CN108735637B - Improved atomizing spray structure - Google Patents

Abstract

The invention relates to the technical field of solar cell silicon wafer production equipment, in particular to an improved atomization spraying structure.

Description

Improved atomizing spray structure

Technical field

The invention relates to the technical field of solar cell silicon wafer production equipment, and in particular to an improved atomizing spray structure.

Background technique

Silicon wafers are also called "chips" and integrated circuit blocks. A silicon chip usually contains circuits composed of tens to tens of thousands of silicon transistors to complete one or several functions. Silicon wafers need to be cleaned and dried during the production process. In the existing silicon wafer atomization spray device (shown in Figure 1-3), when atomizing and spraying the silicon wafer, the liquid enters from the inlet 6, and the lower end A row of uniform small holes 7 is sprayed out, and there is no flow-equalizing structure inside, resulting in the liquid volume and pressure at both ends of the sprayed liquid being smaller than the liquid volume and pressure in the middle, resulting in uneven spraying, which affects the silicon wafer cleaning effect.

Contents of the invention

The technical problem to be solved by the present invention is: in order to solve the technical problem of poor cleaning effect of the silicon wafer atomizing spray device in the prior art, the present invention provides an improved atomizing spray structure.

The technical solution adopted by the present invention to solve the technical problem is: an improved atomization spray structure, which includes a long spray pipe, a first inner pipe and a second inner pipe. A main main pipe is arranged in the middle of the upper side of the long spray pipe. Inlet, the bottom of the long spray pipe is provided with a plurality of uniform main outlets along the length direction of the long spray pipe. The first inner pipe and the second inner pipe are both arranged inside the long spray pipe. The first inner pipe and the second inner pipe are arranged inside the long spray pipe. The axis of the inner pipe is parallel to the length direction of the long spray pipe. Both ends of the first inner pipe and the second inner pipe are closed. The first inner pipe is located above the second inner pipe. There is a hole on the top of the first inner pipe. One air inlet and multiple air outlet holes. The air inlet is located in the middle. The air outlet holes are located on both sides of the air inlet and extend toward both ends of the first inner tube. The density of the air outlet holes gradually becomes larger from the center to both sides. The bottom of the second inner tube is provided with a plurality of uniform liquid outlets along the length direction of the second inner tube. The air inlet is connected with an air inlet pipe, and the second inner pipe is connected with a liquid inlet pipe. In the improved atomizing spray structure, the external air medium is first filled into the first inner pipe through the air inlet, and the air is discharged from the air outlet hole on the first inner pipe, and the gas is evenly discharged into the long spray pipe. The air outlet holes on the first inner tube are relatively loose near the air inlet, and the air outlet holes are dense at the position far away from the secondary air inlet. This is also conducive to the uniform air outlet of the entire first inner tube and the gas impact. After spraying the upper wall of the long spray pipe, it changes direction and runs downward to reach the main outlet hole at the bottom of the long spray pipe. This way, the air will fill the entire long spray pipe, so that the main outlet holes at both ends and in the middle of the long spray pipe are The air volume of the hole is consistent with the wind pressure. The second inner tube is connected to the external liquid inlet pipe, and the cleaning fluid is connected and sprayed from the main outlet hole through uniform air volume and air pressure, which achieves a good cleaning effect on the silicon wafer.

In order to facilitate the spraying of liquid, the cross-section of the long spray pipe is wide at the top and narrow at the bottom.

In order to prevent gas from leaking from above and affecting the spray pressure, the air inlet pipe is connected to the air inlet after passing through the main inlet, and the air inlet pipe and the main inlet are sealedly connected.

In order to help the gas fill the entire long spray pipe, the bottom of the first inner pipe and the top of the second inner pipe are in contact, and both the first inner pipe and the second inner pipe are located in the middle of the long spray pipe.

In order to ensure the cleaning effect, each of the main outlet holes is provided with a fan-shaped nozzle. The fan-shaped nozzle is in the shape of a cone that communicates up and down. The upper end of the fan-shaped nozzle is the end with the smaller opening, and the lower end of the fan-shaped nozzle is the end with the larger opening. The upper end of the fan-shaped nozzle is connected to the main outlet hole. The lower port of the fan-shaped nozzle is provided with a sealing plate. A long liquid spray port is provided on the sealing plate. The length direction of the liquid spray port is consistent with the length direction of the long spray pipe. Designing the nozzle into a long strip not only saves the spray liquid, but also further enhances the spray pressure, further improves the cleaning effect, and can clean certain areas of the silicon wafer more specifically as needed.

The beneficial effect of the present invention is that the improved atomizing spray structure of the present invention improves the existing spray pressure and atomizing capacity by arranging the first inner pipe and the second inner pipe in the long spray pipe. Clean some attached dirt on the surface of the silicon wafer and reduce the amount of liquid media used.

Description of the drawings

The present invention will be further described below in conjunction with the accompanying drawings and examples.

Figure 1 is a side view of an atomizing spray structure in the prior art.

Figure 2 is a top view of an atomizing spray structure in the prior art.

Figure 3 is a bottom view of the atomizing spray structure in the prior art.

Figure 4 is a schematic diagram of the internal structure of the improved atomizing spray structure of the present invention (the arrows in the figure indicate the direction of gas and liquid).

Figure 5 is a top view of the long spray pipe of the improved atomizing spray structure of the present invention.

Figure 6 is a top perspective view of the long spray pipe of the improved atomizing spray structure of the present invention.

Figure 7 is a bottom perspective view of the long spray pipe of the improved atomizing spray structure of the present invention.

In the picture: 1. Spray long pipe, 11. Main inlet, 12. Main outlet, 13. Fan-shaped nozzle, 14. Sealing plate, 15. Liquid spray port, 2. First inner pipe, 21. Air inlet, 22 , air outlet small hole, 3. second inner tube, 31. liquid outlet, 4. air inlet pipe, 5. liquid inlet pipe, 6. inlet, 7. small hole.

Detailed ways

The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the structures related to the present invention.

As shown in Figure 4-7, it is the best embodiment of the present invention, an improved atomization spray structure, including a long spray pipe 1, a first inner pipe 2 and a second inner pipe 3. The long spray pipe 1 There is a main inlet 11 in the middle of the upper side of the spray long pipe 1. A plurality of uniform main outlets 12 are provided at the bottom of the long spray pipe 1 along the length direction of the spray long pipe 1. The first inner pipe 2 and the second inner pipe 3 are both arranged at Inside the long spray pipe 1, the axes of the first inner pipe 2 and the second inner pipe 3 are parallel to the length direction of the long spray pipe 1. Both ends of the first inner pipe 2 and the second inner pipe 3 are closed. An inner tube 2 is located above the second inner tube 3. The first inner tube 2 and the second inner tube 3 are independent and not connected to each other. An air inlet 21 and multiple air outlets are provided on the top (top) of the first inner tube 2. Small holes 22, the air inlet 21 is located in the middle of the first inner tube 2, and the small air holes 22 are located on both sides of the air inlet 21 and extend to both ends of the first inner tube 2. The density of the small air holes 22 is from the middle to both sides. It gradually becomes larger. The bottom of the second inner tube 3 is provided with a plurality of uniform liquid outlets 31 along the length direction of the second inner tube 3. The air inlet 21 is connected to the external air inlet pipe 4, and the second inner tube 3 is connected to the external air inlet pipe 4. Liquid inlet pipe 5.

The cross section of the long spray pipe 1 is wide at the top and narrow at the bottom. The air inlet pipe 4 passes through the main inlet 11 and is connected to the air inlet 21, and the air inlet pipe 4 and the main inlet 11 are sealed. The bottom of the first inner pipe 2 and the top of the second inner pipe 3 are in contact, and both the first inner pipe 2 and the second inner pipe 3 are located in the middle of the long spray pipe 1 .

Each main outlet hole 12 is provided with a fan-shaped nozzle 13. The fan-shaped nozzle 13 is in the shape of a cone that communicates up and down. The upper end of the fan-shaped nozzle 13 is the end with the smaller opening, and the lower end of the fan-shaped nozzle 13 is the end with the larger opening. The upper end is connected to the main outlet hole 12. The lower port of the fan-shaped nozzle 13 is provided with a sealing plate 14. The sealing plate 14 is provided with a long liquid spray port 15. The length direction of the liquid spray port 15 is consistent with the length of the long spray pipe 1. The direction is consistent.

Working principle: In the improved atomization spray structure, the external oil-free compressed air enters the air inlet 21 from the air inlet pipe 4 and is first filled into the first inner pipe 2, and then the air is discharged from the air outlet hole 22 on the first inner pipe 2 , the gas is evenly discharged into the long spray pipe 1. The air outlet holes 22 on the first inner pipe 2 are relatively loose near the air inlet 21, and the air outlet is small at the position far away from the air inlet 21. The holes 22 are relatively dense, which is also beneficial to the uniform air outlet of the entire first inner pipe 2. The gas hits the upper wall in the long spray pipe 1 and then changes direction and runs downward to reach the main outlet hole 12 at the bottom of the long spray pipe 1. , this method will allow air to fill the entire long spray pipe 1, so that the air volume at both ends of the long spray pipe 1 and the main outlet 12 in the middle is consistent with the wind pressure.

The liquid inlet pipe 5 simultaneously passes the cleaning liquid into the second inner pipe 3 (the side of the second inner pipe 3 passes through), and the cleaning liquid enters the long spray pipe 1 from the liquid outlet 31 at the bottom of the second inner pipe 3. Since the long spray pipe 1 is filled with uniform compressed air, the cleaning liquid in the long spray pipe 1 is sprayed out uniformly from the main outlet hole 12, and because the fan-shaped nozzle 13 is conical, and the bottom of the fan-shaped nozzle 13 has a long The strip-shaped liquid spray port 15 will form further pressure at the elongated strip-shaped liquid spray port 15, so that the sprayed liquid will be in a flat fan-shaped atomization shape, which not only saves the sprayed liquid, but also can This further enhances the spray pressure, further improves the cleaning effect, and enables more targeted cleaning of certain areas of the silicon wafer as needed.

Taking the above-mentioned ideal embodiments of the present invention as inspiration and through the above description, relevant workers can make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the content in the description, and must be determined based on the scope of the claims.

Claims (3)

1. An improvement type atomizing sprays structure, its characterized in that: the two-way shower nozzle comprises a shower long pipe (1), a first inner pipe (2) and a second inner pipe (3), wherein a main inlet (11) is formed in the middle of the upper side of the shower long pipe (1), a plurality of uniform main outlet holes (12) are formed in the bottom of the shower long pipe (1) along the length direction of the shower long pipe (1), the first inner pipe (2) and the second inner pipe (3) are both arranged in the shower long pipe (1), the axes of the first inner pipe (2) and the second inner pipe (3) are parallel to the length direction of the shower long pipe (1), the two ends of the first inner pipe (2) and the second inner pipe (3) are all closed, the first inner pipe (2) is located above the second inner pipe (3), an air inlet (21) and a plurality of air outlet small holes (22) are formed in the upper side of the first inner pipe (2), the air inlet (21) is located in the middle, the air outlet small holes (22) are located on two sides of the air inlet (21) and extend towards the two ends of the first inner pipe (2), the density of the air outlet small holes (22) is gradually increased from the middle to the two sides, the two ends of the second inner pipe (3) are gradually arranged at the bottom of the second inner pipe (3) along the length direction of the second inner pipe (3), and the second inner pipe (3) is provided with a plurality of air inlet holes (4) and the liquid inlets (31) are communicated with each other;

the air inlet pipe (4) passes through the main inlet (11) and is communicated with the air inlet (21), and the air inlet pipe (4) is connected with the main inlet (11) in a sealing way;

the novel spraying device is characterized in that each main outlet hole (12) is provided with a fan-shaped nozzle (13), the fan-shaped nozzles (13) are in a conical shape which is communicated up and down, the upper ends of the fan-shaped nozzles (13) are small-opening ends, the lower ends of the fan-shaped nozzles (13) are large-opening ends, the upper ends of the fan-shaped nozzles (13) are connected with the main outlet holes (12), the lower ports of the fan-shaped nozzles (13) are provided with sealing flat plates (14), the sealing flat plates (14) are provided with strip-shaped liquid spraying openings (15), and the length directions of the liquid spraying openings (15) are consistent with the length directions of the spraying long pipes (1).

2. The improved atomizing spray structure as set forth in claim 1, wherein: the cross section of the spraying long pipe (1) is in a shape with a wide upper part and a narrow lower part.

3. The improved atomizing spray structure as set forth in claim 1, wherein: the bottom of the first inner tube (2) is contacted with the top of the second inner tube (3), and the first inner tube (2) and the second inner tube (3) are both positioned in the middle of the spraying long tube (1).