CN108648173A - It is merged facial mask method for correcting position and device - Google Patents

Abstract

An embodiment of the present invention provides a method and device for correcting the position of a merged film, the method includes acquiring a first marker image and a second marker image sent by an image acquisition device; and combining the first marker image and the second marker image The image is matched with the standard image respectively, and the absolute coordinates of the first marker point and the second marker point on the workbench are calculated; according to the absolute coordinates of the first marker point and the second marker point on the workbench and the standard image The absolute coordinates on the workbench calculate the rotation angle between the mask to be checked and the standard image; receive the image of the mask to be checked taken and sent by the image acquisition device, and process the image according to the rotation angle Correction, the corrected image is used as the mask image to be checked. The embodiments of the present invention can effectively improve the detection accuracy and detection efficiency of mask printing quality.

Description

Combined mask position correction method and device

technical field

The invention relates to the technical field of plastic mask manufacturing, in particular to a method and device for correcting the position of a composite mask.

Background technique

Various printing quality problems are prone to occur in the existing PVC (polyvinyl Chloride) mask screen printing, such as irregular characters, lines or symbols on the mask, poor brightness, incomplete writing, jagged, broken lines, virtual Edge and bullet oil, etc., but at present, various existing printing problems mainly rely on manual inspection and troubleshooting, which makes the printing quality inspection efficiency low, and also greatly increases the labor cost in the mask manufacturing process.

Contents of the invention

In view of this, the purpose of the embodiments of the present invention is to provide a method and device for correcting the position of a merged film, which can effectively improve the above problems.

A preferred embodiment of the present invention provides a method for correcting the position of a combined mask, which is applied to the main control device in the mask printing quality inspection system. The mask to be inspected is provided with a first mark point and a second mark point, and the master control The standard image and the absolute coordinates of the standard image on the workbench are pre-stored in the device, and the position correction method of the combined mask includes:

Acquiring the first marker point image and the second marker point image sent by the image acquisition device;

Matching the first marker point image and the second marker point image with the standard image respectively, and calculating the absolute coordinates of the first marker point and the second marker point on the workbench;

calculating the rotation angle between the mask to be checked and the standard image according to the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench;

receiving the image of the mask to be inspected taken and sent by the image acquisition device, correcting the image according to the rotation angle, and using the corrected image as the image of the mask to be inspected.

Further, the rotation angle α is calculated by the following formula:

in, M' ₀₁ (x' ₀₁ , y' ₀₁ ) and M' ₀₂ (x' ₀₂ , y' ₀₂ ) are the absolute coordinates of the first mark point and the second mark point of the standard mask on the workbench; M′ ₁ ( x' ₁ ,y' ₁ ) and M' ₂ (x' ₂ ,y' ₂ ) are the absolute coordinates of the two marker points on the mask to be tested on the workbench.

Further, the method also includes:

calculating the offset between the mask to be checked and the standard image according to the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench;

Wherein, the offset (Δx, Δy) is passed by the formula Indicates that M' ₀₁ (x' ₀₁ , y' ₀₁ ) and M' ₀₂ (x' ₀₂ , y' ₀₂ ) are the absolute coordinates of the first mark point and the second mark point on the standard mask on the workbench; M ′ ₁ (x′ ₁ ,y′ ₁ ) is the absolute coordinates of the two marker points on the mask to be tested on the workbench.

Further, the step of receiving the first marker image and the second marker image sent by the image acquisition device includes:

Sending a control command to the driving device so that the driving device drives the image acquisition device to search for the first marker point and the second marker point within a preset range;

When the image acquisition device searches for the first marker point and the second marker point, the image acquisition device is controlled to acquire the first marker point image and the second marker point image and send them.

Further, the mask to be checked includes a plurality of basic masks, and after performing the step of using the corrected image as the mask image to be checked, the method further includes:

Based on the image of the mask to be checked, extract the basic mask image corresponding to each of the basic masks;

For each basic mask image, differential processing is performed on the basic mask image and a preset mask image to obtain a differential image;

calculating an error value between the basic mask image and a preset mask image according to the difference image;

It is judged whether the error value is smaller than a preset threshold, and if it is smaller, it is judged that the printing quality of the mask to be inspected is qualified.

Further, the method also includes:

If the error value is greater than or equal to the preset threshold, it is determined that the printing quality of the mask to be inspected is unqualified;

Record the location information of the unqualified printed mask to be inspected, and mark the unqualified printed mask to be inspected according to the location information.

A preferred embodiment of the present invention also provides a combined mask position correction device, which is applied to the main control equipment in the mask printing quality inspection system. The mask to be inspected is provided with a first mark point and a second mark point. The standard image and the absolute coordinates of the standard image on the workbench are pre-stored in the equipment, and the position correction device for the merged film includes:

A landmark image acquisition module, configured to acquire the first landmark image and the second landmark image sent by the image acquisition device;

A coordinate calculation module, configured to match the first marker point image and the second marker point image with the standard image respectively, and calculate the absolute coordinates of the first marker point and the second marker point on the workbench;

The rotation angle calculation module is used to calculate the distance between the mask to be checked and the standard image according to the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench. rotation angle;

The image correction module is used to receive the image of the mask to be inspected taken and sent by the image acquisition device, correct the image according to the rotation angle, and use the corrected image as the image of the mask to be inspected.

Further, the rotation angle α is calculated by the following formula:

in, M' ₀₁ (x' ₀₁ , y' ₀₁ ) and M' ₀₂ (x' ₀₂ , y' ₀₂ ) are the absolute coordinates of the first mark point and the second mark point on the standard mask on the workbench; M′ ₁ (x' ₁ ,y' ₁ ) and M' ₂ (x' ₂ ,y' ₂ ) are the absolute coordinates of the two marker points on the mask to be tested on the workbench.

Further, the device also includes:

An offset calculation module, configured to calculate the offset between the mask to be checked and the standard image based on the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench ;

Wherein, the offset (Δx, Δy) is passed by the formula Indicates that M' ₀₁ (x' ₀₁ , y' ₀₁ ) and M' ₀₂ (x' ₀₂ , y' ₀₂ ) are the two absolute coordinates of the first mark point and the second mark point on the standard mask on the workbench ; M′ ₁ (x′ ₁ , y′ ₁ ) is the absolute coordinates of the two marker points on the mask to be tested on the workbench.

Further, the mask to be checked includes a plurality of basic masks, and after performing the step of using the corrected image as the image of the mask to be checked, the device further includes:

The image extraction module is used to extract the basic mask images corresponding to each of the basic masks based on the image of the mask to be checked;

The differential operation module is used to perform differential processing on the basic mask image and the preset mask image to obtain a differential image for each basic mask image;

An error calculation module, configured to calculate an error value between the basic mask image and a preset mask image according to the difference image;

The judging module is used to judge whether the error value is smaller than a preset threshold, and if it is smaller, it is judged that the printing quality of the mask to be inspected is qualified.

Compared with the prior art, the combined mask position correction method and device provided by the embodiments of the present invention realize the positioning of the mask to be inspected by marking points set on the mask to be inspected, and avoid the occurrence of the mask to be inspected during the mask detection process. The problem of low mask detection accuracy caused by mask position deviation. At the same time, the invention can effectively improve the intelligence of the mask quality detection process and improve detection efficiency.

In order to make the above-mentioned objects, features and advantages of the present invention more comprehensible, preferred embodiments will be described in detail below together with the accompanying drawings.

Description of drawings

In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention, and thus It should be regarded as a limitation on the scope, and those skilled in the art can also obtain other related drawings based on these drawings without creative work.

Fig. 1 is a schematic diagram of a mask image with printing quality problems provided by an embodiment of the present invention.

Fig. 2 is a schematic structural diagram of a mask printing quality inspection system provided by an embodiment of the present invention.

Fig. 3 is a block diagram of a mask printing quality inspection system provided by an embodiment of the present invention.

Fig. 4 is a schematic flow chart of a method for correcting the position of a combined mask provided by a preferred embodiment of the present invention.

Fig. 5 is a schematic diagram of the mask structure of the assembled mask provided by the preferred embodiment of the present invention.

FIG. 6 is a schematic diagram of a sub-flow of step S10 shown in FIG. 4 .

Fig. 7 is a schematic diagram of the field of view of the image acquisition device provided by the embodiment of the present invention.

Fig. 8 is a schematic diagram of the offset of the mark points on the mask to be tested.

Fig. 9 is another schematic flow chart of the method for correcting the position of merged masks provided by a preferred embodiment of the present invention.

Fig. 10 is a schematic diagram of the block structure of the device for correcting the combined film position provided by the preferred embodiment of the present invention.

Icons: 10-mask printing quality inspection system; 11-main control equipment; 110-mark point image acquisition module; 111-coordinate calculation module; 112-rotation angle calculation module; 113-image correction module; 114-offset calculation module 115-image extraction module; 116-difference calculation module; 117-error calculation module; 118-judgment module; 12-image acquisition device; 13-support frame; - Lighting device; 18 - Marking device.

Detailed ways

The inventor found that for the existing printing quality problems of the mask, such as irregular words, lines or symbols on the mask, poor brightness, unfulfilled handwriting, jagged lines, broken lines, virtual edges and bullet oil, etc., specific Please refer to Figure 1, where Figure 1(a) is the standard printing effect of the mask, Figure 1(b) is the blurred edge caused by the virtual edge problem of the mask, and Figure 1(c) is the incomplete display of the printed characters due to the short line problem of the mask , Figure 1(d) shows the surface stains of the entire printed mask due to the problem of elastic oil in the mask. For the aforementioned printing problems, there is no relatively effective problem detection equipment or method in the prior art, but it mainly relies on manual printing. Check, troubleshoot and mark the final printing quality, but for a skilled worker, only about 40 9-piece films can be checked per minute. It can be clearly seen from this that the efficiency of existing manual troubleshooting is very low, and it is difficult to meet the needs of modern large-scale facial mask production of enterprises. Based on this, an embodiment of the present invention provides a method and device for correcting the position of a merged film to solve the above problems.

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The components of the embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.

It should be noted that like numerals and letters denote similar items in the following figures, therefore, once an item is defined in one figure, it does not require further definition and explanation in subsequent figures.

Please refer to Fig. 2 and Fig. 3, which is a schematic structural diagram of a facial mask printing quality inspection system 10 provided by the present invention, which includes a main control device 11, an image acquisition device 12, a support frame 13, and a workbench 14 , a plurality of guide rails 15 and a driving device 16 for driving the image acquisition device 12 to move in different directions along the guide rails 15 under the control of the main control device 11 , such as the X-axis direction and the Y-axis direction. Optionally, the driving device 16 may be, but not limited to, a motor or the like.

Wherein, the main control device 11, as the core control module of the mask printing quality detection system 10, can adopt a high-performance and low-power single-chip microcomputer STM32F103ZET6 packaged in LQFP100. This single-chip microcomputer has three I2C and SCI interfaces, multiple PWM channels, Abundant IO ports and other abundant peripheral resources can complete communication with other processors. Optionally, an image processor may be integrated in the main control device 11 for image data processing, etc., because a large number of calculations or algorithms involved in the image are relatively complicated, and ordinary single-chip memory resources are too scarce, which may easily lead to Calculation speed is slow during image processing, and processing speed must be slowed down if branch processing is required, so a dedicated image processor can be used to process image error information in the implementation of the present invention, such as TMS320DM642 dedicated image processor. In addition, in actual implementation, the master control device 11 may be composed of multiple small controllers, processors, etc., which is not limited in this embodiment.

The image acquisition device 12 is used to obtain the mask image of the mask to be checked, and can adopt but not limited to the standard commercially available high frame rate CMOS image sensor MT9V034 module (hereinafter referred to as CMOS image sensor), and its photosensitive area is 1/3 inch , the pixel is VGA752*480, the full resolution output speed is 60 frames per second, the global shutter is adopted, and the sensitivity is super high. In addition, the lens of the image acquisition device 12 may be an adjustable focal length lens of different sizes such as 6 mm/3.5 mm/9 mm, which is not limited in this embodiment. During actual implementation, the image acquisition device 12 may be provided with an adjustable baffle for adjusting the shape and size of the effective field of view of the image acquisition device 12. In addition, the image acquisition device 12 may be a separate camera , may also be composed of multiple cameras, which is not limited in this embodiment.

Further, referring to Fig. 3 again, the mask printing quality detection system 10 may also include a lighting device 17 located at the backlight for the image acquisition device 12 to acquire the image of the mask to be inspected, and a mark for marking the mask device 18. Wherein, the lighting device 17 is arranged on the workbench 14 and is located under the mask to be inspected. Optionally, the lighting device 17 can adopt but not limited to a shadowless light source and an LED module with a shadowless lamp. The shade is realized. In addition, the lighting device 17 may also be provided with an LED dimming circuit, and the LED dimming circuit may be used to realize dimming and control of the brightness of the background light source, which is not limited in this embodiment.

The marking device 18 is used to mark the detected facial masks, so as to facilitate the subsequent sorting of facial masks. Optionally, the marking device 18 includes a stepping motor, a linear steering gear and a marking stamp, the stepping motor is connected to the main control device 11, the linear steering gear is connected to the stepping motor and the marking The seals are attached separately.

Specifically, the stepper motor is used to drive the linear steering gear to a preset position under the control of the main control device 11, and make the marking seal connected to the linear steering gear carry out the inspection on the film to be inspected. mark. Optionally, the marking stamp can be fixed at the rod head of the linear steering gear, so as to move up and down driven by the linear steering gear. In addition, the linear steering gear can be fixed on the bracket through a stepping motor, so that the stepping motor can realize fast and accurate movement. In actual implementation, the motion speed of the linear steering gear 1071 can be 0.11sec/60° under 3.7 voltage

Further, the facial mask printing quality detection system 10 is also provided with a human-computer interaction interface, the human-computer interaction interface includes human-computer interaction keys and a display screen, wherein the machine interaction keys can use a Risym 4×4 film rectangular keyboard, Described display screen can adopt LCD1602 liquid crystal screen etc. In addition, during actual implementation, the facial mask printing quality detection system 10 can also realize human-computer interaction, parameter setting, detection control, etc. through the client connected to it, which is not limited in this embodiment.

Further, based on the design and description of the above-mentioned mask printing quality detection system 10, as shown in Figure 4, it is a schematic flow chart of the combined mask position correction method provided by the preferred embodiment of the present invention, the combined mask position correction method It is applied to the main control device 11 in the above-mentioned mask printing quality inspection system 10 . Wherein, before performing the detection of the printing quality of the mask to be inspected, it is necessary to initialize the mask printing quality inspection system 10 and set corresponding parameters.

For example, the system initialization of the mask printing quality inspection system 10 includes initialization of clock, timer, SCI communication interface, I2C interface and McBSP interface, etc., wherein the clock can be but not limited to 600MHz. In addition, the image processor integrated in the main control device 11 such as 1010SAA7115 chip, etc. can be initialized through the I2C interface; and for example, the setting of corresponding parameters can include, but not limited to, the number and marking of the basic masks on the combined mask The initial height and position of the stamp, the movement speed of the marked stamp in the XY direction, the thickness of the mask to be inspected, the preset standard image, and other management information are not specifically limited in this embodiment.

Further, the specific flow and steps of the method for correcting the combined mask position will be described in detail below with reference to FIG. 4 .

Step S10 , acquiring the first marker point image and the second marker point image sent by the image acquisition device 12 .

First of all, it should be noted that the mask to be inspected in this implementation is a combined mask (such as a combined plastic mask, etc.), that is, the combined mask includes a plurality of basic masks printed in arrays, as shown in Figure 5, assuming that all The mask to be inspected is a 4X2 combined mask, and the two corners of the diagonal in the combined mask are respectively provided with a first marker point and a second marker point for positioning. In this embodiment, the first The marker point and the second marker point may be, but not limited to, circular marker points. In addition, the master control device 11 pre-stores the standard image and the absolute coordinates of the standard image on the workbench. Optionally, as shown in FIG. 6 , the above step S10 may be implemented through step S100 and step S101 .

Step S100, sending a control instruction to the driving device 16 so that the driving device 16 drives the image acquisition device 12 to search for the first marker point and the second marker point within a preset range.

Step S101, when the image acquisition device 12 searches for the first marker point and the second marker point, control the image acquisition device 12 to acquire the first marker point image and the second marker point image and send them.

In this embodiment, when the image acquisition device 12 searches for the first marker point and the second marker point, the field of view of the image acquisition device 12 can be preset to cover a certain part of the mask to be inspected. Basic mask. During actual implementation, as shown in FIG. 7 , the inner frame of the image acquisition device 12 is tangent to the first marker point, and the center point of the field of view (O(x, y)) of the image acquisition device 12 is the same as the first marker point. The center of the circle coincides, and the inner frame is properly enlarged, and then the search for the first marker point and the second marker point is carried out, and the first marker point image and the second marker point image are respectively obtained when the search is found, wherein 1 in Figure 7 is The field of view of the inner frame of the image acquisition device 12 , 2 is the field of view of the image acquisition device 12 . It should be noted that the preset range can be flexibly designed according to the actual situation, which can be the entire workbench 14, etc., or can be the size of the above-mentioned inner frame, or twice the diameter of the first marker point or the second marker point Wait.

Step S11 , respectively matching the first marker point image and the second marker point image with the standard image, and calculating the absolute coordinates of the first marker point and the second marker point on the workbench 14 .

Among them, assuming that the two absolute coordinates of the mark points of the standard mask on the workbench 14 are M' ₀₁ (x' ₀₁ , y' ₀₁ ) and M' ₀₂ (x' ₀₂ , y' ₀₂ ), then based on Hough The transformed circle detection algorithm performs template matching on the image of the first marker point and the standard image to confirm the first marker point, and then calculates the absolute coordinates M′ ₁ (x′ ₁ ) of the circle center of the first marker point on the workbench 14 ,y′ ₁ ). Similarly, the absolute coordinates M' ₂ (x' ₂ , y' ₂ ) of the circle center of the second marker point on the workbench 14 can be obtained.

Step S12 , calculating the rotation angle between the mask to be inspected and the standard image according to the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench 14 .

Wherein, as shown in FIG. 8 , based on the first marker point M' ₁ (x' ₁ , y' ₁ ) and the second marker point M' ₂ (x' ₂ , y ' ₂ ). Then the rotation angle α can be obtained by the formula Calculated, among them,

Step S13, receiving the image of the mask to be inspected taken and sent by the image acquisition device 12, correcting the image according to the rotation angle, and using the corrected image as the image of the mask to be inspected.

Wherein, when error compensation is performed according to the rotation amount, it may be implemented by using an image rotation method, which will not be described in detail here in this embodiment. In addition, in this embodiment, in addition to the above-mentioned rotation amount, the formula Calculate the offset (Δx, Δy) between the mask to be tested and the standard mask, and eliminate the offset by adjusting the position of the mask to be checked on the workbench 14 .

It can be understood that since the rotation amount (rotation angle) and the deviation amount are consistent for all basic masks on the same merged mask, they can be directly applied without repeated calculation.

Further, as shown in FIG. 9 , based on the corrected image of the mask to be inspected above, the embodiment of the present invention also provides a mask printing quality inspection process, which is specifically shown in the following steps S14-Step S19.

Step S14, based on the image of the mask to be checked, respectively extract the basic mask images corresponding to each of the basic masks.

Step S15, for each basic mask image, perform differential processing on the basic mask image and a preset mask image to obtain a differential image.

In steps S14 and S15, since the mask to be checked includes a plurality of basic masks, each basic mask image can be extracted based on the corrected mask image to be checked, and the basic mask image and the preset mask image Perform differential processing. Wherein, assuming that S represents a basic mask image of a basic mask, and T represents a preset mask image, then, for a basic mask image, the differential image can be expressed as F(m,n)=|(T-S)|.

Step S16, calculating an error value between the basic mask image and a preset mask image according to the difference image.

Based on the difference image F(m,n) obtained in the above step S15, F(m,n) can be binarized by adaptive threshold Th to obtain a binarized image It should be noted here that the selection of the adaptive threshold Th is particularly important for the binarization result, for example, an appropriate threshold can make the processing result of the differentiated image more accurate.

In addition, the error value (average error) can be based on the formula Obtained, wherein, the larger the error value E, the larger the error between the mask image to be checked and the preset standard image, and vice versa, the smaller the error.

Step S17, judging whether the error value is smaller than a preset threshold, if smaller, judging that the printing quality of the mask to be inspected is qualified.

Step S18, if the error value is greater than or equal to the preset threshold, it is determined that the printing quality of the mask to be inspected is unqualified.

Step S19, recording the location information of the unqualified printed mask to be inspected, and marking the unqualified printed mask to be inspected according to the location information.

Wherein, step S17-step S19 is to judge whether the printing quality of the mask to be checked is qualified according to the error value, and when the printing quality of the mask to be checked is unqualified, the unqualified mask to be checked is checked by the marking stamp in the marking device 18 mark. In actual implementation, in order to increase the pass rate of mask detection and avoid production waste, attention should be paid to the setting of the preset threshold, and the error tolerance can be appropriately increased for the following problems, that is, the preset threshold should be increased. For example: if there is a little irregular printing on the printing or the mask has light transmission, although there will be some errors in the mask image matching at this time, it will not affect the normal use of the product; for example, some products do not pay attention to the quality of the mask or There is a certain distance between the user and the product, and the tiny defects on the product mask cannot be observed by the naked eye during normal use. The preset threshold can be adjusted appropriately according to the actual situation.

Further, as shown in Figure 10, the embodiment of the present invention also provides a combined mask position correction device, which is applied to the main control device 11 in the mask printing quality detection system 10, the The combined film position correction device includes a marker point image acquisition module 110, a coordinate calculation module 111, a rotation angle calculation module 112, an image correction module 113, an offset calculation module 114, an image extraction module 115, a difference calculation module 116, and an error calculation module 117 and judgment module 118.

The marker point image acquisition module 110 is configured to acquire the first marker point image and the second marker point image sent by the image acquisition device 12; in this embodiment, the description about the marker point image acquisition module 110 can refer to the above step S10 for details. , that is, the step S10 can be executed by the landmark image acquisition module 110, so no further description is given here.

The coordinate calculation module 111 is configured to match the first marker image and the second marker image with the standard image respectively, and calculate the absolute coordinates of the first marker point and the second marker point on the workbench; In this embodiment, for the description of the coordinate calculation module 111, reference may be made to the detailed description of the above-mentioned step S12, that is, the step S11 may be executed by the coordinate calculation module 111, so no further description is given here.

The rotation angle calculation module 112 is used to calculate the mask to be inspected and the standard image according to the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench The rotation angle between; in this embodiment, the description about the rotation angle calculation module 112 can refer to the detailed description of the above-mentioned step S12, that is, the step S12 can be executed by the rotation angle calculation module 112, so no further changes will be made here Explain more.

The image correction module 113 is configured to receive the image of the mask to be inspected taken and sent by the image acquisition device 12, and correct the image according to the rotation angle, and use the corrected image as the image of the mask to be inspected. In this embodiment, for the description of the image correction module 113, reference may be made to the detailed description of the above step S13, that is, the step S13 may be executed by the image correction module 113, so no further description is given here.

The offset calculation module 114 is used to calculate the distance between the mask to be checked and the standard image according to the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench. Offset. In this embodiment, for the description of the offset calculation module 114, reference may be made to the detailed description of the above-mentioned step S13, that is, the step S13 may be executed by the offset calculation module 114, so no further description is given here.

The image extraction module 115 is used to extract the basic mask images corresponding to each of the basic masks based on the corrected mask image to be checked; in this embodiment, the description of the image extraction module 115 can refer to the above-mentioned step S14. For detailed description, that is, the step S14 can be executed by the image extraction module 115, so no further description is given here.

The difference operation module 116 is used to perform differential processing on the basic mask image and the preset mask image for each basic mask image to obtain a difference image; in this embodiment, the description about the difference operation module 116 can refer to the above-mentioned The detailed description of step S15, that is, the step S15 can be executed by the difference operation module 116, so no further description is given here.

The error calculation module 117 is used to calculate the error value between the basic mask image and the preset mask image according to the difference image; in this embodiment, the description of the error calculation module 117 can refer to the above-mentioned step S16 specifically. For detailed description, that is, the step S16 can be executed by the error calculation module 117, so no further description is given here.

The judging module 118 is used to judge whether the error value is smaller than a preset threshold, and if it is smaller, it is judged that the printing quality of the mask to be inspected is qualified. In this embodiment, for the description of the judging module 118, reference may be made to the detailed description of the above-mentioned step S17, that is, the step S17 may be executed by the judging module 118, so no further description is given here.

In summary, the method and device for correcting the position of the combined mask provided by the embodiments of the present invention realize the positioning of the mask to be inspected by marking points arranged on the mask to be inspected, and avoid the position of the mask to be inspected due to the position of the mask to be inspected during the mask detection process. The problem of low mask detection accuracy caused by deviation. At the same time, the invention can effectively improve the intelligence of the mask quality detection process and improve detection efficiency.

In the several embodiments provided by the embodiments of the present invention, it should be understood that the disclosed devices and methods may also be implemented in other ways. The device and method embodiments described above are only illustrative. For example, the flowcharts and block diagrams in the accompanying drawings show possible implementation architectures of devices, methods and computer program products according to multiple embodiments of the present invention, function and operation. In this regard, each block in a flowchart or block diagram may represent a module, program segment, or part of code that includes one or more Executable instructions. It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks in succession may, in fact, be executed substantially concurrently, or they may sometimes be executed in the reverse order, depending upon the functionality involved. It should also be noted that each block of the block diagrams and/or flowchart illustrations, and combinations of blocks in the block diagrams and/or flowchart illustrations, can be implemented by a dedicated hardware-based system that performs the specified function or action , or may be implemented by a combination of dedicated hardware and computer instructions.

In addition, each functional module in each embodiment of the present invention can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

If the functions are implemented in the form of software function modules and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the essence of the technical solution of the present invention or the part that contributes to the prior art or the part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including Several instructions are used to make a computer device (which may be a personal computer, an electronic device, or a network device, etc.) execute all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disk or optical disk and other media that can store program codes. . It should be noted that, in this document, the terms "comprising", "comprising" or any other variation thereof are intended to cover a non-exclusive inclusion such that a process, method, article or apparatus comprising a set of elements includes not only those elements, It also includes other elements not expressly listed, or elements inherent in the process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or apparatus comprising said element.

The above descriptions are only optional embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (10)

1. A method for correcting the position of a combined mask is characterized in that it is applied to the master control device in the mask printing quality detection system, the mask to be checked is provided with a first mark point and a second mark point, and in the master control device The standard image and the absolute coordinates of the standard image on the workbench are pre-stored, and the method for correcting the combined mask position includes: Acquiring the first marker point image and the second marker point image sent by the image acquisition device; Matching the first marker point image and the second marker point image with the standard image respectively, and calculating the absolute coordinates of the first marker point and the second marker point on the workbench; calculating the rotation angle between the mask to be checked and the standard image according to the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench; receiving the image of the mask to be inspected taken and sent by the image acquisition device, correcting the image according to the rotation angle, and using the corrected image as the image of the mask to be inspected. 2. The method for correcting the position of the combined film according to claim 1, wherein the angle of rotation α is calculated by the following formula: in, M' ₀₁ (x' ₀₁ , y' ₀₁ ) and M' ₀₂ (x' ₀₂ , y' ₀₂ ) are the absolute coordinates of the first mark point and the second mark point on the standard mask on the workbench; M' ₁ (x' ₁ ,y' ₁ ) and M' ₂ (x' ₂ ,y' ₂ ) are the absolute coordinates of the two marker points on the mask to be tested on the workbench. 3. The method for correcting the position of the combined mask according to claim 1, wherein the method further comprises: calculating the offset between the mask to be checked and the standard image according to the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench; Wherein, the offset (Δx, Δy) is passed by the formula Indicates that M' ₀₁ (x' ₀₁ , y' ₀₁ ) and M' ₀₂ (x' ₀₂ , y' ₀₂ ) are the absolute coordinates of the first mark point and the second mark point on the standard mask on the workbench; M ' ₁ (x' ₁ ,y' ₁ ) is the absolute coordinates of the two marker points on the mask to be tested on the workbench. 4. The method for correcting the position of the merged film according to claim 1, wherein the step of receiving the first marker image and the second marker image sent by the image acquisition device includes: Sending a control command to the driving device so that the driving device drives the image acquisition device to search for the first marker point and the second marker point within a preset range; When the image acquisition device searches for the first marker point and the second marker point, the image acquisition device is controlled to acquire the first marker point image and the second marker point image and send them. 5. The method for correcting the position of the combined mask according to claim 1, wherein the mask to be checked comprises a plurality of basic masks, and after performing the step of using the corrected image as the mask image to be checked, the Methods also include: Based on the image of the mask to be checked, extract the basic mask image corresponding to each of the basic masks; For each basic mask image, differential processing is performed on the basic mask image and a preset mask image to obtain a differential image; calculating an error value between the basic mask image and a preset mask image according to the difference image; It is judged whether the error value is smaller than a preset threshold, and if it is smaller, it is judged that the printing quality of the mask to be inspected is qualified. 6. The method for correcting the position of the combined mask according to claim 5, wherein the method further comprises: If the error value is greater than or equal to the preset threshold, it is determined that the printing quality of the mask to be inspected is unqualified; Record the location information of the unqualified printed mask to be inspected, and mark the unqualified printed mask to be inspected according to the location information. 7. A device for correcting the position of a combined mask is characterized in that it is applied to the master control equipment in the mask printing quality detection system, the mask to be checked is provided with a first mark point and a second mark point, and in the master control device The standard image and the absolute coordinates of the standard image on the workbench are pre-stored, and the combined mask position correction device includes: A landmark image acquisition module, configured to acquire the first landmark image and the second landmark image sent by the image acquisition device; A coordinate calculation module, configured to match the first marker point image and the second marker point image with the standard image respectively, and calculate the absolute coordinates of the first marker point and the second marker point on the workbench; The rotation angle calculation module is used to calculate the distance between the mask to be checked and the standard image according to the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench. rotation angle; The image correction module is used to receive the image of the mask to be inspected taken and sent by the image acquisition device, correct the image according to the rotation angle, and use the corrected image as the image of the mask to be inspected. 8. The device for correcting the position of the combined film according to claim 7, wherein the angle of rotation α is calculated by the following formula: in, M' ₀₁ (x' ₀₁ , y' ₀₁ ) and M' ₀₂ (x' ₀₂ , y' ₀₂ ) are the absolute coordinates of the first mark point and the second mark point on the standard mask on the workbench; M' ₁ (x' ₁ ,y' ₁ ) and M' ₂ (x' ₂ ,y' ₂ ) are the absolute coordinates of the two marker points on the mask to be tested on the workbench. 9. The device for correcting the position of the combined film according to claim 7, wherein the device further comprises: An offset calculation module, configured to calculate the offset between the mask to be checked and the standard image based on the absolute coordinates of the first marker point and the second marker point on the workbench and the absolute coordinates of the standard image on the workbench ; Wherein, the offset (Δx, Δy) is passed by the formula Indicates that M' ₀₁ (x' ₀₁ , y' ₀₁ ) and M' ₀₂ (x' ₀₂ , y' ₀₂ ) are the absolute coordinates of the first mark point and the second mark point on the standard mask on the workbench; M ' ₁ (x' ₁ ,y' ₁ ) is the absolute coordinates of the two marker points on the mask to be tested on the workbench. 10. The device for correcting the position of the combined mask according to claim 7, wherein the mask to be checked includes a plurality of basic masks, and after performing the step of using the corrected image as the image of the mask to be checked, the The device also includes: The image extraction module is used to extract the basic mask images corresponding to each of the basic masks based on the image of the mask to be checked; The differential operation module is used to perform differential processing on the basic mask image and the preset mask image to obtain a differential image for each basic mask image; An error calculation module is used to calculate the error value between the basic mask image and the preset mask image according to the difference image; The judging module is used to judge whether the error value is smaller than a preset threshold, and if it is smaller, it is judged that the printing quality of the mask to be inspected is qualified.