CN108872399B - Positioning system and method for ultrasonic scanning microscope - Google Patents

Abstract

The invention relates to a positioning system and method for an ultrasonic scanning microscope. The system includes an X-direction positioning component fixedly arranged in front of a water tank of the ultrasonic scanning microscope and parallel to the front panel of the water tank; A YZ direction positioning component on the side and parallel to the side panel of the sink, the X direction positioning component and the YZ direction positioning component are electrically connected to the processor respectively; the processor is used for positioning according to the X direction The component obtains the X-direction positioning data of the component under test from the measurement value of the component under test in the water tank, and obtains the Y positioning data of the component under test based on the measurement value of the component under test from the YZ direction positioning component. Direction positioning data and Z direction positioning data. The technical solution provided by the present invention can accurately know the position of the object under test in the ultrasonic scanning microscope water tank, thereby improving the efficiency of adjusting the probe position and avoiding collision between the probe and the object under test.

Description

Positioning system and method for ultrasonic scanning microscope

Technical field

The present invention relates to the technical field of ultrasonic scanning microscopes, and in particular to a positioning system and method for ultrasonic scanning microscopes.

Background technique

Before using a conventional ultrasonic scanning microscope to scan the part to be tested, you need to first place the part to be tested into the water tank under the probe of the ultrasonic scanning microscope, and then adjust the X, Y, and Z direction slide rails of the ultrasonic scanning microscope through the control software so that the probe Located at a suitable position above the piece to be tested. However, during the actual operation of adjusting the probe position, the operator needs to observe the real-time data on the control software interface and the actual position of the probe many times, and gradually adjust the software setting data based on the position information observed with the naked eye, which is inefficient. In addition, due to experimental needs, the object to be tested is usually located below the water surface in the water tank. When the probe approaches the water surface or enters the water, due to reasons such as refraction and observation angle, the operator may deviate from the actual position of the probe, especially It is very likely that there will be an observation error in the distance between the probe and the part under test in the Z direction. If you continue to adjust the probe position in the original way, the probe may collide with the piece under test and cause scratches or damage.

Contents of the invention

In order to accurately know the position of the object under test in the water tank of the ultrasonic scanning microscope, thereby improving the efficiency of adjusting the probe position and avoiding collision between the probe and the object under test, the present invention provides a positioning system and method for an ultrasonic scanning microscope.

The present invention provides a positioning system for an ultrasonic scanning microscope, which includes an X-direction positioning component fixedly arranged in front of a water tank of the ultrasonic scanning microscope and parallel to the front panel of the water tank; The side panels of the sink are parallel to the YZ direction positioning component, and the X direction positioning component and the YZ direction positioning component are electrically connected to the processor respectively.

The processor is configured to obtain the X-direction positioning data of the device under test based on the measurement value of the device under test in the water tank by the X-direction positioning component, and to measure the device under test based on the YZ-direction positioning component. The Y-direction positioning data and Z-direction positioning data of the part to be tested are respectively obtained from the measured values of the parts.

The beneficial effects of the positioning system for an ultrasonic scanning microscope provided by the present invention are: determining the X-direction positioning data of the object to be tested in the water tank through the X-direction positioning component located in front of the ultrasonic scanning microscope, and determining the The direction positioning component determines the Y-direction positioning data and Z-direction positioning data of the piece to be tested. Since the ultrasonic scanning microscope probe, the water tank, and the part under test in the water tank can be located in the same coordinate system, after the positioning data of the part under test is determined, there is no need to go back and forth between the control software interface and the workbench when adjusting the probe. Instead of observing, the three-dimensional relative distance between the probe and the part to be tested can be obtained based on the positioning data, and the three-dimensional relative distance or a safety value based on this distance can be directly input in the control software interface, so that the probe can quickly and accurately move to the position where the part to be tested can be A safe working position for scanning. This improves the efficiency of adjusting the probe position and avoids collision between the probe and the object under test.

On the basis of the above technical solution, the present invention can also make the following improvements.

Further, the X-direction positioning assembly includes a first guide rail, a first laser pointer, a first slider, a first sliding rheostat, and a first sliding piece; the first guide rail is fixedly disposed in front of the sink and connected with the sink. The front panel is parallel, the first slider is slidably disposed in the chute of the first guide rail, the first guide rail is provided with a first strip through hole on the side facing the sink, and the first strip through hole is provided on the side facing away from the sink. The first sliding rheostat is fixedly provided on the side, and the first laser pointer is slidably installed in the first strip-shaped through hole. One end of the first laser pointer points vertically to the front panel, and the other end is fixed to the front panel. On the first slider, one end of the first slider is fixed on the first slider, and the other end is in contact with the resistance wire of the first sliding rheostat; the first sliding rheostat is connected to the processing electrical connection.

The processor is configured to obtain the X-direction positioning data according to the changing resistance of the first sliding rheostat when the first laser pointer moves in the X-direction and points to the object under test in the water tank. .

The beneficial effect of adopting the above further solution is that the first slider with the first laser pointer is slidably fixed in the slide groove of the first guide rail, so that the first laser pointer points to the center line of the object to be tested, for example, in the X direction. At this time, the first sliding piece moving together with the first sliding block will change the output resistance of the first sliding rheostat. It should be noted that the first sliding piece and the first sliding rheostat are in point contact, and the first sliding piece and the first laser pointer are located on the same plane perpendicular to the front panel of the sink. Therefore, the changing resistance value of the first sliding rheostat can reflect the X-direction position information of the first laser pointer, that is, the X-direction position information of the device under test. The processor can determine the X-direction positioning data of the device under test based on this resistance change information.

Further, the length of the first sliding varistor is the same as the length of the front panel, and the two ends of the first sliding varistor are aligned with the transverse ends of the front panel, and the surface of the first guide rail is provided with A scale matching the length of the first sliding rheostat.

The beneficial effect of adopting the above further solution is that since the length of the first sliding rheostat is the same as that of the front panel of the sink, when the first sliding piece moves with the first laser pointer and the first sliding block, the corresponding scale of the first sliding piece can be read. The value method directly determines the X-direction positioning data of the part under test, without the need to change the resistance value for conversion, which is more intuitive and makes the positioning method of the part under test more flexible and convenient for operators.

Further, the YZ direction positioning assembly includes two parallel and spaced apart second guide rails, two parallel and spaced apart support rods, a second sliding rheostat, a second slide, and a second laser pointer pointing toward the water tank. Z-direction positioning assembly; the two second guide rails are arranged on one side of the sink and are parallel to the side panel of the sink, and the distance between the two second guide rails and the side panel is the same, The two ends of the two second guide rails are fixedly connected by the two support rods respectively. The second sliding rheostat is fixedly provided on the side of the second guide rail facing away from the water tank. The Z-direction positioning assembly is Both ends are respectively slidably arranged in the slide grooves of the two second guide rails. One end of the second slide is fixed on the Z-direction positioning component, and the other end is in contact with the resistance wire of the second sliding rheostat. ; The second sliding rheostat is electrically connected to the processor.

Further, the Z-direction positioning assembly further includes a third guide rail, a second slide block, a third sliding rheostat and a third slide piece; both ends of the third guide rail are respectively slidably disposed on the slides of the two second guide rails. In the groove, the second slider is slidably disposed in the slide groove of the third guide rail, and the second laser pointer pointing vertically toward the side panel is fixed on the second slider. The third sliding varistor is fixedly provided on the side of the guide rail. One end of the third sliding piece is fixed on the second sliding block, and the other end is in contact with the resistance wire of the third sliding varistor. The second One end of the sliding piece is fixed on the third guide rail, and the other end is in contact with the resistance wire of the second sliding rheostat; the third sliding rheostat is electrically connected to the processor.

The processor is configured to obtain the Y-direction positioning data according to the changing resistance of the second sliding rheostat when the second laser pointer moves in the Y-direction and points to the object under test in the water tank. , when the second laser pointer moves in the Z direction and points to the object under test, the Z direction positioning data is obtained according to the changing resistance of the third sliding rheostat.

The beneficial effects of adopting the above further solution are: firstly, the second laser pointer and the second slider are located in the initial position, that is, at the bottom of the third guide rail, and the third guide rail is slid in the slide grooves of the two second guide rails, so that the second The laser pointer points to the center line of the part to be tested, for example, in the Y direction. At this time, the second sliding piece moving together with the third guide rail will change the output resistance of the second sliding rheostat. It should be noted that the second sliding piece and the second sliding rheostat are in point contact, and the second sliding piece and the second laser pointer are located on the same plane perpendicular to the side panel of the sink. Therefore, the changing resistance value of the second sliding rheostat can reflect the Y-direction position information of the second laser pointer, that is, the Y-direction position information of the device under test. The processor can determine the Y-direction positioning data of the device under test based on this resistance change information.

After the Y-direction positioning data is determined, the second slider with the second laser pointer is slid and fixed in the slide groove of the third guide rail, so that the second laser pointer points to, for example, the Z-direction apex position of the object to be tested. At this time, the third sliding piece moving together with the third guide rail will change the output resistance of the third sliding rheostat. It should be noted that the third sliding piece is in point contact with the third sliding rheostat, and the third sliding piece is parallel to the XY plane and perpendicular to the second laser pointer. Therefore, the changing resistance value of the third sliding rheostat can reflect the Z-direction position information of the second laser pointer, that is, the Z-direction position information of the device under test. The processor can determine the Z-direction positioning data of the device under test based on this resistance change information.

Further, the length of the second sliding varistor is the same as the length of the side panel, and the two ends of the second sliding varistor are aligned with the transverse ends of the side panel, and the surface of the second guide rail is provided with A scale matching the length of the second sliding rheostat.

The beneficial effect of adopting the above further solution is that since the second sliding rheostat has the same length as the side panel of the sink, when the second sliding piece moves with the second laser pointer and the third guide rail, the corresponding scale value of the second sliding piece can be read. The method directly determines the Y-direction positioning data of the part to be tested, without the need to change the resistance value for conversion, which is more intuitive, and also makes the positioning method of the part to be tested more flexible and convenient for operators.

Further, a second strip-shaped through hole is provided on the side of the third guide rail, and a threaded hole is provided on the surface of the second slider facing the second strip-shaped through hole. The third guide rail is connected to the second strip-shaped through hole. The slide block is fixedly connected through bolts that pass through the second strip-shaped through hole and are tightened in the threaded hole.

The beneficial effect of adopting the above further solution is that since the second laser pointer slides up and down in the third guide rail along with the second slider, in order to avoid the second laser pointer and the second slider from sliding down due to gravity, the second laser pointer can be When the laser pointer points accurately to the piece to be tested, the second slide block is fixed on the third guide rail through bolts.

Further, the length of the third sliding varistor is the same as the height of the side panel, and both ends of the third sliding varistor are aligned with the vertical ends of the side panel, and the third guide rail is provided on the surface. There is a scale matching the length of the third sliding rheostat.

The beneficial effect of adopting the above further solution is that since the third sliding rheostat is at the same height as the side panel of the sink, when the third sliding piece moves with the second laser pointer and the second sliding block, the corresponding scale of the third sliding piece can be read. The value method directly determines the Z-direction positioning data of the part under test, without the need to change the resistance value for conversion, which is more intuitive and makes the positioning method of the part under test more flexible and convenient for operators.

The present invention also provides a positioning method for an ultrasonic scanning microscope, which is applied in the above positioning system. The method includes:

Step 1: Obtain the X-direction positioning data of the part to be tested based on the measurement value of the part to be tested in the water tank by the X-direction positioning component;

Step 2: Obtain the Y-direction positioning data and Z-direction positioning data of the device under test according to the measurement value of the device under test by the YZ-direction positioning component.

Further, the X-direction positioning component includes a first laser pointer and a first sliding rheostat used in conjunction, and the YZ-direction positioning component includes a second laser pointer, a second sliding rheostat, and a third sliding rheostat used in conjunction.

The specific implementation of step 1 is: when the first laser pointer moves in the X direction and points to the object under test in the water tank, the X direction is obtained according to the changing resistance of the first sliding rheostat. Location data.

The specific implementation of step 2 is: when the second laser pointer moves in the Y direction and points to the object under test in the water tank, the Y direction is obtained according to the changing resistance of the second sliding rheostat. Positioning data; when the second laser pointer moves in the Z direction and points to the object under test, the Z direction positioning data is obtained according to the changing resistance of the third sliding rheostat.

Description of drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without exerting any creative effort.

Figure 1 is a schematic structural diagram of an ultrasonic scanning microscope according to an embodiment of the present invention;

Figure 2 is a schematic structural diagram of a positioning system for an ultrasonic scanning microscope according to an embodiment of the present invention;

Figure 3 is a schematic circuit connection diagram of a positioning system for an ultrasonic scanning microscope according to an embodiment of the present invention;

Figure 4 is a schematic structural diagram of the X-direction positioning assembly according to the embodiment of the present invention;

Figure 5 is a schematic structural diagram of the YZ direction positioning assembly according to the embodiment of the present invention;

Figure 6 is a schematic structural diagram of the YZ direction positioning assembly according to the embodiment of the present invention;

FIG. 7 is a schematic flowchart of a positioning method for an ultrasonic scanning microscope according to an embodiment of the present invention.

In the drawings, the parts represented by each number are listed as follows:

11. Probe, 12. X-direction probe slide rail, 13. Y-direction probe slide rail, 14. Z-direction probe slide rail, 2. Water tank, 3. Part to be tested, 4. X-direction positioning component, 41. First guide rail , 411. The first strip through hole, 42. The first laser pointer, 43. The first slider, 44. The first sliding rheostat, 45. The first sliding piece, 5. YZ direction positioning component, 51. The second guide rail , 52. Support rod, 53. Second sliding rheostat, 54. Second slide, 55. Third guide rail, 551. Second strip through hole, 56. Second laser pointer, 57. Second slider, 571 , threaded hole, 58, third sliding rheostat, 59, third sliding plate.

Detailed ways

The principles and features of the present invention are described below with reference to the accompanying drawings. The examples cited are only used to explain the present invention and are not intended to limit the scope of the present invention.

As shown in Figure 1, an ultrasonic scanning microscope usually includes a workbench and a transparent water tank located under the workbench. Taking the AM300 basic type of PVA ultrasonic scanning microscope as an example, the workbench includes an X-direction probe slide rail 12, a Y-direction probe slide rail 13 and a Z-direction probe slide rail 14. The probe 11 is installed on the Z-direction probe slide rail 14, pointing In the water tank 2 below, the slide rails in each direction are adjusted through the control software so that the probe 11 finally points to the object to be tested 3 in the water tank 2 .

As shown in Figures 2 and 3, the positioning system for an ultrasonic scanning microscope provided by the embodiment of the present invention includes an X-direction positioning component 4 fixedly arranged in front of the water tank 2 of the ultrasonic scanning microscope and parallel to the front panel of the water tank 2, and The YZ-direction positioning component 5, the X-direction positioning component 4 and the YZ-direction positioning component 5 are fixedly arranged on the side of the sink 2 and parallel to the side panel of the sink 2, and are electrically connected to the processor respectively.

The processor is used to obtain the X-direction positioning data of the piece to be tested 3 according to the measurement value of the piece to be tested 3 in the water tank 2 by the Y-direction positioning data and Z-direction positioning data of test piece 3.

In this embodiment, the X-direction positioning data of the part under test in the water tank is determined through the X-direction positioning component located in front of the ultrasonic scanning microscope, and the Y-direction positioning of the part under test is determined through the YZ-direction positioning component located on the side of the ultrasonic scanning microscope. data and Z-direction positioning data. Since the ultrasonic scanning microscope probe, the water tank, and the part under test in the water tank can be located in the same coordinate system, after the positioning data of the part under test is determined, there is no need to go back and forth between the control software interface and the workbench when adjusting the probe. Instead of observing, the three-dimensional relative distance between the probe and the part to be tested can be obtained based on the positioning data, and the three-dimensional relative distance or a safety value based on this distance can be directly input into the control software interface, so that the probe can quickly and accurately move to the position where the test object can be measured. A safe working position for document scanning. This improves the efficiency of adjusting the probe position and avoids collision between the probe and the object under test.

The processor can be a processor that supports the operation of the above control software, and the processor can be connected to a display device. For example, the control software runs on a PC, and the X-direction positioning component and YZ-direction positioning component are also connected to this PC. Correspondingly, the obtained positioning data in the X, Y, and Z directions can also be embedded and displayed on this control software to facilitate the operator to adjust the position of the probe.

During the actual operation, for example, it is determined that the X, Y, and Z direction positioning data of the part to be tested 3 are 50, 50, and 10 respectively, while the positioning data of the probe is known in the control software interface and is 30, 30, and 30. Then it can be determined that the relative positioning data between the two is 20, 20, -20. Since a certain safety margin of 5 needs to be ensured in the Z direction, the safety value of the relative positioning data is 20, 20, -15. By inputting the above safety value in the control software interface, the probe 2 will quickly and accurately move to the safe scanning distance directly above the piece to be tested 3.

Preferably, as shown in FIG. 4 , the X-direction positioning assembly 4 includes a first guide rail 41 , a first laser pointer 42 , a first slider 43 , a first sliding rheostat 44 and a first slide 45 ; the first guide rail 41 Fixedly disposed in front of the sink 2 and parallel to the front panel of the sink 2, the first guide rail 41 is disposed horizontally, and the first slider 43 is slidably disposed in the slide groove of the first guide rail 41. A guide rail 41 is provided with a first strip through hole 411 on the side facing the water tank 2. The first sliding rheostat 44 is fixedly provided on the side facing away from the water tank 2. The first laser pointer 42 is slidably provided on the side. In the first strip-shaped through hole 411, one end of the first laser pointer 42 points vertically to the front panel, the other end is fixed on the first slider 43, and one end of the first slider 45 is fixed on The other end of the first sliding block 43 is in contact with the resistance wire of the first sliding rheostat 44; the first sliding rheostat 44 is electrically connected to the processor.

The processor is configured to obtain the first laser pointer 42 according to the changing resistance of the first sliding rheostat 44 when the first laser pointer 42 moves in the X direction and points to the object under test 3 in the water tank 2 . X direction positioning data.

The first slider 43 with the first laser pointer 42 is slidably fixed in the slide groove of the first guide rail 41 so that the first laser pointer 42 points to the center line of the object to be tested 3 in the X direction, for example. At this time, the first sliding piece 45 that moves together with the first sliding block 43 will change the output resistance of the first sliding rheostat 44 . It should be noted that the first sliding piece 45 and the first sliding rheostat 44 are in point contact, and the first sliding piece 45 and the first laser pointer 42 are located on the same plane perpendicular to the front panel of the sink 2 . Therefore, the changing resistance of the first sliding rheostat 44 can reflect the X-direction position information of the first laser pointer 42 , that is, the X-direction position information of the object under test 3 . The processor can determine the X-direction positioning data of the device under test 3 based on this resistance change information.

Preferably, the side of the first guide rail 41 facing away from the sink 2 is also provided with a strip-shaped through hole, and the side of the first slider 43 facing the strip-shaped through hole is provided with a threaded hole. The first guide rail 41 and the first slider 43 The connection is fixed by bolts passing through the strip-shaped through holes and tightened in the threaded holes.

Since the first slider 43 slides in the first guide rail 41, in order to avoid the instability of the first slider 43 due to the influence of the external environment, when it is determined that the first laser pointer 42 is accurately pointed at the object to be tested 3, the first laser pointer 42 can be bolted to the first slider 43. The slider 43 is fixed on the first guide rail 41 .

Preferably, the length of the first sliding varistor 44 is the same as the length of the front panel, and the two ends of the first sliding varistor 44 are aligned with the transverse ends of the front panel. The surface of the first guide rail 41 is provided with a A sliding rheostat with 44 lengths matched to the scale.

Since the first sliding rheostat 44 has the same length as the front panel of the sink 2, when the first sliding piece 45 moves with the first laser pointer 42 and the first sliding block 43, the corresponding scale value of the first sliding piece 45 can be read. Directly determining the X-direction positioning data of the piece to be tested 3 does not require conversion by changing the resistance value, which is more intuitive. It also makes the positioning method of the piece to be tested 3 more flexible and convenient for operators.

It should be noted that the scale can be a series of scale values marked or attached to the surface of the guide rail.

Preferably, as shown in Figures 5 and 6, the YZ direction positioning assembly 5 includes two parallel and spaced apart second guide rails 51, two parallel and spaced apart support rods 52, a second sliding rheostat 53, a second sliding rheostat 53, The piece 54 and the Z-direction positioning assembly including the second laser pointer 56 pointing to the sink 2; the two second guide rails 51 are arranged on one side of the sink 2 and are parallel to the side panel of the sink 2, and the second guide rails 51 are set horizontally. And the distance between the two second guide rails 51 and the side panel is the same. The two ends of the two second guide rails 51 are fixedly connected by two support rods 52 respectively. One second guide rail 51 is fixedly provided with a third guide rail 51 facing away from the side of the sink 2. Two sliding rheostat 53, since the object to be tested 3 is usually placed on the bottom panel of the water tank 2, the second guide rail 51 here is usually a second guide rail lower in the Z direction, and the two ends of the Z direction positioning assembly They are respectively slidably arranged in the slide grooves of the two second guide rails 51. One end of the second sliding piece 54 is fixed on the Z-direction positioning component, and the other end is in contact with the resistance wire of the second sliding rheostat 53; the second sliding rheostat 53 is electrically connected to the processor.

Preferably, the Z-direction positioning assembly further includes a third guide rail 55, a second slider 57, a third sliding rheostat 58 and a third slide 59; both ends of the third guide rail 55 are respectively slidably disposed on the two second guide rails. 51, the third guide rail 55 is arranged vertically, and the second slider 57 is slidably arranged in the chute of the third guide rail 55. The second slider 57 is fixed with a second laser pointing vertically toward the side panel. The pen 56 has a third sliding rheostat 58 fixed on the side of the third guide rail 55. One end of the third sliding piece 59 is fixed on the second slider 57, and the other end is in contact with the resistance wire of the third sliding rheostat 58. The second One end of the sliding piece 54 is fixed on the third guide rail 55, and the other end is in contact with the resistance wire of the second sliding varistor 53; the third sliding varistor 58 is electrically connected to the processor.

The processor is configured to obtain the Y-direction positioning data according to the changing resistance of the second sliding rheostat 53 when the second laser pointer 56 moves in the Y-direction and points to the object to be tested 3 in the water tank 2. When the second laser pointer 56 moves in the Z direction and points to the object under test 3, the Z direction positioning data is obtained according to the changing resistance of the third sliding rheostat 58.

First, place the second laser pointer 56 and the second slider 57 in the initial position, that is, at the bottom of the third guide rail 55 , slide the third guide rail 55 in the slide grooves of the two second guide rails 51 , and make the second laser pointer 56 point For example, at the center line of the Y-direction of the piece to be tested 3. At this time, the second sliding piece 54 moving together with the third guide rail 55 will change the output resistance of the second sliding rheostat 53 . It should be noted that the second sliding piece 54 and the second sliding rheostat 53 are in point contact, and the second sliding piece 54 and the second laser pointer 56 are located on the same plane perpendicular to the side panel of the water tank 2 . Therefore, the changing resistance of the second sliding rheostat 53 can reflect the Y-direction position information of the second laser pointer 56 , that is, the Y-direction position information of the object under test 3 . The processor can determine the Y-direction positioning data of the device under test 3 based on this resistance change information.

After the Y-direction positioning data is determined, the second slider 57 with the second laser pointer 56 is slid and fixed in the slide groove of the third guide rail 55 so that the second laser pointer 56 points to, for example, the Z-direction apex position of the object to be tested 3 at. At this time, the third sliding piece 59 moving together with the third guide rail 55 will change the output resistance of the third sliding rheostat 58 . It should be noted that the third sliding piece 59 is in point contact with the third sliding rheostat 58 , and the third sliding piece 59 is parallel to the XY plane and perpendicular to the second laser pointer 56 . Therefore, the changing resistance of the third sliding rheostat 58 can reflect the Z-direction position information of the second laser pointer 56 , that is, the Z-direction position information of the object under test 3 . The processor can determine the Z-direction positioning data of the device under test 3 based on this resistance change information.

Preferably, the length of the second sliding varistor 53 is the same as the length of the side panel, and the two ends of the second sliding varistor 53 are aligned with the lateral ends of the side panel, and the second guide rail 51 A scale matching the length of the second sliding varistor 53 is provided on the surface.

Since the second sliding rheostat 53 has the same length as the side panel of the sink 2, when the second sliding piece 54 moves with the second laser pointer 56 and the third guide rail 55, the corresponding scale value of the second sliding piece 54 can be read directly. Determining the Y-direction positioning data of the device under test 3 does not require conversion by changing the resistance value, which is more intuitive. It also makes the positioning method of the device under test 3 more flexible and convenient for operators.

Preferably, a strip-shaped through hole is provided on the side of the second guide rail 51 facing away from the water tank 2, and threaded holes are provided at both ends of the side of the third guide rail 55 facing away from the water tank 2. The second guide rail 51 and the third guide rail 55 pass through the through holes. Pass through the strip-shaped through hole and tighten the bolts in the threaded hole to secure the connection.

Since the third guide rail 55 slides in the second guide rail 51 , in order to avoid the instability of the third guide rail 55 due to the influence of the external environment, when it is determined that the second laser pointer 56 is accurately pointed at the object to be tested 3 , the third guide rail 55 can be fixed with bolts. fixed on the second guide rail 51.

Preferably, a second strip-shaped through hole 551 is provided on the side of the third guide rail 55 , and a threaded hole 571 is provided on the surface of the second slider 57 facing the second strip-shaped through hole 551 . The third guide rail 55 and the second slider 57 The connection is fixed by bolts passing through the second strip-shaped through hole 551 and tightened in the threaded hole 571 .

Since the second laser pointer 56 slides up and down in the third guide rail 55 along with the second slider 57, in order to avoid the second laser pointer 56 and the second slider 57 from sliding down due to gravity, it is possible to confirm that the second laser pointer 56 is accurate. When pointing toward the object to be tested 3, the second slide block 57 is fixed on the third guide rail 55 through bolts.

Preferably, the length of the third sliding varistor 58 is the same as the height of the side panel, and the two ends of the third sliding varistor 58 are aligned with the vertical ends of the side panel, and the third guide rail 55 A scale matching the length of the third sliding varistor 58 is provided on the surface.

Since the height of the third sliding rheostat 58 is the same as that of the side panel of the sink 2, when the third sliding piece 59 moves with the second laser pointer 56 and the second sliding block 57, the corresponding scale value of the third sliding piece 59 can be read. Directly determining the Z-direction positioning data of the device under test 3 does not require conversion by changing the resistance value, which is more intuitive. It also makes the positioning method of the device under test 3 more flexible and convenient for operators.

It should be noted that the scale values of the scales on the above-mentioned guide rails can be calibrated according to the original three-dimensional position coordinate system of the probe, so that the three-dimensional coordinate system composed of the scale is consistent with the three-dimensional coordinate system of the probe and the three-dimensional coordinates obtained by measuring the resistance of the rheostat. The system matches.

An embodiment of the present invention also provides a positioning method applied to the above-mentioned ultrasonic scanning microscope positioning system. As shown in Figure 7, the method includes:

Step 1: Obtain the X-direction positioning data of the part to be tested based on the measurement value of the part to be tested in the water tank by the X-direction positioning component.

Step 2: Obtain the Y-direction positioning data and Z-direction positioning data of the device under test according to the measurement value of the device under test by the YZ-direction positioning component.

Preferably, the X-direction positioning component includes a first laser pointer and a first sliding rheostat used in conjunction, and the YZ-direction positioning component includes a second laser pointer, a second sliding rheostat, and a third sliding rheostat used in conjunction.

The specific implementation of step 1 is: when the first laser pointer moves in the X direction and points to the object under test in the water tank, the X direction is obtained according to the changing resistance of the first sliding rheostat. Location data.

The specific implementation of step 2 is: when the second laser pointer moves in the Y direction and points to the object under test in the water tank, the Y direction is obtained according to the changing resistance of the second sliding rheostat. Positioning data; when the second laser pointer moves in the Z direction and points to the object under test, the Z direction positioning data is obtained according to the changing resistance of the third sliding rheostat.

The reader will understand that in the description of this specification, reference to the description of the terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" is intended to be described in connection with the embodiment or example. The specific features, structures, materials, or characteristics of are included in at least one embodiment or example of the invention. In this specification, the schematic expressions of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, those skilled in the art may combine and combine different embodiments or examples and features of different embodiments or examples described in this specification unless they are inconsistent with each other.

The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection of the present invention. within the range.

Claims (3)

1. The positioning system for the ultrasonic scanning microscope is characterized by comprising an X-direction positioning component (4) fixedly arranged in front of a water tank (2) of the ultrasonic scanning microscope and parallel to a front panel of the water tank (2), and a YZ-direction positioning component (5) fixedly arranged at the side of the water tank (2) and parallel to a side panel of the water tank (2), wherein the X-direction positioning component (4) and the YZ-direction positioning component (5) are respectively and electrically connected with a processor;

the processor is used for obtaining X-direction positioning data of the to-be-detected piece (3) in the water tank (2) according to the measured value of the X-direction positioning component (4), and respectively obtaining Y-direction positioning data and Z-direction positioning data of the to-be-detected piece (3) according to the measured value of the YZ-direction positioning component (5) to the to-be-detected piece (3);

the X-direction positioning assembly (4) comprises a first guide rail (41), a first laser pen (42), a first sliding block (43), a first sliding rheostat (44) and a first sliding sheet (45); the first guide rail (41) is fixedly arranged in front of the water tank (2) and is parallel to the front panel of the water tank (2), the first sliding block (43) is slidably arranged in the sliding groove of the first guide rail (41), a first strip-shaped through hole (411) is formed in the side surface, facing the water tank (2), of the first guide rail (41), a first sliding rheostat (44) is fixedly arranged on the side surface, facing away from the water tank (2), of the first guide rail, the first laser pen (42) is slidably arranged in the first strip-shaped through hole (411), one end of the first laser pen (42) vertically points to the front panel, the other end of the first laser pen is fixedly arranged on the first sliding block (43), and one end of the first sliding block (45) is fixedly arranged on the first sliding block (43), and the other end of the first sliding block (45) is in butt joint with a resistance wire of the first sliding rheostat (44); the first slide rheostat (44) is electrically connected with the processor;

the processor is used for obtaining the X-direction positioning data according to the change resistance value of the first sliding rheostat (44) when the first laser pen (42) moves in the X-direction and points to the piece (3) to be detected in the water tank (2);

the length of the first slide rheostat (44) is the same as that of the front panel, two ends of the first slide rheostat (44) are aligned with two transverse ends of the front panel, and a graduated scale matched with the length of the first slide rheostat (44) is arranged on the surface of the first guide rail (41);

the YZ-direction positioning assembly (5) comprises two parallel and spaced second guide rails (51), two parallel and spaced support rods (52), a second slide rheostat (53), a second slide sheet (54) and a Z-direction positioning assembly, wherein the Z-direction positioning assembly comprises a second laser pen (56) pointing to the water tank (2); the two second guide rails (51) are arranged on one side of the water tank (2) and are parallel to the side panels of the water tank (2), the distances between the two second guide rails (51) and the side panels are the same, two ends of the two second guide rails (51) are fixedly connected through two supporting rods (52) respectively, the second sliding varistors (53) are fixedly arranged on the side surface, facing away from the water tank (2), of one second guide rail (51), two ends of the Z-direction positioning assembly are respectively arranged in the sliding grooves of the two second guide rails (51) in a sliding mode, one end of the second sliding sheet (54) is fixed on the Z-direction positioning assembly, and the other end of the second sliding sheet is in butt joint with resistance wires of the second sliding varistors (53); the second slide rheostat (53) is electrically connected with the processor;

the length of the second slide rheostat (53) is the same as that of the side panel, two ends of the second slide rheostat (53) are aligned with two transverse ends of the side panel, and a graduated scale matched with the length of the second slide rheostat (53) is arranged on the surface of the second guide rail (51);

the Z-direction positioning assembly further comprises a third guide rail (55), a second sliding block (57), a third sliding rheostat (58) and a third sliding sheet (59); the two ends of the third guide rail (55) are respectively arranged in the sliding grooves of the two second guide rails (51) in a sliding manner, the second sliding blocks (57) are arranged in the sliding grooves of the third guide rail (55) in a sliding manner, the second laser pen (56) which vertically points to the side panels is fixedly arranged on the second sliding blocks (57), the third sliding varistors (58) are fixedly arranged on the side surfaces of the third guide rail (55), one ends of the third sliding blocks (59) are fixed on the second sliding blocks (57), the other ends of the third sliding blocks are in butt joint with resistance wires of the third sliding varistors (58), one ends of the second sliding blocks (54) are fixed on the third guide rail (55), and the other ends of the second sliding blocks are in butt joint with the resistance wires of the second sliding varistors (53); the third slide rheostat (58) is electrically connected with the processor;

the processor is configured to obtain the Y-direction positioning data according to a variation resistance value of the second sliding rheostat (53) when the second laser pen (56) moves in the Y-direction and points to the piece (3) to be measured in the water tank (2), and obtain the Z-direction positioning data according to a variation resistance value of the third sliding rheostat (58) when the second laser pen (56) moves in the Z-direction and points to the piece (3) to be measured;

the side surface of the third guide rail (55) is provided with a second strip-shaped through hole (551), the surface of the second slider (57) facing the second strip-shaped through hole (551) is provided with a threaded hole (571), and the third guide rail (55) and the second slider (57) are fixedly connected through a bolt penetrating through the second strip-shaped through hole (551) and screwed in the threaded hole (571);

the length of the third slide rheostat (58) is the same as the height of the side panel, two ends of the third slide rheostat (58) are aligned with the vertical two ends of the side panel, and a graduated scale matched with the length of the third slide rheostat (58) is arranged on the surface of the third guide rail (55).

2. A positioning method for an ultrasound scanning microscope, applied to the positioning system of the ultrasound scanning microscope according to claim 1, characterized in that the method comprises:

step 1, obtaining X-direction positioning data of a piece to be detected in a water tank according to a measured value of the piece to be detected in the water tank by an X-direction positioning component;

and 2, respectively obtaining Y-direction positioning data and Z-direction positioning data of the to-be-detected piece according to the measured value of the YZ-direction positioning component to the to-be-detected piece.

3. The positioning method for an ultrasonic scanning microscope according to claim 2, wherein the X-direction positioning assembly comprises a first laser pen and a first slide rheostat used in cooperation, and the YZ-direction positioning assembly comprises a second laser pen, a second slide rheostat and a third slide rheostat used in cooperation;

the specific implementation of the step 1 is as follows: when the first laser pen moves in the X direction and points to the to-be-detected piece in the water tank, the X-direction positioning data are obtained according to the change resistance value of the first sliding rheostat;

the specific implementation of the step 2 is as follows: when the second laser pen moves in the Y direction and points to the piece to be detected in the water tank, the Y-direction positioning data are obtained according to the change resistance value of the second sliding rheostat, and when the second laser pen moves in the Z direction and points to the vertex position of the piece to be detected, the Z-direction positioning data are obtained according to the change resistance value of the third sliding rheostat.