
本发明是这样工作的:先将待清洗的工件分别放置到托盘3上的各卡槽内,并利用第一滑块、第二滑块分别与第一滑槽、第二滑槽配合使装满工件的托盘3沿水槽1的内侧壁滑入水槽内,并利用托盘3底部的限位柱4使任意相邻的两层托盘之间具有一定的高度空间;然后利用高压气流供给机构2向各夹腔a内部输送高压气流,以在各工件的两侧形成两股对流的气流,以利用该两股气流使该工件处于竖立状,从而使得该工件在清洗过程中除底部与托盘3接触外其他各部位均处于悬空状态,使其没有清洗死角,且水槽1内的水流在气流的作用下不断对工件形成冲刷,进而可以有效提高工件的清洗效果。The invention works like this: first place the workpieces to be cleaned into each slot on the pallet 3, and use the first slide block and the second slide block to cooperate with the first chute and the second chute respectively to make the assembly work. The pallet 3 filled with workpieces slides into the water tank along the inner wall of the water tank 1, and the limiting column 4 at the bottom of the pallet 3 is used to ensure that there is a certain height space between any two adjacent pallets; then the high-pressure air flow supply mechanism 2 is used to High-pressure airflow is delivered inside each clamping cavity a to form two convection airflows on both sides of each workpiece, so that the two airflows can be used to keep the workpiece in an upright position, so that during the cleaning process, the workpiece is in contact with the tray 3 except for the bottom All other parts are in a suspended state, so that there is no dead corner for cleaning, and the water flow in the water tank 1 continuously washes the workpiece under the action of the air flow, which can effectively improve the cleaning effect of the workpiece.
由上可知,本发明通过在水槽1内侧壁上设置相对布置的第一滑槽、第二滑槽,在托盘3上设置第一滑块和第二滑块,以利用第一滑块、第二滑块分别与第一滑槽、第二滑槽配合使得托盘3可以在水槽1内部滑上滑下,以便于对托盘3进行上料、下料动作;同时,通过对托盘3的结构进行设置,使得托盘3上具有多个卡槽,以用于放置待清洗工件,同时,利用高压气流供给机构2与管路5配合分别向各夹腔a内部输送高压气流,从而在各卡槽的内部形成两股相向流动的高压气流,以利用该两股气流使位于卡槽内的工件处于竖立状,没有清洗死角,进而有效提高工件的清洗效果。It can be seen from the above that in the present invention, the first slider and the second slider are arranged oppositely on the inner wall of the water tank 1, and the first slider and the second slider are provided on the tray 3 to utilize the first slider and the second slider. The two slide blocks cooperate with the first chute and the second chute respectively so that the tray 3 can slide up and down inside the water tank 1 to facilitate the loading and unloading of the tray 3; at the same time, by adjusting the structure of the tray 3 It is set up so that the tray 3 has multiple slots for placing the workpieces to be cleaned. At the same time, the high-pressure airflow supply mechanism 2 is used to cooperate with the pipeline 5 to deliver high-pressure airflow to the inside of each clamping cavity a, so that the workpieces to be cleaned are placed in each slot. Two high-pressure airflows flowing in opposite directions are formed inside, and the two airflows are used to keep the workpiece in the slot in an upright position without cleaning dead corners, thereby effectively improving the cleaning effect of the workpiece.
此外,本实施例中,管路5包括主管若干个与主管连通的支管,各支管与各侧板32的夹腔a一一对应并分别与对应的夹腔a连通,该结构的设置不仅可以有效提托盘3外观的整洁美观性,同时可以降低检修难度。In addition, in this embodiment, the pipeline 5 includes a main pipe and several branch pipes connected with the main pipe. Each branch pipe corresponds to the clamping cavity a of each side plate 32 and is connected to the corresponding clamping cavity a respectively. The arrangement of this structure can not only It effectively improves the clean and beautiful appearance of the pallet 3 and reduces the difficulty of maintenance.
本实施例中,任意一个支管均通过可自动控制开合度的控制阀与对应的夹腔a连通,以通过调整控制阀的开合度大小,控制相应夹腔a的进气量,从而调整相应气孔b的出气强度,以确保工件在清洗过程中始终处于竖立状态。In this embodiment, any branch pipe is connected to the corresponding sandwich chamber a through a control valve that can automatically control the opening and closing degree. By adjusting the opening and closing degree of the control valve, the air intake amount of the corresponding sandwich chamber a is controlled, thereby adjusting the corresponding air hole. b air outlet intensity to ensure that the workpiece is always upright during the cleaning process.
本实施例中,任意一个侧板32的两侧侧壁上均分别安装有用于检测卡槽内的工件是否与侧板32的侧壁抵靠的传感器,且当其中任意一个传感器检测到工件与侧板32的侧壁抵靠时,与该侧板32对应的控制阀控制其开合度增大,以增大起夹腔a的进气量,进而增强其气孔b的出气强度,以将工件向另一侧推动,以保证工件在清洗过程中始终处于竖立状态。In this embodiment, sensors for detecting whether the workpiece in the slot abuts against the side wall of the side plate 32 are respectively installed on both sides of any side plate 32, and when any one of the sensors detects that the workpiece is in contact with the side wall of the side plate 32, When the side wall of the side plate 32 is in contact, the control valve corresponding to the side plate 32 controls its opening and closing to increase, so as to increase the air intake volume of the clamping chamber a, thereby enhancing the air outlet intensity of its air hole b, so as to clamp the workpiece Push to the other side to ensure that the workpiece remains upright during the cleaning process.
本实施例中,卡槽的两端均设有与底板31固定的挡板6,且挡板6为镂空结构,以利用挡板6避免卡槽内的工件从卡槽的两端滑出。In this embodiment, baffles 6 fixed to the bottom plate 31 are provided at both ends of the slot, and the baffles 6 are hollow structures, so that the baffles 6 can prevent the workpieces in the slot from sliding out from both ends of the slot.
本实施例中,卡槽内部设有多个与底板31固定的挡板6,各挡板6均为镂空结构,且各挡板6在卡槽内部由其一端向其另一端间距布置以将卡槽分隔成多个槽腔,以提高托盘3的容纳量。In this embodiment, a plurality of baffles 6 fixed to the bottom plate 31 are provided inside the card slot. Each baffle 6 is a hollow structure, and each baffle 6 is arranged from one end to the other end of the card slot at a distance from one end to the other. The card slot is divided into multiple cavities to increase the capacity of the tray 3 .
本实施例中,任意一个托盘3的上盘面上均设有限位槽,且该限位槽与该托盘3上的限位柱4位于同一直线上,当各托盘3依次放入水槽1内时,位于上层的托盘3上的限位柱4可插入位于其下层的限位槽内,以起到良好的定位效果。In this embodiment, a limiting groove is provided on the upper surface of any tray 3, and the limiting groove is located on the same straight line as the limiting post 4 on the tray 3. When each tray 3 is placed in the water tank 1 in sequence, , the limiting column 4 located on the upper pallet 3 can be inserted into the limiting groove located on the lower level to achieve a good positioning effect.
本实施例中,高压气流供给机构2固定安装在水槽1的外壁上。In this embodiment, the high-pressure air flow supply mechanism 2 is fixedly installed on the outer wall of the water tank 1 .
以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,根据本发明的技术方案及其发明构思加以等同替换或改变,都应涵盖在本发明的保护范围之内。The above are only preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person familiar with the technical field can, within the technical scope disclosed in the present invention, implement the technical solutions of the present invention. Equivalent substitutions or changes of the inventive concept thereof shall be included in the protection scope of the present invention.
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