CN108254362A - A kind of multi-channel laser induced breakdown spectrograph and multi-channel spectral detection method - Google Patents
A kind of multi-channel laser induced breakdown spectrograph and multi-channel spectral detection method Download PDFInfo
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Abstract
本发明公开了一种多通道激光诱导击穿光谱仪及多通道光谱探测方法，光谱仪包括：圆环法兰，其上均匀安装多个探测透镜组；激光器，设置在圆环法兰的中心；激光器的发射端和探测透镜组的入光端均朝向被测物体；探测透镜组的出光端设置连接光纤，连接光纤末端合束为光纤束，光纤束连接光谱探测器；激光器发出激光后，将被测物体诱导出等离子态物质，其能级跃迁过程中辐射出的光通过圆环法兰上的多个探测透镜组接收，经由连接光纤和光纤束传送至光谱探测器。本发明既可以解决接收角度的选择问题，也可以通过多通道方式增强最终进入光谱探测器的信号能量，从而提高了信噪比。
The invention discloses a multi-channel laser-induced breakdown spectrometer and a multi-channel spectral detection method. The spectrometer comprises: a ring flange on which a plurality of detection lens groups are uniformly installed; a laser device arranged at the center of the ring flange; a laser device The emitting end of the detection lens group and the light-incoming end of the detection lens group are both facing the measured object; the light-emitting end of the detection lens group is provided with a connecting fiber, and the ends of the connecting fiber are combined into a fiber bundle, and the fiber bundle is connected to the spectrum detector; after the laser emits laser light, it will be The measured object induces a plasma state substance, and the light radiated during the energy level transition process is received by multiple detection lens groups on the ring flange, and transmitted to the spectral detector through the connecting optical fiber and optical fiber bundle. The invention can not only solve the problem of selecting the receiving angle, but also enhance the signal energy finally entering the spectral detector through multi-channel, thereby improving the signal-to-noise ratio.
Description
技术领域technical field
本发明属于光学探测技术领域，涉及一种多通道激光诱导击穿光谱仪及多通道光谱探测方法。The invention belongs to the technical field of optical detection, and relates to a multi-channel laser-induced breakdown spectrometer and a multi-channel spectral detection method.
背景技术Background technique
传统的激光诱导击穿光谱仪使用光谱探测器作为探测器进行探测，在其前面只有一组收集透镜和光纤。其缺点是，如果入射激光激发的离子态物质没有向收集透镜方向行进，或者偏离了一定方向，则探测器难以探测到较强的信号。偏离方向越大，有效信号越弱，信噪比越低。当偏离方向大于一定角度，则有用信号可能会淹没到噪声中。Traditional laser-induced breakdown spectroscopy uses a spectral detector as a detector for detection, and there is only a set of collection lenses and optical fibers in front of it. Its disadvantage is that if the ionic substances excited by the incident laser do not travel to the direction of the collecting lens, or deviate from a certain direction, it is difficult for the detector to detect a strong signal. The larger the deviation direction, the weaker the effective signal and the lower the signal-to-noise ratio. When the deviation direction is greater than a certain angle, the useful signal may be submerged in the noise.
现有的改进技术在传统结构基础上采用了旋转收集透镜的方案来解决这一问题，即在收集透镜下方安装一个以被测物质为圆心的旋转轴，带动收集透镜去找有用的探测信号。其缺点是：由于激光诱导之后产生的等离子态物质存在时间非常短，属于微秒级，而一般由电机带动的转动轴的旋转速度是秒级，所以这种转动方式根本来不及找寻有用信号，改进效果并不理想。The existing improved technology adopts the scheme of rotating the collection lens on the basis of the traditional structure to solve this problem, that is, a rotating shaft with the measured substance as the center is installed under the collection lens to drive the collection lens to find useful detection signals. Its disadvantage is that the existence time of the plasma state substances generated after laser induction is very short, belonging to the microsecond level, while the rotation speed of the rotating shaft driven by the motor is generally in the second level, so this rotation method has no time to find useful signals at all. The effect is not ideal.
发明内容Contents of the invention
(一)发明目的(1) Purpose of the invention
本发明的目的是：基于光纤的多通道探测模式，设计一种多通道激光诱导击穿光谱仪及多通道光谱探测方法，解决激光诱导击穿和光谱探测时的角度调整问题，同时可以并行探测辐射光谱，以增强信噪比。The purpose of the present invention is to design a multi-channel laser-induced breakdown spectrometer and multi-channel spectral detection method based on the multi-channel detection mode of optical fiber, to solve the problem of angle adjustment during laser-induced breakdown and spectral detection, and to detect radiation in parallel spectrum to enhance the signal-to-noise ratio.
(二)技术方案(2) Technical solution
为了解决上述技术问题，本发明提供一种多通道激光诱导击穿光谱仪，其包括：圆环法兰4，其上均匀安装多个探测透镜组2；激光器1，设置在圆环法兰4的中心；激光器1的发射端和探测透镜组2的入光端均朝向被测物体；探测透镜组2的出光端设置连接光纤3，连接光纤3末端合束为光纤束6，光纤束6连接光谱探测器；激光器1发出激光后，将被测物体诱导出等离子态物质，其能级跃迁过程中辐射出的光通过圆环法兰4上的多个探测透镜组2接收，经由连接光纤3和光纤束6传送至光谱探测器。In order to solve the above technical problems, the present invention provides a multi-channel laser-induced breakdown spectrometer, which includes: a ring flange 4, on which a plurality of detection lens groups 2 are uniformly installed; Center; the emitting end of the laser 1 and the light-incoming end of the detection lens group 2 are both facing the measured object; the light-emitting end of the detection lens group 2 is provided with a connecting optical fiber 3, and the ends of the connecting optical fiber 3 are bundled into an optical fiber bundle 6, and the optical fiber bundle 6 is connected to the spectrum Detector; after the laser 1 emits laser light, the measured object is induced into a plasma state substance, and the light radiated during the energy level transition process is received by a plurality of detection lens groups 2 on the ring flange 4, and connected through the connecting optical fiber 3 and The fiber optic bundle 6 is delivered to the spectroscopic detector.
其中，每一个所述探测透镜组2包括：透镜8和与其匹配的圆筒形机械件7，透镜8封装在圆筒形机械件7内，然后整体固定到圆环法兰4的孔位中。Wherein, each of the detection lens groups 2 includes: a lens 8 and a matching cylindrical mechanical part 7, the lens 8 is packaged in the cylindrical mechanical part 7, and then integrally fixed in the hole of the ring flange 4 .
其中，所述光纤3的头部由圆筒形机械件7的出光端伸入圆筒形机械件7内，光纤3的头部端面位置为透镜2的成像点。Wherein, the head of the optical fiber 3 extends into the cylindrical mechanical part 7 from the light-emitting end of the cylindrical mechanical part 7 , and the position of the end surface of the head of the optical fiber 3 is the imaging point of the lens 2 .
其中，所述圆筒形机械件7的入光端设置可移动的光阑9，通过光阑9的移入移出实现该光束通道的关闭和开启。Wherein, the light incident end of the cylindrical mechanical part 7 is provided with a movable diaphragm 9, and the closing and opening of the beam passage can be realized by moving the diaphragm 9 in and out.
其中，所述激光器1的出光端设有准直镜头；同时激光器1连接有控制器，用于调节激光功率大小。Wherein, the light output end of the laser 1 is provided with a collimating lens; at the same time, the laser 1 is connected with a controller for adjusting the laser power.
其中，所述探测透镜组设置有16个。Wherein, there are 16 detection lens groups.
其中，所述激光器1上设置电源线缆5，用于连接激光器电源。Wherein, the laser 1 is provided with a power cable 5 for connecting the laser power.
本发明还提供一种基于上述任一项多通道激光诱导击穿光谱仪的多通道光谱探测方法，其包括以下步骤：The present invention also provides a multi-channel spectral detection method based on any of the above-mentioned multi-channel laser-induced breakdown spectrometers, which includes the following steps:
S1：制定测量序列，设定激光器的激光入射时间点t11、激光停止入射时间点t12、光纤背景噪声的开始采集时间点t21和停止采集时间点t22，光纤信号的开始采集时间点t31和停止采集时间点t32；S1: Make a measurement sequence, set the laser incident time point t11, the laser stop incident time point t12, the fiber background noise start collection time point t21 and stop collection time point t22, the fiber signal signal start collection time point t31 and stop collection time point Time point t32;
S2：将多个探测透镜组平均分组，形成交替的若干个小组，选择某一小组探测透镜组对应通道的光阑为打开状态，关闭其它小组探测透镜组对应通道前面的光阑；S2: group multiple detection lens groups on average to form several alternate groups, select the diaphragm corresponding to the channel of a certain detection lens group to open, and close the diaphragms in front of the channels corresponding to the detection lens groups of other groups;
S3：运行测量序列，在预设的t11时间点将激光入射到被测样品表面，并在预设的t12时间点停止激光入射；S3: Run the measurement sequence, inject the laser light onto the surface of the sample to be measured at the preset time point t11, and stop the laser incident at the preset time point t12;
S4：在预设的t21时间点开启探测器采集光纤背景噪声，在t22时间点停止采集，并记录第i组噪声信号Ni；S4: Turn on the detector at the preset time point t21 to collect the optical fiber background noise, stop collecting at the time point t22, and record the noise signal Ni of the i group;
S5：在预设的t31时间点开启探测器采集光纤信号，在t32时间点停止采集，记录第i组光谱信息SPi；计算SNRi＝SPi/Ni，如果SNRi<1.2，则剔除该组数据，否则该信号认定为有用信号，并标记为第j个有用信号SPj；S5: Turn on the detector at the preset time point t31 to collect optical fiber signals, stop collecting at the time point t32, and record the i-th group of spectral information SPi; calculate SNRi=SPi/Ni, if SNRi<1.2, remove this group of data, otherwise The signal is identified as a useful signal and marked as the jth useful signal SPj;
S6：重复步骤S2-S5，获得n个有用信号，有用信号序列表示为SPj，j＝1……n，并计算总的有用信号 S6: Repeat steps S2-S5 to obtain n useful signals, the useful signal sequence is expressed as SP j , j=1...n, and calculate the total useful signals
S7：根据有用信号的通道标号记录，开启相应的通道前面的光阑，测量总信号SP0；S7: According to the channel label record of the useful signal, open the diaphragm in front of the corresponding channel, and measure the total signal SP 0 ;
S8：计算最终的有效光谱信号为SP＝(SP0+SPc)/2。S8: Calculate the final effective spectral signal as SP=(SP 0 +SP c )/2.
(三)有益效果(3) Beneficial effects
上述技术方案所提供的多通道激光诱导击穿光谱仪及多通道光谱探测方法，圆环法兰中心激光器发出激光后，将被测物体诱导出等离子态物质，其能级跃迁过程中辐射出的光通过圆环法兰上等距分布的多个探测透镜组接收，既可以解决接收角度的选择问题，也可以通过多通道方式增强最终进入光谱探测器的信号能量，从而提高了信噪比。In the multi-channel laser-induced breakdown spectrometer and multi-channel spectral detection method provided by the above technical solution, after the ring flange center laser emits laser light, the measured object is induced into a plasma state substance, and the light radiated during the energy level transition process Receiving through multiple detection lens groups equidistantly distributed on the ring flange can not only solve the problem of selecting the receiving angle, but also enhance the signal energy that finally enters the spectrum detector through multi-channel, thereby improving the signal-to-noise ratio.
附图说明Description of drawings
图1为本发明实施例多通道激光诱导击穿光谱仪的结构示意图。Fig. 1 is a schematic structural diagram of a multi-channel laser-induced breakdown spectrometer according to an embodiment of the present invention.
图2为图1中多通道激光诱导击穿光谱仪的另一观测角度示意图。Fig. 2 is a schematic diagram of another observation angle of the multi-channel laser-induced breakdown spectrometer in Fig. 1 .
图3为探测透镜组2的结构示意图。FIG. 3 is a schematic structural diagram of the detection lens group 2 .
图4为多通道光谱探测方法中探测透镜组的分组示意图。Fig. 4 is a schematic diagram of grouping of detection lens groups in the multi-channel spectral detection method.
图中：1-激光器；2-探测透镜组；3-连接光纤；4-圆环法兰；5-电源线缆；6-光纤束；7-圆筒形机械件，8-透镜，9-光阑。In the figure: 1-laser; 2-detection lens group; 3-connecting optical fiber; 4-circular flange; 5-power cable; 6-fiber bundle; 7-cylindrical mechanical parts, 8-lens, 9- aperture.
具体实施方式Detailed ways
为使本发明的目的、内容和优点更加清楚，下面结合附图和实施例，对本发明的具体实施方式作进一步详细描述。In order to make the purpose, content and advantages of the present invention clearer, the specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
参照图1和图2所示，本实施例多通道激光诱导击穿光谱仪包括：圆环法兰4，其上均匀安装多个探测透镜组2；激光器1，设置在圆环法兰4的中心；激光器1的发射端和探测透镜组2的入光端均朝向被测物体；探测透镜组2的出光端设置连接光纤3，连接光纤3末端合束为光纤束6，光纤束6连接光谱探测器；激光器1发出激光后，将被测物体诱导出等离子态物质，其能级跃迁过程中辐射出的光通过圆环法兰4上的多个探测透镜组2接收，经由连接光纤3和光纤束6传送至光谱探测器。Referring to Figures 1 and 2, the multi-channel laser-induced breakdown spectrometer of this embodiment includes: a ring flange 4 on which a plurality of detection lens groups 2 are evenly mounted; a laser 1 arranged at the center of the ring flange 4 The emitting end of the laser 1 and the light-incoming end of the detection lens group 2 are both facing the measured object; the light-emitting end of the detection lens group 2 is provided with a connecting optical fiber 3, and the ends of the connecting optical fiber 3 are bundled into an optical fiber bundle 6, and the optical fiber bundle 6 is connected to the spectrum detection After the laser 1 emits laser light, the measured object is induced into a plasma state substance, and the light radiated during the energy level transition process is received by a plurality of detection lens groups 2 on the ring flange 4, and connected through the optical fiber 3 and the optical fiber Beam 6 is passed to a spectroscopic detector.
其中，激光器1上设置电源线缆5，用于连接激光器电源。Wherein, a power cable 5 is provided on the laser 1 for connecting the power of the laser.
圆环法兰4上所设置的探测透镜组2的个数N是根据需要探测的视场的大小S、探测的空间分辨率n以及探测透镜组的大小s选择的。The number N of detection lens groups 2 arranged on the ring flange 4 is selected according to the size S of the field of view to be detected, the spatial resolution n of detection and the size s of the detection lens group.
N∝(S*n/s)N∝(S*n/s)
图1和图2中示出了16个探测透镜组的多通道激光诱导击穿光谱仪的结构示意图。Fig. 1 and Fig. 2 show a schematic structural diagram of a multi-channel laser-induced breakdown spectrometer with 16 detection lens groups.
每一个探测透镜组2包括：透镜8和与其匹配的圆筒形机械件7，透镜8封装在圆筒形机械件7内，然后整体固定到圆环法兰4的孔位中，如图3所示。光纤3的头部由圆筒形机械件7的出光端伸入圆筒形机械件7内，光纤3的头部端面位置为透镜2的成像点。Each detection lens group 2 includes: a lens 8 and a matching cylindrical mechanical part 7, the lens 8 is packaged in the cylindrical mechanical part 7, and then integrally fixed in the hole of the ring flange 4, as shown in Figure 3 shown. The head of the optical fiber 3 extends into the cylindrical mechanical part 7 from the light-emitting end of the cylindrical mechanical part 7 , and the position of the end surface of the head of the optical fiber 3 is the imaging point of the lens 2 .
圆筒形机械件7的入光端设置可移动的光阑9，通过光阑9的移入移出决定该通道是否收集光信号，图3中所示位置为关闭光束通道，沿图中箭头移出则为开启光束通道。The light-incoming end of the cylindrical mechanical part 7 is provided with a movable diaphragm 9, and whether the channel collects optical signals is determined by moving in and out of the diaphragm 9. The position shown in Figure 3 is to close the beam channel. To open the beam channel.
激光器1带有准直镜头，同时激光器1的控制器具有调节激光功率大小的功能，在满足这两个条件时，激光器的位置只需满足在圆环法兰中心轴线上即可。The laser 1 has a collimating lens, and the controller of the laser 1 has the function of adjusting the laser power. When these two conditions are met, the position of the laser only needs to be on the central axis of the ring flange.
基于上述多通道激光诱导击穿光谱仪，本发明还提供一种多通道光谱探测方法，用于对被测物体中元素及含量进行测量。Based on the above-mentioned multi-channel laser-induced breakdown spectrometer, the present invention also provides a multi-channel spectral detection method for measuring elements and their content in the measured object.
使用多通道激光诱导击穿光谱仪进行多通道光谱探测时，整个仪器由统一的测量序列进行控制，按照预先制定好的时序进行工作，具体包括以下步骤：When using a multi-channel laser-induced breakdown spectrometer for multi-channel spectral detection, the entire instrument is controlled by a unified measurement sequence and works according to a pre-established sequence, including the following steps:
S1：制定测量序列，设定激光器的激光入射时间点t11、激光停止入射时间点t12、光纤背景噪声的开始采集时间点t21和停止采集时间点t22，光纤信号的开始采集时间点t31和停止采集时间点t32；S1: Make a measurement sequence, set the laser incident time point t11, the laser stop incident time point t12, the fiber background noise start collection time point t21 and stop collection time point t22, the fiber signal signal start collection time point t31 and stop collection time point Time point t32;
S2：将多个探测透镜组平均分组，形成交替的若干个小组，选择某一小组探测透镜组对应通道的光阑为打开状态，关闭其它小组探测透镜组对应通道前面的光阑。S2: Group a plurality of detection lens groups on average to form several alternate groups, select the diaphragm corresponding to the channel of a certain detection lens group to open, and close the diaphragms in front of the channels corresponding to the detection lens groups of other groups.
以16个探测透镜组为例，将其分成4小组，交替分组，如图4所示，选择某一组通道的光阑为打开状态，关闭其它组通道前面的光阑。即只保留第i组通道的光阑通光进行测量。Taking 16 detection lens groups as an example, divide them into 4 groups and group them alternately, as shown in Figure 4, select the diaphragm of a certain group of channels to open, and close the diaphragms in front of the channels of other groups. That is, only the i-th group of channels is reserved for measurement.
S3：运行测量序列，在预设的t11时间点将激光入射到被测样品表面，并在预设的t12时间点停止激光入射；S3: Run the measurement sequence, inject the laser light onto the surface of the sample to be measured at the preset time point t11, and stop the laser incident at the preset time point t12;
S4：在预设的t21时间点开启探测器采集光纤背景噪声，在t22时间点停止采集，并记录第i组噪声信号Ni；S4: Turn on the detector at the preset time point t21 to collect the optical fiber background noise, stop collecting at the time point t22, and record the noise signal Ni of the i group;
S5：在预设的t31时间点开启探测器采集光纤信号，在t32时间点停止采集，记录第i组光谱信息SPi。计算SNRi＝SPi/Ni，如果SNRi<1.2，则剔除该组数据。否则该信号可以认定为有用信号，并标记为第j个有用信号SPj；S5: Turn on the detector at the preset time point t31 to collect optical fiber signals, stop collecting at the time point t32, and record the i-th group of spectral information SPi. Calculate SNRi=SPi/Ni, if SNRi<1.2, delete this group of data. Otherwise, the signal can be identified as a useful signal and marked as the jth useful signal SP j ;
S6：重复步骤S2-S5，获得n个有用信号，有用信号序列表示为SPj(j＝1……n)，并计算总的有用信号 S6: Repeat steps S2-S5 to obtain n useful signals, the useful signal sequence is expressed as SPj (j=1...n), and calculate the total useful signal
S7：根据有用信号的通道标号记录，开启相应的通道前面的光阑，测量总信号SP0；S7: According to the channel label record of the useful signal, open the diaphragm in front of the corresponding channel, and measure the total signal SP 0 ;
S8：计算最终的有效光谱信号为SP＝(SP0+SPc)/2。S8: Calculate the final effective spectral signal as SP=(SP 0 +SP c )/2.
上述技术方案中，采用阵列收集透镜的方式，圆环法兰中心激光器发出激光后，将被测物体诱导出等离子态物质，其能级跃迁过程中辐射出的光通过圆环法兰上等距分布的多个探测透镜组接收，既可以解决接收角度的选择问题，也可以通过多通道方式增强最终进入光谱探测器的信号能量，从而提高了信噪比。In the above technical solution, the array collecting lens is adopted, and after the central laser of the ring flange emits laser light, the measured object is induced into a plasma state substance, and the light radiated during its energy level transition passes through the equidistant The distribution of multiple detection lens groups can not only solve the problem of selection of the receiving angle, but also enhance the signal energy that finally enters the spectrum detector through multi-channel, thereby improving the signal-to-noise ratio.
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明技术原理的前提下，还可以做出若干改进和变形，这些改进和变形也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, and it should be pointed out that for those of ordinary skill in the art, without departing from the technical principle of the present invention, some improvements and modifications can also be made. It should also be regarded as the protection scope of the present invention.
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