CN108709493B - Multi-ring parallel capacitive angular displacement sensor - Google Patents
Multi-ring parallel capacitive angular displacement sensor Download PDFInfo
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- CN108709493B CN108709493B CN201810807573.3A CN201810807573A CN108709493B CN 108709493 B CN108709493 B CN 108709493B CN 201810807573 A CN201810807573 A CN 201810807573A CN 108709493 B CN108709493 B CN 108709493B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 34
- 239000003990 capacitor Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 9
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000009825 accumulation Methods 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention provides a multi-ring parallel capacitance angular displacement sensor, which comprises a movable polar plate and a fixed polar plate; the movable polar plate comprises at least two semicircular polar plates which are coaxial with each other and are arranged at the same interval, and the semicircular polar plates are specifically double-sided polar plates; an angular displacement connecting rod is arranged at the central shaft of the movable polar plate and is connected with an object; the fixed polar plate comprises at least three annular polar plates which are coaxial with each other and are arranged at the same interval; the annular polar plates are formed by splicing two semicircular annular plates, and the annular polar plates are arranged at intervals to form a double-sided polar plate and a single-sided polar plate; a center shaft of the fixed polar plate is provided with a yielding hole; the angular displacement connecting rod is inserted into the abdication hole, so that the movable polar plate and the fixed polar plate are coaxially nested; the movable polar plate and the fixed polar plate rotate around the central shaft. By the technical scheme, differential variable quantity accumulation can be realized, so that the variable quantity and measurement sensitivity of the right-facing area between the polar plates during inching are increased.
Description
Technical Field
The invention relates to measurement of micro-motion angular displacement, in particular to a multi-ring parallel capacitive angular displacement sensor.
Background
Along with the continuous development of modern science and technology, the demands for high-precision angular displacement measurement are more and more, the popularization of capacitance micrometer technology is more and more important, meanwhile, the defects of distributed capacitance, nonlinearity and the like of a capacitance sensor are overcome, and capacitance micrometer products with high precision and high stability are sequentially developed. The high-precision capacitance micrometer has extremely high achievable resolution and better frequency response characteristic, so that the high-precision capacitance micrometer becomes one of several main detection sensors for feedback control of a high-precision micro-motion platform in recent years. Currently available capacitive angular displacement sensors, such as differential variable area angular displacement capacitive sensors; although the method can achieve certain precision and have a linear relation, the relative area change is small, the precision is not high enough, and the measuring range is also low. The limitation of smaller facing area exists, in order to improve the sensitivity and the measuring range of the sensor, the facing area between the polar plates is required to be increased, so that the quality and the miniaturization are difficult to realize in terms of volume, the application occasion of the capacitive sensor is greatly limited, and the measurement of micro-angle displacement cannot be realized.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides the multi-ring parallel capacitance angular displacement sensor which can realize differential variable quantity accumulation, thereby increasing the variable quantity and the measurement sensitivity of the positive area between polar plates during inching.
In order to solve the technical problems, the invention provides a multi-ring parallel capacitance angular displacement sensor, which comprises a movable polar plate and a fixed polar plate; the movable polar plate comprises at least two semicircular polar plates which are coaxial with each other and are arranged at the same interval, and the semicircular polar plates are specifically double-sided polar plates; an angular displacement connecting rod is arranged at the central shaft of the movable polar plate and is connected with an object;
the fixed polar plate comprises at least three annular polar plates which are coaxial with each other and are arranged at the same interval; the annular polar plates are formed by splicing two semicircular annular plates, and the annular polar plates are arranged at intervals to form a double-sided polar plate and a single-sided polar plate; a center shaft of the fixed polar plate is provided with a yielding hole;
the thicknesses and the radiuses of the semicircular polar plates and the circular polar plates are equal, and the distance between the semicircular polar plates is the same as the distance between the circular polar plates;
the outer parts of the fixed polar plate and the movable polar plate are also coaxially provided with a first circular shell and a second circular shell respectively; the distance between the first annular shell and the semicircular plate closest to the first annular shell on the movable plate is equal to the thickness of the semicircular plate;
the angular displacement connecting rod is inserted into the abdication hole, so that the movable polar plate and the fixed polar plate are coaxially nested to form a capacitor; the movable polar plate and the fixed polar plate rotate around the central shaft.
In a preferred embodiment, the movable polar plate specifically comprises a first semicircular polar plate and a second semicircular polar plate which are coaxially arranged; the fixed polar plate comprises a third annular polar plate, a fourth annular polar plate and a fifth annular polar plate which are coaxially arranged; the third annular polar plate is formed by splicing two semicircular polar plates, and is a single-sided polar plate; the fourth annular polar plate is formed by splicing two semicircular polar plates, and is a double-sided polar plate; the fifth annular polar plate is formed by splicing two semicircular polar plates, and is a single-sided polar plate; the third annular polar plate, the fourth annular polar plate and the fifth annular polar plate are respectively arranged close to the central shaft in sequence.
In a preferred embodiment, the first circular housing and the second circular housing are respectively provided with a first accommodating cavity and a second accommodating cavity for accommodating the fixed polar plate and the movable polar plate; the fixed polar plate and the movable polar plate are coaxially nested, and the opening of the first accommodating cavity is abutted to the opening of the second accommodating cavity.
In a preferred embodiment, when the movable plate and the fixed plate are coaxially nested, the third annular plate is located between the first semi-annular plate and the angular displacement connecting rod, the fourth annular plate is located between the first semi-annular plate and the second semi-annular plate, and the fifth annular plate is located between the second semi-annular plate and the second circular housing.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
the invention provides a multi-ring parallel capacitor angular displacement sensor, which consists of a fixed polar plate and a movable polar plate which are fixed on one side and coaxially nested, and a plurality of groups of annular parallel capacitors are formed together. When the movable polar plate rotates around the axis, differential change is generated between the movable polar plate and the circular polar plate with gaps in the fixed polar plate, and meanwhile, differential change amounts of all groups are accumulated, so that the change amount and the measurement sensitivity of the right area between polar plates during inching are increased. The invention is applied to the measurement of micro angular displacement, not only reduces the cost and improves the measurement precision and sensitivity, but also can realize miniaturization.
Drawings
FIG. 1 is a schematic view of a stationary plate structure of a multi-ring parallel capacitive angular displacement sensor according to a preferred embodiment of the present invention;
fig. 2 is a schematic diagram of a movable electrode plate structure of a multi-ring parallel capacitive angular displacement sensor according to a preferred embodiment of the present invention.
Detailed Description
The invention is further described below with reference to the drawings and detailed description.
Referring to fig. 1 to 2, a multi-ring parallel capacitive angular displacement sensor comprises a movable polar plate 1 and a fixed polar plate 2; the movable polar plate 1 comprises a first semicircular polar plate 11 and a second semicircular polar plate 12 which are coaxially arranged; the first semicircular polar plate 11 and the second semicircular polar plate 12 are specifically double-sided polar plates; an angular displacement connecting rod 13 is arranged at the central shaft of the movable polar plate 1, and the angular displacement connecting rod 13 is connected with an object; the fixed polar plate 2 comprises a third annular polar plate 21, a fourth annular polar plate 22 and a fifth annular polar plate 23 which are coaxially arranged; the third annular polar plate 21 is formed by splicing two semicircular annular polar plates, and is a single-sided polar plate; the fourth annular polar plate 22 is formed by splicing two semicircular annular polar plates, and is a double-sided polar plate; the fifth annular polar plate 23 is formed by splicing two semicircular annular polar plates, and is a single-sided polar plate; the third annular polar plate 21, the fourth annular polar plate 22 and the fifth annular polar plate 23 are respectively arranged close to the central axis in sequence and are spaced at the same distance; a relief hole 24 is arranged at the central axis of the fixed polar plate 2. In this embodiment, the movable polar plate is formed by two semicircular polar plates, the fixed polar plate is formed by three circular polar plates, and other numbers of semicircular polar plates and circular polar plates can be used, which belong to the same replacement, and the number of the semicircular polar plates and the circular polar plates cannot be used for limiting the protection scope of the invention.
In order to enable the movable polar plate 1 and the fixed polar plate 2 to be smoothly embedded, the thicknesses and the radiuses of the first semicircular polar plate 11, the second semicircular polar plate 12, the third semicircular polar plate 21, the fourth circular polar plate 22 and the fifth circular polar plate 23 are all equal; the distance between the first semicircular polar plate 11 and the second semicircular polar plate 12 is the same as the distance between the third circular polar plate 21 and the fourth circular polar plate 22;
the fixed polar plate 2 and the movable polar plate 1 are respectively coaxially provided with a first circular shell and a second circular shell; the distance between the first annular shell and the second semicircular plate closest to the first annular shell on the movable plate 1 is equal to the thickness of the second semicircular plate 12. The first circular shell and the second circular shell are respectively provided with a first accommodating cavity and a second accommodating cavity which are respectively used for accommodating the fixed polar plate 2 and the movable polar plate 1; the fixed polar plate 2 and the movable polar plate 1 are coaxially nested, and the opening of the first accommodating cavity is abutted with the opening of the second accommodating cavity.
Specifically, the angular displacement connecting rod 13 is inserted into the abdication hole 24, so that the movable polar plate 1 and the fixed polar plate 2 are coaxially nested to form a capacitor; the movable polar plate 1 and the fixed polar plate 2 rotate around a central shaft. When the fixed polar plate 2 is embedded with the movable polar plate 1, the position relationship is as follows: the third annular plate 21 is located between the first semi-annular plate 11 and the angular displacement connecting rod 13, the fourth annular plate 22 is located between the first semi-annular plate 11 and the second semi-annular plate 12, and the fifth annular plate 23 is located between the second semi-annular plate 12 and the second circular housing.
The following is an introduction to the working principle of the multi-ring parallel capacitance angular displacement sensor: the movable polar plate 1 is fixedly communicated with one side of each coaxial semi-annular polar plate or annular polar plate in the fixed polar plate 2, so that a capacitor formed by a first semi-annular polar plate, a second semi-annular polar plate 12 on the movable polar plate 1 and a third annular polar plate 21, a fourth annular polar plate 22 and a fifth annular polar plate 23 on the fixed polar plate 2 are connected in parallel. Because the third annular polar plate 21 and the fifth annular polar plate 23 of the fixed polar plate 2 have insulation gaps, the opposite area of the movable polar plate 1 to the third annular polar plate 21 of the fixed polar plate 2 is increased or reduced in the process of rotating around the axis, and the opposite area of the movable polar plate 1 to the fifth annular polar plate 23 is reduced or increased in an equivalent way, so that the fixed polar plate 2 and the movable polar plate 1 of the movable polar plate 1 form a differential structure at any moment, and differential variation is output. In addition, the multi-ring parallel capacitance angular displacement sensor adopts an annular structural design on the premise of a certain volume, so that the variation of the right-facing area between the movable polar plate 1 and the fixed polar plate 2 during micro-motion is greatly increased, namely, the variation of the capacitance during micro-motion is increased, and the precision and the sensitivity during micro-angular displacement measurement are improved.
The foregoing is only a preferred embodiment of the present invention, but the design concept of the present invention is not limited thereto, and any person skilled in the art will be able to make insubstantial modifications of the present invention within the scope of the present invention disclosed herein by this concept, which falls within the actions of invading the protection scope of the present invention.
Claims (3)
1. A multi-ring parallel capacitance angular displacement sensor is characterized by comprising a movable polar plate and a fixed polar plate; the movable polar plate comprises at least two semicircular polar plates which are coaxial with each other and are arranged at the same interval, and the semicircular polar plates are specifically double-sided polar plates; an angular displacement connecting rod is arranged at the central shaft of the movable polar plate and is connected with an object;
the fixed polar plate comprises at least three annular polar plates which are coaxial with each other and are arranged at the same interval; the annular polar plates are formed by splicing two semicircular annular plates, and the annular polar plates are arranged at intervals to form a double-sided polar plate and a single-sided polar plate; a center shaft of the fixed polar plate is provided with a yielding hole;
the thicknesses and the radiuses of the semicircular polar plates and the circular polar plates are equal, and the distance between the semicircular polar plates is the same as the distance between the circular polar plates;
the outer parts of the fixed polar plate and the movable polar plate are also coaxially provided with a first circular shell and a second circular shell respectively; the distance between the first circular shell and the semicircular plate closest to the first circular shell on the movable plate is equal to the thickness of the semicircular plate;
the angular displacement connecting rod is inserted into the abdication hole, so that the movable polar plate and the fixed polar plate are coaxially nested to form a capacitor; the movable polar plate and the fixed polar plate rotate around a central shaft;
the movable polar plate specifically comprises a first semicircular polar plate and a second semicircular polar plate which are coaxially arranged; the fixed polar plate comprises a third annular polar plate, a fourth annular polar plate and a fifth annular polar plate which are coaxially arranged; the third annular polar plate is formed by splicing two semicircular polar plates, and is a single-sided polar plate; the fourth annular polar plate is formed by splicing two semicircular polar plates, and is a double-sided polar plate; the fifth annular polar plate is formed by splicing two semicircular polar plates, and is a single-sided polar plate; the third annular polar plate, the fourth annular polar plate and the fifth annular polar plate are respectively arranged close to the central shaft in sequence;
the movable polar plate is fixedly communicated with one side of each coaxial semi-annular polar plate or annular polar plate in the fixed polar plate, so that a first semi-annular polar plate and a second semi-annular polar plate on the movable polar plate are connected in parallel with a capacitor formed by a third annular polar plate, a fourth annular polar plate and a fifth annular polar plate on the fixed polar plate; the third annular polar plate and the fifth annular polar plate of the fixed polar plate have insulation gaps, and the opposite area of the movable polar plate to the third annular polar plate of the fixed polar plate is increased or reduced while the opposite area of the movable polar plate to the fifth annular polar plate is reduced or increased in an equivalent way in the rotation process around the axis so as to form a differential structure of the fixed polar plate and the movable polar plate at any moment.
2. The multi-ring parallel capacitive angular displacement sensor according to claim 1, wherein the first circular housing and the second circular housing are respectively provided with a first accommodating cavity and a second accommodating cavity for accommodating the fixed polar plate and the movable polar plate; the fixed polar plate and the movable polar plate are coaxially nested, and the opening of the first accommodating cavity is abutted to the opening of the second accommodating cavity.
3. The multiple ring parallel capacitive angular displacement sensor of claim 2, wherein when the movable and stationary plates are nested coaxially, the third annular plate is located between the first and angular displacement connecting rods, the fourth annular plate is located between the first and second semi-annular plates, and the fifth annular plate is located between the second semi-annular plate and second circular housing.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810807573.3A CN108709493B (en) | 2018-07-18 | 2018-07-18 | Multi-ring parallel capacitive angular displacement sensor |
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| CN201810807573.3A CN108709493B (en) | 2018-07-18 | 2018-07-18 | Multi-ring parallel capacitive angular displacement sensor |
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| CN108709493B true CN108709493B (en) | 2024-02-27 |
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| CN109909996B (en) * | 2019-04-15 | 2024-02-23 | 华侨大学 | Flexible hinge multistage displacement amplifying structure of laminated composite material |
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2018
- 2018-07-18 CN CN201810807573.3A patent/CN108709493B/en active Active
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