CN108603760A - It include the system for hanging movable block of the device for coupling movable block with the linearity of optimization - Google Patents
It include the system for hanging movable block of the device for coupling movable block with the linearity of optimization Download PDFInfo
- Publication number
- CN108603760A CN108603760A CN201680075944.2A CN201680075944A CN108603760A CN 108603760 A CN108603760 A CN 108603760A CN 201680075944 A CN201680075944 A CN 201680075944A CN 108603760 A CN108603760 A CN 108603760A
- Authority
- CN
- China
- Prior art keywords
- plane
- connecting element
- movable block
- interface unit
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5769—Manufacturing; Mounting; Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
- G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Abstract
The present invention proposes a kind of system (10) for hanging the movable block (12) of such as inertial angle rate sensor, the system includes coupling device (32A), the coupling device includes the first coupling element and the second coupling element (34A, 36A), first coupling element and the second coupling element be connected to each other by connection unit (38A) and in mobility plane (P) it is flexible deformation with another element (such as support element (20) or another movable block) of the movable block (12) and the system for being connected to the second coupling element that respectively allow for being connected to the first coupling element relative to link block (38A) respectively along two different direction (Y, X it) is moved.At least one of coupling element is by two springs (40；42) it is formed, connection unit is respectively connected respectively to movable block or another element of system by the two springs.Coupling device is therefore with improved linear characteristic.
Description
Technical field
The present invention relates to the field for including the system of moveable block in the planes, the block such as have vibration it is humorous
Shake the inertial angle sensor of device.This sensor (being referred to as " discrete block " sensor) includes at least one movable block
(also referred to as " exciting block ", " test subject " or " test block "), is formed in the movement of the frame relative to sensor
Plane in the resonator that vibrates, the movement of resonator can be analyzed the information about the swing offset of frame with offer.
These sensors can be run under " free gyroscope " and/or " gyrometer " pattern, the size of these sensors
It can change." gyrometer " pattern be based under the action of the swing offset of sensor frame measurement be applied to movable block
The Coriolis force (Coriolis force) of body, and " free gyroscope " pattern is the work based on mobile block in this swing offset
The angle drift of orientation of oscillation under.
Particularly, these sensors are recognized, because they can minimize and therefore especially with micro electronmechanical sensing
The form of device (micro-electromechanical sensors, MEMS) uses.
The present disclosure additionally applies for the other kinds of systems that for example can be used for being formed actuator, switch or resonator.
Background technology
In the inertial angle sensor with vibration resonance device, being somebody's turn to do (or each) resonator is suspended on by elastic device
The form of movable block on support element so that movable block can planar vibrate, which is hereinafter claimed
For " mobility plane ".
Many such sensors are developed.In some in these sensors, especially it is being designed
For can be in the sensor of " gyroscope " mode operation, in other words, in the biography that can be used directly to measurement angle position
In sensor, movable block has in mobility plane there are two translation freedoms, and in the same plane it is used about it
One rotary freedom at property center.Then by acting on the actuating in both direction (the two directions are generally orthogonal to one another)
Device maintains the oscillation of movable block.In addition, the swing offset of sensor frame causes movable block in orientation of oscillation
Angle offset.Therefore, which allows for indistinguishably being shifted in any direction in mobility plane.
For this purpose, the suspension arrangement of movable block must be mutually compatible with two degree of freedom of movable block.
In order to avoid generating the failure for the operation that may interfere with sensor, also it is desirable to make the oscillation of maintenance movable block
Required power is linear as the function of amplitude.
Second nonlinear degree can cause to cause prestressed non-zero mean force in sensor structure, and third-order non-linear degree
It can lead to isochronism failure, so as to cause the mean rigidity depending on amplitude, so as to cause frequency of oscillation as oscillation amplitude
The variation of function.
Same consideration is suitable for being used to the respective displacement to multiple movable blocks present in some sensors
Carry out the elastic connecting device of resilient connection.
In the rest part of this specification, statement " attachment device ", " interface unit " and " connecting element " is indistinguishably
Indicate suspension arrangement, suspension device or hanging element and elastic connecting device, resilient connection device or flexible linking element.It is right
It is clear that the concept of suspension and resilient connection is related to being directly connected between two elements for technical staff.
Invention content
Specifically, the purpose of the present invention is the system with attachment device, attachment device tool there are two degree of freedom and
At least with improved linear characteristic and preferably also with improved isotropic characteristics.
In order to realize this point, the invention discloses a kind of system, which includes at least one movable block and can
Mobile block is connected to the attachment device of another element of system, which enables movable block relative to system
Another element moved in the plane for being referred to as " mobility plane ".
According to the present invention, attachment device includes the first interface unit, and first interface unit is removable including being connected to
First connecting element of block, be connected to system another element the second connecting element and by the first connecting element
It is connected to the link block of the second connecting element.
In addition, when movable block is in resting position, the first connecting element and the second connecting element are respectively about
One plane and the second plane are placed in the middle, the first plane and the second plane is orthogonal with mobility plane and the first plane and the second plane
Intersection.
In addition, the flexible deformation in mobility plane of the first connecting element, so that movable block can be along with
The orthogonal first direction of one plane relative shift since resting position relative to link block, and the second connecting element is in movement
Flexible deformation in mild-natured face, so that another element of system can be relative to link block along orthogonal with the second plane
Second direction relative shift since resting position.
In addition, at least one of the first connecting element and the second connecting element are formed by least two springs, this is at least
There is each of two springs first end and the second end, first end to be connected to movable block and system respectively
Another element, the second end are connected to link block.
The construction of first interface unit assigns its good linear characteristic, this will become apparent from the following discussion.Therefore,
The present invention can be to solve the above problem.
It will be clear to someone skilled in the art that flexural deformation of first connecting element in mobility plane causes to move
The displacement of block, for single order, which occurs only along above-mentioned first direction.Similarly, the second connecting element exists
Flexural deformation in mobility plane causes the displacement of movable block, and for single order, the displacement is only along above-mentioned
Two directions occur.
It should be understood that " mobile block relative displacement " relative to link block refers to mobile block in fixed coordinate system
The interior possibility relative to link block movement.Similarly, it should be appreciated that " another element of system is relative to link block
Relative displacement " refers to the possibility that another element of system moves in fixed coordinate system relative to link block.Particularly, the art
Language will not interfere another element of system to be fixed to the frame of system, and accordingly, it is considered to arrive the frame relative to system
Fixed coordinate system is that link block is moved relative to another element of system.
" resting position " refers to the settling position of movable block, is preferably the first connecting element and the second connection member
Part is not subjected to the position of any bending stress in mobility plane.
Preferably, another connecting element is also formed by least two springs, and the first end of spring is connected to respectively is
Another element and movable block of system, and the second end of spring is connected to link block.
Therefore, in a preferred embodiment of the invention, the first connecting element is made of at least two springs, this at least two
Spring can the flexural deformation in mobility plane, and respectively have be connected to movable block first end and connected
It is connected to the second end of link block；And the second connecting element is made of at least two springs, which can be
Flexural deformation in mobility plane, and respectively there is the first end of another element for the system that is connected to and be connected
To the second end of link block.
Therefore connecting element can have best linear characteristic.
Preferably, the spring of the first connecting element is mutually similar.Preferably, the spring of the second connecting element also class each other
Seemingly.
In the first preferred embodiment of the present invention, at least one of the first connecting element and the second connecting element
Each of spring is in the form of straight piece or beam.
The quantity of spring in each in first connecting element and the second connecting element can be equal to two.
As modification, the quantity of the spring at least one of the first connecting element and the second connecting element can be more than
Or it is equal to three.
The increase of the quantity of spring can increase the rigidity of interface unit.
In the second preferred embodiment of the present invention, at least one of the first connecting element and the second connecting element are even
It connects and extends between two corresponding extensions of block, and the quantity of the spring in the connecting element is two, and the two
Spring is each in the form of the piece or beam folded, and the first end of spring is connected to the described of movable block or system
Another element, and the second end of spring is connected to one in the extension of link block.
In this case, two above-mentioned springs are preferably mutually symmetrical about the plane orthogonal with mobility plane.
In the third preferred embodiment of the present invention, at least one of the first connecting element and the second connecting element
The quantity of spring is two, and spring is in the corresponding of the corresponding extension of movable block or another element of system
Extension every side on extend, and each of these springs are in the form of the piece or beam folded the of spring
One end is connected to the extension of the extension of mobile block or another element of system, and the second end of spring
It is connected to link block.
In this case similarly, two springs are preferably mutually symmetrical about the plane orthogonal with mobility plane.
Therefore, the use of the second embodiment of the present invention and 3rd embodiment based on so-called folded spring.
Usually, the angle between first direction and second direction is preferably 90 degree.
Therefore, when movable block is in resting position, between the first plane and the second plane of the first interface unit
Angle be preferably 90 degree.
In addition, the first connecting element and the second connecting element of the first interface unit are preferably pertained to mobility plane just
The third plane of friendship is mutually symmetrical.
Advantageously, moreover, movable block has the first symmetrical plane and the second symmetrical plane, the first symmetrical plane and the
Two symmetrical planes are orthogonal with mobility plane and orthogonal with first direction and second direction respectively.
More generally, in the case where movable block is rotated by 90 ° about its center of inertia, the shape of movable block
It is usually constant.
Moreover it is preferred that attachment device includes the second interface unit, which is similar to the first interface unit
And it is arranged such that the first connecting element of the second interface unit with parallel with the second connecting element of the first interface unit
Mode extend, and make the first interface unit and the second interface unit relative to the fourth plane orthogonal with mobility plane
It is mutually symmetrical.
Preferably, fourth plane is also orthogonal with third plane.
Moreover it is preferred that movable block is symmetrical relative to fourth plane.
Moreover it is preferred that attachment device includes third interface unit, which is similar to the first interface unit
And the component of the first interface unit, the second interface unit and third interface unit is made to be formed in the inertia about movable block
Center the first pattern constant in the case of being rotated by 90 °.
Therefore, attachment device has the symmetric property for assigning its best isotropic behavior, this will be from being described below
It becomes more apparent upon.In addition, this allows attachment device to eliminate due at the position on mobile block rather than in its center of inertia
Locate torque effect caused by the power applied.
Moreover, advantageously, cross section of the movable block in mobility plane is square, has and is located at described the
Diagonal line in four planes and two adjacent sides for being respectively parallel to the first symmetrical plane and the second symmetrical plane.
As a kind of modification, the cross section of movable block can be different type, such as round or depend on system
The arbitrary shape of application type to be used.
In various advantageous applications, which can also include actuation means, to be moved in mobility plane
Apply oscillation on block.
In a particularly advantageous application, which is inertial angle sensor, therefore the system further includes detection dress
It sets to measure displacement of the movable block in mobility plane.
Preferably, which includes the support element for another element to form the system, and the first actuation means quilt
Fixed to the support element.
The support element can be the frame of system, or as modification, and support element can be installed into relative to system
Frame moves freely through.
As a kind of modification or additionally, the system may include to be formed the system another element it is another removable
Motion block body.
In this case, actuation means can be inserted between two movable blocks, and/or be likely located at support
Between each of part and movable block.
Advantageously, moreover, which is configured to apply opposite power to two movable blocks.
Therefore, system can be run with particularly good balance mode.The balance of system, especially when system is inertia angle
When spending sensor, the precision and stability of this sensor can be improved for a long time.
Description of the drawings
After reading the following description provided as non-limiting example with reference to attached drawing, the present invention will be by more preferable geographical
Solution, and other details, advantages and features will be apparent, in the accompanying drawings：
- Fig. 1 is the partially schematic vertical view of inertial angle sensor according to the first advantageous embodiment of the invention；
- Figure 1A is the view of the magnification ratio of the details 1A in Fig. 1；
- Fig. 2 is the schematic diagram of the magnification ratio for the interface unit for belonging to the sensor in Fig. 1；
- Fig. 3 A to Fig. 3 C are analogous to the view of Fig. 2, show the other kinds of company for not constituting the part of the present invention
Device is connect, and these interface units are only used for the purpose explained；
Fig. 4 to fig. 6 is analogous to the view of Fig. 2, shows the connector of system according to other embodiments of the invention
Part.
In all these attached drawings, identical reference numeral can indicate same or analogous element.
Specific implementation mode
Fig. 1 shows some components of system 10, such as forms inertia angle according to the first advantageous embodiment of the invention
Spend the component of sensor.Specifically, the figure illustrates a movable block 12, another movable block 14, by removable motion block
Body 12, each of 14 be hanging to the suspension arrangement 16,18 of support element 20 respectively and make two movable blocks 12 and 14 that
The elastic connecting device 22 of this connection.
Shown in inertial angle sensor 10 be MEMS type sensor, it should be noted that the present invention be suitable for all sizes
Sensor, and be applicable more generally to other kinds of system.
Support element 20 extends below the plane of Fig. 1 so that is only shown in the form of hatching fixed to the support element
The fixed pad of 20 different elements.
In the term used in the following claims, suspension arrangement 16,18 and the formation of elastic connecting device 22 will be removable
Motion block body 12, each of 14 is connected to the example of " attachment device " of another element of the system.Suspension arrangement 16,18 will move
Motion block body 12,14 is connected respectively to support element 20, and mobile block 12, each of 14 is connected to separately by elastic connecting device 22
One movement block 14,12.
In general, there are two translate freely for tool in the plane of Fig. 1 indicated by reference numeral " P " for attachment device 16,18,22
Degree and a rotary freedom.Plane P is hereinafter referred to as " mobility plane ", because attachment device 16,18,22 can
So that movable block 12,14 is moved in the plane and movable block is prevented to be moved to except the plane.As will below
In become more fully apparent ground, due to the composition of above-mentioned attachment device, this displacement of the movable block in mobility plane
It is considerably restricted.
In the present specification, the orthogonal coordinate system for defining X, Y and Z-direction, in the orthogonal coordinate system, X-direction and the side Y
To belonging to mobility plane P.
System 10 further includes actuation means 24,26, on two mobile blocks 12,14 respectively in mobility plane P
Apply oscillation and detection device 28,30, with measure displacement of each mobile block 12,14 in same plane P and with
Per se known manner derives rotation angle or speed of the support element 20 relative to inertial coodinate system using the measured value.Actuating
Device 24,26 and detection device 28,30 can be for example made of multipair finger-fork type (interdigitised) static comb.Shown
Example in, each pair of finger-fork type static comb belongs to actuation means 24,26 and also belongs to detection device 28,30.Each pair of finger-fork type electrostatic
Comb alternating action under actuation modes and detector pattern, is alternately with the frequency of oscillation higher than movable block 12,14
Frequency occur.As a kind of modification, actuation means 24,26 and detection device 28,30 can be different.
In the example shown, actuation means 24,26 are acted on Y-direction along the X direction, and 28,30 pairs of detection device
Movable block is very sensitive along the displacement of X and Y-direction.
Suspension arrangement 16 includes the first interface unit 32A, which includes the first connecting element 34A, second
The connecting element 36A and link block 38A that the first connecting element 34A is connected to the second connecting element 36A.
As shown in Fig. 2, the first connecting element 34A by can in mobility plane P flexural deformation two 40 structures of spring
At, and the second connecting element 36A in mobility plane P by two springs 42 of flexural deformation can equally constitute.
It, within the scope of the invention, only can be by more there are one connecting element in connecting element 34A and 36A as modification
A spring is formed.
In the first embodiment of the present invention, spring 40 and 42 is the form of flat spring or beam.Therefore, spring 40,42
Length is their sizes along X-axis and Y-axis respectively, and the thickness of spring 40,42 is their sizes along Y-axis and X-axis respectively,
And their width is their sizes along Z axis, and Z axis corresponds to the thickness of system 10 or the direction of depth.
First interface unit 32A shown in Fig. 2 forms a part for the suspension arrangement 16 of movable block 12 (Fig. 1).Cause
This, each of spring 40 of the first connecting element 34A has the first end 44 for being connected to movable block 12 and is connected to
The second end 46 of link block 38A, and each of spring 42 of the second connecting element 36A has be connected to support element 20 the
One end 48 and the second end 50 for being connected to link block 38A.
Orientation in each of connecting element 34A and 36A enables the flexural deformation of the first connecting element 34A to make removable
Motion block body 12 relative to link block 38A along a first direction (i.e. Y-direction) from when the first connecting element 34A remains static
Position at mobile block 12 is shifted (in other words, without flexural deformation), and the bending of the second connecting element 36A
Deformation can make link block 38A be in quiet from the second connecting element 36A along second direction (i.e. X-direction) relative to support element 20
Only position movement when state.It will be understood by those skilled in the art that for the first sequence, mobile block 12 is in the first connecting element
It moves only along above-mentioned first direction under the action of the flexural deformation of 34A, and only becomes in the bending of the second connecting element 36A
It is moved only along above-mentioned second direction under the action of shape.
Particularly, when mobile block 12 is in resting position, (in the resting position, as illustrated in fig. 1, spring 40,42 is simultaneously
Non- load flex) when, the first connecting element 34A about the first plane P1 (Figure 1A and Fig. 2) between two parties, and the second connecting element 36A
Placed in the middle about the second plane P2, plane P1 and P2 is orthogonal with mobility plane P and plane P1 and P2 intersect.Implement shown in
In example, plane P1 and P2 is advantageously orthogonal.
In addition, link block 38A has orthogonal two faces 39A, 39B, and the first connecting element 34A and second connects
It meets element 36A and is connected respectively to the two faces.If the thickness of link block 38A along the Z direction is especially small, above-mentioned two faces
It is considered the edge of link block.
Therefore, the respective the second end 46 of two springs 40 of the first connecting element 34A is connected in two faces
First face 39A, and the respective the second end 50 of two springs 42 of the second connecting element 36A is connected to the second connection member
Second face 39B in two faces of part.
In the illustrated example shown in fig. 2, link block 38A is into the element of angular rack form.The shape of link block 38A is obvious
Can be different, and without departing from the scope of the present invention, such as it can be square, rectangle or even triangle.In addition, hole can
To pass through link block 38A along the Z direction, to reduce the quality of the link block.In the case of MEMS type system, link block 38A
It can be especially made of the joint portion with additional thickness of the end 46,50 of spring, or there is suitable poplar by deposition
The material of family name's modulus connects the end.
Therefore, usually, it includes two companies being connected to each other by link block 38A that the first interface unit 32A, which can have,
Connect the specific characteristic of element 34A, 36A." link block " refer in mobility plane P have than connecting element 34A, 36A it is curved
Any element of the bending stiffness of stiffness bigger.In fact, it is preferable that compared with the flexibility of connecting element 34A, 36A, move
The flexibility for moving the link block in mild-natured face P is negligible.
It should be noted that link block 38A is only connected to movable block 12 and described by connecting element 34A, 36A
The other elements (in other words, being connected to support element 20 in the case of the first interface unit 32A) of system.Therefore, the link block
38A itself can be moved after the flexural deformation of connecting element 34A, 36A in mobility plane P.
(in other words, link block 38A is connected to same two (or more) springs with parallel arrangement by each spring
Element) construction can limit link block 38A in the first connecting element 34A or the second connecting element 36A in mobility plane
In bending load under the action of in the same plane moving in rotation trend, which is by first end 44
With 48 in one and/or the second end 46,50 in a upper applied force and generate.
Therefore, regardless of being applied to the direction of the power of interface unit 32A, link block 38A is kept in mobility plane P
The orientation of approximately constant, as long as this power only generates appropriate amplitude shift, this is especially in sensor with " free gyroscope " pattern
Or when " gyrometer " mode operation for the case where being vibrated caused by actuation means 24,26.
As will become more clear hereinafter, suspension arrangement 16 further includes the second interface unit 32B and third connector
Part 32C, suspension arrangement 18 includes the 4th interface unit 32D, and elastic connecting device 22 includes the 5th interface unit 32E.This
A little device 32B, 32C, 32D, 32E are similar to the first interface unit 32A, and therefore each device is attached including being respectively designated
The first connecting element of icon note 34B, 34C, 34D, 34E are respectively designated the second of reference numeral 36B, 36C, 36D, 36E
Connecting element and the link block for being respectively designated reference numeral 38B, 38C, 38D, 38E.
Obviously, the second interface unit 32B and third interface unit 32C is connected in a manner of identical with the first interface unit 32A
It is connected to mobile block 12 and support element 20.The 4th interface unit about the suspension arrangement 18 for forming another movable block 14
The first end 44 of 32D, each spring 40 of the first connecting element 34D are connected to the movable block 14.Finally, with regard to shape
At the 5th interface unit 32E of elastic connecting device 22, the first end 44 of each spring 40 of the first connecting element 34E is connected
It is connected to movable block 12, and the first end 48 of each spring 42 of the second connecting element 36E is connected to another move
Block 14.
Throughout the specification, come with reference to the first interface unit 32A common to interface unit 32A, 32B, 32C, 32D, 32E
Characteristic be described.
After considering to show Fig. 3 A to Fig. 3 C (part for not constituting the present invention) of other types of interface unit,
The advantages of construction of interface unit according to the present invention, will be better understood when.
Fig. 3 A show console beam 51, which is embedded at one (reference numeral B) in its end,
And its other end A can be moved along X-axis.Therefore, because end B is fixed, so if along Y-axis zero shift
It is applied on end A and B, then the length for the beam that end A causes to produce along Y-axis power along the displacement of X-axis increases.This is in end
The strong nonlinearity degree of power (power is as end A along the function of the displacement of X-axis) is generated at A along X-axis.The analysis can be with
Vibration rope model be compared, and vibrate rope rigidity therefore and intrinsic frequency change as the function of axial tensile force.
If end B is allowed to be shifted along Y-axis, become zero along the power of the axis.In this case, along X-axis at A
The nonlinearity of power greatly reduced as the function of the displacement of A so that it is all it is remaining be pure geometrical non-linearity degree.
The reason of here it is usually used uniaxial spring being folded spring, principle is shown in figure 3b.This is illustrated
Two flat springs 52 and 54 (it is considered two beams in plane), they by their an end C each other
Connection, and each end in their other two end is made to separate.The two springs are typically two of single spring
Part, in this case, end C are obtained by by spring folding, therefore the entitled folding of such spring
Spring.In the example of Fig. 3 B, folded spring is single-shaft variants.
End C can be moved freely along Y-axis, and end A is still restricted to move along X-axis, and end B along
Two axis X and Y are kept fixed.Therefore, it is zero along the power of Y-axis in two springs or beam 52 and 54, along X-axis at A
Power only has pure geometrical non-linearity degree, and any of the function as the displacement along X-axis at the A of end may be not present and pre- answer
Power.Different from simple beam, therefore folded spring can significantly reduce third-order non-linear degree (also referred to as " cube non-thread
Property degree ").
But this principle cannot be directly extended to the suspension for having there are two axis.
Fig. 3 C show that tool there are two the suspension of axis, is made of two orthogonal springs or beam 56 and 58.Beam 56
Along the insertion rigidity of Y-axis (caused by another beam 58) since beam 58 along the flexibility of Y-axis is significantly less than Fig. 3 A at the B of end
In cantilever beam rigidity.As a result, nonlinearity related with prestressing force greatly reduces.It is related with prestressing force and fit
For tool shown in Fig. 3 C there are two the nonlinearity of the embedded cantilever beam in nonlinearity and Fig. 3 A of the suspension of axis it
Between ratio and deflection of beam rigidity and its be in the ratio order of magnitude having the same of the rigidity in compressive state.
But for such suspension, end A causes the rotation position that can not ignore of end B along the displacement of X-axis
It moves, this causes big pure geometrical non-linearity degree.
The interface unit 32A that we will rethink in Fig. 2 now.In the device, due to forming the first connecting element
The multiple action of multiple springs of 34A and the second connecting element 36A, so the rotational stiffness at link block 38A reduces.The rotation
Rigidity particularly depends on the separation distance h between the spring in same connecting element.
Due to geometrical non-linearity degree, region (first end 44 is fixed to movable block 12 along Y-axis in this region)
Relative displacement cause the horizontal displacement of link block 38A, cause to cause along X-axis in spring 40 by the bending of spring 42
Stress.But such as the case where the suspension in Fig. 3 C, which is far below the embedded cantilever beam being applied in Fig. 3 A
Stress because deflection of beam rigidity itself is more much smaller than the rigidity of its stretching/compressing.
Nonlinear finite element calculating is carried out for " MEMS " type device, so as to in each of Fig. 2 and Fig. 3 A to Fig. 3 C
Device be compared.
For each in these calculating, the maximum displacement along Y-axis is fixed as 1 μm, and the length of spring is 290 μm, and
And their thickness is 6 μm.In general, it is equal to 60 μm along the depth of " MEMS " device of Z axis, and used material is
Silicon.
The result that these are calculated is below with the power ε relative to the displacement x (in millimeters) along Y-axis (with newton
For unit) three rank multinomials return form provide, for：
Cantilever beam (Fig. 3 A)：
ε=2.6206y+2.3065.10-38y2+49697y3；
Folded spring (Fig. 3 B)：
ε=2.6147y-2.0498.10-38y2+64.223y3；
Twin shaft suspension (Fig. 3 C)：
ε=2.5669y+14.055y2+101.73y3；
Interface unit 32A (Fig. 2), wherein separation distance h are 10 μm：
ε=2.5091y+0.94931y2-25.25y3；
Interface unit 32A, wherein h=20 μm：
ε=2.6030y+0.24324y2+0.045001y3；
Interface unit 32A, wherein h=38 μm：
ε=2.6484y+0.073074y2+40.100y3。
Therefore, these results demonstrate that assuming to have carried out wise selection (that is, in above-mentioned example to the value of separating distance h
In, h=20 μm), then interface unit 32A can reduce by 3 rank nonlinearities significantly.
Similarly, even if when, only there are one when being made of multiple springs, another may be by connecting element 34A or 36A
Single spring composition, at least for displacement caused by the flexural deformation by the connecting element 34A or 36A that are made of multiple springs
For, it is also possible to obtain the reduction of third-order non-linear degree.
Moreover, in a preferred embodiment of the invention, the first connecting element 34A and the second connecting element 36A about with shifting
The orthogonal third plane P3 of mild-natured face P are moved to be mutually symmetrical.Therefore, two connecting elements are especially analogous to each other.
The result is that interface unit 32A has second advantage due to isotropic characteristic of the device.Isotropism
It refer to the ability that device 32A abides by displacement law as the function of the power (unrelated with the application direction of power) applied.
The symmetric construction of two connecting elements 34A and 36A and the swing offset of link block 38A are prevented from or at least non-
Often the limited fact has following result：In single order, two connections of two the connecting elements 34A and 36A of interface unit 32A
Element 34A and 36A show as two independent springs mutually similar along Y-axis and X-axis respectively.For in these equivalent springs
Each, the displacement law of the function as exerted forces can be derived from the above-mentioned polynomial regression of folded spring.
This polynomial regression gives an insignificant second order coefficient and a three medium level numbers so that for thin tail sheep
Speech, which can be approximately single order by following relationship type：
For the first connecting element 34A, Fy=ky, and
For the second connecting element 36A, Fy=ky.
Therefore, regardless of interface unit 32A by the direction of load, the bullet in response to this load applied by the device
Property power F the summation of power Fx and Fy that equivalent linear spring applies along X-axis and Y-axis respectively is corresponded to the pass for single order, i.e.,：
F=Fx+Fy=kx+ky=k (x+y)
Therefore, interface unit 32A is acted on as Hookean spring, all relative to any load in mobility plane P
With with identical stiffness coefficient k.Therefore, which abides by the law of the displacement of the function as the power for single order, not
Depending on orientation of the power in mobility plane P.
Fig. 4 to fig. 6 shows a kind of modification of interface unit 32A, have with above in relation to described by the device in Fig. 2
Property identical property the advantages of.
Therefore, in the example depicted in fig. 4, each connecting element 34A, 36A includes three or more springs 40,42.
This can further increase the rotational stiffness at link block 38A.
In the second embodiment of the present invention shown in Fig. 5, in the first connecting element 34A and the second connecting element 36A
Each extends between two corresponding extensions 60,62 of link block 38A, the two are to corresponding extension：From
The first face 39A of link block 38A starts face each other two extensions 60 and since the second face 39B of link block 38A
Face each other two extensions 62 of extension.
In addition, each connecting element 34A, 36A tool is there are two spring 70,72, and each spring be the piece folded or
The form of beam.In other words, these springs are " folding " types, therefore corresponding to the spring in Fig. 3 B.First connecting element 34A's
The first end 44 of each spring 70 is connected to movable block 12, and the second end 46 of each spring 70 is connected to
The corresponding extension 60 of link block 38A, such as it is connected to distal end 60A.Similarly, each bullet of the second connecting element 36A
The first end 48 of spring 72 is connected to support element 20, and the second end 50 of each spring 72 is connected to link block 38A
Corresponding extension 62, such as be connected to the distal end 62A of extension 62.
As shown in figure 5, therefore each spring 70 is extended along the direction for being parallel to the first plane P1.Similarly, each bullet
Spring 72 is extended along the direction for being parallel to the second plane P2.
Preferably, each spring 70 includes two straight portion 73A for having equal length, the two straight portions are with flat
Row extends in the mode of the first plane P1 and is connected to each other at the folding part of spring 74.Similarly, each spring 72 includes
Two straight portion 73B with equal length, the two straight portions extended in a manner of being parallel to the second plane P2 and
It is connected to each other at the folding part of spring 76.End 44 and 46 therefore be arranged to it is facing with each other.This is equally applicable to end 48
With 50.
In the example shown, the folding part 74 of the spring 70 of the first connecting element 34A is connected to each other.This is equally applicable to
The corresponding folding part 76 of the spring 72 of second connecting element 36A.Such a configuration limits springs 70 (and 72) parallelly to work
And limit the degree of freedom of interface unit 32A.
In the third embodiment of the present invention shown in Fig. 6, has and be used for the first connecting element 34A and the second connecting element
Two springs 80,82 in each of 36A.In addition, extension 82 of the spring 80 of the first connecting element 34A in mobile block 12
Every side on extend, and the spring 84 of the second connecting element 36A extends on every side of the extension 86 of support element 20.This
A little springs 80, each of 84 are in the form of the piece or beam folded.The second end 46,50 in each of spring 80,84 is connected
It is connected to link block 38A.Moreover, the first end 44 of each spring 80 is for example connected to shifting at the distal end 82A of the extension
The extension 82 of motion block body 12, and the first end 48 of each spring 84 is connected to the extension 86 of support element 20, such as by
It is connected to the distal end 86A of the extension 86.
As shown in fig. 6, therefore each spring 80 is extended along the direction for being parallel to the first plane P1.Similarly, each bullet
Spring 84 is extended along the direction for being parallel to the second plane P2.
Preferably, each spring 80 includes two straight portion 87A for having equal length, the two straight portions 87A
Extended in a manner of being parallel to the first plane P1 and is connected to each other at the folding part of spring 88.Similarly, each spring 84
Include two straight portion 87B with equal length, the two straight portions 87B is prolonged in a manner of being parallel to the second plane P2
It stretches and is connected to each other at the folding part of spring 90.End 44 and 46 is arranged to facing with each other.This is equally applicable to end
48 and 50.Finally, the folding part 88 of spring 80 is arranged to towards movable block 12, and the folding part 90 of spring 84 is located at face
To the position of support portion 20.
In all preferred embodiments, the spring of the first connecting element 34A extends from the first end of link block 38A,
And the spring of the second connecting element 36A extends from the second end of link block 38A.
It will be apparent to one skilled in the art that interface unit 32A can not achieve function as described above, unless link block 38A
It is only connected to the first connecting element 34A and the second connecting element 36A, otherwise interface unit 32A cannot provide resilient suspension
Or coupling between movable block 12 and support element 20.In other words, link block 38A is independently of except the first connecting element 34A
With all elements except the second connecting element 36A.
Specifically, Fig. 1 shows the example layout of attachment device 16,18,22, in system from interface unit (such as
Inertial angle sensor) the linearity and isotropic characteristics obtain best benefit.
In the system 10 shown in, the generally square ring form of movable block 12, and its have connect with first
Parallel the first plane P1 of device 32A the first symmetrical plane PS1 and parallel with the second plane P2 of the first attachment device 32A
The second symmetrical plane PS2.These symmetrical planes PS1 and PS2 is orthogonal with mobility plane P.
In addition, the suspension arrangement 16 of movable block 12 further includes the second interface unit 32B, second interface unit is similar
In the first interface unit 32A, and it is arranged such that the first connecting element 34B of the second interface unit 32B to be parallel to first
The mode of the second connecting element 36A of interface unit 32A extends, and makes the first interface unit 32A and the second interface unit
32B is mutually symmetrical about the fourth plane P4 orthogonal with mobility plane P and third plane P3.In addition, fourth plane P4 is formed
Another symmetrical plane (planes different from plane PS1 and plane PS2) of mobile block 12, the symmetrical plane is actually removable
The diagonal dominant matrices of motion block body 12.
It should be noted that only there are one by two or more in the connecting element in each of each interface unit 32A and 32B
In the other advantageous embodiments of multiple springs composition, interface unit 32A and 32B can by about with mobility plane P just
It hands over and is axially and symmetrically imaged mutually (for example, the axis corresponds to the third plane P3 in Fig. 1 across the axis of third plane P3
Intersection between fourth plane P4).
In addition, the first interface unit 32A and the second interface unit 32B are disposed adjacent to the turning of movable block 12
92.In the example shown, suspension arrangement 16 is disposed in the inside of movable block 12.The movable block is turned at its four
Include the recess portion being disposed on its internal edge 94 at angle, and recess portion intersects so as in each of movable block 12
Corner of portion forms square protrusion 95.The protrusion 95 have it is parallel with side 12A, 12B of movable block 12 respectively and from
Side 96A, 96B of side 12A, 12B offset, and it is diagonal flat with the coincidence of the corresponding diagonal dominant matrices of movable block 12
Face.Connecting element 32A, 32B is respectively connected to side 96B, 96A of corresponding protrusion 95, and is symmetrically located at the protrusion
On every side of 95 diagonal dominant matrices (diagonal dominant matrices are overlapped with fourth plane P4).
Suspension arrangement 16 further includes third interface unit 32C, which is similar to the first interface unit 32A,
And make the first interface unit 32A, the second interface unit 32B and third interface unit 32C form the first pattern 100, it should
First pattern is constant in the case where being rotated by 90 ° around the center of inertia of movable block 12 102.
For example, third interface unit 32C is distributed in three pairs of devices, each pair of device and the first interface unit 32A and second
A pair of of device of interface unit 32B compositions is similar, and is connected to corresponding protrusion 95.
Therefore, system 10 shown in provides an example, and in this example, suspension arrangement 16 is in addition to good line
Property performance except also there is whole isotropic property.
In addition, system 10 shown in as described above, includes another removable with quality identical with movable block 12
Motion block body 14, and another movable block 14 is arranged such that the center of inertia weight of each movable block 12 and 14
It closes.For example, another movable block 14 forms the square frame around movable block 12.Movable block 12 can be solid
Component can be perforated.Another movable block 14 is connected to support element 20 by suspension arrangement 18, and passes through elasticity
Coupling arrangement 22 is connected on movable block 12.As shown in Figure 1, suspension arrangement 18 and elastic connecting device 22 with it is above-mentioned
16 similar mode of suspension arrangement is arranged, therefore and form the second pattern and third pattern, rotated around the center of inertia 102
At 90 degree, second pattern and third pattern are constant.Therefore, the suspension of another movable block 14 and two movable blocks
12,14 two elastic connecting devices also have good linearity performance and are integrally isotropic.
Finally, in the described example, the actuation means 26 of another mobile block 14 are designed in another movement
With opposite relative to oscillation caused by the actuation means 24 by the movable block 12 by movable block 12 on block 14
Phase give and vibrate.Therefore, the whole center of inertia of the block 12,14 of two entirety actually keeps quiet during operation
Only.In other words, actuation means 24,26 and attachment device 16,18,22 in a reverse direction to two movable blocks 12,14 forever
Apply the power of identical size long, so that the operation of system 10 is ideally balanced.
Therefore, it is (in other words, removable to being applied to two to can be not only used for " gyrometer " pattern for sensor 10
The operational mode that the Coriolis force of block 12,14 measures), and can be also used for " gyroscope " pattern (in other words, edge
The orientation of oscillation of two movable blocks 12,14 angle drift can directly provide about sensor 10 about with Z-direction
The operational mode for the information that parallel axis is rotated).
Obviously, the construction for the sensor 10 that can be seen on Fig. 1 and Figure 1A is only provided as illustrated examples, and its
Interface unit disclosed in this invention can be advantageously used in the sensor of his type or more generally system.For example, they can
To be balance sensor that two movable blocks are arranged side by side wherein, and/or it is that two movable blocks pass through machinery
The sensor that coupling device is coupled wherein, or with single movable block or with the removable of three or more
The sensor of motion block body, and/or be support element be installed into wherein moved freely relative to frame so as to use actively
The sensor of balancing device.Sensor can also be used for various resonator systems or switch.
In above-mentioned particularly advantageous application, it is clear that can be manufactured using linear and isotropic interface unit
There is the vibration revolving instrument resonator of the vibration mode of denaturation in plane.In addition, the specific geometric form of above-mentioned interface unit
Shape enables natural mode to be orientated preferably along the geometrical axis of resonator, and makes the orientation to may be in spring
The middle any manufacturing defect relative insensitivity for introducing asymmetry.
Claims (15)
1. movable block suspension (10), including：
At least one movable block (12),
Attachment device (16), the attachment device by the movable block (12) be connected to the system another element so that
Obtaining the movable block (12) can be referred to as " moving mild-natured relative to another element (20,14) of the system
It being moved in the plane (P) in face ", another element of the system is, for example, support element (20) or another movable block (14),
It is characterized in that, the attachment device (16) includes the first interface unit (32A), first interface unit includes being connected
It is connected to the first connecting element (34A) of the movable block (12), is connected to another member of the system (20,14)
The second connecting element (36A) of part and first connecting element (34A) is connected to second connecting element (36A)
Link block (38A),
Wherein, when the movable block (12) is in resting position, first connecting element and the second connection member
Part (34A, 36A) respectively about the first plane (P1) and the second plane (P2) between two parties, first plane and second plane
Orthogonal with the mobility plane (P) and described first plane and second plane intersect,
Wherein, first connecting element (34A) energy flexural deformation in the mobility plane (P), so that described removable
Block (12) can along the first direction (Y) orthogonal with the first plane (P1) relative to the link block (38A) from institute
It states resting position to start to shift, and second connecting element (36A) energy flexural deformation in the mobility plane (P),
So that another element (20,14) of the system can relative to the link block (38A) along with second plane
(P2) orthogonal second direction (X) is shifted since resting position,
And wherein, first connecting element and the second connecting element (34A；At least one of 36A) by least two
A spring (40,70,80；42,72,84) formed, described at least two spring each of have be respectively connected to described in can
The first end (44 of mobile block (12) and another element (20,14) of the system；48) and it is connected to the company
Connect the second end (46 of block (38A)；50).
2. system according to claim 1, wherein first connecting element and the second connecting element (36A；In 34A)
Another by least two springs (42,72,84；40,70,80) it is formed, each of described at least two spring, which has, to be divided
It is not connected to another element (20,14) and the first end (48 of the movable block of the system；44) and by
It is connected to the second end (50 of the link block (38A)；46).
3. system according to claim 1 or 2, wherein first connecting element and second connecting element (34A,
Each of spring (40,42) at least one of 36A) is in the form of straight piece or beam.
4. system according to claim 3, wherein first connecting element and second connecting element (34A,
The quantity of spring (40,42) at least one of 36A) is greater than or equal to three.
5. system according to claim 1 or 2, wherein first connecting element and second connecting element (34A,
At least one of 36A) extend between two corresponding extensions (60,62) of the link block (38A), and the connection
The quantity of the spring (70,72) in element is two, and the two springs are each the shapes in the piece or beam that fold
Formula, the first end (44,48) of the spring are connected to another member of the movable block (12) or the system
Part (20,14), and the second end (46,50) of the spring is connected to the extension (60,62) of the link block (38A)
In one.
6. system according to claim 1 or 2, wherein first connecting element and the second connecting element (34A, 36A)
At least one of in the quantity of the spring (80,84) be two, and the spring is in the movable block (12)
Or extend on every side of the corresponding extension (82,86) of another element (20,14) of the system, and these bullets
Each of spring is in the form of the piece or beam folded, and the first end (44,48) of the spring is connected to the movement
The extension (82,86) of another element (20,14) of block (12) or the system, and the second end of the spring
(46,50) are connected to the link block (38A).
7. system according to any one of claim 1 to 6, wherein the first direction and the second direction (Y, X)
Between angle be 90 degree.
8. system according to any one of claim 1 to 7, wherein described the first of first interface unit (32A)
Connecting element (34A) and second connecting element (36A) are about the third plane (P3) orthogonal with the mobility plane (P)
It is mutually symmetrical.
9. system according to claim 8, wherein the attachment device (16) further includes：
- the second interface unit (32B), second interface unit is similar with the first interface unit (32A) and is arranged to
So that the first connecting element (34B) of second interface unit (32B) with the second of first interface unit (32A) to connect
It connects the parallel mode of element (36A) to extend, and makes first interface unit and second interface unit (32A, 32B)
It is mutually symmetrical about the fourth plane (P4) orthogonal with the mobility plane (P) and third plane (P3)；And
Third interface unit (32C), the third interface unit is similar with the first interface unit (32A) and makes the
Connector piece, second interface unit and the third interface unit (32A, 32B, 32C) form the first pattern (100),
First pattern is constant in the case where the center of inertia (102) about the mobile block (12) is rotated by 90 °.
10. system according to any one of claim 1 to 9, wherein the movable block (12) is symmetrical with first
Plane (PS1) and the second symmetrical plane (PS2), first symmetrical plane and second symmetrical plane with the mobility
Plane (P) is orthogonal and orthogonal with the first direction (Y) and the second direction (X) respectively.
11. according to the system described in the combination of claim 9 and 10, wherein the movable block (12) is in the mobility
Cross section in plane (P) is square, which has the diagonal line being located in the fourth plane (P4) and difference
It is parallel to two adjacent sides (12A, 12B) of first symmetrical plane and second symmetrical plane (PS1, PS2).
12. system according to any one of claim 1 to 11, the system further comprise actuation means (24) with
Apply oscillation in the mobility plane (P) on the mobile block (12).
13. inertial angle sensor, the inertial angle sensor is made of system according to claim 12, the system
System further includes detection device (28) to measure displacement of the movable block (12) in the mobility plane (P).
14. inertial angle sensor according to claim 13, the inertial angle sensor includes support element (20), institute
Another element that support element forms the system is stated, and first actuation means (24) are fixed to the support
Part.
15. inertial angle sensor according to claim 13, the inertial angle sensor includes another removable motion block
Body (14), another movable block form another element of the system, and the system is configured in the shifting
It moves and in mild-natured face (P) two movable blocks (12,14) is applied with opposite power.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210059957.8A CN114322972B (en) | 2015-12-23 | 2016-12-22 | Movable block suspension system and inertial angle sensor |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1563264A FR3046223B1 (en) | 2015-12-23 | 2015-12-23 | SYSTEM FOR SUSPENDING A MOBILE MASS COMPRISING OPTIMIZED LINEARITY MOBILE MASS LINK MEANS |
| FR1563264 | 2015-12-23 | ||
| PCT/EP2016/082418 WO2017109093A1 (en) | 2015-12-23 | 2016-12-22 | System for suspending a mobile mass comprising means for linking the mobile mass with optimised linearity |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210059957.8A Division CN114322972B (en) | 2015-12-23 | 2016-12-22 | Movable block suspension system and inertial angle sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108603760A true CN108603760A (en) | 2018-09-28 |
| CN108603760B CN108603760B (en) | 2022-07-15 |
Family
ID=56263760
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210059957.8A Active CN114322972B (en) | 2015-12-23 | 2016-12-22 | Movable block suspension system and inertial angle sensor |
| CN201680075944.2A Active CN108603760B (en) | 2015-12-23 | 2016-12-22 | Movable block suspension system |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210059957.8A Active CN114322972B (en) | 2015-12-23 | 2016-12-22 | Movable block suspension system and inertial angle sensor |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10962367B2 (en) |
| EP (1) | EP3394564B1 (en) |
| JP (1) | JP6832934B2 (en) |
| CN (2) | CN114322972B (en) |
| FR (1) | FR3046223B1 (en) |
| IL (1) | IL260105B (en) |
| WO (1) | WO2017109093A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114322972A (en) * | 2015-12-23 | 2022-04-12 | 赛峰集团 | Movable block suspension system and inertial angle sensor |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3063992B1 (en) | 2017-03-16 | 2021-07-16 | Commissariat Energie Atomique | MICRO-DEVICE INCLUDING AT LEAST ONE MOBILE ELEMENT |
| FR3075773B1 (en) | 2017-12-22 | 2020-01-24 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | PROCESS FOR PRODUCING SEMICONDUCTOR DEVICES AND CUTTING PATHS |
| FR3102240B1 (en) * | 2019-10-18 | 2021-10-01 | Safran Electronics & Defense | Mechanically compensated frequency anisotropy sensor |
| CN111219296B (en) * | 2020-04-14 | 2021-12-17 | 扬州大学 | Device suitable for restraining vortex-induced vibration of wind turbine tower |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030222430A1 (en) * | 2002-05-28 | 2003-12-04 | Walmsley Robert G. | Movable micro-electromechanical device |
| US20080284078A1 (en) * | 2005-11-25 | 2008-11-20 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Micromechanical Element Which Can be Deflected |
| JP2010145394A (en) * | 2008-12-16 | 2010-07-01 | Honeywell Internatl Inc | System and method for suspending inertial sensor for minimizing rotation of proof mass |
| US20100186507A1 (en) * | 2007-09-10 | 2010-07-29 | Guenthner Stefan | Micromechanical rotation rate sensor with a coupling bar and suspension spring elements for quadrature suppression |
| US20110234206A1 (en) * | 2010-03-26 | 2011-09-29 | Kabushiki Kaisha Toshiba | Acceleration sensor |
| CN103998894A (en) * | 2011-12-06 | 2014-08-20 | 萨甘安全防护公司 | Inertial angular sensor of balanced mems type and method for balancing such a sensor |
| US20150316379A1 (en) * | 2009-09-11 | 2015-11-05 | Invensense, Inc. | Mems device with improved spring system |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2184583B1 (en) * | 2008-11-11 | 2011-01-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Micromechanical coriolis rotation rate sensor |
| US9068834B2 (en) * | 2009-09-09 | 2015-06-30 | Continental Teves Ag & Co. Ohg | Double-axial, shock-resistant rotation rate sensor with nested, linearly oscillating seismic elements |
| EP2378246A1 (en) * | 2010-04-16 | 2011-10-19 | SensoNor Technologies AS | MEMS Structure for an Angular Rate Sensor |
| US9278845B2 (en) * | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
| ITTO20120855A1 (en) * | 2012-09-28 | 2014-03-29 | Milano Politecnico | INTEGRATED STRUCTURE OF DETECTIVE DETECTION OF ACCELERATION AND ANGULAR SPEED AND RELATIVE MEMS SENSOR DEVICE |
| US20140230549A1 (en) * | 2013-02-19 | 2014-08-21 | Freescale Semiconductor, Inc. | Spring system for mems device |
| FR3005160B1 (en) * | 2013-04-29 | 2016-02-12 | Sagem Defense Securite | BALANCED MEMS TYPE INERTIAL ANGULAR SENSOR AND METHOD FOR BALANCING SENSOR THEREOF |
| FI126071B (en) * | 2014-01-28 | 2016-06-15 | Murata Manufacturing Co | Improved gyroscope design and gyroscope |
| JP6211463B2 (en) * | 2014-05-23 | 2017-10-11 | 日立オートモティブシステムズ株式会社 | Inertial sensor |
| FR3046223B1 (en) * | 2015-12-23 | 2018-02-16 | Safran | SYSTEM FOR SUSPENDING A MOBILE MASS COMPRISING OPTIMIZED LINEARITY MOBILE MASS LINK MEANS |
-
2015
- 2015-12-23 FR FR1563264A patent/FR3046223B1/en active Active
-
2016
- 2016-12-22 EP EP16816303.8A patent/EP3394564B1/en active Active
- 2016-12-22 CN CN202210059957.8A patent/CN114322972B/en active Active
- 2016-12-22 WO PCT/EP2016/082418 patent/WO2017109093A1/en active Application Filing
- 2016-12-22 JP JP2018533656A patent/JP6832934B2/en active Active
- 2016-12-22 US US16/064,123 patent/US10962367B2/en active Active
- 2016-12-22 CN CN201680075944.2A patent/CN108603760B/en active Active
-
2018
- 2018-06-18 IL IL260105A patent/IL260105B/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030222430A1 (en) * | 2002-05-28 | 2003-12-04 | Walmsley Robert G. | Movable micro-electromechanical device |
| US20080284078A1 (en) * | 2005-11-25 | 2008-11-20 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Micromechanical Element Which Can be Deflected |
| US20100186507A1 (en) * | 2007-09-10 | 2010-07-29 | Guenthner Stefan | Micromechanical rotation rate sensor with a coupling bar and suspension spring elements for quadrature suppression |
| JP2010145394A (en) * | 2008-12-16 | 2010-07-01 | Honeywell Internatl Inc | System and method for suspending inertial sensor for minimizing rotation of proof mass |
| US20150316379A1 (en) * | 2009-09-11 | 2015-11-05 | Invensense, Inc. | Mems device with improved spring system |
| US20110234206A1 (en) * | 2010-03-26 | 2011-09-29 | Kabushiki Kaisha Toshiba | Acceleration sensor |
| CN103998894A (en) * | 2011-12-06 | 2014-08-20 | 萨甘安全防护公司 | Inertial angular sensor of balanced mems type and method for balancing such a sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114322972A (en) * | 2015-12-23 | 2022-04-12 | 赛峰集团 | Movable block suspension system and inertial angle sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| US10962367B2 (en) | 2021-03-30 |
| EP3394564B1 (en) | 2020-04-08 |
| FR3046223A1 (en) | 2017-06-30 |
| JP6832934B2 (en) | 2021-02-24 |
| WO2017109093A1 (en) | 2017-06-29 |
| CN108603760B (en) | 2022-07-15 |
| CN114322972A (en) | 2022-04-12 |
| JP2019500611A (en) | 2019-01-10 |
| IL260105A (en) | 2018-07-31 |
| IL260105B (en) | 2021-08-31 |
| CN114322972B (en) | 2024-04-12 |
| US20190011260A1 (en) | 2019-01-10 |
| FR3046223B1 (en) | 2018-02-16 |
| EP3394564A1 (en) | 2018-10-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10760909B2 (en) | Angular rate sensor with in-phase drive and sense motion suppression | |
| KR101110462B1 (en) | Rotation rate sensor | |
| CN108603760A (en) | It include the system for hanging movable block of the device for coupling movable block with the linearity of optimization | |
| EP3428576B1 (en) | Angular rate sensor with in-phase motion suppression structure | |
| FI126071B (en) | Improved gyroscope design and gyroscope | |
| EP3106834B1 (en) | Mems device with common mode rejection structure | |
| JP5159062B2 (en) | Angular velocity sensor | |
| JP6027029B2 (en) | Spring structure, resonator, resonator array and sensor | |
| JP6922961B2 (en) | Micro electromechanical device for rotational motion detection | |
| KR101694586B1 (en) | Micromachined gyroscope including a guided mass system | |
| JP2011504585A (en) | Yaw rate sensor | |
| FI126070B (en) | Improved ring gyroscope design and gyroscope | |
| JP6973521B2 (en) | Gyroscope with double input | |
| JP2009520970A (en) | Microsystem comprising at least two mechanically coupled vibrating masses, and more particularly a microgyro | |
| JP5206709B2 (en) | Device having a movable body | |
| TWI711803B (en) | Zweiachsiger ultrarobuster drehratensensor fuer automotive anwendungen | |
| CN114814273A (en) | Three-axis tachometer sensor with substrate and dual rotors | |
| JP2018538530A (en) | Micromechanical yaw rate sensor and manufacturing method thereof | |
| Acar et al. | Mechanical design of MEMS gyroscopes | |
| JP5816320B2 (en) | MEMS element | |
| FI126557B (en) | Improved gyroscope structure and gyroscope | |
| US11215456B2 (en) | Resonator configured to be integrated into an inertial angular sensor | |
| JP6908775B2 (en) | Yaw rate sensor, manufacturing method of yaw rate sensor | |
| CN119492365A (en) | MEMS gyroscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |