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CN108613686A - A kind of oscillation gyro automation method for repairing and regulating - Google Patents

A kind of oscillation gyro automation method for repairing and regulating Download PDF

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CN108613686A
CN108613686A CN201810396634.1A CN201810396634A CN108613686A CN 108613686 A CN108613686 A CN 108613686A CN 201810396634 A CN201810396634 A CN 201810396634A CN 108613686 A CN108613686 A CN 108613686A
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gyro
harmonic oscillator
laser
repairing
regulating
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CN108613686B (en
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胡友旺
段吉安
曾凯
孙小燕
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Central South University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices

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Abstract

The invention belongs to sensor fields, disclose a kind of oscillation gyro automation method for repairing and regulating, include the following steps:(1) intrinsic frequency of the harmonic oscillator of automatic measurement oscillation gyro under two kinds of operation modes, and frequency cracking value is calculated according to intrinsic frequency;(2) if frequency cracking value is unsatisfactory for required precision, mode and corresponding correction method are trimmed to automatically determine by comparing the size of two intrinsic frequencies;(3) gyration is controlled to expected Working position by the associated physical location of automatic positioning gyro and the physical location of process equipment correction of the flank shape mechanism;(4) processing technology being cooked up automatically according to the relationship between the quality and working process parameter of required removal, and automation being carried out to gyro according to the processing technology planned and is trimmed, completion trims rear return to step (1).High degree of automation of the present invention improves and trims precision and trim efficiency.

Description

一种振动陀螺自动化修调方法A vibrating gyroscope automatic trimming method

技术领域technical field

本发明涉及一种振动陀螺,具体地涉及一种振动陀螺自动化修调方法。The invention relates to a vibrating gyroscope, in particular to an automatic adjustment method for a vibrating gyroscope.

背景技术Background technique

随着航空航天技术的不断进步,高分辨率成像、中继通信和导航等应用对卫星的姿态稳定性和寿命要求越来越高。陀螺作为卫星姿控系统的核心部件,被用来测量卫星相对惯性空间的角位移与角速度,其零偏稳定性与卫星姿态稳定度有直接关系。卫星的在轨运行时间在3年以上甚至达到10年,陀螺是卫星中的易损部件,其持续工作时间是影响卫星寿命的关键因素。振动陀螺是一种基于哥氏力原理的固体波动陀螺,具有高灵敏度、低成本、高可靠性和长寿命等优点,有较好的发展潜力。振动陀螺主要包括半球谐振子陀螺、MEMS微陀螺、音叉陀螺等,其中圆柱壳体振动陀螺是一种相对易于加工的陀螺。美国、俄罗斯和英国等在振动陀螺研究方面处于领先地位,我国的中电集团26所、国防科技大学、哈尔滨工业大学等对振动陀螺的谐振子做过一些研究,在振动陀螺的结构理论和控制系统设计方面已经取得一些实质性的成果。With the continuous advancement of aerospace technology, applications such as high-resolution imaging, relay communication and navigation have higher and higher requirements on the attitude stability and life of satellites. As the core component of the satellite attitude control system, the gyroscope is used to measure the angular displacement and angular velocity of the satellite relative to the inertial space, and its zero bias stability is directly related to the satellite attitude stability. The on-orbit operation time of the satellite is more than 3 years or even 10 years. The gyroscope is a vulnerable part in the satellite, and its continuous working time is a key factor affecting the life of the satellite. The vibrating gyroscope is a solid wave gyroscope based on the principle of Coriolis force. It has the advantages of high sensitivity, low cost, high reliability and long life, and has good development potential. Vibrating gyroscopes mainly include hemispherical harmonic oscillator gyroscopes, MEMS micro gyroscopes, tuning fork gyroscopes, etc. Among them, the cylindrical shell vibrating gyroscope is a relatively easy-to-process gyroscope. The United States, Russia and the United Kingdom are in the leading position in the research of vibrating gyroscopes. my country's China Power Group 26, National University of Defense Technology, Harbin Institute of Technology, etc. have done some research on the harmonic oscillator of vibrating gyroscopes. In the structural theory and control of vibrating gyroscopes Some substantive results have been achieved in system design.

振动陀螺的制造是对其理论研究进行验证的关键一步。国防科技大学在理论和制造方面均进行了大量的研究,不仅提出了相应的理论模型,也制造出了样机。样机基本能够按照预期进行工作,但工作性能与需求还有差距。而这一差距主要来源于制造误差,包括材料的均匀性、加工的精度、残余内应力等。为提高陀螺的工作性能使其满足使用要求,对精加工后的谐振子进行修调是一种重要且有效的方法。修调工艺可以弥补谐振子材料上的缺陷及加工中的误差,使谐振子按照所需的性能参数进行工作。The fabrication of the vibrating gyroscope is a key step in the verification of its theoretical research. The National University of Defense Technology has done a lot of research in theory and manufacturing, not only put forward the corresponding theoretical model, but also manufactured a prototype. The prototype can basically work as expected, but there is still a gap between the working performance and the demand. This gap mainly comes from manufacturing errors, including material uniformity, processing accuracy, residual internal stress, etc. In order to improve the working performance of the gyroscope so that it meets the requirements of use, it is an important and effective method to trim the resonator after finishing. The trimming process can make up for defects in the resonator material and errors in processing, so that the resonator can work according to the required performance parameters.

修调精度和效率是评价振动陀螺修调工艺的两个主要指标。精度的高低直接决定了陀螺仪的使用场合及其市场定位,而修形效率是大批量生产的必要保障。目前修调工艺大多由人工完成,这在去除质量的控制、修形位置的定位及修形形状的加工上都会带来不确定因素,最终导致修调精度差、效率低。而采用自动化修调技术,一方面可以借助图像处理技术进行高精度定位,另一方面可以实现加工参数的稳定控制,从而达到高精度、高效率的修调。目前国内对修调设备方面的报道较少,关于自动化修调的研究更少。Trimming accuracy and efficiency are the two main indexes to evaluate the trimming process of vibrating gyro. The level of precision directly determines the application occasion and market positioning of the gyroscope, while the modification efficiency is a necessary guarantee for mass production. At present, the trimming process is mostly done manually, which will bring uncertain factors in the control of removal quality, the positioning of the trimming position, and the processing of the trimming shape, which will eventually lead to poor trimming accuracy and low efficiency. The use of automatic trimming technology, on the one hand, can use image processing technology for high-precision positioning, and on the other hand, can realize stable control of processing parameters, so as to achieve high-precision and high-efficiency trimming. At present, there are few domestic reports on trimming equipment, and even less research on automatic trimming.

发明内容Contents of the invention

本发明的目的是提供一种振动陀螺自动化修调方法,该方法自动化程度高,保证修调精度和效率。The object of the present invention is to provide an automatic adjustment method of a vibrating gyroscope, which has a high degree of automation and ensures adjustment accuracy and efficiency.

为了实现上述目的,本发明提供一种振动陀螺自动化修调方法(如图1所示),图2是修调装置结构示意图,修调方法包括如下步骤:In order to achieve the above object, the present invention provides a vibrating gyroscope automatic trimming method (as shown in Figure 1), and Fig. 2 is a structural schematic diagram of the trimming device, and the trimming method includes the following steps:

(1)自动测量振动陀螺的谐振子在两种工作模态下的固有频率,并根据所述固有频率计算频率裂解值;(1) automatically measure the natural frequencies of the harmonic oscillator of the vibrating gyroscope under two operating modes, and calculate the frequency cracking value according to the natural frequencies;

(2)如果所述频率裂解值不满足预设的精度要求,则通过比较两个所述固有频率的大小来自动确定修调模态和对应的修形方法;(2) If the frequency cracking value does not meet the preset accuracy requirements, then automatically determine the trimming mode and the corresponding modification method by comparing the size of the two natural frequencies;

(3)通过自动定位所述陀螺的相关物理位置及加工设备修形机构的物理位置来控制所述陀螺运动至预期加工位置;(3) controlling the movement of the gyroscope to the expected processing position by automatically positioning the relevant physical position of the gyroscope and the physical position of the processing equipment modification mechanism;

(4)依据所需去除的质量和加工工艺参数之间的关系自动规划出加工工艺,并依据所规划的所述加工工艺对所述陀螺进行自动化修调,完成修调后返回步骤(1);(4) Automatically plan the processing technology according to the relationship between the quality to be removed and the processing technology parameters, and automatically adjust the gyroscope according to the planned processing technology, and return to step (1) after completing the adjustment. ;

可选的,所述步骤(1)中,通过模态切换电路实现两种工作模态的自动切换,以实现连续不间断地快速测量两种工作模态下的固有频率。如图3所示,一种振动陀螺的八片(四对)压电片均匀布置在谐振子底部,压电片的一面与谐振子杯底由导电胶粘接在一起通过图中的地线共地,另一面引出导线至相应电极用于输入或输出信号。其中驱动模态的激励压电片用于激励陀螺至驱动模态振动,并由驱动模态检测压电片测量该模态下的振动频率。检测模态检测压电片用于陀螺工作时,在有角速度输入的情况下,测量该模态的振动频率及幅值。而检测模态补偿压电片用于补偿检测模态检测压电片的测量信号。由上述分析发现,只有相应模态被激励出振动才能测量相应的固有频率。而在修调时,需要测量出两模态的固有频率。通常采用的方法是:从驱动模态的激励压电片输入激励信号,从驱动模态的检测压电片测量驱动模态的固有频率。再将激励信号从检测模态的补偿压电片输入,由检测模态的检测压电片测量该模态的固有频率。而这一切换输入信号的过程需要插拔引线,降低了测量效率,且人为插拔带来了不确定因素。所以本发明通过组合电磁继电器,再由计算机给出控制信号,实现了电路自动切换。Optionally, in the step (1), the automatic switching between the two working modes is realized through the mode switching circuit, so as to realize the continuous and uninterrupted rapid measurement of the natural frequencies under the two working modes. As shown in Figure 3, eight pieces (four pairs) of piezoelectric sheets of a vibrating gyroscope are evenly arranged at the bottom of the resonator, and one side of the piezoelectric sheet is bonded to the bottom of the resonator cup by conductive glue through the ground wire in the figure Common ground, the other side leads the wire to the corresponding electrode for input or output signal. The excitation piezoelectric sheet in the driving mode is used to excite the gyroscope to vibrate in the driving mode, and the vibration frequency in this mode is measured by the driving mode detection piezoelectric sheet. When the detection mode detection piezoelectric film is used for the gyroscope, under the condition of angular velocity input, the vibration frequency and amplitude of the mode are measured. The detection mode compensation piezoelectric film is used to compensate the measurement signal of the detection mode detection piezoelectric film. It is found from the above analysis that the corresponding natural frequency can only be measured if the corresponding mode is excited to vibrate. When trimming, it is necessary to measure the natural frequencies of the two modes. The usual method is: input the excitation signal from the excitation piezoelectric film of the driving mode, and measure the natural frequency of the driving mode from the detection piezoelectric film of the driving mode. Then the excitation signal is input from the compensation piezoelectric sheet of the detection mode, and the natural frequency of the mode is measured by the detection piezoelectric sheet of the detection mode. However, the process of switching the input signal requires plugging and unplugging the lead wires, which reduces the measurement efficiency, and artificial plugging and unplugging brings uncertain factors. Therefore, the present invention realizes automatic switching of circuits by combining electromagnetic relays and giving control signals by a computer.

可选的,所述步骤(2)中,在固有频率低的模态上采用谐振子杯壁顶端打孔的修形方法进行修调(图4),或在固有频率高的模态上采用侧壁划槽的修形方法进行修调(图5)。经过研究发现,打孔会提高孔所在模态的固有频率,划槽会降低槽所在模态的固有频率。据此,通过比较两个模态的固有频率大小可以实现自动选择相应的修调方法及模态。Optionally, in the step (2), the modification method of punching holes at the top of the cup wall of the resonator is used on the mode with low natural frequency to perform modification (Fig. 4), or the mode with high natural frequency adopts The modification method of the side wall groove is modified (Figure 5). After research, it is found that punching holes will increase the natural frequency of the mode where the hole is located, and slotting will reduce the natural frequency of the mode where the slot is located. Accordingly, by comparing the natural frequencies of the two modes, the corresponding trimming method and mode can be automatically selected.

可选的,所述步骤(3)中,振动陀螺的相关物理位置包括谐振子待加工点物理位置及谐振子工作模态的物理位置,其中谐振子待加工点物理位置是指谐振子待加工点的位置坐标,谐振子工作模态的物理位置是谐振子工作模态的方位角。如图6所示,通过相机获取陀螺谐振子各方位的图像。其中第一相机2和第二相机4分别获取谐振子的边线和轴线,通过相应的图像处理,由边线获得谐振子待加工点的x值,由轴线获得谐振子待加工点的y值。再处理相机2或4的图片,获得谐振子顶端线坐标,作为待加工点的z值。最后再利用第三相机6,俯视谐振子拍得周向图片,进行处理可以获得谐振子工作模态的方位角。因此可自动获得待加工点位置坐标,和谐振子工作模态的方位角。Optionally, in the step (3), the relevant physical position of the vibrating gyroscope includes the physical position of the point to be processed by the harmonic oscillator and the physical position of the working mode of the harmonic oscillator, wherein the physical position of the point to be processed by the harmonic oscillator refers to the point to be processed by the harmonic oscillator The position coordinates of the point, the physical position of the harmonic oscillator working mode is the azimuth angle of the harmonic oscillator working mode. As shown in Figure 6, the images of the various orientations of the gyro resonator are acquired through the camera. The first camera 2 and the second camera 4 respectively acquire the edge and axis of the harmonic oscillator, and through corresponding image processing, the x value of the processing point of the harmonic oscillator is obtained from the edge, and the y value of the processing point of the harmonic oscillator is obtained from the axis. Then process the picture of camera 2 or 4 to obtain the coordinates of the top line of the harmonic oscillator as the z value of the point to be processed. Finally, the third camera 6 is used to look down on the harmonic oscillator to take a circumferential picture, which can be processed to obtain the azimuth of the working mode of the harmonic oscillator. Therefore, the position coordinates of the point to be processed and the azimuth angle of the working mode of the resonator can be obtained automatically.

可选的,步骤(3)中所述加工设备为激光或离子束设备,对应的所述修形机构为激光或离子束聚焦点;加工设备修形机构的物理位置是指聚焦点的空间坐标,通过处理上述相机2和4所拍摄的聚焦点图像即可获得聚焦点的三个空间坐标值。Optionally, the processing equipment described in step (3) is a laser or ion beam equipment, and the corresponding modification mechanism is a laser or ion beam focal point; the physical position of the processing equipment modification mechanism refers to the spatial coordinates of the focal point , the three spatial coordinate values of the focus point can be obtained by processing the focus point images captured by the cameras 2 and 4 above.

可选的,步骤(3)中所述陀螺通过一个三自由度运动平台和一个旋转平台共同驱动至预期加工位置;其中所述三自由度运动平台带动所述陀螺在X轴向、Y轴向和Z轴向运动,使所述谐振子的待加工点位置坐标与所述聚焦点空间坐标重合;所述旋转平台带动所述陀螺旋转,使所述陀螺上的所述模态定位标识旋转至预期加工位置。在已知谐振子待加工点位置坐标、谐振子工作模态方位角及聚焦点空间坐标的情况下,系统首先判断谐振子工作模态方位角是否在修调方位上,如果没有则通过旋转平台使其达到相应位置。再计算谐振子待加工位置坐标和聚焦点空间坐标的差值,确定X、Y及Z轴分别需要移动的距离并通过移动三自由度运动平台实现定位。利用图像处理获得的相应位移参数,即可实现自动化定位。Optionally, the gyroscope in step (3) is jointly driven to the expected processing position by a three-degree-of-freedom motion platform and a rotating platform; wherein the three-degree-of-freedom motion platform drives the gyro in the X-axis and Y-axis and Z axial movement, so that the position coordinates of the point to be processed of the harmonic oscillator coincide with the spatial coordinates of the focus point; the rotating platform drives the gyro to rotate, so that the modal positioning mark on the gyro rotates to Expected machining position. When the coordinates of the position of the harmonic oscillator to be processed, the azimuth of the working mode of the harmonic oscillator, and the space coordinates of the focus point are known, the system first judges whether the azimuth of the working mode of the harmonic oscillator is in the trimming azimuth, and if not, it will pass the rotating platform make it to the corresponding position. Then calculate the difference between the position coordinates of the harmonic oscillator to be processed and the space coordinates of the focus point, determine the distances that need to be moved by the X, Y, and Z axes respectively, and realize positioning by moving the three-degree-of-freedom motion platform. Automatic positioning can be realized by using the corresponding displacement parameters obtained by image processing.

可选的,步骤(4)中所述加工工艺参数包括所述激光设备的激光能量、重复频率、偏振方向和脉冲数等,以及所述三自由度运动平台加工时的运动轨迹。在完成定位后,即可控制激光和三自由度运动平台实现自动修调,其中激光参数和三自由度运动平台运动轨迹等工艺由系统自动生成。其中激光参数由固有频率差值和激光与谐振子材料的作用机理共同决定,三自由度运动平台加工时的运动轨迹由修形形状决定。确定好工艺后,再通过控制激光设备光路中的衰减片、激光器、偏振片、光闸来实现相应的激光参数,控制三自由度运动平台实现所规划的加工轨迹,这样即可实现自动化加工。Optionally, the processing parameters in step (4) include laser energy, repetition frequency, polarization direction, pulse number, etc. of the laser equipment, as well as the motion trajectory of the three-degree-of-freedom motion platform during processing. After the positioning is completed, the laser and the three-degree-of-freedom motion platform can be controlled to realize automatic adjustment, in which the laser parameters and the motion trajectory of the three-degree-of-freedom motion platform are automatically generated by the system. Among them, the laser parameters are determined by the natural frequency difference and the mechanism of action between the laser and the resonator material, and the motion trajectory of the three-degree-of-freedom motion platform during processing is determined by the modified shape. After the process is determined, the corresponding laser parameters are realized by controlling the attenuator, laser, polarizer, and shutter in the optical path of the laser equipment, and the three-degree-of-freedom motion platform is controlled to realize the planned processing trajectory, so that automatic processing can be realized.

可选的,步骤(4)中,在完成一次修调后自动测量修调后的频率裂解值,并判断是否满足精度要求及是否需要继续修调。如果满足精度要求,则结束该陀螺的修调任务,否则自动进入下一次修调循环,以实现高精度地自动化修调。Optionally, in step (4), after a trimming is completed, the frequency cracking value after trimming is automatically measured, and it is judged whether the accuracy requirement is met and whether further trimming is required. If the accuracy requirement is met, the trimming task of the gyroscope is ended, otherwise, the next trimming cycle is automatically entered, so as to realize automatic trimming with high precision.

通过上述技术方案,可以实现以下有益的技术效果:Through the above technical solution, the following beneficial technical effects can be achieved:

1、可自动切换测量模态,免去了插拔引线的麻烦,避免了多次插拔引线对电路板的损耗及每次插拔电路的不确定因素,提高了测量精度和效率;1. It can automatically switch the measurement mode, avoiding the trouble of plugging and unplugging the lead wire, avoiding the loss of the circuit board caused by multiple plugging and unplugging of the lead wire and the uncertain factors of each plugging and unplugging circuit, and improving the measurement accuracy and efficiency;

2、利用测得的两种工作模态固有频率值,自动判别需要修调的模态及修调方法,提高了判断速度与准确性;2. Utilize the measured natural frequency values of the two working modes to automatically identify the mode that needs to be adjusted and the adjustment method, which improves the judgment speed and accuracy;

3、利用图像处理技术,实现了自动化定位,提高了定位速度与精度;3. Using image processing technology, automatic positioning is realized, and the positioning speed and accuracy are improved;

4、利用激光对修调质量、修调质量对固有频率的影响规律,自动规划修调工艺参数,提高了修调效率。4. Utilize the influence law of laser on trimming quality and trimming quality on natural frequency, automatically plan trimming process parameters, and improve trimming efficiency.

5、结合运动控制和激光参数控制,实现了自动化加工,提高了修调精度和效率;5. Combining motion control and laser parameter control, automatic processing is realized, and the adjustment accuracy and efficiency are improved;

本发明实施例的其它特征和优点将在随后的具体实施方式部分予以详细说明。Other features and advantages of the embodiments of the present invention will be described in detail in the following detailed description.

附图说明Description of drawings

附图是用来提供对本发明实施例的进一步理解,并且构成说明书的一部分,与下面的具体实施方式一起用于解释本发明实施例,但并不构成对本发明实施例的限制。在附图中:The accompanying drawings are used to provide a further understanding of the embodiments of the present invention, and constitute a part of the specification, and are used together with the following specific embodiments to explain the embodiments of the present invention, but do not constitute limitations to the embodiments of the present invention. In the attached picture:

图1是本发明振动陀螺自动化修调方法的流程图;Fig. 1 is the flow chart of vibrating gyroscope automatic adjustment method of the present invention;

图2是本发明中一种振动陀螺自动化修调装置结构示意图;Fig. 2 is a schematic structural view of a vibrating gyro automatic adjustment device in the present invention;

图3是一种振动陀螺压电片布置的原理图;Fig. 3 is a schematic diagram of vibrating gyro piezoelectric sheet arrangement;

图4是本发明中一种振动陀螺顶端打孔修调方法的示意图;Fig. 4 is a schematic diagram of a vibrating gyroscope tip punching and adjusting method in the present invention;

图5是本发明中一种振动陀螺侧壁划槽修调方法的示意图;Fig. 5 is a schematic diagram of a vibrating gyroscope side wall groove modification method in the present invention;

图6(a)为第一相机拍摄示意图;Fig. 6 (a) is a schematic diagram of shooting by the first camera;

图6(b)为第二相机拍摄示意图;Fig. 6 (b) is a schematic diagram of shooting by the second camera;

图6(c)为第三相机拍摄示意图;Figure 6(c) is a schematic diagram of shooting by the third camera;

图6(d)为定位原理示意图;Figure 6(d) is a schematic diagram of the positioning principle;

图7是本发明中一种振动陀螺定位修调模态方位角的处理图像;Fig. 7 is the processing image of a kind of vibrating gyro positioning trimming modal azimuth angle in the present invention;

图8是本发明中一种振动陀螺定位待加工点位置坐标的处理图像;Fig. 8 is a processing image of a vibrating gyroscope positioning position coordinates of a point to be processed in the present invention;

图9是本发明中定位激光聚焦点空间坐标的处理图像。Fig. 9 is a processed image for positioning the spatial coordinates of the laser focus point in the present invention.

图例说明:illustration:

1:Y轴运动平台;2:第一相机;3:X轴运动平台;4:第二相机;5:拍摄工位;6:第三相机;7:旋转平台;8:激光;9:陀螺谐振子;91和95:驱动模态激励压电片;92和96:检测模态检测压电片;93和97:驱动模态检测压电片;94和98:检测模态补偿压电片;10:Z轴运动平台。1: Y-axis motion platform; 2: First camera; 3: X-axis motion platform; 4: Second camera; 5: Shooting station; 6: Third camera; 7: Rotary platform; 8: Laser; 9: Gyro Resonator; 91 and 95: driving mode excitation piezoelectric film; 92 and 96: detecting mode detecting piezoelectric film; 93 and 97: driving mode detecting piezoelectric film; 94 and 98: detecting mode compensating piezoelectric film ;10: Z-axis motion platform.

具体实施方式Detailed ways

以下结合附图对本发明实施例的具体实施方式进行详细说明。应当理解的是,此处所描述的具体实施方式仅用于说明和解释本发明实施例,并不用于限制本发明实施例。The specific implementation manners of the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation manners described here are only used to illustrate and explain the embodiments of the present invention, and are not intended to limit the embodiments of the present invention.

本发明的一个实施例中,通过测量频率来自动确定要修调的位置和质量,自动化定位技术将需要修调的位置移动至激光聚焦点处,激光参数控制和运动控制实现了自动修调,自动工艺设计为自动修调提供了修调工艺。具体的振动陀螺为圆柱壳体振动陀螺,修调设备为激光设备。In one embodiment of the present invention, the position and quality to be adjusted are automatically determined by measuring the frequency, and the automatic positioning technology moves the position to be adjusted to the laser focus point, and the laser parameter control and motion control realize automatic adjustment. Automatic process design provides a trimming process for automatic trimming. Specifically, the vibrating gyroscope is a cylindrical shell vibrating gyroscope, and the adjustment device is a laser device.

如图1所示,具体实施时一般按以下顺序:As shown in Figure 1, the specific implementation generally follows the following sequence:

1、自动化测量固有频率1. Automatic measurement of natural frequency

在进行修调之前,需要测量陀螺的固有频率并计算频率裂解值,以指导后续修调工作。如图3所示,一种振动陀螺的八片(四对)压电片均匀布置在谐振子底部,压电片的一面与谐振子杯底由导电胶粘接在一起通过图中的地线共地,另一面引出导线至相应电极用于输入或输出信号。其中驱动模态的激励压电片用于激励陀螺至驱动模态振动,并由驱动模态检测压电片测量该模态下的振动频率。检测模态检测压电片用于陀螺工作时,在有角速度输入的情况下,测量该模态的振动频率及幅值。而检测模态补偿压电片用于补偿检测模态检测压电片的测量信号。通过计算机发出指令开始测量固有频率,首先由驱动模态的激励压电片输入激励电压,激励陀螺谐振子至谐振状态,并测得固有频率为5006.874Hz。利用电磁继电器完成电路的切换,将检测模态的补偿压电片作为激励压电片接入激励电压,从检测模态的检测压电片测量固有频率为5008.014Hz,进而算出频率裂解值为1.140Hz。此时可根据对频率裂解的精度要求,判断是否满足条件。如果满足要求则无需修调,如果未满足要求则需要继续修调。此例子中,所设定的精度要求为0.2Hz。Before trimming, it is necessary to measure the natural frequency of the gyroscope and calculate the frequency split value to guide the subsequent trimming work. As shown in Figure 3, eight pieces (four pairs) of piezoelectric sheets of a vibrating gyroscope are evenly arranged at the bottom of the resonator, and one side of the piezoelectric sheet is bonded to the bottom of the resonator cup by conductive glue through the ground wire in the figure Common ground, the other side leads the wire to the corresponding electrode for input or output signal. The excitation piezoelectric sheet in the driving mode is used to excite the gyroscope to vibrate in the driving mode, and the vibration frequency in this mode is measured by the driving mode detection piezoelectric sheet. When the detection mode detection piezoelectric film is used for the gyroscope, under the condition of angular velocity input, the vibration frequency and amplitude of the mode are measured. The detection mode compensation piezoelectric film is used to compensate the measurement signal of the detection mode detection piezoelectric film. The measurement of the natural frequency is started by issuing instructions from the computer. First, the excitation voltage is input from the excitation piezoelectric sheet in the driving mode to excite the gyro resonator to the resonance state, and the measured natural frequency is 5006.874Hz. The electromagnetic relay is used to complete the switching of the circuit, and the compensation piezoelectric sheet of the detection mode is connected to the excitation voltage as the excitation piezoelectric sheet. The natural frequency measured from the detection piezoelectric sheet of the detection mode is 5008.014Hz, and then the frequency cracking value is calculated as 1.140 Hz. At this time, it can be judged whether the condition is satisfied according to the precision requirements for frequency cracking. If the requirements are met, no adjustment is required; if the requirements are not met, further adjustments are required. In this example, the set accuracy requirement is 0.2Hz.

2、自动判断修调模态及修调方法2. Automatically judge the adjustment mode and adjustment method

通过比较驱动和检测模态的固有频率,发现检测模态的固有频率高于驱动模态1.140Hz。如图4、图5所示,由于划槽修调会大幅降低陀螺谐振子刚度,所以更适用于大频率裂解值,因而此例中系统自动判别出使用打孔修调。打孔修调会缓慢地提高修调位置所在模态的固有频率,所以系统自动选择出驱动模态(固有频率低的模态)作为待修调模态。By comparing the natural frequencies of the driving and detection modes, it is found that the natural frequency of the detection mode is 1.140Hz higher than that of the driving mode. As shown in Figure 4 and Figure 5, since the slit trimming will greatly reduce the stiffness of the gyro resonator, it is more suitable for large frequency cracking values. Therefore, in this example, the system automatically determines the use of punching trimming. Punching trimming will slowly increase the natural frequency of the mode where the trimming position is located, so the system automatically selects the driving mode (mode with low natural frequency) as the mode to be trimmed.

3、自动定位3. Automatic positioning

通过处理第三相机6拍摄的位于拍摄工位5陀螺图像识别模态定位标识(图7中的直线),获得定位标识的安装角度。因为定位标识安装在驱动模态的方位角上,所以对应就是驱动模态所处角度。因加工位置设定在90度处,所以需要将定位标识转动到90度处,使得驱动模态位于加工位置。比如说通过图像处理,获得定位标识的倾斜角为85度,则可判断出谐振子与定位标识要逆时针旋转5度。于是计算机向旋转平台7发出指令,控制其旋转5度。在旋转结束后,还会再次处理图片,判断是否达到90度(允许有0.1度的误差),如果没有达到则继续运动,以实现高精度定位。The installation angle of the positioning mark is obtained by processing the gyroscope image captured by the third camera 6 and located at the shooting station 5 to identify the modal positioning mark (the straight line in FIG. 7 ). Because the positioning mark is installed on the azimuth angle of the driving mode, the corresponding angle is the position of the driving mode. Since the processing position is set at 90 degrees, it is necessary to rotate the positioning mark to 90 degrees so that the driving mode is at the processing position. For example, if the inclination angle of the positioning mark is 85 degrees obtained through image processing, it can be judged that the resonant oscillator and the positioning mark should be rotated counterclockwise by 5 degrees. Then the computer sends instructions to the rotating platform 7 to control it to rotate 5 degrees. After the rotation is over, the image will be processed again to determine whether it reaches 90 degrees (with an error of 0.1 degrees allowed), and if not, continue to move to achieve high-precision positioning.

将相应的模态移动到加工方位后,还需要将待修调位置点移动至与激光聚焦点重合。为实现定位,如图2所示,首先需要获取谐振子9待加工点和激光8聚焦点的坐标,谐振子待加工点的位置信息包括谐振子的边线横坐标(由第一相机2拍摄)作为X坐标、轴线横坐标(由第二相机4拍摄)作为Y坐标、顶端线纵坐标(由第一相机2或第二相机4拍摄)作为Z坐标。处理后的图像如图8所示,图中大块黑色区域是处理过的谐振子图像,由于谐振子是旋转对称结构,所以第一相机2和第二相机4所拍摄的图像都是图8所示形状。其中两条竖线是处理得到的谐振子边线,第一相机2中右边竖线的横坐标被当做待加工点的X值,第二相机4中两条竖线的中线横坐标被当做待加工点的Y值。而图像中靠近顶端的第一条横线纵坐标被当做待加工点的Z值,这样就自动确定了待加工点的位置坐标。After moving the corresponding mode to the processing orientation, it is also necessary to move the position to be adjusted to coincide with the laser focus point. In order to realize positioning, as shown in Figure 2, it is first necessary to obtain the coordinates of the point to be processed by the harmonic oscillator 9 and the focal point of the laser 8, and the position information of the point to be processed by the harmonic oscillator includes the sideline abscissa of the harmonic oscillator (taken by the first camera 2) As the X coordinate, the axis abscissa (photographed by the second camera 4) as the Y coordinate, and the vertical coordinate of the top line (photographed by the first camera 2 or the second camera 4) as the Z coordinate. The processed image is shown in Figure 8. The large black area in the figure is the processed image of the harmonic oscillator. Since the harmonic oscillator is a rotationally symmetrical structure, the images taken by the first camera 2 and the second camera 4 are all shown in Figure 8. shape shown. The two vertical lines are the processed harmonic oscillator sidelines, the abscissa of the right vertical line in the first camera 2 is taken as the X value of the point to be processed, and the midline abscissa of the two vertical lines in the second camera 4 is taken as the to-be-processed point The Y value of the point. The ordinate of the first horizontal line near the top in the image is taken as the Z value of the point to be processed, so that the position coordinate of the point to be processed is automatically determined.

激光聚焦点的位置坐标同样从第一相机2和第二相机4所拍摄的图像中获取,所拍摄的图像如图9所示,图中只有中间位置有一个白点,该白点即为激光聚集点。第一相机2和第二相机4拍摄到的图片内容基本一致,不过第一相机2中该白点的横坐标作为聚焦点的X值,第二相机4中白点的横坐标作为聚焦点的Y值,而聚焦点的Z值既可以是第一相机2中白点的纵坐标也可以是第二相机4中的纵坐标,但应与待加工点的Z值取自同一相机所拍摄的图片。于是通过处理第一相机2和第二相机4的图像,聚焦点的坐标值也自动获取到了。The position coordinates of the laser focus point are also obtained from the images taken by the first camera 2 and the second camera 4. The images taken are shown in Figure 9, in which there is only a white point in the middle of the figure, which is the laser gathering point. The contents of the pictures taken by the first camera 2 and the second camera 4 are basically the same, but the abscissa of the white point in the first camera 2 is used as the X value of the focus point, and the abscissa of the white point in the second camera 4 is used as the X value of the focus point. Y value, and the Z value of the focus point can be the ordinate of the white point in the first camera 2 or the ordinate of the second camera 4, but it should be taken from the same camera as the Z value of the point to be processed. picture. Therefore, by processing the images of the first camera 2 and the second camera 4, the coordinate value of the focus point is also automatically obtained.

最后通过计算待加工点与聚焦点的距离,控制三维运动平台进行定位。具体的,通过图像处理获得待加工点的坐标为(2439,1306,600)(注:坐标的单位为像素),而激光聚焦点的坐标为(2461,1295,507)。将激光聚焦点的坐标减去待加工点的坐标得到(22,-11,-93),于是计算机利用该差值数据控制运动平台进行运动,使得X轴运动平台3沿正向移动22个像素值所对应的实际距离,Y轴运动平台1沿负向移动11个像素所对应的实际距离,Z轴运动平台10沿负向移动93个像素所对应的实际距离。完成移动后,会再次判断待加工点与激光聚焦点的位置坐标差值是否满足精度要求(定位精度小于50微米)。自动完成定位并达到相应的定位精度后,即可进行自动加工。Finally, by calculating the distance between the point to be processed and the focus point, the three-dimensional motion platform is controlled for positioning. Specifically, the coordinates of the point to be processed are (2439, 1306, 600) obtained through image processing (note: the coordinate unit is pixel), and the coordinates of the laser focus point are (2461, 1295, 507). Subtract the coordinates of the laser focus point from the coordinates of the point to be processed to get (22, -11, -93), then the computer uses the difference data to control the motion platform to move, so that the X-axis motion platform 3 moves 22 pixels in the forward direction The actual distance corresponding to the value, the actual distance corresponding to the Y-axis motion platform 1 moving 11 pixels in the negative direction, and the actual distance corresponding to the Z-axis motion platform 10 moving 93 pixels in the negative direction. After the movement is completed, it will judge again whether the position coordinate difference between the point to be processed and the laser focus point meets the accuracy requirements (positioning accuracy is less than 50 microns). After the positioning is automatically completed and the corresponding positioning accuracy is achieved, automatic processing can be performed.

4、自动加工4. Automatic processing

当激光聚焦点与待加工点重合时,打开激光光闸即可实现加工。但针对不同的频率裂解值,需要实现不同的修调参数。影响修调的三个主要因素是修形位置、修形形状及材料去除量。其中修形位置由自动精确定位保障,修形形状由加工轨迹确定,材料去除量与激光的能量、重复频率、脉冲数等参数有关。为了实现上述自动加工,系统可以自动按照修形形状规划出轨迹,依据材料去除量确定激光参数,并控制硬件执行修调任务。如上所述,需要在谐振子驱动模态上打孔,则需要规划出孔的直径,判断是否需要径向进给。且需规划出所修调四个孔之间距离的行走轨迹,进而控制三维运动平台1、3和10实现相应轨迹加工。而激光参数需要通过研究激光与谐振子材料作用规律来推算,然后通过控制衰减片来改变能量,控制激光器改变其输出脉冲激光的重复频率,控制光闸改变脉冲数,进而完成自动加工。When the laser focus point coincides with the point to be processed, the laser shutter can be opened to realize processing. However, for different frequency cracking values, different trimming parameters need to be implemented. The three main factors affecting trimming are trimming position, trimming shape and material removal amount. The modified position is guaranteed by automatic precise positioning, the modified shape is determined by the processing trajectory, and the amount of material removal is related to parameters such as laser energy, repetition frequency, and pulse number. In order to realize the above-mentioned automatic processing, the system can automatically plan the trajectory according to the modified shape, determine the laser parameters according to the amount of material removal, and control the hardware to perform the modification task. As mentioned above, if a hole needs to be drilled in the drive mode of the resonator, it is necessary to plan the diameter of the hole and determine whether radial feed is required. And it is necessary to plan out the walking trajectory of the adjusted distance between the four holes, and then control the three-dimensional motion platforms 1, 3 and 10 to realize corresponding trajectory processing. The laser parameters need to be calculated by studying the interaction between the laser and the resonator material, and then the energy is changed by controlling the attenuator, the laser is controlled to change the repetition frequency of its output pulse laser, and the optical gate is controlled to change the number of pulses to complete automatic processing.

5、循环修调5. Cycle adjustment

完成一次修调后继续测量两工作模态的固有频率,驱动模态的固有频率变为5006.963Hz,检测模态的固有频率变为5007.720Hz,裂解值为0.757Hz。该频率裂解值仍不满足精度要求(0.2Hz),所以需要进一步修调。修调系统自动重复上述步骤,经过多次循环可以将频率裂解值降低至0.2Hz以下,具体过程如下表所示。After completing a trimming, continue to measure the natural frequencies of the two working modes. The natural frequency of the driving mode becomes 5006.963 Hz, the natural frequency of the detection mode becomes 5007.720 Hz, and the cracking value is 0.757 Hz. The frequency cracking value still does not meet the accuracy requirement (0.2Hz), so it needs to be further adjusted. The trimming system automatically repeats the above steps, and the frequency cracking value can be reduced to below 0.2Hz after several cycles. The specific process is shown in the table below.

以上结合附图详细描述了本发明实施例的可选实施方式,但是,本发明实施例并不限于上述实施方式中的具体细节,在本发明实施例的技术构思范围内,可以对本发明实施例的技术方案进行多种简单变型,这些简单变型均属于本发明实施例的保护范围。The optional implementations of the embodiments of the present invention have been described in detail above in conjunction with the accompanying drawings. However, the embodiments of the present invention are not limited to the specific details in the above-mentioned embodiments. Within the scope of the technical concept of the embodiments of the present invention, the embodiments of the present invention can be Various simple modifications are made to the technical solution, and these simple modifications all belong to the protection scope of the embodiments of the present invention.

另外需要说明的是,在上述具体实施方式中所描述的各个具体技术特征,在不矛盾的情况下,可以通过任何合适的方式进行组合。为了避免不必要的重复,本发明实施例对各种可能的组合方式不再另行说明。In addition, it should be noted that the various specific technical features described in the above specific implementation manners may be combined in any suitable manner if there is no contradiction. In order to avoid unnecessary repetition, the embodiments of the present invention will not further describe various possible combinations.

此外,本发明实施例的各种不同的实施方式之间也可以进行任意组合,只要其不违背本发明实施例的思想,其同样应当视为本发明实施例所公开的内容。In addition, various implementations of the embodiments of the present invention can also be combined arbitrarily, as long as they do not violate the idea of the embodiments of the present invention, they should also be regarded as the content disclosed in the embodiments of the present invention.

Claims (10)

1. a kind of oscillation gyro automates method for repairing and regulating, which is characterized in that include the following steps:
(1) intrinsic frequency of the harmonic oscillator of automatic measurement oscillation gyro under two kinds of operation modes, and according to the intrinsic frequency Calculate frequency cracking value;
(2) if the frequency cracking value is unsatisfactory for preset required precision, by comparing the big of two intrinsic frequencies It is small to trim mode and corresponding correction method to automatically determine;
(3) by being automatically positioned the associated physical location of the gyro and the physical location of process equipment correction of the flank shape mechanism to control Gyration is stated to expected Working position;
(4) processing technology is cooked up automatically according to the relationship between the quality and working process parameter of required removal, and according to institute The processing technology planned carries out automation to the gyro and trims, and completion trims rear return to step (1).
2. oscillation gyro according to claim 1 automates method for repairing and regulating, which is characterized in that in the step (1), pass through Mode-switch circuit realizes the automatic switchover of two kinds of operation modes, uninterruptedly quickly to measure under two kinds of operation modes Intrinsic frequency.
3. oscillation gyro according to claim 1 automates method for repairing and regulating, which is characterized in that in the step (2), correction of the flank shape Method refers to being trimmed using the correction method of harmonic oscillator wall of cup top punching in the low mode of intrinsic frequency, or intrinsic It is trimmed using the correction method of side wall paddle-tumble in the high mode of frequency.
4. oscillation gyro according to claim 1 automates method for repairing and regulating, which is characterized in that in the step (3), gyro Associated physical location include to be processed physical location of harmonic oscillator and harmonic oscillator operation mode physical location.
5. oscillation gyro according to claim 4 automates method for repairing and regulating, which is characterized in that the harmonic oscillator point to be processed Physical location is to be processed position coordinates of harmonic oscillator;The physical location of the harmonic oscillator operation mode is harmonic oscillator Working mould State azimuth;
It is sat by the image of the sideline of the acquisition harmonic oscillator, axis and top line to obtain to be processed position of the harmonic oscillator Mark;
Harmonic oscillator operation mode azimuth is obtained by acquiring the image of mode positioning mark.
6. oscillation gyro according to claim 5 automates method for repairing and regulating, which is characterized in that in the step (3), processing Equipment is laser or ion beam apparatus, and the corresponding correction of the flank shape mechanism is laser or ion beam focusing point.
7. oscillation gyro according to claim 6 automates method for repairing and regulating, which is characterized in that process equipment correction of the flank shape mechanism Physical location refers to space coordinate and the energy field distribution of laser or ion beam focusing point, is obtained by acquiring the image of focus point Take space coordinate and the energy field distribution of the focus point.
8. oscillation gyro according to claim 7 automates method for repairing and regulating, which is characterized in that in the step (3), gyro It is driven jointly to expected Working position by a rotating platform and a Three-degree-of-freedom motion platform;
The wherein described rotating platform drives the gyro rotation, and the mode on the gyro is made to position mark rotation to expection Working position;
The Three-degree-of-freedom motion platform drives the gyro in X axis, Y-axis and Z-motion, makes waiting for for the harmonic oscillator Processing stand position coordinates are overlapped with the laser focus point space coordinate.
9. automating method for repairing and regulating according to claim 6-8 any one of them gyros, which is characterized in that described in step (4) Working process parameter includes but not limited to laser energy, repetition rate, polarization direction and the umber of pulse of the laser equipment, and Movement locus when the Three-degree-of-freedom motion platform processing.
10. gyro according to claim 9 automates method for repairing and regulating, which is characterized in that according to the quality meter of required removal Laser energy, repetition rate, polarization direction and umber of pulse are calculated, and cooks up machining locus;
By control attenuator, laser, polarizing film and optical gate in the laser equipment light path regulate and control the laser energy, Repetition rate, polarization direction and umber of pulse coordinate the control of the Three-degree-of-freedom motion platform, realize that laser parameter and movement are flat The coordination of platform reaches trims effect automatically.
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