[go: up one dir, main page]

CN108866512A - Automate graphite boat stuck point changing machine - Google Patents

Automate graphite boat stuck point changing machine Download PDF

Info

Publication number
CN108866512A
CN108866512A CN201811070361.8A CN201811070361A CN108866512A CN 108866512 A CN108866512 A CN 108866512A CN 201811070361 A CN201811070361 A CN 201811070361A CN 108866512 A CN108866512 A CN 108866512A
Authority
CN
China
Prior art keywords
stuck point
mould group
axis
graphite boat
mould
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201811070361.8A
Other languages
Chinese (zh)
Other versions
CN108866512B (en
Inventor
孙红彬
段波
唐福云
卢佩良
李宁
高顺
高东坡
王银
王志清
蔡振华
王枫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd
Original Assignee
Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd filed Critical Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd
Priority to CN201811070361.8A priority Critical patent/CN108866512B/en
Publication of CN108866512A publication Critical patent/CN108866512A/en
Application granted granted Critical
Publication of CN108866512B publication Critical patent/CN108866512B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Press Drives And Press Lines (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention belongs to solar battery manufacturing fields, more particularly to a kind of automation graphite boat stuck point changing machine, including frame main body, new stuck point material storing box, upper mold mould group, middle mould mould group, decorate mould group, control mould group, the graphite boat of stuck point to be replaced is placed in middle mould mould group first when in use, then under the control of control mould group, a column is unloaded using several in upper mold mould group to unload old stuck point, then middle mould mould group be moved to decorateeing position, it decorates device and new stuck point is installed to graphite boat, after decorateeing the stuck point in device and installing, device is decorateeed to move to below neocaine point material storing box in the driving bottom for decorateeing device displacement drive mechanism, the new stuck point automatic blanking that new stuck point material storing box is stored is into the hopper decorateeed in device, charging rate is fast, can effective guarantee follow-up work process it is smooth, improve working efficiency.High degree of automation of the present invention, easy to operate, replacement quality is high, and product qualification rate improves, and time saving and energy saving, work efficiency is high, has a extensive future.

Description

Automate graphite boat stuck point changing machine
Technical field
The invention belongs to solar battery manufacturing field more particularly to a kind of automation graphite boat stuck point changing machine.
Background technique
With the fast development of solar battery, more and more solar batteries enter civil field.In solar-electricity In the production process in pond, PECVD(PlasmaEnhancedChemicalVaporDeposition, plasma enhanced chemical gas Phase sedimentation)Coating process is the important link in production procedure, plays very important effect.PECVD be by microwave or Radio frequency etc. makes the gas ionization containing film composed atom, is being partially formed plasma, and plasma chemistry activity is very strong, It is easy to react, goes out desired film in deposition on substrate.When silicon wafer carries out its surface coating process, need not plate On the loader of the silicon wafer insertion PECVD vacuum coating equipment of film.Currently, loader generallys use graphite boat, concrete operations Cheng Shi:Silicon wafer is inserted into graphite boat and is positioned thereon by graphite boat stuck point, then, the graphite boat for being loaded with silicon wafer is placed on In PECVD vacuum coating equipment, plated film is carried out to silicon wafer using PECVD technique.In order to fix silicon wafer in graphite boat, graphite The graphite boat piece of boat is equipped with the stuck point for fixing silicon wafer, since silicon wafer can have certain mill during inserting and taking to stuck point Damage, needs periodically to replace stuck point, to guarantee the kilter of graphite boat, and then guarantees the coating quality of silicon wafer.
The replacing options operating procedure of conventional graphite boat stuck point is complicated and cumbersome, compares simultaneously assembly crewman's skill requirement Height will lead to graphite boat piece and the damage of graphite boat stuck point in replacement process or assemble not in place, biography if skill operation is not in place The graphite boat stuck point replacement operation method of system is:Graphite boat stuck point needs are used to a manual simplified press, while press two Side need to obtain the height as handpress platform with cystosepiment or rubber pad pad, and operator is sitting in graphite in face of press Boat piece, which is laid flat, to be placed in above handpress platform, is then successively unloaded 24 stuck points of graphite boat with handpress, graphite boat The stuck point that operator will more renew after stuck point unloads is placed in above corresponding card hole, cautious to help the right side with left hand Hand rotates press down, and the dynamics that hand makes will be got hold of, if the dynamics used is too big to damage graphite boat and stuck point by pressure, if The dynamics used too it is small just press it is not in place, after the stuck point for having pressed a graphite boat piece, continue next graphite boat piece stuck point more Change, a graphite boat is formed by 27, need replacing several within usual one day as graphite boat stuck point, personnel are complicated for operation numerous It is trivial, usually because having little time to replace graphite boat stuck point, and cause manufacturing schedule slow, is damaged under normal circumstances because of driving plan Graphite boat piece or stuck point press situation not in place very more, lead to damage or dropping situations during silicon wafer to manufacture, influence product Quality.
Summary of the invention
Present invention aim to address above-mentioned the deficiencies in the prior art, a kind of high degree of automation, easy to operate, more is provided Obversion amount is high, will not damage to stuck point, the automation graphite boat stuck point changing machine that work efficiency is high.
The present invention solves technical solution used by above-mentioned the deficiencies in the prior art:
A kind of automation graphite boat stuck point changing machine, which is characterized in that including:
Frame main body, for carrying the other mould groups being disposed thereon;
New stuck point material storing box, is arranged in the frame main body side, new stuck point is provided for graphite boat;
Upper mold mould group, including upper mold and upper mold displacement drive mechanism, upper mold displacement drive mechanism connects the upper mold, described Upper mold carries out upper and lower displacement under the driving of upper mold displacement drive mechanism, and the upper mold is equipped with several for old stuck point The upper mold unloaded unloads a column;
Middle mould mould group, including middle mould and Zhong Mo displacement drive mechanism, Zhong Mo displacement drive mechanism connects the middle mould, described Middle mould in origin position and is decorateeed under the driving of Zhong Mo displacement drive mechanism and carries out left and right displacement between position, and the middle mould supplies Place the graphite boat of stuck point to be unloaded;
Mould group is decorateeed, including at least one is decorateeed device and decorates device displacement drive mechanism, the device of decorateeing is arranged in the neocaine Below point material storing box, described decorate decorates device described in the connection of device displacement drive mechanism, and the device of decorateeing is displaced in the device of decorateeing XYZ axial displacement is carried out under the driving of driving mechanism;
Mould group is controlled, the new stuck point material storing box is electrically connected, upper mold mould group, middle mould mould group, decorates mould group, for institute New stuck point material storing box, upper mold mould group, middle mould mould group, the course of work for decorateeing mould group is stated to be controlled.
Preferably, changing machine of the present invention further includes the lower die mould group being arranged in below the middle mould mould group, under described Mould mould group includes lower die and lower die displacement drive mechanism, on the lower die carries out under the driving of lower die displacement drive mechanism Bottom offset.
Preferably, heretofore described new stuck point material storing box includes cabinet, stuck point slideway, slide block connecting rod, cylinder, the case Feed opening is equipped on the downside of body, the stuck point slideway is connect by the feed opening with the cabinet, the feed opening and the card The place that point slideway communicates is equipped with the valve rod for controlling stuck point blanking, and the cylinder connects the valve through the slide block connecting rod Column, the valve rod lower end are equipped with valve plug.
Preferably, heretofore described device of decorateeing includes hopper, vibration pump, cylinder, stuck point whereabouts pipeline, pressure point mouth, institute It states hopper to be arranged below the new stuck point material storing box, the vibration pump is arranged in the hopper side, the stuck point drop pipe Road is arranged below the hopper, and the piston rod of the cylinder connects the pressure point mouth.
Preferably, heretofore described changing machine further includes old stuck point recycling bins, and the old stuck point recycling bins are arranged in institute It states below middle mould mould group, the old stuck point unloaded is recycled.
Preferably, heretofore described device displacement drive mechanism of decorateeing is that X-axis track and X are equipped in the frame main body Axial filament bar, the X-axis track, which is equipped with, to be equipped with Z axis track and Z axis along its X-axis slide free to slide, the X-axis slide Screw rod, the Z axis track are connected with the X-axis screw rod, and the X-axis screw rod connects X-axis driving motor, set on the Z axis track Having can be along its Z axis slide free to slide, and the device of decorateeing is arranged on the Z axis slide, described to decorate device and the Z axis silk Bar is connected, and the Z axis screw rod connects Z axis driving motor, is equipped with Y-axis track and Y-axis screw rod, the Y-axis above the X-axis track Track, which is equipped with, to be connected along its Y-axis slide free to slide, the X-axis track with the Y-axis slide, Y-axis screw rod, the Y Axial filament bar connects Y-axis driving motor.
Preferably, dust cover is equipped with above heretofore described Y-axis track.
The invention has the advantages that since present invention automation graphite boat stuck point changing machine includes frame main body, neocaine Point material storing box, middle mould mould group, decorates mould group, control mould group at upper mold mould group, and the present invention is when in use first by stuck point to be replaced Graphite boat is placed in middle mould mould group, will be old using several columns that unload in upper mold mould group then under the control of control mould group Stuck point unloads, then in mould mould group be moved to decorateeing position, decorate device and new stuck point be installed to graphite boat, when decorateeing device In stuck point install after, decorate device and moved to below neocaine point material storing box in the driving bottom for decorateeing device displacement drive mechanism, newly For the new stuck point automatic blanking that stuck point material storing box is stored into the hopper decorateeed in device, charging rate is fast, being capable of effective guarantee Follow-up work process is smooth, improves working efficiency.High degree of automation of the present invention, easy to operate, work efficiency is high, artificial in the past The stuck point above graphite boat piece is unloaded to need to need 24 stuck points can disposably be unloaded using now under handpress pressure 24 Fall, working efficiency improves 24 times or more;It is high to replace quality, when manually being operated in the past with handpress, often damages graphite boat by pressure Piece and stuck point, or pressure are not in place, and lead to the increase of the disqualification rate of fragment rate and product, and the present invention prevents similar situation and goes out It is existing, stuck point will not be damaged, product qualification rate improves;The labor intensity for alleviating operator is previously required to 3 people not The work stopped can be easily accomplished the work of replacement graphite boat stuck point using one people of the present invention;Working space is improved, in the past It is 4.5 square metres that 3 people, which sit a row and work at the same time occupied area, as long as being saved now using 2.2896 square metres of the present invention 2.2104 square metre working space;Working environment is improved, is previously required to be accomplished manually the work of replacement graphite boat stuck point, it is existing It is automatically performed by the present invention, can be good at keeping live 6s.
Detailed description of the invention
Fig. 1, Fig. 2 are a kind of example structure schematic diagram of present invention automation graphite boat stuck point changing machine, and a kind of Preferred embodiment schematic diagram.
Fig. 3 is the main view of Fig. 1.
Fig. 4 is partial enlarged view at the A of Fig. 2.
Fig. 5 is a kind of example structure schematic diagram for decorateeing mould group.
Fig. 6 is partial enlarged view at the B of Fig. 5.
Specific embodiment
It is described below for disclosing the present invention so that those skilled in the art can be realized the present invention.It is excellent in being described below Embodiment is selected to be only used as illustrating, it may occur to persons skilled in the art that other obvious modifications.It defines in the following description Basic principle of the invention can be applied to other embodiments, deformation scheme, improvement project, equivalent program and do not carry on the back Other technologies scheme from the spirit and scope of the present invention.
In the description of the present invention, it should be noted that the orientation or position of the instructions such as term " on ", "lower", "left", "right" Setting relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present invention and simplification of the description, rather than The device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot It is interpreted as limitation of the present invention.
Fig. 1-Fig. 6 shows a kind of example structure schematic diagram of present invention automation graphite boat stuck point changing machine, and A kind of preferred embodiment schematic diagram.As shown in figs 1 to 6, automation graphite boat stuck point changing machine described in the present embodiment includes: Frame main body 10, upper mold mould group 30, middle mould mould group 40, decorates mould group 50, control mould group 60 at new stuck point material storing box 20, wherein institute Frame main body 10 is stated for carrying the other mould groups being disposed thereon;The new stuck point material storing box 20 is arranged in the frame main body 10 Side provides new stuck point for graphite boat;The upper mold mould group 30 include upper mold 31 and upper mold displacement drive mechanism 32, it is described on Mould displacement drive mechanism 32 connects the upper mold 31, and the upper mold carries out up and down under the driving of upper mold displacement drive mechanism Displacement, the upper mold are equipped with several upper molds for being unloaded to old stuck point and unload a column;During the middle mould mould group 40 includes Mould 41 and Zhong Mo displacement drive mechanism 42, Zhong Mo displacement drive mechanism 42 connect the middle mould 41, and the middle mould 41 is in institute It in origin position and decorates under the driving of Shu Zhongmo displacement drive mechanism 42 and carries out left and right displacement between position, the middle mould 41 is for placing The graphite boat of stuck point to be unloaded;The mould group 50 of decorateeing includes that at least one is decorateeed device 51 and decorates device displacement drive mechanism 52, The device 51 of decorateeing is arranged below the new stuck point material storing box 20, and the device displacement drive mechanism 52 of decorateeing connects described decorate Device 51, the device of decorateeing carry out XYZ axial displacement under the driving for decorateeing device displacement drive mechanism;The control mould group 60 is divided It is not electrically connected the new stuck point material storing box 20, upper mold mould group 30, middle mould mould group 40, decorates mould group 50, for the neocaine Point material storing box, upper mold mould group, middle mould mould group, the course of work for decorateeing mould group are controlled.
Preferably, as shown in Figure 1-Figure 3, changing machine described in the present embodiment further includes setting in described Lower die mould group 70 below mould mould group, the lower die mould group 70 include lower die 71 and lower die displacement drive mechanism 72, the lower die 71 carry out upper and lower displacement under the driving of lower die displacement drive mechanism 72.
Preferably, as shown in Figure 2, Figure 4 shows, new stuck point material storing box 20 described in the present embodiment includes cabinet 21, stuck point slideway 22, slide block connecting rod 23, cylinder 24, feed opening is equipped on the downside of the cabinet 21, and the stuck point slideway 22 passes through institute It states feed opening to connect with the cabinet, the place that the feed opening is communicated with the stuck point slideway is equipped with for controlling stuck point blanking Valve rod, the cylinder connects the valve rod through the slide block connecting rod, and the valve rod lower end is equipped with valve plug.
Preferably, as shown in Figure 5, Figure 6, it includes hopper 510, vibration that device 51 is decorateeed described in the present embodiment 511, cylinder 512, stuck point whereabouts pipeline, pressure point mouth 513 are pumped, the hopper 510 is arranged below the new stuck point material storing box, institute The setting of vibration pump 511 is stated in 510 side of hopper, stuck point whereabouts pipeline is arranged below the hopper, the cylinder Piston rod connect the pressure point mouth 513.Preferably, as shown in figure 5, being decorateeed described in the present embodiment there are two device 51 sets, two The two sides that device is separately positioned on the vibration pump 511 are decorateeed described in a, decorateeing device for two can carry out decorateeing work simultaneously, significantly Improve working efficiency.
Preferably, as shown in figure 5, decorateeing device displacement drive mechanism 52 described in the present embodiment is described Frame main body is equipped with X-axis track 520 and X-axis screw rod 521, and the X-axis track is equipped with can be sliding along its X-axis free to slide Seat, the X-axis slide are equipped with Z axis track 522 and Z axis screw rod 523, and the Z axis track is connected with the X-axis screw rod, the X Axial filament bar connects X-axis driving motor, and the Z axis track is equipped with and can set along its Z axis slide free to slide, the device 51 of decorateeing It sets on the Z axis slide, the device of decorateeing is connected with the Z axis screw rod, and the Z axis screw rod connects Z axis driving motor, described Y-axis track 524 and Y-axis screw rod 525 are equipped with above X-axis track, the Y-axis track is equipped with can be sliding along its Y-axis free to slide Seat, the X-axis track are connected with the Y-axis slide, Y-axis screw rod, and the Y-axis screw rod connects Y-axis driving motor.Preferably, such as Shown in Fig. 1-Fig. 3, dust cover 80 is equipped with above Y-axis track described in the present embodiment.
Preferably, as shown in Figure 1-Figure 3, changing machine described in the present embodiment further includes old stuck point recycling bins 90, the old stuck point recycling bins are arranged below the middle mould mould group, recycle to the old stuck point unloaded.
Preferably, as shown in Figure 1, control mould group 60 described in the present embodiment includes being arranged in frame main body The human body interactive terminal 61 of side and controller, the controller are programmable controller PLC(Programmable Logic Controller), the new stuck point material storing box, upper mold mould group, middle mould mould group, lower die is electrically connected in PLC controller Mould group decorates mould group, for the new stuck point material storing box, upper mold mould group, middle mould mould group, lower die mould group, the work for decorateeing mould group It is controlled as process.
The graphite boat of stuck point to be replaced when in use, is placed in middle mould mould group, so by changing machine of the present invention first Afterwards control mould group control under, upper mold under the driving of upper mold displacement drive mechanism to bottom offset, the stone being depressed on middle mould On Mo Zhou, a column is unloaded using several in upper mold, old stuck point on graphite boat is unloaded, can disposably uninstalled and be had been friends in the past Stuck point, work efficiency is high.And old stuck point can be fallen into the old stuck point recycling bins being arranged below middle mould mould group, to old stuck point into Row recycling, prevents from causing confusion to working site, keeps working environment clean and tidy.Upper mold is displaced in upper mold after old stuck point unloading drives It is moved upwards under the driving of motivation structure, returns to home position, wait next pressing action, middle mould is in Zhong Mo displacement drive mechanism To left dislocation under driving, it is moved to the position of decorateeing above lower mold assemblies, lower die is upward under the driving of lower die displacement drive mechanism Displacement is decorateeed device and is reached under the driving for decorateeing displacement drive mechanism and decorates position and install new stuck point, lower mold assemblies to graphite boat Support positioning action is played during decorateeing, and is prevented graphite boat stuck point from filling not in place or directly falling, be can satisfy technique It is required that decorateeing quality height.After new stuck point is installed, decorates device and rise back to home position, drive of the lower die in lower mold assemblies To bottom offset under dynamic, home position is returned to, meanwhile, middle mould is displaced to the right under the driving of Zhong Mo displacement drive mechanism, returns to original Beginning position, carries out next subtask, circuits sequentially work with this.High degree of automation, easy to operate, work efficiency is high.Work as dress After stuck point in point device installs, decorate under device moves to neocaine point material storing box in the driving bottom for decorateeing device displacement drive mechanism Side, for the new stuck point automatic blanking that new stuck point material storing box is stored into the hopper decorateeed in device, charging rate is fast, can be effective It ensures that follow-up work process is smooth, further increases working efficiency.
It should be understood by those skilled in the art that foregoing description and the embodiment of the present invention shown in the drawings are only used as illustrating And it is not intended to limit the present invention.The purpose of the present invention has been fully and effectively achieved.Function and structural principle of the invention exists It shows and illustrates in embodiment, under without departing from the principle, embodiments of the present invention can have any deformation or modification.

Claims (7)

1. a kind of automation graphite boat stuck point changing machine, which is characterized in that including:
Frame main body, for carrying the other mould groups being disposed thereon;
New stuck point material storing box, is arranged in the frame main body side, new stuck point is provided for graphite boat;
Upper mold mould group, including upper mold and upper mold displacement drive mechanism, upper mold displacement drive mechanism connects the upper mold, described Upper mold carries out upper and lower displacement under the driving of upper mold displacement drive mechanism, and the upper mold is equipped with several for old stuck point The upper mold unloaded unloads a column;
Middle mould mould group, including middle mould and Zhong Mo displacement drive mechanism, Zhong Mo displacement drive mechanism connects the middle mould, described Middle mould in origin position and is decorateeed under the driving of Zhong Mo displacement drive mechanism and carries out left and right displacement between position, and the middle mould supplies Place the graphite boat of stuck point to be unloaded;
Mould group is decorateeed, including at least one is decorateeed device and decorates device displacement drive mechanism, the device of decorateeing is arranged in the neocaine Below point material storing box, described decorate decorates device described in the connection of device displacement drive mechanism, and the device of decorateeing is displaced in the device of decorateeing XYZ axial displacement is carried out under the driving of driving mechanism;
Mould group is controlled, the new stuck point material storing box is electrically connected, upper mold mould group, middle mould mould group, decorates mould group, for institute New stuck point material storing box, upper mold mould group, middle mould mould group, the course of work for decorateeing mould group is stated to be controlled.
2. automation graphite boat stuck point changing machine according to claim 1, which is characterized in that further include setting in described Lower die mould group below mould mould group, the lower die mould group include lower die and lower die displacement drive mechanism, and the lower die is under described Upper and lower displacement is carried out under the driving of mould displacement drive mechanism.
3. automation graphite boat stuck point changing machine according to claim 1, which is characterized in that the new stuck point material storing box packet Cabinet, stuck point slideway, slide block connecting rod, cylinder are included, is equipped with feed opening on the downside of the cabinet, the stuck point slideway passes through the blanking Mouth is connect with the cabinet, and the place that the feed opening is communicated with the stuck point slideway is equipped with the valve for controlling stuck point blanking Column, the cylinder connect the valve rod through the slide block connecting rod, and the valve rod lower end is equipped with valve plug.
4. automation graphite boat stuck point changing machine according to claim 1, which is characterized in that the device of decorateeing includes material Bucket, vibration pump, cylinder, stuck point whereabouts pipeline, pressure point mouth, the hopper are arranged below the new stuck point material storing box, the shake In the hopper side, stuck point whereabouts pipeline is arranged below the hopper for dynamic pump setting, and the piston rod of the cylinder connects Connect the pressure point mouth.
5. automation graphite boat stuck point changing machine according to claim 1, which is characterized in that the changing machine further includes old Stuck point recycling bins, the old stuck point recycling bins are arranged below the middle mould mould group, recycle to the old stuck point unloaded.
6. automation graphite boat stuck point changing machine according to claim 1, which is characterized in that described to decorate device displacement drive Mechanism is that X-axis track and X-axis screw rod are equipped in the frame main body, and the X-axis track is equipped with can be along its X free to slide Axis slide, the X-axis slide are equipped with Z axis track and Z axis screw rod, and the Z axis track is connected with the X-axis screw rod, the X-axis Screw rod connects X-axis driving motor, and the Z axis track is equipped with can be described to decorate device setting and exist along its Z axis slide free to slide On the Z axis slide, the device of decorateeing is connected with the Z axis screw rod, and the Z axis screw rod connects Z axis driving motor, the X-axis Y-axis track and Y-axis screw rod are equipped with above track, the Y-axis track is equipped with can be along its Y-axis slide free to slide, the X-axis Track is connected with the Y-axis slide, Y-axis screw rod, and the Y-axis screw rod connects Y-axis driving motor.
7. automation graphite boat stuck point changing machine according to claim 6, which is characterized in that set above the Y-axis track There is dust cover.
CN201811070361.8A 2018-09-13 2018-09-13 Automatic change machine for clamping points of graphite boats Active CN108866512B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811070361.8A CN108866512B (en) 2018-09-13 2018-09-13 Automatic change machine for clamping points of graphite boats

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811070361.8A CN108866512B (en) 2018-09-13 2018-09-13 Automatic change machine for clamping points of graphite boats

Publications (2)

Publication Number Publication Date
CN108866512A true CN108866512A (en) 2018-11-23
CN108866512B CN108866512B (en) 2024-04-05

Family

ID=64323900

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811070361.8A Active CN108866512B (en) 2018-09-13 2018-09-13 Automatic change machine for clamping points of graphite boats

Country Status (1)

Country Link
CN (1) CN108866512B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109411568A (en) * 2018-11-30 2019-03-01 江苏润阳悦达光伏科技有限公司 The manual changing machine of slide rail type graphite boat stuck point
CN111005008A (en) * 2019-11-28 2020-04-14 江苏润阳悦达光伏科技有限公司 Automatic clap boat device
CN111370356A (en) * 2020-04-15 2020-07-03 盐城恒华智造科技有限公司 A kind of graphite boat card point automatic replacement machine
CN112030142A (en) * 2020-08-20 2020-12-04 湖南华鑫晶造电气科技有限公司 Automatic loading and unloading device for graphite boat stuck point
CN113061874A (en) * 2021-03-16 2021-07-02 湖南华鑫晶造电气科技有限公司 Automatic loading and unloading device for graphite boat stuck points
CN113118763A (en) * 2021-05-08 2021-07-16 常州市杰洋精密机械有限公司 Full-automatic graphite boat stuck point automatic assembly machine

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940007233A (en) * 1992-09-25 1994-04-26 이헌조 Graft Boat Apparatus for Semiconductor Crystal Growth
CN203774265U (en) * 2014-03-18 2014-08-13 衡水英利新能源有限公司 Graphite-boat-piece clamping point replacement tooling table
CN105932112A (en) * 2016-06-27 2016-09-07 常州亿晶光电科技有限公司 Tubular PECVD graphite boat process point installation device
CN105951059A (en) * 2016-06-27 2016-09-21 常州亿晶光电科技有限公司 Fully-automatic tubular PECVD graphite boat process point installation device
CN105951060A (en) * 2016-06-27 2016-09-21 常州亿晶光电科技有限公司 Demounting device for process points of tube type PECVD graphite boat
CN106736408A (en) * 2017-02-13 2017-05-31 揭阳中诚集团有限公司 Graphite boat process point automatic loader and unloader
CN207021249U (en) * 2017-05-15 2018-02-16 通威太阳能(成都)有限公司 A kind of practical solar battery sheet graphite boat stuck point positioning installation apparatus
CN207183244U (en) * 2017-09-11 2018-04-03 上海亿横精密机械有限公司 Stuck point, graphite boat piece and graphite boat
CN208965034U (en) * 2018-09-13 2019-06-11 江苏润阳悦达光伏科技有限公司 Automate graphite boat stuck point changing machine

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940007233A (en) * 1992-09-25 1994-04-26 이헌조 Graft Boat Apparatus for Semiconductor Crystal Growth
CN203774265U (en) * 2014-03-18 2014-08-13 衡水英利新能源有限公司 Graphite-boat-piece clamping point replacement tooling table
CN105932112A (en) * 2016-06-27 2016-09-07 常州亿晶光电科技有限公司 Tubular PECVD graphite boat process point installation device
CN105951059A (en) * 2016-06-27 2016-09-21 常州亿晶光电科技有限公司 Fully-automatic tubular PECVD graphite boat process point installation device
CN105951060A (en) * 2016-06-27 2016-09-21 常州亿晶光电科技有限公司 Demounting device for process points of tube type PECVD graphite boat
CN106736408A (en) * 2017-02-13 2017-05-31 揭阳中诚集团有限公司 Graphite boat process point automatic loader and unloader
CN207021249U (en) * 2017-05-15 2018-02-16 通威太阳能(成都)有限公司 A kind of practical solar battery sheet graphite boat stuck point positioning installation apparatus
CN207183244U (en) * 2017-09-11 2018-04-03 上海亿横精密机械有限公司 Stuck point, graphite boat piece and graphite boat
CN208965034U (en) * 2018-09-13 2019-06-11 江苏润阳悦达光伏科技有限公司 Automate graphite boat stuck point changing machine

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109411568A (en) * 2018-11-30 2019-03-01 江苏润阳悦达光伏科技有限公司 The manual changing machine of slide rail type graphite boat stuck point
CN111005008A (en) * 2019-11-28 2020-04-14 江苏润阳悦达光伏科技有限公司 Automatic clap boat device
CN111370356A (en) * 2020-04-15 2020-07-03 盐城恒华智造科技有限公司 A kind of graphite boat card point automatic replacement machine
CN112030142A (en) * 2020-08-20 2020-12-04 湖南华鑫晶造电气科技有限公司 Automatic loading and unloading device for graphite boat stuck point
CN112030142B (en) * 2020-08-20 2022-06-28 湖南华鑫晶造电气科技有限公司 Automatic loading and unloading device for graphite boat stuck points
CN113061874A (en) * 2021-03-16 2021-07-02 湖南华鑫晶造电气科技有限公司 Automatic loading and unloading device for graphite boat stuck points
CN113118763A (en) * 2021-05-08 2021-07-16 常州市杰洋精密机械有限公司 Full-automatic graphite boat stuck point automatic assembly machine

Also Published As

Publication number Publication date
CN108866512B (en) 2024-04-05

Similar Documents

Publication Publication Date Title
CN108866512A (en) Automate graphite boat stuck point changing machine
CN109161872A (en) Automate graphite boat stuck point changing machine mold
CN208965036U (en) Semi-automatic graphite boat stuck point changing machine
CN109539788B (en) Continuous feeding structure for vacuum smelting furnace
CN208965034U (en) Automate graphite boat stuck point changing machine
CN104944220B (en) A kind of more exchange device and its operating method of cage winch drum
CN109411568A (en) The manual changing machine of slide rail type graphite boat stuck point
CN205812645U (en) A kind of automatic feed mechanism of chip mounter
CN104070343B (en) A kind of rock feeder ore storage bin substrate and lining plate replacing method
CN208965033U (en) Automate graphite boat stuck point changing machine mold
CN108914090B (en) Semi-automatic graphite boat stuck point replacing machine
CN105081916A (en) Automatic burr removing, composing and conveying integrated system for magnetic shoes
CN218308982U (en) Component coating device
KR100848458B1 (en) High Pressure Gas Container Neck Groove
CN208965035U (en) Automation graphite boat stuck point decorates device
CN208068541U (en) Solid brick process units and solid brick production system
CN218050331U (en) Bidirectional powder spreading scraper mechanism
CN109262804A (en) A kind of refractory brick Multi-station automatic feeding molding equipment
CN116160155A (en) Full-automatic welding equipment for automatic feeding and discharging of welding stool anchoring ribs of curtain wall embedded parts
CN211616101U (en) Cement mortar agitated vessel is used in building wallboard production
CN210646247U (en) Material lifting and feeding device for preparing ceramic tile putty powder
CN208773308U (en) The quick handling equipment of drill point
CN109795859A (en) A kind of big thermal field auto feeding device and method
CN209407888U (en) A kind of pipe clamp Material moving device and the pipe clamp comprising the mechanism assemble device
CN201007607Y (en) Non-material frame feeding device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant