CN108298810A - A kind of PCVD precipitation equipments - Google Patents
A kind of PCVD precipitation equipments Download PDFInfo
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- CN108298810A CN108298810A CN201810209949.0A CN201810209949A CN108298810A CN 108298810 A CN108298810 A CN 108298810A CN 201810209949 A CN201810209949 A CN 201810209949A CN 108298810 A CN108298810 A CN 108298810A
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- pcvd
- convex block
- heating furnace
- heating
- precipitation equipments
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
The present invention relates to a kind of PCVD precipitation equipments, including long tubular heating furnace and the resonant cavity for being installed in heating stove furnace chamber, the resonant cavity stretches out heating furnace by waveguide and is connected with axial reciprocating device and microwave source, the long tubular heating furnace includes shell, inner walls install insulating layer, heating stove furnace chamber is circumferentially installed on heating element, it is characterised in that is laid between heating furnace shell and insulating layer and inhales wave layer, the suction wave layer is constituted by the identical convex block of shape is uniformly distributed.The present invention can make the microwave for leaking to heating stove furnace chamber multiple reflections between convex block reflect and be absorbed, and the intensity of standing wave that reaching reduces in heating furnace improves the parameter of optical fiber prefabricated rod mandrel to improve the axial uniformity of deposition.Due to reducing influence of the stove standing internal wave to optical fiber parameter, accordingly reduces the intensity for leaking into microwave in workshop, reduce the injury to plant operations personnel's body.The present invention increases the length of qualified plug, reduces fiber manufacturing cost by improving plug axial direction uniformity.
Description
Technical field
The present invention relates to a kind of deposition of plasma chemical vapor deposition for deposit manufacture preform dresses
It sets namely PCVD precipitation equipments, belongs to preform technical field of processing equipment.
Background technology
Fibre Optical Communication Technology has become the extremely important pillar of modern communication.In recent years, with the development of internet and
The demand that network bandwidth requirements increase to optical fiber rapidly increases, and there is an urgent need to improve the generating rate of fiber manufacturing, reduces optical fiber
Production cost, and improve the processing quality of optical fiber.During PCVD depositions prepare preform, use microwave source for magnetic control
Pipe, centre frequency are 2.45GHz or 915MHz.Glass bushing pipe is inserted into Metal cavity, and bushing pipe one end is connected with reaction gas, bushing pipe
Another termination vacuum pump makes to maintain low pressure in bushing pipe, and entire bushing pipe is placed in heating furnace, low in microwave-excitation bushing pipe in resonant cavity
Super pressure-high temperature gas generates plasma, and plasma exciatiaon reaction gas reacts and make reactant adherency and vitrifying is in bushing pipe
Wall, resonant cavity move reciprocatingly along liner conduit length direction, realize the layer by layer deposition in bushing pipe inner wall.Post-depositional bushing pipe is through collapsing
As plug, puts on and be drawn into optical fiber through high-temperature fusion after casing.Existing PCVD devices are mainly by resonant cavity and heating
Stove two parts form, and high-temperature low-pressure gas generates plasma, while part microwave in microwave-excitation glass bushing pipe in resonant cavity
It can be leaked out by two holes that bushing pipe passes through, bushing pipe is bigger, and microwave leakage is bigger.Plug prepared by large scale bushing pipe can be with
The prefabricated rods of major diameter are made, telecommunication optical fiber glass part outer diameter value is 125 μm, and major diameter prefabricated rods can draw longer
Optical fiber, to improve production efficiency and reduce cost, all large scale bushing pipes be reduce one of means of cost, and wait from
Daughter chemical vapor deposition prepares one of development trend of preform.However large scale bushing pipe is leaked in deposition process and is asked
Topic is also more notable.
During plasma activated chemical vapour deposition prepares preform, it is Celsius that heating furnace for crystallizing field provides 1000
It spends to 1300 degrees Celsius of environment temperature, to reduce the metal impurity con that heating furnace is brought, heating furnace thermal insulation material generally selects
With high-purity more empty ceramics.Heating furnace outer wall generally uses metal outer wall, metal outer wall on the one hand can enhance heating furnace intensity, separately
On the one hand microwave leakage can be prevented to workshop in order to avoid damaged to operator's body in workshop.The microwave source of resonator leakage
More empty ceramics can be penetrated, is reflected in stove by stove metal outer wall and forms stronger standing wave, the standing wave energy power region
Fixed, the period is half wavelength, is 60mm for 2.45GHz microwave cycles.The standing wave is not moved with resonant cavity, is added to
It is two point of one wavelength period performance amount strength distribution that microwave, which is formed along bushing pipe axial-periodic, in resonant cavity, causes plug parameter along axis
To with half cyclically-varying.
In order to reduce fluctuation of the prefabricated rods parameter on axis, United States Patent (USP) US2009/0022906 is disclosed reacting furnace
It is moved axially along bushing pipe.The results show that this method has improvement to prefabricated rods axial direction uniformity, however when deposition rate increases or presents
When entering power increase, the effective stick of prefabricated rods can be grown and be impacted, this will increase optical fiber cost.And this method device structure
It is more complicated.
Invention content
Technical problem to be solved by the present invention lies in provide a kind of deposition system in view of the deficiency of the prior art
The PCVD devices that heating furnace standing internal wave intensity can be reduced when standby preform, improve the axial uniformity of deposition, so as to improve
The parameter of optical fiber prefabricated rod mandrel.
The present invention be solve the problems, such as it is set forth above used by technical solution be：Including long tubular heating furnace and it is installed in
The resonant cavity of heating stove furnace chamber, the resonant cavity stretch out heating furnace by waveguide and are connected with axial reciprocating device and microwave source,
The long tubular heating furnace includes shell, and inner walls install insulating layer, and heating stove furnace chamber is circumferentially installed on heating unit
Part, it is characterised in that be laid between heating furnace shell and insulating layer and inhale wave layer, the suction wave layer is identical convex by shape
The uniformly distributed composition of block.
By said program, the suction wave layer is made of triangular pyramid or polygonal pyramid convex block close-packed arrays.
By said program, the apex angle of the triangular pyramid or polygonal pyramid（The angle of conical surface central axis）It is 20 ° ~ 60 °, it is high
Degree is the 1/8 ~ 1 of resonant cavity microwave wavelength.
By said program, the suction wave layer is made of cross-section convex block equidistant radial arrangement.
By said program, the section of the cross-section convex block is circle, triangle, square or hexagon.
By said program, the suction wave layer is made of bar shaped cross-section convex block equidistant radial arrangement.
By said program, the 1/8 ~ 1/ of the convex block of the equidistant interval or the height resonant cavity microwave wavelength of bar shaped convex block
2, the planimetric area of all convex blocks or bar shaped convex block, which is equal to or less than, entire inhales the 1/2 of wave level product.
By said program, the suction wave layer inhales wave by high temperature resistants absorption-types such as the carbon fibers, silicon carbide or graphite that are modified
Material is made, or is made of metal.
By said program, the shell is metal shell, and the insulating layer is porous ceramic thermal insulation material.
By said program, the long tubular heating furnace housing cross-sectional is rectangle, and furnace chamber is also rectangle.
By said program, the heating element is carbon-point.
The beneficial effects of the present invention are：1, wave layer is inhaled by being laid between heating furnace shell and insulating layer, can made
It leaks to the microwave of the heating stove furnace chamber multiple reflections between convex block to reflect and absorbed, bump material can be that high temperature microwave is inhaled
Material is received, can also be metal, absorbing material reflection and transmission absorption microwave are mainly utilized using high temperature microwave absorbing material,
Reflection simultaneously partially due to the intensity for reducing standing wave can be interfered, doing convex block using metal mainly allows convex block and base
The microwave of reflection interferes the intensity for reducing microwave, reaches the intensity of standing wave reduced in heating furnace, to improve the axis of deposition
To uniformity, improve the parameter of optical fiber prefabricated rod mandrel.2, due to reducing influence of the stove standing internal wave to optical fiber parameter, accordingly subtract
Lack the intensity for leaking into microwave in workshop, reduces the injury to plant operations personnel's body.3, axial by improving plug
Uniformity increases the length of qualified plug, reduces fiber manufacturing cost.
Description of the drawings
Fig. 1 is the schematic cross-sectional view of one embodiment of the present of invention.
Fig. 2 is the lateral sectional structure chart of heating furnace in one embodiment of the invention
Fig. 3 is the suction wave schematic diagram of a layer structure of one embodiment of the invention.
Fig. 4 is the suction wave schematic diagram of a layer structure of another embodiment of the present invention.
Fig. 5 is the suction wave schematic diagram of a layer structure of the third embodiment of the present invention.
Fig. 6 is shown using core diameter distribution compares figure before and after the present invention.
Specific implementation mode
The present invention is described in further details below in conjunction with the accompanying drawings.
One embodiment enters Fig. 1, shown in 3, including long tubular heating furnace and the resonant cavity for being installed in heating stove furnace chamber
102, long tubular heating furnace has the furnace body composition to Semi-folding, and the open channel that resonant cavity is back and forth run is provided among lower end,
The resonant cavity stretches out heating furnace through open channel by waveguide and is connected with axial reciprocating device and microwave source 105, and couples
Impedance matching unit 104, glass bushing pipe 103 is axially mounted along heating furnace and passes through resonant cavity, axial reciprocating device band dynamic resonance
Chamber reciprocatingly moves in heating furnace, and the long tubular heating furnace includes shell 203, and inner walls install insulating layer 201,
The shell is metal shell, and the insulating layer is porous ceramic thermal insulation material, between heating furnace shell and insulating layer
It is laid with and inhales wave layer 202, the suction wave layer is made of rectangular pyramid convex block close-packed arrays, the apex angle of the rectangular pyramid（The conical surface
The angle of central axis）It is 45 °, highly 1/4 for resonant cavity microwave wavelength.The suction wave layer is by silicon carbide or made of metal
At.The resonant cavity microwave parameters of the present embodiment are：Frequency is 2.45GHz, wavelength 122.4mm, a length of 61.2mm of corresponding half-wave.
It is circumferentially installed on heating element 204 in heating stove furnace chamber, the heating element is carbon-point.
Second embodiment is as shown in Figure 2,4, it with upper one embodiment the difference is that the suction wave layer by
Cross-section convex block equidistant radial arrangement is constituted, and the section of the cross-section convex block is circle, i.e., convex block is cylinder, convex block
Height is the 1/3 of resonant cavity microwave wavelength, and the planimetric area of all convex blocks is equal to the 1/2 of entire suction wave level product.
Third embodiment as shown in figure 5, it with upper second embodiment the difference is that the suction wave layer by
Bar shaped cross-section convex block equidistant radial arrangement is constituted, and the cloth set direction of bar shaped convex block is consistent with the axis direction of heating furnace, described
Prismatic shapes be rectangle, the height of bar shaped convex block is the 1/3 of resonant cavity microwave wavelength, the upright projection of all bar shaped convex blocks
Area is equal to entire 2/5 for inhaling wave level and accumulating.
Fig. 6 is shown using PCVD depositions plug refractive index core diameter distribution curve before and after the present invention, can be shown using the present invention
Work reduces heating furnace standing internal wave intensity, increases plug parameter uniformity, and shaking using core radius fluctuation in the past of the invention is shown in figure
Width is 0.4mm, and period of waves, 60mm, was reduced to 0.15mm, the period is still using core radius fluctuation amplitude after the present invention
60mm, it is seen that the present invention is with obvious effects.
Claims (10)
1. a kind of PCVD precipitation equipments, including long tubular heating furnace and the resonant cavity for being installed in heating stove furnace chamber, the resonance
Chamber stretches out heating furnace by waveguide and is connected with axial reciprocating device and microwave source, and the long tubular heating furnace includes shell,
Inner walls install insulating layer, and heating stove furnace chamber is circumferentially installed on heating element, it is characterised in that in heating furnace shell and guarantor
It is laid between warm layer and inhales wave layer, the suction wave layer is constituted by the identical convex block of shape is uniformly distributed.
2. PCVD precipitation equipments as described in claim 1, it is characterised in that the suction wave layer is convex by triangular pyramid or polygonal pyramid
Block close-packed arrays are constituted.
3. PCVD precipitation equipments as described in claim 2, it is characterised in that the apex angle of the triangular pyramid or polygonal pyramid is 20 °
~ 60 °, highly 1/8 ~ 1 for resonant cavity microwave wavelength.
4. PCVD precipitation equipments as described in claim 1, it is characterised in that the suction wave layer by cross-section convex block it is equidistant between
Every being arranged to make up.
5. PCVD precipitation equipments as described in claim 4, it is characterised in that the section of the cross-section convex block is circle, three
Angular, square or hexagon.
6. PCVD precipitation equipments as described in claim 1, it is characterised in that the suction wave layer is by bar shaped cross-section convex block etc.
It is constituted away from being alternatively arranged.
7. PCVD precipitation equipments as described in claim 6, it is characterised in that the convex block or bar shaped convex block of the equidistant interval
Height resonant cavity microwave wavelength 1/8 ~ 1/2, the planimetric area of all convex blocks or bar shaped convex block is equal to or less than entire
Inhale the 1/2 of wave level product.
8. by the PCVD precipitation equipments described in claims 1 or 2 or 4 or 6, it is characterised in that the suction wave layer is by the carbon that is modified
The high temperature resistants absorption-type absorbing material such as fiber, silicon carbide or graphite is made, or is made of metal.
9. by the PCVD precipitation equipments described in claims 1 or 2 or 4 or 6, it is characterised in that the shell is metal shell,
The insulating layer is porous ceramic thermal insulation material.
10. PCVD precipitation equipments as described in claim 1, it is characterised in that the long tubular heating furnace housing cross-sectional is
Rectangle, furnace chamber are also rectangle, and the heating element is carbon-point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810209949.0A CN108298810A (en) | 2018-03-14 | 2018-03-14 | A kind of PCVD precipitation equipments |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810209949.0A CN108298810A (en) | 2018-03-14 | 2018-03-14 | A kind of PCVD precipitation equipments |
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| Publication Number | Publication Date |
|---|---|
| CN108298810A true CN108298810A (en) | 2018-07-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810209949.0A Pending CN108298810A (en) | 2018-03-14 | 2018-03-14 | A kind of PCVD precipitation equipments |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4844007A (en) * | 1986-11-17 | 1989-07-04 | U.S. Philips Corporation | Device for providing glass layers on the inside of a tube |
| JP2003321238A (en) * | 2002-04-30 | 2003-11-11 | Fujikura Ltd | Method and apparatus for producing optical fiber preform |
| CN101109075A (en) * | 2007-07-24 | 2008-01-23 | 长飞光纤光缆有限公司 | Plasma resonant cavity waveguide assembly with heat insulating function |
| CN102383108A (en) * | 2003-12-30 | 2012-03-21 | 德拉卡纤维技术有限公司 | Furnace for carrying out plasma chemical vapour deposition |
| CN103043894A (en) * | 2012-11-27 | 2013-04-17 | 长飞光纤光缆有限公司 | Holding furnace of optical fiber preform deposition lathe for plasma chemistry vapor deposition (PCVD) processing |
-
2018
- 2018-03-14 CN CN201810209949.0A patent/CN108298810A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4844007A (en) * | 1986-11-17 | 1989-07-04 | U.S. Philips Corporation | Device for providing glass layers on the inside of a tube |
| JP2003321238A (en) * | 2002-04-30 | 2003-11-11 | Fujikura Ltd | Method and apparatus for producing optical fiber preform |
| CN102383108A (en) * | 2003-12-30 | 2012-03-21 | 德拉卡纤维技术有限公司 | Furnace for carrying out plasma chemical vapour deposition |
| CN101109075A (en) * | 2007-07-24 | 2008-01-23 | 长飞光纤光缆有限公司 | Plasma resonant cavity waveguide assembly with heat insulating function |
| CN103043894A (en) * | 2012-11-27 | 2013-04-17 | 长飞光纤光缆有限公司 | Holding furnace of optical fiber preform deposition lathe for plasma chemistry vapor deposition (PCVD) processing |
Non-Patent Citations (1)
| Title |
|---|
| 辛志军主编: "《室内电磁辐射污染控制与防护技术张忠伦》", 30 September 2016, 中国建材工业出版社 * |
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Application publication date: 20180720 |
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