CN108342707B - Curved surface particle source - Google Patents

Abstract

The invention discloses a curved surface particle source, which comprises a curved surface discharge target, a water cooling jacket, a binding post, an insulating jacket, a magnetic boot, (a plurality of groups of screens, an air inlet and a fixing component, wherein the curved surface discharge target is connected with negative voltage through the binding post to generate glow discharge, the shape of an electric discharge electrode is affected by the shape of an electron beam converging to generate a hollow cathode discharge effect, an anode can be a water cooling air inlet pipe or a screen, electrons can be received by positively charging the anode, the particles can be output in an accelerating way, the screen can be negatively charged and can be used as an extraction electrode of the particles, the three electrodes are matched, a large number of high-energy particles can be obtained, the discharge cathode is formed by splicing a plurality of groups of metal substrates and can be fixed on the water cooling jacket of a water cooling coil pipe through bolts, the insulating jacket can realize insulation among all the components, and the magnetic boot component is internally provided with a magnet. The invention provides high-energy particles for the preparation process of the pvd coating by utilizing the hollow cathode effect in the annular cathode discharge process.

Description

A surface particle source

Technical field

The invention belongs to the technical field of vacuum coating, and specifically refers to a curved surface particle source.

Background technique

Physical vapor deposition (PVD) mainly changes a certain physical state (solid state into gaseous state, solid state into overflowable atomic state) through physical processes such as evaporation, laser irradiation or gas discharge, and deposits The process on the surface of the workpiece to be plated. The state of the raw materials during the physical vapor deposition process has a great impact on the quality of the film-forming coating. For example: the materials deposited during the evaporation coating process are vaporized materials. The coating can only be deposited using the larger free path of gas atoms under high vacuum (10 ^-3 Pa). The deposited atomic energy is low and the coating quality is relatively low. Poor; magnetron sputtering (glow discharge) deposits materials sputtered by ionized inert gas bombardment with low ionization rate, low energy of sputtered atoms, and the formed coating structure is loose; arc ion plating (arc discharge) is achieved by The arc discharge between the electrodes ionizes and deposits particles with high energy hot electrons, but large particles are accompanied during the discharge process, which has an impact on the structure and performance of the coating.

At this stage, the physical vapor deposition process can only obtain high-energy particles through ion sources. However, there are two problems with the current ion source: First, the power of the ion source is low and it cannot form a large beam ion source (the conventional ion source discharge current is between 0.1-10A, and the plasma density is very low), causing deposition The rate is extremely low; on the other hand, the current ion source ionization objects are mainly inert gases (Ar) and reactive gases (C ₂ H ₂ ), and cannot directly ionize deposited metal or non-metal atoms (Ti, Si). dissociation.

Diamond-like carbon film has many excellent physical and chemical properties, such as high hardness, low friction coefficient, excellent wear resistance, high dielectric constant, high breakdown voltage, wide band gap, chemical inertness and Biocompatibility, etc. After years of development, the application of DLC films in many fields has also entered the stage of practical and industrial production. However, there are still many problems in the preparation process of diamond-like coatings.

The existing DLC deposition technologies are mainly physical vapor deposition (PVD) and chemical vapor deposition (CVD). PVD mainly includes ion beam deposition (IBD), magnetron sputtering, multi-arc ion plating, pulse laser deposition, etc. CVD includes thermal Silk chemical vapor deposition and plasma chemically enhanced vapor deposition (PECVD) all have some problems: ion beam deposition has a low deposition rate due to low graphite sputtering rate; magnetron sputtering deposition has a low sputtering rate on the one hand and a low deposition rate on the other. On the one hand, low atomic energy leads to loose structure and low hardness; a large number of carbon particles are produced during the multi-arc ion plating deposition process; pulse laser deposition has high energy consumption, poor coating uniformity, and small effective deposition area; hot wire vapor deposition technology has high deposition temperature, It greatly limits the range of matrix materials; although PECVD effectively reduces the reaction temperature, the deposition efficiency during the deposition process is low, the carbon atom ionization rate is low, and the film quality structure is not dense enough.

The existing carbon particle sources mainly include gaseous carbon particle sources, magnetron sputtering sources, multi-arc particle carbon particle sources, laser carbon particle sources, etc. Among them, gaseous carbon particle sources mainly use ion sources and other plasma devices to treat carbon particles. Hydrogen gas is ionized. The magnetron sputtering source refers to the magnetron sputtering graphite target, which provides carbon particles for deposition. The multi-arc ion plating carbon particle source performs arc discharge on the surface of the graphite target or metal carbide target; among which the gaseous carbon The particle source requires ionized gas. On the one hand, the ionization rate is low. On the other hand, during the ionization process, carbon particles will be deposited on the source, which will affect the stability of the discharge process and the continuity of production, and requires frequent manual cleaning; The low deposition rate and low ionization rate of the magnetron sputtering source, as well as the characteristics of graphite discharge from the multi-arc ion plating carbon particle source, and the presence of large particles during the discharge process have affected the application of the multi-arc ion plating carbon particle source.

Contents of the invention

The technical problem to be solved by the embodiments of the present invention is to provide a curved particle source that can be deposited efficiently and has a high ionization rate, which can be used as a metal particle source, a gas ion source, and as a carbon source for the diamond-like coating functional layer. Particle source.

In order to achieve the above object, the technical solution of the present invention is to include a particle source body. The particle source body includes a magnetic shoe assembly, an insulating sleeve assembly, a target material, an electrode and a water-cooling jacket. The target material is thermally conductively and fixedly connected to the inside of the water-cooling jacket. , the target material includes a first curved surface discharge target and a second target curved surface discharge target that are symmetrically distributed with each other, the magnetic shoe assembly includes a first magnetic shoe assembly and a second magnetic shoe assembly, the first magnetic shoe assembly and the second magnetic shoe assembly are respectively arranged on the outside of the water-cooling jacket corresponding to the first curved surface discharge target and the second target curved surface discharge target through an insulating sleeve assembly. The first curved surface discharge target and the second curved surface discharge target A first opening and a second opening are respectively provided between both ends of the material. The first curved surface discharge target and the second target curved surface discharge target are composed of multiple groups of metal substrate tiles that can be surface-composited with non-metallic materials, so The internal cavity of the target constitutes a gas ionization zone, the first opening of the curved target constitutes a process gas inlet, and the second opening of the curved target constitutes a particle exit port; the curved surface An air inlet pipe is provided at the first opening of the target, and an air inlet hole corresponding to the internal cavity of the target is provided on the side wall of the air inlet pipe; the first curved surface discharge target and the second target curved surface discharge target When a negative voltage is connected, a glow discharge will be generated. Affected by the shape of the target, the electron beams will converge to produce a hollow cathode discharge effect; the outer end of the second opening is provided with two sets of screens spaced apart from each other, among which the ones close to the second opening The screen is an anode screen connected to positive voltage, and the other set of screens is an outlet screen connected to negative voltage.

It is further provided that the arc angle of the second opening is greater than the arc angle of the first opening.

It is further provided that both the first magnetic shoe assembly and the second magnetic shoe assembly include a back plate and a plurality of magnets fixedly arranged on the back plate and arranged in sequence, and the adjacent magnets are magnetically arranged in opposite directions, and the first magnets are arranged in opposite directions. The magnetic shoe assembly and the second magnetic shoe assembly form a closed magnetic field at the first opening to inhibit the overflow of particles, and form a divergent magnetic field at the second opening to facilitate the ionization and overflow of particles.

It is further provided that the metal substrate tile of the target material is one of titanium, chromium, tungsten, copper, aluminum or an alloy thereof.

The present invention also provides a second structural form, that is, a diamond-like coating central anode curved surface particle source, including a particle source main body, which includes a magnetic shoe assembly, an insulating sleeve assembly, a target material, an electrode, and a Water-cooling jacket, the heat conduction of the target material is fixedly connected to the inside of the water-cooling jacket, the target material is a curved discharge target with an opening on one side, the internal cavity of the curved discharge target constitutes a gas ionization zone, and the curved surface The opening of the discharge target constitutes the exit port of the particles, and the magnetic shoe assembly is arranged on the outside of the water-cooling jacket corresponding to the curved discharge target through the insulating sleeve assembly.

The center of the gas ionization zone inside the curved surface discharge target is provided with a central anode air inlet pipe arranged along the axial direction of the curved surface discharge target and connected to a positive voltage. The side wall of the central anode air inlet pipe is provided with multiple There are two air inlets, and both sides of the central anode air inlet pipe are connected with refrigerant seats for heat dissipation of the central anode air inlet pipe. The outer end of the opening of the curved discharge target is provided with a lead-out screen that is connected to a negative voltage.

It is further configured that the magnetic shoe assembly includes a back plate and a plurality of magnets fixedly arranged on the back plate and arranged in sequence, and the adjacent magnets are magnetically oppositely arranged, so that a closed magnetic field is formed between the adjacent magnets, close to the curved surface The magnets on both sides of the opening of the discharge target have the same magnetic properties, forming a divergent magnetic field at the opening, which is helpful for the ionization and overflow of particles.

It is further set that the arc angle of the opening of the curved discharge target is 30°-90°.

The present invention also provides a third structural form, that is, a diamond-like coating double mesh curved surface particle source, including a carbon particle source main body, and the carbon particle source main body includes a magnetic shoe assembly, an insulating sleeve assembly, and a target material. , electrode and water-cooling jacket, the heat conduction of the target material is fixedly connected to the inside of the water-cooling jacket, the target material is a curved discharge target with an opening on one side, and the internal cavity of the curved discharge target constitutes a gas ionization zone , the opening of the curved discharge target constitutes the exit port of the particles, and the magnetic shoe assembly is arranged on the outside of the water-cooling jacket corresponding to the curved discharge target through the insulating sleeve assembly,

The center of the internal gas ionization zone of the curved surface discharge target is provided with a central air inlet pipe along the axial direction of the curved surface discharge target. The side walls of the central air inlet pipe are provided with a plurality of air outlets. The central air inlet pipe Both sides of the target are connected with water-cooling seats for heat dissipation of the central air inlet pipe. The outer end of the opening of the curved discharge target is provided with two sets of screens spaced apart from each other. The screen close to the opening is an anode connected to a positive voltage. The other set of screens is the lead-out screen that is connected to the negative voltage.

It is further provided that the magnetic shoe assembly includes a back plate and a plurality of magnets fixedly arranged on the back plate and arranged in sequence, and the adjacent magnets are magnetically oppositely arranged, so that a closed magnetic field is formed between the adjacent magnets, close to the curved surface The magnets on both sides of the opening of the discharge target have the same magnetic properties, forming a divergent magnetic field at the opening, which is helpful for the ionization and overflow of particles.

The innovative mechanism of the present invention is: connecting the curved surface discharge target to a negative voltage through a connecting post will produce glow discharge. Affected by the shape of the curved surface discharge target, the electron beam converges to produce a hollow cathode discharge effect. The anode can be the central anode air inlet pipe. It can also be an anode screen. The anode can be positively charged to receive electrons and accelerate particle output. The screen can be negatively charged and can be used as an extraction electrode for particles. The cooperation of the three electrodes can obtain a large number of high-energy particles. The discharge cathode can be Multiple sets of metal substrates that can be composited with non-metallic materials are spliced and fixed on the water-cooling jacket. Multiple sets of metal substrates can also be spliced and fixed on the water-cooling jacket. The insulating sleeve is mainly used to insulate each component. The magnetic shoe assembly has built-in magnets. . The invention utilizes the hollow cathode effect in the annular cathode discharge process to provide high-energy particles for the diamond-like coating.

Compared with the existing technology, the diamond-like coating particle source provided by the present invention has the following substantial differences and significant improvements:

1) The cathode target is fixed on the water-cooling tube using metal substrate tiles and metal substrate tile composite (bonding) non-metallic material tile-type splicing and mechanical fixation. On the one hand, it can efficiently cool the target material, and on the other hand, the metal and metal By co-sputtering with non-metals, high-energy metal particles, non-metal particles and metal-non-metal composite particles can be obtained, effectively solving the problem of internal stress in the coating.

2) The curved cathode design can be equipped with multiple closed magnet groups, which can efficiently utilize the target material and improve the ionization effect.

3) Annular design, large beam of high-energy electrons converge, and efficient sputtering of ionized particles.

4) During the equipment deposition process, a large beam of electron flow can efficiently ionize particles. On the one hand, the sputtering effect can obtain a coating without large particles on the surface of the substrate. On the other hand, high-energy ionized carbon particles can be reduced in the preparation of diamond-like coatings. The existence of graphite phase improves the quality of diamond-like coating.

5) Compared with traditional gas ion sources, it can form a breakthrough source of metal and non-metal high-energy particles.

In short, the curved surface particle source provided by the present invention uses annular discharge electron beam convergence technology in high vacuum to independently complete particle ionization of large beams and overflow from the side openings, thereby obtaining high-energy and high-deposition rate particles on the surface of the substrate. Particles with high ionization rate.

Description of the drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, it is still within the scope of the present invention to obtain other drawings based on these drawings without exerting any creative effort.

Figure 1 is a schematic cross-sectional structural diagram of Embodiment 1 provided by the present invention;

Figure 2 Structural diagram of the target;

Figure 3 is a schematic structural diagram of the water cooling jacket;

Figure 4 is a schematic structural diagram of the shielding component and the insulation sleeve component;

Figure 5 is a schematic structural diagram of the magnetic shoe and supporting fixation;

Figure 6 is a schematic cross-sectional structural diagram of Embodiment 2 provided by the present invention;

Figure 7 Structural diagram of the target;

Figure 8 is a schematic structural diagram of the water cooling jacket;

Figure 9 is a schematic structural diagram of the shielding component and the insulating sleeve component;

Figure 10 is a schematic structural diagram of the magnetic shoe and supporting fixation;

Figure 11 is a schematic cross-sectional structural diagram of Embodiment 3 provided by the present invention;

Figure 12 Structural diagram of the target;

Figure 13 is a schematic structural diagram of the water cooling jacket;

Figure 14 is a schematic structural diagram of the shielding assembly and the insulating sleeve assembly;

Figure 15 is a schematic structural diagram of the magnetic shoe and supporting fixation;

Figure 16 Schematic diagram of magnetic field simulation.

Detailed ways

In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail below with reference to the accompanying drawings.

Direction and position terms mentioned in this invention, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "top", "bottom" ”, “side”, etc. are only for reference to the direction or position in the drawings. Therefore, the directional and positional terms used are used to illustrate and understand the present invention, but not to limit the scope of the present invention.

In order to facilitate drawing, in the curved discharge tube, the water-cooled zigzag pipe is welded on the cooling steel pipe, and the target material is assembled in four sets of tiles. In actual application, in order to make the target material closely fit the water-cooled pipe, the target material will be as many as possible It is assembled in a tile type; some parts of the diamond-like coating discharge tube are not shown (magnet, external water-cooling pipe, external air inlet pipe). The water-cooling jacket and water-cooling block of the present invention preferably use water as the cooling medium.

In order to more prominently describe the advantages and characteristics of the present invention, the embodiments used in the present invention are described based on the particle source used in the preparation process of diamond-like coating. It is well known that the present invention can be used for different High-energy ionization of metals and non-metals is not limited to metal particle sources, non-metal particle sources, metal and non-metal particle sources in diamond-like coatings.

Next, the specific working mode of the workpiece in the present invention will be described.

Example 1. Double-sided open side anode diamond-like carbon particle source

See Figure 1 as shown: a double-side opening curved surface diamond-like carbon particle source 10, which has a double-side opening structure and includes a curved surface discharge target 101, a water cooling jacket 102, a terminal 103, a shielding component 104, and an insulating sleeve. 105. Two sets of magnetic shoe assemblies 106, fixed assembly 107, multiple sets of screens 108, and air inlet pipe 109. The water-cooling jacket 102 is a stainless steel pipe surface welded water-cooling pipe. The terminal 103 is assembled on the water-cooling jacket 102. The curved discharge target 101 is made of multiple groups of metal substrate tiles with surface composite (bonding) graphite sheets spliced together and mechanically fixed on the water-cooled pipe through bolts. On the sleeve 102, the insulating sleeve assembly 105 includes a plurality of insulating pieces to insulate the live parts and non-electrical parts in the entire cathode. The shielding assembly 104 consists of two shields to shield the cathode target surface. The magnetic shoe assembly 106 has multiple sets of magnets built in. , forming a symmetrical closed magnetic field, the fixing component 107 is assembled with the magnetic shoe component 106 through threads, and can be assembled with the air inlet pipe 109 and multiple sets of screens 108. The fixing component 107 can support and fix the entire carbon particle source 10.

As shown in Figure 2: the curved discharge target 101 is made of three groups of metal substrate tiles 1011. The metal substrate tiles 1011 have an array of threaded holes and can be mechanically fixed on the water cooling jacket 102 through bolts. Non-metallic materials 1012 is fixed on the metal substrate tile 1011 in the form of bonding through a processing method of the target material.

See Figures 3, 4, and 5: the water-cooling jacket 102 has a steel pipe welded to a back-shaped cold water channel, and the external electrode 103 is assembled on the water-cooling jacket 102. The shielding assembly 104 includes an upper end shielding sleeve 1041 and a lower end shielding sleeve 1042. The shielding sleeve 1042 itself is assembled into a clamping position, and the insulating sleeve assembly 105 includes an insulating head 1051, a first curved surface insulating ferrule 1052, a second curved surface insulating ferrule 1053, an insulating plug 1054, and an electrode insulating sleeve (not shown in the figure, the set is in on the external electrode), the first curved surface insulating ferrule 1052 and the second curved surface insulating ferrule 1053 are assembled on the water-cooling jacket 102 to insulate the water-cooling jacket 102 and the magnetic shoe assembly 106, and the insulating head 1051 is assembled on the top and bottom of the water-cooling jacket 102. Both ends and the insulating plugs 1054 are installed on the end face of the water-cooling jacket 102 to insulate the water-cooling jacket 102 and the shielding assembly 104. The upper and lower shielding sleeves 1041 and 1042 are installed on the insulating head 1051. The magnetic shoe assembly 106 is composed of a magnetic shoe and It consists of a back plate that is threaded with it; the support and fixation component 107 includes a cathode fixing insulating sheet 1071 and a cathode fixing plate 1072. The cathode fixing plate is fastened to the cathode shielding component 104 through bolts, with a cathode fixing insulating sheet 1071 in the middle, and a cathode fixing plate 1072. An external air pipe sleeve 1073 is welded to one end of the fixed plate 1072, which can be assembled with the air inlet pipe 109 to distribute the process gas. The effect of the air flow can be used to facilitate the overflow of the carbon particle flow. A screen fixed sleeve is welded to the opposite side of the cathode fixed plate 1072. It can be assembled with a fixed end 1081, an insulating ceramic sheet 1082, a lead-out screen 1083, and an anode screen 1084. One set of magnetic shoe assemblies 106 is equipped with four sets of magnets NSNS, and the other set of magnetic shoe assemblies 106 is equipped with three sets of magnets SNS, which can form a closed magnetic field at small-angle openings, suppress particle overflow, and form a divergent magnetic field at large-angle openings. , which contributes to the ionization overflow of particles.

See Figure 1-5: The double-sided open curved diamond-like carbon particle source 10 is in a vacuum state and connected to a negative voltage (300v-500v) through the terminal 103. In a high vacuum (0.1-1.0Pa), Glow power generation occurs, the process gas argon is ionized, collides with the surface of the target 101, and sputters out metal particles and carbon particles. During the discharge process of the annular tube, the electron beam converges, and under the action of the magnetic field, a large number of metal particles and carbon particles are ionized , the ionized metal particles and carbon particles will overflow from the large-angle opening due to the influence of the air flow and the extraction pole screen 1083. A negative bias voltage is applied to the surface of the substrate. Under the action of the electric field, the metal ions and carbon ions are deposited on the On the surface of the substrate, a diamond-like coating is obtained.

Example 2: Central anode curved surface diamond-like carbon particle source

See Figure 6 as shown: a central anode curved surface diamond-like carbon particle source 11, which has a single side opening structure and an opening angle of 30° ^. -90 ^. , which includes curved discharge target 111, water cooling jacket 112, terminal 113, shielding component 114, insulation sleeve 115, magnetic shoe component 116, fixed component 117, screen 118, air inlet pipe 119, water cooling jacket 112 is a stainless steel pipe surface welded The water-cooling tube and terminal posts 113 are assembled on the water-cooling jacket 112. The curved discharge target 111 is made of multiple groups of metal substrate tiles with composite (bonding) graphite sheets on the surface and is mechanically fixed on the water-cooling jacket 112 through bolts. The insulation sleeve 115 includes Multiple insulators insulate the live parts and non-electric parts in the entire cathode. The shield assembly 114 includes three shields to shield the cathode target surface. The magnetic shoe assembly 116 has multiple sets of magnets built in to form a closed magnetic field. The fixing assembly 117 is fixed The entire cathode and the screen 118 are assembled on the fixed assembly as the lead-out pole. The air inlet pipe 119 is an anode air inlet pipe equipped with water-cooling at both ends and is assembled on the fixed assembly.

As shown in Figure 7: the target 111 is made of three groups of metal substrate tiles 1111 spliced together. The metal substrate tiles 1111 have an array of threaded holes, which can be mechanically fixed on the water-cooling jacket 112 through bolts. Non-metallic materials 1112 can pass through A processing method of the target material is to fix it on the metal substrate tile 1111 in the form of bonding (brazing process).

See Figures 8 and 9 as shown: the water-cooling jacket 112 is a steel pipe welded to a zigzag cold water channel, the terminals 113 are assembled on the water-cooling jacket 112, the shielding assembly 114 includes upper and lower end shielding sleeves 1141 and end face shielding sleeves 1142, and the insulation sleeve assembly 115 includes electrodes Insulating sleeve 1151, insulating head 1152, flat insulating sleeve 1153, curved insulating cover 1154. The curved insulating cover 1154 is installed on the water cooling jacket 112 to insulate the water cooling jacket 112 and the magnetic shoe 116. The insulating head 1152 is installed on the water cooling jacket. The upper and lower ends of 112 and the flat insulating sleeve 1153 are set on the water-cooling sleeve 112 to insulate the water-cooling sleeve 112 and the shielding component 114 on the end surface. The shielding sleeves 1141 on the upper and lower ends are set on the insulating head 1152, and the end shielding sleeves 1142 are fixed on the upper and lower ends. On the shielding sleeve 1141, the magnetic shoe assembly 116 includes a magnet base 1161 and a back plate 1162. The magnetic shoe 116 is equipped with nine sets of magnets NSNSNSNSN. On the one hand, closed magnetic lines of force can be formed between the two groups of magnets. On the other hand, the two groups of magnets closest to the opening have the same polarity, forming open magnetic lines of force, which is conducive to the ionization and overflow of particles.

See Figure 10 as shown: the fixed component 117 (suspended potential) fixes the magnetic shoe 116 with screws and fixes the entire cathode with the water-cooling seat 1191 through the thread of the air inlet 119. The fixed component 117 can be assembled with a ceramic gasket 1171 and a press plate 1181. Net 118 serves as the lead pole. Through the insulating sheet and fixing assembly 117 and the threaded water-cooling seat 1191 installed on the air inlet pipe 119, the entire cathode can be fixed and locked.

See Figure 6-10: the central anode curved surface diamond-like carbon particle source 11 is in a vacuum state and connected to a negative voltage (300v-500v) through the terminal 113. Under high vacuum (0.1-1.0Pa), Glow power generation, the process gas argon is ionized, collides with the surface of the target 111, and sputters out metal particles and carbon particles. During the discharge process of the annular tube, the electron beam converges, and under the action of the magnetic field, a large number of metal particles and carbon particles are ionized. The ionized metal particles and carbon particles will be affected by the central anode and the extraction electrode and will overflow from the opening. A negative bias voltage is applied to the surface of the substrate. Under the action of the electric field, the metal ions and carbon ions are deposited on the surface of the substrate to obtain a similar Diamond coating.

Example 3: Side anode curved surface diamond-like carbon particle source

See Figure 11 as shown: a central anode curved surface diamond-like carbon particle source 12, which has a single side opening structure and an opening angle of 30° ^. -90 ^. , which includes a curved discharge target 121, a water-cooling jacket 122, a terminal 123, a shielding component 124, an insulating sleeve 125, a magnetic shoe component 126, a fixing component 127, two sets of screens 128, and an air inlet pipe 129. The water-cooling jacket 122 is a stainless steel pipe. The water-cooling pipe is surface welded, and the terminal 123 is assembled on the water-cooling jacket 122. The target 121 is made of multiple groups of metal substrate tiles with surface composite (bonding) graphite sheets and is mechanically fixed on the water-cooling jacket 122 through bolts. The insulation sleeve 125 includes Multiple insulators insulate the live parts and non-electric parts in the entire cathode. The shielding assembly 124 includes three shielding members to shield the cathode target surface. The magnetic shoe assembly 126 has multiple sets of magnets built in to form a closed magnetic field. The fixing assembly 127 is fixed For the entire cathode, two sets of screens 128 are assembled on the fixed component, one set of screens 1284 serves as the lead-out pole, the other set of screens 1283 serves as the anode, and the air inlet pipe 119 is an air inlet pipe assembled on the fixed assembly 127 .

As shown in Figure 12: the target 111 is made of three groups of metal substrate tiles 1111 spliced together. The metal substrate tiles 1111 have an array of threaded holes and can be mechanically fixed on the water cooling jacket 112 through bolts. The graphite 10112 passes through the target. A processing method in which the composite form is fixed on the metal substrate tile 1111.

See Figures 13 and 14 as shown: the water-cooling jacket 122 steel pipe is welded to a zigzag cold water channel, the terminals 123 are assembled on the water-cooling jacket 122, the shielding assembly 124 includes upper and lower end shielding sleeves 1241, end face shielding sleeves 1242, and the insulation sleeve assembly 125 includes electrodes Insulating sleeve 1251, insulating head 1252, flat insulating sleeve 1253, curved surface insulating cover 1254. The curved surface insulating cover 1254 is installed on the water cooling jacket 122 to insulate the water cooling jacket 122 and the magnetic shoe 126. The insulating head 1252 is installed on the water cooling jacket. The upper and lower ends of 122 and the flat insulating sleeve 1253 are installed on the water-cooling sleeve 122 to insulate the water-cooling sleeve 122 and the shielding component 124 on the end surface. The shielding sleeves 1241 on the upper and lower ends are set on the insulating head 1252, and the end shielding sleeves 1242 are fixed on the upper and lower ends. On the shielding sleeve 1241, the magnetic shoe 126 includes a magnet base 1261 and a back plate 1262. The magnetic shoe assembly 126 is equipped with nine groups of magnets NSNSNSNSN. On the one hand, closed magnetic lines of force can be formed between the two groups of magnets. On the other hand, the two groups of magnets closest to the opening have the same polarity, forming open magnetic lines of force, which is conducive to the ionization and overflow of particles.

See Figure 15: the fixed component 127 (suspended potential) fixes the magnetic shoe component 126 with screws and fixes the entire cathode through the threaded fixing seat 1291 of the air inlet 129. The fixed component 127 can be assembled with a ceramic gasket 1271 and a press plate 1281. The mesh 1283 serves as the anode and the screen 1284 serves as the extraction pole. Through the insulating sheet, fixing assembly 127 and threaded fixing seat 1291 installed on the air inlet 129, the entire cathode can be fixed and locked.

See Figure 11-15: The side anode curved surface diamond-like carbon particle source 11 is in a vacuum state and connected to a negative voltage (300v-500v) through the terminal 113. Under high vacuum (0.1-1.0Pa), Glow power generation, the process gas argon is ionized, collides with the surface of the target 111, and sputters out metal particles and carbon particles. During the discharge process of the annular tube, the electron beam converges, and under the action of the magnetic field, a large number of metal particles and carbon particles are ionized. The ionized metal particles and carbon particles will be affected by the side anode and the extraction electrode and will overflow from the opening. A negative bias voltage is applied to the surface of the substrate. Under the action of the electric field, the metal ions and carbon ions are deposited on the surface of the substrate to obtain a similar Diamond coating.

Figure 16 shows the simulation of the magnetic field in the single-opening diamond-like carbon coating curved carbon particle source used in Examples 2 and 3. The magnets placed in the magnetic shoes in the carbon particle source are multiple groups (not less than three groups). Nine groups of magnets are used in the simulation. The magnets are arranged as NSNSNSNSN, forming a divergent magnetic field at the opening, which is conducive to the overflow of particles.

What is disclosed above is only the preferred embodiment of the present invention. Of course, it cannot be used to limit the scope of the present invention. Therefore, equivalent changes made according to the claims of the present invention still fall within the scope of the present invention.

Claims (7)

1. The utility model provides a double-opening curved surface particle source, includes the particle source main part, this particle source main part is including magnetic shoe subassembly, insulating cover subassembly, target, electrode and water-cooled jacket, target heat conduction fixed connection in the water-cooled jacket inboard, its characterized in that: the target comprises a first curved surface discharge target and a second target curved surface discharge target which are symmetrically distributed, the magnetic shoe assembly comprises a first magnetic shoe assembly and a second magnetic shoe assembly, the first magnetic shoe assembly and the second magnetic shoe assembly are respectively arranged on the outer sides of water cooling sleeves corresponding to the first curved surface discharge target and the second target curved surface discharge target through insulating sleeve assemblies, a first opening and a second opening are respectively arranged between two ends of the first curved surface discharge target and the second target curved surface discharge target, the first curved surface discharge target and the second target curved surface discharge target are respectively composed of a plurality of groups of metal substrate tiles or a plurality of groups of metal substrate tile surface composite nonmetallic materials, an inner cavity of the target forms a gas ionization region, a first opening of the curved surface discharge target forms a process gas inlet, and a second opening of the curved surface discharge target forms a particle outlet; an air inlet pipe is arranged at the first opening of the curved surface discharge target, and an air inlet hole corresponding to the inner cavity of the target is arranged on the side wall of the air inlet pipe; the first curved surface discharge target and the second curved surface discharge target are connected with negative voltage, glow discharge can be generated, the glow discharge is influenced by the shape of the targets, and a hollow cathode discharge effect is generated by electron beam converging; two groups of screens which are spaced from each other are arranged at the outer end of the second opening, wherein the screen close to the second opening is an anode screen connected with positive voltage, and the other group of screens is a leading-out electrode screen connected with negative voltage;

the radian angle of the second opening is larger than that of the first opening;

the first magnetic shoe assembly and the second magnetic shoe assembly comprise a back plate and a plurality of magnets which are fixedly arranged on the back plate and are mutually distributed in sequence, the magnets adjacent to each other are oppositely arranged, the first magnetic shoe assembly and the second magnetic shoe assembly form a closed magnetic field at the first opening to inhibit particle overflow, and a divergent magnetic field is formed at the second opening to facilitate particle ionization overflow.

2. The dual-opening curved particle source of claim 1, wherein: the metal substrate tile of the target is one of titanium, chromium, tungsten, copper and aluminum or alloy thereof.

3. The utility model provides a central positive pole curved surface particle source, includes the particle source main part, this particle source main part is including magnetic shoe subassembly, insulating cover subassembly, target, electrode and water-cooled jacket, target heat conduction fixed connection in the water-cooled jacket inboard, its characterized in that: the target is a curved surface discharge target with one side opening, the inner cavity of the curved surface discharge target forms a gas ionization region, the opening of the curved surface discharge target forms an exit port of particles, the magnetic shoe component is arranged at the outer side of the water cooling jacket corresponding to the curved surface discharge target through the insulating jacket component,

the gas ionization area center of inside of curved surface target that discharges is provided with along the axial direction of curved surface target that discharges and is connected with positive voltage's central positive pole intake pipe, is provided with a plurality of ventholes on the lateral wall of this central positive pole intake pipe, and the both sides of this central positive pole intake pipe are connected with the radiating water-cooling seat of being used for central positive pole intake pipe, the outer end of the opening part of curved surface target that discharges be provided with and connect the extraction electrode screen cloth of negative voltage.

4. A central anode curved particle source according to claim 3, wherein: the magnetic shoe assembly comprises a back plate and a plurality of magnets which are fixedly arranged on the back plate and are mutually arranged in sequence, and magnetism between adjacent magnets is oppositely arranged, so that a closed magnetic field is formed between the adjacent magnets, the magnetism of the magnets close to two sides of the opening of the curved surface discharge target is the same, a divergent magnetic field is formed at the opening, and ionization and overflow of particles are facilitated.

5. A central anode curved particle source according to claim 3, wherein: the arc angle of the opening of the curved surface discharge target is 30-90 degrees.

6. The utility model provides a double screen cloth curved surface particle source, includes the carbon particle source main part, this carbon particle source main part is including magnetic shoe subassembly, insulating cover subassembly, target, electrode and water-cooled jacket, target heat conduction fixed connection in the water-cooled jacket inboard, its characterized in that: the target is a curved surface discharge target with one side opening, the inner cavity of the curved surface discharge target forms a gas ionization region, the opening of the curved surface discharge target forms an exit port of particles, the magnetic shoe component is arranged at the outer side of the water cooling jacket corresponding to the curved surface discharge target through the insulating jacket component,

the curved surface discharge target is characterized in that a central air inlet pipe is arranged in the center of an air ionization area inside the curved surface discharge target along the axial direction of the curved surface discharge target, a plurality of air inlet holes are formed in the side wall of the central air inlet pipe, water cooling seats for heat dissipation of the central air inlet pipe are connected to two sides of the central air inlet pipe, two groups of screens spaced from each other are arranged at the outer end of an opening of the curved surface discharge target, the screen close to the opening is an anode screen connected with positive voltage, and the other group of screens is a leading-out electrode screen connected with negative voltage.

7. A dual screen curved particle source as defined in claim 6, wherein: the magnetic shoe assembly comprises a back plate and a plurality of magnets which are fixedly arranged on the back plate and are mutually arranged in sequence, and magnetism between adjacent magnets is oppositely arranged, so that a closed magnetic field is formed between the adjacent magnets, the magnetism of the magnets close to two sides of the opening of the curved surface discharge target is the same, a divergent magnetic field is formed at the opening, and ionization and overflow of particles are facilitated.