CN108288659B - Extrusion-proof clamp for etching edge of single solar cell - Google Patents
Extrusion-proof clamp for etching edge of single solar cell Download PDFInfo
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- CN108288659B CN108288659B CN201810282895.0A CN201810282895A CN108288659B CN 108288659 B CN108288659 B CN 108288659B CN 201810282895 A CN201810282895 A CN 201810282895A CN 108288659 B CN108288659 B CN 108288659B
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- 238000005530 etching Methods 0.000 title claims abstract description 36
- 230000001681 protective effect Effects 0.000 claims abstract description 25
- 238000001125 extrusion Methods 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000009434 installation Methods 0.000 claims description 18
- 238000007789 sealing Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 239000011120 plywood Substances 0.000 description 6
- 229910021419 crystalline silicon Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Drying Of Semiconductors (AREA)
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Abstract
Description
技术领域Technical field
本发明涉及太阳能电池技术领域，具体为一种单片太阳能电池片边缘刻蚀用防挤压夹具。The invention relates to the technical field of solar cells, specifically an anti-extrusion clamp for edge etching of single-chip solar cells.
背景技术Background technique
在太阳能电池片制作工艺步骤如下：1、制绒，将硅片表面腐蚀成金字塔状的形貌；2、扩散，硅片表面形成PN结；3、刻蚀，将硅片边缘的PN结去掉，防止电池短路；4、去PSG，清洗硅片表面，去除二氧化硅层；5、PECVD，在硅片表面镀一层减反射膜；6、印刷烧结，印刷电极及背场，并烘干烧结。The manufacturing process steps of solar cells are as follows: 1. Texturing, etching the surface of the silicon wafer into a pyramid-like shape; 2. Diffusion, forming a PN junction on the surface of the silicon wafer; 3. Etching, removing the PN junction on the edge of the silicon wafer , to prevent battery short circuit; 4. Remove PSG, clean the surface of the silicon wafer, and remove the silicon dioxide layer; 5. PECVD, coat an anti-reflective film on the surface of the silicon wafer; 6. Printing and sintering, print the electrodes and back field, and dry them sintering.
面对全球能源危机，太阳能光伏发电技术已经成为半导体行业的新的发展热点，晶硅太阳能电池制造分为制绒、扩散、等离子刻蚀、PSG清洗、PECVD镀膜、丝网印刷、烧结等工序，而扩散工艺会导致硅片边缘出现N型结层，会导致电池正负电极出现N型导通通路，影响太阳能电池的发电效率，因此需要将该层物质去除。Facing the global energy crisis, solar photovoltaic power generation technology has become a new development hotspot in the semiconductor industry. The manufacturing of crystalline silicon solar cells is divided into processes such as texturing, diffusion, plasma etching, PSG cleaning, PECVD coating, screen printing, and sintering. The diffusion process will cause an N-type junction layer to appear on the edge of the silicon wafer, which will cause N-type conduction paths to appear on the positive and negative electrodes of the battery, affecting the power generation efficiency of the solar cell. Therefore, this layer of material needs to be removed.
等离子刻蚀工艺是一种常用的刻蚀方法，该工艺是在辉光放电条件下将气体CF4激发成等离子体，对硅片周边进行刻蚀。等离子刻蚀是目前产业常用的刻蚀方法之一，其原理为采用CF4和O2作为反应气体，将硅片叠放在一起后，让裸露出来的边缘的硅材料和反应气体反生反应，最终起到边缘刻蚀的效果，打断电池正负两级的导通通路。从刻蚀的原理可看出，刻蚀夹具是影响刻蚀效果的重要因素，夹具对硅片的施压太大会导致硅片碎裂，施压太小或者不均匀会导致反应气体渗透至硅片上下表面，对不需要刻蚀的区域造成损伤，影响发电效率。传统夹具结构简单，刻蚀效果不稳定，刻蚀夹具结构为采用两块金属矩形板，金属板两相对边连接有金属螺杆，两侧通过螺杆和螺栓将两块金属板间的硅片夹紧。The plasma etching process is a commonly used etching method. This process excites gas CF4 into plasma under glow discharge conditions to etch the periphery of the silicon wafer. Plasma etching is one of the commonly used etching methods in the industry. Its principle is to use CF4 and O2 as reactive gases. After stacking the silicon wafers together, the silicon material on the exposed edges reacts with the reactive gases. Finally, It has the effect of edge etching and interrupts the conductive paths of the positive and negative levels of the battery. It can be seen from the principle of etching that the etching fixture is an important factor affecting the etching effect. If the fixture exerts too much pressure on the silicon wafer, it will cause the silicon wafer to break. If the pressure is too small or uneven, the reaction gas will penetrate into the silicon. The upper and lower surfaces of the chip will cause damage to areas that do not need to be etched, affecting power generation efficiency. The traditional fixture structure is simple and the etching effect is unstable. The etching fixture structure uses two metal rectangular plates. The two opposite sides of the metal plates are connected with metal screws. The silicon wafers between the two metal plates are clamped by screws and bolts on both sides. .
现有技术中申请号为201120531290.4的“一种太阳能电池片的刻蚀夹具”、申请号为201110309173.8的“一种晶硅太阳能电池干法刻蚀夹具”以及申请号为201621296389.X的“一种晶硅太阳能电池片的刻蚀夹具”这三个申请文件均可以解决传统夹具的缺陷，这三种夹具均是通过先将电池片堆叠放置于两块夹板之间，然后放入等离子刻蚀机内进行边缘刻蚀。Among the existing technologies are “an etching fixture for solar cells” with application number 201120531290.4, “an etching fixture for crystalline silicon solar cells” with application number 201110309173.8, and “an etching fixture for crystalline silicon solar cells” with application number 201621296389.X The three application documents "Etching Clamp for Crystalline Silicon Solar Cells" can all solve the shortcomings of traditional clamps. All three clamps are made by first stacking the cells between two plywood and then placing them into a plasma etching machine. Edge etching is performed inside.
但是上述的申请文件在进行边缘刻蚀时，还存在较为明显的缺陷：1、虽然可以使电池片在夹设时受力更加均匀，但是一批电池片中仍然会存在少部分电池片表面过于光滑，无法很好的与其余电池片完成堆叠夹设，容易发生滑动，此时需要将这部分电池片选出，单独进行边缘刻蚀，但是由于表面更光滑，夹具提供的力度必须更大，则更容易造成电池片损坏，产生经济损失；2、使用夹具对电池片进行堆叠夹设，一定会对电池片上表面的PN结造成磨损，从而影响电池片的光电转换效率，造成不必要的损失。However, the above-mentioned application documents still have obvious defects when performing edge etching: 1. Although the cells can be more evenly stressed when clamped, there will still be a small number of cells in a batch of cells whose surfaces are too thin. It is smooth and cannot be stacked and clamped well with other battery cells, and it is easy to slide. At this time, this part of the battery cells needs to be selected and the edges are etched separately. However, because the surface is smoother, the clamp must provide greater strength. It is more likely to damage the cells and cause economic losses; 2. Using clamps to stack the cells will definitely cause wear to the PN junction on the upper surface of the cells, thus affecting the photoelectric conversion efficiency of the cells and causing unnecessary losses. .
发明内容Contents of the invention
本发明的目的在于提供一种单片太阳能电池片边缘刻蚀用防挤压夹具，以解决上述背景技术中提出的问题。The object of the present invention is to provide an anti-extrusion clamp for edge etching of single-chip solar cells to solve the problems raised in the above background technology.
为实现上述目的，本发明提供如下技术方案：In order to achieve the above objects, the present invention provides the following technical solutions:
一种单片太阳能电池片边缘刻蚀用防挤压夹具，包括基板、夹设装置以及固定装置，所述夹设装置和固定装置均设置于基板上；An anti-extrusion clamp for single-chip solar cell edge etching, including a substrate, a clamping device and a fixing device, the clamping device and the fixing device are both arranged on the substrate;
夹设装置，包括夹板、底板以及按钮开关，所述夹板固定于基板上，所述夹板一侧侧壁开设有安装槽和开关槽，所述安装槽设置于基板和开关槽之间，所述安装槽内固定有电动推杆一，所述底板活动插接于安装槽内，且底板固定于电动推杆一杆体上，所述开关槽内固定有弹簧，所述按钮开关活动插设于开关槽内，所述按钮开关固定于弹簧上，所述按钮开关与电动推杆一电性连接；The clamping device includes a splint, a bottom plate and a button switch. The splint is fixed on the base plate. A mounting slot and a switch slot are provided on one side wall of the splint. The mounting slot is arranged between the base plate and the switch slot. An electric push rod is fixed in the installation groove, the bottom plate is movably plugged into the installation groove, and the bottom plate is fixed on the electric push rod body. A spring is fixed in the switch groove, and the button switch is movably inserted into the switch. In the slot, the button switch is fixed on the spring, and the button switch is electrically connected to the electric push rod;
固定装置，包括移动板、保护罩以及真空吸盘，所述移动板活动设置于基板上，所述移动板上设置有控制面板，所述移动板靠近安装槽一侧固定有电动推杆二，所述保护罩固定于电动推杆二杆体上，所述保护罩中活动插设有固定杆，所述固定杆一端固定于移动板上，所述真空吸盘固定于固定杆远离移动板一端，所述电动推杆二和真空吸盘均电性连接于控制面板上。The fixing device includes a moving plate, a protective cover and a vacuum suction cup. The moving plate is movably arranged on the base plate. A control panel is provided on the moving plate. Two electric push rods are fixed on the side of the moving plate close to the installation slot. The protective cover is fixed on the two rod bodies of the electric push rod. A fixed rod is movably inserted in the protective cover. One end of the fixed rod is fixed on the moving plate. The vacuum suction cup is fixed on the end of the fixed rod away from the moving plate. The electric push rod 2 and the vacuum suction cup are both electrically connected to the control panel.
优选的，所述夹板靠近移动板一侧侧壁上设置有缓冲层。Preferably, a buffer layer is provided on the side wall of the clamping plate close to the moving plate.
优选的，所述保护罩与固定杆连接处设置有密封套。Preferably, a sealing sleeve is provided at the connection between the protective cover and the fixed rod.
优选的，所述固定杆对称设置于电动推杆二两侧。Preferably, the fixed rods are symmetrically arranged on both sides of the electric push rod.
优选的，所述移动板靠近基板一端固定有滑块，所述滑块活动设置于滑槽中，所述滑槽开设在基板上。Preferably, a slider is fixed at one end of the moving plate close to the base plate, and the slider is movably arranged in a chute, and the chute is opened on the base plate.
优选的，所述移动板上固定有真空发生器，所述真空发生器分别连接于真空吸盘和控制面板上。Preferably, a vacuum generator is fixed on the moving plate, and the vacuum generator is connected to the vacuum suction cup and the control panel respectively.
与现有技术相比，本发明的有益效果是：Compared with the prior art, the beneficial effects of the present invention are:
本发明中底板用来放置单片电池片，然后推动移动板向夹板一侧移动，固定杆上的真空吸盘直接将电池片吸附固定住，然后将电池片推动至贴设在夹板侧壁上，电池片触碰到按钮开关，底板运动至安装槽内，不再对电池片起支撑作用，电池片通过真空吸盘固定在夹板和保护罩之间，然后通过保护罩的移动，将电池片远离夹板一侧表面罩住，通过夹板和保护罩很好的保护表面免受刻蚀。The bottom plate of the invention is used to place a single battery piece, and then push the movable plate to move to the side of the plywood. The vacuum suction cup on the fixed rod directly absorbs and fixes the battery piece, and then pushes the battery piece until it is attached to the side wall of the plywood. When the battery piece touches the button switch, the bottom plate moves into the installation slot and no longer supports the battery piece. The battery piece is fixed between the splint and the protective cover through the vacuum suction cup, and then the battery piece is moved away from the splint by the movement of the protective cover. One side of the surface is covered, and the surface is well protected from etching by the plywood and protective cover.
本发明通过真空吸盘的设置，避免了电池片被挤压夹设，有效的防止了碎片现象的产生，而且通过真空吸盘来吸附固定电池片的上表面，能够更好的避免上表面的PN结被破坏，不会影响电池片的光电转换效率，十分有效且值得推广。Through the arrangement of the vacuum suction cup, the present invention avoids the battery chip from being squeezed and sandwiched, effectively preventing the occurrence of debris. Moreover, the upper surface of the battery chip is adsorbed and fixed by the vacuum suction cup, which can better avoid the PN junction on the upper surface. If it is destroyed, it will not affect the photoelectric conversion efficiency of the cell. It is very effective and worthy of promotion.
本发明可以将无法直接堆叠夹设的单片电池片进行固定夹设，从而在不会夹碎电池片以及不会破坏电池片表面PN结的情况下，合理有效地进行边缘刻蚀，大大提高了工作效率，也避免了大量的经济损失。The present invention can fix and clamp single-chip solar cells that cannot be directly stacked and clamped, so that edge etching can be performed reasonably and effectively without crushing the solar cells and damaging the PN junction on the surface of the solar cells, greatly improving the efficiency of the process. Improve work efficiency and avoid a lot of economic losses.
附图说明Description of the drawings
图1为本发明的夹具整体结构示意图；Figure 1 is a schematic diagram of the overall structure of the clamp of the present invention;
图2为本发明的夹板结构剖视示意图；Figure 2 is a schematic cross-sectional view of the plywood structure of the present invention;
图3为本发明的基板与移动板连接结构示意图；Figure 3 is a schematic diagram of the connection structure between the base plate and the moving plate of the present invention;
图4为本发明的保护罩与固定杆连接结构示意图；Figure 4 is a schematic diagram of the connection structure between the protective cover and the fixed rod of the present invention;
图5为本发明进行刻蚀时状态示意图。Figure 5 is a schematic diagram of the state during etching according to the present invention.
图中：1基板、2夹板、3安装槽、4电动推杆一、5底板、6开关槽、7按钮开关、8弹簧、9移动板、91滑块、92滑槽、10控制面板、11电动推杆二、12保护罩、121密封套、13固定杆、14真空吸盘、141真空发生器、100电池片。In the picture: 1 base plate, 2 plywood, 3 installation slot, 4 electric push rod 1, 5 base plate, 6 switch slot, 7 button switch, 8 spring, 9 moving plate, 91 slider, 92 chute, 10 control panel, 11 Electric push rod 2, 12 protective cover, 121 sealing sleeve, 13 fixed rod, 14 vacuum suction cup, 141 vacuum generator, 100 battery pieces.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.
请参阅图1-5，本发明提供一种技术方案：Please refer to Figures 1-5. The present invention provides a technical solution:
一种单片太阳能电池片边缘刻蚀用防挤压夹具，如说明书附图1所示，包括基板1、夹设装置以及固定装置，夹设装置和固定装置均设置于基板1上，基板1的设置，方便夹具整体的移动和操作，夹设装置固定于基板1上表面，固定装置活动设置于基板1上表面，固定装置可以沿着基板1上表面平稳的移动。An anti-extrusion clamp for edge etching of single-chip solar cells, as shown in Figure 1 of the description, includes a substrate 1, a clamping device and a fixing device. The clamping device and the fixing device are both arranged on the substrate 1. The substrate 1 The setting facilitates the overall movement and operation of the clamp. The clamping device is fixed on the upper surface of the base plate 1, and the fixing device is movably set on the upper surface of the base plate 1. The fixing device can move smoothly along the upper surface of the base plate 1.
夹设装置，包括夹板2、底板5以及按钮开关7，夹板2固定于基板1上，夹板2垂直固定在基板1上表面，夹板2一侧侧壁开设有安装槽3和开关槽6，开关槽6设置于安装槽3上方，安装槽3设置于基板1和开关槽6之间，安装槽3内固定有电动推杆一4，电动推杆一4通过外部电源提供电能，电动推杆一4选用无锡艾尔特线性运动机械有限公司生产的DT50型电动推杆，可以在通电后直接通过开关控制往复直线运动，十分方便，底板5活动插接于安装槽3内，底板5可以在安装槽3内自由活动，且底板5固定于电动推杆一4杆体上，当电动推杆一4没有被启动时，底板5处于安装槽3外部，用来放置电池片100，当电动推杆一4启动后，电动推杆一4的杆体带动底板5向安装槽3内部运动，完全回缩至安装槽3内部，如说明书附图5所示。The clamping device includes a clamping plate 2, a bottom plate 5 and a button switch 7. The clamping plate 2 is fixed on the base plate 1. The clamping plate 2 is vertically fixed on the upper surface of the base plate 1. The side wall of the clamping plate 2 is provided with a mounting slot 3 and a switch slot 6. The switch The slot 6 is arranged above the installation slot 3. The installation slot 3 is arranged between the base plate 1 and the switch slot 6. An electric push rod 4 is fixed in the installation slot 3. The electric push rod 4 provides electric energy through an external power supply. The electric push rod 1 4. Use the DT50 electric push rod produced by Wuxi Airte Linear Motion Machinery Co., Ltd., which can directly control the reciprocating linear motion through the switch after powering on. It is very convenient. The bottom plate 5 is movable and plugged into the installation slot 3. The bottom plate 5 can be installed The slot 3 is free to move, and the bottom plate 5 is fixed on the electric push rod 14. When the electric push rod 1 is not activated, the bottom plate 5 is outside the installation slot 3 and is used to place the battery piece 100. When the electric push rod 1 After 4 is started, the rod body of the electric push rod 14 drives the bottom plate 5 to move to the inside of the installation slot 3 and completely retracts to the inside of the installation slot 3, as shown in Figure 5 of the instruction manual.
开关槽6内固定有弹簧8，弹簧8水平设置于开关槽6内，按钮开关7活动插设于开关槽6内，按钮开关7固定于弹簧8上，弹簧8用来起到复位的作用，按钮开关7初始状态时，按钮开关7远离弹簧8一端部分露出开关槽6外，便于电池片100的触碰，从而实现打开按钮开关7的作用，按钮开关7与电动推杆一4电性连接，当按钮开关7被挤压触碰后，控制电动推杆一4通电启动，将底板5回缩至安装槽3内，从而将电池片100的底部边缘暴露出来，以便对边缘进行刻蚀。A spring 8 is fixed in the switch slot 6. The spring 8 is horizontally arranged in the switch slot 6. The push button switch 7 is movably inserted in the switch slot 6. The push button switch 7 is fixed on the spring 8. The spring 8 is used to reset. In the initial state of the push button switch 7, the end of the push button switch 7 away from the spring 8 is partially exposed outside the switch groove 6 to facilitate the contact of the battery piece 100, thus realizing the function of opening the push button switch 7. The push button switch 7 is electrically connected to the electric push rod 14 , when the button switch 7 is squeezed and touched, the electric push rod 1 4 is controlled to be energized and started, and the bottom plate 5 is retracted into the installation slot 3, thereby exposing the bottom edge of the battery piece 100 so that the edge can be etched.
固定装置，包括移动板9、保护罩12以及真空吸盘14，移动板9活动设置于基板1上，移动板9靠近基板1一端固定有滑块91，滑块91活动设置于滑槽92中，滑槽92开设在基板1上，移动板9通过滑块91配合着滑槽92的设置，可以自由的在基板1上表面进行平稳的移动。The fixing device includes a moving plate 9, a protective cover 12 and a vacuum suction cup 14. The moving plate 9 is movably arranged on the base plate 1. A slider 91 is fixed at one end of the moving plate 9 close to the base plate 1. The slider 91 is movably set in the chute 92. The chute 92 is provided on the base plate 1 . The sliding block 91 cooperates with the setting of the chute 92 so that the moving plate 9 can freely and smoothly move on the upper surface of the base plate 1 .
移动板9上设置有控制面板10，控制面板10固定于移动板9上，移动板9靠近安装槽3一侧固定有电动推杆二11，电动推杆二11也通过外部电源提供电能，电动推杆二11由于带动的部件较多，所以选用动力更大的推杆类型，选用无锡艾尔特线性运动机械有限公司生产的DT150型电动推杆，保护罩12固定于电动推杆二11杆体上，电动推杆二11启动后，电动推杆二11的杆体带动保护罩12进行水平运动。A control panel 10 is provided on the movable plate 9. The control panel 10 is fixed on the movable plate 9. An electric push rod 2 11 is fixed on the side of the movable plate 9 close to the installation slot 3. The electric push rod 2 11 also provides electric energy through an external power supply. Since push rod 211 drives many parts, a push rod type with greater power is selected. The DT150 electric push rod produced by Wuxi Airte Linear Motion Machinery Co., Ltd. is used. The protective cover 12 is fixed on the body of electric push rod 211. On, after the electric push rod 2 11 is started, the rod body of the electric push rod 2 11 drives the protective cover 12 to move horizontally.
保护罩12中活动插设有固定杆13，固定杆13水平设置，保护罩12可以在固定杆13上自由滑动，固定杆13一端固定于移动板9上，固定杆13通过移动板9进行固定，也就可以随着移动板9一起同步运动，真空吸盘14固定于固定杆13远离移动板9一端，固定杆13贯穿保护罩12，另一端固定有真空吸盘14，真空吸盘用来对电池片100进行吸附固定，当真空吸盘14吸附固定住电池片100后，电动推杆二11带动保护罩12向电池片100一侧运动，使保护罩12刚好将电池片100靠近真空吸盘14一侧的表面完全罩住，防止刻蚀气体接触。A fixed rod 13 is movably inserted in the protective cover 12. The fixed rod 13 is set horizontally. The protective cover 12 can slide freely on the fixed rod 13. One end of the fixed rod 13 is fixed on the moving plate 9. The fixed rod 13 is fixed by the moving plate 9. , that is, it can move synchronously with the moving plate 9. The vacuum suction cup 14 is fixed on the end of the fixed rod 13 away from the moving plate 9. The fixed rod 13 penetrates the protective cover 12, and the other end is fixed with the vacuum suction cup 14. The vacuum suction cup is used to clean the battery cells. 100 is adsorbed and fixed. When the vacuum suction cup 14 adsorbs and fixes the battery piece 100, the electric push rod 2 11 drives the protective cover 12 to move toward the battery piece 100, so that the protective cover 12 just places the battery piece 100 close to the side of the vacuum suction cup 14. The surface is completely covered to prevent etching gas contact.
控制面板10上设置有多个单独工作的开关，电动推杆二11和真空吸盘14均电性连接于控制面板10上，控制面板10上的开关分别单独与电动推杆二11、真空吸盘14连接，移动板9上固定有真空发生器141，真空发生器141分别连接于真空吸盘14和控制面板10上，通过控制面板10上开关的控制启动，使得真空发生器141抽出真空，让真空吸盘14能够正常工作，对电池片100进行吸附，当吸附固定完成后，控制面板10上的开关控制电动推杆二11启动，带动保护罩12将电池片100罩住，然后进行刻蚀。The control panel 10 is provided with a plurality of switches that work independently. The electric push rod 2 11 and the vacuum suction cup 14 are both electrically connected to the control panel 10 . The switches on the control panel 10 are individually connected to the electric push rod 2 11 and the vacuum suction cup 14 . connection, a vacuum generator 141 is fixed on the moving plate 9. The vacuum generator 141 is connected to the vacuum suction cup 14 and the control panel 10 respectively. It is activated by the control of the switch on the control panel 10, so that the vacuum generator 141 draws out the vacuum and allows the vacuum suction cup to 14 can work normally and adsorb the battery chip 100. After the adsorption and fixation is completed, the switch on the control panel 10 controls the electric push rod 211 to start, driving the protective cover 12 to cover the battery chip 100, and then etching is performed.
作为一个优选，夹板2靠近移动板9一侧侧壁上设置有缓冲层，缓冲层材质选用橡胶材料，可以对电池片100进行保护，也能更好的防止电池片100表面接触到刻蚀气体。As a preferred option, a buffer layer is provided on the side wall of the splint 2 close to the moving plate 9. The buffer layer is made of rubber material, which can protect the battery sheet 100 and better prevent the surface of the battery sheet 100 from contacting the etching gas. .
作为一个优选，保护罩12与固定杆13连接处设置有密封套121，防止保护罩12在固定杆13上移动时从连接处漏入刻蚀气体。Preferably, a sealing sleeve 121 is provided at the connection between the protective cover 12 and the fixed rod 13 to prevent the etching gas from leaking from the connection when the protective cover 12 moves on the fixed rod 13 .
作为一个优选，固定杆13对称设置于电动推杆二11两侧，对称设置的两根固定杆13，可以使得结果更加稳定，而且对电池片100的吸附固定效果更好。As a preferred option, the fixing rods 13 are symmetrically arranged on both sides of the electric push rod 2 11 . The two symmetrically arranged fixing rods 13 can make the result more stable and have a better adsorption and fixation effect on the battery sheet 100 .
尽管已经示出和描述了本发明的实施例，对于本领域的普通技术人员而言，可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型，本发明的范围由所附权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art will understand that various changes, modifications, and substitutions can be made to these embodiments without departing from the principles and spirit of the invention. and modifications, the scope of the invention is defined by the appended claims and their equivalents.
Claims (6)
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| JP2003074154A (en) * | 2001-06-21 | 2003-03-12 | Mitsubishi Electric Corp | Fixing device for solar cell panel |
| CN204673113U (en) * | 2015-03-13 | 2015-09-30 | 中建材浚鑫科技股份有限公司 | A kind of cell piece fixture |
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