CN108663192A - The detection device and method of Wavefront sensor - Google Patents
The detection device and method of Wavefront sensor Download PDFInfo
- Publication number
- CN108663192A CN108663192A CN201710210769.XA CN201710210769A CN108663192A CN 108663192 A CN108663192 A CN 108663192A CN 201710210769 A CN201710210769 A CN 201710210769A CN 108663192 A CN108663192 A CN 108663192A
- Authority
- CN
- China
- Prior art keywords
- wavefront sensor
- interferometer
- wave
- wavefront
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title abstract description 7
- 238000005259 measurement Methods 0.000 claims abstract description 62
- 230000004075 alteration Effects 0.000 claims abstract description 49
- 238000004458 analytical method Methods 0.000 claims abstract description 9
- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 239000000835 fiber Substances 0.000 claims description 13
- 238000012360 testing method Methods 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 5
- 201000009310 astigmatism Diseases 0.000 claims description 4
- 238000007405 data analysis Methods 0.000 claims description 2
- 244000007853 Sarothamnus scoparius Species 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 206010010071 Coma Diseases 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Eye Examination Apparatus (AREA)
Abstract
The invention discloses a kind of detection device of Wavefront sensor and method, which includes：Interferometer, for generating plane wave, and the wave aberration in optical path；Spectroscope makes a part of plane wave incidence to Wavefront sensor for being divided to the plane wave, and another part plane wave is projected to the interferometer；Phase plate is removably mounted in light path, for introducing constant aberration；Shrink beam lens group allows detection light beam to be incident on Wavefront sensor completely for changing the bore of Beam Wave-Front；And data acquisition and analysis system, it is separately connected with the interferometer and Wavefront sensor, the measurement accuracy for calculating Wavefront sensor.The detection to Shack Hartmann wave front sensor wave aberration measurement accuracy may be implemented in the present invention, and can effectively deduct the error of optical path itself.
Description
Technical field
The present invention relates to Wavefront sensor, more particularly to the detection device and method of a kind of Wavefront sensor.
Background technology
Shack-Hartmann wavefront sensor is a kind of Wave-front measurement instrument, and structure, optical path are simple, to light source
Coherence requirement is not high, therefore is widely used in fields such as Medical Instruments, adaptive optics, surface characterization tests.Especially
In photo-etching machine objective lens fields of measurement, the high-precision detection to objective wave aberration may be implemented in Shack-Hartmann.
Shack-Hartmann wavefront sensor critical piece includes microlens array and photodetector.Incidence wave is incident on
Microlens array, position of the focused light spot in each sub-aperture after microlens array and hot spot position when ideal wave incidence
Difference is set, since the inclination of wave front in each sub-aperture of microlens array is different, caused facula position deviation also differs,
The wave aberration before incidence can be calculated according to the position deviation of hot spot.Since microlens array is in processing, installation, algorithm process
There is certain error in the process, there is some difference with Theoretical Design for the performance of Shack-Hartmann wavefront sensor, influences the summer
Gram-measurement accuracy of Hartmann wave front sensor.
Invention content
The present invention provides a kind of detection device and method of Wavefront sensor, to realize to Shack-Hartmann wavefront sensing
The accurate detection of the wave aberration measurement performance of device.
In order to solve the above technical problems, the present invention provides a kind of detection device of Wavefront sensor, including：
Interferometer, for generating plane wave, and the wave aberration in optical path；
Spectroscope makes a part of plane wave incidence to Wavefront sensor, another portion for being divided to the plane wave
Plane wave is divided to be projected to the interferometer；
Phase plate is removably mounted in light path, for introducing constant aberration；
Shrink beam lens group allows detection wavefront to be incident on Wavefront sensor completely for changing the bore of Beam Wave-Front；
And data acquisition and analysis system, it is separately connected with the interferometer and Wavefront sensor, is passed for calculating wavefront
The measurement accuracy of sensor.
Preferably, the interferometer uses phase measurement interferometer or fibre optic interferometer.
Preferably, the fibre optic interferometer includes：Light source, collimating mirror, beam splitter, the first, second speculum, semi-transparent half
Speculum, convergent mirror and measurement detector, the collimated mirror of light beam that light source is sent out project beam splitter after collimating, and by beam splitter
It is divided into two bundles, light beam projects the spectroscope through the reflection of the first speculum, and another light beams are through the second speculum and half
Saturating half-reflecting mirror projects convergent mirror, and another part projects the spectroscope, and the spectroscope is by the one of the light beam received
For Journalistic to the shrink beam lens group, another part projects the convergent mirror, the convergence through the semi-permeable and semi-reflecting mirror
The light beam received is projected the measurement detector by mirror, and the measurement detector connects with the data acquisition and analysis system
It connects.
Preferably, the phase plate is removably mounted between the beam splitter and first speculum.
Preferably, the phase plate is arranged between the phase measurement interferometer and the spectroscope.
Preferably, being equipped with testing light source on the phase measurement interferometer.
Preferably, with one or more in coma, astigmatism, spherical aberration and high-order spherical aberration on the phase plate.
Preferably, the shrink beam lens group includes the shrink beam lens and collimation lens set gradually.
Preferably, further including position regulator, the Wavefront sensor is fixed on the position regulator.
Preferably, the Wavefront sensor is Shack-Hartmann wavefront sensor.
The present invention also provides a kind of detection methods of Wavefront sensor, using detection device as described above, including：
When phase plate is installed, the wave aberration of light path where interferometer and Wavefront sensor are measured respectively respectively；
When being not installed with phase plate, the natural waves picture of light path where interferometer and Wavefront sensor are measured respectively respectively
Difference；
The result measured interferometer and Wavefront sensor calculates, and the wave aberration for obtaining Wavefront sensor measures mistake
Difference.
Preferably, the result measured interferometer and Wavefront sensor calculates, the wave picture of Wavefront sensor is obtained
Difference measurements error step includes：By be equipped with phase plate and the no phase plate of interferometer measurement, wave aberration is subtracted each other twice
The wavefront difference caused by constant aberration in light path where to interferometer；Phase plate is installed and is not had by what Wavefront sensor measured
Having phase plate, wave aberration is subtracted each other twice, the wavefront difference caused by constant aberration in light path where obtaining Wavefront sensor, to two
A wavefront difference is compared, and obtains the wave aberration measurement error of Wavefront sensor.
Preferably, when the interferometer uses phase measurement interferometer, by light path wavefront where the Wavefront sensor
1/2 times of progress corresponding position phase difference mathematic interpolation of difference and light path wavefront difference where interferometer.
Preferably, when the interferometer uses fibre optic interferometer, by light path wavefront difference where the Wavefront sensor with
The carry out corresponding position phase difference mathematic interpolation of light path wavefront difference where interferometer.
Compared with prior art, the present invention has the following advantages：
1, structure of the invention is simple, easy to operate；
2, the detection to Wavefront sensor wave aberration measurement accuracy may be implemented；
3, Wavefront sensor and interferometer simultaneously measure element under test, reduce caused by repeating installation element under test
Error；
4, the present invention can effectively deduct the error of optical path itself.
Description of the drawings
Fig. 1 is the structural schematic diagram of the detection device of Wavefront sensor in the embodiment of the present invention 1；
Fig. 2 is the structural schematic diagram (removing phase plate) of the detection device of Wavefront sensor in the embodiment of the present invention 1；
Fig. 3 is the structural schematic diagram of the detection device of Wavefront sensor in the embodiment of the present invention 2；
Fig. 4 is the structural schematic diagram (removing phase plate) of the detection device of Wavefront sensor in the embodiment of the present invention 2.
Shown in Fig. 1-2：11- phase measurements interferometer, 12- dichroic reflectors, 13- speculums, 14- Wavefront sensors,
15- position regulators, the first lens of 16-, the second lens of 17-, 18- phase plates, 19- data acquisition and analysis systems；
Shown in Fig. 3-4：21- fibre optic interferometers；211- light sources, 212- collimating mirrors, 213- beam splitters, 214- first reflect
Mirror, the second speculums of 215-, 216- semi-permeable and semi-reflecting mirrors, 217- convergent mirrors, 218- measure detector, 22- Wavefront sensors,
23- adjusting apparatus, 24- the third lens, the 4th lens of 25-, 26- spectroscopes, 27- phase plates, 28- data collection and analysis system
System.
Specific implementation mode
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings to the present invention
Specific implementation mode be described in detail.It should be noted that attached drawing of the present invention is all made of simplified form and uses non-essence
Accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment 1
As depicted in figs. 1 and 2, the detection device of the Wavefront sensor of the present embodiment includes：Phase measurement interferometer 11 divides
Light reflection mirror 12, speculum 13, shrink beam lens group and data acquisition and analysis system 19.Wherein, the phase measurement interferometer
11 generate plane wave, and the dichroic reflector 12 is divided the plane wave, and a part of plane wave passes through shrink beam lens group
After carrying out shrink beam, it is incident on Wavefront sensor 14, which is Shack-Hartmann wavefront sensor, another part
Plane wave is reflected back the phase measurement interferometer 11 by speculum 13.
Further, detection device of the invention further includes phase plate 18,18 detachable installation of the phase plate
Between the phase measurement interferometer 11 and reflective speculum 12, thereon carry coma, astigmatism, one kind in high-order spherical aberration or
It is a variety of, you can to generate fixed phase difference according to actual needs, to pass through phase measurement interferometer 11 and Wavefront sensor 14, Ke Yifen
It does not measure when installing phase plate 18 and uneasy dress phase plate 18,11 place light path of phase measurement interferometer and wavefront sensing
The wave aberration of 14 place light path of device.The data acquisition and analysis system 19 and the phase measurement interferometer 11 and Wavefront sensor
14 are separately connected, the measurement accuracy for calculating Wavefront sensor 14.
With continued reference to Fig. 1, the phase measurement interferometer 11 can select commercial fizeau interferometer, further, described
Testing light source is additionally provided on phase measurement interferometer 11, the testing light source selects the standard mirror of parallel light output, generates flat
Surface wave, the plane wave are supplied to Wavefront sensor 14 to be used as testing light source.
Further, the detection device further includes：Position for the Wavefront sensor 14 to be fixed and adjusted
Set adjusting apparatus 15.The shrink beam lens group includes the first lens 16 and the second lens 17 set gradually, and the first lens 16 are right
Incident parallel light carries out shrink beam, and the second lens 17 are directional light to the beam collimation after shrink beam, and the two cooperation is to can be incidence
Directional light carries out shrink beam.
With continued reference to Fig. 1 and Fig. 2, the present embodiment also provides a kind of detection method of Wavefront sensor, specifically includes：
Light beam is generated using phase measurement interferometer 11, and projects light beams upon dichroic reflector 12；
Dichroic reflector 12 is divided light beam, and a part of light reflection is to Wavefront sensor 14, another part light transmission
To speculum 13, the phase measurement interferometer 11 is reflected back by speculum 13；
Wavefront sensor 14 measures the light of reception, obtains the intrinsic wave aberration W of 14 place light path of Wavefront sensorHb
(x,y)；
Phase measurement interferometer 11 measures the light of reception, obtains the intrinsic of 11 place light path of phase measurement interferometer
Wave aberration WIb(x,y)；
Phase plate 18 is set between phase measurement interferometer 11 and dichroic reflector 12, makes phase measurement interferometer 11
The light beam of outgoing has constant aberration；
The dichroic reflector 12 is divided the plane wave with constant aberration, and a part of light reflection is to wavefront sensing
Device 14, another part light transmission to speculum 13 are reflected back the phase measurement interferometer 11 by speculum 13；
The Wavefront sensor 14 measures the light of reception, obtains the wave aberration W of 14 place light path of Wavefront sensorH
(x,y)；
Phase measurement interferometer 11 measures the light of reception, obtains the wave picture of 11 place light path of phase measurement interferometer
Poor WI(x,y)；
The result measured phase measurement interferometer 11 and Wavefront sensor 14 calculates, and obtains Wavefront sensor 14
Wave aberration measurement error, specially：The wave aberration measured using phase measurement interferometer 11 is subtracted phase measurement interferometer 11 and surveyed
The intrinsic wave aberration of amount obtains wavefront difference I, i.e. I=caused by phase plate 18 in 11 place light path of phase measurement interferometer
WI(x,y)-WIb(x,y)；
The wave aberration measured using Wavefront sensor 14 subtracts the intrinsic wave aberration that Wavefront sensor 14 measures, and obtains wavefront
The wavefront difference H caused by constant aberration, i.e. H=W in 14 place light path of sensorH(x,y)-WHb(x,y)；
Two wavefront differences I and H are compared, the wave aberration measurement error of Wavefront sensor 14 is obtained.
Further, for 11 place light path of phase measurement interferometer, by light beam by phase plate 18 twice, therefore,
1/2 times of the wavefront difference I that the wavefront difference H that Wavefront sensor 14 measures should be measured with phase measurement interferometer 11 is compared, i.e.,
The verification to 14 detection performance of Wavefront sensor can be achieved.The present embodiment passes through Wavefront sensor 14 and phase measurement interferometer 11
Phase plate 18 is measured simultaneously, error caused by repetition installation phase plate 18 can be reduced, pass through optical path
Intrinsic wave aberration can effectively deduct the error of optical path itself.
Embodiment 2
Difference lies in the interferometer of use is different with embodiment 1 for the present embodiment.
As shown in Figure 3 and Figure 4, the detection device of the Wavefront sensor 22 of the present embodiment includes：Fibre optic interferometer 21 is specific
For Mach-Zehnder types interferometer, spectroscope 26, adjusting apparatus 23, the shrink beam being made of the third lens 24 and the 4th lens 25
Lens group, phase plate 27 and data acquisition and analysis system 28.
With continued reference to Fig. 3 and Fig. 4, the fibre optic interferometer 21 includes：Light source 211, collimating mirror 212, beam splitter 213,
One speculum 214, the second speculum 215, semi-permeable and semi-reflecting mirror 216, convergent mirror 217 and measurement detector 218, light source 211 are sent out
The collimated mirror 212 of light beam gone out projects beam splitter 213 after collimating, and is divided into two bundles by beam splitter 213, and light beam is through first
The reflection of speculum 214 projects the spectroscope 26, and another light beams are thrown through the second speculum 215 and semi-permeable and semi-reflecting mirror 216
It is mapped to convergent mirror 217；A light beam part for reception is projected Wavefront sensor by the spectroscope 26 through the shrink beam lens group
22, another part projects the convergent mirror 217, the light that the convergent mirror 217 will receive through the semi-permeable and semi-reflecting mirror 216
Beam projects the measurement detector 218, and the measurement detector 218 is connect with the data acquisition and analysis system 28.
Further, phase-plate poor 27 in the present embodiment it is detachable be mounted on the beam splitter 213 and described the
It, equally can be according to reality again with one or more in coma, astigmatism, spherical aberration and high-order spherical aberration between one speculum 214
Border needs to generate fixed phase difference.
The detection method of the Wavefront sensor 22 of the present embodiment is same as Example 1：
When being provided with phase plate 27, the fibre optic interferometer 21 and Wavefront sensor 22 measure respective light path respectively
Wave aberration WI(x, y) and WH(x,y)；
When being not provided with phase plate 27, the fibre optic interferometer 21 and Wavefront sensor 22 measure respective light path respectively
Intrinsic wave aberration WIb(x, y) and WHb(x, y), the background error as respective light path；
Similarly, the result measured fibre optic interferometer 21 and Wavefront sensor 22 calculates, and is obtained respectively by phase
Wavefront difference caused by poor plate 17 is I=WI(x,y)-WIb(x, y) and H=WH(x,y)-WHb(x, y) compares I and H, this
A phase plate 18 is passed through for 22 place light path of fibre optic interferometer 21 and Wavefront sensor, light beam in embodiment, therefore,
The wavefront difference I that fibre optic interferometer 21 measures can be directly compared with the wavefront difference H that Wavefront sensor 22 measures, you can realization pair
The verification of 22 detection performance of Wavefront sensor.
Obviously, those skilled in the art can carry out invention spirit of the various modification and variations without departing from the present invention
And range.If in this way, these modifications and changes of the present invention belong to the claims in the present invention and its equivalent technologies range it
Interior, then the present invention is also intended to including these modification and variations.
Claims (14)
1. a kind of detection device of Wavefront sensor, which is characterized in that including：
Interferometer, for generating plane wave, and the wave aberration in optical path；
Spectroscope makes a part of plane wave incidence to Wavefront sensor for being divided to the plane wave, and another part is flat
Surface wave is projected to the interferometer；
Phase plate is removably mounted in light path, for introducing constant aberration；
Shrink beam lens group allows detection wavefront to be incident on Wavefront sensor completely for changing the bore of Beam Wave-Front；
And
Data acquisition and analysis system is separately connected with the interferometer and Wavefront sensor, the wave for calculating Wavefront sensor
Aberration measurement precision.
2. the detection device of Wavefront sensor as described in claim 1, which is characterized in that the interferometer uses phase measurement
Interferometer or fibre optic interferometer.
3. the detection device of Wavefront sensor as claimed in claim 2, which is characterized in that the fibre optic interferometer includes：Light
Source, collimating mirror, beam splitter, the first, second speculum, semi-permeable and semi-reflecting mirror, convergent mirror and measurement detector, the light that light source is sent out
Beam splitter is projected after the collimated mirror collimation of beam, and is divided into two bundles by beam splitter, light beam is reflected through the first speculum to be projected
To the spectroscope, another light beams project convergent mirror through the second speculum and semi-permeable and semi-reflecting mirror, and the spectroscope will connect
The light beam part received projects the shrink beam lens group, and another part projects the convergence through the semi-permeable and semi-reflecting mirror
The light beam received is projected the measurement detector by mirror, the convergent mirror, and the measurement detector is acquired with the data
Analysis system connects.
4. the detection device of Wavefront sensor as claimed in claim 3, which is characterized in that the detachable peace of phase plate
Between the beam splitter and first speculum.
5. the detection device of Wavefront sensor as claimed in claim 2, which is characterized in that the phase plate is arranged described
Between phase measurement interferometer and the spectroscope.
6. the detection device of Wavefront sensor as claimed in claim 2, which is characterized in that pacify on the phase measurement interferometer
Equipped with testing light source.
7. the detection device of Wavefront sensor as described in claim 1, which is characterized in that carry broom on the phase plate
It is one or more in difference, astigmatism, spherical aberration and high-order spherical aberration.
8. the detection device of Wavefront sensor as described in claim 1, which is characterized in that the shrink beam lens group includes successively
The shrink beam lens and collimation lens of setting.
9. the detection device of Wavefront sensor as described in claim 1, which is characterized in that further include position regulator, institute
Wavefront sensor is stated to be fixed on the position regulator.
10. the detection device of Wavefront sensor as described in claim 1, which is characterized in that the Wavefront sensor is Shack-
Hartmann wave front sensor.
11. a kind of detection method of Wavefront sensor, using the detection device as described in claim 1~10 any one,
It is characterized in that, including：
When phase plate is installed, the wave aberration of light path where interferometer and Wavefront sensor are measured respectively respectively；
When being not installed with phase plate, the intrinsic wave aberration of light path where interferometer and Wavefront sensor are measured respectively respectively；
The result measured interferometer and Wavefront sensor calculates, and obtains the wave aberration measurement error of Wavefront sensor.
12. the detection method of Wavefront sensor as claimed in claim 11, which is characterized in that interferometer and Wavefront sensor
The result of measurement is calculated, and the wave aberration measurement error step for obtaining Wavefront sensor includes：By the installation of interferometer measurement
Having phase plate and no phase plate, wave aberration is subtracted each other twice, the wave caused by phase plate in light path where obtaining interferometer
Preceding difference；The phase plate that is equipped with that Wavefront sensor is measured with phase plate is fitted without subtract each other twice by wave aberration, obtains wave
The wavefront difference caused by phase plate in light path, is compared two wavefront differences where front sensor, obtains Wavefront sensor
Wave aberration measurement error.
13. the detection method of Wavefront sensor as claimed in claim 12, which is characterized in that the interferometer is surveyed using phase
When measuring interferometer, 1/2 times of light path wavefront difference where the Wavefront sensor and light path wavefront difference where interferometer is carried out pair
Answer position phase difference mathematic interpolation.
14. the detection method of Wavefront sensor as claimed in claim 12, which is characterized in that the interferometer is dry using optical fiber
When interferometer, by the carry out corresponding position phase of light path wavefront difference where the Wavefront sensor and light path wavefront difference where interferometer
Poor mathematic interpolation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710210769.XA CN108663192B (en) | 2017-03-31 | 2017-03-31 | Detection device and method of wavefront sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710210769.XA CN108663192B (en) | 2017-03-31 | 2017-03-31 | Detection device and method of wavefront sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108663192A true CN108663192A (en) | 2018-10-16 |
| CN108663192B CN108663192B (en) | 2020-11-13 |
Family
ID=63784543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710210769.XA Active CN108663192B (en) | 2017-03-31 | 2017-03-31 | Detection device and method of wavefront sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108663192B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116294983A (en) * | 2023-02-28 | 2023-06-23 | 重庆米森科技有限公司 | Non-closed optical path wave front segmentation interferometer based on planar optical path design |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006284233A (en) * | 2005-03-31 | 2006-10-19 | Fujinon Corp | System error measuring device and wavefront measuring interferometer device having the same |
| JP2007170888A (en) * | 2005-12-20 | 2007-07-05 | Olympus Corp | Optical element inspection equipment |
| CN102889935A (en) * | 2012-09-14 | 2013-01-23 | 中国科学院光电技术研究所 | Self-adaptive optical system near-field wavefront sensor calibration device and calibration method based on phase difference method |
| CN104236856A (en) * | 2014-09-10 | 2014-12-24 | 中国科学院上海光学精密机械研究所 | Wave aberration detection device of objective lens imaging system and system error correction method of wave aberration detection device |
| CN104677507A (en) * | 2015-02-02 | 2015-06-03 | 中国科学院西安光学精密机械研究所 | Wide-spectrum shack-Hartmann wavefront sensor absolute calibration device and method |
-
2017
- 2017-03-31 CN CN201710210769.XA patent/CN108663192B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006284233A (en) * | 2005-03-31 | 2006-10-19 | Fujinon Corp | System error measuring device and wavefront measuring interferometer device having the same |
| JP2007170888A (en) * | 2005-12-20 | 2007-07-05 | Olympus Corp | Optical element inspection equipment |
| CN102889935A (en) * | 2012-09-14 | 2013-01-23 | 中国科学院光电技术研究所 | Self-adaptive optical system near-field wavefront sensor calibration device and calibration method based on phase difference method |
| CN104236856A (en) * | 2014-09-10 | 2014-12-24 | 中国科学院上海光学精密机械研究所 | Wave aberration detection device of objective lens imaging system and system error correction method of wave aberration detection device |
| CN104677507A (en) * | 2015-02-02 | 2015-06-03 | 中国科学院西安光学精密机械研究所 | Wide-spectrum shack-Hartmann wavefront sensor absolute calibration device and method |
Non-Patent Citations (3)
| Title |
|---|
| A. MARZOA等: "Comparison of Shack-Hartmann sensor and Point Diffraction Interferometer for Wavefront Aberration analysis.", 《IEEE》 * |
| 沈锋等: "夏克-哈特曼波前传感器的波前相位探测误差", 《光学学报》 * |
| 王艳萍等: "哈特曼波前分析仪校准方法研究", 《中国激光》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116294983A (en) * | 2023-02-28 | 2023-06-23 | 重庆米森科技有限公司 | Non-closed optical path wave front segmentation interferometer based on planar optical path design |
| CN116294983B (en) * | 2023-02-28 | 2024-01-23 | 重庆米森科技有限公司 | Non-closed optical path wave front segmentation interferometer based on planar optical path design |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108663192B (en) | 2020-11-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106840027B (en) | Astigmatism-compensated interference detection device and detection method for optical free-form surface | |
| US10416039B2 (en) | Interferometer having a reference fluid tank with a prism and a motion matching window for characterizing a contact lens | |
| JP6364551B2 (en) | Interferometer | |
| CN102564340A (en) | Large-caliber plane mirror surface shape detection device | |
| CN106840001A (en) | The non-contact measurement apparatus and measuring method of optical lens center thickness | |
| US20050179911A1 (en) | Aspheric diffractive reference for interferometric lens metrology | |
| CN102175433B (en) | Lens center error measuring system based on interference principle | |
| CN100573080C (en) | Hartmann wavefront sensor and its detection method using optical splitting device to realize alignment function | |
| CN110082071A (en) | A kind of measuring device and method of right-angle prism optical parallelism error | |
| CN105974158A (en) | Asymmetric spatial heterodyne spectrometer wind speed measurement calibration device and asymmetric spatial heterodyne spectrometer wind speed measurement calibration method | |
| CN103105283B (en) | Focal length measuring device of single-spectrum large-caliber long-focus lens | |
| CN102519611A (en) | Light path sharing axial shear digital wave surface interferometer | |
| US4810895A (en) | Method and apparatus for optical examination of an object particularly by moire ray deflection mapping | |
| CN107167299B (en) | A Wavefront Detector Based on Joint Detection and Phase Fitting | |
| CN110736543B (en) | Shear quantity calibration device and method for grating shear interference wavefront sensor | |
| CN108663192A (en) | The detection device and method of Wavefront sensor | |
| CN111289469A (en) | Device and method for measuring refractive index distribution of ice layer in ICF target pellet | |
| CN118129627A (en) | High-sensitivity mirror deformation measurement system and method based on speckle interferometry | |
| CN103344345A (en) | Active white light wave front testing device and method thereof | |
| CN112013972A (en) | Shear quantity calibration device and method for transverse shear interference wavefront sensor | |
| CN203364981U (en) | Active white light wave front testing device | |
| JP2831428B2 (en) | Aspherical shape measuring machine | |
| Xu et al. | Novel wedge plate beam tester | |
| US10145944B1 (en) | System and method for LADAR-based optic alignment and characterization | |
| CN110736544B (en) | Shear amount calibration device and calibration method for transverse shear interference wavefront sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |