CN108593018B - A vacuum pump exhaust volume measurement system, vacuum pump and vacuum system - Google Patents
A vacuum pump exhaust volume measurement system, vacuum pump and vacuum system Download PDFInfo
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- CN108593018B CN108593018B CN201810570346.3A CN201810570346A CN108593018B CN 108593018 B CN108593018 B CN 108593018B CN 201810570346 A CN201810570346 A CN 201810570346A CN 108593018 B CN108593018 B CN 108593018B
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- 238000005259 measurement Methods 0.000 title abstract description 30
- 238000005086 pumping Methods 0.000 description 11
- 238000009434 installation Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 238000010079 rubber tapping Methods 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Measuring Volume Flow (AREA)
Abstract
本申请提供了一种真空泵抽气量测量系统、真空泵以及真空系统，用于可现场方便且准确地测量真空泵抽气量。本申请提供的真空泵抽气量测量系统，包括真空泵的排气管道、测量管道以及气体流量计；测量管道从排气管道引出，排气管道在测量管道的接口位置之后设有第一阀门，测量管道设有第二阀门，测量管道在第二阀门之后设有气体流量计，通过在真空泵的排气管道上引出测量管道，以及调整排气管道上第一阀门以及测量管道上第二阀门的通断状态，在测量管道由气体流量计进行真空泵抽气量的测量，该设置不仅可保证真空泵的正常排气，避免现有技术中排气管道阻力大和堵塞的风险，带来测量精度高、人工操作方便、经济成本低的优点。
The present application provides a vacuum pump exhaust volume measurement system, a vacuum pump and a vacuum system, which are used to conveniently and accurately measure the vacuum pump exhaust volume on site. The vacuum pump exhaust volume measurement system provided by the present application includes an exhaust pipe of a vacuum pump, a measuring pipe and a gas flow meter; the measuring pipe is led out from the exhaust pipe, the exhaust pipe is provided with a first valve after the interface position of the measuring pipe, the measuring pipe is provided with a second valve, and the measuring pipe is provided with a gas flow meter after the second valve. By leading the measuring pipe out from the exhaust pipe of the vacuum pump, and adjusting the on-off state of the first valve on the exhaust pipe and the second valve on the measuring pipe, the vacuum pump exhaust volume is measured by the gas flow meter in the measuring pipe. This setting can not only ensure the normal exhaust of the vacuum pump, but also avoid the risk of large exhaust pipe resistance and blockage in the prior art, and bring the advantages of high measurement accuracy, convenient manual operation and low economic cost.
Description
Technical Field
The application relates to the field of vacuum, in particular to a vacuum pump suction measuring system, a vacuum pump and a vacuum system.
Background
Steam turbines are one of the main devices in the power production process, and must be operated with a certain vacuum. The vacuum degree of the steam turbine is reduced to cause (1) the exhaust temperature is increased, vibration is easy to occur due to uneven expansion of the low-pressure cylinder, dynamic and static friction is caused when the expansion is serious, (2) the exhaust temperature is increased, the heat taken away by cooling water is increased, the cold source loss is increased, the operation is uneconomical, (3) the exhaust temperature is increased, the expansion port of a condenser cooling water pipe is easy to loose and leak water, the tightness is damaged, (4) the air inflow is required to be increased for maintaining the load of a unit, the final stage blade is possibly overloaded, the axial displacement of the impulse steam turbine is increased, (5) the specific volume of steam is reduced, the flow speed is reduced, and the damage of blade flutter to the blade is easy to occur in the last stage. Therefore, the reduced vacuum degree of the steam turbine seriously affects the safe and economical operation thereof.
The vacuum pump and the complete set of units continuously pump the non-condensable gas leaked in from different ways from the steam turbine and the condenser to establish and maintain the vacuum of the steam turbine. The vacuum pump can directly reflect the vacuum degree of the unit, so the on-site measurement of the vacuum pump is needed. At present, only the laboratory vacuum pump pumping is definitely regulated at home and abroad, and a fixed orifice plate or a metering nozzle is adopted, but the measuring device cannot be used on site.
The on-site vacuum pump suction measuring method is mainly measured on an outlet pipeline of the air suction equipment and can be divided into a direct measuring method and an indirect measuring method. The direct measurement method has low measurement accuracy due to the small air flow rate of the vacuum pump. The indirect measurement method is to install the measurement device on a small-pipe-diameter exhaust pipeline of the vacuum pump, the pipe diameter becomes smaller, the pipeline resistance is increased, the air in the gas-water separator is easy to be discharged out normally, and the performance of the air extraction equipment and the pressure of the condenser are directly affected in severe cases. In addition, the existing flowmeter is easy to be blocked due to the defect of design.
Therefore, the existing measurement method of the vacuum pump has the defects mentioned above, and needs to be solved.
Disclosure of Invention
The application provides a vacuum pump suction measuring system, a vacuum pump and a vacuum system, which are used for conveniently and accurately measuring the suction of the vacuum pump on site.
The present application provides, in a first aspect, a vacuum pump suction measurement system comprising an exhaust conduit of a vacuum pump, a measurement conduit, and a gas flow meter;
The measuring pipe leads out from the exhaust pipe, the exhaust pipe is provided with a first valve after the interface position of the measuring pipe, the measuring pipe is provided with a second valve, and the measuring pipe is provided with a gas flowmeter after the second valve.
With reference to the first aspect of the present application, in a first possible implementation manner of the first aspect of the present application, the gas flowmeter is a wiiba flowmeter.
With reference to the first possible implementation manner of the first aspect of the present application, in a second possible implementation manner of the first aspect of the present application, if the measurement pipe is horizontally disposed, a first direction of the wiener flowmeter is inclined downward by 10 degrees to 90 degrees, the first direction being an extraction direction of a sensor of the wiener flowmeter, or,
If the measuring pipe is arranged vertically, the first direction is inclined downwards by 0 to 5 degrees.
With reference to the first possible implementation manner of the first aspect of the present application, in a third possible implementation manner of the first aspect of the present application, an insertion depth of a sensor of the wiener bar flowmeter is not less than 2/3 of a pipe diameter of the measurement pipe.
With reference to the first possible implementation manner of the first aspect of the present application, in a fourth possible implementation manner of the first aspect of the present application, the wiener bar flowmeter includes a differential pressure transmitter, and the differential pressure transmitter is disposed at a higher height than a sensor of the wiener bar flowmeter.
With reference to the first aspect of the present application, in a fifth possible implementation manner of the first aspect of the present application, the distance between the second valve and the interface position is 0.5m, and the distance between the second valve and the gas flowmeter is 1m.
With reference to the first aspect of the present application, in a sixth possible implementation manner of the first aspect of the present application, the exhaust pipe is provided with a three-way pipe, and the measurement pipe is led out from the exhaust pipe through the three-way pipe.
With reference to the first aspect of the present application, in a seventh possible implementation manner of the first aspect of the present application, the first valve and the second valve are both stop valves.
The present application provides in a second aspect a vacuum pump comprising a vacuum pump pumping measurement system as described above in the first aspect of the application or any one of the possible implementations of the first aspect.
The present application provides in a third aspect a vacuum system comprising a vacuum pump according to the second aspect of the application described above.
From the above technical solutions, the embodiment of the present application has the following advantages:
The vacuum pump pumping measuring system provided by the application can ensure the normal exhaust of the vacuum pump by leading out the measuring pipeline on the exhaust pipeline of the vacuum pump and adjusting the on-off state of the first valve on the exhaust pipeline and the second valve on the measuring pipeline, and measuring the vacuum pump pumping by the gas flowmeter on the measuring pipeline, the vacuum pump suction measuring system has the advantages of high measuring precision, convenient manual operation and low economic cost, and also has the advantages of low pressure loss, zero maintenance cost and convenience in on-line installation and overhaul, so that the vacuum pump suction measuring system has higher application value and popularization value in on-site production practice.
Drawings
FIG. 1 is a schematic diagram of an embodiment of a vacuum pump pumping measurement system of the present application;
FIG. 2 is a schematic representation of one embodiment of a Willebrand flowmeter of the present application;
FIG. 3 is a schematic view of an assembly of the present application;
FIG. 4 is a schematic view of another embodiment of the present application;
FIG. 5 is a schematic view of yet another embodiment of the present application;
fig. 6 is a schematic view of yet another embodiment of the present application.
Detailed Description
The application provides a vacuum pump suction measuring system, a vacuum pump and a vacuum system, which are used for conveniently and accurately measuring the suction of the vacuum pump on site.
First, referring to fig. 1, an embodiment of a vacuum pump pumping measurement system is shown in which an exhaust line 110, a measurement line 120, and a gas flow meter 130 of a vacuum pump 100 are included.
It can be appreciated that the exhaust pipe 110 is used for exhausting air exhausted when the vacuum pump 100 is vacuumized, and the exhaust pipe 110 may be a pipe formed by extending a housing of the vacuum pump 100 itself, or may be a pipe configured in addition to the vacuum pump 100, so that a worker can configure different exhaust pipes 110 in cooperation with the vacuum pump 100 in different application scenarios, thereby facilitating the layout of the exhaust pipe 100 on site.
The measuring pipe 120 is led out from the exhaust pipe 100, the exhaust pipe 110 is provided with a first valve 111 after the interface position S of the measuring pipe 120, the first valve 111 is used for controlling the on-off state of the exhaust pipe 100 after the interface position S of the measuring pipe 120, the measuring pipe 120 is provided with a second valve 121, the second valve 121 is used for controlling the on-off state of the measuring pipe 120 after the second valve 121, and the measuring pipe 120 is further provided with a gas flowmeter 130 after the second valve 121.
In the present application, the normal operation state of the vacuum pump suction measuring system can be divided into the following two stages:
(1) Stage of measurement
In this stage, the first valve 111 is in an off state, the second valve 121 is in an on state, and the gas exhausted from the vacuum pump 100 is exhausted through the measurement pipe 120, and in this process, the gas flow meter 130 can measure the gas flow, determine a specific parameter of the vacuum pump exhaust, and output the vacuum pump exhaust to the relevant processing equipment;
(2) Normal exhaust phase
In this stage, the first valve 111 is in an on state, and the second valve 121 is in an off state, and the gas exhausted from the vacuum pump 100 is normally exhausted through the exhaust pipe 110. The exhaust pipe 110 may be further connected to a muffler, etc., to further reduce noise of the gas exhausted from the exhaust pipe 110.
From the above, it can be seen that, in the vacuum pump exhaust measuring system provided by the application, by leading out the measuring pipeline 120 on the exhaust pipeline 110 of the vacuum pump 100 and adjusting the on-off states of the first valve 111 on the exhaust pipeline 110 and the second valve 121 on the measuring pipeline 120, the measurement of the vacuum pump exhaust is performed on the measuring pipeline 120 by the gas flowmeter 130, the arrangement not only can ensure the normal exhaust of the vacuum pump 100, but also can avoid the risk of large resistance and blockage of the exhaust pipeline 110 in the prior art, and has the advantages of high measuring precision, convenient manual operation and low economic cost, but also can have the advantages of low pressure loss, zero maintenance cost and convenient on-line installation and overhaul, so that in the field production practice, the vacuum pump exhaust measuring system provided by the application has higher application value and popularization value.
For a further understanding of the application, various ways of optimizing the application in practical applications will be described further below.
For example, in practical applications, the gas flow meter 130 may specifically be a target flow meter, a V-cone flow meter, a vortex shedding flow meter, an orifice flow meter, or a wiener flow meter.
The present application is exemplified by a wiener flowmeter, which is a differential pressure type and velocity-average type gas flowmeter, and the differential pressure generated by the sensor in the gas of the measuring pipeline 120 is used for measuring the flow, so that a very stable and pulse-free differential pressure signal can be output, and the vacuum pump air pumping capacity can be determined according to the differential pressure signal, thus the present application has the advantages of relatively stability and relatively high accuracy.
Referring specifically to fig. 2, an embodiment of the wiba flowmeter is shown, where the sensor can generate accurate pressure distribution and fixed gas separation points, and the low-pressure sampling holes located on two sides behind the sensor and in front of the gas separation points can generate stable differential pressure signals, and are effectively anti-blocking and can maintain long-term high accuracy.
The vacuum pump 100 generates a high pressure distribution area in front of the sensor of the wiiba flowmeter through the gas exhausted from the measuring pipe 120, and the pressure of the high pressure distribution area is slightly higher than the static pressure of the measuring pipe 120. According to the Bernoulli equation, the gas flow through the sensor is accelerated, creating a low pressure distribution area at the rear of the sensor, where the pressure is slightly lower than the static pressure of the conduit. The sensor has several pairs of pressure sampling holes in certain regular arrangement in the high and low pressure distribution area to measure the total pressure of the gas, including average speed pressure P1 and static pressure P2, and the pressure P1 and P2 are led into the differential pressure transmitter to measure the differential pressure DeltaP=P1-P2 to indicate the average speed of the gas, so as to calculate the flow rate of the gas and to determine the pumping capacity of the vacuum pump. The sensor is provided with a plurality of pairs of pressure taking holes, so that the stable high-precision measuring effect of the power bar flowmeter can be effectively maintained.
Further, in connection with an assembly schematic diagram of the wiiba flowmeter shown in fig. 3 and 4, respectively, the installation manner of the wiiba flowmeter may be as follows:
(1) Firstly, determining the installation position and direction according to the installation requirement of the Willebrand flowmeter and the type of the measuring medium;
(2) Welding the base to a designated location of the measurement pipe 120;
(3) The on-line tapping tool is rotated to drill the tapping head into the wall of the measuring pipe 120 and to tap the tapping head completely through the wall of the measuring pipe 120;
(5) Reversely rotating the handle to retract the tapping head, and taking down the online tapping tool;
(6) The sensor head-on surface of the power flow meter is corrected by connecting the power flow meter, and the driving rod is rotated to enable the sensor of the power flow meter to be inserted into the required depth of the measuring pipeline 120, so that all screws and nuts are locked.
Further, the wiliba flowmeter may be connected to a display, and the measurement result of the vacuum pump pumping is directly displayed to the user through the display, so that the user can intuitively learn, and can judge the vacuum state of the steam turbine by combining the operation experience and the history data, manually adjust the operation power of the vacuum pump 100, or perform related processing;
Or the wiliba flowmeter can be connected with related processing equipment and send the measurement result of the vacuum pump suction, for example, the measurement result can be sent to a programmable logic controller (programmable logic controller, PLC) program control system in the vacuum system, and the PLC program control system can automatically adjust the operation power of the vacuum pump 100 according to the measurement result of the vacuum pump suction.
Further, with the vacuum pump 100 and/or the exhaust pipe 110 deployed in the field environment, the measurement pipe 120 may be further divided into two settings:
(1) Is horizontally arranged
If the measurement pipe 120 is disposed horizontally, as shown in fig. 5, the first direction of the wiener flowmeter is inclined downward by 10 to 90 degrees, where the first direction is the direction of extraction of the sensor of the wiener flowmeter.
(2) Is vertically arranged
If the measurement pipe 120 is disposed vertically, as in still another schematic assembly of the wiener flowmeter shown in fig. 6, the first direction of the wiener flowmeter is inclined downward by 0 to 5 degrees.
Through the arrangement, if some micro moisture contained in the gas exhausted by the vacuum pump 100 is accumulated on the surface of the sensor, the gas can slide down and separate from the sensor, so that the moisture in the gas can be prevented from affecting the operation of the sensor, and the measurement accuracy of the power bar flowmeter is further ensured.
Further, the insertion depth of the sensor of the wiener bar flowmeter is not less than 2/3 of the pipe diameter of the measuring pipe 120, so that a larger contact surface between the sensor and the gas in the measuring pipe 120 is ensured, the full pressure of the gas can be measured to effectively reflect the characteristic of the gas, and the measuring accuracy of the wiener bar flowmeter is ensured.
Further, the Willebrand flowmeter comprises a differential pressure transmitter, and the setting height of the differential pressure transmitter is higher than that of a sensor of the Willebrand flowmeter, so that the accuracy of differential pressure signals is guaranteed, and the accuracy of measurement of the Willebrand flowmeter is further guaranteed.
Further, the distance between the second valve 121 and the interface position S is 0.5m, and the distance between the second valve 121 and the gas flowmeter 130 is 1m, so that the gas exhausted from the vacuum pump 100 can flow smoothly when the first valve 111 and the second valve 121 are switched to be in an on-off state, and the situation of blockage is not easy to occur, thereby ensuring the normal operation of the exhaust work of the vacuum pump 100.
Further, the measuring pipeline 120 can be directly led out of the exhaust pipeline 110 in a welding mode or the like, the exhaust pipeline 110 can be further provided with connecting components such as a tee pipe fitting, the measuring pipeline 120 is led out of the exhaust pipeline 110 through the connecting components such as the tee pipe fitting, the installation of the measuring pipeline 120 is easy to achieve through the arrangement of the connecting components, the stability is high, the measuring pipeline 120 is convenient to detach, and the replacement or the disassembly and the washing of the exhaust pipeline 110 and/or the measuring pipeline 120 are convenient.
Further, the first valve 111 and the second valve 121 may be gate valves, stop valves, ball valves, butterfly valves, etc., preferably, stop valves are used, and the stop valves have the advantages of small friction, durability, small opening height, easy manufacture, convenient maintenance, etc., and are suitable for not only medium and low pressures, but also high pressures.
It will be appreciated that the present application also provides a vacuum pump 100, the vacuum pump 100 comprising the vacuum pump pumping measurement system described above. The vacuum pump 100 may be classified into a gas delivery pump and a gas trapping pump according to different types, and specifically, the vacuum pump may be further subdivided into different types according to different application environments and principles, which is not limited herein.
In addition, the application also provides a vacuum system, which comprises the vacuum pump introduced above, and also comprises a PLC program control system, an air storage tank, a vacuum pipeline, a vacuum valve and other periods and/or devices, wherein a stable vacuum source is provided under the control of the PLC program control system, so that the production requirement is met, and the vacuum system can be widely applied to the industries of electronic semiconductor industry, photoelectric backlight modules or machining and the like.
In summary, according to the vacuum pump exhaust gas measuring system, the vacuum pump and the vacuum system provided by the application, the measuring pipeline 120 is led out from the exhaust pipeline 110 of the vacuum pump 100, the on-off states of the first valve 111 on the exhaust pipeline 110 and the second valve 121 on the measuring pipeline 120 are adjusted, and the vacuum pump exhaust gas is measured by the gas flowmeter 130 in the measuring pipeline 120, so that the normal exhaust of the vacuum pump 100 can be ensured, the risk of large resistance and blockage of the exhaust pipeline 110 in the prior art is avoided, the advantages of high measuring precision, convenient manual operation and low economic cost are brought, the advantages of low pressure loss, zero maintenance cost and convenience in on-line installation and overhaul are also brought, and therefore, the vacuum pump exhaust gas measuring system provided by the application has higher application value and popularization value in the field production practice.
While the application has been described in detail with reference to the foregoing embodiments, it will be understood by those skilled in the art that the foregoing embodiments may be modified or equivalents may be substituted for some of the features thereof, and that the modifications or substitutions do not depart from the spirit and scope of the embodiments of the application.
Claims (8)
1. A vacuum pump suction measuring system, which is characterized by comprising an exhaust pipeline of a vacuum pump, a measuring pipeline and a gas flowmeter;
The measuring pipeline is led out from the exhaust pipeline, a first valve is arranged behind the interface position of the measuring pipeline, a second valve is arranged on the measuring pipeline, and the gas flowmeter is arranged behind the second valve;
The working state of the vacuum pump suction measuring system comprises a measuring stage and a normal exhaust stage;
when the working state of the vacuum pump suction measuring system is the measuring stage, the first valve is in an off state, and the second valve is in an on state;
when the working state of the vacuum pump suction measuring system is the normal exhaust stage, the first valve is in a conducting state, and the second valve is in a cutting-off state;
wherein the gas flowmeter is a Willebrand flowmeter;
If the measuring pipeline is horizontally arranged, the first direction of the Willebrand flowmeter is inclined downwards by 10 degrees to 90 degrees, and the first direction is the leading-out direction of the sensor of the Willebrand flowmeter, or,
If the measuring pipeline is arranged vertically, the first direction is inclined downwards by 0 to 5 degrees.
2. A vacuum pump suction measuring system according to claim 1, wherein the sensor of the wiiba flowmeter is inserted to a depth of not less than 2/3 of the pipe diameter of the measuring pipe.
3. A vacuum pump suction measuring system according to claim 1, wherein the wiiba flow meter comprises a differential pressure transmitter, the differential pressure transmitter being located at a higher elevation than the sensor of the wiiba flow meter.
4. A vacuum pump suction measuring system according to claim 1, wherein the distance of the second valve from the interface location is 0.5m and the distance of the second valve from the gas flow meter is 1m.
5. A vacuum pump suction measuring system according to claim 1, wherein the exhaust duct is provided with a three-way pipe through which the measuring duct leads from the exhaust duct.
6. A vacuum pump suction measuring system according to claim 1, wherein the first valve and the second valve are both shut-off valves.
7. A vacuum pump, characterized in that the vacuum pump comprises a vacuum pump suction measuring system according to any one of claims 1 to 6.
8. A vacuum system, characterized in that, the vacuum system comprising the vacuum pump of claim 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810570346.3A CN108593018B (en) | 2018-06-05 | 2018-06-05 | A vacuum pump exhaust volume measurement system, vacuum pump and vacuum system |
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| CN201810570346.3A CN108593018B (en) | 2018-06-05 | 2018-06-05 | A vacuum pump exhaust volume measurement system, vacuum pump and vacuum system |
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| CN108593018A CN108593018A (en) | 2018-09-28 |
| CN108593018B true CN108593018B (en) | 2025-04-04 |
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| CN105736349A (en) * | 2016-05-06 | 2016-07-06 | 山东伯仲真空设备股份有限公司 | Roots vacuum pump performance test system and test method thereof |
| CN208488129U (en) * | 2018-06-05 | 2019-02-12 | 润电能源科学技术有限公司 | A kind of vacuum pump pumping system for measuring quantity, vacuum pump and vacuum system |
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