CN108387960A - It can be used for the multilayered structure grating of augmented reality glasses - Google Patents
It can be used for the multilayered structure grating of augmented reality glasses Download PDFInfo
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- 230000003190 augmentative effect Effects 0.000 title claims abstract description 32
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
- G02B27/0172—Head mounted characterised by optical features
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
- G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
- G02B5/1823—Plural gratings positioned on the same surface, e.g. array of gratings in an overlapping or superposed manner
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B2005/1804—Transmission gratings
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
- G02B2027/0178—Eyeglass type
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Abstract
The invention discloses a kind of multilayered structure grating can be used for augmented reality glasses, which is directly formed by stacking by the grating of different refractivity material, and every layer of grating refractive index by reducing close to basal layer to close to air layer successively.Double-layered cot positive level diffraction efficiency in light source normal incidence is 20.4% to 75.7%, 7 ° to 27 ° of field angle；The double-deck triangular grating positive level diffraction efficiency in light source normal incidence is 48.4% to 95.7%, 13 ° to 15 ° of field angle；Three layers of rectangular raster positive level diffraction efficiency in light source normal incidence is 19.4% to 74.4%, 16 ° to 20 ° of field angle.The multilayered structure optical grating construction of the present invention is simple, easy to make, is easy to be combined with existing photoetching, lithographic technique, and when carrying out turning over quarter using nanometer embossing there is no being difficult to demould, the feasibility of batch production is high.
Description
Technical field
The invention belongs to the all-wave length sections in augmented reality field more particularly to a kind of multilayered structure can be used for enhancing now
The grating of real glasses.
Background technology
Augmented reality (Augmented Reality, AR) technology is either still produced in scientific research institution as popular science and technology
Nowadays product company is all concerned.Compared to virtual reality (Virtual Reality, VR), the picture that AR glasses are shown can be with
It is mutually merged with real world, realizes that difficulty ratio VR is much bigger.And wherein, AR eyeglasses are most important key technology points.
The existing 4 kinds of common optical plans of AR eyeglasses：
1, directly projection or off axis reflector：Directly projection is similar to projecting apparatus, for example installs micro projection in side temple
Instrument enters eyes imaging using eyeglass as speculum by reflecting to form directional light；Off axis reflector is similar to its, only uses
Off-axis parabolic mirror, in direct projection under special angle and can focus incident directional light, and support focus for infinity.It can will be small
Type projecting apparatus is arranged in the frame of both sides, and the image on half-penetration type LCD is projected to the imaging of spectroscope on piece by LED light source, from
And provide stereoscopic vision.This method is simple but imaging effect is general, and brightness is low, and aberration is big.
2, prismatic reflection：The light for sending out display with common angle prism also allows existing from lens reflecting into human eye
The light transmission in the real world is come in.This method is simple and convenient, but since technology restriction field angle is only capable of accomplishing 20 ° or so, thinks that raising regards
Rink corner can only be realized by thickening eyeglass.Light successively causes the efficiency of light energy utilization low (about by semi-transparent semi-reflecting film layer twice
20%), picture is dark；Free curved surface prism can improve the above problem, and light is freely bent by non-rotationally-symmetric XY multinomials
The transformation of face prism, forms the image virtually amplified, and the exit facet and reflecting surface of total reflection can eliminate aberration, distortion iseikonia
Difference, therefore image quality is more clear, visual angle can be further increased up to 54 ° using double free curved surface prism field angles.
Disadvantage is exactly that volume is larger, and thickness is about 7 to 10mm, and surface shape cannot be by Continuous maching, and design difficulty is larger.
3, multilayer mirror is combined with optical waveguide：Company of Israel Lumus proposes a kind of multi-reflection layer structure LOE
(Light-guide Optical Element) device, is made of a series of inclined reflector plates.LOE device principles and latent prestige
Mirror is similar, the difference is that having used multiple reflector plates extension emergent pupils, each reflector plate reflection is directional light, is formed same
Picture.Lumus companies use the mainstream product PD-18 resolution ratio 800 × 600 of this device, 26 ° × 20 ° of field angle, emergent pupil
10mm, emergent pupil are less than 70g, viewing area transmitance 70% away from 23mm, thickness of detector 2.3mm, weight.The method technical barrier is low,
But glued using multi-disc in technique, volume production cost is higher.
4, diffraction grating is combined with optical waveguide：This optical plan is mainly made of micro-display, grating and planar waveguide.It is micro-
The image of display becomes directional light after micro align lens and enters optical waveguide first grating of arrival, due to spreading out for grating
Penetrating effect makes directional light change transmission direction, will be along optical waveguide Lossless transport because meeting total reflection condition.When parallel optical transport
When to second grating, total reflection condition is destroyed that directional light is made to be emitted from grating and enters eyes imaging.Due to grating
With the presence of waveguide, optical imagery can be propagated with vertical deflection.This not only reduces propagation distance, can also keep optical system
Center of gravity is within head.Meanwhile optical waveguide can realize 30 ° to 40 ° of field angle on the glass within 3mm, can add
On common spectacles, to the simplicity for being conducive to AR optical systems and small-sized design.
Wherein, the 4th kind of AR eyeglass project plan comparison is praised highly, and the AR glasses of HoloLens companies design are using this
Scheme.Each scientific research institution is developing always in such as research centers Nokia the grating suitable for this scheme, and it is best to work out effect at present
Grating be oblique raster (slanted grating), including tilt volume holographic grating (slanted volume
Holographic grating) and inclined surface relief grating (slanted surface relief grating).Due to body
Preparing grating difficulty is big and is unsuitable for batch duplicating production, and the relief grating of various patterns comes into being.Inclined parallel four side
Shape grating, trapezoidal grating, sinusoidal grating, circular arc grating etc. can meet part design requirement, and the light that angle of inclination is big
Grid (slanted overhanging grating) effect is more preferable.But in actual production, oblique raster uses traditional light
Quarter, lithographic technique are difficult to make, because existing etching machine is all only applicable to vertical etch, and are pressed using nanometer
Print technology carries out there are problems that being difficult to demould when scale of mass production, causes the manufacture difficulty of grating big, yield is low.Thus it sees
Come, a kind of grating suitable for AR glasses convenient for batch production of design is worth with major application.
Invention content
In view of the above-mentioned deficiencies in the prior art, it is an object of the present invention to provide a kind of multilayer knot can be used for augmented reality glasses
Structure grating, it is intended to utilize the effect of the staggered superposition simulation oblique raster of the simple grating of multilayer.Multilayered structure grating of the present invention spreads out
Penetrate efficient, angle of diffraction is big, field angle is big, make be convenient in demoulding, be easy to mass production, be suitably applied AR of new generation
Mirror.
The purpose of the present invention is achieved through the following technical solutions：A kind of multilayer knot can be used for augmented reality glasses
Structure grating, the multilayered structure grating are directly formed by stacking by the grating of different refractivity material, and every layer of grating refractive index is by close
Basal layer reduces successively to close to air layer.
Further, every layer of grating refractive index value range is between 1.4~1.9；The multilayered structure grating is imprinted on base
On bottom, i.e., in planar optical waveguide, it to be used for the coupling of light, being coupled into the light of planar optical waveguide need to transmit in planar optical waveguide,
It needs to meet total reflection condition, to ensure that incident light is more than reflection critical angle, every layer of grating in the angle of diffraction of planar optical waveguide
Period is within 500nm.
Further, the shape type of every layer of grating is selected from rectangular raster, triangular grating, trapezoidal grating, sinusoidal grating
Etc. the grating of processing easy to produce.
Further, the shape type of all gratings is identical and cycle phase is same, in order to produce and process.
Further, which includes double-layered cot, is all made of optics high polymer material；Upper layer and lower layer
The period of grating is 450nm；Upper layer rectangular raster refractive index is denoted as n1, the high 230nm of tooth, duty ratio 39.66%；Middle layer is rolled over
The rate of penetrating is denoted as n2,2.50 μm of thickness；Lower layer's rectangular raster refractive index is denoted as n3, and tooth is 1.00 μm high, duty ratio 70.40%, left
Side wall deviates 10nm to the left relative to upper layer rectangular raster left side wall；Basal layer refractive index is denoted as n4；Wherein n4=n3, n1=
N2, and n3 ＞ n2.As lambda1-wavelength λ=532nm, n1=1.55, n2=1.55, n3=1.72, n4=1.72.
Further, the multilayered structure grating includes the double-deck triangular grating, is all made of optics high polymer material；Up and down
The period of two layers of grating is 450nm；Upper layer triangular grating refractive index is denoted as n1, and tooth is 1 μm high, bottom edge 200nm, left base angle
36.90°；Intermediate refractive index layer is denoted as n2,1.77 μm of thickness；Lower layer's triangular grating refractive index is denoted as n3=1.72, and tooth is high
1.00 μm, bottom edge 200nm, 53.40 ° of left base angle, left base angle vertex relative to the left base angle vertex of upper layer triangular grating to the left
Offset by 20nm；Basal layer refractive index is denoted as n4；Wherein n4=n3, n1=n2, and n3 ＞ n2.As lambda1-wavelength λ=532nm
When, n1=1.55, n2=1.55, n3=1.72, n4=1.72.
Further, the multilayered structure grating includes three layers of rectangular raster, is all made of optics high polymer material；Upper, middle and lower
The period of three layers of grating is 450nm；Upper layer rectangular raster refractive index is denoted as n1, the high 230nm of tooth, duty ratio 40.25%；First
Intermediate refractive index layer is denoted as n2,2.54 μm of thickness；Middle level rectangular raster refractive index is denoted as n3, and tooth is 1.00 μm high, duty ratio
23.85%, left side wall deviates 20nm to the left relative to upper layer rectangular raster left side wall；Second intermediate refractive index layer is denoted as n4,
2.02 μm of thickness；Lower layer's rectangular raster refractive index is denoted as n5, and tooth is 1.00 μm high, and duty ratio 23.64%, left side wall is relative in
Layer rectangular raster left side wall deviates 20nm to the left；Basal layer refractive index is denoted as n6；Wherein n6=n5, n4=n3, n1=n2, and n5
＞ n3 ＞ n2.As lambda1-wavelength λ=532nm, n1=1.55, n2=1.55, n3=1.64, n4=1.64, n5=1.72,
N6=1.72.
The beneficial effects of the invention are as follows：
1, multilayered structure optical grating construction of the invention is simple, easy to make, is easy to mutually tie with existing photoetching, lithographic technique
It closes, when carrying out turning over quarter using nanometer embossing there is no being difficult to demould, the feasibility of batch production is high.
2, the present invention provides three kinds of multilayered structure gratings, Single wavelength diffraction efficiency is high when normal incidence, up to 70% with
On.For field angle between 7 ° to 27 °, each wavelength spreadability is good.
Description of the drawings
Fig. 1 is the geometry schematic diagram for the double-layered cot that the present invention can be used for augmented reality glasses；
Fig. 2 is the geometry schematic diagram for the double-deck triangular grating that the present invention can be used for augmented reality glasses；
Fig. 3 is the geometry schematic diagram for three layers of rectangular raster that the present invention can be used for augmented reality glasses；
Fig. 4 is that can be used for the double-layered cots of augmented reality glasses in incident wavelength be 460nm to 645nm models to the present invention
When enclosing, the relationship of positive level diffraction efficiency and wavelength；
Fig. 5 is that can be used for the double-deck triangular gratings of augmented reality glasses in incident wavelength be 460nm to 645nm to the present invention
When range, the relationship of positive level diffraction efficiency and wavelength；
Fig. 6 is that can be used for three layers of rectangular raster of augmented reality glasses in incident wavelength be 460nm to 645nm models to the present invention
When enclosing, the relationship of positive level diffraction efficiency and wavelength；
Fig. 7 be the present invention can be used for the double-layered cots of augmented reality glasses incident wavelength be respectively 475nm,
When 525nm, 630nm, the relationship of positive level diffraction efficiency and angle of light；
Fig. 8 be the present invention can be used for the double-deck triangular gratings of augmented reality glasses incident wavelength be respectively 475nm,
When 525nm, 630nm, the relationship of positive level diffraction efficiency and angle of light；
Fig. 9 be the present invention can be used for three layers of rectangular raster of augmented reality glasses incident wavelength be respectively 475nm,
When 525nm, 630nm, the relationship of positive level diffraction efficiency and angle of light.
Specific implementation mode
The design procedure that the present invention can be used for the multi-layer grating of augmented reality glasses is as follows：
1, determine that incident light is TE polarized light sources first, incidence angle is 0 ° of normal incidence, and wavelength scanning range is arranged from 460nm
To 645nm.The refractive index of three kinds of grating materials of grating is determined again：Low-refraction optics high polymer material, refractive index n=1.55
(when lambda1-wavelength λ=532nm)；Middle refractive optical high polymer material, refractive index n=1.64 (lambda1-wavelength λ=
When 532nm)；High refractive index optics high polymer material, refractive index n=1.72 (when lambda1-wavelength λ=532nm), while also making
For base material.
2, multilayered structure grating model is designed, grating major parameter includes：Period, tooth is high, (every layer deviates relative position
Amount), structural parameters；
3, optimize each structural parameters of multilayered structure grating, and calculate under each wavelength positive level diffraction efficiency and
The angle of diffraction.
From double-layered cot incident wavelength be 460nm to 645nm ranges when, positive level diffraction efficiency and wavelength
Relationship (attached drawing 4), it can be seen that as a length of 475nm of incident light wave, positive level diffraction efficiency is 75.7%；Work as incident light wave
When a length of 525nm, positive level diffraction efficiency is 40.6%；As a length of 630nm of incident light wave, positive level diffraction efficiency is
20.4%.And positive level angle of diffraction respectively is 37.76 °, 42.81 °, 54.95 ° under above three incident wavelength,
Be all higher than the total reflection of substrate optics high polymer material and Air Interface 35.46 ° of critical angle, 35.60 °, 35.78 °, meet diffraction
The condition that light is totally reflected in substrate.
From the double-deck triangular grating incident wavelength be 460nm to 645nm ranges when, positive level diffraction efficiency and wavelength
Relationship (attached drawing 5), it can be seen that as a length of 475nm of incident light wave, positive level diffraction efficiency be 82.6%；Work as incident light
When wavelength is 525nm, positive level diffraction efficiency is 95.7%；As a length of 630nm of incident light wave, positive level diffraction efficiency
It is 48.4%.And positive level angle of diffraction respectively be under above three incident wavelength 37.76 °, 42.81 °,
54.95 °, be all higher than the total reflection of substrate optics high polymer material and Air Interface 35.46 ° of critical angle, 35.60 °, 35.78 °,
Meet the condition that diffraction light is totally reflected in substrate.
From three layers of rectangular raster incident wavelength be 460nm to 645nm ranges when, positive level diffraction efficiency and wavelength
Relationship (attached drawing 6), it can be seen that as a length of 475nm of incident light wave, positive level diffraction efficiency is 74.4%；Work as incident light wave
When a length of 525nm, positive level diffraction efficiency is 38.8%；As a length of 630nm of incident light wave, positive level diffraction efficiency is
19.4%.And positive level angle of diffraction respectively is 37.76 °, 42.81 °, 54.95 ° under above three incident wavelength,
Be all higher than the total reflection of substrate optics high polymer material and Air Interface 35.46 ° of critical angle, 35.60 °, 35.78 °, meet diffraction
The condition that light is totally reflected in substrate.
It is not difficult to find that the diffraction effect of the double-deck triangular grating after analyzing above-mentioned three kinds of multilayered structures grating diffration frequency spectrum
Rate is highest in each wavelength period, and frequency spectrum uniformity is more preferable than current most common dip-parallel quadrangle raster effects.
4, when diffraction efficiency is optimized to optimum value, fixed lambda1-wavelength, scanning incident angle changes 60 °, calculates just
The relationship of one level diffraction efficiency and angle of light.
From double-layered cot when incident wavelength is respectively 475nm, 525nm, 630nm, positive level diffraction efficiency with
The relationship (attached drawing 7) of angle of light, it can be seen that when the diffraction efficiency detraction with 20% calculates field angle, above three enters
Field angle under ejected wave length respectively is 27 °, 20 °, 7 °.
From the double-deck triangular grating when incident wavelength is respectively 475nm, 525nm, 630nm, positive level diffraction efficiency
With the relationship (attached drawing 8) of angle of light, it can be seen that when the diffraction efficiency detraction with 20% calculates field angle, above three
Field angle under incident wavelength respectively is 15 °, 13 °, 15 °.
From three layers of rectangular raster when incident wavelength is respectively 475nm, 525nm, 630nm, positive level diffraction efficiency with
The relationship (attached drawing 7) of angle of light, it can be seen that when the diffraction efficiency detraction with 20% calculates field angle, above three enters
Field angle under ejected wave length respectively is 16 °, 18 °, 20 °.
It is not difficult to find that the field angle of double-layered cot after analyzing above-mentioned three kinds of multilayered structures grating diffration angular spectrum
It is maximum in short wavelength's section, up to 27 °；The field angle wavelength uniformity of the double-deck triangular grating is good, all at 15 ° or so；Three layers of square
Shape grating can improve double-layered cot in the field angle of long wavelength's section, keep it average at 18 ° or so.It is most common at present to incline
For oblique parallelogram grating when the diffraction efficiency detraction with 20% calculates field angle, average field angle is at 15 ° or so, it is seen that more
The field angle of layer structure fringe has reached the demand of current augmented reality glasses grating.
Below in conjunction with the accompanying drawings and invention is further described in example, but protection scope of the present invention is not limited to down
Row example should include the full content in claims, and those skilled in the art is from one embodiment below
The full content in claim can be achieved.
A kind of multilayered structure grating can be used for augmented reality glasses --- the structural schematic diagram of double-layered cot such as Fig. 1
Shown, specific design structure is as follows：The period of upper layer and lower layer grating is 450nm；Upper layer rectangular raster is poly- using optics height
Object material, refractive index n=1.55 (when lambda1-wavelength λ=532nm), the high 230nm of tooth, duty ratio 39.66%；Middle layer uses
Optics high polymer material, refractive index n=1.55 (when lambda1-wavelength λ=532nm), 2.50 μm of thickness；Lower layer's rectangular raster is adopted
With optics high polymer material, refractive index n=1.72 (when lambda1-wavelength λ=532nm), tooth is 1.00 μm high, duty ratio
70.40%, left side wall offsets by 10nm to the left relative to upper layer rectangular raster left side wall；Basal layer uses optics high polymer material
Material, refractive index n=1.72 (when lambda1-wavelength λ=532nm).
A kind of multilayered structure grating can be used for augmented reality glasses --- the structural schematic diagram of the double-deck triangular grating is such as
Shown in Fig. 2, specific design structure is as follows：The period of upper layer and lower layer grating is 450nm；Upper layer triangular grating uses optics
High polymer material, refractive index n=1.55 (when lambda1-wavelength λ=532nm), tooth is 1 μm high, bottom edge 200nm, left base angle
36.90°；Middle layer uses optics high polymer material, refractive index n=1.55 (when lambda1-wavelength λ=532nm), 1.77 μ of thickness
m；Lower layer's triangular grating uses optics high polymer material, refractive index n=1.72 (when lambda1-wavelength λ=532nm), tooth height
1.00 μm, bottom edge 200nm, 53.40 ° of left base angle, left base angle vertex relative to the left base angle vertex of upper layer triangular grating to the left
Offset by 20nm；Basal layer uses optics high polymer material, refractive index n=1.72 (when lambda1-wavelength λ=532nm).
A kind of multilayered structure grating can be used for augmented reality glasses --- the structural schematic diagram of three layers of rectangular raster such as Fig. 3
Shown, specific design structure is as follows：The period of three layers of grating of upper, middle and lower is 450nm；Upper layer rectangular raster is high using optics
Polymer material, refractive index n=1.55 (when lambda1-wavelength λ=532nm), the high 230nm of tooth, duty ratio 40.25%；Among first
Layer uses optics high polymer material, refractive index n=1.55 (when lambda1-wavelength λ=532nm), 2.54 μm of thickness；Middle level rectangle
Grating uses optics high polymer material, and refractive index n=1.64 (when lambda1-wavelength λ=532nm), tooth is 1.00 μm high, duty ratio
23.85%, left side wall offsets by 20nm to the left relative to upper layer rectangular raster left side wall；Second middle layer is poly- using optics height
Object material, refractive index n=1.64 (when lambda1-wavelength λ=532nm), 2.02 μm of thickness；Lower layer's rectangular raster is high using optics
Polymer material, refractive index n=1.72 (when lambda1-wavelength λ=532nm), tooth is 1.00 μm high, duty ratio 23.64%, left side
Wall offsets by 20nm to the left relative to middle level rectangular raster left side wall；Basal layer uses optics high polymer material, refractive index n=
1.72 (when lambda1-wavelength λ=532nm).
Variation caused by above-mentioned different layers grating relative position dislocation has following influence：Short wavelength such as 475nm, it is average to misplace
Mobile 1nm diffraction efficiencies variation 1%；Medium wavelength such as 525nm, the average mobile 2nm diffraction efficiencies of dislocation change 1%；Long wavelength is such as
630nm, the average mobile 5nm diffraction efficiencies of dislocation change 1%.Misplace a certain distance, and the diffraction efficiency under each wavelength exists
When 10% or more, the trend that diffraction efficiency curve can substantially keep original is constant, and only each diffraction efficiency changes；If wrong
Position is apart from larger, for example diffraction efficiency only has 15% short wavelength 475nm at, that dislocation is moved 5nm diffraction efficiencies and will be dropped to
10% hereinafter, become be not original diffraction efficiency curve rule mixed and disorderly distribution curve, diffraction efficiency between 0 to 10% float
It is dynamic.
Existing semiconductor etching process is based on 12 cun and 8 cun of wafer, wherein the machining accuracy of 12 cun of wafers is reachable
Ten or twenty nanometer, so the offset of tens nanometer may be implemented completely in chromatography grating mask plate.
Claims (10)
1. a kind of multilayered structure grating can be used for augmented reality glasses, which is characterized in that the multilayered structure grating is by different foldings
The grating for penetrating rate material is directly formed by stacking, and every layer of grating refractive index by reducing close to basal layer to close to air layer successively.
2. a kind of multilayered structure grating can be used for augmented reality glasses according to claim 1, which is characterized in that every layer
Grating refractive index value range is between 1.4~1.9；The multilayered structure grating prints on the base layer, i.e., in planar optical waveguide,
For the coupling of light, being coupled into the light of planar optical waveguide need to transmit in planar optical waveguide, need to meet total reflection condition, to protect
It demonstrate,proves incident light and is more than reflection critical angle in the angle of diffraction of planar optical waveguide, every layer of screen periods are within 500nm.
3. a kind of multilayered structure grating can be used for augmented reality glasses according to claim 1, which is characterized in that every layer
The shape type of grating is selected from the grating of the processing easy to produce such as rectangular raster, triangular grating, trapezoidal grating, sinusoidal grating.
4. a kind of multilayered structure grating can be used for augmented reality glasses according to claim 1, which is characterized in that all
The shape type of grating is identical and cycle phase is same, in order to produce and process.
5. a kind of multilayered structure grating can be used for augmented reality glasses according to claim 4, which is characterized in that this is more
Layer structure fringe includes double-layered cot, is all made of optics high polymer material；The period of upper layer and lower layer grating is 450nm；
Upper layer rectangular raster refractive index is denoted as n1, the high 230nm of tooth, duty ratio 39.66%；Intermediate refractive index layer is denoted as n2,2.50 μ of thickness
m；Lower layer's rectangular raster refractive index is denoted as n3, and tooth is 1.00 μm high, and duty ratio 70.40%, left side wall is relative to upper layer rectangular light
Grid left side wall deviates 10nm to the left；Basal layer refractive index is denoted as n4；Wherein n4=n3, n1=n2, and n3 ＞ n2.
6. a kind of multilayered structure grating can be used for augmented reality glasses according to claim 5, which is characterized in that when entering
When penetrating light wavelength lambda=532nm, n1=1.55, n2=1.55, n3=1.72, n4=1.72.
7. a kind of multilayered structure grating can be used for augmented reality glasses according to claim 4, which is characterized in that described
Multilayered structure grating includes the double-deck triangular grating, is all made of optics high polymer material；The period of upper layer and lower layer grating is
450nm；Upper layer triangular grating refractive index is denoted as n1, and tooth is 1 μm high, bottom edge 200nm, 36.90 ° of left base angle；Intermediate refractive index layer
It is denoted as n2,1.77 μm of thickness；Lower layer's triangular grating refractive index is denoted as n3=1.72, and tooth is 1.00 μm high, bottom edge 200nm, left bottom
53.40 ° of angle, left base angle vertex offset by 20nm to the left relative to the left base angle vertex of upper layer triangular grating；Basal layer reflects
Rate is denoted as n4；Wherein n4=n3, n1=n2, and n3 ＞ n2.
8. a kind of multilayered structure grating can be used for augmented reality glasses according to claim 7, which is characterized in that when entering
When penetrating light wavelength lambda=532nm, n1=1.55, n2=1.55, n3=1.72, n4=1.72.
9. a kind of multilayered structure grating can be used for augmented reality glasses according to claim 5, which is characterized in that described
Multilayered structure grating includes three layers of rectangular raster, is all made of optics high polymer material；The period of three layers of grating of upper, middle and lower is
450nm；Upper layer rectangular raster refractive index is denoted as n1, the high 230nm of tooth, duty ratio 40.25%；First intermediate refractive index layer is denoted as
N2,2.54 μm of thickness；Middle level rectangular raster refractive index is denoted as n3, and tooth is 1.00 μm high, and duty ratio 23.85%, left side wall is opposite
In upper layer, rectangular raster left side wall deviates 20nm to the left；Second intermediate refractive index layer is denoted as n4,2.02 μm of thickness；Lower layer's rectangular light
Grid refractive index is denoted as n5, and tooth is 1.00 μm high, duty ratio 23.64%, left side wall relative to middle level rectangular raster left side wall to the left
Deviate 20nm；Basal layer refractive index is denoted as n6；Wherein n6=n5, n4=n3, n1=n2, and n5 ＞ n3 ＞ n2.
10. a kind of multilayered structure grating can be used for augmented reality glasses according to claim 9, which is characterized in that when
When lambda1-wavelength λ=532nm, n1=1.55, n2=1.55, n3=1.64, n4=1.64, n5=1.72, n6=1.72.
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