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CN108872157B - A side-polished open-loop PCF-SPR sensor - Google Patents

A side-polished open-loop PCF-SPR sensor Download PDF

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CN108872157B
CN108872157B CN201810360037.3A CN201810360037A CN108872157B CN 108872157 B CN108872157 B CN 108872157B CN 201810360037 A CN201810360037 A CN 201810360037A CN 108872157 B CN108872157 B CN 108872157B
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CN108872157A (en
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夏历
杨曌
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59Transmissivity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02295Microstructured optical fibre
    • G02B6/02314Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
    • G02B6/02342Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
    • G02B6/02347Longitudinal structures arranged to form a regular periodic lattice, e.g. triangular, square, honeycomb unit cell repeated throughout cladding
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59Transmissivity
    • G01N2021/5903Transmissivity using surface plasmon resonance [SPR], e.g. extraordinary optical transmission [EOT]

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Abstract

本发明公开了一种侧面抛光开环型PCF‑SPR传感器,包括纤芯和包覆于纤芯外部的包层,纤芯同包层不同心,在包层上设有沿纤芯轴方向排列的空气孔;空气孔包括一个第一空气孔、多个第二空气孔及多个第三空气孔,第一空气孔位于光纤横截面正中心,第二空气孔围绕第一空气孔呈层数为K的环形N角结构,第三空气孔对称地位于纤芯两侧,取代第二空气孔位置;在光纤侧面设置抛光平面,在抛光平面上设有开环;开环上镀有传感膜,开环作为传感通道。本发明采用侧面抛光光纤端面和开环结合的方式,SPR传感层极大靠近于纤芯,能高振幅或高波长灵敏度探测如液态氧、液态CO2、含氟类有机物等折射率低于1.3的物质,且能多通道传感,扩大了现有PCF‑SPR传感器的应用范围。

The invention discloses a side-polished open-loop PCF‑SPR sensor, which comprises a fiber core and a cladding covering the outside of the fiber core. The air hole; the air hole includes a first air hole, a plurality of second air holes and a plurality of third air holes, the first air hole is located in the center of the optical fiber cross section, and the second air hole is in layers around the first air hole It is an annular N-angle structure of K, and the third air hole is symmetrically located on both sides of the fiber core, replacing the position of the second air hole; a polished plane is set on the side of the fiber, and an open ring is set on the polished plane; the open ring is coated with a sensor Membrane, open ring as sensing channel. The invention adopts the method of combining side polished optical fiber end face and open loop, the SPR sensing layer is very close to the fiber core, and can detect liquid oxygen, liquid CO 2 , and fluorine-containing organic substances with a refractive index lower than 1.3 substances, and capable of multi-channel sensing, expanding the application range of existing PCF‑SPR sensors.

Description

一种侧面抛光开环型PCF-SPR传感器A side-polished open-loop PCF-SPR sensor

技术领域technical field

本发明涉及生化检测和光纤传感技术领域,更具体地,涉及一种侧面抛光开环型PCF-SPR传感器。The invention relates to the technical fields of biochemical detection and optical fiber sensing, and more particularly relates to a side-polished open-loop PCF-SPR sensor.

背景技术Background technique

表面等离子体共振(Surface Plasmon Resonance,简称SPR)传感技术是一种先进的光学感测技术。传播在金属和电介质界面的表面等离激元(Surface Plasmon,简称SP)对入射光以及待测介质折射率的变化极其敏感,基于此原理制造了大量SPR传感器。传统的SPR传感器例如棱镜型由于其体积庞大,不适合基于移动光学和机械部件的应用领域,这种局限性导致了在20世纪90年代出现了基于光纤的SPR传感器。通常是先剥除普通光纤的包层,然后在纤芯上镀上金膜或银膜层,主要利用从纤芯泄露的倏逝场与外界物质相互作用实现传感。近年来,光子晶体光纤(PCF)的出现,为新型的SPR传感器提供了巨大的潜力。与传统光纤相比较,PCF体积小巧,设计灵活多样,具有特殊的多孔结构和导模机制,可容纳样品以气体或液体的形式存在于纤芯附近的空气孔中用于高灵敏度传感。PCF-SPR传感器能有效地解决基于传统光纤或波导的SPR传感器的相位匹配问题,并且与荧光传感器相比,PCF-SPR传感器具有更高灵敏度、实时快速、被测物无需标记、可远程监控等众多优点,因此被广泛应用于生物科技、药物筛选、环境监测、食品安全等各个领域。专利名称为“一种光纤表面等离子体共振传感检测装置”(专利申请号200820212280.2)的专利是实现PCF-SPR传感器的典型代表。自2006年,加拿大的Hassani等人提出首个PCF-SPR传感器结构以来,目前为止已提出了多种新颖的SPR-PCF传感器结构设计,具有各自的结构特点和较好的性能应用。目前已有的PCF-SPR传感器折射率测量范围大都高于1.30,导致无法测量一些低折射率物质(薄膜、液体CO2、低折射率气溶胶粒子等)。此外,多通道SPR传感器检测多重分析物时相邻通道之间容易互相干扰,导致SPR共振光谱曲线展宽,同时还存在多个共振峰,使得实际系统的信噪比降低,存在参数间交叉敏感等问题。且大多数PCF-SPR传感器在应用方面不突出,且实用性不强。如今,迫切需要设计一款具有灵敏度高,抗干扰,集成性好,多通道测量,满足灵活性、实用性要求的PCF-SPR传感器。Surface Plasmon Resonance (SPR) sensing technology is an advanced optical sensing technology. Surface plasmons (Surface Plasmon, SP for short) propagating at the interface between metal and dielectric are extremely sensitive to incident light and changes in the refractive index of the medium to be measured. A large number of SPR sensors have been manufactured based on this principle. Conventional SPR sensors such as the prism type are not suitable for applications based on moving optical and mechanical parts due to their bulky size. This limitation led to the emergence of fiber-optic-based SPR sensors in the 1990s. Usually, the cladding of the ordinary optical fiber is stripped first, and then a gold or silver film is plated on the fiber core. The evanescent field leaked from the fiber core interacts with external substances to achieve sensing. In recent years, the advent of photonic crystal fibers (PCFs) offers great potential for novel SPR sensors. Compared with traditional optical fibers, PCF is small in size, flexible in design, and has a special porous structure and guided mode mechanism, which can accommodate samples in the form of gas or liquid in the air holes near the fiber core for high-sensitivity sensing. PCF-SPR sensor can effectively solve the phase matching problem of SPR sensor based on traditional optical fiber or waveguide, and compared with fluorescence sensor, PCF-SPR sensor has higher sensitivity, real-time fast, no need to mark the measured object, remote monitoring, etc. Due to its many advantages, it is widely used in various fields such as biotechnology, drug screening, environmental monitoring, and food safety. The patent titled "An Optical Fiber Surface Plasmon Resonance Sensing Device" (Patent Application No. 200820212280.2) is a typical representative of the realization of PCF-SPR sensors. Since Canada's Hassani et al. proposed the first PCF-SPR sensor structure in 2006, a variety of novel SPR-PCF sensor structure designs have been proposed so far, with their own structural characteristics and better performance applications. Most existing PCF-SPR sensors have a refractive index measurement range higher than 1.30, which makes it impossible to measure some low-refractive-index substances (films, liquid CO 2 , low-refractive-index aerosol particles, etc.). In addition, when a multi-channel SPR sensor detects multiple analytes, adjacent channels are likely to interfere with each other, resulting in the broadening of the SPR resonance spectrum curve, and there are multiple resonance peaks at the same time, which reduces the signal-to-noise ratio of the actual system, and there is cross-sensitivity between parameters, etc. question. And most of the PCF-SPR sensors are not outstanding in application, and the practicability is not strong. Nowadays, it is urgent to design a PCF-SPR sensor with high sensitivity, anti-interference, good integration, multi-channel measurement, and meet the requirements of flexibility and practicability.

发明内容Contents of the invention

针对上述缺陷,本发明提供一种侧面抛光开环型PCF-SPR传感器,旨在解决现有PCF-SPR传感器灵敏度不高的技术问题。In view of the above defects, the present invention provides a side-polished open-loop PCF-SPR sensor, which aims to solve the technical problem of low sensitivity of the existing PCF-SPR sensor.

为解决上述技术问题,本发明提供了一种侧面抛光开环型PCF-SPR传感器,包括:In order to solve the above technical problems, the invention provides a side polished open-loop PCF-SPR sensor, comprising:

纤芯和包覆于纤芯外部的包层,纤芯同包层不同心,在包层上设有沿纤芯轴方向排列的空气孔;空气孔包括一个第一空气孔、多个第二空气孔及多个第三空气孔,第一空气孔位于光纤横截面正中心,第二空气孔围绕第一空气孔呈层数为K的环形N角结构排列,第三空气孔通过取代第二空气孔位置对称地位于纤芯两侧,取代第二空气孔位置;在光纤侧面设置有通过切平和抛光处理后形成抛光平面,在抛光平面上设有开环;,开环上镀有传感膜,开环作为传感通道。The fiber core and the cladding covering the outside of the fiber core, the fiber core and the cladding are not concentric, and the cladding is provided with air holes arranged along the direction of the fiber core axis; the air holes include a first air hole, a plurality of second Air holes and a plurality of third air holes, the first air hole is located in the center of the optical fiber cross section, the second air hole is arranged around the first air hole in an annular N-angle structure with layers K, the third air hole replaces the second The position of the air hole is symmetrically located on both sides of the fiber core, replacing the position of the second air hole; a polished plane is formed on the side of the fiber after cutting and polishing, and an open ring is provided on the polished plane; the open ring is coated with a sensor Membrane, open ring as sensing channel.

优选地,抛光平面位于靠近纤芯的一侧。Preferably, the polishing plane is located on a side close to the fiber core.

优选地,在纤芯中心引入设置有第四空气孔,且第四空气孔直径小于与第二空气孔直径大小比值小于1。Preferably, a fourth air hole is introduced into the center of the fiber core, and the ratio of the diameter of the fourth air hole to the diameter of the second air hole is less than 1.

优选地,开环截面为矩形,开环尺寸可根据被测物质分子大小确定。Preferably, the cross-section of the open ring is rectangular, and the size of the open ring can be determined according to the molecular size of the substance to be measured.

优选地,全部或者部分第三空气孔镀有传感膜,用于作为另一传感通道,且第三空气孔直径大于第二空气孔直径。Preferably, all or part of the third air hole is coated with a sensing film for serving as another sensing channel, and the diameter of the third air hole is larger than that of the second air hole.

优选地,利用液体的毛细现象或加压方式在第三空气孔中填充热光系数高于光纤材料热光系数两个数量级的液体。Preferably, the third air hole is filled with a liquid having a thermo-optic coefficient two orders of magnitude higher than the thermo-optic coefficient of the optical fiber material by means of liquid capillary phenomenon or pressurization.

优选地,一个传感通道上用于注入有被测物质,另一传感通道用于上注入有参考物质,提高传感器的抗外界干扰能力。Preferably, one sensing channel is used to inject the measured substance, and the other sensing channel is used to inject the reference substance, so as to improve the anti-interference ability of the sensor.

优选地,两个传感通道用于注入被测物质,传感通道中传感膜根据被测物质被测参数确定,实现同时测量被测物质不同参数。Preferably, the two sensing channels are used to inject the measured substance, and the sensing film in the sensing channel is determined according to the measured parameters of the measured substance, so as to realize simultaneous measurement of different parameters of the measured substance.

优选地,传感膜为多层膜结构。Preferably, the sensing film is a multilayer film structure.

优选地,每个空气孔间间距为Λ,第一空气孔和第二空气孔半径尺寸大小范围均为0.4Λ-0.6Λ,第三空气孔半径尺寸大小范围为0.6Λ-1.2Λ,第四空气孔半径尺寸大小范围为0.1Λ-0.3Λ,开环深度和宽度大小范围为0.5Λ-2Λ。Preferably, the distance between each air hole is Λ, the radius size range of the first air hole and the second air hole is 0.4Λ-0.6Λ, the radius size range of the third air hole is 0.6Λ-1.2Λ, and the fourth air hole radius size range is 0.6Λ-1.2Λ. The size range of air hole radius is 0.1Λ-0.3Λ, and the size range of open ring depth and width is 0.5Λ-2Λ.

总体而言,通过本发明所构思的以上技术方案与现有技术相比,能够取得下列有益效果:Generally speaking, compared with the prior art, the above technical solutions conceived by the present invention can achieve the following beneficial effects:

1、本发明采用侧面抛光的光纤端面和开环结合的方式,SPR传感层在在X和Y两个方向上仅位于开环表面宽度上,极大靠近于纤芯部位,相比SPR层整个平铺于侧面抛光表面上类传感器,本发明提供的传感器在低折射率下测量灵敏度得到极大提高。1. The present invention adopts the combination of side-polished optical fiber end face and open loop. The SPR sensing layer is only located on the width of the open loop surface in the X and Y directions, which is very close to the fiber core. Compared with the SPR layer The entire sensor is laid flat on the side polished surface, and the measurement sensitivity of the sensor provided by the invention is greatly improved under low refractive index.

2、抛光平面和开环位于靠近纤芯的一侧,光入射到光纤时,促使纤芯处激发的基模和金属/介质层激发的等离子模式更容易发生共振,从而得到被测物质在一定折射率下损耗随入射光波长变化明显的共振峰。2. The polished plane and the open ring are located on the side close to the fiber core. When the light is incident on the fiber, the fundamental mode excited at the fiber core and the plasmon mode excited by the metal/medium layer are more likely to resonate, so that the measured substance can be obtained in a certain A resonant peak in which the loss of the refractive index varies significantly with the wavelength of the incident light.

3、在纤芯处引入第四空气孔,用来增加探测开环内低折射率溶液的灵敏度,实现高灵敏度传感。3. A fourth air hole is introduced at the fiber core to increase the sensitivity of detecting low-refractive-index solutions in the open loop and realize high-sensitivity sensing.

4、采用矩形开环的好处是平坦的表面能很好的控制金属膜的沉积,除去靠近矩形开环底部的部分空气孔使纤芯外露,可促使纤芯能量泄漏至金属层中从而提高检测灵敏度。开环入口的大小可根据被测物分子大小来具体设计,小于入口尺寸的被测物分子可通过入口自动穿透通道,使得开环起到过滤作用。4. The advantage of using a rectangular open ring is that the flat surface can well control the deposition of the metal film, and removing part of the air holes near the bottom of the rectangular open ring exposes the fiber core, which can promote the leakage of the fiber core energy into the metal layer and improve detection. sensitivity. The size of the open-loop entrance can be specifically designed according to the size of the analyte molecules, and the analyte molecules smaller than the entrance size can automatically penetrate the channel through the entrance, so that the open-loop can filter.

5、引入纤芯左右两侧第三空气孔,可实现多通道传感,满足实用性和灵活性要求。开环破坏结构对称性,引起双折射并破坏原来的简并模式,基模的X偏振和Y偏振分开,从而实现双参数测量,解决了两个参数的交叉敏感问题。5. The introduction of the third air hole on the left and right sides of the fiber core can realize multi-channel sensing and meet the requirements of practicality and flexibility. The ring opening breaks the structural symmetry, causes birefringence and destroys the original degenerate mode, and the X-polarization and Y-polarization of the fundamental mode are separated, thereby realizing dual-parameter measurement and solving the problem of cross-sensitivity of the two parameters.

6、通过改变开环表面涂覆材料、空气孔排列、空气孔尺寸及开环的尺寸,进而可以实现低于1.3折射率的物质的检测,该传感器突破了现有同类传感器折射率探测下限高于1.3的限制,可探测如液态氧(折射率为1.22)、液态二氧化碳(折射率为1.20)、含氟类有机物(折射率低于1.3)或低折射率气溶胶粒子等物质,并且能够实现多通道传感,有望应用于新型薄膜研发、大气湿度和温度检测、微样品检测、大气雾霾检测等多种实际应用中,扩大了现有PCF-SPR传感器的应用范围。6. By changing the open-ring surface coating material, air hole arrangement, air hole size and open-ring size, the detection of substances with a refractive index lower than 1.3 can be realized. This sensor breaks through the lower detection limit of the existing similar sensors. Within the limit of 1.3, it can detect substances such as liquid oxygen (refractive index 1.22), liquid carbon dioxide (refractive index 1.20), fluorine-containing organic compounds (refractive index lower than 1.3) or aerosol particles with low refractive index, and can realize Multi-channel sensing is expected to be applied to a variety of practical applications such as the development of new thin films, atmospheric humidity and temperature detection, micro-sample detection, and atmospheric haze detection, expanding the application range of existing PCF-SPR sensors.

附图说明Description of drawings

下面结合附图和具体实施方式对本发明的技术方案作进一步具体说明。The technical solutions of the present invention will be further specifically described below in conjunction with the accompanying drawings and specific embodiments.

图1为本发明提供的侧面抛光开环型PCF-SPR传感器的横截面示意图;Fig. 1 is the schematic cross-sectional view of the side polishing open-loop PCF-SPR sensor provided by the present invention;

图2为本发明提供的实验检测系统装置的示意图;Fig. 2 is the schematic diagram of the experimental detection system device provided by the present invention;

其中,1:纤芯,2:第一空气孔,3:金属膜,4:第二空气孔,5:第三空气孔,6:第四空气孔,7:开环,8:抛光端面,9:环形六角结构,10:宽谱光源或近红外激光器,11:起偏器,12:传输光纤,13:耦合器,14:传感光纤,15:光谱分析仪,16:计算机。Among them, 1: fiber core, 2: first air hole, 3: metal film, 4: second air hole, 5: third air hole, 6: fourth air hole, 7: open loop, 8: polished end face, 9: Ring hexagonal structure, 10: Broad-spectrum light source or near-infrared laser, 11: Polarizer, 12: Transmission fiber, 13: Coupler, 14: Sensing fiber, 15: Spectrum analyzer, 16: Computer.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

本发明的目的是提供一种高灵敏度的,可探测低折射率物质,满足灵活性、实用性要求的侧面抛光开环型PCF-SPR传感器,旨在解决现有的PCF-SPR传感器灵敏度低、无法探测低折射率分析物、实用性不强等缺点,有望应用于新型薄膜研发、大气湿度和温度检测、微样品检测、大气雾霾检测等实际应用中。The purpose of the present invention is to provide a high-sensitivity side-polished open-ring PCF-SPR sensor that can detect low-refractive-index substances and meet the requirements of flexibility and practicability. Due to the shortcomings of being unable to detect low-refractive index analytes and poor practicability, it is expected to be used in practical applications such as the development of new thin films, atmospheric humidity and temperature detection, micro-sample detection, and atmospheric haze detection.

如图1所示,光纤背景材料采用石英,光纤包括纤芯1和包覆于纤芯外部的包层,纤芯1同包层不同心。在包层上设有沿纤芯1轴向排列的空气孔,空气孔包括第一空气孔2、第二空气孔4、第三空气孔5;第一空气孔2位于光纤横截面正中心,第二空气孔4围绕第一空气孔2呈层数为K的环形N角结构排列,其中,K、N均为大于2的整数,第三空气孔5均匀对称分布在纤芯1左右两侧,取代第二空气孔4;在靠近纤芯的光纤侧面设置有通过切平和抛光处理后形成抛光平面,在抛光平面的中央朝纤芯方向设有开环。在本实施例中,第二空气孔4围绕第一空气孔呈层数为4的环形六角结构9排列。As shown in FIG. 1 , the background material of the optical fiber is quartz, and the optical fiber includes a core 1 and a cladding covering the outside of the core, and the core 1 and the cladding are not concentric. The cladding is provided with air holes arranged axially along the fiber core 1, the air holes include a first air hole 2, a second air hole 4, and a third air hole 5; the first air hole 2 is located at the center of the fiber cross section, The second air holes 4 are arranged around the first air holes 2 in an annular N-angle structure with layers K, wherein K and N are both integers greater than 2, and the third air holes 5 are evenly and symmetrically distributed on the left and right sides of the fiber core 1 , instead of the second air hole 4; on the side of the optical fiber close to the core, a polished plane is formed after cutting and polishing, and an open ring is provided in the center of the polished plane toward the core. In this embodiment, the second air holes 4 are arranged around the first air holes in an annular hexagonal structure 9 with four layers.

在制作该光纤过程中,采用光纤侧边抛磨技术,将光纤端面打磨、抛光成平整的抛光端面8,然后在端面中央处抛磨出矩形开环7,经过抛磨的光纤用特殊的光纤夹具固定之后利用镀膜设备在矩形抛磨区域平面镀上一层厚度为20-40nm的金属膜3作为SPR传感膜,用作SPR探测用的溶液通道或其他类型的传感通道。In the process of making the optical fiber, the optical fiber side polishing technology is used to polish and polish the end face of the optical fiber into a flat polished end face 8, and then a rectangular open ring 7 is polished at the center of the end face. The polished optical fiber is made of a special optical fiber After the fixture is fixed, a layer of metal film 3 with a thickness of 20-40nm is plated on the plane of the rectangular polishing area by the coating equipment as the SPR sensing film, which is used as a solution channel for SPR detection or other types of sensing channels.

本发明采用侧面抛光光纤端面和开环结合的方式,采用开环结构,SPR传感层在横向x方向仅开环底部宽度上集中于纤芯,在低折射率下测量振幅灵敏度相比SPR层整个平铺于侧面抛光表面上得到极大提高。The invention adopts the method of combining the side polished fiber end face and the open loop, adopts the open loop structure, the SPR sensing layer concentrates on the fiber core only in the width of the bottom of the open loop in the transverse x direction, and measures the amplitude sensitivity under low refractive index compared with the SPR layer Overall laying is greatly improved on side polished surfaces.

本发明的另一实施例中,开环为矩形,采用矩形开环的好处是平坦的表面能很好的控制金属膜的沉积。开环入口的大小可根据被测物质分子大小来具体设计,小于入口尺寸的被测物质分子可通过入口自动穿透通道,开环起到溶液过滤作用,可以实现检测大气中低折射率气溶胶粒子。In another embodiment of the present invention, the open ring is rectangular, and the advantage of using a rectangular open ring is that the flat surface can well control the deposition of the metal film. The size of the open-loop entrance can be specifically designed according to the size of the measured substance molecule. The measured substance molecules smaller than the entrance size can automatically penetrate the channel through the entrance. The open-loop acts as a solution filter, which can detect low refractive index aerosols in the atmosphere. particle.

在本发明提供的另一实施例中,第三空气孔内壁镀有厚度为30-60nm的传感膜,可以在所有第三空气孔中镀有传感膜,或者在部分第三空气孔中镀有传感膜,作为该PCF-SPR传感器的另一探测通道,由于开环破坏结构对称性,引起双折射并破坏原来的简并模式,基模的X偏振和Y偏振分开,从而实现双参数测量,解决了两个参数的交叉敏感问题。第三空气孔与第二空气孔直径大小比值大于1,大孔更利于镀膜操作和传感介质的填充,增加了实用性。In another embodiment provided by the present invention, the inner wall of the third air hole is coated with a sensing film with a thickness of 30-60nm, and the sensing film can be coated in all the third air holes, or in some of the third air holes Coated with a sensing film, as another detection channel of the PCF-SPR sensor, due to the open ring breaking the structural symmetry, causing birefringence and destroying the original degenerate mode, the X polarization and Y polarization of the fundamental mode are separated, thereby achieving dual Parameter measurement, which solves the problem of cross-sensitivity of two parameters. The diameter ratio of the third air hole to the second air hole is greater than 1, and the large hole is more conducive to the coating operation and the filling of the sensing medium, which increases the practicality.

本发明的另一实施例中,纤芯中心引入第四空气孔,且第四空气孔与第二空气孔直径大小比值小于1,用来增加探测开环内低折射率溶液的灵敏度。In another embodiment of the present invention, a fourth air hole is introduced into the center of the fiber core, and the ratio of the diameter of the fourth air hole to the second air hole is less than 1, so as to increase the sensitivity of detecting the low refractive index solution in the open loop.

作为进一步的应用方案,开环和第三空气孔可根据不同实用性需求对其处理作为不同类型的探测传感通道。As a further application scheme, the open loop and the third air hole can be treated as different types of detection and sensing channels according to different practical requirements.

作为该PCF-SPR传感器的应用,可利用液体的毛细现象或加压方式将热光系数较高的液体注入探测光纤的第三空气孔通道作为温度通道,选取热光系数高于光纤材料热光系数两个数量级的液体,热光系数较高的液体可以为氯仿、乙醇和氯仿的混合液体、或者异丙醇。As the application of this PCF-SPR sensor, the liquid with high thermo-optic coefficient can be injected into the third air hole channel of the detection fiber by using the capillary phenomenon of liquid or pressurization method as the temperature channel, and the thermo-optic coefficient is selected to be higher than that of the fiber material. The liquid with a coefficient of two orders of magnitude, the liquid with a higher thermo-optic coefficient can be chloroform, a mixed liquid of ethanol and chloroform, or isopropanol.

作为该PCF-SPR传感器的应用,传感膜为多层膜结构,传感膜包括金属膜和涂敷于金属膜上的其他材料,例如石墨烯、MoS2等材料,可实现生物传感、大气湿度传感。As the application of this PCF-SPR sensor, the sensing film is a multi-layer film structure, and the sensing film includes a metal film and other materials coated on the metal film, such as graphene, MoS2 and other materials, which can realize biosensing, Atmospheric humidity sensing.

作为该PCF-SPR传感器的应用,本发明采用以下技术方案可实现该传感器的多通道多参数并行测量。对同一样品的多个参数进行检测时,只需分别在不同探测通道中填充同一被测样品,各探测通道的传感材料依据不同测量参数进行选取。As an application of the PCF-SPR sensor, the present invention adopts the following technical solutions to realize multi-channel and multi-parameter parallel measurement of the sensor. When detecting multiple parameters of the same sample, it is only necessary to fill the same sample in different detection channels, and the sensing material of each detection channel is selected according to different measurement parameters.

作为该PCF-SPR传感器的应用,本发明能够实现自参考功能,以消除各种环境因素的影响,包括仪器噪声、温度、样品中其余分子对目标分子干扰等。只需将其中一个通道选作探测通道填充样品,另一个用作参考通道。采用测量两通道的共振波长之差的方式来有效抵消环境因素影响。As an application of the PCF-SPR sensor, the present invention can realize a self-referencing function to eliminate the influence of various environmental factors, including instrument noise, temperature, interference of other molecules in the sample on target molecules, and the like. Simply select one of the channels as the detection channel to fill the sample and the other as the reference channel. The method of measuring the difference between the resonance wavelengths of the two channels is used to effectively counteract the influence of environmental factors.

本发明提供的实施例中,空气孔间间距为Λ,第一空气孔、第二空气孔半径尺寸大小范围为0.4Λ-0.6Λ,第三空气孔半径尺寸大小范围为0.6Λ-1.2Λ,第四空气孔半径尺寸大小范围为0.1Λ-0.3Λ,开环深度和宽度大小范围为0.5Λ-2Λ。SPR传感层在横向X方向仅位于开环底部宽度上,极大靠近于纤芯,通过调整开环尺寸大小、各空气孔排列及尺寸,及选用合适的SPR传感层材料,从而使得可测量折射率范围向低折射率方向移动,探测折射率值达到1.3以下。In the embodiment provided by the present invention, the distance between the air holes is Λ, the radius size range of the first air hole and the second air hole is 0.4Λ-0.6Λ, and the radius size range of the third air hole is 0.6Λ-1.2Λ, The size range of the radius of the fourth air hole is 0.1Λ-0.3Λ, and the size range of the open-loop depth and width is 0.5Λ-2Λ. The SPR sensing layer is only located on the width of the bottom of the open loop in the transverse X direction, and is very close to the fiber core. By adjusting the size of the open loop, the arrangement and size of each air hole, and selecting a suitable SPR sensing layer material, it can be achieved. The range of measured refractive index moves to the direction of low refractive index, and the detected refractive index value reaches below 1.3.

以样品的双参数测量为具体实施例。如图2所示,本发明采用基于波长调制的在线传输式工作方式来检测样品的SPR信号,SPR信号以吸收峰的形式出现在透射谱上。检测装置包括宽谱光源10、起偏器11、传输光纤12、耦合器13、传感光纤14、光谱分析仪15和计算机16。Take the dual-parameter measurement of the sample as a specific example. As shown in FIG. 2 , the present invention uses an online transmission working method based on wavelength modulation to detect the SPR signal of the sample, and the SPR signal appears on the transmission spectrum in the form of an absorption peak. The detection device includes a wide-spectrum light source 10 , a polarizer 11 , a transmission fiber 12 , a coupler 13 , a sensing fiber 14 , a spectrum analyzer 15 and a computer 16 .

以检测大气中气溶胶粒子折射率和大气温度两个参数为例,根据要测量的气溶胶溶液样品分子直径大小设计好传感光纤开环开口大小,利用液体的毛细现象或加压方式将氯仿注入探测光纤的第三空气孔通道作为测量大气温度的通道。将气溶胶溶液样品直接倒在传感光纤的侧面抛光平面上,此时开环起到过滤作用,小于开环入口尺寸的目标分子可直接通过入口自动穿透通道,大分子将被挡在开环外。传感光纤样品填充完毕后,调整其在三维平移台上的位置,使其保持水平状态并与光学耦合系统共轴。Taking the detection of the two parameters of aerosol particle refractive index and atmospheric temperature in the atmosphere as an example, the open-loop opening size of the sensing fiber is designed according to the molecular diameter of the aerosol solution sample to be measured, and the chloroform The third air hole channel injected into the detection fiber is used as a channel for measuring atmospheric temperature. Pour the aerosol solution sample directly on the side polished surface of the sensing fiber, at this time, the open ring acts as a filter, and the target molecules smaller than the entrance size of the open ring can directly pass through the entrance to automatically penetrate the channel, and the macromolecules will be blocked in the opening. outside the ring. After the sensing fiber sample is filled, adjust its position on the three-dimensional translation stage to keep it horizontal and coaxial with the optical coupling system.

从宽谱光源或者近红外激光器发出的入射光进入传输光纤传输,经偏振器调整为线偏振光,使其偏振方向与传感光纤纤芯的对称轴平行,控制耦合条件使宽谱光源或者近红外激光器发出的光最高效率地耦合进入传感光纤的纤芯,使探测光纤的基模具有最大的激发效率。入射光在传感区域经样品调制后通过耦合器进入光谱分析仪,共振光谱以透射吸收峰的形式体现在光谱分析仪上,当被测样品的参数发生变化时,该透射吸收峰也随之发生漂移,光谱仪通过USB端口接入计算机,计算机对光谱数据进行记录以及保存。各目标参数的变化最终体现为被测样品等效折射率变化,通过分别对基模的X偏振和Y偏振两个方向共振波长漂移情况的测量,进而实现对被测样品的折射率和温度双参数的实时在线测量与监控。The incident light from a broadband light source or near-infrared laser enters the transmission fiber for transmission, and is adjusted to linearly polarized light by a polarizer so that its polarization direction is parallel to the symmetry axis of the sensing fiber core, and the coupling conditions are controlled so that the broadband light source or near-infrared laser The light emitted by the infrared laser is coupled into the core of the sensing fiber with the highest efficiency, so that the fundamental mode of the detection fiber has the maximum excitation efficiency. The incident light enters the spectrum analyzer through the coupler after being modulated by the sample in the sensing area, and the resonance spectrum is reflected on the spectrum analyzer in the form of a transmission absorption peak. When the parameters of the measured sample change, the transmission absorption peak also changes. When drift occurs, the spectrometer is connected to the computer through the USB port, and the computer records and saves the spectral data. The change of each target parameter is finally reflected in the change of the equivalent refractive index of the sample under test. By measuring the resonance wavelength drift of the X-polarization and Y-polarization directions of the fundamental mode respectively, the dual refraction index and temperature of the sample under test are realized. Real-time online measurement and monitoring of parameters.

本发明提供的传感器采样矩形开环,矩形开环底部平坦,在底部可以均匀镀膜,操作简单且安全。若目标参量为大气湿度,采用镀膜技术在开环通道平坦的金属层表面再涂敷一层或多层MoS2二维材料,由于MoS2表面没有悬挂键,对水分子具有物理吸附作用,故可通过探测二硫化钼折射率变化来得到大气湿度的变化量,制成一种湿度传感器。若采用石墨烯镀膜,由于石墨烯的六边形环的高电子密度能阻挡氧气、氦原子等通过其环结构,高表面与体积比使其适合于大面积吸附生物分子,从而既能防止金属表面的氧化,又能用于生物传感器的应用,大大提高其灵敏度和性能。The sensor provided by the invention has a rectangular open loop for sampling, and the bottom of the rectangular open loop is flat, and a film can be evenly coated on the bottom, and the operation is simple and safe. If the target parameter is atmospheric humidity, one or more layers of MoS 2 two-dimensional materials are coated on the surface of the flat metal layer of the open-loop channel by using coating technology. Since the surface of MoS 2 has no dangling bonds, it has a physical adsorption effect on water molecules, so The change of atmospheric humidity can be obtained by detecting the change of the refractive index of molybdenum disulfide, and a humidity sensor can be made. If graphene coating is used, the high electron density of the hexagonal ring of graphene can prevent oxygen, helium atoms, etc. Oxidation of the surface, in turn, can be used in biosensor applications, greatly improving its sensitivity and performance.

本发明的传感器探测折射率低于1.3以下,故还可用于新型薄膜材料的研制。低折射率薄膜(如纳米多孔二氧化硅薄膜、冰晶石薄膜等)凭借其透明性、低热导、低电介性等优良特性,广泛应用于生产生活等各个领域。作为该PCF-SPR传感器的应用,可通过在矩形开环通道底部沉积一层或多层薄膜,通过观察光谱仪上光谱共振峰值波长及其漂移情况来得到薄膜的折射率参数或薄膜厚度。The detection refractive index of the sensor of the invention is lower than 1.3, so it can also be used in the development of new thin film materials. Low refractive index films (such as nanoporous silica films, cryolite films, etc.) are widely used in various fields such as production and life due to their excellent properties such as transparency, low thermal conductivity, and low dielectric properties. As the application of the PCF-SPR sensor, one or more thin films can be deposited at the bottom of the rectangular open-loop channel, and the refractive index parameters or film thickness of the film can be obtained by observing the spectral resonance peak wavelength and its drift on the spectrometer.

最后所应说明的是,以上具体实施方式仅用以说明本发明的技术方案而非限制,尽管参照较佳实施例对本发明进行了详细说明,本领域的普通技术人员应当理解,可以对本发明的技术方案进行修改或者等同替换,而不脱离本发明技术方案的精神和范围,其均应涵盖在本发明的权利要求范围当中。Finally, it should be noted that the above specific embodiments are only used to illustrate the technical solutions of the present invention and not limit them. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that the present invention can be Modifications or equivalent replacements of the technical solutions without departing from the spirit and scope of the technical solutions of the present invention shall fall within the scope of the claims of the present invention.

Claims (9)

1. a kind of side polishes open ring type PCF-SPR sensor characterized by comprising fibre core and be coated on outside fibre core Covering, fibre core are equipped with the airport arranged along fibre core axis direction with covering decentraction on covering;Airport includes one first Airport, multiple second airports and multiple third airports, the first airport are located at cross section of optic fibre center, the second air Hole is arranged around the first airport in the annular N corner structure that the number of plies is K, and third airport is by replacing the second air hole site pair Ground is claimed to be located at fibre core two sides;It is provided in optical fiber side and cuts flat with and form surface polishing after polishing treatment, in surface polishing It is equipped with open loop, is coated with sensing membrane in open loop, open loop is as sensing passage;Surface polishing is located at close to the side of fibre core.
2. side as described in claim 1 polishes open ring type PCF-SPR sensor, which is characterized in that in the core centre Introducing is provided with the 4th airport, and the 4th air bore dia and the second air pore diameter size ratio are less than 1.
3. as the described in any item sides of claims 1 or 2 polish open ring type PCF-SPR sensor, which is characterized in that described to open Ring section is rectangle, and open loop size can be determined according to measured matter molecular size.
4. as the described in any item sides of claims 1 or 2 polish open ring type PCF-SPR sensors, which is characterized in that all or Person part third airport is coated with sensing membrane, and for being used as another sensing passage, and the third air bore dia is greater than second Air bore dia.
5. side as claimed in claim 4 polishes open ring type PCF-SPR sensor, which is characterized in that utilize the capillary of liquid Phenomenon or pressuring method fill the liquid that thermo-optical coeffecient is higher than two orders of magnitude of fiber optic materials thermo-optical coeffecient in third airport.
6. side as claimed in claim 4 polishes open ring type PCF-SPR sensor, which is characterized in that on a sensing passage For being injected with measured matter, another sensing passage improves the anti-external interference energy of sensor for being above injected with reference material Power.
7. side as claimed in claim 4 polishes open ring type PCF-SPR sensor, which is characterized in that two sensing passages are used Sensing membrane is determined according to measured matter measured parameter in injection measured matter, sensing passage, is realized while being measured measured matter Different parameters.
8. as claim 1,2,5,6 or 7 described in any item sides polish open ring type PCF-SPR sensor, which is characterized in that Sensing membrane is multi-layer film structure.
9. as claim 1,2,5,6 or 7 described in any item sides polish open ring type PCF-SPR sensor, which is characterized in that Spacing is Λ between each airport, and the first airport and the second airport radius size magnitude range are 0.4 Λ -0.6 Λ, the Three airport radius size magnitude ranges are 0.6 Λ -1.2 Λ, and the 4th airport radius size magnitude range is 0.1 Λ -0.3 Λ, open loop depth and width magnitude range are 0.5 Λ -2 Λ.
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