CN108385081B - Automatic coating device in two storehouses - Google Patents
Automatic coating device in two storehouses Download PDFInfo
- Publication number
- CN108385081B CN108385081B CN201810419105.9A CN201810419105A CN108385081B CN 108385081 B CN108385081 B CN 108385081B CN 201810419105 A CN201810419105 A CN 201810419105A CN 108385081 B CN108385081 B CN 108385081B
- Authority
- CN
- China
- Prior art keywords
- platform
- lifting
- cylinder
- horizontal
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Tunnel Furnaces (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
The invention discloses a double-bin automatic film plating device which is characterized by comprising a furnace body, a feeding mechanism and a discharging mechanism. According to the invention, the workpiece is placed on the lifting platform positioned in the feeding hole through the feeding mechanism, the lifting platform moves the workpiece into the furnace body to heat, so that the film is melted and flows into the workpiece hole to finish coating, the workpiece is pushed out of the discharging hole through the pushing device after coating is finished, the process is free from manual operation, the automation is realized, the problems in the prior art are solved, in addition, the feeding hole is blocked by the feeding device after the lifting platform carries the workpiece into the furnace body, the upper end of the feeding hole is blocked into a closed space by the lifting platform, and the coating effect is improved.
Description
Technical Field
The invention relates to a double-bin automatic film plating device.
Background
The film coating is a new technology for preparing a film for scientific research and actual production by utilizing a physical or chemical method and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like. Briefly, a method of evaporating or sputtering a metal, alloy or compound to solidify and deposit it on a coated object (called a substrate, substrate or base) is called a plating film.
In a coating device in the prior art, a layer of film is coated on a corresponding hole of a workpiece, and then the film is melted and flows into the corresponding hole by heating, so that coating is realized. The coating device has the defect that the material is needed to be manually and sequentially arranged every time, and the automation degree is low.
Disclosure of Invention
The invention aims to provide a double-bin automatic film plating device.
In order to solve the problems, the invention provides a double-bin automatic film plating device which is characterized by comprising a furnace body, a feeding mechanism and a discharging mechanism, wherein:
the furnace body is of a hollow structure with an inner cavity, and comprises a feeding hole, a discharging hole and a lifting platform, wherein the feeding hole is arranged at the top and is communicated with the inner cavity, the discharging hole is arranged on the side surface of the feeding hole and is communicated with the inner cavity, the lifting platform is arranged along two parallel inner walls of the inner cavity and is driven by a first lifting mechanism to do lifting movement, the lifting platform is contacted with the horizontal boss to partition the lifting platform into two closed spaces up and down, and the feeding hole and the discharging hole are respectively sealed in a movable mode through a first opening and closing door and a second opening and closing door;
the feeding mechanism is used for providing a workpiece into the feeding hole;
the discharging mechanism is used for outputting the workpiece through the discharging hole.
As a further improvement of the present invention, the inner cavity has a square structure, which is provided with two parallel first inner walls and two parallel second inner walls, and the lifting platform comprises:
the first platform is used for supporting a workpiece and is provided with two first side surfaces which are connected to the first inner wall in a sliding and sealing mode;
the two extending plates are arranged at the bottom of the first platform in a sliding connection mode and are symmetrically arranged, the two extending plates can be outwards opened or inwards contracted under the action of the driving device, and when the extending plates are opened, the extending plates can at least partially extend out of the second side face of the first platform and extend out of the distance from the second side face to the horizontal boss.
As a further improvement of the invention, the first opening and closing door is driven to rotate by the first rotating device and is driven to lift by the lifting oil cylinder or the lifting air cylinder, the first opening and closing door is also provided with two symmetrically arranged vacuum covers, at least two vacuum suckers are arranged at the bottom of each vacuum cover, and the vacuum covers are contacted with the upper end edge of the feeding hole through the outer edge of the bottom of each vacuum cover so as to block the feeding hole.
As a further improvement of the invention, the first lifting mechanism is a lifting cylinder or a lifting oil cylinder, and comprises a first cylinder body fixedly arranged at the bottom of the furnace body and a first cylinder arm capable of partially extending out of the first cylinder body and performing lifting movement, wherein the top of the first cylinder arm is fixed on the lower surface of the first platform and is positioned between two extending plates, and the first cylinder arm can push the first platform to move between a bottom stroke and a top stroke.
As a further improvement of the invention, the discharging mechanism is used for pushing the workpiece on the surface out of the discharging hole when the first platform is located at the bottom stroke, and comprises a first pushing device and a second pushing device, wherein the first pushing device is located in the furnace body and can be contacted with the side surface of the workpiece on the first platform and push the workpiece to horizontally move, and the second pushing device is located at the outer side of the furnace body and can receive the workpiece pushed by the first pushing device and horizontally move the workpiece out of the furnace body.
As a further improvement of the present invention, the driving device includes:
the connecting plates are respectively arranged at the bottoms of the two extending plates in a protruding way;
the first adjusting rod and the second adjusting rod are respectively connected to the connecting plate in a rotating way through a first pin shaft, and two free ends of the first adjusting rod and the second adjusting rod are connected together in a rotating way through a second pin shaft;
and the second lifting device is fixed on the second pin shaft.
As a further improvement of the invention, the second lifting device is a lifting cylinder or a lifting oil cylinder, and comprises a second cylinder body fixedly connected with the first cylinder arm through a horizontal connecting plate; and
the second pin shaft is fixed at the top of the second cylinder arm.
As a further improvement of the invention, the first pushing-out device comprises horizontal moving devices arranged on two parallel inner walls of the furnace body, the space between the horizontal moving devices can accommodate the first platform to vertically pass through, and the horizontal moving devices are provided with:
rotating shafts connected to the inner wall of the furnace body are rotated, wherein one rotating shaft is driven to rotate by a rotating motor;
the first conveying wheel is fixed on the rotating shaft;
a first tensioning belt for tensioning the belt connected between the two first conveying wheels;
a horizontal toggle lever secured to two parallel first tension bands, the work piece on the first platform on the bottom stroke being at least partially aligned in a horizontal direction with the horizontal toggle lever.
As a further development of the invention, the second pushing-out device comprises two second conveying wheels parallel to the first conveying wheels, and a second tensioning belt for tensioning on the two second conveying wheels, the minimum horizontal distance between the second conveying wheels and the first conveying wheels being less than or equal to one half of the horizontal dimension of the workpiece.
As a further improvement of the invention, the inner cavity is also provided with
An air inlet device for inputting air into the space above the horizontal boss; and/or
And the air extracting device is used for extracting air into the space above the horizontal boss.
The invention has the beneficial effects that the workpiece is placed on the lifting platform positioned in the feeding hole through the feeding mechanism, the lifting platform moves the workpiece into the furnace body to heat, so that the film is melted and flows into the workpiece hole to finish coating, the workpiece is pushed out of the discharging hole through the pushing device after coating, the process does not need manual operation, the automation is realized, the problems encountered in the prior art are solved, in addition, the feeding hole is blocked by the feeding device after the lifting platform carries the workpiece into the furnace body, the upper end of the lifting platform is blocked into a closed space by the lifting platform, and the coating effect is improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
wherein: 2-a furnace body; 200-inner cavity; 202-a feed hole; 204, a discharge hole; 206-horizontal boss; 208-lifting platform; 210-a first opening and closing door; 212-a second opening/closing door; 214-a first platform; 216-extending the plate; 218-a vacuum cap; 220-vacuum chuck; 222-a first cylinder; 224—a first cylinder arm; 228—a first adjustment lever; 230-a second adjusting rod; 232-a horizontal connection plate; 234-a second cylinder; 236-a second cylinder arm; 238-an air intake device; 240-an air extraction device; 4-a feeding mechanism; 6-a discharging mechanism; 602-a first ejector; 604-a second ejector; 608-horizontal movement means; 610-a spindle; 612—a first conveying wheel; 614-first tensioning strap; 616—horizontal levers; 618-a second conveyor wheel; 620-a second tensioning band.
Detailed Description
The following describes the embodiments of the present invention in further detail.
As shown in fig. 1, the invention comprises a furnace body 2, a feeding mechanism 4 and a discharging mechanism 6, wherein:
the furnace body 2 is a hollow structure with an inner cavity 200, and comprises a feeding hole 202 arranged at the top and communicated with the inner cavity 200, a discharging hole 204 positioned at the side surface of the feeding hole and communicated with the inner cavity 200, horizontal bosses 206 arranged along two parallel inner walls of the inner cavity 200, and a lifting platform 208 driven by a first lifting mechanism to move up and down, wherein the lifting platform 208 is contacted with the horizontal bosses 206 to partition the lifting platform 208 into two closed spaces up and down, and the feeding hole 202 and the discharging hole 204 are respectively sealed movably through a first opening and closing door 210 and a second opening and closing door 212;
the feeding mechanism 4 is used for providing workpieces into the feeding hole 202;
the discharging mechanism 6 is used for outputting the workpiece through the discharging hole 204.
As a further improvement of the present invention, the inner cavity 200 has a square structure, which is provided with two parallel first inner walls and two parallel second inner walls, and the lifting platform includes:
a first platform 214 for supporting a workpiece, the first platform 214 having two first sides slidably and sealingly connected to the first inner wall;
the two extending plates 216 are slidably connected to the bottom of the first platform 214 and symmetrically arranged, and the two extending plates 216 can be outwards opened or inwards contracted under the action of the driving device, and when the extending plates are opened, at least part of the extending plates can extend out of the second side surface of the first platform 214, and the extending dimension of the extending plates is larger than the distance from the second side surface to the horizontal boss 206.
As a further improvement of the present invention, the first shutter door 210 is driven to rotate by a first rotating device, and is driven to lift by a lifting cylinder or a lifting cylinder, the first shutter door 210 is further provided with two symmetrically arranged vacuum covers 218, at least two vacuum sucking discs 220 are arranged at the bottom of the vacuum covers 218, and the vacuum covers 218 contact with the upper end edge of the feeding hole 202 through the outer edge of the bottom of the vacuum covers 218 so as to block the feeding hole 202.
As a further improvement of the present invention, the first lifting mechanism is a lifting cylinder or a lifting oil cylinder, which includes a first cylinder body 222 fixedly disposed at the bottom of the furnace body 2, and a first cylinder arm 224 capable of partially extending out of the first cylinder body 222 and performing lifting movement, wherein the top of the first cylinder arm 224 is fixed on the lower surface of the first platform 214 and is located between the two extending plates 216, and the first cylinder arm 224 can push the first platform 214 to move between a bottom stroke and a top stroke.
As a further improvement of the present invention, the discharging mechanism 6 is configured to push the workpiece on the surface of the first platform 214 out of the discharging hole 204 when the first platform 214 is located on the bottom stroke, and includes a first pushing device 602 and a second pushing device 604, where the first pushing device 602 is located in the furnace body 2 and can contact with the side surface of the workpiece on the first platform 214 and push the workpiece to perform a horizontal movement, and the second pushing device 604 is located outside the furnace body 2 and can receive the workpiece pushed by the first pushing device 602 and horizontally move the workpiece out of the furnace body 2.
As a further improvement of the present invention, the driving device includes:
connecting plates respectively protruding from the bottoms of the two protruding plates 216;
a first adjusting rod 228 and a second adjusting rod 230 which are respectively connected to the connecting plate in a rotating way through a first pin shaft, and two free ends of the first adjusting rod 228 and the second adjusting rod 230 are connected together in a rotating way through a second pin shaft;
and the second lifting device is fixed on the second pin shaft.
As a further improvement of the present invention, the second lifting device is a lifting cylinder or a lifting cylinder, which includes a second cylinder 234 fixedly connected to the first cylinder arm 224 through a horizontal connecting plate 232; and
a second cylinder arm 236 capable of extending at least partially from the second cylinder 234, the second pin being fixed to the top of the second cylinder arm 236.
As a further development of the invention, the first pushing-out device 602 comprises horizontal moving devices 608 arranged on two parallel inner walls of the furnace body 2, the distance between the horizontal moving devices being capable of accommodating the first platform 214 vertically passing through, and each of the horizontal moving devices is provided with:
rotating shafts 610 connected to the inner wall of the furnace body 2 are rotated, wherein one rotating shaft 610 is driven to rotate by a rotating motor;
a first conveying wheel 612 fixed on the rotating shaft 610;
for tensioning a first tensioning belt 614 connected between two first conveying wheels 612;
a horizontal toggle 616 fixed to two parallel first tensioning bands 614, the work piece on the first platform 214 on the bottom stroke being at least partially aligned in a horizontal direction with the horizontal toggle 616.
As a further development of the invention, the second ejector 604 comprises two second conveying wheels 618 parallel to the first conveying wheels 612, and a second tensioning belt 620 for tensioning on the two second conveying wheels 618, the minimum horizontal distance between the second conveying wheels 618 and the first conveying wheels 612 being less than or equal to one half of the horizontal dimension of the workpiece.
As a further improvement of the invention, the inner cavity 200 is also provided with
An inlet means 238 for inputting a gas into a space above the horizontal boss 206; and/or
And a suction device 240 for sucking air into the space above the horizontal boss 206.
The specific principle of the invention is as follows:
(1) The first opening and closing door 210 has two vacuum covers 218, one vacuum cover 218 is located above the feed hole 202, one vacuum cover 218 is located outside the furnace body 2, and the vacuum cover 218 located outside the furnace body 2 firstly sucks a workpiece through the vacuum chuck 220;
(2) The rotating device drives the first opening and closing door 210 to rotate 180 degrees to enable the two vacuum covers 218 to change positions, at the moment, the vacuum cover 218 which absorbs the workpiece moves to the position right above the feeding hole 202, and the rotating device generally adopts a motor;
(3) The vacuum cap 218 is lowered to fit over the upper edge of the feed hole 202, thereby closing the feed hole 202;
(4) The first cylinder arm 224 is raised so that the first platform 214 is raised into contact with the workpiece below the vacuum cap 218, and the vacuum chuck 220 releases suction so that the workpiece falls onto the first platform 214;
(5) The second cylinder arm 236 is raised such that the extension plate 216 extends outwardly beyond the horizontal boss 206;
(6) The first cylinder arm 224 descends until the extension plate 216 contacts the horizontal boss 206, so that the lifting platform 208 divides the inner cavity 200 of the furnace body 2 into two sealed spaces;
(7) The space above the lifting platform 208 is pumped and heated by the pumping device 240, so that coating is completed;
(8) The air inlet device 238 is used for air inlet to enable the inner cavity 200 to recover the atmospheric pressure;
(9) The second cylinder arm 236 is lowered to retract the extension plate 216 inwardly;
(10) The first cylinder arm 224 descends so as to pass through the gap of the horizontal boss 206 and falls into its bottom stroke;
(11) The rotating motor drives the first conveying wheel 612 to rotate, so that the first tensioning belt 614 is driven to horizontally move, and a horizontal deflector rod 616 fixed on the first tensioning belt 614 moves along with the first tensioning belt 614, so that the workpiece is driven to horizontally move until the workpiece part moves onto the second tensioning belt 620;
(12) The other rotating motor drives the second conveying wheel 618 to rotate, so that the second tensioning belt 620 is driven to move, and the workpiece is conveyed out of the discharging hole 204;
(13) The first cylinder arm 224 is raised and cycled as such.
The above example is only one embodiment of the present invention, which is described in detail and is not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (8)
1. The utility model provides an automatic coating film device in two storehouses, its characterized in that includes furnace body (2), feeding mechanism (4) and discharge mechanism (6), wherein:
the furnace body (2) is of a hollow structure with an inner cavity (200), and comprises a feeding hole (202) arranged at the top and communicated with the inner cavity (200), a discharging hole (204) arranged at the side surface of the feeding hole and communicated with the inner cavity (200), a horizontal boss (206) arranged along two parallel inner walls of the inner cavity (200) and a lifting platform (208) driven by a first lifting mechanism to move up and down, wherein the lifting platform (208) is contacted with the horizontal boss (206) to partition the lifting platform (208) into two closed spaces up and down, and the feeding hole (202) and the discharging hole (204) are respectively sealed in a movable mode through a first opening and closing door (210) and a second opening and closing door (212);
the feeding mechanism (4) is used for providing workpieces into the feeding holes (202);
the discharging mechanism (6) is used for outputting the workpiece through the discharging hole (204);
the inner chamber (200) is square structure, and it is equipped with two parallel first inner walls and two parallel second inner walls, lift platform includes:
a first platform (214) for supporting a workpiece, the first platform (214) being provided with two first sides which are slidably and sealingly connected to the first inner wall;
the two extending plates (216) are arranged at the bottom of the first platform (214) in a sliding connection mode and are symmetrically arranged, the two extending plates (216) can be outwards expanded or inwards contracted under the action of the driving device, and when the extending plates are outwards expanded, the extending plates can at least partially extend out of the second side face of the first platform (214) and the extending dimension is larger than the distance from the second side face to the horizontal boss (206);
the discharging mechanism (6) is used for pushing out workpieces on the surface of the first platform (214) from the discharging hole (204) when the first platform is located on the bottom stroke, and comprises a first pushing device (602) and a second pushing device (604), wherein the first pushing device (602) is located in the furnace body (2) and can be in contact with the side face of the workpiece on the first platform (214) and push the workpiece to horizontally move, and the second pushing device (604) is located on the outer side of the furnace body (2) and can receive the workpieces pushed out by the first pushing device (602) and horizontally move the workpieces out of the furnace body (2).
2. The double-bin automatic film plating device according to claim 1, wherein the first opening and closing door (210) is driven to rotate by a first rotating device, and is driven to lift by a lifting cylinder or a lifting cylinder, the first opening and closing door (210) is further provided with two symmetrically arranged vacuum covers (218), at least two vacuum chucks (220) are arranged at the bottom of the vacuum covers (218), and the vacuum covers (218) are contacted with the upper end edges of the feeding holes (202) through the outer edges of the bottom of the vacuum covers to block the feeding holes (202).
3. The double-bin automatic film plating device according to claim 1, wherein the first lifting mechanism is a lifting cylinder or a lifting oil cylinder, and comprises a first cylinder body (222) fixedly arranged at the bottom of the furnace body (2), and a first cylinder arm (224) capable of partially extending out of the first cylinder body (222) and performing lifting movement, wherein the top of the first cylinder arm (224) is fixed on the lower surface of the first platform (214) and is positioned between the two extending plates (216), and the first cylinder arm (224) can push the first platform (214) to move between a bottom stroke and a top stroke.
4. A dual-bin automatic film plating device according to claim 3, wherein said driving means comprises:
connecting plates respectively protruding from the bottoms of the two protruding plates (216);
a first adjusting rod (228) and a second adjusting rod (230) which are respectively connected to the connecting plate in a rotating way through a first pin shaft, and two free ends of the first adjusting rod (228) and the second adjusting rod (230) are connected together in a rotating way through a second pin shaft;
and the second lifting device is fixed on the second pin shaft.
5. The double-bin automatic film plating device according to claim 4, wherein the second lifting device is a lifting cylinder or a lifting oil cylinder, and comprises a second cylinder body (234) fixedly connected to the first cylinder arm (224) through a horizontal connecting plate (232); and
and a second cylinder arm (236) capable of extending at least partially out of the second cylinder (234), the second pin being fixed to the top of the second cylinder arm (236).
6. The double-bin automatic film plating device according to claim 5, wherein the first pushing-out device (602) comprises horizontal moving devices (608) arranged on two parallel inner walls of the furnace body (2), a space between the horizontal moving devices (608) can accommodate the first platform (214) to vertically pass through, and the horizontal moving devices (608) are provided with:
a rotating shaft (610) rotatably connected to the inner wall of the furnace body (2), wherein one rotating shaft (610) is driven to rotate by a rotating motor;
a first conveying wheel (612) fixed on the rotating shaft (610);
for tensioning a first tensioning belt (614) connected between two first conveying wheels (612);
a horizontal shift lever (616) fixed to two parallel first tensioning bands (614), the work piece on the first platform (214) on the bottom stroke being at least partially aligned in a horizontal direction with the horizontal shift lever (616).
7. A double-bin automatic film coating apparatus according to claim 6, characterized in that the second pushing-out device (604) comprises two second conveying wheels (618) parallel to the first conveying wheels (612), and a second tensioning belt (620) for tensioning on the two second conveying wheels (618), the minimum horizontal distance between the second conveying wheels (618) and the first conveying wheels (612) being less than or equal to one half of the horizontal dimension of the workpiece.
8. The double-bin automatic film plating device according to claim 7, wherein the inner cavity (200) is further provided with
An inlet means (238) for inputting a gas into a space located above the horizontal boss (206); and/or
And an air extraction device (240) for extracting air into the space above the horizontal boss (206).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810419105.9A CN108385081B (en) | 2018-05-04 | 2018-05-04 | Automatic coating device in two storehouses |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810419105.9A CN108385081B (en) | 2018-05-04 | 2018-05-04 | Automatic coating device in two storehouses |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108385081A CN108385081A (en) | 2018-08-10 |
| CN108385081B true CN108385081B (en) | 2024-01-12 |
Family
ID=63070609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810419105.9A Active CN108385081B (en) | 2018-05-04 | 2018-05-04 | Automatic coating device in two storehouses |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108385081B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111493436A (en) * | 2020-05-21 | 2020-08-07 | 东莞市汇齐新材料有限公司 | Automatic activation and lamination integrated machine for waterproof film |
Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3502234A (en) * | 1968-06-07 | 1970-03-24 | Westinghouse Electric Corp | System for controlling the entry and exit of workpieces into and from a heating furnace |
| US5000114A (en) * | 1988-04-11 | 1991-03-19 | Mitsubishi Jukogyo Kabushiki Kaisha | Continuous vacuum vapor deposition system having reduced pressure sub-chambers separated by seal devices |
| JP2000133693A (en) * | 1998-08-19 | 2000-05-12 | Shibaura Mechatronics Corp | Drive mechanism for vacuum device and vacuum device |
| TW391987B (en) * | 1995-07-19 | 2000-06-01 | Hitachi Ltd | Vacuum processing apparatus and semiconductor manufacturing line using the same |
| CA2329566A1 (en) * | 1999-12-28 | 2001-06-28 | Asm Microchemistry Oy | Apparatus for growing thin films |
| RU2338006C2 (en) * | 2002-05-24 | 2008-11-10 | Шотт Аг | Device for application of coating by method of chemical deposition from gas phase |
| TW201209202A (en) * | 2010-08-23 | 2012-03-01 | Hon Hai Prec Ind Co Ltd | Vacuum coating system |
| CN102417117A (en) * | 2011-08-24 | 2012-04-18 | 湖北星聚工业印刷设备有限公司 | Plane screen printing machine and feeding device and method thereof |
| CN102851459A (en) * | 2012-08-14 | 2013-01-02 | 苏州汇科机电设备有限公司 | Stepping automatic feeding device of heat-treatment furnace |
| CN102936100A (en) * | 2012-11-29 | 2013-02-20 | 肇庆市科润真空设备有限公司 | Rotary type continuous coating device and method thereof |
| TWM509425U (en) * | 2015-06-23 | 2015-09-21 | Uvat Technology Co Ltd | Continuous vacuum coating equipment with lifting load |
| CN205045491U (en) * | 2015-07-17 | 2016-02-24 | 惠州易晖能源科技股份有限公司 | A substrate auto -control handling system for physical vapor deposition coating film |
| CN205170960U (en) * | 2015-10-26 | 2016-04-20 | 福建钢泓金属科技股份有限公司 | Full -automatic vacuum coating device |
| CN106005548A (en) * | 2016-07-22 | 2016-10-12 | 重庆市鸣浩电子科技有限公司 | Mobile phone vacuum film pasting system with automatic loading and unloading device |
| CN205933921U (en) * | 2016-08-09 | 2017-02-08 | 扬州金盛炉业有限公司 | Multi -purpose stove in vacuum |
| CN106882596A (en) * | 2017-03-23 | 2017-06-23 | 京东方科技集团股份有限公司 | Substrate loading and unloading system, substrate charging method and substrate baiting method |
| CN208136330U (en) * | 2018-05-04 | 2018-11-23 | 昆山木利机械设计有限公司 | A kind of double storehouse automatic film coating devices |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6841033B2 (en) * | 2001-03-21 | 2005-01-11 | Nordson Corporation | Material handling system and method for a multi-workpiece plasma treatment system |
-
2018
- 2018-05-04 CN CN201810419105.9A patent/CN108385081B/en active Active
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3502234A (en) * | 1968-06-07 | 1970-03-24 | Westinghouse Electric Corp | System for controlling the entry and exit of workpieces into and from a heating furnace |
| US5000114A (en) * | 1988-04-11 | 1991-03-19 | Mitsubishi Jukogyo Kabushiki Kaisha | Continuous vacuum vapor deposition system having reduced pressure sub-chambers separated by seal devices |
| TW391987B (en) * | 1995-07-19 | 2000-06-01 | Hitachi Ltd | Vacuum processing apparatus and semiconductor manufacturing line using the same |
| JP2000133693A (en) * | 1998-08-19 | 2000-05-12 | Shibaura Mechatronics Corp | Drive mechanism for vacuum device and vacuum device |
| CA2329566A1 (en) * | 1999-12-28 | 2001-06-28 | Asm Microchemistry Oy | Apparatus for growing thin films |
| RU2338006C2 (en) * | 2002-05-24 | 2008-11-10 | Шотт Аг | Device for application of coating by method of chemical deposition from gas phase |
| TW201209202A (en) * | 2010-08-23 | 2012-03-01 | Hon Hai Prec Ind Co Ltd | Vacuum coating system |
| CN102417117A (en) * | 2011-08-24 | 2012-04-18 | 湖北星聚工业印刷设备有限公司 | Plane screen printing machine and feeding device and method thereof |
| CN102851459A (en) * | 2012-08-14 | 2013-01-02 | 苏州汇科机电设备有限公司 | Stepping automatic feeding device of heat-treatment furnace |
| CN102936100A (en) * | 2012-11-29 | 2013-02-20 | 肇庆市科润真空设备有限公司 | Rotary type continuous coating device and method thereof |
| TWM509425U (en) * | 2015-06-23 | 2015-09-21 | Uvat Technology Co Ltd | Continuous vacuum coating equipment with lifting load |
| CN205045491U (en) * | 2015-07-17 | 2016-02-24 | 惠州易晖能源科技股份有限公司 | A substrate auto -control handling system for physical vapor deposition coating film |
| CN205170960U (en) * | 2015-10-26 | 2016-04-20 | 福建钢泓金属科技股份有限公司 | Full -automatic vacuum coating device |
| CN106005548A (en) * | 2016-07-22 | 2016-10-12 | 重庆市鸣浩电子科技有限公司 | Mobile phone vacuum film pasting system with automatic loading and unloading device |
| CN205933921U (en) * | 2016-08-09 | 2017-02-08 | 扬州金盛炉业有限公司 | Multi -purpose stove in vacuum |
| CN106882596A (en) * | 2017-03-23 | 2017-06-23 | 京东方科技集团股份有限公司 | Substrate loading and unloading system, substrate charging method and substrate baiting method |
| CN208136330U (en) * | 2018-05-04 | 2018-11-23 | 昆山木利机械设计有限公司 | A kind of double storehouse automatic film coating devices |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108385081A (en) | 2018-08-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0354294A2 (en) | Carousel-type apparatus for coating substrates | |
| CN102936100A (en) | Rotary type continuous coating device and method thereof | |
| CN114986146B (en) | Automatic assembly equipment suitable for waterproof ventilation valve | |
| US10612130B2 (en) | Vacuum processing apparatus | |
| CN108385081B (en) | Automatic coating device in two storehouses | |
| CN108315695B (en) | Intelligent vacuum coating mechanism | |
| CN202968686U (en) | Rotary continuous coating device | |
| US4538399A (en) | Apparatus for evacuating and sealing rectangular packages | |
| CN108315694B (en) | Automatic change coating film mechanism | |
| CN110520283A (en) | The cooling means and cooling device of formed products | |
| CN204125527U (en) | A kind of both arms auto loading formula Sputting film-plating apparatus | |
| CN208136330U (en) | A kind of double storehouse automatic film coating devices | |
| JP4702867B2 (en) | Vacuum processing equipment | |
| CN214830638U (en) | Single-chamber magnetron sputtering vacuum coating machine | |
| CN214844323U (en) | Hot melting machine for manufacturing plywood test sample | |
| CN216504880U (en) | Automatic ring machine of formula of expanding | |
| CN101844270B (en) | Non-destructive insulated container production facility | |
| CN1281781C (en) | Sputtering method | |
| CN219886167U (en) | Continuous resistance electron beam evaporation coating device | |
| CN206997018U (en) | A kind of apparatus for coating and film layer Preparation equipment | |
| CN218699983U (en) | Auxiliary mold opening device of ceramic grouting mold | |
| CN112885626B (en) | Machining method of vacuum switch assembly | |
| CN205741193U (en) | A kind of delivery material device and Sealing Arrangement | |
| KR200236672Y1 (en) | Producing Apparatus For Organic Electro Luminescence Display | |
| TWI531022B (en) | Synchronization of fast vacuum process equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20231212 Address after: Room 301, 3rd Floor, No. 7 Kexing Road, Fengtai District, Beijing, 100000 (Park) Applicant after: HUAYIXING (BEIJING) TECHNOLOGY Co.,Ltd. Address before: Room 1305, Liancai business center, 18 Chunxu Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Applicant before: KUNSHAN MULI MACHINERY DESIGN Co.,Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |