[go: up one dir, main page]

CN108831627B - Method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing - Google Patents

Method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing Download PDF

Info

Publication number
CN108831627B
CN108831627B CN201810601581.2A CN201810601581A CN108831627B CN 108831627 B CN108831627 B CN 108831627B CN 201810601581 A CN201810601581 A CN 201810601581A CN 108831627 B CN108831627 B CN 108831627B
Authority
CN
China
Prior art keywords
printing
conductive ink
liquid
liquid bridge
bridge transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201810601581.2A
Other languages
Chinese (zh)
Other versions
CN108831627A (en
Inventor
兰红波
许权
赵佳伟
杨昆
朱晓阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qingdao University of Technology
Original Assignee
Qingdao University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qingdao University of Technology filed Critical Qingdao University of Technology
Priority to CN201810601581.2A priority Critical patent/CN108831627B/en
Publication of CN108831627A publication Critical patent/CN108831627A/en
Application granted granted Critical
Publication of CN108831627B publication Critical patent/CN108831627B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0026Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

The invention discloses a method for manufacturing a large-area transparent electrode based on 3D printing and liquid bridge transfer printing, which comprises the steps of driving a melting jet deposition 3D printing female die by an electric field; casting a liquid organic polymer material to the female die by vacuum assistance to copy a working die; filling conductive ink into the groove of the working die; and sintering and curing the conductive ink filled in the groove of the working mould, and transferring the conductive ink onto a substrate by using a liquid bridge transfer printing technology. Casting a liquid Polydimethylsiloxane (PDMS) material to the large-size master plate through vacuum assistance to copy a PDMS soft mold (a working mold); transferring the conductive ink filled in the groove of the PDMS soft mold onto a substrate after heating and curing by using a liquid bridge transfer printing technology; the transparent electrode on the substrate is post-treated. Obtain the transparent electrode with large area, large height-width ratio and high resolution.

Description

基于3D打印和液桥转印制造大面积透明电极的方法Method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing

技术领域technical field

本发明属于透明电极和超微细电路制造技术领域,具体涉及一种基于3D打印和液桥转印制造大面积透明电极的方法。The invention belongs to the technical field of manufacturing transparent electrodes and ultrafine circuits, and in particular relates to a method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing.

背景技术Background technique

透明电极或者透明导电膜是触摸屏、薄膜太阳能电池(OSCs)、OLED、LCD、透明显示等许多光电子器件和产品的重要组成部分,在许多领域和产品中具有非常广泛的应用,尤其是近年随着OLED屏幕手机、柔性电子、电子皮肤、物联网、可穿戴设备的日益普及,柔性透明电极显示出更广泛的工业化应用前景。Transparent electrodes or transparent conductive films are important components of many optoelectronic devices and products such as touch screens, thin film solar cells (OSCs), OLEDs, LCDs, transparent displays, etc., and have been widely used in many fields and products, especially in recent years with the With the increasing popularity of OLED screen mobile phones, flexible electronics, electronic skin, Internet of Things, and wearable devices, flexible transparent electrodes show broader industrial application prospects.

目前工业界使用的透明导电膜/透明电极主要是铟锡氧化物(Indium tin oxide,ITO)薄膜,但是ITO中包含的铟是稀有金属,而且其制造需要高温真空沉积,导致制造成本高;此外,ITO柔韧性,沉积制造需要高温,不适合PET等柔性衬底,不适合柔性透明电极的制造,限制了其应用。At present, the transparent conductive film/transparent electrode used in the industry is mainly indium tin oxide (ITO) film, but the indium contained in ITO is a rare metal, and its manufacture requires high-temperature vacuum deposition, resulting in high manufacturing costs; in addition , ITO flexibility, deposition manufacturing requires high temperature, not suitable for flexible substrates such as PET, not suitable for the manufacture of flexible transparent electrodes, which limits its application.

因此,近年学术界和产业界提出许多ITO替代方案,诸如导电高分子聚合物薄膜(如PEDTO:PSS)、金属(金、银、铜等)网格透明导电膜、金属纳米线(银纳米线)、基于碳纳米管或石墨烯的透明导电膜等新一代透明电极引起越来越多的关注。Therefore, in recent years, academia and industry have proposed many ITO alternatives, such as conductive polymer films (such as PEDTO:PSS), metal (gold, silver, copper, etc.) grid transparent conductive films, metal nanowires (silver nanowires, etc.) ), new-generation transparent electrodes such as carbon nanotube- or graphene-based transparent conductive films have attracted increasing attention.

与其它技术和实现方案相比,金属(银)网格透明电极(Silver Grid)不仅具有与ITO相媲美的透光性和导电性,还具有柔韧性强、适用于软硬衬底(基板)、成本低、性能具有可裁剪性等突出优点,目前已经被学术界和产业界认为是最具有工业化应用前景的技术之一。Compared with other technologies and implementations, the metal (silver) grid transparent electrode (Silver Grid) not only has the light transmittance and conductivity comparable to ITO, but also has strong flexibility and is suitable for soft and hard substrates (substrates) , low cost, tailorable performance and other outstanding advantages, it has been considered by academia and industry as one of the most promising technologies for industrial applications.

目前国内外已经提出金属网格透明电极制造方法有多种,诸如光学光刻、纳米压印、喷墨打印、气溶胶打印等多种制造技术,然而现有的这些技术或解决方案在大面积、高分辨率、大高宽比金属网格的高效、低成本、批量化制造方面均存在不足和局限性,严重影响和制约金属网格透明电极更为广泛商业化应用,亟待需要开发新的制造方法和策略,以实现大面积超微细透明电极的高效、低成本、规模化制造。At present, there are many methods of manufacturing metal mesh transparent electrodes proposed at home and abroad, such as optical lithography, nanoimprinting, inkjet printing, aerosol printing and other manufacturing technologies. High-efficiency, low-cost, and mass-produced metal grids with high resolution and high aspect ratios have deficiencies and limitations, which seriously affect and restrict the wider commercial application of metal grid transparent electrodes. It is urgent to develop new Fabrication methods and strategies to achieve efficient, low-cost, and large-scale fabrication of large-area ultrafine transparent electrodes.

发明内容Contents of the invention

本发明为了解决上述问题,提出了一种基于3D打印和液桥转印制造大面积透明电极的方法,结合电场驱动熔融喷射沉积3D打印和液桥转印技术实现大面积透明电极低成本批量化制造。In order to solve the above problems, the present invention proposes a method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing, and realizes low-cost mass production of large-area transparent electrodes in combination with electric field-driven fusion jet deposition 3D printing and liquid bridge transfer printing technologies manufacture.

为了实现上述目的,本发明采用如下技术方案:In order to achieve the above object, the present invention adopts the following technical solutions:

一种基于3D打印和液桥转印制造大面积透明电极的方法,包括以下步骤:A method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing, comprising the following steps:

(1)采用电场驱动熔融喷射沉积3D打印制造母模;(1) Using electric field driven melt jet deposition 3D printing to manufacture the master model;

(2)通过真空辅助向母模浇铸液态有机聚合物材料翻制工作模具;(2) Casting the liquid organic polymer material to the master mold by vacuum assistance to remake the working mold;

(3)填充导电墨水到工作模具的沟槽内;(3) Fill the conductive ink into the groove of the working mould;

(4)将填充于工作模具沟槽内的导电墨水经加热固化,并利用液桥转印技术转印到基材上。(4) The conductive ink filled in the groove of the working mold is heated and cured, and transferred to the substrate by using the liquid bridge transfer printing technology.

进一步的,所述步骤(1)中,清洗和干燥基板,并采用等离子处理机对基板表面进行等离子轰击处理;根据设计的透明导电电极的结构,采用电场驱动熔融喷射沉积3D打印技术,以打印材料在基板上打印出所述透明导电电极所需要的微纳米特征结构或者图案。Further, in the step (1), the substrate is cleaned and dried, and the surface of the substrate is subjected to plasma bombardment treatment with a plasma processor; according to the structure of the designed transparent conductive electrode, the electric field-driven fusion jet deposition 3D printing technology is used to print The material prints out the micro-nano characteristic structure or pattern required by the transparent conductive electrode on the substrate.

优选的,所述基板包括但不限于玻璃、塑料和硅片。Preferably, the substrate includes but not limited to glass, plastic and silicon wafer.

优选的,所述打印材料包括但不限于聚己内酯和聚甲基丙烯酸甲酯。Preferably, the printing material includes but not limited to polycaprolactone and polymethyl methacrylate.

优选的,透明导电电极包括线栅电极、各种网格电极等,当然各个电极的连接关系以设计为准。Preferably, the transparent conductive electrodes include wire grid electrodes, various grid electrodes, etc. Of course, the connection relationship of each electrode is subject to design.

进一步的,所述步骤(2)翻制工作模具的方法包括:Further, described step (2) the method for turning over working mold comprises:

(2-1)采用旋涂或者浇铸工艺,将抽真空处理后的有机聚合物材料涂铺到母模上;(2-1) Spin coating or casting process is used to spread the vacuum-treated organic polymer material on the master mold;

(2-2)对有机聚合物材料进行加热固化;(2-2) heating and curing the organic polymer material;

(2-3)附加背衬支撑层,以树脂作为支撑层,首先在树脂上涂覆一层透明的偶联剂材料或者进行表面粘附性处理,将其贴合到有机聚合物材料之上;(2-3) Additional backing support layer, with resin as the support layer, first coat a layer of transparent coupling agent material on the resin or perform surface adhesion treatment, and attach it to the organic polymer material ;

(2-4)将多层复合结构整体进行加热,使有机聚合物材料完全固化,保证背衬支撑层和有机聚合物材料层牢固结合;(2-4) heating the multilayer composite structure as a whole, so that the organic polymer material is completely cured, so as to ensure that the backing support layer and the organic polymer material layer are firmly combined;

(2-5)采用揭开式脱模方法,将树脂和有机聚合物材料层与母模完全分离,完成工作模具的制造。(2-5) The resin and organic polymer material layers are completely separated from the master mold by using the uncovering demoulding method to complete the manufacture of the working mold.

优选的,所述有机聚合物材料为液态聚二甲基硅氧烷,且涂覆厚度为500nm-5mm。Preferably, the organic polymer material is liquid polydimethylsiloxane, and the coating thickness is 500nm-5mm.

更进一步的,所述步骤(2-2)中,在30℃-45℃下加热固化8-12小时。Furthermore, in the step (2-2), heat curing is performed at 30°C-45°C for 8-12 hours.

更进一步的,所述步骤(2-3)中以聚对苯二甲酸乙二醇酯作为支撑层,且厚度为0.1-1mm。Furthermore, in the step (2-3), polyethylene terephthalate is used as the support layer, and the thickness is 0.1-1 mm.

更进一步的,所述步骤(2-4)中,在40℃-60℃下加热固化10-18小时。Furthermore, in the step (2-4), heat curing at 40°C-60°C for 10-18 hours.

进一步的,所述步骤(3)的导电墨水,包括纳米银导电墨水、纳米铜导电墨水、银纳米线、石墨烯导电墨水或/和碳纳米管导电墨水,油墨表面自由能介于30mJ/m2-70mJ/m2之间。Further, the conductive ink of the step (3) includes nano-silver conductive ink, nano-copper conductive ink, silver nanowire, graphene conductive ink or/and carbon nanotube conductive ink, and the surface free energy of the ink is between 30mJ/m 2 -70mJ/ m2 between.

优选纳米银导电墨水。Nano silver conductive ink is preferred.

进一步的,所述步骤(3)中,采用刮涂或者提拉工艺,使导电墨水通过工作模具表面的微结构,在非连续除湿的作用和毛细作用下,填充在微结构沟槽内部的导电墨水会保留下来,而处于凹槽顶部的导电墨水会被移除,从而实现导电墨水的填充。Further, in the step (3), the conductive ink is passed through the microstructure on the surface of the working mold by scraping or pulling process, and the conductive ink filled in the microstructure groove is filled under the action of discontinuous dehumidification and capillary action. The ink remains, while the conductive ink at the top of the groove is removed, allowing the conductive ink to fill.

进一步的,所述步骤(4)的固化温度:100℃-150℃;固化时间:10-20分钟。Further, the curing temperature of the step (4): 100°C-150°C; curing time: 10-20 minutes.

进一步的,所述步骤(4)的具体步骤,在工作模具和目标基材之间构建一层液体粘合层,随着液体挥发,毛细力逐渐增加,拉动两个表面接触,使它们之间形成良好的共形接触。Further, in the specific step of the step (4), a layer of liquid adhesive layer is constructed between the working mold and the target substrate. As the liquid volatilizes, the capillary force gradually increases, and the two surfaces are pulled into contact to make them Forms a good conformal contact.

作为优选的,液体粘合层的液桥介质为极性液体,如甲醇、乙醇和异丙醇等。Preferably, the liquid bridge medium of the liquid adhesive layer is a polar liquid, such as methanol, ethanol and isopropanol.

进一步,所述方法还包括步骤(5),进一步固化导电结构,具体的,使分散的银颗粒以一定方式形成银单质而形成导电通路。Further, the method also includes step (5), further solidifying the conductive structure, specifically, making the dispersed silver particles form silver simple substance in a certain way to form a conductive path.

更进一步的,对于耐热衬底,采用热烧结的方法得到导电性能优异的电极;对于柔性电子产品使用的塑料基底,采用低温烧结、电烧结或化学烧结方式进行。Furthermore, for heat-resistant substrates, thermal sintering is used to obtain electrodes with excellent electrical conductivity; for plastic substrates used in flexible electronic products, low-temperature sintering, electrical sintering or chemical sintering are used.

与现有技术相比,本发明的有益效果为:Compared with prior art, the beneficial effect of the present invention is:

本发明结合了电场驱动熔融喷射沉积3D打印和液桥转印技术的优势,实现了大面积和超微细透明电极的高效、低成本批量化制造。具有以下显著的优势:The invention combines the advantages of electric field-driven fused jet deposition 3D printing and liquid bridge transfer printing technology, and realizes efficient and low-cost batch manufacturing of large-area and ultra-fine transparent electrodes. Has the following significant advantages:

(1)能够实现超大尺寸(米级尺度)基板透明电极高效和低成本规模化制造。(1) Efficient and low-cost large-scale manufacturing of transparent electrodes on ultra-large (meter-scale) substrates can be realized.

(2)能够实现亚微尺度和纳米尺度超微细透明电极的制造。(2) The fabrication of submicroscale and nanoscale ultrafine transparent electrodes can be realized.

(3)能够实现大高宽比透明电极的制造(同时具有低方阻和高透光率),实现高性能透明电极的制造,解决现有技术难以同时实现低方阻和高透光率透明电极制造的难题。(3) It can realize the manufacture of transparent electrodes with large aspect ratio (with low square resistance and high light transmittance at the same time), realize the manufacture of high-performance transparent electrodes, and solve the problem that the existing technology is difficult to achieve low square resistance and high light transmittance at the same time. Difficulties in electrode fabrication.

(4)适用于软、硬各种基材(衬底)透明电极的制造,尤其适用于非平整和易碎衬底透明电极的制造。具有非常广泛的应用领域。(4) It is suitable for the manufacture of transparent electrodes on various soft and hard substrates (substrates), especially suitable for the manufacture of transparent electrodes on non-flat and fragile substrates. Has a very wide range of applications.

(5)所制造的透明电极一致性好、可靠性高。(5) The manufactured transparent electrode has good consistency and high reliability.

(6)工艺简单,不需要专用的设备,制造成本低。(6) The process is simple, no special equipment is needed, and the manufacturing cost is low.

(7)工艺适应性强。(7) Strong process adaptability.

(8)适用的导电材料广泛,本发明可广泛的用于触摸屏、薄膜太阳能电池、OLED、LCD、透明显示、电子纸、柔性电子、可穿戴设备等诸多领域。(8) The applicable conductive materials are wide, and the present invention can be widely used in many fields such as touch screens, thin film solar cells, OLEDs, LCDs, transparent displays, electronic papers, flexible electronics, and wearable devices.

(9)本发明为太阳能电池、触摸屏、OLED、LCD等领域所需要的大尺寸和大面积电极(透明电极)和超微细电路的制造提供一种具有广泛工业化应用前景的全新解决方案,而且具有精度高、超大尺寸、低成本、高效的独特优势。(9) the present invention provides a kind of brand-new solution that has extensive industrialized application prospect for the manufacture of large-size and large-area electrodes (transparent electrodes) and ultra-fine circuits required in fields such as solar cells, touch screens, OLEDs, and LCDs, and has The unique advantages of high precision, super large size, low cost and high efficiency.

附图说明Description of drawings

构成本申请的一部分的说明书附图用来提供对本申请的进一步理解,本申请的示意性实施例及其说明用于解释本申请,并不构成对本申请的不当限定。The accompanying drawings constituting a part of the present application are used to provide further understanding of the present application, and the schematic embodiments and descriptions of the present application are used to explain the present application, and do not constitute improper limitations to the present application.

图1是本发明结合电场驱动熔融喷射沉积3D打印和液桥转印技术制造大面积透明电极的工艺流程示意图;Figure 1 is a schematic diagram of the process flow of the present invention in combination with electric field-driven melt jet deposition 3D printing and liquid bridge transfer printing technology to manufacture large-area transparent electrodes;

图2是本发明实施例制造透明电极方法示意图;2 is a schematic diagram of a method for manufacturing a transparent electrode according to an embodiment of the present invention;

图3是本发明采用电场驱动熔融喷射沉积3D打印技术制造母模原理示意图。Fig. 3 is a schematic diagram of the principle of manufacturing a master model by using electric field-driven fusion jet deposition 3D printing technology in the present invention.

具体实施方式:Detailed ways:

下面结合附图与实施例对本发明作进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

应该指出,以下详细说明都是例示性的,旨在对本申请提供进一步的说明。除非另有指明,本文使用的所有技术和科学术语具有与本申请所属技术领域的普通技术人员通常理解的相同含义。It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本申请的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、操作、器件、组件和/或它们的组合。It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and/or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and/or combinations thereof.

在本发明中,术语如“上”、“下”、“左”、“右”、“前”、“后”、“竖直”、“水平”、“侧”、“底”等指示的方位或位置关系为基于附图所示的方位或位置关系,只是为了便于叙述本发明各部件或元件结构关系而确定的关系词,并非特指本发明中任一部件或元件,不能理解为对本发明的限制。In the present invention, terms such as "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "side", "bottom" etc. indicate The orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, and is only a relative term determined for the convenience of describing the structural relationship of the various components or elements of the present invention, and does not specifically refer to any component or element in the present invention, and cannot be understood as a reference to the present invention. Invention Limitations.

本发明中,术语如“固接”、“相连”、“连接”等应做广义理解,表示可以是固定连接,也可以是一体地连接或可拆卸连接;可以是直接相连,也可以通过中间媒介间接相连。对于本领域的相关科研或技术人员,可以根据具体情况确定上述术语在本发明中的具体含义,不能理解为对本发明的限制。In the present invention, terms such as "fixed", "connected" and "connected" should be understood in a broad sense, which means that they can be fixedly connected, integrally connected or detachably connected; they can be directly connected or can be connected through the middle The medium is indirectly connected. For relevant researchers or technical personnel in the field, the specific meanings of the above terms in the present invention can be determined according to specific situations, and should not be construed as limitations on the present invention.

正如背景技术所介绍的,现有技术中光学光刻、纳米压印、喷墨打印、气溶胶打印等多种制造技术在实现大面积透明电极方面面临许多不足和局限性,诸如加工成本、制造周期、最大图形化面积等。为了解决如上的技术问题,本申请提出了一种基于电场驱动熔融喷射沉积和液桥转印技术制备大面积的透明电极的方法。As introduced in the background, various manufacturing technologies such as optical lithography, nanoimprinting, inkjet printing, and aerosol printing in the prior art face many shortcomings and limitations in realizing large-area transparent electrodes, such as processing costs, manufacturing Period, maximum graphical area, etc. In order to solve the above technical problems, the present application proposes a method for preparing a large-area transparent electrode based on electric field-driven melt jet deposition and liquid bridge transfer technology.

本发明的工作原理为采用电场驱动熔融喷射沉积3D打印制造大尺寸母版(母模);通过真空辅助向大尺寸母版浇铸液态聚二甲基硅氧烷(PDMS)材料翻制PDMS软模具(工作模具);利用液桥转印技术将填充于PDMS软模具沟槽内的导电墨水经烧结固化后转印到基材上;对在基材上的透明电极进行后处理。获得大面积、大高宽比、高分辨透明电极。The working principle of the present invention is to use electric field-driven fusion jet deposition 3D printing to manufacture large-size master plates (mother molds); through vacuum-assisted casting of liquid polydimethylsiloxane (PDMS) materials to large-size master plates to reproduce PDMS soft molds (working mould); use the liquid bridge transfer technology to transfer the conductive ink filled in the groove of the PDMS soft mold to the substrate after sintering and solidification; perform post-processing on the transparent electrode on the substrate. Obtain large area, high aspect ratio, high resolution transparent electrodes.

在本发明中,大面积、大高宽比、高分辨均是本领域技术人员通常所指的米级尺度、同时具有低方阻和高透光率以及较高的分辨率,当然,本发明的技术方案也可以用于一般要求或指标的透明电极的制备上。In the present invention, large area, large aspect ratio, and high resolution are meter-level scales commonly referred to by those skilled in the art, and have low square resistance, high light transmittance, and high resolution at the same time. Of course, the present invention The technical solution can also be used in the preparation of transparent electrodes for general requirements or indicators.

以下结合附图,对本发明的制造方法作进一步描述。The manufacturing method of the present invention will be further described below in conjunction with the accompanying drawings.

实施实例1Implementation example 1

本实施例以电场驱动熔融喷射沉积技术制造大面积母模结构,随后通过图形复制工艺将母模结构转移到PDMS工作模具上,之后采用纳米银墨水对PDMS工作模具进行填充,最后采用液桥转印将银导线转移到目标基底上(硬质衬底),所制造的图形结构是线栅结构。制造过程如图2所示,具体制备步骤包括:In this embodiment, a large-area master mold structure is manufactured by electric field-driven fusion jet deposition technology, and then the master mold structure is transferred to the PDMS working mold through a graphic replication process, and then the PDMS working mold is filled with nano-silver ink, and finally the liquid bridge transfer The silver wire is transferred to the target substrate (hard substrate) by printing, and the pattern structure manufactured is a wire grid structure. The manufacturing process is shown in Figure 2, and the specific preparation steps include:

(1)制造母模:利用电场驱动熔融喷射沉积3D打印制造大尺寸母模(母版)(1) Manufacture of the master mold: using electric field-driven fusion jet deposition 3D printing to manufacture large-scale master molds (master plates)

采用普通玻璃作为基板(基底)。首先对玻璃基板进行清洗,去离子水超声处理10min,然后氮气吹干,再采用等离子处理机对玻璃表面进行等离子轰击处理,提高打印材料与玻璃基板之间的粘附力。以PMMA作为打印材料,根据所要制造的微纳模具图形结构,采用电场驱动熔融喷射沉积在玻璃基板上制造出PMMA结构,如图3所示。Ordinary glass is used as the substrate (substrate). Firstly, the glass substrate was cleaned, deionized water was ultrasonically treated for 10 minutes, and then dried with nitrogen gas, and then the glass surface was subjected to plasma bombardment treatment with a plasma processor to improve the adhesion between the printing material and the glass substrate. Using PMMA as the printing material, according to the pattern structure of the micro-nano mold to be manufactured, the PMMA structure is manufactured on the glass substrate by electric field-driven melt jet deposition, as shown in Figure 3.

打印设备的储料桶外套设有加热器,以对储料桶内的打印材料进行预加热。打印机端部的打印针头处也可以设置有加热器。The outer casing of the storage barrel of the printing device is provided with a heater to preheat the printing material in the storage barrel. A heater may also be provided at the printing needle at the end of the printer.

由于打印设备等为现有设备,在此对于其结构不再进行赘述。Since the printing device and the like are existing devices, their structure will not be described in detail here.

打印PMMA结构图形为:线宽5μm,周期150μm,高度2μm的线栅结构,有效图形区域面积为200mm X 200mm。The printed PMMA structure pattern is: a wire grid structure with a line width of 5 μm, a period of 150 μm, and a height of 2 μm, and the effective pattern area is 200mm X 200mm.

(2)翻制工作模具:采用PDMS材料对图形进行转移(2) Turn over the working mold: use PDMS material to transfer the graphics

在制得的母模表面涂铺一层PDMS聚合物,选用适量道康宁184罐装胶,通过使用刮膜机在母模上表面刮涂一层约0.5-2mm厚的PDMS,在真空环境下对PDMS进行加热固化,加热温度设定为30-40℃,加热时间设定为8-12h。然后在厚度为0.3mm的PET上涂覆一层偶联剂(如KH550,KH560,KH570,KH792,DL602,DL171)或者胶粘剂,贴合到PMDS上,再将母模、PDMS复制结构、PET背衬整体放置到真空加热箱中,30-40℃条件下加热固化10小时。待PDMS完全固化后采用“揭开式”脱模方法,将PET和PDMS复合软模具(工作模具)与母模完全分离,完成工作模具的制造。Spread a layer of PDMS polymer on the surface of the prepared master mold, select an appropriate amount of Dow Corning 184 canned glue, and scrape a layer of PDMS with a thickness of about 0.5-2 mm on the upper surface of the master mold by using a scraper machine, and apply it in a vacuum environment. The PDMS is cured by heating, the heating temperature is set at 30-40°C, and the heating time is set at 8-12h. Then coat a layer of coupling agent (such as KH550, KH560, KH570, KH792, DL602, DL171) or adhesive on the PET with a thickness of 0.3mm, and stick it to the PMDS, and then put the master mold, PDMS replication structure, PET back The whole lining is placed in a vacuum heating oven, and heated and cured at 30-40°C for 10 hours. After the PDMS is completely cured, the "opening" demoulding method is used to completely separate the PET and PDMS composite soft mold (working mold) from the master mold to complete the manufacture of the working mold.

(3)填充纳米银墨水:在PDMS工作模具沟槽内部填充纳米银墨水(3) Filling nano-silver ink: Filling nano-silver ink inside the PDMS working mold groove

在PDMS工作模具的沟槽内填充纳米银墨水,采用浸渍提拉工艺,使纳米银墨水经过PDMS工作模具表面的微结构,在非连续除湿的作用下纳米银墨水将填充进PDMS工作模具的沟槽内,而不残留在模板顶面。Fill the groove of the PDMS working mold with nano-silver ink, and use the dipping and pulling process to make the nano-silver ink pass through the microstructure on the surface of the PDMS working mold. Under the action of discontinuous dehumidification, the nano-silver ink will be filled into the groove of the PDMS working mold in the groove without remaining on the top surface of the template.

(4)加热固化:将完全填充于工作模具中的油墨加热固化(4) Heat curing: heat and cure the ink completely filled in the working mold

通过加热的方式使纳米银墨水中的溶剂挥发,从而实现固化。由于不同的纳米银墨水固化性能各不相同,根据本实施例采用的纳米银墨水,采用100℃下加热固化10min。The solvent in the nano-silver ink is volatilized by heating to achieve curing. Since different nano-silver inks have different curing properties, the nano-silver ink used in this embodiment is cured by heating at 100° C. for 10 minutes.

(5)液桥转印银导线(5) Liquid bridge transfer printing silver wire

选取普通玻璃作为目标基底,经清洗吹干等预处理之后,在玻璃表面喷涂一层异丙醇作为液桥介质,将填充银导线的模板与基底充分接触,适当调整两者的相对位置,并确保PDMS工作模具和玻璃基底间没有气泡。在60℃条件下,由于异丙醇具有较高的挥发率,会很快从PDMS的边缘处或PDMS本身渗透到大气中。随着异丙醇的减少,液层在沟槽内异丙醇的曲面曲率会不断减小进而使毛细管力不断增大,并最终将固化的银导线拉到基底表面,实现固化银导线从PDMS工作模具向基底的转移。Ordinary glass is selected as the target substrate. After pretreatment such as cleaning and drying, a layer of isopropanol is sprayed on the glass surface as a liquid bridge medium, and the template filled with silver wires is fully in contact with the substrate, and the relative position of the two is properly adjusted. Make sure there are no air bubbles between the PDMS working mold and the glass substrate. At 60°C, due to the high volatility of isopropanol, it will quickly penetrate into the atmosphere from the edge of PDMS or PDMS itself. As the isopropanol decreases, the curvature of the isopropanol surface of the liquid layer in the groove will continue to decrease, thereby increasing the capillary force, and finally pulling the cured silver wire to the surface of the substrate, realizing the cured silver wire from PDMS. Transfer of the working mold to the substrate.

作为更优选的实施方式,还包括步骤(6)后处理过程。As a more preferred embodiment, step (6) post-processing is also included.

为提高银导线导电性能,需使分散的银颗粒以一定方式形成银单质形成导电通路,将转印后的银导线置于加热平台上进行高温烧结,烧结温度为250℃-350℃,烧结时间不少于30min。In order to improve the conductivity of the silver wire, it is necessary to make the dispersed silver particles form a silver substance in a certain way to form a conductive path. The transferred silver wire is placed on a heating platform for high-temperature sintering. The sintering temperature is 250°C-350°C, and the sintering time is Not less than 30min.

实施实例2Implementation example 2

本实施例以电场驱动熔融喷射沉积技术制造大面积母模结构,随后通过图形复制工艺将母模结构转移到PDMS上,之后采用纳米银墨水对PDMS工作模具进行填充,最后采用液桥转印将银导线转移到目标基底PET(柔性衬底)上,所制造的图形结构是网格结构。制造过程如图2所示,具体制备步骤包括:In this embodiment, a large-area master mold structure is manufactured by electric field-driven fusion jet deposition technology, and then the master mold structure is transferred to PDMS through a graphic replication process, and then the PDMS working mold is filled with nano-silver ink, and finally liquid bridge transfer is used to transfer the master mold structure to PDMS. The silver wires are transferred to the target substrate PET (flexible substrate), and the fabricated pattern structure is a grid structure. The manufacturing process is shown in Figure 2, and the specific preparation steps include:

(1)制造母模:利用电场驱动熔融喷射沉积3D打印制造大尺寸母模(母版)(1) Manufacture of the master mold: using electric field-driven fusion jet deposition 3D printing to manufacture large-scale master molds (master plates)

采用普通玻璃作为基板(基底)。首先对玻璃基板进行清洗,去离子水超声处理10min,然后氮气吹干。以聚己内酯(PCL)作为打印材料,根据所要制造的微纳模具图形结构,采用电场驱动熔融喷射沉积在玻璃基板上制造出PCL结构,如图3所示。Ordinary glass is used as the substrate (substrate). Firstly, the glass substrate was cleaned, ultrasonically treated with deionized water for 10 min, and then blown dry with nitrogen. Using polycaprolactone (PCL) as the printing material, according to the micro-nano mold pattern structure to be manufactured, the PCL structure was manufactured on the glass substrate by electric field-driven melt jet deposition, as shown in Figure 3.

打印PCL结构图形为:线宽2μm,周期200μm,高度0.8μm的网格结构,有效图形区域面积为80mm X80mm。The printed PCL structure pattern is: a grid structure with a line width of 2 μm, a period of 200 μm, and a height of 0.8 μm, and the effective graphics area is 80mm X 80mm.

(2)翻制工作模具:采用PDMS材料对图形进行转移(2) Turn over the working mold: use PDMS material to transfer the graphics

在制得的母模表面涂铺一层PDMS聚合物,选用适量道康宁184罐装胶,通过使用刮膜机在母模上表面刮涂一层约0.5-2mm厚的PDMS,在真空环境下对PDMS进行加热固化,加热温度设定为40℃,加热时间设定为8-12h。然后在厚度为0.3mm的PET上涂覆一层偶联剂(如KH550,KH560,KH570,KH792,DL602,DL171)或者胶粘剂,贴合到PMDS上,再将母模、PDMS复制结构、PET背衬整体放置到真空加热箱中,40℃条件下加热固化10小时。待PDMS完全固化后采用“揭开式”脱模方法,将PET和PDMS复合软模具(工作模具)与母模完全分离,完成工作模具的制造。Spread a layer of PDMS polymer on the surface of the prepared master mold, select an appropriate amount of Dow Corning 184 canned glue, and scrape a layer of PDMS with a thickness of about 0.5-2 mm on the upper surface of the master mold by using a scraper machine, and apply it in a vacuum environment. The PDMS is cured by heating, the heating temperature is set at 40°C, and the heating time is set at 8-12h. Then coat a layer of coupling agent (such as KH550, KH560, KH570, KH792, DL602, DL171) or adhesive on the PET with a thickness of 0.3mm, and stick it to the PMDS, and then put the master mold, PDMS replication structure, PET back The whole lining is placed in a vacuum heating oven, and heated and cured at 40°C for 10 hours. After the PDMS is completely cured, the "opening" demoulding method is used to completely separate the PET and PDMS composite soft mold (working mold) from the master mold to complete the manufacture of the working mold.

(3)填充纳米银墨水:在工作模具沟槽内部填充纳米银墨水(3) Filling nano-silver ink: filling nano-silver ink inside the groove of the working mold

在PDMS工作模具的沟槽内填充纳米银墨水,采用浸渍提拉工艺,使纳米银墨水经过PDMS工作模具表面的微结构,在非连续除湿的作用下纳米银墨水将填充进PDMS工作模具的沟槽内,而不残留在模板顶面。Fill the groove of the PDMS working mold with nano-silver ink, and use the dipping and pulling process to make the nano-silver ink pass through the microstructure on the surface of the PDMS working mold. Under the action of discontinuous dehumidification, the nano-silver ink will be filled into the groove of the PDMS working mold in the groove without remaining on the top surface of the template.

(4)加热固化:将完全填充于工作模具中的油墨加热固化(4) Heat curing: heat and cure the ink completely filled in the working mold

通过加热的方式使纳米银墨水中的溶剂挥发,从而实现固化。由于不同的纳米银墨水固化性能各不相同,根据本实施例采用的纳米银墨水,采用100℃下加热固化10min。The solvent in the nano-silver ink is volatilized by heating to achieve curing. Since different nano-silver inks have different curing properties, the nano-silver ink used in this embodiment is cured by heating at 100° C. for 10 minutes.

(5)液桥转印银导线(5) Liquid bridge transfer printing silver wire

选取PET作为目标基底,经清洗吹干等预处理之后,在玻璃表面喷涂一层乙醇作为液桥介质,将填充银导线的工作模具与基底充分接触,适当调整两者的相对位置,并确保PDMS工作模具和玻璃基底间没有气泡。在80℃条件下,由于乙醇具有较高的挥发率,会很快从PDMS的边缘处或PDMS本身渗透到大气中。随着乙醇的减少,液层在沟槽内乙醇的曲面曲率会不断减小进而使毛细管力不断增大,并最终将固化的银导线拉到基底表面,实现固化银导线从PDMS工作模具向基底的转移。Select PET as the target substrate, after pretreatment such as cleaning and drying, spray a layer of ethanol on the glass surface as a liquid bridge medium, fully contact the working mold filled with silver wires with the substrate, adjust the relative position of the two appropriately, and ensure that the PDMS There are no air bubbles between the working mold and the glass substrate. At 80°C, due to the high volatilization rate of ethanol, it will quickly penetrate into the atmosphere from the edge of PDMS or PDMS itself. With the decrease of ethanol, the curvature of the ethanol surface of the liquid layer in the groove will continue to decrease and the capillary force will continue to increase, and finally the cured silver wire will be pulled to the surface of the substrate, so that the cured silver wire will move from the PDMS working mold to the substrate. transfer.

作为更加优选的实施方式,还包括了步骤(6),即后处理步骤。As a more preferred embodiment, step (6), that is, a post-processing step, is also included.

该步骤为提高银导线导电性能,需使分散的银颗粒以一定方式形成银单质形成导电通路,由于PET材料耐热性较差,通常采用低温烧结、电烧结、化学烧结等方式进行。将转印后的银导线置于电烧结机中进行3min烧结,从而获得导电性能良好的银导线。In this step, in order to improve the conductivity of the silver wire, it is necessary to make the dispersed silver particles form a silver substance in a certain way to form a conductive path. Since the heat resistance of the PET material is poor, low-temperature sintering, electrical sintering, chemical sintering, etc. are usually used. The transferred silver wire was placed in an electric sintering machine for sintering for 3 minutes, so as to obtain a silver wire with good electrical conductivity.

当然上述两个实施例仅仅是为了使得本领域技术人员更加明白技术方案例举的两个典型实施方式而已,上述具体材料的选择或者具体的参数,如温度、时间以及厚度等都可以在本发明给出的范围内,依据具体的打印环境和选择的材质,以及打印的要求等具体情况进行变动,并不仅限于上述两个实施例给出的具体材质以及参数。Of course, the above two embodiments are only to make those skilled in the art understand the two typical implementations of the technical solutions. The selection of the above-mentioned specific materials or specific parameters, such as temperature, time and thickness, etc., can be used in the present invention. Within the given range, changes may be made according to the specific printing environment, selected materials, and printing requirements, and are not limited to the specific materials and parameters given in the above two embodiments.

以上所述仅为本申请的优选实施例而已,并不用于限制本申请,对于本领域的技术人员来说,本申请可以有各种更改和变化。凡在本申请的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本申请的保护范围之内。The above descriptions are only preferred embodiments of the present application, and are not intended to limit the present application. For those skilled in the art, there may be various modifications and changes in the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this application shall be included within the protection scope of this application.

上述虽然结合附图对本发明的具体实施方式进行了描述,但并非对本发明保护范围的限制,所属领域技术人员应该明白,在本发明的技术方案的基础上,本领域技术人员不需要付出创造性劳动即可做出的各种修改或变形仍在本发明的保护范围以内。Although the specific implementation of the present invention has been described above in conjunction with the accompanying drawings, it does not limit the protection scope of the present invention. Those skilled in the art should understand that on the basis of the technical solution of the present invention, those skilled in the art do not need to pay creative work Various modifications or variations that can be made are still within the protection scope of the present invention.

Claims (8)

1. a kind of method based on 3D printing and liquid bridge transfer manufacture large-area transparent electrode, it is characterized in that: the following steps are included:
(1) using polymethyl methacrylate as printed material, master mold is manufactured using electric field driven melting jet deposition 3D printing;
(2) work mold processed is turned over to master mold casting liquid organic polymer material by vacuum aided;
(3) it fills in nanometer conductive ink to the groove of work mold;
(4) it will be filled in the heated solidification of the conductive ink in work mold trench, and is transferred to base using liquid bridge transfer technique On material;
The method that the step (2) turns over work mold processed includes:
(2-1) uses spin coating or casting process, and the organic polymer material painting after vacuumize process is taped against on master mold;
(2-2) is heating and curing to organic polymer material;
(2-3) adds backing support, and using resin as supporting layer, the coupling agent material of layer of transparent is coated first on resin Or surface adhesive processing is carried out, it is fitted on organic polymer material;
(2-4) integrally heats multi-layer compound structure, and organic polymer material is fully cured, guarantee backing support and The firm connection of organic polymer material layer;
(2-5) uses open-type release method, and resin and organic polymer material layer are kept completely separate with master mold, completes Working mould The manufacture of tool;
In the step (3), using blade coating or czochralski process, conductive ink is made to pass through the micro-structure of work die surface, Under the effect and capillarity of discontinuous dehumidifying, being filled in the conductive ink inside microstructured groove can be remained, and be in The conductive ink of groove top can be removed, to realize the filling of conductive ink.
2. a kind of method based on 3D printing and liquid bridge transfer manufacture large-area transparent electrode as described in claim 1, special Sign is: in the step (1), cleaning and dry substrate, and plasma bombardment is carried out to substrate surface using plasma processor Processing;According to the structure of the transparent conductive electrode of design, jet deposition 3D printing technique is melted using electric field driven, to print material Material prints micro-nano feature structure or pattern required for the transparent conductive electrode on substrate.
3. a kind of method based on 3D printing and liquid bridge transfer manufacture large-area transparent electrode as described in claim 1, special Sign is: the organic polymer material is liquid dimethyl silicone polymer, and coating thickness is 500nm-5mm.
4. a kind of method based on 3D printing and liquid bridge transfer manufacture large-area transparent electrode as described in claim 1, special Sign is: in the step (2-2), being heating and curing at 30 DEG C -45 DEG C 8-12 hours;
Or, using polyethylene terephthalate as supporting layer in the step (2-3), and with a thickness of 0.1-1mm;
Or, being heating and curing at 40 DEG C -60 DEG C 10-18 hours in the step (2-4).
5. a kind of method based on 3D printing and liquid bridge transfer manufacture large-area transparent electrode as described in claim 1, special Sign is: the conductive ink of the step (3), including nano silver conductive ink, nano-copper conductive ink, silver nanowires, graphene Conductive ink or/and carbon nanotube conducting ink, ink pellet surface free energy is between 30mJ/m2-70mJ/m2Between.
6. a kind of method based on 3D printing and liquid bridge transfer manufacture large-area transparent electrode as described in claim 1, special Sign is: the solidification temperature of the step (4): 100 DEG C -150 DEG C;Curing time: 10-20 minutes.
7. a kind of method based on 3D printing and liquid bridge transfer manufacture large-area transparent electrode as described in claim 1, special Sign is: the specific steps of the step (4), one layer of liquid adhesive layer is constructed between work mold and target substrate, with liquid Body volatilization, capillary force gradually increase, and pull two surface contacts, make to form good bringing into conformal contact between them;
Further, the liquid bridge medium of liquid adhesive layer is polar liquid.
8. a kind of method based on 3D printing and liquid bridge transfer manufacture large-area transparent electrode as described in claim 1, special Sign is: the method also includes step (5), further curing conductive structure is specific: making the Argent grain of dispersion in a certain way It forms silver-colored simple substance and forms conductive path;
For heat resistant substrate, the excellent electrode of electric conductivity is obtained using the method for thermal sintering;Flexible electronic product is used Plastic-substrates, using low-temperature sintering, electricity sintering or chemically sintered mode carry out.
CN201810601581.2A 2018-06-12 2018-06-12 Method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing Active CN108831627B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810601581.2A CN108831627B (en) 2018-06-12 2018-06-12 Method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810601581.2A CN108831627B (en) 2018-06-12 2018-06-12 Method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing

Publications (2)

Publication Number Publication Date
CN108831627A CN108831627A (en) 2018-11-16
CN108831627B true CN108831627B (en) 2019-10-25

Family

ID=64144885

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810601581.2A Active CN108831627B (en) 2018-06-12 2018-06-12 Method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing

Country Status (1)

Country Link
CN (1) CN108831627B (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109616418B (en) 2018-12-06 2021-11-09 合肥鑫晟光电科技有限公司 Thin film transistor, display substrate, manufacturing method of display substrate and display device
CN109445248B (en) * 2018-12-29 2021-09-21 吉林大学 Method for imprinting metal nanowires by using capillary action and application
CN110021462B (en) * 2019-05-17 2020-05-05 青岛五维智造科技有限公司 A kind of manufacturing method of embedded metal mesh flexible transparent electrode and its application
CN110752145B (en) * 2019-10-28 2022-03-01 清华大学 Transfer method and transfer head based on liquid capillary force and surface tension
CN113394555A (en) * 2020-03-13 2021-09-14 昆山哈勃电波电子科技有限公司 Method for preparing antenna by adopting TDP silver paste transfer printing process
CN111588372A (en) * 2020-04-20 2020-08-28 北京邮电大学 A method for fabricating flexible electrocardiogram (ECG) electrodes
CN112811386A (en) * 2020-12-30 2021-05-18 哈尔滨工业大学(深圳) Preparation method of 3d microelectrode
CN112768141B (en) * 2020-12-31 2021-12-28 西安交通大学 A method for preparing flexible transparent conductive film based on micro-stereolithography technology
CN112599714B (en) * 2021-01-07 2022-08-05 福州大学 A method for preparing nano-LED by transferring patterned quantum dots
CN112951485B (en) * 2021-01-26 2022-10-18 青岛理工大学 Metal grid stretchable transparent electrode with shell-core structure, and preparation method and application thereof
CN112927862B (en) * 2021-01-26 2022-08-02 青岛理工大学 High-performance large-area flexible transparent electrode and preparation method and application thereof
CN113252757B (en) * 2021-06-08 2022-12-06 北京印刷学院 Multi-channel electrochemical sensor and construction method and application thereof
CN113421778B (en) * 2021-06-21 2022-10-21 青岛理工大学 Flexible micro super capacitor and manufacturing method thereof
CN113986051B (en) * 2021-10-26 2023-04-07 盈天实业(深圳)有限公司 Preparation method of touch device, touch device and touch screen
CN114013026B (en) * 2021-11-02 2022-11-29 之江实验室 Continuous light curing 3D printing equipment and method based on liquid bridge assistance
CN114156349B (en) * 2021-11-08 2024-08-20 苏州诺菲纳米科技有限公司 Solar cell and manufacturing method thereof
EP4295417A4 (en) * 2022-01-27 2024-05-22 Triumph Science & Technology Group Co., Ltd METHOD FOR FORMING CROSSED CONDUCTIVE LINES OF THIN FILM SOLAR MODULE
CN115553782B (en) * 2022-09-22 2024-11-15 南通大学 A patch array multiphase conductive liquid bridge electrode device and use method
CN117457636A (en) * 2023-10-09 2024-01-26 旭显未来(北京)科技有限公司 Display substrate, preparation method of display substrate and display screen

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104752530A (en) * 2013-12-30 2015-07-01 上海神舟新能源发展有限公司 Solar cell electrode manufactured by virtue of 3D printing
CN104835555A (en) * 2015-05-13 2015-08-12 南京邮电大学 Preparation method of patterned metal transparent conductive film
CN107932898A (en) * 2017-12-22 2018-04-20 青岛理工大学 Electric field driven fused jet deposition 3D printer and working method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104752530A (en) * 2013-12-30 2015-07-01 上海神舟新能源发展有限公司 Solar cell electrode manufactured by virtue of 3D printing
CN104835555A (en) * 2015-05-13 2015-08-12 南京邮电大学 Preparation method of patterned metal transparent conductive film
CN107932898A (en) * 2017-12-22 2018-04-20 青岛理工大学 Electric field driven fused jet deposition 3D printer and working method thereof

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
基于PDMS模板微纳米转印技术的研究;李鑫;《中国优秀硕士学位论文全文数据库》;20140630;B020-337 *
电场驱动喷射沉积3D打印技术研究;钱垒;《中国优秀硕士学位论文全文数据库》;20180515;I138-516 *
纳米银墨水的液桥转印技术研究;王时飞等;《真空》;20140930;第51卷(第5期);64-67 *

Also Published As

Publication number Publication date
CN108831627A (en) 2018-11-16

Similar Documents

Publication Publication Date Title
CN108831627B (en) Method for manufacturing large-area transparent electrodes based on 3D printing and liquid bridge transfer printing
WO2020233160A1 (en) Manufacturing method for embedded metal grid-based flexible transparent electrode and application thereof
CN109532067B (en) A kind of manufacturing method of high-performance flexible electric heating film
CN109483780A (en) Transfer printing method for microstructure with large height-width ratio
CN109219174B (en) A kind of manufacturing method of transparent electric heating glass with high light transmittance and low square resistance
CN104835555B (en) A kind of preparation method of pattern metal transparent conductive film
WO2022110423A1 (en) Method and system for manufacturing flexible transparent conductive film having embedded metallic material
CN112509747B (en) A flexible transparent conductive film fabrication method based on low-voltage driven liquid film embedded electrojet 3D printing
CN104134484A (en) Flexible transparent conductive film based on silver nanowires and preparation method
US11926524B1 (en) Methods, apparatus, and systems for fabricating solution-based conductive 2D and 3D electronic circuits
CN112927862B (en) High-performance large-area flexible transparent electrode and preparation method and application thereof
CN105786242A (en) Flexible touch panel sensing film and preparation method thereof
CN109080281B (en) Method for preparing flexible transparent conductive film based on wetting substrate fine ink-jet printing
CN113793883B (en) Preparation method of solar cell electrode
CN105926014A (en) Preparation method of large-area highly-ordered porous oxide films based on nano soft embossing
Zhu et al. Fabricating transparent electrodes by combined electric-field-driven fusion direct printing and the liquid bridge transfer method
CN105405752A (en) Fabrication method of flexible nanowire gate-type transparent conductive electrode
Meng et al. Silver mesh electrodes via electroless deposition-coupled inkjet-printing mask technology for flexible polymer solar cells
CN101837951B (en) Apparatus and method for graphically producing nano structures by way of electrode induction and microwave curing
CN108154968B (en) A kind of electronic information shows the preparation method with metal nano network flexible panel
Sun et al. Low Cost and Facile Fabrication of a Micro‐Mold with High Aspect Ratio for Transparent Electrodes with Metal Mesh Using Micro‐Scale 3D Printing
CN112331381B (en) Manufacturing method of high-performance metal grid transparent electrode, transparent electrode obtained by manufacturing method and application of transparent electrode
Yuan et al. Fabrication of Flexible and Transparent Metal Mesh Electrodes Using Surface Energy‐Directed Assembly Process for Touch Screen Panels and Heaters
Zhao et al. Fluid driven self-assembly of woven Ag nanowire grid for ultra-flexible transparent electrodes
CN104191803A (en) Preparation method of graphene/substrate composite conducting material

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant