CN108317233A - Integration applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure - Google Patents
Integration applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure Download PDFInfo
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- CN108317233A CN108317233A CN201810312357.1A CN201810312357A CN108317233A CN 108317233 A CN108317233 A CN 108317233A CN 201810312357 A CN201810312357 A CN 201810312357A CN 108317233 A CN108317233 A CN 108317233A
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- Prior art keywords
- gear
- layer
- micro
- electron capture
- capture detector
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H55/00—Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
- F16H55/02—Toothed members; Worms
- F16H55/17—Toothed wheels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H55/00—Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
- F16H55/02—Toothed members; Worms
- F16H55/12—Toothed members; Worms with body or rim assembled out of detachable parts
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electron Tubes For Measurement (AREA)
- Micromachines (AREA)
Abstract
The present invention discloses a kind of applied to the integrated without assembly multilayer micro-cell electron capture detector structure of MEMS micro-nano technologies, including bearing of taking root, first stepped gear positioning structure, second stepped gear positioning structure and multi-layer gear layer, the bearing lower face of taking root is fixedly connected on a gear substrate, described second stepped gear positioning structure is set to the lower end of the bearing of taking root, described second stepped gear positioning structure is fixedly connected on the gear substrate, described first stepped gear positioning structure is set to the upper end of the bearing of taking root, the multi-layer gear layer is set in the middle part of the bearing of taking root.The multilayer micro-cell electron capture detector structure of the present invention is integrated, and the assembly precision consistency of multilayer micro-cell electron capture detector structure is more preferable, is more suitable for mass production, gear structure bonding strength higher.
Description
Technical field
The present invention relates to micro-cell electron capture detector technical fields, more particularly to a kind of integrated arming applied to MEMS micro-nano technologies
With multilayer micro-cell electron capture detector structure.
Background technology
MEMS (MEMS) has become the hot spot of industry and academic research, has to industrial expansion critically important
Meaning.Gear refers to the mechanical organ with teeth that can continuously engage transmission movement and power on wheel rim.The effect of gear is by one
The rotation of root axis passes to another axis, to realize deceleration, speedup, deflecting and commutation the purpose of, be a kind of important machinery
Basic part is widely used general.
With the active demand of the development and integrated micro-system of MEMS technology, the trend that mechanical structure moves towards micromation is more next
It is more apparent.Gear, transmission, driving part all suffer from demand miniaturization at present, in microrobot, Micro and nano manipulation platform etc.
Field has wide application space.Using MEMS micro-nano technology technologies carry out Gear Processing, have mass, it is integrated, with
The advantages such as ic process compatibility.And (including UV-LIGA, metal are sacrificial for the metal micro Process mode in MEMS technology technology
Domestic animal layer processing method) the high complicated metal structure of intensity can be obtained, it is the effective ways for carrying out micro-cell electron capture detector processing.
However, the gear structure that the general traditional processing mode using lathe and cutter is processed at present directly applies to MEMS
Micro-nano technology micro-cell electron capture detector field, micro-cell electron capture detector are assembled using peg-in-hole assembly mode, cannot be processed integration without the micro- of assembly
Gear, there are problems that can not mass, assembly precision consistency can not ensure.Metal in MEMS micro-nano technology techniques it is micro- plus
Work mode is prepared generally by the mode of increasing material manufacturing, mode generally plating, sputtering of metal increasing material manufacturing etc., these
The metal material that method makes greatly differs from each other with bulk metal material in terms of the metal qualities such as material density, the strength of materials,
Gear structure is easy failure.
Invention content
The object of the present invention is to provide it is a kind of applied to MEMS micro-nano technologies integration without assembly multilayer micro-cell electron capture detector structure,
To solve the above-mentioned problems of the prior art, it is the integral structure that need not be assembled to make multilayer micro-cell electron capture detector structure, and multilayer is micro-
The assembly precision consistency of gear structure is more preferable, is more suitable for mass production, gear structure bonding strength higher.
To achieve the above object, the present invention provides following schemes：The present invention provides a kind of applied to MEMS micro-nano technologies
Integration without assembly multilayer micro-cell electron capture detector structure, including bearing of taking root, the first stepped gear positioning structure, the second stepped tooth
Wheel location structure and multi-layer gear layer, the bearing lower face of taking root are fixedly connected on a gear substrate, second ladder
Type gear positioning structure is set to the lower end of the bearing of taking root, and the described second stepped gear positioning structure is fixedly connected on institute
It states on gear substrate, the described first stepped gear positioning structure is set to the upper end of the bearing of taking root, the multi-layer gear
Layer is set in the middle part of the bearing of taking root.
Preferably, the multi-layer gear layer includes several gears, passes through separation layer plate bonding between several gears
Together.
Preferably, the upper surface of the described second stepped gear positioning structure is fixedly connected with second and prevents adhesion cylinder, institute
The lower surface for stating the first stepped gear positioning structure is fixedly connected with first and prevents adhesion cylinder.
Preferably, the lower surface of the multi-layer gear layer is fixedly connected with third and prevents adhesion cylinder.
Preferably, described first prevent adhesion cylinder, second prevent adhesion cylinder and the third cylinder that prevents adhesion all is uniformly distributed
In on corresponding surface.
Preferably, described to be fixedly connected as plate bonding.
Preferably, the upper surface of top layer's gear in the multi-layer gear layer is provided with annular groove, first rank
Ladder type gear positioning structure is set in the annular groove, the upper surface of the first stepped gear positioning structure with it is described
The upper surface of top layer's gear is located in approximately the same plane.
Preferably, described first prevent adhesion cylinder between the upper surface of the multi-layer gear layer at a distance from be 10-20 μm, institute
State second prevent adhesion cylinder between the lower surface of the multi-layer gear layer at a distance from be 10-20 μm, the third prevents adhesion cylinder
The distance between upper surface of the gear substrate is 10-20 μm.
Preferably, it is evenly equipped with gear face on the face of gear of the multi-layer gear layer.
The present invention achieves following technique effect compared with the existing technology：
The present invention provides a kind of integrations applied to MEMS micro-nano technologies without assembly multilayer micro-cell electron capture detector structure, the present invention
Bearing of taking root be provided at both ends with the first stepped gear positioning structure and the second stepped gear positioning structure, can effectively about
Beam is located at the multi-layer gear layer taken root on bearing.It takes root bearing, the first stepped gear positioning structure and the second stepped gear
Three structures of location structure link together, and on the one hand make multilayer micro-cell electron capture detector structure of taking root integrated with gear substrate becomes can
The chip-scale mechanical structure that individually shifts, can be used for integrated technique operation, eliminates secondary operation, so as to avoid gear shaft holes pair
What quasi- assembly was brought can not mass, the problems such as consistency can not ensure, parts transfer and assembly manipulation are difficult；On the other hand,
So that the position of multilayer micro-cell electron capture detector is limited, what substantially deviating occurred in the factors such as will not be vibrated because of external environmental factor
Situation.The multilayer micro-cell electron capture detector structure of the present invention is integrated, and the assembly precision consistency of multilayer micro-cell electron capture detector structure is more preferable, more
Suitable for mass production, gear structure bonding strength higher.
Description of the drawings
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the integration for being applied to MEMS micro-nano technologies of the present invention without the axial section view of assembly multilayer micro-cell electron capture detector structure
Figure；
Fig. 2 is the integration for being applied to MEMS micro-nano technologies of the present invention without the vertical view of assembly multilayer micro-cell electron capture detector structure；
Wherein, 1 is bearing of taking root, and 2 be the first stepped gear positioning structure, and 3 be the second stepped gear positioning structure,
4 prevent adhesion cylinder for first, and 5 prevent adhesion cylinder for second, and 6 prevent adhesion cylinder for third, and 7 be annular groove, and 8 be multi-layer gear
Layer, 9 be separation layer, and 10 be gear substrate, and 11 be gear face.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide it is a kind of applied to MEMS micro-nano technologies integration without assembly multilayer micro-cell electron capture detector structure,
Of the existing technology to solve the problems, such as, it is the integral structure that need not be assembled, the micro- tooth of multilayer to make multilayer micro-cell electron capture detector structure
The assembly precision consistency of wheel construction is more preferable, is more suitable for mass production, gear structure bonding strength higher.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is described in further detail.
As shown in Figs. 1-2, the present invention provides a kind of applied to the integrated without assembly multilayer micro-cell electron capture detector of MEMS micro-nano technologies
Structure, including stepped the 2, the second stepped gear positioning structure 3 of gear positioning structure of bearing 1, first of taking root and multi-layer gear
Layer 8,1 lower face of bearing of taking root is fixedly connected on a gear substrate 10, and the second stepped gear positioning structure 3, which is set to, takes root
The lower end of bearing 1, the second stepped gear positioning structure 3 are fixedly connected on gear substrate 10, the first stepped gear positioning
Structure 2 is set to the upper end for bearing 1 of taking root, and multi-layer gear layer 8 is set in the middle part for bearing 1 of taking root.The micro- tooth of multilayer of the present invention
Wheel construction is obtained by the way that process integration is electroplated, and without assembly, bearing is directly grown on gear substrate 10, therefore the bearing is ordered
The 2 and second stepped gear of the first stepped gear positioning structure that is provided at both ends with of entitled bearing 1 of taking root, bearing 1 of taking root is determined
Bit architecture 3, energy operative constraint are located at the multi-layer gear layer 8 taken root on bearing 1.
Stepped 2 and second stepped 3 three structures of gear positioning structure of gear positioning structure of bearing 1, first of taking root connect
It is connected together, on the one hand so that multilayer micro-cell electron capture detector is integrated with gear substrate 10 to take root structure as can individually shift, can be used for
The chip-scale mechanical structure of integrated technique operation, eliminates secondary operation, the nothing brought so as to avoid gear shaft holes alignment assembly
The problems such as method mass, consistency can not ensure, parts transfer and assembly manipulation are difficult.On the other hand so that multilayer micro-cell electron capture detector
Position limited, the case where factors appearance substantially deviates such as will not vibrate because of external environmental factor.The present invention's
Multilayer micro-cell electron capture detector structure is integrated, and the assembly precision consistency of multilayer micro-cell electron capture detector structure is more preferable, is more suitable for batch metaplasia
Production, gear structure bonding strength higher.
Wherein, multi-layer gear layer 8 includes several gears, several described in order to ensure that the position relationship of several gears is stablized
Between gear together by 9 plate bonding of separation layer.
The upper surface of second stepped gear positioning structure 3 is fixedly connected with second and prevents adhesion cylinder 5, the first stepped tooth
The lower surface of wheel location structure 2 is fixedly connected with first and prevents adhesion cylinder 4.The lower surface of multi-layer gear layer 8 is fixedly connected with
Three prevent adhesion cylinder 6.By setting first prevent adhesion cylinder 4, second prevent adhesion cylinder 5 and third prevents adhesion cylinder 6 so that have
Effect prevents the adhesion between adjacent surface, efficiently solves the adhesion problems that MEMS micro-nano process bands are come.In MEMS technology,
Adhesion problems are caused by unbalanced stress, and the planar dimension and thickness the big more be easy to cause adhesion under normal circumstances.This Shen
The structure setting of the cylinder that prevents adhesion please, enables to planar dimension or thickness suitably to increase, to more preferably realize that multilayer is micro-
The slimming of gear.
First prevent adhesion cylinder 4, second prevent adhesion cylinder 5 and third prevent adhesion cylinder 6 be all uniformly distributed in it is corresponding
On surface, the support force between adjacent plane is avoided to be unevenly distributed.
It is described to be fixedly connected as plate bonding in the present embodiment.Plate bonding can realize that the mold of high-aspect-ratio obtains
The good Metal deposition of firm consistency.
The upper surface of top layer's gear in multi-layer gear layer 8 is provided with annular groove 7, the first stepped gear positioning knot
Structure 2 is set in annular groove 7, the upper surface of the upper surface and top layer's gear of the first stepped gear positioning structure 2
In approximately the same plane.First stepped gear positioning structure 2 and the upper surface of top layer's gear are combined together, and are made
The upper surface for obtaining multilayer micro-cell electron capture detector structure is a plane, convenient for integrated with other structures or device in micro-system, into one
Walk the function integration of raising system.
First prevent adhesion cylinder 4 between the upper surface of multi-layer gear layer 8 at a distance from be 10-20 μm, second prevents adhesion cylinder 5
Be 10-20 μm at a distance between the lower surface of multi-layer gear layer 8, third prevent adhesion cylinder 6 and gear substrate 10 upper surface it
Between distance be 10-20 μm.By the setting of the above spacing, it ensure that multi-layer gear layer 8 can rotate.Take root bearing 1 with it is more
There is certain gap between the axis hole of layer gear layer 8, ensures that gear is not stuck while rotation.
Gear face 11 is evenly equipped on the face of gear of multi-layer gear layer 8.By the way that gear face 11, energy are arranged on face of gear
The residual stress in micro-nano technical process is enough discharged, and the adhesion of gear disk can be prevented.
The material of entire gear micro-structure is nickel, and multilayered structure is formed by the form of galavanic growth, from bottom to up according to
It is secondary to grow structure, it is powered in gear substrate 10 plate out the stepped gear positioning structure 3 of first layer structure second first, then existed
Its galavanic growth structure second above prevents adhesion cylinder 5, prevents adhesion in the lower surface galavanic growth structure third of multi-layer gear layer 8
Cylinder 6, and so on galavanic growth goes out the first layer gear of entire gear structure, first layer separation layer, second of gear, second
Layer separation layer, third layer gear, first prevent adhesion cylinder 4 and the first stepped gear positioning structure 2.
Specific case is applied in the present invention, and principle and implementation of the present invention are described, above example
Illustrate the method and its core concept for being merely used to help understand the present invention；Meanwhile for those of ordinary skill in the art, according to
According to the thought of the present invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification
It should not be construed as limiting the invention.
Claims (9)
1. a kind of integration applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure, it is characterised in that：Including taking root
Bearing, the first stepped gear positioning structure, the second stepped gear positioning structure and multi-layer gear layer, it is described to take root under bearing
End face is fixedly connected on a gear substrate, and the described second stepped gear positioning structure is set to described take root under bearing
End, the described second stepped gear positioning structure are fixedly connected on the gear substrate, the described first stepped gear positioning
For structure setting in the upper end of the bearing of taking root, the multi-layer gear layer is set in the middle part of the bearing of taking root.
2. the integration according to claim 1 applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure, special
Sign is：The multi-layer gear layer includes several gears, between several gears together by separation layer plate bonding.
3. the integration according to claim 1 applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure, special
Sign is：The upper surface of the second stepped gear positioning structure is fixedly connected with second and prevents adhesion cylinder, first rank
The lower surface of ladder type gear positioning structure is fixedly connected with first and prevents adhesion cylinder.
4. the integration according to claim 3 applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure, special
Sign is：The lower surface of the multi-layer gear layer is fixedly connected with third and prevents adhesion cylinder.
5. the integration according to claim 4 applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure, special
Sign is：Described first prevent adhesion cylinder, second prevent adhesion cylinder and the third cylinder that prevents adhesion all is uniformly distributed in accordingly
On surface.
6. the integration according to claim 5 applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure, special
Sign is：It is described to be fixedly connected as plate bonding.
7. the integration according to claim 1 applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure, special
Sign is：The upper surface of top layer's gear in the multi-layer gear layer is provided with annular groove, the described first stepped gear
Location structure is set in the annular groove, the upper surface of the described first stepped gear positioning structure and top layer's tooth
The upper surface of wheel is located in approximately the same plane.
8. the integration according to claim 4 applied to MEMS micro-nano technologies is without assembly multilayer micro-cell electron capture detector structure, special
Sign is：Described first prevent adhesion cylinder between the upper surface of the multi-layer gear layer at a distance from be 10-20 μm, described second is anti-
Adhesion cylinder between the lower surface of the multi-layer gear layer at a distance from be 10-20 μm, the third prevents adhesion cylinder and the tooth
It is 10-20 μm to take turns the distance between upper surface of substrate.
9. being applied to the integration of MEMS micro-nano technologies without assembly multilayer micro-cell electron capture detector knot according to claim 1-8 any one of them
Structure, it is characterised in that：It is evenly equipped with gear face on the face of gear of the multi-layer gear layer.
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| CN201810312357.1A CN108317233B (en) | 2018-04-09 | 2018-04-09 | Integrated assembling-free multilayer micro-gear structure applied to MEMS micro-nano processing |
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| CN201810312357.1A CN108317233B (en) | 2018-04-09 | 2018-04-09 | Integrated assembling-free multilayer micro-gear structure applied to MEMS micro-nano processing |
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| CN108317233B CN108317233B (en) | 2023-06-20 |
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| CN108317233B (en) | 2023-06-20 |
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