CN108320268B - Large-area manufacturing method of femtosecond laser complex component - Google Patents
Large-area manufacturing method of femtosecond laser complex component Download PDFInfo
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- G—PHYSICS
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- G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
- G06T3/4038—Image mosaicing, e.g. composing plane images from plane sub-images
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
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- G—PHYSICS
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- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
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Abstract
本发明提出了一种飞秒激光复杂构件大面积制造方法，对复杂构件进行表面加工，具体包括：采用复杂构件模型重构和表面加工图案拼接算法，根据激光加工区域面积和焦深，设定约束条件和区域生长算法，划分加工区域，并对区域边界进行简化处理得到加工区域，对组成加工图案图元种类及布局特点提取关键特征，根据周期性和非周期性布局的过程，设计拼接算法使得加工图案自动快速地在复杂构件表面进行布局，采用加工区域划分和图案分割算法，设置加工图案中图元的种类和组合方式，求得图元与加工区域边界的交点并归类子图案到对应的加工区域，采用加工图案实时检测和在线拼接制造技术，通过设置和安装高精度CCD摄像机获得加工部位的视频图像，基于图像处理算法实时识别已加工图案的边界，进而根据待加工图案边界信息来预判两幅加工图案的配准误差，获取所需矫正变换参数，实现激光加工过程中的在线拼接制造。
The invention proposes a large-area manufacturing method for complex components by femtosecond laser, which is used for surface processing of complex components, which specifically includes: using complex component model reconstruction and surface processing pattern splicing algorithm, according to the laser processing area area and focal depth, setting Constraints and region growth algorithm, divide the processing area, and simplify the boundary of the area to obtain the processing area, extract the key features for the types and layout characteristics of the primitives that make up the processing pattern, and design the stitching algorithm according to the process of periodic and aperiodic layout. The processing pattern can be automatically and quickly laid out on the surface of complex components. The processing area division and pattern segmentation algorithms are used to set the type and combination of primitives in the processing pattern, and the intersection between the primitive and the boundary of the processing area is obtained and the sub-patterns are classified into For the corresponding processing area, real-time detection of processing patterns and online splicing manufacturing technology are adopted. Video images of processing parts are obtained by setting and installing high-precision CCD cameras. It can predict the registration error of the two processing patterns, obtain the required correction transformation parameters, and realize the online splicing manufacturing in the laser processing process.
Description
Technical field
The invention belongs to advanced laser manufacturing fields, are related to a kind of femtosecond laser complex component surface machining manufacture.
This method using complex component model reconstruction and surface processing graphic pattern stitching algorithm, machining area divides and pattern partitioning algorithm,
Processing graphic pattern real-time detection and complex component surface is processed in splicing manufacturing technology.
Background technique
There is a kind of new type light source the 1960s, has that monochromaticjty is good, good directionality, coherence are good, energy is concentrated
The features such as.Femtosecond Optical Pulses refer to that the duration is 10-12s-10-15The laser pulse of s, this laser pulse have high peak
The characteristics of value power, very wide spectral width and extremely short laser emission time.When femtosecond laser is unique ultrashort lasting with its
Between and superpower peak power started material it is hyperfine, it is low damage and space three-dimensional working process frontier, and application get over
Come wider.According to the ultrashort and superpower feature of femtosecond laser, Applied research fields can be generally divided into ultrafast transient phenomenon
Research and superpower phenomenon research.They are all continuous with the shortening of laser pulse width and the increase of pulse energy
It is able to deeply and develops.The most direct application of femtosecond pulse is that people use it as light source, forms a variety of time resolutions
Spectral technique and pumping/Detection Techniques.Its development directly drive physics, chemistry, biology, material and information science research into
Enter microcosmic ultrafast process field, and started some completely new research fields, such as femtochemistry, is partly led at Quantum control chemistry
Body coherent swpectrum etc..The combination of femtosecond pulse and nanometer microscopy allows people to study the nanostructure of semiconductor
Carrier dynamics in (quantum wire, quantum dot and nanocrystal).In terms of biology, people are utilizing femtosecond laser skill
Molecular dynamics provided by art, pumping/Detection Techniques study the biography energy of photosynthesis reaction center, turn energy and charge
Separation process.Ultra-short pulse laser is also applied to the transmission of information, processing and storage aspect.
The successful operating for the desk-top terawatt (TW) laser that First is realized using chirped pulse amplification technique starts from 1988, this
Achievement indicates that femtosecond is superpower and the beginning of the strong optical physics research of superelevation in laboratory.In this area research, due to super
The effect of short laser field has been equivalent to or has substantially exceeded the constraint field that electron institute in atom is subject to, and perturbation theory is untenable,
New theoretical treatment is up for development.Under the light intensity of 1020W/cm2, the research of simulation Astronomical Phenomena may be implemented.
The thermoelectron (200KeV) that the superelevation light laser of 1019-1021W/ cm2 generates.Another important application of femtosecond laser is just
It is micro- retrofit.In general, by for laser pulse standard, duration swashing greater than 10 picoseconds (being equivalent to heat conduction time)
Light pulse belongs to long pulse, with it come rapidoprint, since fuel factor makes adjacent material change, to influence processing essence
Degree.And pulse width only has the femto-second laser pulse of thousands of part per trillion seconds then to possess unique material processing characteristics, such as adds
The melting zone very little in work aperture does not have；Multiple material may be implemented, such as even life inside metal, semiconductor, transparent material
The micromachined of object tissue etc., engraving；Machining area can be less than focal dimension, break through diffraction limit etc..Some automobiles
Just research with femtosecond laser processes better engine nozzle at present for manufactory and heavy equipment processing factory.Use ultrashort pulse
Laser can get the wide aperture of several hundred nanometers on metal.On being most bordering on the Optical Society of America's meeting held Orlando,
The Hai Te of IBM Corporation says that a kind of fs-laser system is used in the photoetching process of large scale integrated chip by IBM.With
Femtosecond laser is cut, almost without heat transmitting.U.S.'s Lao Lunsi livermore national laboratory it was discovered by researchers that
This laser beam can safely cut high explosive.The Loews gram in the laboratory is said: " femtosecond laser holds promise as a kind of cold place
Science and engineering tool, for removing retired rocket, cannon bomb and other weapons."
Femtosecond laser can be used to cut frangible polymer, without changing its important biochemical characteristic.It is biomedical
Expert using it as ultraprecise surgical knife, is used for vision correcting surgery, not only can be reduced tissue damage but also will not leave behind hand
Art sequelae, or even can individual cells be moved with delicate surgery or be used for gene therapy.How people will also fly in research at present
Second laser is used for dental treatment.There is scientist's discovery, a fritter of tooth can be removed using ultra-short pulse laser, around influencing
Substance.The UMW series ultrafast laser micro Process workbench that Clark-MXR company, the U.S. releases recently exactly represents this neck
The commercial femtosecond laser parallel micromachining system of forefront in domain, it includes all needed for carrying out micro Process with ultra-short pulse laser
Equipment and accessory can be used for micro Process any material, generate sub-micron fine structure, without being damaged to periphery material,
Material splashing is not will cause, processing result is extremely accurate and has high performance reproducibility.
The direct purposes of femtosecond pulse is exactly time-resolved spectroscopy.Physics, chemistry and biology are observed with femtosecond pulse
Equal ultrafast process, femtosecond pulse can make the light source of confocal microscope, to make the three-dimensional image of biological sample.Make light with femtosecond pulse
The three of optical coherence tomography (optical coherence tomography, abbreviation OCT) the observable active somatic cell in source
Image is tieed up, is not at this time the time response using femtosecond pulse, but utilizes the wide spectrum of femtosecond light source, it is similar white to generate
The interference of light, the reflection of the phonon excited in the semiconductors using femtosecond pulse can be used to the thickness of real-time measurement semiconductive thin film
Degree, to monitor the growth of semiconductive thin film, makees micro machining with femtosecond pulse, and punched hole is smooth without burr, because
Femtosecond pulse does not melt re-evaporation first by fuel factor, directly evaporates material by high field, femtosecond pulse is used as optic communication
Existing communication speed can be improved hundred times by light source, and femtosecond pulse and the Plasma Interaction of high-energy can produce
Raw higher hamonic wave and X-ray, and it is possibly used for controlled nuclear fusion, the tera hertz that people's also trial is generated with femtosecond pulse
Radiation, to detect the packaging quality of integrated circuit or even the fat content of meat product.In short, there are many application of femtosecond pulse.
With femtosecond pulse laser it is further development and it is perfect, one surely hews out more application prospects.It is worth
It is noted that just there is a group of people to separate from research group in the researcher of various countries whenever research and development to certain phase,
Research achievement is converted into product, certain original laser company, which also notes that, absorbs new research achievement.Such as also existed at that time
Bar sinus (P.Bado) of University of Rochester has just set up the company's wheat Haddock Adamss (Medox) of oneself early in 1985, and production is high
Fast photoswitch, later with the development of Femtosecond pulse amplification technology, he and the Clarke instrument with production femtosecond pulse laser
(ClarkInstruments) company, which combines, has set up Clarke-wheat Haddock Adamss (Clark-MXR) company, specially produces femtosecond
Pulsed solidstate, fiber laser and amplifier and its peripheral equipment, state (Washington State) university in Washington be not interior
Grace and its husband's Kapp court of a feudal ruler (H.Kapteyn) are after creating 11-fs ti sapphire laser, although it is (existing not to be detached from university
Equal migration University of Michigan teaches), the amateurish company " KM-Laboratory " with their Mr. and Mrs' namings is but set up, out
Sell them the 10-fs laser of manufacture, Shi Dinggeer (A.Stingl) in the Crouse group of Vienna University of Technology etc. is several
Femto Lasers, the sub- 10-fs using disperse reflection mirror for selling their manufactures swashs for personal also independent incorporation
The Cai Boqi of light device, solid-state physics research institute, Hungary also " retains the job but suspends the salary ", has set up Laser Optics company, has utilized breast tooth
The equipment of sharp solid-state physics research institute produces the disperse reflection mirror of femtosecond pulse laser, is said with the words of himself, be him
Other people in " supporting " research institute, another pair study famous Mr. and Mrs Kai Le and denapon coffee with femtosecond pulse
(K.Weingarten) more interesting, one is still taught in university, another has exited light wave company, the U.S. (Lightwave
Electronics) Switzerland is come with the triumphant Le of wife and has established the company (Time-bandwidth for being " time-bandwidth product "
Products), the triumphant femtosecond pulse laser with saturable absorbing mirror starting mode locking for strangling invention, Liang great laser company are produced
Relevant company and spectrum physics company also take as own duty, rely on their considerable strengths from pump laser, femtosecond pulse oscillation
Device, amplifier to parametric oscillator every field and heroes' expansion competition comprehensively.
In terms of national science and technology strategy, the way in the U.S. is to support several key universities and National Laboratory, such as Mi Xi
The ultra-fast optical center of root university, the Strong-field physics laboratory in University of California San Diego branch school, Lao Lunsi-benefit object not laboratory
Deng.It is Japanese then be in the form of large-scale " produce (industry) official (government office, i.e. National Laboratory) and learn (the university) " research project of Ministry of International Trade and Industry,
Started so-called " femtosecond technical plan " in 1996, concentrated Japanese almost all of famous big company, National Laboratory and
University has also pulled on the AT&T Labs in the U.S., carries out the research of femtosecond pulse technology, target is in billion bit high-speed communication
Technical aspect is come out top.
Various features based on femtosecond laser, the present invention are used in the processing of complex component.Especially aerospace
The pattern on typical members surface manufactures, since aerospace component is big and the guarantee of structural intergrity, to its difficulty of processing
Very big, processing method proposed by the present invention fully meets aerospace industry requirement.The present invention develops laser large scale curved surface
The segmentation of pattern precision and the online splicing apparatus of unit, break through the conventionally manufactured limit for relying on mechanical integrated kinematic accuracy in process
System realizes the high-precision high-efficiency manufacture of complex pattern on large scale curved surface.The pattern dimension detection accuracy error of device≤
0.005mm, workpiece surface target point positional accuracy measurement error≤0.005mm.
Summary of the invention
In conventional laser manufacturing process, generallys use component movement cooperation single point laser processing technology and realize picture on surface
Manufacture, but this kind of processing technology is applied in the large complicated carved component of this project, and the processing of picture on surface can be seriously affected
Efficiency and quality, by pattern segmentation with unit pattern Rapid Manufacturing Technology, it can be achieved that large complicated carved high efficiency manufacture, because
This proposes a kind of new manufacturing method.
The laser processing precision of complex large-scale component is influenced by mechanical integrated movement accumulated error, and there are single-point processing
Caused inefficiency problem.Quality and efficiency are manufactured for improving laser, it is necessary to large-scale component is divided into multiple machining areas,
The accurate segmentation and unit pattern for carrying out pattern are manufactured in splicing.The present invention proposes a kind of large-scale component method of surface finish,
The segmentation of pattern precision and the online splicing apparatus of unit, break through conventionally manufactured dependence machine during exploitation laser large scale Machining of Curved Surface
The high-precision high-efficiency manufacture of complex pattern on large scale curved surface is realized in the limitation of the comprehensive kinematic accuracy of tool.The pattern dimension of device is examined
Survey trueness error≤0.005mm, workpiece surface target point positional accuracy measurement error≤0.005mm.
Processing specific method mainly includes three parts: first part is complex component model reconstruction and surface processing graphic pattern
Stitching algorithm.After complex component is converted into mathematical model, there are normal vector missing or mistakes, lead to topological defect, for this reason, it may be necessary to
Reasonable interpolation algorithm is designed, correct complex component model is reconstructed.In addition, being processed pattern etch to realize, meet pattern
Topological relation and splicing precision, need to be spliced on complex component surface, develop efficient pattern splicing algorithm.It analyzes all kinds of multiple
Miscellaneous component model normal vector mistake rule, designs complex component topology detection algorithm, proposes topological defect type decision method, base
Topological defect problem is handled in interpolation algorithm, rebuilds component surfacial pattern；Different pel types and layout characteristics are analyzed, it is generated
Envelope outer profile, and then process and feature of the processing graphic pattern on complex component surface periodically with aperiodicity layout are studied, if
Efficient pattern splicing algorithm is counted, realizes processing graphic pattern fast layout.Second part is that machining area divides and pattern partitioning algorithm.
When the picture on surface being laid out is divided into multiple machining areas, need according to space dough sheet method arrow and Curvature varying, laser
Depth of focus and vibration mirror scanning range design reasonable area efficient partitioning algorithm, to guarantee the borderline segmentation of a large amount of machining areas
Effect and efficiency.Based on single process region area parameter and focal depth parameter, the three-dimensional body data of complex component are analyzed, are designed
Algorithm of region growing searches for adjacent triangular faces on the work surface for the complex component for meeting constraint condition, and then proposes high
The picture on surface machining area partitioning algorithm of effect；Pel type and combined method in processing graphic pattern are analyzed, according to machining area
Space is divided, proposes complete pattern along the figure partitioning algorithm of different machining areas.Part III is processing graphic pattern real-time detection
With in splicing manufacturing technology.During picture on surface retrofit, the machined registration accuracy between region to be processed
Directly affect the continuity between pattern.For this purpose, the machined zone boundary detection technique based on image-recognizing method need to be studied, if
Count zone map to be processed correction transformation algorithm, complete the accurate matching with machined region, realize pattern in splicing system
It makes.Working position video image acquisition methods are designed, the machined zone boundary detection technique based on image-recognizing method is studied,
It proposes pattern to be processed and machined pattern registration method, and then calculates rotation, translation according to the boundary information of pattern to be processed
With the correction transformation parameter of the operations such as scaling, propose that pattern to be processed carries out correction transform process method, completion laser machined
Being manufactured in splicing in journey.
First according to laser processing area area and depth of focus, constraint condition and algorithm of region growing are set, divides processing district
Domain, and zone boundary simplify handling and obtains reasonable machining area；Secondly, analysis and summary form processing graphic pattern pel kind
Class and layout characteristics, according to process and feature that periodicity and aperiodicity are laid out, design stitching algorithm makes processing graphic pattern certainly
It is dynamic to be rapidly laid out on complex component surface；Again, the type and combination of pel in processing graphic pattern are analyzed and is designed
Partitioning algorithm acquires the intersection point of pel and machining area boundary and correctly sorts out sub-pattern to suitable machining area；Finally, logical
The video image that design and installation high-precision CCD video camera obtains working position is crossed, is identified in real time based on image processing algorithm
The boundary of processing graphic pattern, and then the registration error of two width processing graphic patterns is prejudged according to pattern boundaries information to be processed, obtain institute
Transformation parameter need to be corrected, realizes manufacturing in laser processing procedure in splicing.
The above method is special based on adjacent area topological continuity, period and aperiodic layout rule, the pel of processing graphic pattern
The component surfaces pattern-informations such as point, and mature high-precision camera shooting and image procossing basic algorithm, ensured the technology can
Row.Since the processing graphic pattern processing software system of complete function is very rarely seen, domestic more dependence imports, independent research is directed to
The three-dimensional process software systems that the function of laser accurate manufacture is relatively complete are substantially at blank, or only for planar graph or open up
Simple regular figure is flutterred, is unable to satisfy complex component picture on surface splicing manufacture demand, therefore the present invention is for completing aviation
Aerospace structural component processing is very effective.
Detailed description of the invention
Fig. 1 femtosecond laser complex component surface machining manufacture schematic diagram.
The segmentation of Fig. 2 pattern splices manufacturing step schematic diagram with unit pattern.
Specific embodiment
Satellite consolidates the large-scale components tables such as surface antenna transmitter, radar invisible frequency selector, engine crankcase thin-wall barrel
The pattern in face finely manufactures and fine quarter type, is such as realized using the fixed position single-point processing combination member movement of conventional laser big
Scale surface chart shape is made, and not only processing efficiency is low, but also the mechanical integrated precision of big stroke apparatus directly influences pattern
The accuracy of manufacture.
Quality and efficiency are manufactured to promote the laser on complex large-scale component surface, this project proposes large format three-D pattern essence
Large-scale component is divided into multiple machining areas, according to space dough sheet method in splicing manufacturing technology by close segmentation and unit pattern
Arrow and Curvature varying, laser depth of focus and vibration mirror scanning range, design reasonable region partitioning algorithm, realize that segmentation is single using galvanometer
The quick manufacture of element pattern；It is converted into existing topological defect after mathematical model for complex component, reasonable interpolation is designed and calculates
Method reconstructs correct component model；Later, according to processing graphic pattern pel type and layout characteristics, according to the efficient pattern of exploitation
Stitching algorithm is spliced in component surface, to meet pattern topological relation and splicing required precision.
In addition, the registration accuracy between machined region and region to be processed is straight during picture on surface retrofit
Connect the continuity and accuracy influenced between pattern.For this purpose, developing machined zone boundary based on image-recognizing method detects skill
Art designs the various correction transformation algorithms of zone map to be processed, and then completes the accurate matching with machined region, realizes surface
The high-precision of pattern is manufactured in splicing.
Processing specific method mainly includes three parts: first part is complex component model reconstruction and surface processing graphic pattern
Stitching algorithm.After complex component is converted into mathematical model, there are normal vector missing or mistakes, lead to topological defect, for this reason, it may be necessary to
Reasonable interpolation algorithm is designed, correct complex component model is reconstructed.In addition, being processed pattern etch to realize, meet pattern
Topological relation and splicing precision, need to be spliced on complex component surface, develop efficient pattern splicing algorithm.It analyzes all kinds of multiple
Miscellaneous component model normal vector mistake rule, designs complex component topology detection algorithm, proposes topological defect type decision method, base
Topological defect problem is handled in interpolation algorithm, rebuilds component surfacial pattern；Different pel types and layout characteristics are analyzed, it is generated
Envelope outer profile, and then process and feature of the processing graphic pattern on complex component surface periodically with aperiodicity layout are studied, if
Efficient pattern splicing algorithm is counted, realizes processing graphic pattern fast layout.Second part is that machining area divides and pattern partitioning algorithm.
When the picture on surface being laid out is divided into multiple machining areas, need according to space dough sheet method arrow and Curvature varying, laser
Depth of focus and vibration mirror scanning range design reasonable area efficient partitioning algorithm, to guarantee the borderline segmentation of a large amount of machining areas
Effect and efficiency.Based on single process region area parameter and focal depth parameter, the three-dimensional body data of complex component are analyzed, are designed
Algorithm of region growing searches for adjacent triangular faces on the work surface for the complex component for meeting constraint condition, and then proposes high
The picture on surface machining area partitioning algorithm of effect；Pel type and combined method in processing graphic pattern are analyzed, according to machining area
Space is divided, proposes complete pattern along the figure partitioning algorithm of different machining areas.Part III is processing graphic pattern real-time detection
With in splicing manufacturing technology.During picture on surface retrofit, the machined registration accuracy between region to be processed
Directly affect the continuity between pattern.For this purpose, the machined zone boundary detection technique based on image-recognizing method need to be studied, if
Count zone map to be processed correction transformation algorithm, complete the accurate matching with machined region, realize pattern in splicing system
It makes.Working position video image acquisition methods are designed, the machined zone boundary detection technique based on image-recognizing method is studied,
It proposes pattern to be processed and machined pattern registration method, and then calculates rotation, translation according to the boundary information of pattern to be processed
With the correction transformation parameter of the operations such as scaling, propose that pattern to be processed carries out correction transform process method, completion laser machined
Being manufactured in splicing in journey.
For those skilled in the art, above-described embodiment is merely a preferred embodiment of the present invention, and should not be understood as to this hair
The limitation of bright the scope of the patents, under the premise of not departing from design of the invention, several improvement for making, substitution belong to this hair
Bright protection scope.
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| CN109760305B (en) * | 2019-02-19 | 2020-12-11 | 杭州志英科技有限公司 | Femtosecond laser-based large-size 3D micro-nano printing control method, model slicing method and device |
| CN110548999A (en) * | 2019-08-29 | 2019-12-10 | 河南大学 | Vertical laser marking equipment and marking method based on the equipment |
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