CN108889000A - A kind of slurry defoaming device and slurry defoaming method - Google Patents
A kind of slurry defoaming device and slurry defoaming method Download PDFInfo
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- CN108889000A CN108889000A CN201810630333.0A CN201810630333A CN108889000A CN 108889000 A CN108889000 A CN 108889000A CN 201810630333 A CN201810630333 A CN 201810630333A CN 108889000 A CN108889000 A CN 108889000A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
- B01D19/0021—Degasification of liquids by bringing the liquid in a thin layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
- B01D19/0042—Degasification of liquids modifying the liquid flow
- B01D19/0047—Atomizing, spraying, trickling
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Abstract
The present invention discloses a kind of slurry defoaming device and slurry defoaming method.Slurry defoaming device includes vacuum chamber, feed inlet is provided on the vacuum chamber, it further include film structure and the spray structure being arranged in the vacuum chamber, the slurry in the vacuum chamber is inputted to spray under the action of the spray structure in the film structure, the film structure enables to slurry film-like, and moved under film-forming state, the slurry passes through vacuum defoamation in the process of moving.Slurry defoaming device of the invention is sprayed the slurry in the film structure using spray structure, and in the vacuum chamber by the film structure setting, to guarantee slurry deaeration under vacuum in film forming procedure, equipment is simple and deaeration is more efficient.
Description
Technical field
The present invention relates to battery technology field more particularly to a kind of slurry defoaming devices and slurry defoaming method.
Background technique
Currently, the pulp of lithium ion battery defoaming method of the prior art includes two kinds.One is that slurry is placed on stirring
It is stirred in tank, and guarantees that the inner cavity of agitator tank is vacuum, while guaranteeing that mixing speed is slow, so that institute is discharged in the bubble in slurry
State slurry.In order to increase the velocity of discharge of slurry internal gas, second also is added in the slurry on this basis in the prior art
The adjuvants such as alcohol or isopropanol assist deaeration.This method is longer there are inclined heated plate and the lower deficiency of efficiency.It is another to be,
Using centrifugal process film deaeration technology deaeration, slurry deaeration under the action of centrifugal movement device.There are equipment to answer for this method
The higher deficiency of miscellaneous and energy consumption.
Summary of the invention
In view of this, a kind of simple slurry deaeration dress of and structure high-efficient one of the objects of the present invention is to provide deaeration
It sets.
The object of the invention is also to provide a kind of slurry defoaming methods that deaeration is high-efficient.
In order to achieve the above objectives, on the one hand, the present invention uses following technical scheme：
A kind of slurry defoaming device, including vacuum chamber are provided with feed inlet on the vacuum chamber, further include being arranged described
Film structure and spray structure in vacuum chamber, the slurry inputted in the vacuum chamber spray under the action of the spray structure
In the film structure, the film structure enables to slurry film-like, and moves under film-forming state, and the slurry exists
Pass through vacuum defoamation in mobile process.
Preferably, the spray structure includes the baffle of setting in the vacuum chamber, the high mud jacking conveyed from bottom to top
Material sprays under the barrier effect of the baffle from top to bottom in the film structure.
Preferably, the film structure includes the film forming face in vertical direction with angle setting, and the spray structure is located at
The top of the film forming face.
Preferably, the film structure includes temperature control portion, and the temperature control portion, which is arranged, does not flow through the slurry in the film forming face
The side of material, the temperature control portion adjust temperature of the slurry under film-forming state by adjusting the temperature of the film forming face.
Preferably, the temperature control portion includes the medium channel of circulation, and the temperature by adjusting medium in medium channel is adjusted
The temperature of film forming face.
Preferably, the medium channel includes total stand in channel, always goes out channel and setting in total stand in channel and described total
At least two bypass passages between channel out,
The flow direction of the slurry flowed through on the flow direction of medium in the bypass passage and the film forming face is opposite；
And/or
The film forming face include it is multiple, the side for not flowing through the slurry of each film forming face is close to setting at least one
Bypass passage described in item.
Preferably, the film forming face is configured to outer surface or the tapered surface of splay plate, and the spray structure is set
Set the outer surface in the splay plate or the top end of tapered surface.
Preferably, the outer surface of the splay plate or the top of tapered surface is arranged in the feed inlet, also wraps
Slurry structure for conveying is included, the slurry structure for conveying includes delivery pipe, and a part of the delivery pipe is arranged in the splayed
Plate inside or tapered surface inside, one end of the delivery pipe is connected to the feed inlet.
Preferably, the cavity wall of the vacuum chamber is configured to taper.
Preferably, the slurry defoaming device includes storage tank, and the storage tank can be connected to the vacuum chamber, described
Storage tank is for storing the slurry after removing bubble removing.
Preferably, it is provided with first pressure regulating device on the vacuum chamber, to adjust the pressure value in the vacuum chamber；
And/or
It is provided with the first liquid level detection device on the vacuum chamber, whether reaches pre- with the slurry detected in the vacuum chamber
It is quantitative；And/or
Second pressure regulating device is provided on the storage tank, to adjust the pressure value in storage tank；And/or
It is provided with the second liquid level detection device on the storage tank, whether reaches pre- with the slurry detected in the storage tank
It is quantitative；And/or
It is provided with pressure monitoring device on the slurry structure for conveying, to monitor the pressure for the slurry for being transported to the feeding port
Force value.
In order to achieve the above objectives, on the other hand, the present invention uses following technical scheme：
A method of deaeration is carried out to slurry using above-mentioned slurry defoaming device, is included the following steps：
S1, by adjust the pressure value of pressure value in the vacuum chamber and the slurry being transported on the spray structure with
Adjust the deaeration speed of the slurry under the structrural build up film-forming state of film.
Preferably, the slurry defoaming method further includes：Described in S0, the temperature adjusting by medium in adjusting medium channel
The temperature of film forming face；And/or
The slurry film forming defoaming method further includes the steps that after S1：S2, when the first liquid level in the vacuum chamber
Detection device detects that slurry reaches predetermined amount, and the slurry in the vacuum chamber is drained into storage tank.
Preferably, in S2, by the pressure value adjusted in the storage tank be less than the pressure value in the vacuum chamber with
Slurry in the vacuum chamber is drained into storage tank；And/or
The slurry defoaming method further includes the steps that after s 2：S3, when the second level sensing in the storage tank
Device detects that slurry reaches predetermined amount, and the storage tank being connected with the vacuum chamber is changed to another storage tank.
Preferably, in S1, the pressure value control of the vacuum chamber is -0.03Mpa~-0.085Mpa；And/or
In S1, the pressure value for being transported to the slurry on the spray structure is 0.1Mpa~0.8Mpa；And/or
In S0, the medium temperature is 7 DEG C~85 DEG C；And/or
In S2, the pressure value in the storage tank is -0.065Mpa~-0.09Mpa.
Slurry defoaming device of the invention is sprayed the slurry in the film structure using spray structure, and will
The film structure setting in the vacuum chamber, to guarantee slurry deaeration under vacuum in film forming procedure, equipment it is simple and
Deaeration is more efficient.
Slurry defoaming method of the invention, by adjusting the pressure value in the vacuum chamber and being transported to the spray structure
On slurry pressure value, the deaeration speed of the slurry under the structrural build up film-forming state of the film can be adjusted, adjusted
Method is simple.
Detailed description of the invention
By referring to the drawings to the description of the embodiment of the present invention, the above and other purposes of the present invention, feature and
Advantage will be apparent from.
Fig. 1 is the structural schematic diagram of slurry defoaming device in the specific embodiment of the invention.
In figure：
1, vacuum chamber；11, feed inlet；12, the first liquid level detection device；13, first pressure regulating device；
2, it is film-made structure；21, film forming face；22, temperature control portion；23, medium channel；231, total stand in channel；232, always go out channel；
233, bypass passage；
3, spray structure；31, baffle；
4, charging pump；
5, slurry structure for conveying；51, delivery pipe；52, pressure monitoring device；
6, storage tank；61, second pressure regulating device；62, the second liquid level detection device.
Specific embodiment
Below based on embodiment, present invention is described, it should be understood by one skilled in the art that provided herein
Attached drawing is provided to the purpose of explanation, and attached drawing is not necessarily drawn to scale.
Unless the context clearly requires otherwise, "include", "comprise" otherwise throughout the specification and claims etc. are similar
Word should be construed as the meaning for including rather than exclusive or exhaustive meaning；That is, be " including but not limited to " contains
Justice.
Shown in referring to Fig.1, slurry defoaming device of the invention is used for slurry deaeration, and then guarantees the slurry after deaeration
The membrane structure better quality of preparation.
The slurry defoaming device includes vacuum chamber 1, as shown in Figure 1, feed inlet 11 is provided on the vacuum chamber 1, institute
Stating slurry defoaming device further includes the film structure 2 being arranged in the vacuum chamber 1 and spray structure 3, inputs the vacuum chamber 1
Interior slurry sprays in the film structure 2 under the action of spray structure 3, and the film structure 2 enables to starch
Expect film-like, and moved under film-forming state, the slurry passes through vacuum defoamation, the spray structure 2 in the process of moving
Compared with the prior art centrifugal movement appliance arrangement is simpler, and it is de- to compare slow stirring for vacuum defoamation under slurry film-forming state
Bubble, deaeration are more efficient.
It is provided with first pressure regulating device 13 on the vacuum chamber 1, as shown, to adjust in the vacuum chamber 1
Pressure value, the vacuum degree for improving the vacuum chamber 1 can increase the deaeration speed of the slurry.
The film structure 2 includes the film forming face 21 in vertical direction with angle setting, as shown in Figure 1, the spray is tied
Structure 3 is located at the top of the film forming face 21, can control by controlling the film forming face 21 and the angle of vertical direction from upper
The flowing velocity of slurry of the lower spray in the film forming face 21, and then control deaeration efficiency and deaeration quality.
The film forming face 21 is configured to outer surface or the tapered surface of splay plate, and the feed inlet 11 is arranged in institute
The outer surface of splay plate or the top of tapered surface are stated, the splay plate is arranged in the spray structure 3
The top of the feeding port 11 is arranged in the top end of outer surface or tapered surface, the spray structure 3, by by it is described at
Film surface 21 is arranged to outer surface or the tapered surface of splay plate, so that can be to more using a spray structure 3
A film forming face 21 or the film forming face 21 of tapered surface spray, structure are simpler.Preferably, the cavity wall of the vacuum chamber 1 is configured to
1 wall of vacuum chamber chamber of taper, taper enables to the internal volume of the vacuum chamber 1 smaller, and then more rapid can control
The vacuum degree of the vacuum chamber.
The film structure 2 include temperature control portion 22, as shown in Figure 1, the temperature control portion 22 setting the film forming face 21 not
The side of the slurry is flowed through, the temperature control portion 22 adjusts slurry under film-forming state by adjusting the temperature of the film forming face 21
Temperature, the slurry at high operating temperatures viscosity reduce, be conducive to bubble abjection.
The temperature control portion 22 includes the medium channel 23 of circulation, as shown in Figure 1, by adjusting medium in medium channel 23
Temperature adjusts the temperature of film forming face 21, and the medium is, for example, water, and structure is simple and energy consumption is lower, and the medium logical 23 includes total
Stand in channel 231, total channel 232 out and at least two branch being arranged between total stand in channel 231 and total channel 232 out
The link position of paths 233, the bypass passage 233 and total stand in channel 231 is lower than the bypass passage 233 and described
Always go out the link position in channel 232, is flowed through on the flow direction of the medium in the bypass passage 233 and the film forming face 21
The flow direction of slurry is on the contrary, the increase of the heat exchanger time of the slurry and the medium, is more advantageous to and adjusts the slurry
Temperature, so that improving the deaeration speed of the slurry under the premise of not destroying the Ingredients Active of the slurry.The film forming
Including multiple, the side for not flowing through the slurry of each film forming face 21 is logical close at least one branch of setting in face 21
Road 233, to guarantee to flow through the deaeration effect of the slurry in each film forming face 21.
The spray structure 3 includes the baffle 31 being arranged in the vacuum chamber 1, as shown in Figure 1, the slurry deaeration fills
Setting further includes charging pump 4 and slurry structure for conveying 5, and the charging pump 4 is, for example, diaphragm pump or screw pump, the slurry conveying knot
Structure 5 includes delivery pipe 51, and one end of the delivery pipe 51 is connected with the charging pump 4, a part setting of the delivery pipe 51
In the inside of the splay plate or the inside of tapered surface, one end of the delivery pipe 51 and the feed inlet 11 connect
It is logical, the baffle 31 is rushed at from the feeding port 11 by the high-pressure slurry that the charging pump 4 conveys from bottom to top, the slurry exists
Spray arrives the film structure 2 from top to bottom under the gravity of the barrier effect and the slurry itself of the baffle 31
On, the spray structure 2 is more energy saving, and structure is simpler.
It is provided with pressure monitoring device 52 on the slurry structure for conveying 5, as shown in Figure 1, being transported to described send with monitoring
The pressure value of the slurry of material mouth 11, and then the slurry sprayed from feeding port 11 is controlled according to the monitor value of the pressure monitoring device 52
The pressure of material, to adjust the spray rate of the slurry, the speed of film forming face 21 described in the slurry flows is faster, the slurry
Deaeration speed it is slower.
The slurry defoaming device includes storage tank 6, as shown in Figure 1, the storage tank 6 can connect with the vacuum chamber 1
Logical, the storage tank 1 is for storing the slurry after removing bubble removing.The first liquid level detection device 12 is provided on the vacuum chamber 1,
To detect whether the slurry in the vacuum chamber 1 reaches predetermined amount, and then the slurry in the vacuum chamber 1 reaches predetermined value
Afterwards, it in time by the slurry water conservancy diversion in the true vestibule 1 to the storage tank 6, avoids flowing to the vacuum from the film forming face 21
The slurry of the bottom of chamber 1 did not had the film forming face 21.Second pressure regulating device 61 is provided on the storage tank, to adjust storage
Pressure value in batch can 6 controls the pressure value in the storage tank 6 lower than the pressure value in the vacuum chamber 1, so that institute
The slurry for stating 1 bottom of vacuum chamber flows in the storage tank 6 under self weight and pressure difference effect.It is provided on the storage tank 6
Second liquid level detection device 62, to detect whether the slurry in the storage tank 6 reaches predetermined amount, when in the storage tank 6
After slurry reaches predetermined value, the storage tank 6 connecting with the vacuum chamber 1 is replaced in time, is guaranteed and 1 phase of vacuum chamber
It being capable of storing in storage tank 6 even.When replacing the storage tank 6, stop deaeration.
A kind of method carrying out deaeration to slurry using above-mentioned slurry defoaming device of the invention, includes the following steps：
S1, the pressure value by adjusting pressure value and the slurry being transported on the spray structure 3 in the vacuum chamber 1
To adjust the deaeration speed of the slurry under the film-forming state formed in the film structure 2.
When the slurry defoaming device further includes medium channel 23, the slurry defoaming method further includes：S0, pass through tune
The temperature of medium adjusts the temperature of the film forming face 21 in section medium channel 23, and then adjusts the deaeration speed of different slurries.
When the slurry defoaming device further includes storage tank 6 and the first level sensing being arranged on the vacuum chamber 1 dress
When setting 12, the slurry film forming defoaming method further includes the steps that being arranged after S1：S2, when first in the vacuum chamber 1
Liquid level detection device 12 detects that slurry reaches predetermined amount, and the slurry in the vacuum chamber 1 is drained into storage tank 6.
When the slurry defoaming device further includes the second liquid level detection device 62 being arranged on the storage tank 6, institute
It states slurry defoaming method and further includes the steps that setting after s 2：S3, when the second liquid level detection device 62 in the storage tank 6
It detects that slurry reaches predetermined amount, the storage tank 6 being connected with the vacuum chamber 1 is changed to another storage tank 6.
Wherein, in S2, by adjusting the pressure value in the storage tank 6 less than the pressure value energy in the vacuum chamber 1
It is enough to drain into the slurry in the vacuum chamber 1 in storage tank 6.
Wherein, in S1, the pressure value control of the vacuum chamber 1 is -0.03Mpa~-0.085Mpa.
In S1, the pressure value for being transported to the slurry on the spray structure 3 is 0.1Mpa~0.8Mpa.
In S0, the medium temperature is 7 DEG C~85 DEG C；The slurry is pulp of lithium ion battery, when the slurry temperature
Degree is greater than 85 DEG C, and the additive in the slurry will be destroyed, and the slurry is reduced in hot room, viscosity, and it is de- to be conducive to bubble
Out.
In S2, the pressure value in the storage tank 6 is -0.065Mpa~-0.09Mpa.
Embodiment one
S1, the pressure for controlling vacuum chamber 1 are -0.045Mpa, slurry viscosity 6000mPa.s；
Temperature 60 C~70 DEG C of S2, control loop water；
S3, charging pump 4 is opened, controlling the pressure in delivery pipe 51 is 0.3MPa, and slurry is sprayed by feed inlet 11, passed through
Film forming face 21 forms film；
S4, slurry flow into storage tank 6, and slurry flows into 6 speed of storage tank, and less than or equal to deaeration speed, (slurry is forming a film
Flow velocity on face) when, control 6 pressure value of storage tank is less than the pressure value of the vacuum chamber 1, and it is big that slurry flows into 6 speed of storage tank
When deaeration speed, the pressure value of control storage tank 6 is -0.075Mpa~-0.09MPa, closes the vacuum port of vacuum chamber 1, benefit
Deaeration is carried out with the vacuum force of storage tank 6.
Embodiment two
S1, the pressure for controlling vacuum chamber 1 are -0.03MPa；
7 DEG C~12 DEG C of temperature of S2, control loop water；
S3, charging pump 4 is opened, controlling the pressure in delivery pipe 51 is 0.1MPa, and slurry is sprayed by feed inlet 11, passed through
Film forming face 21 forms film；
S4, slurry flow into storage tank 6, when slurry flows into 6 speed of storage tank less than or equal to deaeration speed, control storing
6 pressure value of tank is less than the pressure value of the vacuum chamber 1, when slurry flows into 6 speed of storage tank greater than deaeration speed, controls storage tank
6 pressure value be -0.075Mpa~-0.09MPa, close vacuum chamber 1 vacuum port, using storage tank 6 vacuum force into
Row deaeration.
Embodiment three
S1, the pressure for controlling vacuum chamber 1 are -0.085MPa；
75 DEG C~85 DEG C of temperature of S2, control loop water；
S3, charging pump 4 is opened, controlling the pressure in delivery pipe 51 is 0.8MPa, and slurry is sprayed by feed inlet 11, passed through
Film forming face 21 forms film；
S4, slurry flow into storage tank 6, when slurry flows into 6 speed of storage tank less than or equal to deaeration speed, control storing
6 pressure value of tank is less than the pressure value of the vacuum chamber 1, when slurry flows into 6 speed of storage tank greater than deaeration speed, controls storage tank
6 pressure value be -0.075Mpa~-0.09MPa, close vacuum chamber 1 vacuum port, using storage tank 6 vacuum force into
Row deaeration.
Those skilled in the art will readily recognize that above-mentioned each preferred embodiment can be free under the premise of not conflicting
Ground combination, superposition.
The above description is only a preferred embodiment of the present invention, is not intended to restrict the invention, for those skilled in the art
For, the invention can have various changes and changes.All any modifications made within the spirit and principles of the present invention are equal
Replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (15)
1. a kind of slurry defoaming device, which is characterized in that including vacuum chamber, be provided with feed inlet on the vacuum chamber, further include
Film structure and spray structure in the vacuum chamber is set, inputs the slurry in the vacuum chamber in the spray structure
For the lower spray of effect in the film structure, the film structure enables to slurry film-like, and moves under film-forming state,
The slurry passes through vacuum defoamation in the process of moving.
2. slurry defoaming device according to claim 1, which is characterized in that the spray structure includes setting described true
Baffle in cavity, spray arrives the system to the high-pressure slurry conveyed from bottom to top from top to bottom under the barrier effect of the baffle
In membrane structure.
3. slurry defoaming device according to claim 2, which is characterized in that the film structure include in vertical direction with
The film forming face of angle setting, the spray structure are located at the top of the film forming face.
4. slurry defoaming device according to claim 3, which is characterized in that the film structure includes temperature control portion, described
The side that the film forming face does not flow through the slurry, the temperature that the temperature control portion passes through the adjusting film forming face is arranged in temperature control portion
Adjust temperature of the slurry under film-forming state.
5. slurry defoaming device according to claim 4, which is characterized in that the temperature control portion includes that the medium of circulation is logical
Road, the temperature by adjusting medium in medium channel adjust the temperature of film forming face.
6. slurry defoaming device according to claim 5, which is characterized in that the medium channel includes total stand in channel, total
Channel and at least two bypass passages being arranged between total stand in channel and total channel out out,
The flow direction of the slurry flowed through on the flow direction of medium in the bypass passage and the film forming face is opposite；With/
Or,
The film forming face include it is multiple, the side for not flowing through the slurry of each film forming face is close to being arranged at least one institute
State bypass passage.
7. slurry defoaming device according to claim 3, which is characterized in that the film forming face is configured to splay plate
Perhaps the outer surface of the splay plate or the top of tapered surface is arranged in the tapered surface spray structure for outer surface
Top.
8. slurry defoaming device according to claim 7, which is characterized in that the feed inlet is arranged described splay
The outer surface of plate or the top of tapered surface further include slurry structure for conveying, and the slurry structure for conveying includes delivery pipe, institute
The inside of the splay plate or the inside of tapered surface, one end of the delivery pipe is arranged in a part for stating delivery pipe
It is connected to the feed inlet.
9. slurry defoaming device according to claim 8, which is characterized in that the cavity wall of the vacuum chamber is configured to taper.
10. slurry defoaming device according to claim 8, which is characterized in that the slurry defoaming device includes storage tank,
The storage tank can be connected to the vacuum chamber, and the storage tank is for storing the slurry after removing bubble removing.
11. slurry defoaming device according to claim 10, which is characterized in that be provided with first pressure on the vacuum chamber
Regulating device, to adjust the pressure value in the vacuum chamber；And/or
It is provided with the first liquid level detection device on the vacuum chamber, whether reaches predetermined with the slurry detected in the vacuum chamber
Amount；And/or
Second pressure regulating device is provided on the storage tank, to adjust the pressure value in storage tank；And/or
It is provided with the second liquid level detection device on the storage tank, whether reaches predetermined with the slurry detected in the storage tank
Amount；And/or
It is provided with pressure monitoring device on the slurry structure for conveying, to monitor the pressure for the slurry for being transported to the feeding port
Value.
12. a kind of method for carrying out deaeration to slurry using slurry defoaming device described in one of claim 1-11, feature
It is, includes the following steps：
S1, by the pressure value that adjusts pressure value in the vacuum chamber and the slurry being transported on the spray structure to adjust
The deaeration speed of slurry under the structrural build up film-forming state of film.
13. slurry defoaming method according to claim 12, which is characterized in that using slurry described in claim 8 or 9
Defoaming device, the slurry defoaming method further include：S0, the film forming face is adjusted by the temperature for adjusting medium in medium channel
Temperature；And/or
Using the slurry defoaming device described in claim 11, the slurry film forming defoaming method further includes the step after S1
Suddenly：S2, detect that slurry reaches predetermined amount when the first liquid level detection device in the vacuum chamber, by the slurry in the vacuum chamber
Material drains into storage tank.
14. slurry defoaming method according to claim 13, which is characterized in that in S2, by adjusting the storage tank
In pressure value be less than the vacuum chamber in pressure value the slurry in the vacuum chamber to be drained into storage tank；And/or
Using the slurry defoaming device described in claim 11, the slurry defoaming method further includes the steps that after s 2：S3,
When the second liquid level detection device in the storage tank detects that slurry reaches predetermined amount, the storing being connected with the vacuum chamber
Tank is changed to another storage tank.
15. slurry defoaming method according to claim 14, which is characterized in that
In S1, the pressure value control of the vacuum chamber is -0.03Mpa~-0.085Mpa；And/or
In S1, the pressure value for being transported to the slurry on the spray structure is 0.1Mpa~0.8Mpa；And/or
In S0, the medium temperature is 7 DEG C~85 DEG C；And/or
In S2, the pressure value in the storage tank is -0.065Mpa~-0.09Mpa.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111424306A (en) * | 2020-04-13 | 2020-07-17 | 厦门通富微电子有限公司 | Bubble stripping device and electroplating solution electroplating system |
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| CN204251524U (en) * | 2014-11-25 | 2015-04-08 | 山西北方兴安化学工业有限公司 | The dynamic defoaming device of a kind of coated feed liquid |
| CN208711121U (en) * | 2018-06-19 | 2019-04-09 | 银隆新能源股份有限公司 | A kind of slurry defoaming device |
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| CN111424306A (en) * | 2020-04-13 | 2020-07-17 | 厦门通富微电子有限公司 | Bubble stripping device and electroplating solution electroplating system |
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Application publication date: 20181127 |