CN108598687A - Wireless high temperature sensor and preparation method thereof based on electromagnetism Meta Materials - Google Patents

Abstract

The invention discloses a wireless high-temperature temperature sensor based on metamaterials, including a temperature parameter sensitive unit adopting an electromagnetic metamaterial structure, which is used to convert temperature parameters in a high-temperature environment into information forms such as microwave frequency, phase, and reflected power; The signal transmission unit is used to receive the external microwave query broadband signal from the common environment and transmit the temperature parameter information of the high-temperature environment. It is connected with the temperature parameter sensitive unit and attached to one surface of the substrate; the signal transmission unit is made of high-temperature resistant metal. Circular, square, ring or complex-shaped planar antennas, dipole antennas, horn antennas or reflector antennas; substrates for supporting temperature parameter sensitive units and signal transmission units. The invention utilizes the plane realization technology of the metamaterial to avoid the simultaneous processing of metals on the upper and lower sides during the preparation of the sensing device, simplify the processing, and improve the manufacturing efficiency of the sensing device.

Description

Wireless high-temperature temperature sensor based on electromagnetic metamaterial and its preparation method

technical field

The invention relates to a high-temperature physical parameter sensor device, in particular to a wireless high-temperature temperature sensor based on electromagnetic metamaterials and a preparation method thereof.

Background technique

High-temperature sensing is one of the urgently needed information technology and monitoring capabilities for monitoring, detecting and maintaining metallurgical furnaces, ceramic molding furnaces, thermal power plants, nuclear power reactors, and deep-sea oil production drill bits. There are extreme high temperatures in these occasions, such as the temperature in steelmaking furnaces and ceramic molding furnaces is above 600°C, sometimes even as high as 2000°C. In addition to extreme high temperatures, these systems also have huge pressures, even as high as 20Mpa or more. The pressure is non-uniformly distributed in the furnace, the electric stack, and the end face of the drill bit, and is closely related to the position and gas velocity. A real-time and comprehensive understanding of the temperature and pressure in the furnace, stack, and drill bit is the prerequisite for designing and controlling high-performance metal smelting furnaces, ceramic molding furnaces, stacks, and drill bits and monitoring them safely, which requires instruments and testing technology The industry provides corresponding high temperature resistant temperature and pressure sensing devices and systems.

Existing electronic signal-based active devices cannot function in ultra-high temperature environments. Semiconductors such as silicon fail when the temperature exceeds 400°C, and even the device itself is oxidized and burnt at extremely high temperatures and fails; at the same time, the performance of the connection line between the data reading end and the parameter sensitive end degrades at high temperatures, so its signal transmission It has become one of the key issues in the work of high temperature sensors. In addition, power supply high temperature resistance, power supply replacement and maintenance in high temperature environment will be an extremely difficult task. Therefore, wireless passive sensing technology is often used in harsh environments such as high temperature. Such as wireless passive temperature sensor based on LC resonant mutual inductance coupling. Its working principle is: when the temperature of the sensitive head is in the environment, the temperature change will cause the material properties of the base material to change, which in turn will cause the resonant frequency of the LC circuit to change, thereby converting the change in temperature into a change in the resonant frequency. Using the temperature sensitive head The self-inductance coil is coupled to the inductance antenna at a certain distance, and finally the signal received by the antenna is detected and analyzed to obtain the temperature value on the remote sensitive structure. However, this kind of wireless passive temperature sensor has problems such as short sensing distance and large signal loss (low quality factor Q). Probe the problem. Compared with the LC resonant mutual inductance coupled wireless passive temperature sensor, the microwave patch antenna type wireless passive pressure sensor has the advantages of large sensing distance and low signal loss. When the microwave patch antenna wireless passive pressure sensor is applied in an ultra-high temperature environment, it usually uses high-temperature-resistant ceramics as the base material. When the temperature of the patch antenna changes, the material properties will change, which will cause the resonant frequency of the entire patch antenna to change. Therefore, the ambient temperature can be obtained by collecting the change information of its resonant frequency through the patch antenna and transmitting it, which is the basic composition and working principle of the microwave patch antenna type wireless passive temperature sensor.

In the currently used patch antenna temperature measurement scheme, there is a problem that metal needs to be processed on both the upper and lower sides of the substrate. The processing is more complicated and the processing steps are increased, which is not conducive to rapid preparation.

Contents of the invention

In order to solve the above problems, the present invention provides a wireless high-temperature temperature sensor based on metamaterials and its preparation method, using one of the new technologies in the microwave field - electromagnetic metamaterial technology for wireless measurement of ambient temperature parameters, electromagnetic metamaterials It can be processed on one side, so through the integration of wireless signal transmission technology through metamaterials, the processing can be simplified while ensuring the wireless testing of high temperature temperature parameters. At the same time, the electromagnetic metamaterial is beneficial to reduce the volume of the signal transmission unit and improve its transmission efficiency when integrated with the signal transmission unit, and is conducive to the miniaturization and high gain of the signal transmission unit.

In order to achieve the above object, the technical scheme that the present invention takes is:

A wireless high-temperature temperature sensor based on electromagnetic metamaterials, including a substrate, a temperature parameter sensitive unit and a signal transmission unit arranged above the substrate;

The temperature parameter sensitive unit adopts an electromagnetic metamaterial structure, which is used to convert the temperature parameter in a high-temperature environment into information forms such as microwave frequency, phase, and reflected power;

The signal transmission unit is used to receive external microwave inquiry broadband signals from ordinary environments and transmit high-temperature ambient temperature parameter information, and is connected to the temperature parameter sensitive unit on the same plane; the signal transmission unit is circular, Square, ring or complex shape planar antenna, dipole antenna, horn antenna or reflector antenna; the signal transmission unit is made of high temperature resistant metal or alloy, such as one of chromium, platinum, palladium, tungsten metal and related alloys, such as silver palladium alloy;

The substrate is used to provide a supporting carrier for the temperature parameter sensitive unit and the signal transmission unit, and the temperature parameter sensitive unit and the signal transmission unit are both attached to one surface thereof.

Preferably, the signal transmission unit can also wirelessly communicate with the signal inquiry and recording unit in the ordinary environment, and wirelessly send the temperature parameter information extracted by the temperature parameter sensitive unit to the signal inquiry and recording unit in the ordinary environment.

Preferably, the electromagnetic metamaterial structure adopts a planar closed-loop resonant structure, a planar open-loop resonant structure or a complementary planar open-loop resonant structure; it is made of a high-temperature-resistant metal or alloy, such as one of chromium, platinum, palladium, and tungsten.

Preferably, the substrate is made of alumina ceramics, aluminum nitride ceramics, zirconia ceramics, beryllium oxide ceramics, boron nitride, sapphire, quartz, magnesium aluminum spinel, or ceramic substrates prepared by LTCC and HTCC processes, etc. A kind of preparation obtained.

Wherein, the high-temperature environment is a high-temperature environment with a temperature higher than 150° C.; the ordinary environment is the normal temperature and pressure environment in which we live.

The present invention also provides a method for preparing the above-mentioned wireless high-temperature temperature sensor based on electromagnetic metamaterials, comprising the following steps:

S1. Based on the target substrate material and pre-selected operating frequency, design the electromagnetic metamaterial structure, signal transmission unit type, shape and size, and substrate shape and size;

S2. According to the designed metamaterial structure and the type, shape and size of the signal transmission unit, process the corresponding pattern screen for subsequent screen printing;

S3. Complete the processing of the substrate, place a screen plate on it, and then use screen printing high temperature resistant metal paste to form metamaterial structure graphics and signal transmission unit graphics, dry in the shade, and gradient sinter to obtain.

The present invention has the following beneficial effects:

1) The electromagnetic metamaterial structure is used as the sensitive unit, which can be coplanarly integrated with the signal transmission unit, avoiding the problem of double-sided metal processing of the patch antenna type wireless temperature sensing unit, reducing the processing links, reducing the processing complexity, and effectively Conducive to improving the production efficiency of sensor devices;

2) The structural design of the electromagnetic metamaterial can improve the transmission efficiency of the signal transmission unit and reduce its size, so that the signal transmission unit can be miniaturized and radiated with high gain.

Description of drawings

FIG. 1 is a schematic structural diagram of a wireless high-temperature temperature sensor based on electromagnetic metamaterials according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of the structure along the direction A-A of FIG. 1 .

Detailed ways

In order to make the objects and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

As shown in Figures 1-2, the embodiment of the present invention provides a wireless high-temperature temperature sensor based on electromagnetic metamaterials, including a substrate 3 and a temperature parameter sensing unit 1 and a signal transmission unit 2 arranged above the substrate;

The temperature parameter sensitive unit 1 adopts an electromagnetic metamaterial structure, which is used to convert temperature parameters in a high-temperature environment into information forms such as microwave frequency, phase, and reflected power; the electromagnetic metamaterial structure adopts a planar closed-loop resonant structure, a planar open-loop Resonant structure or complementary planar open-loop resonant structure; made of high-temperature resistant metal or high-temperature alloy, such as one of chromium, platinum, palladium, and tungsten.

The signal transmission unit 2 is used to receive external microwave inquiry broadband signals from ordinary environments and transmit high-temperature ambient temperature parameter information, and is connected to the temperature parameter sensitive unit on the same plane; the signal transmission unit is circular , square, ring or complex shape planar antenna, dipole antenna, horn antenna or reflector antenna; the signal transmission unit 2 can also communicate wirelessly with the signal inquiry and recording unit in the common environment, and the temperature parameter acquisition unit The extracted temperature parameter information is wirelessly sent to the signal inquiry and recording unit in the common environment. The signal transmission unit is made of high temperature resistant metal or alloy, such as one of chromium, platinum, palladium and tungsten;

The base 3 is used to provide a support carrier for the temperature parameter sensitive unit and the signal transmission unit, and the temperature parameter sensitive unit and the signal transmission unit are both attached to one surface thereof. The substrate is prepared from one of alumina ceramics, aluminum nitride ceramics, zirconia ceramics, beryllium oxide ceramics, boron nitride, sapphire, quartz, magnesium aluminum spinel, or ceramic substrates prepared by LTCC technology. .

Example 1

A method for preparing a wireless high-temperature temperature sensor based on metamaterials, comprising the steps of:

S1. Based on the target substrate material and pre-selected operating frequency, design the electromagnetic metamaterial structure, signal transmission unit type, shape and size, and substrate shape and size;

S2. According to the designed electromagnetic metamaterial structure and the type, shape and size of the signal transmission unit, process the corresponding pattern screen for subsequent screen printing;

S3. Use the existing commercially available high-temperature-resistant cooked porcelain sheets to process the substrate, and directly shape it into the designed shape and size by machining; place a screen on it, and then use screen-printing high-temperature-resistant metal paste to form electromagnetic metamaterials Structural graphics and signal transmission unit graphics, dried in the shade; placed in a high-temperature sintering furnace for gradient sintering; then screen-printed, shade-dried, and sintered, repeated several times until the design thickness was reached; the pattern obtained by polishing and grinding; the wireless high-temperature temperature sensor was obtained structure.

Example 2

S1. Based on the target substrate material and pre-selected operating frequency, design the electromagnetic metamaterial structure, signal transmission unit type, shape and size, and substrate shape and size;

S2. According to the designed electromagnetic metamaterial structure and the type, shape and size of the signal transmission unit, process the corresponding pattern screen for subsequent screen printing;

S3. Using the LTCC process for base processing, first purchase a commercially available high-temperature-resistant raw porcelain tape, place a screen plate on it, and then use screen-printing high-temperature-resistant metal paste to form electromagnetic metamaterial structural graphics and signal transmission unit graphics, and dry in the shade; Laminating, hot cutting, and then gradient co-firing; that is, the structure of the wireless high-temperature temperature sensor is obtained.

The description is only a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications should also be It is regarded as the protection scope of the present invention.

Claims (5)

1. the wireless high temperature sensor based on Meta Materials, which is characterized in that including substrate and be arranged above substrate Temperature parameters sensing unit and signal transmission unit；

The temperature parameters sensing unit uses electromagnetism metamaterial structure, micro- for being converted to the temperature parameters in hot environment The message form of wave frequency rate, phase, reflection power；

The signal transmission unit is used to receive the external microwave for coming from conventional environment inquiry broadband signal and transmitting high temperature ring Border temperature parameters information is connected with the temperature parameters sensing unit, is in the same plane；The signal transmission unit is circle Shape, rectangular, annular or complicated shape flat plane antenna, dipole antenna, electromagnetic horn or reflector antenna；Signal transmission unit by Refractory metal is made；

The substrate is used to provide support carrier, the temperature parameters for the temperature parameters sensing unit and signal transmission unit Sensing unit and signal transmission unit are attached in one surface.

2. the wireless high temperature sensor based on Meta Materials as described in claim 1, which is characterized in that the signal transmission Unit can also extract temperature parameters sensing unit with signal inquiry, the recording unit wireless telecommunications being in conventional environment Temperature parameters information be wirelessly sent to be in conventional environment signal inquiry, recording unit.

3. the wireless high temperature sensor based on Meta Materials as described in claim 1, which is characterized in that the super material of electromagnetism Expect that structure uses plane closed loop resonance structure, plane open loop resonance structure or complementary flat open loop resonance structure；By high temperature resistant Metal is made.

4. the wireless high temperature sensor based on Meta Materials as described in claim 1, which is characterized in that the substrate is by oxygen Change aluminium ceramics, aluminium nitride ceramics, zirconia ceramics, beryllium oxide ceramics, boron nitride, sapphire, quartz, magnesium aluminate spinel or LTCC, HTCC technique prepare ceramic base material in it is a kind of prepare gained.

5. a kind of preparation method of the wireless high temperature sensor based on Meta Materials, which is characterized in that include the following steps：

S1, be based on target substrate material and previously selected working frequency, design metamaterial structure, signal transmission unit type, Shape and size and shapes of substrates, size；

S2, metamaterial structure and signal transmission unit type, shape and size according to design, process corresponding pattern halftone and supply Follow-up silk-screen printing is used；

S3, the processing for completing substrate, place halftone on it, then silk-screen printing refractory metal slurry are used to form Meta Materials Structure graph and signal transmission unit figure, dry in the shade, gradient sintering to get.